CN105261697B - 垂直霍尔器件 - Google Patents

垂直霍尔器件 Download PDF

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Publication number
CN105261697B
CN105261697B CN201510401886.5A CN201510401886A CN105261697B CN 105261697 B CN105261697 B CN 105261697B CN 201510401886 A CN201510401886 A CN 201510401886A CN 105261697 B CN105261697 B CN 105261697B
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hall device
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Chinese (zh)
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CN105261697A (zh
Inventor
萨沙·迪米特里耶维奇
拉迪沃耶·波波维奇
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Senisens Company
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Plug Nice Co
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/077—Vertical Hall-effect devices

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)
CN201510401886.5A 2014-07-11 2015-07-09 垂直霍尔器件 Active CN105261697B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP14176835.8A EP2966462B1 (en) 2014-07-11 2014-07-11 Vertical hall device
EP14176835.8 2014-07-11

Publications (2)

Publication Number Publication Date
CN105261697A CN105261697A (zh) 2016-01-20
CN105261697B true CN105261697B (zh) 2019-08-06

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CN201510401886.5A Active CN105261697B (zh) 2014-07-11 2015-07-09 垂直霍尔器件

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US (1) US9496487B2 (enExample)
EP (1) EP2966462B1 (enExample)
JP (1) JP6726448B2 (enExample)
CN (1) CN105261697B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7365771B2 (ja) * 2019-01-31 2023-10-20 エイブリック株式会社 半導体装置
DE102019004599B4 (de) * 2019-07-04 2021-01-14 Tdk-Micronas Gmbh Vertikale Hallsensorstruktur, Betrieb derselben und vertikaler Hallsensor
CN110736942B (zh) * 2019-10-12 2021-09-10 南京邮电大学 一种具有对称结构的高灵敏度垂直型磁场传感器
JP7506526B2 (ja) * 2020-05-22 2024-06-26 ローム株式会社 ホール素子、および電子部品
CN117279481B (zh) * 2023-11-23 2024-02-09 深圳市晶扬电子有限公司 一种高性能垂直型霍尔器件

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1136714A (zh) * 1995-03-30 1996-11-27 株式会社东芝 横向型霍尔器件
CN1669159A (zh) * 2002-09-10 2005-09-14 善卓股份有限公司 带有霍尔元件的磁场传感器
CN102636761A (zh) * 2011-02-08 2012-08-15 英飞凌科技股份有限公司 低偏移自旋电流霍尔板及其操作方法
CN102889952A (zh) * 2011-07-21 2013-01-23 英飞凌科技股份有限公司 具有成环连接的霍尔效应区的电子器件
CN103698721A (zh) * 2013-12-30 2014-04-02 南京大学 一种cmos片上三维微型磁检测传感器的霍尔传感单元

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH662905A5 (de) 1983-12-19 1987-10-30 Landis & Gyr Ag Integrierbares hallelement.
CH669068A5 (de) * 1986-04-29 1989-02-15 Landis & Gyr Ag Integrierbares hallelement.
EP0362493B1 (de) 1988-09-21 1993-10-20 Landis & Gyr Business Support AG Hallelement
JP2006128400A (ja) * 2004-10-28 2006-05-18 Denso Corp 縦型ホール素子
JP4674578B2 (ja) * 2006-01-13 2011-04-20 株式会社デンソー 磁気センサ及び磁気検出方法
WO2007116823A1 (ja) * 2006-04-03 2007-10-18 Asahi Kasei Emd Corporation ホール素子及び磁気センサ
US8114684B2 (en) * 2009-03-02 2012-02-14 Robert Bosch Gmbh Vertical hall effect sensor with current focus
EP2234185B1 (en) * 2009-03-24 2012-10-10 austriamicrosystems AG Vertical Hall sensor and method of producing a vertical Hall sensor
DE102009027338A1 (de) * 2009-06-30 2011-01-05 Robert Bosch Gmbh Hall-Sensorelement und Verfahren zur Messung eines Magnetfelds
CH704689B1 (de) * 2011-03-24 2016-02-29 X Fab Semiconductor Foundries Vertikaler Hallsensor und Verfahren zur Herstellung eines vertikalen Hallsensors.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1136714A (zh) * 1995-03-30 1996-11-27 株式会社东芝 横向型霍尔器件
CN1669159A (zh) * 2002-09-10 2005-09-14 善卓股份有限公司 带有霍尔元件的磁场传感器
CN100388523C (zh) * 2002-09-10 2008-05-14 梅莱克塞斯技术股份有限公司 带有霍尔元件的磁场传感器
CN102636761A (zh) * 2011-02-08 2012-08-15 英飞凌科技股份有限公司 低偏移自旋电流霍尔板及其操作方法
CN102889952A (zh) * 2011-07-21 2013-01-23 英飞凌科技股份有限公司 具有成环连接的霍尔效应区的电子器件
CN103698721A (zh) * 2013-12-30 2014-04-02 南京大学 一种cmos片上三维微型磁检测传感器的霍尔传感单元

Also Published As

Publication number Publication date
EP2966462B1 (en) 2022-04-20
US20160013399A1 (en) 2016-01-14
EP2966462A1 (en) 2016-01-13
US9496487B2 (en) 2016-11-15
CN105261697A (zh) 2016-01-20
JP6726448B2 (ja) 2020-07-22
JP2016021568A (ja) 2016-02-04

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