CN105252881B - The stripping off device and stripping means of laminated body and the manufacturing method of electronic device - Google Patents
The stripping off device and stripping means of laminated body and the manufacturing method of electronic device Download PDFInfo
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- CN105252881B CN105252881B CN201510406253.3A CN201510406253A CN105252881B CN 105252881 B CN105252881 B CN 105252881B CN 201510406253 A CN201510406253 A CN 201510406253A CN 105252881 B CN105252881 B CN 105252881B
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- edge
- knife
- laminated body
- substrate
- insertion position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
- B32B38/105—Removing layers, or parts of layers, mechanically or chemically on edges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Abstract
The present invention relates to the manufacturing methods of the stripping off device of laminated body and stripping means and electronic device.A kind of stripping off device of laminated body, for pasting the laminated body of rectangle made of the 1st substrate and the 2nd substrate in a manner of it can remove, it is removed at interface between the 1st substrate and the 2nd substrate, it is characterized in that, the stripping off device of the laminated body includes: hoe scaler, is tabular, is equipped with the edge of a knife along its edge, by the way that the edge of a knife is inserted into predetermined amount from the corner of the laminated body to the interface, and beginning portion is removed in the interface manufacture；Peeling member removes the laminated body at the interface using the removing beginning portion as starting point；Insertion position changes component, for changing the hoe scaler and the relative position of the laminated body in the plane；And control unit, it controls the insertion position and changes component, to change the insertion position that the edge of a knife of the hoe scaler is inserted into the interface.
Description
Technical field
The present invention relates to the manufacturing methods of the stripping off device of laminated body and stripping means and electronic device.
Background technique
With the slimming of the electronic devices such as display panel, solar battery, thin-film secondary battery, lightness, it is expected that answering
The thin plate of the substrates such as glass plate, resin plate, metal plate for these electronic devices (the 1st substrate).
However, if the thickness of substrate is thinning, the treatability of substrate deteriorates, accordingly, it is difficult to form electricity on the surface of the substrate
Functional layer (thin film transistor (TFT) (TFT:Thin Film Transistor) and the colour filter (CF:Color of sub- device
Filter))。
Therefore, motion has a kind of following manufacturing method of electronic device: pasting stiffening plate (the 2nd substrate) at the back side of substrate
To constitute the laminated body for reinforcing substrate using stiffening plate, and functional layer is formed on the surface of the substrate in the state of laminated body.
In this manufacturing method, the treatability of substrate improves, therefore can form functional layer well on the surface of the substrate.Moreover, plus
Strong plate self-reference substrate can be removed after forming functional layer.
The stripping means of stiffening plate disclosed in patent document 1 passes through from the diagonal line for being located at rectangular-shaped laminated body
A corner in two corners towards another corner makes stiffening plate or substrate or their twocoueses side separated from each other
It is carried out to flexible deformation.At this point, in order to go on smoothly removing, in a corner of laminated body production removing beginning portion.Stripping
Leaving beginning portion is by the way that the edge of a knife of hoe scaler to be inserted into from a corner of laminated body into the interface between substrate and stiffening plate
Predetermined amount and make.
In addition, patent document 2 similarly discloses a kind of be used for the cutter (blade portion) of sharp component (hoe scaler)
The interface be inserted between substrate processed (the 1st substrate) and supporting substrates (the 2nd substrate) and the removing dress removed at interface
It sets.
Patent document 1: International Publication No. 2011/024689
Patent document 2: Japanese Unexamined Patent Publication 2014-60346
Summary of the invention
Problems to be solved by the invention
For the stripping off device of patent document 1,2, using hoe scaler when interface manufacture removes beginning portion, the edge of a knife with
In the case where the small cullet contact for being attached to a corner of laminated body, tipping is generated on the edge of a knife sometimes.For having
The edge of a knife can not be reliably inserted next interface by the edge of a knife of tipping, therefore there are such problems: can not be following
Interface reliably make facilitate interface remove removing beginning portion.
The present invention is made into view of such problems, its purpose is to provide can utilize the edge of a knife of hoe scaler in layer
The interface of stack reliably makes the manufacture of stripping off device and stripping means and electronic device of removing beginning portion, laminated body
Method.
The solution to the problem
In order to reach the purpose, the stripping off device of laminated body of the invention is for pasting the 1st in a manner of it can remove
The laminated body of rectangle made of substrate and the 2nd substrate, the interface between the 1st substrate and the 2nd substrate are removed,
Be tabular it is characterized in that, the stripping off device of the laminated body includes: hoe scaler, be equipped with the edge of a knife along its edge, pass through by
The edge of a knife is inserted into predetermined amount from the corner of the laminated body to the interface, and removes beginning portion in the interface manufacture；Stripping
From component, the laminated body is removed at the interface using the removing beginning portion as starting point；Insertion position change portion
Part, for changing the hoe scaler and the relative position of the laminated body in the plane；And control unit, control described in
Insertion position changes component, so that the edge of a knife for changing the hoe scaler is inserted into the insertion position at the interface.
In order to reach the purpose, the stripping means of laminated body of the invention is for pasting the 1st in a manner of it can remove
The laminated body of rectangle made of substrate and the 2nd substrate, the interface between the 1st substrate and the 2nd substrate are removed,
It is characterized in that, the stripping means of the laminated body includes removing beginning portion production process, by will be along flat hoe scaler
The edge of a knife of edge setting predetermined amount is inserted into from the corner of the laminated body to the interface, and peeled away in the interface manufacture
Beginning portion；And stripping process, the laminated body is removed at the interface using the removing beginning portion as starting point, the stripping
Leave beginning portion's production process include change the hoe scaler the edge of a knife be inserted into the interface insertion position insertion position change
Process.
In order to reach the purpose, the manufacturing method of electronic device of the invention includes functional layer formation process, for
The mode that can be removed pastes the laminated body of rectangle made of the 1st substrate and the 2nd substrate, in the exposure shape of the 1st substrate
At functional layer；And separation process, self-forming have the 1st substrate of the functional layer to separate the 2nd substrate, feature exists
In the separation process includes removing beginning portion production process, passes through the knife being arranged along the edge of flat hoe scaler
Mouth is inserted into predetermined amount from the corner of the laminated body to the interface between the 1st substrate and the 2nd substrate, and on the boundary
Wheat flour makees removing beginning portion；And stripping process, using the removing beginning portion as starting point the interface to the laminated body into
Row removing, the removing beginning portion production process include changing the edge of a knife of the hoe scaler to be inserted into the insertion position at the interface
Insertion position changes process.
According to the present invention, change in process in insertion position, insertion position is controlled by control unit and changes component, to change
Become the insertion position at the edge of a knife insertion interface of hoe scaler.Therefore, a technical solution according to the present invention, if changing the insertion of the edge of a knife
Position then in insertion next time using the normal edge of a knife of not tipping, therefore can reliably make at the interface of laminated body
Remove beginning portion.
Hoe scaler of the invention is in flat shape, is the hoe scaler that the flat sword shape of the edge of a knife is equipped with along edge.
On the other hand, it is actually used in overall length (also referred to as effective length) of the edge of a knife in production removing beginning portion relative to the edge of a knife
For be small part.In the case where previous stripping off device, when due to generating tipping in the small part,
Removing beginning portion can not reliably be made, it is therefore desirable to which the hoe scaler for having tipping is changed to the new removing of not tipping
Knife.
In contrast, the substantially overall length for the edge of a knife being arranged along edge can be effectively served as production stripping by the present invention
The edge of a knife in beginning portion is left, therefore can reduce the replacement frequency of hoe scaler, and is able to extend the service life of hoe scaler.
It is for changing hoe scaler and the opposite position of laminated body in the plane that the insertion position of the invention, which changes component,
The component set, therefore in order to change the relative position of both hoe scaler and laminated body, both can to hoe scaler and laminated body this
The two is respectively provided with driving mechanism portion, can also change relative position at least one setting driving mechanism portion.That is, of the invention
Stripping off device includes for by the uniaxial driving mechanism portion at the edge of a knife insertion interface of hoe scaler and for changing the opposite position
The uniaxial driving mechanism portion set.Both two (twin shaft) driving mechanism parts can be left, a driving mechanism portion is located at stripping
From knife side, another driving mechanism portion is located at stacking side, Two-shaft drive mechanism portion can also be set to any one.
Preferably, change knots modification the inserting by the edge of a knife that component changes the insertion position of the edge of a knife using the insertion position
Enter amount, for the edge of a knife insertion a corner be apex angle an edge and another rim portion not with edge of a knife angulation (also referred to as
It is inserted into angle) setting.That is, the tipping amount (length) of the edge of a knife can be speculated according to the insertion of the edge of a knife and insertion angle,
It is preferred, therefore, that with the spacing that the edge of a knife with tipping will not be used for insertion next time change the relative position, i.e., make knife
Opening's edge the edge of a knife length direction offset.Thereby, it is possible to effectively utilize the overall length of the edge of a knife.
In a technical solution of the stripping off device of laminated body of the invention, it is preferred that the control unit controls institute
It states insertion position and changes component, so that every at least one described removing beginning portion of production just makes the insertion position of the edge of a knife from upper
Secondary insertion position changes.
In a technical solution of the manufacturing method of the stripping means and electronic device of laminated body of the invention, preferably
It is to change in process in the insertion position, at least one described removing beginning portion of every production just makes the insertion position of the edge of a knife
It sets from the change of the insertion position of last time.
A technical solution according to the present invention, insertion position change process in, it is every production at least one peel away
Beginning, portion just made the insertion position of the edge of a knife change from the insertion position of last time.Therefore, one removing beginning portion of every production just
In the case where so that the insertion position of the edge of a knife is changed, the normal edge of a knife of not tipping can be used in insertion next time.Cause
And removing beginning portion can be reliably made in laminated body.Just make alternatively, it is also possible to every more than two removing beginning portions of production
The insertion position of the edge of a knife changes.In a technical solution of the invention, even if in last time insertion not in the edge of a knife
In the case where upper generation tipping, the edge of a knife for last time insertion, but use and the edge of a knife phase are not used in insertion next time yet
The adjacent normal edge of a knife.The position of the edge of a knife of the control unit storage last time insertion, when changing the position of the edge of a knife, according to upper
Secondary position is changed.
Preferably, another technical solution of the stripping off device of laminated body of the invention includes the stripping off device of the laminated body
Further include the detection part for the tipping for detecting the edge of a knife of the hoe scaler, is detecting the edge of a knife using the detection part
When tipping, the control unit controls the insertion position and changes component, so that the insertion position of the edge of a knife inserting from last time
Enter position change.
In another technical solution of the manufacturing method of the stripping means and electronic device of laminated body of the invention, preferably
It is to change in process in the insertion position, when detecting the tipping of the edge of a knife of the hoe scaler, make the insertion of the edge of a knife
Position changes from the insertion position of last time.
Another technical solution according to the present invention is changed in process in insertion position, is detected using detection part
To the edge of a knife tipping when, so that the insertion position of the edge of a knife is changed from the insertion position of last time, thus can next time insertion when
Use the normal edge of a knife of not tipping.Thus, it is possible to reliably make removing beginning portion in laminated body.Described in of the invention
In another technical solution, in the tipping for detecting the edge of a knife, the normal edge of a knife adjacent with the edge of a knife is used for next insertion, because
This can further extend the service life of hoe scaler.The position of the edge of a knife of the control unit storage last time insertion, is changing
When the position of the edge of a knife, it is changed according to the position of last time.
In the present invention, it is preferred that being for the corner of the edge of a knife insertion for the hoe scaler with the laminated body
An edge and another edge for apex angle, the control unit control the insertion position and change component so that an edge with
The edge of a knife of the biggish side of angle in the edge of a knife angulation and another edge and the edge of a knife angulation
It is altered to the insertion position of next time.
In the present invention, it is preferred that being for the corner of the edge of a knife insertion for the hoe scaler with the laminated body
An edge and another edge for apex angle changes in process in the insertion position, makes formed by an edge and the edge of a knife
The edge of a knife of the biggish side of angle in angle and another edge and the edge of a knife angulation is altered to inserting for next time
Enter position.
In said case, since the new edge of a knife for making the biggish side of angle is altered to the insertion position of next time,
Compared with the insertion position for making the new edge of a knife of the lesser side of angle be altered to next time, the change of relative position can be reduced
Amount, the i.e. offset of the edge of a knife.Therefore, the overall length of the edge of a knife can effectively further be utilized.
The effect of invention
Using the stripping off device and stripping means of laminated body of the invention and the manufacturing method of electronic device, can utilize
The edge of a knife of hoe scaler reliably makes removing beginning portion in laminated body.
Detailed description of the invention
Fig. 1 is to indicate that the main portions of an example of the laminated body supplied to the manufacturing process of electronic device amplify side view
Figure.
Fig. 2 be indicate the manufacturing process of LCD (liquid crystal display) midway make laminated body an example it is main
Position enlarged side view.
(E) of (A)~Fig. 3 of Fig. 3 is the production side, removing beginning portion for indicating to carry out using removing beginning portion producing device
The explanatory diagram of method.
Fig. 4 is the top view that the laminated body in removing beginning portion has been made using removing beginning portion production method.
Fig. 5 is the integrally-built side view for indicating removing beginning portion producing device.
Fig. 6 is the top view of removing beginning portion producing device shown in fig. 5.
Fig. 7 is the longitudinal section view for indicating the structure of stripping off device of embodiment.
Fig. 8 is the allocation position for schematically showing movable body relative to stripping unit, flex plate top view.
(C) of (A)~Fig. 9 of Fig. 9 is the explanatory diagram for indicating the structure of stripping unit.
Figure 10 is the longitudinal section view for the stripping off device removed in the interface of laminated body.
(C) of (A)~Figure 11 of Figure 11 is to indicate that stripping will have been made by removing beginning portion production method in chronological order
Leave the explanatory diagram of the stripping means of the stiffening plate removing of the laminated body in beginning portion.
(C) of (A)~Figure 12 of Figure 12 is that then Figure 11 (A)~Figure 11 (C) is indicated in chronological order by laminated body
Stiffening plate removing stripping means explanatory diagram.
Figure 13 is the top view for the state that the edge of a knife of knife is contacted with the corner in the corner cut portion of laminated body.
(F) of (A)~Figure 14 of Figure 14 is to indicate that the removing beginning portion carried out using removing beginning portion producing device is made
The top view of one example of process.
(B) of (A)~Figure 15 of Figure 15 is the top view for indicating the defect shape of the edge of a knife of knife.
Specific embodiment
Hereinafter, illustrating embodiments of the present invention with reference to the accompanying drawings.
Hereinafter, explanation uses the stripping off device and stripping means of laminated body of the invention in the manufacturing process of electronic device
The case where.
Electronic device refers to the electronic components such as display panel, solar battery, thin-film secondary battery.As display panel,
Can illustrate liquid crystal display (LCD:Liquid Crystal Display) panel, plasma display device (PDP:
Plasma Display Panel) and organic el display (OELD:Organic Electro Luminescence
Display) panel.
The manufacturing process of electronic device
Electronic device forms the function of electronic device by the surface of the substrate in glass system, resin system, made of metal etc.
Layer (being then thin film transistor (TFT) (TFT), colour filter (CF) if LCD) and manufacture.
Before forming functional layer, the back side of the substrate is made to be pasted on stiffening plate and be configured to laminated body.Later, in layer
In the state of stack, functional layer is formed on the surface of the substrate.Then, after forming functional layer, remove stiffening plate self-reference substrate.
That is, in the manufacturing process of electronic device, comprising: form functional layer on the surface of the substrate in the state of laminated body
Functional layer formation process and the active ergosphere of self-forming substrate separation stiffening plate separation process.The separation process can answer
With the stripping off device and stripping means of laminated body of the invention.
Laminated body 1
Fig. 1 is the main portions enlarged side view for indicating an example of laminated body 1.
Laminated body 1 includes the substrate (the 1st substrate) 2 formed for functional layer and the stiffening plate the (the 2nd for reinforcing the substrate 2
Substrate) 3.In addition, stiffening plate 3 has the resin layer 4 as adsorption layer in surface 3a, the back of substrate 2 is pasted on resin layer 4
Face 2b.That is, substrate 2 is using the bonding force in its Van der Waals force or resin layer 4 that act between resin layer 4 across resin layer 4
Stiffening plate 3 is pasted in a manner of it can remove.
Substrate 2
Functional layer is formed in the surface 2a of substrate 2.As substrate 2, glass substrate, ceramic substrate, resin can be illustrated
Substrate, metal substrate, semiconductor substrate.Among these substrates, due to the chemical resistance of glass substrate, resistance to excellent moisture permeability and
Linear expansion coefficient is smaller, therefore, is suitable as the substrate 2 of electronic device.In addition, since linear expansion coefficient becomes smaller, also
Have the advantages that the pattern of the functional layer formed at high temperature is difficult to deviate while cooling.
As the glass of glass substrate, can illustrate alkali-free glass, pyrex, soda-lime glass, high silica glass, its
He with silica oxide system glass as main component.The content of silica of the oxide system glass preferably in terms of oxide
For the glass of 40 mass of mass %~90 %.
Glass as glass substrate, it is preferred that select and apply the type for being suitable for manufactured electronic device
Glass or the glass for being suitable for its manufacturing process.For example, the glass substrate of liquid crystal board is preferably, using being substantially free of
The glass (alkali-free glass) of alkali metal component.
The thickness of substrate 2 is set according to the type of substrate 2.For example, in the case where substrate 2 is using glass substrate,
Lightness, thin plate for electronic device, the thickness of substrate 2 are preferably set to 0.7mm hereinafter, being more preferably set in 0.3mm
Hereinafter, being further preferably set in 0.1mm or less.Substrate 2 thickness in 0.3mm situation below, glass can be assigned
Substrate good flexibility.Moreover, substrate 2 thickness in 0.1mm situation below, glass substrate can be rolled up as web-like,
From the viewpoint of the processing of the viewpoint of the manufacture of glass substrate and glass substrate, the thickness of preferable substrate 2 0.03mm with
On.
In addition, substrate 2 is made of a substrate in Fig. 1, but substrate 2 can also be made of multiple substrates.That is, substrate 2
It can also be by laminated body made of the stacking of multiple substrates be constituted.In this case, constituting the aggregate thickness of all substrates of substrate 2
Thickness as substrate 2.
Stiffening plate 3
As stiffening plate 3, glass substrate, ceramic substrate, resin substrate, metal substrate, semiconductor substrate can have been illustrated.
The thickness of stiffening plate 3 is set in 0.7mm hereinafter, being set according to the type for the substrate 2 reinforced, thickness etc..
In addition, the thickness that the thickness of stiffening plate 3 can both be greater than substrate 2 might be less that the thickness of substrate 2, but in order to reinforce substrate 2,
The thickness of stiffening plate 3 is preferably in 0.4mm or more.
In addition, in the present embodiment, stiffening plate 3 is made of a substrate, but stiffening plate 3 can also be by by multiple substrate layers
Laminated body made of folded is constituted.In this case, the aggregate thickness for constituting all substrates of stiffening plate 3 becomes the thickness of stiffening plate 3.
Resin layer 4
It is peeling-off between resin layer 4 and stiffening plate 3 in order to prevent, and by the combination between resin layer 4 and stiffening plate 3
Power is set to higher than the binding force between resin layer 4 and substrate 2.As a result, in stripping process, between resin layer 4 and substrate 2
Interface peel.
The resin for constituting resin layer 4 is not particularly limited, and can there are acrylic resin, polyolefin resin, polyurethane
Resin, polyimide resin, organic siliconresin and polyimides organic siliconresin.Several resins can also be used in mixed way.Its
In, from the viewpoint of heat resistance, fissility, preferably organic siliconresin, polyimides organic siliconresin.
The thickness of resin layer 4 is not particularly limited, and is preferably set to 1 μm~50 μm, is more preferably set as 4 μm~20 μm.
The thickness of resin layer 4 is set in 1 μm or more, thus when being mixed into bubble, foreign matter between resin layer 4 and substrate 2, Neng Gouli
The thickness of bubble, foreign matter is absorbed with the deformation of resin layer 4.On the other hand, by the thickness of resin layer 4 be located at 50 μm hereinafter, to
The formation time of resin layer 4 can be shortened, and need not excessively use the resin of resin layer 4, therefore more economical.
In addition, in order to enable stiffening plate 3 to support entire resin layer 4, the shape of resin layer 4 is preferably and stiffening plate 3
Shape of the shape identical or less than stiffening plate 3.In addition, the shape of resin layer 4 is excellent in order to keep resin layer 4 and entire substrate 2 closely sealed
It is selected as shape identical as the shape of substrate 2 or greater than substrate 2.
In addition, resin layer 4 is constituted by one layer in Fig. 1, but resin layer 4 can also be constituted by two layers or more.The situation
Under, all layers of total thickness for constituting resin layer 4 becomes the thickness of resin layer.In addition, in this case, constituting the tree of each layer
The type of rouge can also be different.
Moreover, in the present embodiment, having used organic film i.e. resin layer 4 that inorganic layer also can be used as adsorption layer
To replace resin layer 4.The inoranic membrane of inorganic layer is constituted for example containing from including metal silicide, nitride, carbide and carbon
At least one selected in the group of nitride.
Moreover, there is the laminated body 1 of Fig. 1 resin layer 4 to be used as adsorption layer, but laminated body 1 can not also include resin layer 4 and
Including substrate 2 and stiffening plate 3.In this case, make substrate 2 using the Van der Waals force etc. acted between substrate 2 and stiffening plate 3
It is pasted in a manner of it can remove with stiffening plate 3.In addition, in the case where substrate 2 and stiffening plate 3 are glass substrate, in order to make
Substrate 2 as glass substrate and the stiffening plate 3 as glass plate are not bonded at high temperature, preferably the table in stiffening plate 3
Face 3a forms inorganic thin film.
It is formed with the laminated body 6 of the embodiment of functional layer
Via functional layer formation process to which the surface 2a of the substrate 2 in laminated body 1 is formed with functional layer.As functional layer
Forming method, be able to use CVD (Chemical Vapor Deposition: chemical vapor deposition) method and PVD
The vapour deposition method, sputtering method of (Physical Vapor Deposition: physical vapour deposition (PVD)) method etc..Functional layer using photoetching process,
Etching method is formed as scheduled pattern.
Fig. 2 is the main portion for indicating an example of laminated body 6 rectangular-shaped made by the midway of the manufacturing process of LCD
Position enlarged side view.
Laminated body 6 includes stiffening plate 3A, resin layer 4A, substrate 2A, functional layer 7, substrate 2B, resin layer 4B and stiffening plate
3B is simultaneously laminated with the sequence.That is, the laminated body 6 of Fig. 2 is equivalent to laminated body 1 shown in FIG. 1 to clip the side of functional layer 7
Laminated body made of formula balanced configuration.Hereinafter, the laminated body including substrate 2A, resin layer 4A and stiffening plate 3A is known as the 1st
Laminated body including substrate 2B, resin layer 4B and stiffening plate 3B is known as the 2nd laminated body 1B by laminated body 1A.
It is formed with the thin film transistor (TFT) (TFT) as functional layer 7 in the surface 2Aa of the substrate 2A of the 1st laminated body 1A,
The surface 2Ba of the substrate 2B of 2 laminated body 1B is formed with the colour filter (CF) as functional layer 7.
1st laminated body 1A and the 2nd laminated body 1B is by making the surface 2Ba of the surface 2Aa of substrate 2A, substrate 2B mutually coincide
And it is integrated.The 1st laminated body 1A and the 2nd laminated body the 1B construction of balanced configuration in a manner of clipping functional layer 7 are manufactured as a result,
Laminated body 6.
Utilize the edge of a knife of knife (hoe scaler) in the interface shape of laminated body 6 in the removing beginning portion production process of separation process
Behind removing beginning portion, stiffening plate 3A, 3B is successively removed in the stripping process of separation process, later, polarizing film, backlight is installed
Lamp etc., to be manufactured as the LCD of product.
Remove beginning portion producing device 10
(E) of (A)~Fig. 3 of Fig. 3 is to indicate the removing beginning portion production dress used in removing beginning portion production process
Set 10 main portions structure and the explanation of the removing beginning portion production method carried out using removing beginning portion producing device 10
Figure, (A) of Fig. 3 are the explanatory diagrams for indicating the positional relationship between laminated body 6 and knife (hoe scaler) N, and (B) of Fig. 3 is to utilize knife N
The explanatory diagram in removing beginning portion 26 is made at interface 24, (C) of Fig. 3 indicates that removing beginning portion 30 will be made at interface 28
The explanatory diagram of state, (D) of Fig. 3 are to make the explanatory diagram in removing beginning portion 30 at interface 28 using knife N, and (E) of Fig. 3 is production
The explanatory diagram of the laminated body 6 in removing beginning portion 26,30.
In addition, Fig. 4 is the top view for the laminated body 6 that production has removing beginning portion 26,30.
In addition, Fig. 5 is the integrally-built side view for indicating removing beginning portion producing device 10, Fig. 6 is stripping shown in fig. 5
Leave the top view of beginning portion's producing device 10.
Each corner of laminated body 6 is respectively provided with corner cut portion 6A, 6B, 6C, 6D in Fig. 4.Corner cut portion 6A~6D is to utilize mill
Stone by each corner grinding it is tapered made of part, indicate laminated body 6 model, the corner cut portion of the laminated body 6 of each model
The amount of pruning of 6A~6D, to prune angle different.The laminated body 6 of Fig. 4 has corner cut portion 6A~6D in whole corners, but also
There is the laminated body in corner cut portion in the presence of at least one corner selected.In addition, corner cut portion 6A~6D is by with phase in Fig. 4, Fig. 6
The mode exaggerated for the size of laminated body 6 is shown, actually very small size.In addition, Fig. 2 shows laminated body 1A with
The state that laminated body 1B is pasted together, but the shape in the corner cut portion of the shape in the corner cut portion of the laminated body 1A in figure and laminated body 1B
Shape both there is a situation where identical, and there is also different situations.
Back to Fig. 3, when beginning portion 26,30 are removed in production, as shown in (A) of Fig. 3, laminated body 6 is with stiffening plate 3B's
The mode that 3Bb absorption in the back side is held in workbench 12 is supported in horizontal direction (X-direction in figure).
Knife N is supported on level by holder 14 in the edge of a knife Na mode opposite with the corner 6Aa of corner cut portion 6A of laminated body 6
On direction.In addition, adjusting position of the knife N in short transverse (Z-direction in attached drawing) using height adjuster 16.In addition,
Make knife N and laminated body 6 in the horizontal direction in (X-direction in figure) using the conveying devices such as ball-screw apparatus (portion of moving mechanism) 18
Relative movement.Conveying device 18 moves at least one of knife N and workbench 12 in the horizontal direction, in embodiment
In, keep knife N mobile.In addition, being configured with the upper surface of the edge of a knife Na for the knife N to insertion in preceding or insertion in the top of knife N
Supply the fluid Supplying apparatus 22 of liquid 20.
Remove beginning portion production method
In the removing beginning portion production method carried out using removing beginning portion producing device 10, by the insertion position of knife N
It is set in the position being overlapped on the thickness direction of laminated body 6 in the corner 6Aa of laminated body 6, and the insertion of knife N is set
It is set to according to each interface 24,28 and different.
Illustrate the making step in the removing beginning portion.
In the initial state, the edge of a knife Na of knife N is located relative between the 1st insertion position, i.e. substrate 2B and resin layer 4B
The position that is offset by short transverse (Z-direction) of interface 24.Therefore, firstly, making knife N in height as shown in (A) of Fig. 3
Degree moves on direction, and the height of the edge of a knife Na of knife N is set as to the height at interface 24.
Then, as shown in (B) of Fig. 3, make corner 6Aa in the horizontal direction (arrow A in Fig. 6 of the knife N towards laminated body 6
Direction) it is mobile, the edge of a knife Na of knife N is inserted into predetermined amount to interface 24.In addition, when being inserted into knife N or before insertion knife N, from liquid
Feedway 22 supplies liquid 20 to the upper surface of edge of a knife Na.The substrate 2B of corner 6Aa is removed from resin layer 4B as a result, therefore,
As shown in figure 4, producing the removing beginning portion 26 for overlooking triangular shape at interface 24.In addition, must not necessarily supply liquid
20, but if if using liquid 20, removing beginning portion 26, therefore, energy can be remained in liquid 20 after extracting knife N
Enough make the removing beginning portion 26 that can not adhere to again.
Then, knife N is extracted in the horizontal direction (direction arrow B in Fig. 6) from corner 6Aa, it, will as shown in (C) of Fig. 3
The edge of a knife Na of knife N is set as the height at the interface 28 between the 2nd insertion position, i.e. substrate 2A and resin layer 4A.
Then, as shown in (D) of Fig. 3, keep knife N mobile in the horizontal direction (direction arrow A in Fig. 6) towards laminated body 6,
The edge of a knife Na of knife N is inserted into predetermined amount to interface 28.Similarly, liquid is supplied from fluid Supplying apparatus 22 to the upper surface of edge of a knife Na
Body 20.As a result, as shown in (E) of Fig. 3, removing beginning portion 30 is produced at interface 28.Here, by knife N relative to interface 28
Insertion is set as being less than insertion of the knife N relative to interface 24.The above are removing beginning portion production methods.Alternatively, it is also possible to incite somebody to action
Knife N is set as being less than insertion of the knife N relative to interface 28 relative to the insertion at interface 24.
By the laminated body 6 for having made removing beginning portion 26,30 since removing in portion's producing device 10 removing, it is delivered to stripping
From process.In stripping process, laminated body 6 successively is removed at interface 24,28 using aftermentioned stripping off device.
The detailed content of stripping means at interface 24,28 is seen below, and as shown in the arrow C of Fig. 4, makes laminated body 6 certainly
Corner cut portion 6A is bent towards the corner cut portion 6C opposite with corner cut portion 6A, and the area at first in removing beginning portion 26 is biggish as a result,
Interface 24 is that starting point is removed to remove beginning portion 26.Stiffening plate 3B is removed as a result,.Then, laminated body 6 is made to autotomy corner 6A
It is bent again towards corner cut portion 6C, is thus removing the lesser interface 28 of area in beginning portion 30 to remove beginning portion 30 as starting point
It is removed.Stiffening plate 3A is removed as a result,.The insertion of knife N is preferably set to 7mm or more according to the size of laminated body 6, more excellent
Choosing is set in 15mm~20mm or so.
In addition, the removing beginning portion production for being characterized by knife N progress of stripping off device and stripping means of the invention
Method sees below this point.
Stripping off device 40
Fig. 7 is the longitudinal section view for indicating the structure of stripping off device (peeling member) 40 of embodiment, and Fig. 8 is schematically
Indicate top view of multiple movable bodys 44 relative to the stripping unit 42 of the allocation position of the stripping unit 42 of stripping off device 40.Separately
Outside, Fig. 7 is equivalent to the cross-sectional view of the line D-D along Fig. 8, in addition, indicating laminated body 6 in fig. 8 with solid line.
Stripping off device 40 shown in Fig. 7 includes being configured above and below laminated body 6 in a manner of clamping laminated body 6
A pair of of movable device 46,46.Movable device 46,46 structures are identical, therefore, illustrate to configure the movable dress in the downside of Fig. 7 herein
46 are set, the movable device 46 to configuration in upside marks identical appended drawing reference and omits the description.
Movable device 46 makes the multiple of 44 lifting moving of movable body including multiple movable bodys 44, according to each movable body 44
Driving device (driving portion) 48 and the controller 50 (driving portion) that driving device 48 is controlled according to each driving device 48
Deng.
In order to make stiffening plate 3B flexible deformation, stripping unit 42 is by stiffening plate 3B vacuum suction and keeps.In addition, replacing true
Suction is attached, can also use Electrostatic Absorption or magnetic suck.
Stripping unit 42
(A) of Fig. 9 is the top view of stripping unit 42, (B) of Fig. 9 be along Fig. 9 (A) E-E line, removing it is single
The amplification longitudinal section view of member 42.In addition, (C) of Fig. 9 is to indicate the adsorption section 54 for constituting stripping unit 42 by double-sided adhesive tape
56 are set to the flex plate 52 for the plate of rectangle for constituting stripping unit 42, stripping unit 42 amplification by loading and unloading freely
Longitudinal section view.
Stripping unit 42 is configured to as described, and adsorption section 54 is pacified by loading and unloading freely by double-sided adhesive tape 56
Loaded on flex plate 52.
The flex plate 58 that adsorption section 54 has thickness thinner than flex plate 52.The lower surface of the flex plate 58 is by double-sided adhesive
The upper surface for being installed on flex plate 52 by loading and unloading freely with 56.
In addition, adsorption section 54 has the aeration for adsorbing the rectangle of the inner surface of the stiffening plate 3B of retaining layer stack 6
Sheet material 60.The tensile stress of stiffening plate 3B is resulted from removing in order to reduce, aeration sheet material 60 with a thickness of 2mm hereinafter,
Preferably 1mm hereinafter, use the aeration sheet material 60 with a thickness of 0.5mm in embodiments.
In addition, adsorption section 54 also has the sealing frame structure for surrounding aeration sheet material 60 and abutting with the outer peripheral surface of stiffening plate 3B
Part 62.Sealing frame component 62 and aeration sheet material 60 are adhered to the upper surface of flex plate 58 by double-sided adhesive sheet material 64.In addition,
Sealing frame component 62 is the cavernous body that Shore E hardness is 20 degree or more and 50 degree closed pores below, the thickness of sealing frame component 62
It is configured to 0.3mm~0.5mm thicker than the thickness of aeration sheet material 60.
With the slot 66 of frame-shaped between aeration sheet material 60 and sealing frame component 62.In addition, having in the opening of flex plate 52
One end of multiple through holes 68, these through holes 68 is connected to slot 66, and the other end is through not shown suction pipeline and source of suction
(such as vacuum pump) connection.
Thus, when driving the source of suction, the air in the suction pipeline, through hole 68 and slot 66 is attracted, from
And the inner surface of the stiffening plate 3B of laminated body 6 by vacuum suction and is held in aeration sheet material 60, also, the periphery of stiffening plate 3B
Face is pushed and is connected to sealing frame component 62, therefore the airtightness of the adsorption space surrounded by sealing frame component 62 improves.
Compared with flex plate 58, aeration sheet material 60 and sealing frame component 62, the flexural rigidity of flex plate 52 is higher, flexible
The flexural rigidity of plate 52 determines the flexural rigidity of stripping unit 42.It is preferred that the bending of the per unit width (1mm) of stripping unit 42
Rigidity is 1000Nmm2/ mm~40000Nmm2/mm.For example, the width in stripping unit 42 is the part of 100mm, it is bent
Rigidity is 100000Nmm2~4000000Nmm2.By the way that the flexural rigidity of stripping unit 42 is set as 1000Nmm2/mm
More than, absorption can be prevented to be held in the stiffening plate 3B bending of stripping unit 42.Also, by the way that the bending of stripping unit 42 is rigid
Property is set as 40000Nmm2/ mm is hereinafter, can make to adsorb the stiffening plate 3B for being held in stripping unit 42 suitably flexible deformation.
Flex plate 52,58 is that Young's modulus is 10GPa resinous member below, for example, polycarbonate resin, polychlorostyrene
The resinous member of ethylene (PVC) resin, acrylic resin, polyacetals (POM) resin etc..
Movable device 46
It is fixed in the lower surface of flex plate 52 in chessboard trellis as shown in Figure 8 shown in Fig. 7 discoid more
A movable body 44.These movable bodys 44 are fixed on flex plate 52 using fastening members such as bolts, also can replace bolt and are bonded
It is fixed on flex plate 52.These movable bodys 44 control the driving device 48 driven independently lifting moving using by controller 50.
That is, controller 50 controls driving device 48 to make the position from the corner cut portion side 6A for the laminated body 6 being located in Fig. 8
Movable body 44 to arrow C shown in the movable body 44 of the position positioned at the corner cut portion side 6C of removing direction of travel successively decline shifting
It is dynamic.According to the movement, as shown in the longitudinal section view of Figure 10, it is to remove beginning portion 26 (referring to Fig. 4) at the interface of laminated body 6 24
Starting point is removed.In addition, Fig. 7, laminated body shown in Fig. 10 6 are to utilize removing beginning portion illustrated in fig. 3 production method system
The laminated body 6 in removing beginning portion 26,30 is made.
Driving device 48 is for example including revolving servo motor and ball screw framework etc..The rotary motion of servo motor
Linear motion is converted in ball screw framework, is transferred to the bar 70 of ball screw framework.In the top end part of bar 70 across ball
Connector 72 is equipped with movable body 44.Incline thereby, it is possible to make movable body 44 follow the flexible deformation of stripping unit 42 as shown in Figure 10
It is dynamic.Thus, stripping unit 42 can be made to autotomy corner 6A not applying excessive power to stripping unit 42 to scratch towards corner cut portion 6C
Property deformation.In addition, being not limited to revolving servo motor and ball screw framework as driving device 48, can also be
Linear servo motor or fluid-pressure cylinder (such as pneumatic cylinder).
Multiple driving devices 48 are preferably installed on liftable frame 74 across buffer component 76.Buffer component 76 is to follow
The mode flexible deformation of the flexible deformation of stripping unit 42.Bar 70 fascinates relative to frame 74 as a result,.
When removing the stiffening plate 3B of removing from stripping unit 42, carry out down frame 74 using driving portion (not shown)
Drop movement.
Controller 50 be configured to include the recording mediums such as ROM and RAM, CPU etc. computer.Controller 50 executes CPU
The program of record on the recording medium, controls multiple driving devices 48 according to each driving device 48 as a result, so that control is more
The lifting moving of a movable body 44.
The stripping means of stiffening plate 3A, 3B is removed using stripping off device 40
(C) expression of (the A)~Figure 12 of (C) and Figure 12 of (A)~Figure 11 of Figure 11 is peeled away using illustrated in fig. 3
Beginning portion's production method has removing beginning portion 26,30, laminated body 6 stripping means in corner 6Aa production.That is, at (A) of Figure 11
Shown in chronological order in (C) of (the A)~Figure 12 of (C) and Figure 12 of~Figure 11 to stiffening plate 3A, 3B of laminated body 6 into
The stripping means of row removing.
In addition, inputting the input operation of laminated body 6 to stripping off device 40, exporting the stiffening plate removed from stripping off device 40
Conveying device 80 of the output operation of 3A, 3B and panel P as shown in (A) of Figure 11 with sucker 78 carries out.Wherein, scheming
11, Tu12Zhong, it is multifarious in order to avoid attached drawing, the diagram of movable device 46 is omitted.In addition, panel P refers to across function
Layer 7 is pasted with products panel made of the substrate 2A and substrate 2B for removing stiffening plate 3A, 3B.
(A) of Figure 11 is the removing that laminated body 6 is placed in downside by movement shown in arrow F, G by conveying device 80
Unit 42, stripping off device 40 side view.In this case, in order in the stripping unit 42 of the stripping unit of downside and upside
Between be inserted into conveying device 80, and move back the stripping unit 42 of downside and preparatory relatively move to of stripping unit 42 of upside sufficiently
The position kept away.Later, when laminated body 6 to be placed in the stripping unit 42 of downside, by 42 vacuum suction of stripping unit of downside
And the stiffening plate 3B of retaining layer stack 6.It is kept that is, (A) of Figure 11 shows stiffening plate 3B by the absorption of stripping unit 42 of downside
Absorption process.
(B) of Figure 11 be the stripping unit 42 for the stripping unit 42 and upside for making downside it is mobile to relatively close direction and
Make the stiffening plate 3A of laminated body 6 by the side view of the stripping off device 40 of 42 vacuum suction of stripping unit of upside and the state of holding
Figure.That is, (B) of Figure 11 shows the absorption process that stiffening plate 3A is kept by the absorption of stripping unit 42 of upside.
In addition, in the case where removing the substrate 2 of laminated body 1 shown in FIG. 1 from stiffening plate 3 using stripping off device 40,
Substrate 2 as the 1st substrate is supported by the stripping unit 42 of upside, as the 2nd substrate stiffening plate 3 by downside stripping unit
42 absorption are kept.In this case, the supporting part of supporting substrates 2 is not limited to stripping unit 42, as long as can be with substrate 2
The component of detachable mode supporting substrates 2.But by the way that stripping unit 42 is used as supporting part, substrate 2 can be made
It is bent and removes simultaneously with stiffening plate 3, therefore compared with only making substrate 2 or the curved form of stiffening plate 3, stripping can be reduced by having
The advantages of from power.
Back to Figure 11, (C) of Figure 11 is to indicate to make downside from the corner cut portion 6A of laminated body 6 towards corner cut portion 6C on one side
Flexible deformation is shelled on one side at the interface of laminated body 6 24 with removing beginning portion 26 (referring to Fig. 4) as starting point stripping unit 42 downwards
From state side view.That is, making in multiple movable bodys 44 of the stripping unit 42 of downside shown in Fig. 10 from positioned at stacking
The movable body 44 of the corner cut portion side 6A of body 6 to the movable body 44 for being located at the corner cut portion side 6C successively declines movement, thus at interface 24
Remove stiffening plate 3B.Alternatively, it is also possible to make in multiple movable bodys 44 of the stripping unit 42 of upside in linkage with the movement certainly
Movable body 44 to the movable body 44 for being located at the corner cut portion side 6C positioned at the corner cut portion side 6A of laminated body 6 successively rises movement, thus
It is removed at interface 24.As a result, compared with only making the curved form of stiffening plate 3B, peeling force can be reduced.
The state that (A) of Figure 12, which is stiffening plate 3B, to be completely exfoliated at interface 24, stripping off device 40 side view.According to
(A) of Figure 12, stiffening plate 3B vacuum suction under removing and the stripping unit 42 for being held in downside remove the stacking of stiffening plate 3B
(laminated body including the stiffening plate 3A and panel P) vacuum suction of body 6 and the stripping unit 42 for being held in upside.
In addition, in order to be inserted into conveying device 80 shown in (A) of Figure 11 between upper and lower stripping unit 42, and make downside
Stripping unit 42 and the stripping unit 42 of upside relatively move to the position sufficiently kept out of the way.
Later, firstly, releasing the vacuum suction of the stripping unit 42 of downside.Then, the sucker 78 of conveying device 80 is utilized
It is adsorbed across resin layer 4B and keeps stiffening plate 3B.Then, conveying device 80 shown in arrow H, I by (A) of Figure 12
Movement, stiffening plate 3B is exported from stripping off device 40.
(B) of Figure 12 is to remove the laminated body 6 of stiffening plate 3B by the stripping unit 42 of downside and the stripping unit 42 of upside
Vacuum suction and the side view kept.That is, make downside stripping unit 42 and upside stripping unit 42 to relatively close side
To movement, and by 42 vacuum suction of the stripping unit of downside and keep substrate 2B.
(C) of Figure 12 is the stripping unit 42 for indicating to make from the corner cut portion 6A of laminated body 6 towards corner cut portion 6C on one side upside
Flexible deformation is on one side at the interface of laminated body 6 28 to remove the state that beginning portion 30 (referring to Fig. 4) is starting point removing upwards
Side view.That is, making in multiple movable bodys 44 of the stripping unit 42 of upside shown in Fig. 10 from the corner cut portion for being located at laminated body 6
The movable body 44 of the side 6A to the movable body 44 for being located at the corner cut portion side 6C successively rises movement, to remove stiffening plate at interface 28
3A.Alternatively, it is also possible to make in multiple movable bodys 44 of the stripping unit 42 of downside in linkage with the movement from positioned at laminated body 6
The corner cut portion side 6A movable body 44 to be located at the corner cut portion side 6C movable body 44 successively decline movement, thus interface 28 progress
Removing.As a result, compared with only making the curved form of stiffening plate 3A, peeling force can be reduced.
Later, the stiffening plate 3A stripped down completely from panel P is taken out from the stripping unit 42 of upside, certainly by panel P
The stripping unit 42 of downside is taken out.It is the stripping means for the laminated body 6 for having removing beginning portion 26,30 in corner 6Aa production above.
Remove the feature of beginning portion producing device 10
Figure 13 is the state for indicating the local Na-1 of the edge of a knife Na of the corner 6Aa and knife N of corner cut portion 6A of laminated body 6 and contacting
Top view.In addition, knife N is configured to tabular, there is linear edge of a knife Na along its edge.
As shown in figure 5, laminated body 6 and knife N configuration are in the horizontal plane.By making arrow of the knife N in the horizontal plane into Figure 13
The head direction A is mobile, and contacts the local Na-1 of edge of a knife Na with corner 6Aa, and later, the local Na-1 of edge of a knife Na is inserted into interface 24
(referring to (B) of Fig. 3).
Arrow A direction of the conveying device 18 including feed screw 82 and motor 84 in Fig. 6 is utilized back to Fig. 5, knife N
It is moved back and forth with the direction arrow B.Keep out of the way the amount of movement in direction shown in the amount of movement and arrow B of direction of insertion shown in arrow A
It is controlled by the control unit (control unit) 86 in Fig. 5 for controlling motor 84.
On the other hand, for adsorbing the workbench 12 of retaining layer stack 6 using including the defeated of feed screw 88 and motor 90
Arrow J direction and arrow K direction of the device (portion of moving mechanism) 92 in the horizontal plane in Fig. 6 is sent to move back and forth.Such as Figure 13 institute
Show, the direction arrow J, K is set to the parallel direction the linear edge of a knife Na with knife N.In addition, workbench 12 is along arrow J, K
The amount of movement in direction is also controlled by the control unit 86 for controlling motor 90.
That is, according to removing beginning portion producing device 10, by using motor 84 make knife N moved along the direction arrow A, B and
Laminated body 6 is moved along the direction arrow J, K using motor 90, can change knife N and the relative position of laminated body 6 in the plane
(insertion position change component).In addition, the edge of a knife Na that can change knife N is inserted by moving laminated body 6 along the direction arrow J, K
Enter the insertion position at the interface 24,28 of laminated body 6.
That is, removing beginning portion producing device 10 can change laminated body 6 relative to knife N in plane using conveying device 92
On position.In addition, can make knife N's by controlling conveying device 92 along the amount of movement in the direction arrow J, K using control unit 86
The insertion position at the interface 24,28 of edge of a knife Na insertion laminated body 6 changes from the insertion position of last time.That is, in control unit 86
It is built-in with the storage unit for storing the position that edge of a knife Na last time is inserted into, in the case where the position of edge of a knife Na to be changed, according to
The position of last time is changed.
Remove the effect of beginning portion producing device 10
(F) of (A)~Figure 14 of Figure 14 is the stripping for indicating to carry out using removing beginning portion producing device 10 in chronological order
Leave the top view of an example of beginning portion's production method (removing beginning portion production process).
As shown in (A) of Figure 14, in the insertion starting position of knife N, the local Na-1 and corner 6Aa of edge of a knife Na relatively matches
It sets.Later, make knife N mobile to the direction arrow A as shown in (B) of Figure 14.The local Na-1 of edge of a knife Na is inserted into stacking as a result,
The interface 24 of body 6, and make removing beginning portion 26 at interface 24 (referring to (C) of Fig. 3).
(C) of Figure 14 is to keep knife N mobile to the direction arrow B and restore knife N to the top view of insertion starting position.Separately
Outside, in the explanatory diagram of Figure 14, for easy understanding illustrate feature of the invention, and assume because the primary insertion of knife N is dynamic
Make and is illustrated the case where generating tipping on edge of a knife Na.
As shown in (C) of Figure 14, the edge of a knife Na of knife N insertion interface 24 local Na-1 because be inserted into when and cullet
It is (not shown) contact and generate tipping.
The feature of the tipping shape of the edge of a knife Na of knife N
(A) of Figure 15 is the top view for illustrating the tipping shape of edge of a knife Na.
In laminated body 6, there are using corner 6Aa as an edge 6E of apex angle and corner cut portion 6A (another edge).Here,
The case where one edge 6E and edge of a knife Na angulation are set as θ 1, corner cut portion 6A and edge of a knife Na angulation are set as 2 θ
Under, the length on the basis of the 6Aa of corner, compared with biggish 1 side θ of angle, in the part of lesser 2 side the θ insertion of angle
It is longer.Therefore, longer correspondingly with intubating length, compared with the edge of a knife Na of 1 side θ, the edge of a knife Na in 2 side θ generates longer
Tipping (a < b: 4 (C) referring to Fig.1).Here, a is the length of the tipping generated in 1 side θ, b is the tipping generated in 2 side θ
Length.A, b is the length on the length direction of edge of a knife Na.
Therefore, in order to next time insertion when have the local Na-1 of tipping without using edge of a knife Na, and make laminated body 6 to
Move predetermined amount in the direction arrow J shown in (D) of Figure 14.That is, with by the normal knife of the not tipping of biggish 1 side θ of angle
Mouth Na-2 changes the insertion position of edge of a knife Na for the mode of insertion next time.It, can as a result, when being inserted into interface 28 (next time)
Using the normal part Na-2 of the not tipping of edge of a knife Na, therefore it can reliably make removing beginning portion 30.
In addition, laminated body 6 is preferably set as a < c to the amount of change c that the direction arrow J is changed as shown in (E) of Figure 14
< b.As a result, compared with changing the position of edge of a knife Na towards lesser 2 side θ of angle, the offset of edge of a knife Na can be reduced, therefore
The overall length of edge of a knife Na can be effectively utilized.
Removing beginning portion production method is that one removing beginning portion of every production just utilizes the control conveying dress of control unit 86
Set 92 come change edge of a knife Na insertion position method, but be not limited to this method.
For example, be assumed to be will not due to the primary insert action of knife N on edge of a knife Na generate tipping in the case where,
The local Na-1 of edge of a knife Na can be inserted into interface 28, be inserted into newly in the next insertion to the interface of laminated body 6 24,28
Edge of a knife Na-2.That is, can also be to change knife in such a way that multiple (such as 2 times or more) insert action just uses new edge of a knife Na
The insertion position of mouth Na.
In addition, as shown in figure 5, include the detection device (detection part) 94 of the tipping for detecting the edge of a knife Na of knife N,
When detecting the tipping of edge of a knife Na using detection device 94, as long as controlling conveying device 92 using control unit 86 and making laminated body 6
The mobile scheduled offset in the direction arrow J into Figure 14.
In the insertion position change method, and next time insertion when using not tipping normal edge of a knife Na, because
This reliably can make next removing beginning portion in laminated body 6.In addition, collapsing in the local Na-1 for detecting edge of a knife Na
When sword, the normal part Na-2 adjacent with local Na-1 is used for next insertion, therefore can further extend the use of knife N
Service life.In addition, detection device 94 can be applied for shooting the photographic device of tipping, with what is be arranged in a manner of across the edge of a knife
Light projection unit and the Optical devices of light receiver etc. are able to detect the device of tipping.
In addition, as described, when changing insertion position, changing the insertion position of edge of a knife Na towards biggish 1 side θ of angle
It sets, therefore compared with changing the position of edge of a knife Na towards lesser 2 side θ of angle, the offset of edge of a knife Na can be reduced.Therefore,
The overall length of edge of a knife Na can effectively further be utilized.
(B) of Figure 15 is the explanatory diagram for indicating the special case of variation of insertion position.
Sometimes have to (B) institute that corner cut portion 6A and Figure 15 in (A) of variform Figure 15 are coped with using same knife N
The corner cut portion 6F shown.
θ 3 shown in (B) of Figure 15 be using corner 6Fa as an edge 6G of apex angle and edge of a knife Na angulation, θ 4 be with
Corner 6Fa is another edge, the i.e. corner cut portion 6F and edge of a knife Na angulation of apex angle.In general, the form of (B) in Figure 15
Under, 3 < θ 4 of θ, therefore offset (movement) direction of laminated body 6 is the direction arrow K, is and the direction the arrow J phase in Figure 15 (A)
Anti- direction.
However, θ 3 shown in (B) of θ 2 and Figure 15 shown in (A) to Figure 15 is compared, it is known that 2 < θ 3 of θ, in Figure 15
(B) form under tipping range it is relatively narrow, therefore, in this case, as long as the form of (A) of preferential Figure 15, by offset side
To being set as the direction arrow J.
The specific embodiment of detail or reference illustrates the present invention, but those skilled in the art it is clear that, Neng Gou
Apply various changes, amendment under the premise of without departing from the spirit and scope of the invention.
The application based on Japanese Patent filed on July 11st, 2014 go out be willing to 2014-143018, content by referring to
It is programmed into this specification.
Description of symbols
N, knife；The part of Na, Na-1, Na-2, the edge of a knife；P, panel；1, laminated body；1A, the 1st laminated body；1B, the 2nd stacking
Body；2, substrate；The surface of 2a, substrate；The back side of 2b, substrate；2A, substrate；The surface of 2Aa, substrate；2B, substrate；2Ba, substrate
Surface；The back side of 2Bb, substrate；3, stiffening plate；The surface of 3a, stiffening plate；3A, stiffening plate；3B, stiffening plate；3Bb, stiffening plate
The back side；4, resin layer；4A, resin layer；4B, resin layer；6, laminated body；6A~6D, corner cut portion；6Aa, 6Fa, corner；7, function
Ergosphere；8, stiffening plate；10, beginning portion producing device is removed；12, workbench；14, holder；16, height adjuster；18, defeated
Send device；20, liquid；22, fluid Supplying apparatus；24, interface；26, beginning portion is removed；28, interface；30, beginning portion is removed；
40, stripping off device；42, stripping unit；44, movable body；46, movable device；48, driving device；50, controller；52, flexible
Plate；54, adsorption section；56, double-sided adhesive tape；58, flex plate；60, aeration sheet material；62, sealing frame component；64, double-sided adhesive
Sheet material；66, slot；68, through hole；70, bar；72, spherojoint；74, frame；76, buffer component；78, sucker；80, conveying device；
82, feed screw；84, motor；86, control unit；88, feed screw；90, motor；92, conveying device；94, detection device.
Claims (9)
1. a kind of stripping off device of laminated body, for pasting rectangle made of the 1st substrate and the 2nd substrate in a manner of it can remove
Laminated body, the interface between the 1st substrate and the 2nd substrate removed, which is characterized in that
The stripping off device of the laminated body includes:
Hoe scaler is tabular, along its edge be equipped with the edge of a knife, by by the edge of a knife from the corner of the laminated body to institute
Interface insertion predetermined amount is stated, and removes beginning portion in the interface manufacture；
Peeling member removes the laminated body at the interface using the removing beginning portion as starting point；
Insertion position changes component, for changing the hoe scaler and the relative position of the laminated body in the plane；And
Control unit controls the insertion position and changes component, so that the edge of a knife for changing the hoe scaler is inserted into the interface
Insertion position,
For using the laminated body for the edge of a knife insertion of the hoe scaler corner as an edge of apex angle and another edge,
The control unit controls the insertion position and changes component so that an edge and the edge of a knife angulation and
The edge of a knife of the biggish side of angle in another edge and the edge of a knife angulation is altered to the insertion position of next time.
2. the stripping off device of layered product according to the claim 1, wherein
The control unit controls the insertion position and changes component, so that every at least one described removing beginning portion of production just makes
The insertion position of the edge of a knife changes from the insertion position of last time.
3. the stripping off device of layered product according to the claim 1, wherein
The stripping off device of the laminated body further includes the detection part for the tipping for detecting the edge of a knife of the hoe scaler, is utilizing institute
When stating detection part and detecting the tipping of the edge of a knife, the control unit controls the insertion position and changes component, so that the knife
The insertion position of mouth changes from the insertion position of last time.
4. a kind of stripping means of laminated body, for pasting rectangle made of the 1st substrate and the 2nd substrate in a manner of it can remove
Laminated body, the interface between the 1st substrate and the 2nd substrate removed, which is characterized in that
The stripping means of the laminated body includes
Beginning portion production process is removed, by the edge of a knife that will be arranged along the edge of flat hoe scaler from the laminated body
Predetermined amount is inserted into the interface in corner, and removes beginning portion in the interface manufacture；And
Stripping process removes the laminated body at the interface using the removing beginning portion as starting point,
It is described removing beginning portion production process include change the hoe scaler the edge of a knife be inserted into the interface insertion position insert
Enter position change process,
For using the laminated body for the edge of a knife insertion of the hoe scaler corner as an edge of apex angle and another edge,
Change in process in the insertion position, make an edge and the edge of a knife angulation and another edge with
The edge of a knife of the biggish side of angle in the edge of a knife angulation is altered to the insertion position of next time.
5. the stripping means of laminated body according to claim 4, wherein
Change in process in the insertion position, at least one described removing beginning portion of every production just makes the insertion position of the edge of a knife
It sets from the change of the insertion position of last time.
6. the stripping means of laminated body according to claim 4, wherein
Change in process in the insertion position, when detecting the tipping of the edge of a knife of the hoe scaler, makes inserting for the edge of a knife
Enter position to change from the insertion position of last time.
7. a kind of manufacturing method of electronic device, the manufacturing method of the electronic device includes functional layer formation process, for energy
The mode enough removed pastes the laminated body of rectangle made of the 1st substrate and the 2nd substrate, is formed in the exposure of the 1st substrate
Functional layer；And separation process, self-forming have the 1st substrate of the functional layer to separate the 2nd substrate, feature exists
In,
The separation process includes
Beginning portion production process is removed, by the edge of a knife that will be arranged along the edge of flat hoe scaler from the laminated body
Predetermined amount is inserted into the interface between the 1st substrate and the 2nd substrate in corner, and starts in interface manufacture removing
Portion；And
Stripping process removes the laminated body at the interface using the removing beginning portion as starting point,
It is described removing beginning portion production process include change the hoe scaler the edge of a knife be inserted into the interface insertion position insert
Enter position change process,
For using the laminated body for the edge of a knife insertion of the hoe scaler corner as an edge of apex angle and another edge,
Change in process in the insertion position, make an edge and the edge of a knife angulation and another edge with
The edge of a knife of the biggish side of angle in the edge of a knife angulation is altered to the insertion position of next time.
8. the manufacturing method of electronic device according to claim 7, wherein
Change in process in the insertion position, at least one described removing beginning portion of every production just makes the insertion position of the edge of a knife
It sets from the change of the insertion position of last time.
9. the manufacturing method of electronic device according to claim 7, wherein
Change in process in the insertion position, when detecting the tipping of the edge of a knife of the hoe scaler, makes inserting for the edge of a knife
Enter position to change from the insertion position of last time.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014143018A JP6354945B2 (en) | 2014-07-11 | 2014-07-11 | Laminate peeling apparatus, peeling method, and electronic device manufacturing method |
| JP2014-143018 | 2014-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105252881A CN105252881A (en) | 2016-01-20 |
| CN105252881B true CN105252881B (en) | 2019-03-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510406253.3A Active CN105252881B (en) | 2014-07-11 | 2015-07-10 | The stripping off device and stripping means of laminated body and the manufacturing method of electronic device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6354945B2 (en) |
| KR (1) | KR20160007400A (en) |
| CN (1) | CN105252881B (en) |
| TW (1) | TWI659849B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109904532B (en) * | 2017-12-11 | 2021-04-13 | 北京小米移动软件有限公司 | Battery stripping module and terminal |
| CN109693847A (en) * | 2019-02-22 | 2019-04-30 | 苏州威兹泰克自动化科技有限公司 | Automated tag mechanism for stripping |
| JP7057337B2 (en) * | 2019-10-29 | 2022-04-19 | キヤノントッキ株式会社 | Board peeling device, board processing device, and board peeling method |
| JP6900540B1 (en) * | 2020-04-08 | 2021-07-07 | 信越エンジニアリング株式会社 | Work separation device and work separation method |
| JP7166571B2 (en) * | 2020-09-07 | 2022-11-08 | 株式会社丸仲鉄工所 | Method for separating film-like member |
| AU2021443414A1 (en) * | 2021-04-28 | 2023-11-02 | Da Ae Bong | Steam peeling device for automobile tinting film |
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| EP0334232A1 (en) * | 1988-03-22 | 1989-09-27 | Kabushiki Kaisha Murao and Company | Residual roving clearing apparatus |
| CN103219263A (en) * | 2012-01-19 | 2013-07-24 | 旭硝子株式会社 | Peeling device and method for producing electronic device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100543024B1 (en) * | 1998-01-21 | 2006-05-25 | 삼성전자주식회사 | Polarizer Removal Device of Liquid Crystal Display |
| JP4241697B2 (en) * | 2005-09-06 | 2009-03-18 | ユーテック株式会社 | Film peeling device |
| CN201321191Y (en) | 2008-12-11 | 2009-10-07 | 唐颖 | Anti-counterfeiting bottle stopper |
| CN102171745B (en) * | 2009-02-06 | 2014-10-08 | 旭硝子株式会社 | Method for manufacturing electronic device and separation apparatus used therefor |
| CN102202994B (en) | 2009-08-31 | 2014-03-12 | 旭硝子株式会社 | Peeling device |
| JP5870000B2 (en) * | 2012-09-19 | 2016-02-24 | 東京エレクトロン株式会社 | Peeling device, peeling system and peeling method |
-
2014
- 2014-07-11 JP JP2014143018A patent/JP6354945B2/en active Active
-
2015
- 2015-07-08 KR KR1020150097081A patent/KR20160007400A/en unknown
- 2015-07-09 TW TW104122386A patent/TWI659849B/en active
- 2015-07-10 CN CN201510406253.3A patent/CN105252881B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0334232A1 (en) * | 1988-03-22 | 1989-09-27 | Kabushiki Kaisha Murao and Company | Residual roving clearing apparatus |
| CN103219263A (en) * | 2012-01-19 | 2013-07-24 | 旭硝子株式会社 | Peeling device and method for producing electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6354945B2 (en) | 2018-07-11 |
| TWI659849B (en) | 2019-05-21 |
| JP2016016983A (en) | 2016-02-01 |
| KR20160007400A (en) | 2016-01-20 |
| CN105252881A (en) | 2016-01-20 |
| TW201607764A (en) | 2016-03-01 |
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