CN107565061A - Laser package system and method for packing - Google Patents

Laser package system and method for packing Download PDF

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Publication number
CN107565061A
CN107565061A CN201610510447.2A CN201610510447A CN107565061A CN 107565061 A CN107565061 A CN 107565061A CN 201610510447 A CN201610510447 A CN 201610510447A CN 107565061 A CN107565061 A CN 107565061A
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plumb joint
packaging line
package system
laser
joint
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CN201610510447.2A
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CN107565061B (en
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孙杰
徐文
贾俊伟
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

The present invention proposes a kind of laser package system and method for packing, first plumb joint and the second plumb joint are installed on the mobile device, and the first plumb joint and the second plumb joint can move along the track of packaging line, so as to realize that two plumb joints are packaged to packaging line, encapsulation yield is improved, reduces the waste of energy.

Description

Laser package system and method for packing
Technical field
The present invention relates to encapsulation field, more particularly to a kind of laser package system and method for packing.
Background technology
In recent years, OLED (Organic Light Emitting Diode, Organic Light-Emitting Diode) is with its self-luminous, knot Structure is simple, ultra-thin, and response speed is wide, color contrast is high, wide viewing angle, low-power and can realize the excellent spy such as Flexible Displays Property, it has also become an important development direction of FPD and lighting field.OLED mainly includes transparency carrier glass, TFT (thin film transistor (TFT)) active control array, motor layer, organic luminous layer and encapsulated layer etc..However, current OLED display screen Vapor and oxygen extreme sensitivity in used luminous organic material and electrode pair its surrounding environment, and because of its interaction Its deterioration is caused dim spot, and have a strong impact on its life-span.For this reason, it may be necessary to extremely harsh air-tight packaging is carried out to OLED:H2O <10-6g/m2/ day, O2<10-4cc/m2/day/atm.The frit encapsulation technology of laser assisted is airtight with its excellent encapsulation Property, the maturity and adaptability of cryogenic selective and packaging technology be as the preferred encapsulation work of current OLED glass-encapsulateds Skill.
At present, in terms of OLED laser package equipment patents, the LTS of South Korea possesses absolute technical advantage in the field, Its patent numbers possessed is the summation of the Samsung of second place healthy and free from worry (Corning) and third.It is special in equipment aspect to make a general survey of it Profit layout, its lay special stress on protecting equipment packages scheme for order contour scan or mask assist type order contour scanning, this also with Its commercialized product design scheme is consistent.The advantages of order contour scans is that its encapsulation track is flexible, can be applicable The encapsulation of arbitrary dimension, arbitrary shape CELL (unit) profile traces, and blocked by mask auxiliary, it can further improve encapsulation Track uniformity, it is accurate to control heat affected area scope, adapt to the fashion trend of narrow side design.But, the cause of order contour scanning Life shortcoming be that its narrow process window causes its typical package speed to be only 20mm/s, this mean that packaging time with The contour line girth linear increase of packaged glass glue (FRIT), cause equipment yield to turn into and restrict advanced lines (such as 5.5 generations) encapsulation The technical bottleneck of equipment Key Performance Indicator.Meanwhile in traditional order contour scanning, be scanned using single hot spot, In general, the laser energy of single hot spot is much not up to the gross energy of laser output, energy dissipation is thus caused, is dropped Low capacity usage ratio.And motion shafting would generally be increased by being scanned using more hot spots, control is more complicated, and in cost Increase again.
The content of the invention
It is an object of the invention to provide a kind of laser package system and method for packing, using two hot spot contour scanning lasers Encapsulation, motion shafting can not be increased and reach the purpose for improving yield and capacity usage ratio.
To achieve these goals, the present invention proposes a kind of laser package system, including:Portal frame, mobile device, One plumb joint and the second plumb joint;Wherein, the mobile device is arranged on the portal frame, and as the portal frame is the Move in one direction;First plumb joint and the second plumb joint are arranged in the mobile device, first plumb joint and the Two plumb joints can move along in second direction on the mobile device, what first plumb joint and the second plumb joint were launched Laser facula is radiated on packaging line, and is moved with the movement of the first plumb joint and the second plumb joint.
Further, in described laser package system, the mobile device is Bidirectional-screw, and half is left-handed spiral shell Line, second half is right-handed thread.
Further, in described laser package system, first plumb joint is located at the left hand thread, and described Two plumb joints are located at the right-handed thread.
Further, in described laser package system, the mobile device includes a unidirectional screw mandrel, the first connection Bar, the second connecting rod and sliding block, wherein, the head rod and the second connecting rod are arranged on the list by the sliding block To the both sides of leading screw.
Further, in described laser package system, first plumb joint and the second plumb joint include combination Mirror module, for laser facula to be exposed into packaging line.
Further, the laser facula that first plumb joint and the second plumb joint are launched has on the packaging line Identical beginning and end, and the scanning route of specular.
Further, in described laser package system, in addition to a motor, described in the motor connection Mobile device.
Further, in described laser package system, the motor drives the mobile dress by shaft coupling Put rotation.
Further, in described laser package system, first plumb joint and the second plumb joint connect one respectively Beam splitter and attenuator.
Further, in described laser package system, the portal frame is provided with multiple parallel mobile devices.
Also, in the present invention, it is proposed that a kind of method for packing, using laser package system as described above, including step Suddenly:
The laser facula for launching the first plumb joint and the second plumb joint overlaps the midpoint on the first side of packaging line;
Keep first plumb joint and first direction of second plumb joint on portal frame static, make first welding Head and the second plumb joint make counter motion in a second direction along leading screw, laser facula is sealed the first side of packaging line Dress;
Control first plumb joint and the second plumb joint in the first direction and a second direction while move, make described One plumb joint and the second plumb joint respectively by packaging line first while into packaging line second while and the 3rd side;
First plumb joint and the second plumb joint respectively enter the second of packaging line while and when the 3rd after, keep first Plumb joint and the second plumb joint are static in a second direction, the mobile portal frame, weld first plumb joint and second Head in a first direction respectively to the second of packaging line while and be packaged when the 3rd;
Control first plumb joint and the second plumb joint in a first direction with second direction while move, make described first Plumb joint and the second plumb joint respectively by packaging line second while and enter the 4th side of packaging line when the 3rd;
After first plumb joint and the second plumb joint enter the 4th side of packaging line, portal frame is kept in a first direction It is static, first plumb joint and the second plumb joint is made counter motion in a second direction along leading screw, make laser facula pair 4th side of packaging line is packaged, until laser facula overlaps again.
Further, in described method for packing, the luminous power of first plumb joint and the second plumb joint is independently controlled System.
Further, in described method for packing, first plumb joint and the second plumb joint connect a light splitting respectively Element and attenuator, the luminous power of preliminary ratio is obtained using the beam splitter, recycle the attenuator to obtain final institute The luminous power needed.
Further, in described method for packing, when the first plumb joint and the second plumb joint are in a first direction with second When being moved on direction simultaneously, the luminous power of first plumb joint and the second plumb joint is changed according to movement locus.
Further, in described method for packing, when the first plumb joint and the second plumb joint in a first direction or second When being moved on direction, the luminous power of first plumb joint and the second plumb joint does not change.
Compared with prior art, the beneficial effects are mainly as follows:First plumb joint is installed on the mobile device With the second plumb joint, and the first plumb joint and the second plumb joint can move along the track of packaging line, so as to realize two Plumb joint is packaged to packaging line, is improved encapsulation yield, is reduced the waste of energy.
Brief description of the drawings
Fig. 1 is the structural representation of laser package system in the embodiment of the present invention one;
Fig. 2 is the top view of packaging line in the embodiment of the present invention one;
Fig. 3 is the top view of laser package system in the embodiment of the present invention one;
Fig. 4 is the structural representation of laser package system in the embodiment of the present invention two.
Embodiment
The laser package system and method for packing of the present invention are described in more detail below in conjunction with schematic diagram, wherein Illustrating the preferred embodiments of the present invention, it should be appreciated that those skilled in the art can change invention described herein, and still So realize the advantageous effects of the present invention.Therefore, description below is appreciated that for the widely known of those skilled in the art, And it is not intended as limitation of the present invention.
For clarity, whole features of practical embodiments are not described.In the following description, it is not described in detail known function And structure, because they can make the present invention chaotic due to unnecessary details.It will be understood that opening in any practical embodiments In hair, it is necessary to a large amount of implementation details are made to realize the specific objective of developer, such as according to relevant system or relevant business Limitation, another embodiment is changed into by one embodiment.Additionally, it should think that this development is probably complicated and expended Time, but it is only to those skilled in the art routine work.
More specifically description is of the invention by way of example referring to the drawings in the following passage.Will according to following explanation and right Book is sought, advantages and features of the invention will become apparent from.It should be noted that accompanying drawing is using very simplified form and using non- Accurately ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
Fig. 1 is refer to, in the present embodiment, it is proposed that a kind of laser package system, including:Portal frame 101, mobile device 104th, the first plumb joint 102 and the second plumb joint 103;Wherein, the mobile device 104 is arranged on the portal frame 101, and As the portal frame 101 moves in a first direction;The plumb joint 103 of first plumb joint 102 and second is arranged on the shifting On dynamic device 104, the plumb joint 103 of the first plumb joint 102 and second can be in mobile device 104 along in second direction Motion, the laser facula 106 that the plumb joint 103 of the first plumb joint 102 and second is launched are radiated on packaging line 105, and Moved with the movement of the first plumb joint 102 and the second plumb joint 103.
In the present embodiment, the mobile device 104 is Bidirectional-screw, and half is left hand thread, and second half is dextrorotation spiral shell Line.First plumb joint 102 is located at the left hand thread, and second plumb joint 103 is located at the right-handed thread.It is described to swash Light package system also includes a motor 107, and the motor 107 drives the mobile device 104 to revolve by shaft coupling Turn.In addition, the plumb joint 103 of the first plumb joint 102 and second connects a beam splitter and attenuator (not shown) respectively.
Specifically, the portal frame 101 is the scanning that the first plumb joint 102 and the second plumb joint 103 provide Y direction, The axle is defined as first axle.First plumb joint 102 and the second plumb joint 103 are used to expanding laser beam, shaping and poly- Jiao, and most laser facula 106 is focused on the midpoint on certain one side of the packaging line 105 of device to be packaged (CELL) at last.
The mobile device 104 is two-way leading screw, and with left-handed and two kinds of screw threads of dextrorotation, the first plumb joint 102 is positioned at a left side Revolve screw thread, the second plumb joint 103 be located at right-handed thread, when mobile device 104 rotates forward along clockwise direction or counter clockwise direction instead When turning, the second plumb joint 103 can make mirror image fortune with identical speed, opposite direction relative to the first plumb joint 102 in X-direction Dynamic, its each self-corresponding focal beam spot is also in this way, the place axle of mobile device 104 is defined as the second axle.When the edge of portal frame 101 Y-direction is moved, and the first plumb joint 102 being in together in mobile device 104 and the second plumb joint 103 can be with identical speed along first axle Make motion in the same direction in direction.It is pointed out that mobile device 104 needs to keep good with portal frame 101 when installing fixed The depth of parallelism can obtain preferable movement locus.
In the present embodiment, it is also proposed that a kind of method for packing, using light package system as described above, including step Suddenly:
S100:The laser facula for launching the first plumb joint and the second plumb joint is overlapped in the first side of packaging line At point;
S200:Keep first plumb joint and first direction of second plumb joint on portal frame static, make described One plumb joint and the second plumb joint make counter motion in a second direction along leading screw, make first side of the laser facula to packaging line It is packaged;
S300:Control first plumb joint and the second plumb joint in the first direction and a second direction while move, make First plumb joint and the second plumb joint respectively by packaging line first while into packaging line second while and the 3rd side;
S400:First plumb joint and the second plumb joint respectively enter the second of packaging line while and when the 3rd after, protect Hold the first plumb joint and the second plumb joint is static in a second direction, the mobile portal frame, make first plumb joint and the Two plumb joints in a first direction respectively to the second of packaging line while and be packaged when the 3rd;
S500:Control first plumb joint and the second plumb joint in a first direction with second direction while move, make institute State the first plumb joint and the second plumb joint respectively by packaging line second while and enter the 4th side of packaging line when the 3rd;
S600:After first plumb joint and the second plumb joint enter the 4th side of packaging line, portal frame is kept the One direction is static, first plumb joint and the second plumb joint is made counter motion in a second direction along leading screw, makes laser Hot spot is packaged to the 4th side of packaging line, until laser facula overlaps again.
In the present embodiment, the laser facula that the plumb joint 103 of the first plumb joint 102 and second is launched is in the envelope There is identical beginning and end, and the scanning route of specular on wiring.Incorporated by reference to Fig. 2, specifically, A points are packaging line 105 starting point, B points are the terminating point of packaging line 105, and A points and B points are all located at the point midway (reality on each place side Both have an essential distinction, can all be used as the beginning and end of scanning), define A points place while for first while, B points place side is 4th side, first at the 4th between lower section when being defined as second, first at the 4th between top side definition For the 3rd side.
Laser facula 1 and laser facula 2 all move in the counterclockwise direction from A points, laser facula 1, the edge of laser facula 2 Move clockwise, both finally converge at B points.In motion process, when two laser faculas are all on the first side, mobile device 104 rotate drive laser facula 1 and laser facula 2 makees mirror movements in opposite direction with identical speed, and the second axle moves, and first Axle is static.First is moved to while with second when laser facula 1 moves to the first fillet and laser facula 2 while with the 3rd Fillet when, first axle is also begun to move, and the second axle is rotated further, and two laser faculas is moved along fillet.When two swash Light hot spot respectively enter second while and when when the 3rd, the second axle stops operating, and first axle continues to move, and two laser faculas are with identical Speed and identical direction respectively second while and when the 3rd on make parallel motion.When laser facula 1 enters the 3rd side and the Four while fillet and laser facula 2 enter second while and the 4th side fillet when, the second axle starts to rotate again, and first axle continues to transport Dynamic, until two laser faculas enter the 4th side, first axle stop motion, the second axle continues to move, and drives two laser faculas with phase Mirror movements is made in speed together, opposite direction, until two laser faculas all reach B points position, based on two-way motion shafting The encapsulation of two hot spot contour scanning lasers is completed.
The two-axle interlocking of the Synchronization Control of first axle and the second axle, really laser facula at movement locus fillet is relative For single axial movement of the laser facula in track straightway, the not synchronization of real meaning, in common two-dimension moving platform In, fillet track is realized by way of circular interpolation, two-axle interlocking, is a kind of common technological means, therefore herein not It is described in detail.
The luminous power independent control of first plumb joint 102 and the second plumb joint 103.During single energy of lasers abundance, utilize The beam splitter of certain splitting ratio tentatively obtains corresponding proportion luminous power, then is utilized respectively attenuator or other light power controllers The first plumb joint 102 and the second plumb joint 103 each final required luminous power are obtained, makes full use of energy of lasers.Single laser During device energy deficiency, luminous power needed for the first plumb joint 102 and the second plumb joint 103 is set respectively using two lasers.
The coordinate system that the size of luminous power is made up of the motion shafting of both direction determines, by a little setting in 2 points of A and B For co-ordinate zero point, another point is set to coordinate terminal, when reading laser facula and being located at zero point or final position, according to actual need Ask increase or reduce luminous power.When reading in both coordinate data X or Y, (laser facula is located at when any one keeps constant On straightway), luminous power is invariable.When reading coordinate data X and Y and both changing, (laser facula is positioned at circle In linea angulata section), according to the actual requirements, the trend increasedd or decreased according to coordinate value, change luminous power size.
As shown in figure 3, the both ends support body of portal frame 101 is parallel to each other, and it is perpendicular with mobile device 104, and position respectively In the both ends of mobile device 104.Packaging line 105 is located at the centre position of portal frame 101, and packaging line 105 and portal frame 101 are flat OK;Packaging line 105 is located at the lower section of mobile device 104 simultaneously, and packaging line 105 is parallel with mobile device 104.
Fig. 3 is refer to, the portal frame 101 is provided with multiple parallel mobile devices.Wherein, 101 be portal frame, 102, 103rd, 202,203,302,303,402 and 403 be plumb joint, and 104,204,304 and 404 be two-way leading screw, 105,205, 305 and 405 be line to be packaged, and portal frame 101 extends in the length of Y-direction so that can be arranged between portal frame 101 more double To leading screw, plumb joint and line to be packaged, so as to ensure the realization of more mechanisms processing, specific mechanism quantity is by portal frame 101 along Y To length determine.
Vertical control problem (being directed to large scale CELL), when carrying out large scale CELL encapsulation according to scanning galvanometer, really Need to expand scanning area by increasing vertical height.But technical scheme 1 is using two-way leading screw and two plumb joints Combination, as long as ensureing that length of the length not less than large scale CELL of two-way leading screw achieves that large scale CELL encapsulation. According to prior art condition, any ask is not present to the length more than or equal to large scale CELL in the length processing of two-way leading screw Topic.
This real technical scheme lists laser package system and the side of a kind of two hot spot contours scanning based on two-way leading screw Method.This programme is achieved that single CELL two light using only a set of two dimensional motion control system by simple mechanical structure Spot contour scans, and improves production efficiency.
Embodiment two
Fig. 4 is refer to, in the present embodiment, the laser package system of proposition is different with unanimous on the whole in embodiment one , the mobile device includes a unidirectional screw mandrel 201, head rod 203, the second connecting rod 204 and sliding block 202, wherein, The connecting rod 204 of head rod 203 and second is arranged on the both sides of the unidirectional leading screw 201 by the sliding block 202. First plumb joint and the second plumb joint include combined lens module 205, for laser facula to be exposed into packaging line 105 On.The motor 107 drives the mobile device to rotate by shaft coupling.
Specifically, portal frame 101 is used for the unidirectional screw mandrel 201 for fixing Z-direction installation, and provide the scanning of Y direction.Driving Electricity drives unidirectional screw mandrel 201 to rotate on motor 107, and the unidirectional rotating band movable slider 202 of screw mandrel 201 moves up and down along Z-direction, sliding block The 202 drive connecting rods 204 of head rod 203 and second move up and down.Combined lens module 205 and head rod 203 and the Two connecting rods 204 are connected, and the connecting rod 204 of head rod 203 and second can move along Z-direction drives combined lens module 205 Motion, combined lens module 205 move in the X-axis direction, then the laser facula for focusing on output also moves in the X-axis direction.Combined in Fig. 3 Mirror module 205 each side installs one, then the movement locus of corresponding output laser facula and Fig. 2 in technical scheme 1 Motion of two hot spots on the first side is consistent, makees the opposite mirror movements of speed equal direction.And two laser faculas are along Y rails direction Track is scanned, also as technical scheme 1, makees speed equal direction identical mirror movements, namely X-axis is static (keeps Z axis not It is dynamic to realize), make the scanning of Y direction by portal frame 101, can equally be realized by the system architecture of technical scheme 2 only makes Two hot spots are made to make the effect that contour scans with two motion shaftings.
To sum up, in laser package system provided in an embodiment of the present invention and method for packing, is installed on the mobile device One plumb joint and the second plumb joint, and the first plumb joint and the second plumb joint can move along the track of packaging line, so as to Realize that two plumb joints are packaged to packaging line, improve encapsulation yield, reduce the waste of energy.
The preferred embodiments of the present invention are above are only, any restrictions effect is not played to the present invention.Belonging to any Those skilled in the art, in the range of technical scheme is not departed from, to the invention discloses technical scheme and Technology contents make the variation such as any type of equivalent substitution or modification, belong to the content without departing from technical scheme, still Belong within protection scope of the present invention.

Claims (15)

  1. A kind of 1. laser package system, it is characterised in that including:Portal frame, mobile device, the first plumb joint and the second welding Head;Wherein, the mobile device is arranged on the portal frame, and as the portal frame moves in a first direction;Described One plumb joint and the second plumb joint are arranged in the mobile device, and first plumb joint and the second plumb joint can be in movements Moved on device along in second direction, the laser facula that first plumb joint and the second plumb joint are launched is radiated at encapsulation On line, and moved with the movement of the first plumb joint and the second plumb joint.
  2. 2. laser package system as claimed in claim 1, it is characterised in that the mobile device is Bidirectional-screw, and half is Left hand thread, second half is right-handed thread.
  3. 3. laser package system as claimed in claim 2, it is characterised in that first plumb joint is located at the left-handed spiral shell Line, second plumb joint are located at the right-handed thread.
  4. 4. laser package system as claimed in claim 1, it is characterised in that the mobile device includes a unidirectional screw mandrel, the One connecting rod, the second connecting rod and sliding block, wherein, the head rod and the second connecting rod are arranged on by the sliding block The both sides of the unidirectional leading screw.
  5. 5. laser package system as claimed in claim 4, it is characterised in that first plumb joint and the second plumb joint wrap Combined lens module is included, for laser facula to be exposed into packaging line.
  6. 6. the laser package system as described in claim any one of 2-5, it is characterised in that first plumb joint and the second weldering The laser facula that joint is launched has identical beginning and end, and the scanning route of specular on the packaging line.
  7. 7. laser package system as claimed in claim 1, it is characterised in that also including a motor, the motor Connect the mobile device.
  8. 8. laser package system as claimed in claim 7, it is characterised in that described in the motor is driven by shaft coupling Mobile device rotates.
  9. 9. laser package system as claimed in claim 1, it is characterised in that the first plumb joint and the second plumb joint difference Connect a beam splitter and attenuator.
  10. 10. laser package system as claimed in claim 1, it is characterised in that the portal frame is provided with multiple parallel shiftings Dynamic device.
  11. A kind of 11. method for packing, using the laser package system as any one of claim 1-10, it is characterised in that Including step:
    The laser facula for launching the first plumb joint and the second plumb joint overlaps the midpoint on the first side of packaging line;
    Keep first plumb joint and first direction of second plumb joint on portal frame static, make first plumb joint and Second plumb joint makees counter motion in a second direction along leading screw, laser facula is packaged the first side of packaging line;
    Control first plumb joint and the second plumb joint in the first direction and a second direction while move, make first weldering Joint and the second plumb joint respectively by packaging line first while into packaging line second while and the 3rd side;
    First plumb joint and the second plumb joint respectively enter the second of packaging line while and when the 3rd after, keep the first welding Head and the second plumb joint are static in a second direction, the mobile portal frame, first plumb joint and the second plumb joint is existed On first direction respectively to the second of packaging line while and be packaged when the 3rd;
    Control first plumb joint and the second plumb joint in a first direction with second direction while move, make first welding Head and the second plumb joint respectively by packaging line second while and enter the 4th side of packaging line when the 3rd;
    After first plumb joint and the second plumb joint enter the 4th side of packaging line, keep portal frame quiet in a first direction Only, first plumb joint and the second plumb joint is made counter motion in a second direction along leading screw, make laser facula to envelope 4th side of wiring is packaged, until laser facula overlaps again.
  12. 12. method for packing as claimed in claim 11, it is characterised in that the light work(of first plumb joint and the second plumb joint Rate independent control.
  13. 13. method for packing as claimed in claim 12, it is characterised in that first plumb joint and the second plumb joint connect respectively A beam splitter and attenuator are connect, the luminous power of preliminary ratio is obtained using the beam splitter, recycles the attenuator to obtain Obtain finally required luminous power.
  14. 14. method for packing as claimed in claim 11, it is characterised in that when the first plumb joint and the second plumb joint are in first party During to being moved in second direction simultaneously, the luminous power of first plumb joint and the second plumb joint is changed according to movement locus Become.
  15. 15. method for packing as claimed in claim 11, it is characterised in that when the first plumb joint and the second plumb joint are in first party To or second direction on move when, the luminous power of first plumb joint and the second plumb joint does not change.
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CN108188576A (en) * 2018-01-16 2018-06-22 京东方科技集团股份有限公司 A kind of laser sintering processes and laser sintered equipment
CN111400989A (en) * 2018-12-29 2020-07-10 上海微电子装备(集团)股份有限公司 Laser packaging path obtaining method, laser packaging method and laser packaging system
CN113751882A (en) * 2021-09-01 2021-12-07 苏州和瑞科智能装备有限公司 Double-station laser engraving machine and control method thereof

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CN103490021A (en) * 2013-09-30 2014-01-01 上海大学 Packaging device
CN105336876A (en) * 2014-07-29 2016-02-17 上海微电子装备有限公司 Packaging system and packing method for sealed glass packaging body through laser

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CN102157709A (en) * 2010-01-19 2011-08-17 三星移动显示器株式会社 Laser beam irradiation apparatus , and method of manufacturing organic light emitting display device by using the laser beam irradiation apparatus
CN103490021A (en) * 2013-09-30 2014-01-01 上海大学 Packaging device
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CN108188576A (en) * 2018-01-16 2018-06-22 京东方科技集团股份有限公司 A kind of laser sintering processes and laser sintered equipment
CN108188576B (en) * 2018-01-16 2019-08-27 京东方科技集团股份有限公司 A kind of laser sintering processes and laser sintered equipment
CN111400989A (en) * 2018-12-29 2020-07-10 上海微电子装备(集团)股份有限公司 Laser packaging path obtaining method, laser packaging method and laser packaging system
CN111400989B (en) * 2018-12-29 2022-06-17 上海微电子装备(集团)股份有限公司 Laser packaging path obtaining method, laser packaging method and laser packaging system
CN113751882A (en) * 2021-09-01 2021-12-07 苏州和瑞科智能装备有限公司 Double-station laser engraving machine and control method thereof

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