CN105336876A - Packaging system and packing method for sealed glass packaging body through laser - Google Patents
Packaging system and packing method for sealed glass packaging body through laser Download PDFInfo
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- CN105336876A CN105336876A CN201410367503.2A CN201410367503A CN105336876A CN 105336876 A CN105336876 A CN 105336876A CN 201410367503 A CN201410367503 A CN 201410367503A CN 105336876 A CN105336876 A CN 105336876A
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 191
- 239000011521 glass Substances 0.000 title claims abstract description 101
- 238000000034 method Methods 0.000 title claims abstract description 81
- 238000012856 packing Methods 0.000 title claims abstract description 69
- 238000007789 sealing Methods 0.000 claims description 76
- 239000000087 laser glass Substances 0.000 claims description 72
- 238000005538 encapsulation Methods 0.000 claims description 51
- 230000003068 static effect Effects 0.000 claims description 20
- 230000000737 periodic effect Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 4
- 238000010257 thawing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 10
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 230000001360 synchronised effect Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012536 packaging technology Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- 206010063493 Premature ageing Diseases 0.000 description 1
- 208000032038 Premature aging Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
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- 238000007493 shaping process Methods 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
Abstract
The invention provides a packaging system and a packing method for a sealed glass packaging body through a laser. Laser emitted from the laser is projected to a to-be-packaged sealed glass packaging body through a laser scanning unit for heating the to-be-packaged sealed glass packaging body; the laser can rapidly and periodically scan for realizing a quasi-synchronous packaging effect and for fulfilling the purpose of achieving high temperature field uniformity and high productivity; meanwhile, the diversified packaging patterns are realized; further more, a portal frame can be provided with one or more laser scanning units, and the portal frame can drive the laser scanning units to move in a stepping manner for performing regional packaging for the large-sized to-be-packaged sealed glass packaging body, or for packaging multiple to-be-packaged sealed glass packaging bodies at the same time, so that the productivity is greatly improved.
Description
Technical field
The present invention relates to OLED encapsulation field, particularly relate to a kind of package sealing with laser glass packages package system and method for packing.
Background technology
In recent years, OLED (OrganicLight-EmittingDiode, Organic Light Emitting Diode) with its self-luminous, structure is simple, ultra-thin, fast response time, color contrast are high, wide viewing angle, low-power consumption and can realize the excellent specific properties such as Flexible Displays, has become an important development direction of flat panel display and lighting field.For OLED, the intrusion of isolating exterior oxygen and steam is especially important, because the infiltration of steam and oxygen, the effects such as the oxidation of OLED inner cathode, demoulding, organic layer crystallization can be caused, cause device premature aging and even damage, common phenomenon is exactly stain, pixel contraction (pixelshrinkage) and light intensity decays.According to the standard of industry, commercialization OLED product at least must reach working life 10,000 hour, storage life at least 50,000 hour, this just requires that water vapor permeable rate (WVTR) is less than 10-6g/m2/day, oxygen penetration rate (OTR) is less than 10-5cc/bar/m2/day, for the real permeability of water oxygen higher than LCD (LiquidCrystalDisplay, liquid crystal display), thus encapsulate the process technique of OLED element and the exploitation of encapsulating material, in whole OLED technology, occupy critical critical role.
OLED encapsulation technology known at present mainly contains three classes, respectively: the sealing of UV glue sealing cover type, thin-film package, frit package sealing with laser.Wherein, frit package sealing with laser is a kind of OLED packaging technology newly developed.Its general principle is: in encapsulation process, by the light path system of speculum, lens or optical fiber composition, the light beam that laser produces is focused on region to be packaged, forms heat effect district; Encapsulation solder in heat effect district---frit (FRIT) is softened fusing and its upper and lower two glass substrates is bonded together, and forms gas-tight seal.
The current technic relization scheme for LASER HEATING frit encapsulation OLED is order all line sweeps encapsulation and synchronous encapsulation.So-called sequence type week line sweep encapsulation, refer to that laser beam after shaping is with certain power distribution vertical focusing and along the FRIT outline line relative motion to be packaged of precuring and run-down, order is by heated at various points on FRIT outline line to FRIT softening point temperature, and cooling bonding completes encapsulation successively.But there is frit and to be heated uneven characteristic in the line sweep encapsulation of sequence type week, packaging effect is not good.
So-called synchronous encapsulation, refer to that be encapsulate the consistent two-dimension optical pattern of outline line with FRIT by splicing or spatial light modulator (as DOE or MMA etc.) by laser beam reshaping, and be covered on the outline line of whole encapsulated layer, make whole FRIT encapsulate outline line to be subsequently heated to softening point temperature, and then cooling is bonded together encapsulation.But the packaging technology of synchronous encapsulation is comparatively loaded down with trivial details, realize comparatively difficulty, and productive rate is lower.
Summary of the invention
Package sealing with laser glass packages package system and method for packing the object of the present invention is to provide one, can improve the uniformity in temperature field and improve productive rate.
To achieve these goals, the present invention proposes a kind of package sealing with laser glass packages package system, comprise: laser, portal frame and laser scan unit, wherein, described laser scan unit is arranged on described portal frame, and described laser is sent laser and is projected on seal glass packaging body to be packaged by described laser scan unit.
Further, in described package sealing with laser glass packages package system, described laser is CO2 laser.
Further, in described package sealing with laser glass packages package system, the laser wavelength range that described laser sends is 800nm ~ 900nm, and its operating power range is 100W ~ 500W.
Further, in described package sealing with laser glass packages package system, described laser is connected with described laser scan unit by optical fiber.
Further, in described package sealing with laser glass packages package system, described laser scan unit is mirror-vibrating laser scanning element, comprise speculum, scan module and servo drive unit, wherein servo drive unit sends deflection angle signal to described scan module, and described scan module controls described speculum and carries out angular deflection.
Further, in described package sealing with laser glass packages package system, described mirror deflecting angle scope is +/-20 °.
Further, in described package sealing with laser glass packages package system, described portal frame can drive described laser scan unit planar to move freely.
Further, in described package sealing with laser glass packages package system, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, and described portal frame is provided with a mirror-vibrating laser scanning element.
Further, in described package sealing with laser glass packages package system, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, and described portal frame is provided with multiple mirror-vibrating laser scanning element.
The invention allows for a kind of package sealing with laser glass packages method for packing, adopt package sealing with laser glass packages package system mentioned above, heat the frit of seal glass packaging body to be packaged, form gas-tight seal, described method comprises step:
The laser that described laser sends is projected by described laser scan unit and covers on the packaging line of seal glass packaging body to be packaged;
Described laser scan unit or portal frame is used to control laser direction, make laser in the enterprising line period scanning of described packaging line, the glass dust at packaging line place is heated, until its thawing makes the top glass substrate of seal glass packaging body to be packaged and lower glass substrate be bonded together, form bubble-tight seal glass packaging body.
Further, in described package sealing with laser glass packages method for packing, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, adopts single galvanometer region method for packing to encapsulate.
Further, in described package sealing with laser glass packages method for packing, described single galvanometer region method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area;
When encapsulating one of them packaging area, described portal frame keeps static, and described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area;
After encapsulating described packaging area, described portal frame drives described laser scan unit to move to next packaging area, carries out periodic scan, until all encapsulate complete by described seal glass packaging body to be packaged.
Further, in described package sealing with laser glass packages method for packing, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, adopts portal frame to drive the mode of laser beam scanning to encapsulate.
Further, in described package sealing with laser glass packages method for packing, described method for packing comprises step:
When encapsulating a seal glass packaging body to be packaged, while described portal frame carries out movement along the top plane of described packaging line, described laser beam carries out periodic scan according to projected path and speed to described packaging line, until all encapsulate complete by described seal glass packaging body to be packaged.
Further, in described package sealing with laser glass packages method for packing, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers method for packing to encapsulate.
Further, in described package sealing with laser glass packages method for packing, described many galvanometers method for packing comprises step:
Described seal glass packaging body to be packaged is that multiple being arranged into is arranged more, and multiple mirror-vibrating laser scanning element and described seal glass packaging body one_to_one corresponding to be packaged, cover described seal glass packaging body to be packaged respectively;
Described portal frame keeps static, and multiple described laser scan unit rotates, and makes described laser carry out periodic scan to described packaging line respectively according to projected path and speed, forms bubble-tight seal glass packaging body.
Further, in described package sealing with laser glass packages method for packing, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers static region method for packing to encapsulate.
Further, in described package sealing with laser glass packages method for packing, described many galvanometers static region method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area, and described mirror-vibrating laser scanning element and described packaging area one_to_one corresponding, cover described packaging area respectively;
When encapsulating, described portal frame keeps static, multiple described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area, completes the encapsulation to seal glass packaging body to be packaged;
After encapsulating described seal glass packaging body to be packaged, described portal frame drives described laser scan unit to move to seal glass packaging body next to be packaged, encapsulates.
Further, in described package sealing with laser glass packages method for packing, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers dynamic area method for packing to encapsulate.
Further, in described package sealing with laser glass packages method for packing, described many galvanometers dynamic area method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area, and described packaging area is divided into many rows, and described mirror-vibrating laser scanning element and a wherein packaging area one_to_one corresponding arranged, cover the packaging area of this row respectively;
When encapsulating this row's packaging area, described portal frame keeps static, and multiple described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area;
After to the encapsulation of this row's packaging area, described portal frame carries out stepping, drives described laser scan unit to move to next row packaging area and encapsulates, until by complete for whole described seal glass packaging body to be packaged encapsulation.
Compared with prior art, beneficial effect of the present invention is mainly reflected in: the laser that laser sends is projected on seal glass packaging body to be packaged by laser scan unit and heats, described laser can carry out fast periodic scanning, the effect of accurate synchronous encapsulation can be realized, the object reaching uniformity and the productive rate improving temperature field realizes the variation of encapsulation pattern, meanwhile.
Further, portal frame can arrange one or more laser scan unit, and can stepping drive laser scan unit to move, region encapsulation can be carried out to the seal glass packaging body that large scale is to be packaged, or realize encapsulating multiple seal glass packaging body to be packaged simultaneously, improve productive rate greatly.
Accompanying drawing explanation
Fig. 1 is the structural representation of package sealing with laser glass packages package system in the embodiment of the present invention one;
Fig. 2 is the structure cutaway view of package sealing with laser glass packages package system in the embodiment of the present invention one;
Fig. 3 is seal glass packaging body vertical view to be packaged in the embodiment of the present invention one;
Fig. 4 is the light path schematic diagram of laser in laser scan unit in the embodiment of the present invention one;
Fig. 5 is the structural representation adopting single galvanometer region method for packing in the embodiment of the present invention two;
Fig. 6 a to Fig. 6 b is the structural representation adopting single vibration mirror scanning method for packing in the embodiment of the present invention three;
Fig. 7 is the structural representation adopting many galvanometers method for packing in the embodiment of the present invention four;
Fig. 8 is the vertical view of the seal glass packaging body that in the embodiment of the present invention four, many rows are to be packaged;
Fig. 9 is the structural representation adopting many galvanometers static region method for packing in the embodiment of the present invention five;
Figure 10 is the structural representation adopting many galvanometers dynamic area method for packing in the embodiment of the present invention six.
Embodiment
Below in conjunction with schematic diagram, art technology people be should be appreciated that to package sealing with laser glass packages package system of the present invention and method for packing, which show the preferred embodiments of the present invention, be described in more detail following retouching, therefore.And still realizing advantageous effects of the present invention, member can revise the present invention described here and not as limitation of the present invention, states and is appreciated that extensively knowing for those skilled in the art.
Be not described in detail public affairs, in the following description.Do not describe whole features of practical embodiments, will be understood that in order to clear.Because they can make the present invention chaotic due to unnecessary details, the function and structure known, the specific objective of existing developer must make a large amount of implementation detail with reality, another in the exploitation of any practical embodiments.Change into another embodiment by an embodiment, such as, according to regarding system or about the restriction of business is still for art technology people, will be understood that this development may be complicated and time-consuming, outward.Member is only routine work
According to the following describes and.In the following passage, more specifically describe accompanying drawing of the present invention by way of example with reference to accompanying drawing all adopts very simple, it should be noted that.Advantages and features of the invention will be clearer, claims lucidly the aid illustration embodiment of the present invention, only in order to convenient, the form of change and all use non-ratio accurately.Object
Embodiment one
Please refer to Fig. 1 to Fig. 4, in the present embodiment, propose a kind of light seal glass packaging body package system, comprise: laser 1, portal frame 3 and laser scan unit 4, wherein, described laser scan unit 4 is arranged on described portal frame 3, and described laser 1 is sent laser and is projected on seal glass packaging body to be packaged by described laser scan unit 4.
In the present embodiment, described laser 1 is CO2 laser, is connected with described laser scan unit 4 by optical fiber 2, laser 7 wave-length coverage that described laser 1 sends is 800nm ~ 900nm, be such as 850nm, its operating power range is 100W ~ 500W, such as, be 300W; Described laser scan unit 4 is mirror-vibrating laser scanning element, comprise speculum 4 ' (as shown in Figure 4), scan module and servo drive unit (Fig. 4 is not shown), wherein servo drive unit sends deflection angle signal to described scan module, described scan module controls described speculum 4 ' and carries out angular deflection, make laser 7 can carry out periodic scan along frit 10, described speculum 4 ' range of deflection angles is +/-20 °, such as, be 15 °; Described portal frame 3 can be used for hanging lens vibrating type laser scanning system, described laser scan unit 4 can be driven planar to move freely, namely move freely along the X-direction in same plane and Y-direction.
Wherein, described laser scan unit 4 can rotate, when portal frame 3 is motionless, the overlayable frit packaging line 6 adding thermal window 5 scope and be greater than seal glass packaging body to be packaged of described laser scan unit 4, the laser 7 for heated frit effect reflected from speculum 4 ' after collimation, the circular light spot of the hot spot of laser 7 to be energy be flat-top distribution.
The general principle of accurate synchronous encapsulation, as depicted in figs. 1 and 2, in encapsulation process, by covering on the frit 10 of needs encapsulation to brigadier's hot spot, under the control of laser scan unit 4 pairs of laser 7 beam directions, hot spot can on packaging line 6 fast and periodically scan repeatedly, the constant temperature of frit 10 is heated to more than its softening point, stop heating, make upper and lower glass-based 8 just when cooling, by the solder of centre---glass dust 10 is firmly bonded together, thus formation airtight envelope, be encapsulated in airtight envelope by needing the OLED chip 9 of encapsulation, as shown in Figure 3.
Preferably, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, namely described portal frame 3 is provided with the laser scan unit 4 of a mirror-vibrating, or described assembling system package sealing with laser glass packages envelope is many lens vibrating type laser scanning systems, namely described portal frame 3 is provided with the laser scan unit 4 of multiple mirror-vibrating, to facilitate, large-sized packaging body is encapsulated, meet different process requirements, wherein, the number of the laser scan unit 4 of mirror-vibrating can be selected according to the size of packaging body, does not limit at this.
A kind of package sealing with laser glass packages method for packing is also proposed in the other one side of the present embodiment, adopt package sealing with laser glass packages package system as described above, heat the frit of seal glass packaging body to be packaged, form gas-tight seal, described method comprises step:
S100: the laser 7 that described laser 1 sends is projected by described laser scan unit 4 and covers on the packaging line 6 of seal glass packaging body to be packaged;
S200: use described laser scan unit 4 or portal frame 3 pairs of laser 7 directions to control, make laser 7 in the enterprising line period scanning of described packaging line 6, the glass dust 10 at packaging line 6 place is heated, until its thawing makes the upper lower glass substrate 8 of seal glass packaging body to be packaged be bonded together, form bubble-tight seal glass packaging body.
In the present embodiment, what adopt is single lens vibrating type laser scanning system, the to be packaged seal glass packaging body less to single size encapsulates, during encapsulation, the laser 7 that laser 2 sends is projected on seal glass packaging body to be packaged by laser scan unit 4 and heats, portal frame 3 is without the need to mobile or stepping, laser scan unit 4 quick rotation, laser 7 passes through scanning heating packaging line repeatedly according to the track set and speed and completes the encapsulation to a seal glass packaging body to be packaged for more than 6 time, thus realize the effect of accurate synchronous encapsulation, reach and improve the uniformity in temperature field and the object of productive rate.
Embodiment two
Please refer to 5, in the present embodiment, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, adopts single galvanometer region method for packing to encapsulate.Described single galvanometer region method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area, only demonstrates 2 packaging areas in Fig. 5, wherein adding thermal window 5 overallly can cover described multiple packaging area;
When encapsulating one of them packaging area, described portal frame 3 keeps static, and described laser scan unit 4 rotates, and makes described laser 7 carry out periodic scan according to projected path and speed to the packaging line in described packaging area;
After encapsulating described packaging area, described portal frame 3 drives described laser scan unit 4 along step direction, moves to next packaging area, carries out periodic scan, until all encapsulate complete by described seal glass packaging body to be packaged.
The single galvanometer region method for packing proposed in the present embodiment is relatively suitable in the occasion only adopting single lens vibrating type laser scanning system to encapsulate middle-sized seal glass packaging body to be packaged.
Embodiment three
In the present embodiment, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, single vibration mirror scanning method for packing and portal frame is adopted to drive the mode of laser beam scanning to encapsulate large scale seal glass packaging body, described single vibration mirror scanning method for packing is: when encapsulating a seal glass packaging body, described portal frame 3 along described packaging line 6 top planar movement while, according to projected path and speed, the frit 10 to described packaging line 6 place scans laser beam, until described seal glass packaging body to be packaged is all encapsulated complete.
As shown in Fig. 6 a, 6b, the galvanometer fast vibration in laser scan unit, to make laser beam rotate with certain angle and speed, forms and adds thermal window 5 in laser beam coverage.Laser beam scans according to projected path and speed the packaging line added in thermal window 5 repeatedly, simultaneously portal frame 3 moves the packaging line making to add thermal window 5 pairs of large-size glass packaging bodies and carries out slip scan, until all encapsulate complete by described seal glass packaging body to be packaged.
Being moved by portal frame 3 that the present embodiment proposes makes to add the method for packing of thermal window along packaging line slip scan, can encapsulate larger-size seal glass packaging body to be packaged fast.
Embodiment four
Please refer to Fig. 7 and Fig. 8, in the present embodiment, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers method for packing to encapsulate.Described many galvanometers method for packing comprises step:
Described seal glass packaging body to be packaged is that multiple being arranged into is arranged more, and multiple mirror-vibrating laser scanning element and described seal glass packaging body one_to_one corresponding to be packaged, cover described seal glass packaging body to be packaged respectively;
Described portal frame 3 keeps static, and multiple described laser scan unit 4 rotates, and makes described laser 7 carry out periodic scan to described packaging line respectively according to projected path and speed, forms bubble-tight seal glass packaging body.
Concrete, m laser scan unit 4 is arranged on portal frame 3 according to certain spacing, and its spacing can free adjustment and setting, described seal glass packaging body to be packaged is for lining up n row, often row has m, during encapsulation, portal frame 3 is without the need to mobile or stepping, multiple laser scan unit 4 quick rotation, every Shu Jiguang 7 is according to the track set and speed, by repeatedly scanning heating packaging line more than 6 time, m laser scan unit 4 can encapsulate m seal glass packaging body in same row simultaneously, thus the encapsulation simultaneously completed row m seal glass packaging body to be packaged, being moved by portal frame 3 drives all laser scan units 4 to step to next row packaging area again, repeat above-mentioned action, until by n row, all encapsulation is complete.
The many galvanometers method for packing adopting the present embodiment to propose, can carry out batch encapsulation fast, effectively raise packaging efficiency, the raising encapsulation productive rate of high degree.
Embodiment five
Please refer to Fig. 9, in the present embodiment, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers static region method for packing to encapsulate.Described many galvanometers static region method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area (only dividing 2 packaging areas in Fig. 9), and described mirror-vibrating laser scanning element and described packaging area one_to_one corresponding, cover described packaging area respectively;
When encapsulating, described portal frame 3 keeps static, multiple described laser scan unit 4 rotates, and makes described laser 7 carry out periodic scan according to projected path and speed to the packaging line in described packaging area, completes the encapsulation to seal glass packaging body to be packaged;
After encapsulating described seal glass packaging body to be packaged, described portal frame drives described laser scan unit to move to seal glass packaging body next to be packaged, encapsulates.
The many galvanometers static region method for packing proposed in the present embodiment encapsulates for large-sized seal glass packaging body to be packaged, keep portal frame 3 motionless, guarantee multiple described laser scan unit 4 (galvanometer, only illustrate 2 in fig .9) the thermal window 5 that adds stack up and all can cover the seal glass packaging body of described encapsulation, thus carry out encapsulating.
Embodiment six
Please refer to Figure 10, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers dynamic area method for packing to encapsulate.Described many galvanometers dynamic area method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area, and described packaging area is divided into many rows, and described mirror-vibrating laser scanning element and a wherein packaging area one_to_one corresponding arranged, cover the packaging area of this row respectively;
When encapsulating this row's packaging area, described portal frame keeps static, and multiple described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area;
After to the encapsulation of this row's packaging area, described portal frame carries out stepping, drives described laser scan unit to move to next row packaging area and encapsulates, until by complete for whole described seal glass packaging body to be packaged encapsulation.
Concrete, as shown in Figure 10, multiple laser scan unit 4 (galvanometer only illustrates N number of in Fig. 10) is arranged on portal frame 3 according to certain spacing, and its spacing can free adjustment and setting; During encapsulation, a large-sized packaging line 6 is divided in the x-direction the subdivision of more than 2 or 2, it is also such as N number of subdivision, portal frame 3 drive multiple laser scan unit 4 do stepping (or scanning, along step direction, i.e. y direction), multiple laser scan unit 4 quick rotation, the action of each laser scan unit 4 as technical scheme 4 or 5, until whole large-sized seal glass packaging body to be packaged is encapsulated complete completely.
Many galvanometers dynamic area method for packing that the present embodiment proposes, can encapsulate large-sized seal glass packaging body to be packaged, solves large-size glass encapsulation problem.
In the above embodiment that the present invention proposes, known, the package sealing with laser glass packages method for packing that the present invention proposes has the following advantages:
1, the encapsulation scene of sizes and multiple packaging line definition shape is applicable to;
2, the low-yield of all line sweeps encapsulation and low synchronism problem is solved;
3, based on the high-velocity scanning characteristic of galvanometer, its process window and productive rate are better than sequence type contour sweeping scheme;
4, flexibility and the programmability consistency synchronous with the temperature rise of synchronous encapsulation scheme of sequence type week line sweep has been had concurrently;
5, by means of field lens achromatism, can synchronous acquisition monitor encapsulation process, form closed loop thermal and control, be beneficial to process optimization to improve package quality;
6, can control to heat up and cold process excessively under the prerequisite of not sacrificing productive rate by the PLC technology of laser output power;
7, in encapsulation process, portal frame immobilizes relative to workpiece, only rotates galvanometer, reduces portal frame exercise performance demand;
8, stepping or the scanning of portal frame is worked in coordination with in many galvanometer combinations, can realize multiple encapsulation definition (cell) and encapsulate and the large demand encapsulating definition encapsulation simultaneously.
To sum up, in the package sealing with laser glass packages package system provided in the embodiment of the present invention and method for packing, the laser that laser sends is projected on seal glass packaging body to be packaged by laser scan unit and heats, described laser can carry out fast periodic scanning, the effect of accurate synchronous encapsulation can be realized, reach and improve the uniformity in temperature field and the object of productive rate, meanwhile, realize the variation of encapsulation pattern.Further, portal frame can arrange one or more laser scan unit, and can stepping drive laser scan unit to move, region encapsulation can be carried out to the seal glass packaging body that large scale is to be packaged, or realize encapsulating multiple seal glass packaging body to be packaged simultaneously, improve productive rate greatly.
Above are only the preferred embodiments of the present invention, any restriction is not played to the present invention.Any person of ordinary skill in the field; in the scope not departing from technical scheme of the present invention; the technical scheme disclose the present invention and technology contents make the variations such as any type of equivalent replacement or amendment; all belong to the content not departing from technical scheme of the present invention, still belong within protection scope of the present invention.
Claims (20)
1. package sealing with laser glass packages package system one, comprise: laser, portal frame and laser scan unit, wherein, described laser scan unit is arranged on described portal frame, and described laser is sent laser and is projected on seal glass packaging body to be packaged by described laser scan unit.
2. package sealing with laser glass packages package system as claimed in claim 1, it is characterized in that, described laser is CO2 laser.
3. package sealing with laser glass packages package system as claimed in claim 2, it is characterized in that, the laser wavelength range that described laser sends is 800nm ~ 900nm, and its operating power range is 100W ~ 500W.
4. system laser seal glass packaging body encapsulation as claimed in claim 2, it is characterized in that, described laser is connected with described laser scan unit by optical fiber.
5. package sealing with laser glass packages package system as claimed in claim 1, it is characterized in that, described laser scan unit is mirror-vibrating laser scanning element, comprise speculum, scan module and servo drive unit, wherein servo drive unit sends deflection angle signal to described scan module, and described scan module controls described speculum and carries out angular deflection.
6. package sealing with laser glass packages package system as claimed in claim 5, it is characterized in that, described mirror deflecting angle scope is +/-20 °.
7. package sealing with laser glass packages package system as claimed in claim 5, it is characterized in that, described portal frame can drive described laser scan unit planar to move.
8. package sealing with laser glass packages package system as claimed in claim 5, it is characterized in that, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, and described portal frame is provided with a mirror-vibrating laser scanning element.
9. package sealing with laser glass packages package system as claimed in claim 5, it is characterized in that, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, and described portal frame is provided with multiple mirror-vibrating laser scanning element.
10. a package sealing with laser glass packages method for packing, adopt as the package sealing with laser glass packages package system in claim 1 to claim 9 as described in any one, heat the frit of seal glass packaging body to be packaged, form gas-tight seal, described method comprises step:
The laser beam that described laser sends is projected by described laser scan unit and covers on the packaging line of seal glass packaging body to be packaged;
Described laser scan unit or portal frame is used to control laser direction, make laser beam in the enterprising line period scanning of described packaging line, the glass dust at packaging line place is heated, until its thawing makes the top glass substrate of seal glass packaging body to be packaged and lower glass substrate be bonded together, form bubble-tight seal glass packaging body.
11. package sealing with laser glass packages method for packing as claimed in claim 10, is characterized in that, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, adopt single galvanometer region method for packing to encapsulate.
12. package sealing with laser glass packages method for packing as claimed in claim 11, is characterized in that, described single galvanometer region method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area;
When encapsulating one of them packaging area, described portal frame keeps static, and described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area;
After encapsulating described packaging area, described portal frame drives described laser scan unit to move to next packaging area, carries out periodic scan, until all encapsulate complete by described seal glass packaging body to be packaged.
13. package sealing with laser glass packages method for packing as claimed in claim 10, is characterized in that, described package sealing with laser glass packages package system is single lens vibrating type laser scanning system, adopt portal frame to drive the mode of laser beam scanning to encapsulate.
14. package sealing with laser glass packages method for packing as claimed in claim 13, it is characterized in that, described method for packing comprises step:
When encapsulating a seal glass packaging body to be packaged, while described portal frame carries out movement along the top plane of described packaging line, described laser beam scans described packaging line according to projected path and speed, until all encapsulate complete by described seal glass packaging body to be packaged.
15. package sealing with laser glass packages method for packing as claimed in claim 10, is characterized in that, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopts many galvanometers method for packing to encapsulate.
16. packaging body method for packing package sealing with laser glass as claimed in claim 15, it is characterized in that, described many galvanometers method for packing comprises step:
Described seal glass packaging body to be packaged is that multiple being arranged into is arranged more, and multiple mirror-vibrating laser scanning element and described seal glass packaging body one_to_one corresponding to be packaged, cover described seal glass packaging body to be packaged respectively;
Described portal frame keeps static, and multiple described laser scan unit rotates, and makes described laser carry out periodic scan to described packaging line respectively according to projected path and speed, forms bubble-tight seal glass packaging body.
17. package sealing with laser glass packages method for packing as claimed in claim 10, is characterized in that, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopt many galvanometers static region method for packing to encapsulate.
18. package sealing with laser glass packages method for packing as claimed in claim 17, is characterized in that, described many galvanometers static region method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area, and described mirror-vibrating laser scanning element and described packaging area one_to_one corresponding, cover described packaging area respectively;
When encapsulating, described portal frame keeps static, multiple described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area, completes the encapsulation to seal glass packaging body to be packaged;
After encapsulating described seal glass packaging body to be packaged, described portal frame drives described laser scan unit to move to seal glass packaging body next to be packaged, encapsulates.
19. package sealing with laser glass packages method for packing as claimed in claim 10, is characterized in that, described package sealing with laser glass packages package system is many lens vibrating type laser scanning systems, adopt many galvanometers dynamic area method for packing to encapsulate.
20. package sealing with laser glass packages method for packing as claimed in claim 19, is characterized in that, described many galvanometers dynamic area method for packing comprises step:
A seal glass packaging body to be packaged is divided into multiple packaging area, and described packaging area is divided into many rows, and described mirror-vibrating laser scanning element and a wherein packaging area one_to_one corresponding arranged, cover the packaging area of this row respectively;
When encapsulating this row's packaging area, described portal frame keeps static, and multiple described laser scan unit rotates, and makes described laser carry out periodic scan according to projected path and speed to the packaging line in described packaging area;
After to the encapsulation of this row's packaging area, described portal frame carries out stepping, drives described laser scan unit to move to next row packaging area and encapsulates, until by complete for whole described seal glass packaging body to be packaged encapsulation.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410367503.2A CN105336876B (en) | 2014-07-29 | 2014-07-29 | Package sealing with laser glass packages package system and method for packing |
| JP2017504383A JP6433576B2 (en) | 2014-07-29 | 2015-05-27 | Laser sealing glass package packaging system and packaging method |
| PCT/CN2015/079905 WO2016015514A1 (en) | 2014-07-29 | 2015-05-27 | Packaging system and packaging method for laser-sealed glass package |
| KR1020177005593A KR20170039704A (en) | 2014-07-29 | 2015-05-27 | Packaging system and packaging method for laser-sealed glass package |
| SG11201700624WA SG11201700624WA (en) | 2014-07-29 | 2015-05-27 | Packaging system and packaging method for laser-sealed glass package |
| TW104117483A TWI623120B (en) | 2014-07-29 | 2015-05-29 | Laser sealed glass package packaging system and packaging method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410367503.2A CN105336876B (en) | 2014-07-29 | 2014-07-29 | Package sealing with laser glass packages package system and method for packing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105336876A true CN105336876A (en) | 2016-02-17 |
| CN105336876B CN105336876B (en) | 2017-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410367503.2A Active CN105336876B (en) | 2014-07-29 | 2014-07-29 | Package sealing with laser glass packages package system and method for packing |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP6433576B2 (en) |
| KR (1) | KR20170039704A (en) |
| CN (1) | CN105336876B (en) |
| SG (1) | SG11201700624WA (en) |
| TW (1) | TWI623120B (en) |
| WO (1) | WO2016015514A1 (en) |
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| CN105932175A (en) * | 2016-06-28 | 2016-09-07 | 京东方科技集团股份有限公司 | To-be-encapsulated substrate, encapsulating method, encapsulating structure and display device |
| CN106531905A (en) * | 2016-11-14 | 2017-03-22 | 电子科技大学 | Laser packaging device and method of organic electroluminescence device |
| CN107565061A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | Laser package system and method for packing |
| CN107799667A (en) * | 2016-08-30 | 2018-03-13 | 上海微电子装备（集团）股份有限公司 | Frit sealed in unit and its method for packing |
| CN108123052A (en) * | 2016-11-30 | 2018-06-05 | 上海微电子装备（集团）股份有限公司 | A kind of laser package apparatus and method |
| CN111400989A (en) * | 2018-12-29 | 2020-07-10 | 上海微电子装备（集团）股份有限公司 | Laser packaging path obtaining method, laser packaging method and laser packaging system |
| CN113382819A (en) * | 2018-12-28 | 2021-09-10 | Etxe-Tar有限公司 | Method and system for heating an object using an energy beam |
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| CN115463905B (en) * | 2022-10-25 | 2023-11-24 | 武汉锐科光纤激光技术股份有限公司 | Laser cleaning control system and method |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI623120B (en) | 2018-05-01 |
| SG11201700624WA (en) | 2017-03-30 |
| TW201605096A (en) | 2016-02-01 |
| CN105336876B (en) | 2017-08-29 |
| KR20170039704A (en) | 2017-04-11 |
| JP6433576B2 (en) | 2018-12-05 |
| JP2017530512A (en) | 2017-10-12 |
| WO2016015514A1 (en) | 2016-02-04 |
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