CN105252881A - Stripping device and stripping method of laminate and method for manufacturing electronic device - Google Patents
Stripping device and stripping method of laminate and method for manufacturing electronic device Download PDFInfo
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- CN105252881A CN105252881A CN201510406253.3A CN201510406253A CN105252881A CN 105252881 A CN105252881 A CN 105252881A CN 201510406253 A CN201510406253 A CN 201510406253A CN 105252881 A CN105252881 A CN 105252881A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
- B32B38/105—Removing layers, or parts of layers, mechanically or chemically on edges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Microelectronics & Electronic Packaging (AREA)
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- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
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Abstract
The invention provides a stripping device and a stripping method of a laminate and a method for manufacturing an electronic device. The stripping device of the laminate can strip an interface between a first substrate and a second substrate for the rectangular laminate to which the first substrate and the second substrate are adhered in a stripping manner. The stripping device of the laminate includes a tabulate stripping cutter having a cutter edge along the edge of the cutter, in which the cutter edge is inserted by a predetermined quantity from a corner part of the laminate to an interface, thus a stripping starting part is manufactured in the interface; and a stripping part in which the laminate is stripped in the interface through taking of the stripping starting part as a starting point; an insertion position changing part used for changing the relative position of the stripping cutter and the laminate in the plane; and a control part which controls the insertion position changing part so as to change the insertion position of the cutter edge of the stripping cutter is inserted in the interface.
Description
Technical field
The present invention relates to the stripping off device of duplexer and the manufacture method of stripping means and electronic device.
Background technology
Along with slimming, the lightness of the electronic devices such as display floater, solar cell, thin-film secondary battery, expect the thin plate of the substrate (the 1st substrate) such as glass plate, resin plate, metallic plate being applied to these electronic devices.
But, if the lower thickness of substrate, then the treatability of substrate worsens, and therefore, is difficult to form functional layer (thin film transistor (TFT) (TFT:ThinFilmTransistor) and colour filter (CF:ColorFilter)) used for electronic device on the surface of substrate.
Therefore, motion has the manufacture method of following a kind of electronic device: paste stiffener (the 2nd substrate) at the back side of substrate thus form the duplexer utilizing stiffener to strengthen substrate, and forms functional layer on the surface of substrate under the state of duplexer.In this manufacture method, the treatability of substrate improves, therefore, it is possible to form functional layer well on the surface of substrate.And stiffener can from strippable substrate after formation functional layer.
The stripping means of the stiffener disclosed in patent document 1 makes stiffener or substrate or their twocoueses direction flexible deformation separated from each other carry out by a bight in the bight of two on the diagonal being arranged in rectangular-shaped duplexer towards another bight.Now, in order to make stripping carry out smoothly, making in a bight of duplexer and peeling off start portion.Peel off start portion to make by the edge of a knife of hoe scaler is inserted scheduled volume from a bight of duplexer in the interface between substrate and stiffener.
In addition, patent document 2 discloses a kind of stripping off device carrying out peeling off for the cutter (blade portion) of sharp component (hoe scaler) being inserted processed interface between substrate (the 1st substrate) and supporting substrates (the 2nd substrate) at interface similarly.
Patent document 1: No. 2011/024689th, International Publication
Patent document 2: No. 2014-60346, Japanese Unexamined Patent Publication
Summary of the invention
the problem that invention will solve
For the stripping off device of patent document 1,2, when utilizing hoe scaler to peel off start portion at interface manufacture, when the edge of a knife contacts with the small cullet in the bight being attached to duplexer, sometimes on the edge of a knife, produce tipping.For the edge of a knife with tipping, this edge of a knife reliably cannot be inserted ensuing interface, therefore there is such problem: reliably cannot be manufactured with the stripping start portion helping peel off in interface at ensuing interface.
The present invention makes in view of such problem, its object is to provide the edge of a knife of hoe scaler can be utilized reliably to make at the interface of duplexer peel off start portion, the stripping off device of duplexer and the manufacture method of stripping means and electronic device.
for the scheme of dealing with problems
In order to reach described object, the stripping off device of duplexer of the present invention is for the duplexer of rectangle pasting the 1st substrate and the 2nd substrate in the mode that can peel off, interface between described 1st substrate and described 2nd substrate is peeled off, it is characterized in that, the stripping off device of this duplexer comprises: hoe scaler, and it is tabular, is provided with the edge of a knife along its edge, by the described edge of a knife is inserted scheduled volume from the bight of described duplexer to described interface, and peel off start portion at described interface manufacture; Peeling member, its with described stripping start portion for starting point is peeled off described duplexer at described interface; Insertion position changes parts, and it is for changing described hoe scaler and described duplexer relative position in the plane; And control assembly, it controls described insertion position and changes parts, makes the edge of a knife changing described hoe scaler insert the insertion position at described interface.
In order to reach described object, the stripping means of duplexer of the present invention is for the duplexer of rectangle pasting the 1st substrate and the 2nd substrate in the mode that can peel off, interface between described 1st substrate and described 2nd substrate is peeled off, it is characterized in that, the stripping means of this duplexer has: peel off start portion production process, insert scheduled volume from the bight of described duplexer to described interface by the edge of a knife arranged the edge along flat hoe scaler, and peel off start portion at described interface manufacture; And stripping process, with described stripping start portion for starting point is peeled off described duplexer at described interface, described stripping start portion production process comprises the insertion position change operation that the edge of a knife changing described hoe scaler inserts the insertion position at described interface.
In order to reach described object, the manufacture method of electronic device of the present invention has: functional layer formation process, for the duplexer of rectangle pasting the 1st substrate and the 2nd substrate in the mode that can peel off, forms functional layer in the exposure of described 1st substrate; And separation circuit, self-forming has described 1st substrate of described functional layer to be separated described 2nd substrate, it is characterized in that, described separation circuit has: peel off start portion production process, insert scheduled volume from the bight of described duplexer to the interface between described 1st substrate and described 2nd substrate by the edge of a knife arranged the edge along flat hoe scaler, and peel off start portion at described interface manufacture; And stripping process, with described stripping start portion for starting point is peeled off described duplexer at described interface, described stripping start portion production process comprises the insertion position change operation that the edge of a knife changing described hoe scaler inserts the insertion position at described interface.
According to the present invention, change in operation in insertion position, control insertion position change parts by control assembly, the edge of a knife changing hoe scaler inserts the insertion position at interface.Therefore, according to a technical scheme of the present invention, if change the insertion position of the edge of a knife, then use the normal edge of a knife not having tipping when next time inserts, peel off start portion therefore, it is possible to reliably make at the interface of duplexer.
Hoe scaler of the present invention is flat shape, is the hoe scaler of the flat blade shape shape being provided with the edge of a knife along edge.
On the other hand, be actually used in the edge of a knife making stripping start portion is a very little part for the total length (also referred to as effective length) of the edge of a knife.When stripping off device in the past, during owing to producing tipping in the part that this is very little, reliably cannot make and peel off start portion, therefore needing have the hoe scaler of tipping to be replaced by generation does not have the new hoe scaler of tipping.
In contrast, the roughly total length of the edge of a knife arranged along edge can be used as the edge of a knife making and peel off start portion by the present invention effectively, therefore, it is possible to reduce the replacement frequency of hoe scaler, and the service life of hoe scaler can be extended.
Described insertion position change parts of the present invention are the parts for changing hoe scaler and duplexer relative position in the plane, therefore in order to change the relative position of both hoe scaler and duplexer, both driving mechanism portion can be all set to both hoe scaler and duplexer, also at least one, driving mechanism portion can be set to change relative position.That is, stripping off device of the present invention comprises for the edge of a knife of hoe scaler being inserted the single shaft driving mechanism portion at interface and being used for changing the single shaft driving mechanism portion of described relative position.Both these two (twin shaft) driving mechanism parts can be left, and a driving mechanism portion was located at hoe scaler side, another driving mechanism portion is located at stacked side, also Two-shaft drive mechanism portion can be located at any one.
Preferably, the insertion of knots modification by the edge of a knife utilizing described insertion position to change parts to change the insertion position of the edge of a knife, a bight of inserting for the edge of a knife are that an edge of drift angle and another side portion set with edge of a knife angulation (also referred to as inserting angle) respectively.Namely, according to the insertion of the described edge of a knife and the tipping amount (length) that angle infers the edge of a knife can be inserted, therefore, preferably, the spacing that can not be used to insert next time with the edge of a knife with tipping changes described relative position, namely, the edge of a knife is offset along the length direction of the edge of a knife.Thereby, it is possible to effectively utilize the total length of the edge of a knife.
In a technical scheme of the stripping off device of duplexer of the present invention, preferably, described control assembly controls described insertion position and changes parts, makes often to make and peels off start portion described at least one and just make the insertion position of the described edge of a knife change from the insertion position of last time.
In a technical scheme of the stripping means of duplexer of the present invention and the manufacture method of electronic device, preferably, change in operation in described insertion position, often make and peel off start portion described at least one and just make the insertion position of the described edge of a knife change from the insertion position of last time.
A technical scheme according to the present invention, changes in operation in insertion position, often makes at least one stripping start portion and just makes the insertion position of the edge of a knife change from the insertion position of last time.Therefore, when often making a stripping start portion and just making the insertion position of the edge of a knife change, the normal edge of a knife not having tipping can be used when next time inserts.Thus, stripping start portion can reliably be made at duplexer.In addition, also often can make plural stripping start portion just makes the insertion position of the edge of a knife change.In a described technical scheme of the present invention, even if when not producing tipping on the edge of a knife when last time inserts, do not use the edge of a knife inserted for last time when next time inserts yet, but use the normal edge of a knife adjacent with this edge of a knife.Described control assembly stores the position of the edge of a knife that last time inserts, and when changing the position of the edge of a knife, the position according to last time changes.
Preferably, the stripping off device that another technical scheme of the stripping off device of duplexer of the present invention comprises this duplexer also comprises the detection part of the tipping of the edge of a knife for detecting described hoe scaler, when utilizing described detection part the tipping of the edge of a knife to be detected, described control assembly controls described insertion position and changes parts, changes from the insertion position of last time to make the insertion position of the described edge of a knife.
In another technical scheme of the stripping means of duplexer of the present invention and the manufacture method of electronic device, preferably, changing in operation in described insertion position, when the tipping of the edge of a knife of described hoe scaler being detected, the insertion position of the described edge of a knife being changed from the insertion position of last time.
Another technical scheme according to the present invention, change in insertion position in operation, when utilizing detection part the tipping of the edge of a knife to be detected, the insertion position of the edge of a knife is changed from the insertion position of last time, therefore, it is possible to use the normal edge of a knife not having tipping when next time inserts.Thus, stripping start portion can reliably be made at duplexer.In another technical scheme described of the present invention, when the tipping of the edge of a knife being detected, the normal edge of a knife adjacent with this edge of a knife is used for insert next time, therefore, it is possible to extend the service life of hoe scaler further.Described control assembly stores the position of the edge of a knife that last time inserts, and when changing the position of the edge of a knife, the position according to last time changes.
In the present invention, preferably, for the bight of inserting with the edge of a knife of the described hoe scaler of the confession of described duplexer be drift angle a edge and another edge, described control assembly controls described insertion position and changes parts, is altered to next insertion position to make the edge of a knife of the larger side of the angle in a described edge and described edge of a knife angulation and another edge described and described edge of a knife angulation.
In the present invention, preferably, for the bight of inserting with the edge of a knife of the described hoe scaler of the confession of described duplexer be drift angle a edge and another edge, change in operation in described insertion position, make the edge of a knife of the described edge side larger with the angle in described edge of a knife angulation and another edge described and described edge of a knife angulation be altered to next insertion position.
In said case, the new edge of a knife due to the side making angle larger is altered to the insertion position of next time, therefore be altered to the new edge of a knife of the side making angle less compared with next insertion position, the side-play amount of the amount of change of relative position, the i.e. edge of a knife can be reduced.Therefore, it is possible to effectively utilize the total length of the edge of a knife further.
the effect of invention
Adopt the stripping off device of duplexer of the present invention and the manufacture method of stripping means and electronic device, the edge of a knife of hoe scaler can be utilized reliably to make at duplexer and peel off start portion.
Accompanying drawing explanation
Fig. 1 is the main portions enlarged side view of the example representing the duplexer that the manufacturing process to electronic device supplies.
Fig. 2 is the main portions enlarged side view of the example representing the duplexer made in the midway of the manufacturing process of LCD (liquid crystal display).
(E) of (A) ~ Fig. 3 of Fig. 3 represents the key diagram utilizing and peel off the stripping start portion preparation method that start portion producing device carries out.
Fig. 4 utilizes to peel off the top view that start portion preparation method has made the duplexer of stripping start portion.
Fig. 5 represents the integrally-built side view peeling off start portion producing device.
Fig. 6 is the top view of the stripping start portion producing device shown in Fig. 5.
Fig. 7 is the longitudinal section of the structure of the stripping off device representing embodiment.
Fig. 8 be schematically show movable body relative to the allocation position peeling off unit, the top view of flex plate.
(C) of (A) ~ Fig. 9 of Fig. 9 is the key diagram representing the structure peeling off unit.
Figure 10 is the longitudinal section carrying out the stripping off device peeled off in the interface of duplexer.
(C) of (A) ~ Figure 11 of Figure 11 is the key diagram represented having made the stripping means of the stiffener stripping of peeling off the duplexer of start portion by peeling off start portion preparation method in chronological order.
(C) of (A) ~ Figure 12 of Figure 12 is the key diagram that (C) of then Figure 11 (A) ~ Figure 11 represents the stripping means peeled off by the stiffener of duplexer in chronological order.
Figure 13 is the top view of the state that the edge of a knife of cutter contacts with the bight in the corner cut portion of duplexer.
(F) of (A) ~ Figure 14 of Figure 14 represents the top view utilizing the example peeling off the stripping start portion production process that start portion producing device carries out.
(B) of (A) ~ Figure 15 of Figure 15 is the top view of the defect shape of the edge of a knife representing cutter.
Detailed description of the invention
Below, with reference to the accompanying drawings embodiments of the present invention are described.
Below, illustrate and use the stripping off device of duplexer of the present invention and the situation of stripping means in the manufacturing process of electronic device.
Electronic device refers to the electronic components such as display floater, solar cell, thin-film secondary battery.As display floater, liquid crystal display (LCD:LiquidCrystalDisplay) panel, plasma display device (PDP:PlasmaDisplayPanel) and organic el display (OELD:OrganicElectroLuminescenceDisplay) panel can be illustrated.
the manufacturing process of electronic device
Electronic device forms functional layer (if LCD, being then thin film transistor (TFT) (TFT), colour filter (CF)) used for electronic device by the surface of the substrate in glass system, resin-made, metal etc. and manufactures.
Before formation functional layer, the back side of described substrate is made to be pasted on stiffener and to be configured to duplexer.Afterwards, under the state of duplexer, form functional layer on the surface of substrate.Then, after formation functional layer, make stiffener from strippable substrate.
That is, in the manufacturing process of electronic device, comprising: the functional layer formation process forming functional layer under the state of duplexer on the surface of substrate has the substrate of functional layer to be separated the separation circuit of stiffener with self-forming.This separation circuit can apply stripping off device and the stripping means of duplexer of the present invention.
duplexer 1
Fig. 1 is the main portions enlarged side view of the example representing duplexer 1.
Duplexer 1 comprises for the substrate (the 1st substrate) 2 of functional layer formation and the stiffener (the 2nd substrate) 3 for strengthening this substrate 2.In addition, stiffener 3 has the resin bed 4 as adsorption layer at surperficial 3a, and resin bed 4 is pasted with the back side 2b of substrate 2.That is, substrate 2 utilizes the bonding force of Van der Waals force or the resin bed 4 acted between itself and resin bed 4 to be pasted on stiffener 3 across resin bed 4 in the mode that can peel off.
substrate 2
Functional layer is formed at the surperficial 2a of substrate 2.As substrate 2, glass substrate, ceramic substrate, resin substrate, metal substrate, semiconductor substrate can be illustrated.Among these substrates, due to the chemical resistance of glass substrate, resistance to excellent moisture permeability and linear expansion coefficient is less, therefore, be suitable as substrate 2 used for electronic device.In addition, because linear expansion coefficient diminishes, the pattern therefore also with the functional layer at high temperature formed is difficult to the advantage offset when cooling.
As the glass of glass substrate, can illustrate alkali-free glass, pyrex, soda-lime glass, high silica glass, other take silica as the oxide based glass of main component.Oxide based glass is preferably the glass of 40 quality % ~ 90 quality % with the content of the silica of oxide basis.
As the glass of glass substrate, preferably, Select and Apply the glass of the kind being suitable for manufactured electronic device or be suitable for the glass of its manufacturing process.Such as, the glass substrate of liquid crystal board preferably, adopts the glass (alkali-free glass) of alkali-free metal ingredient in fact.
The thickness of substrate 2 sets according to the kind of substrate 2.Such as, when substrate 2 adopts glass substrate, in order to lightness, the thin plate of electronic device, the thickness of substrate 2 is preferably set to below 0.7mm, is more preferably set in below 0.3mm, is preferably set to below 0.1mm further.When the thickness of substrate 2 at below 0.3mm, the flexibility that glass substrate is good can be given.And, when the thickness of substrate 2 at below 0.1mm, can be web-like by glass-based coiled sheet, from the viewpoint of the process of the viewpoint of the manufacture of glass substrate and glass substrate, the thickness of preferable substrate 2 be at more than 0.03mm.
In addition, in FIG, substrate 2 is made up of a substrate, but substrate 2 can also be made up of multiple substrates.That is, substrate 2 can also be made up of the duplexer be laminated by multiple substrates.In this situation, the aggregate thickness forming all substrates of substrate 2 becomes the thickness of substrate 2.
stiffener 3
As stiffener 3, glass substrate, ceramic substrate, resin substrate, metal substrate, semiconductor substrate can be illustrated.
The thickness of stiffener 3 is set in below 0.7mm, and kind, thickness etc. according to strengthened substrate 2 set.In addition, the thickness that the thickness of stiffener 3 both can be greater than substrate 2 also can be less than the thickness of substrate 2, but in order to strengthen substrate 2, the thickness of stiffener 3 is preferably at more than 0.4mm.
In addition, in the present embodiment, stiffener 3 is made up of a substrate, but stiffener 3 also can be made up of the duplexer be laminated by multiple substrates.In this situation, the aggregate thickness forming all substrates of stiffener 3 becomes the thickness of stiffener 3.
resin bed 4
In order to prevent peeling off between resin bed 4 and stiffener 3, and the adhesion between resin bed 4 and stiffener 3 is set higher than the adhesion between resin bed 4 and substrate 2.Thus, in stripping process, the interface peel between resin bed 4 and substrate 2.
The resin forming resin bed 4 is not particularly limited, and can there are acrylic resin, vistanex, polyurethane resin, polyimide resin, organic siliconresin and polyimides organic siliconresin.Can also several resin used in combination.Wherein, from the viewpoint of heat resistance, fissility, preferred organic siliconresin, polyimides organic siliconresin.
The thickness of resin bed 4 is not particularly limited, and is preferably set to 1 μm ~ 50 μm, is more preferably set as 4 μm ~ 20 μm.The thickness of resin bed 4 is set in more than 1 μm, thus when being mixed into bubble, foreign matter between resin bed 4 and substrate 2, the distortion of resin bed 4 can be utilized to absorb the thickness of bubble, foreign matter.On the other hand, the thickness of resin bed 4 is located at less than 50 μm, thus the formation time of resin bed 4 can be shortened, and excessively need not use the resin of resin bed 4, therefore less expensive.
In addition, in order to make stiffener 3 can support whole resin bed 4, the profile of resin bed 4 is preferably identical with the profile of stiffener 3 or is less than the profile of stiffener 3.In addition, in order to make resin bed 4 and whole substrate 2 closely sealed, the profile of resin bed 4 is preferably identical with the profile of substrate 2 or is greater than the profile of substrate 2.
In addition, in FIG, resin bed 4 is made up of one deck, but resin bed 4 can also be formed more than two-layer.In this situation, the thickness forming the total of all layers of resin bed 4 becomes the thickness of resin bed.In addition, in this situation, the kind forming the resin of each layer also can be different.
And, in the present embodiment, employ organic film and resin bed 4 as adsorption layer, inorganic layer also can be used to replace resin bed 4.The inoranic membrane forming inorganic layer such as contains from comprising at least one selected the group of metal silicide, nitride, carbide and carbonitride.
And the duplexer 1 of Fig. 1 has resin bed 4 as adsorption layer, but duplexer 1 can not also comprise resin bed 4 and comprise substrate 2 and stiffener 3.In this case, utilize the Van der Waals force etc. of effect between substrate 2 and stiffener 3 that substrate 2 and stiffener 3 are pasted in the mode that can peel off.In addition, when substrate 2 and stiffener 3 are glass substrate, bonding in order to make the substrate 2 as glass substrate and the stiffener 3 as glass plate at high temperature not occur, preferably form inorganic thin film at the surperficial 3a of stiffener 3.
be formed with the duplexer 6 of the embodiment of functional layer
Functional layer is formed with at the surperficial 2a of the substrate 2 of duplexer 1 via functional layer formation process.As the formation method of functional layer, vapour deposition method, the sputtering method of CVD (ChemicalVaporDeposition: chemical vapour deposition (CVD)) method and PVD (PhysicalVaporDeposition: physical vapour deposition (PVD)) method etc. can be used.Functional layer utilizes photoetching process, etching method is formed as predetermined pattern.
Fig. 2 is the main portions enlarged side view of an example of the rectangular-shaped duplexer 6 represented made by the midway of the manufacturing process of LCD.
Duplexer 6 comprises stiffener 3A, resin bed 4A, substrate 2A, functional layer 7, substrate 2B, resin bed 4B and stiffener 3B and is laminated with described order.That is, the duplexer 6 of Fig. 2 is equivalent to the duplexer 1 shown in Fig. 1 to clip the duplexer of the mode balanced configuration of functional layer 7.Below, the duplexer comprising substrate 2A, resin bed 4A and stiffener 3A is called the 1st duplexer 1A, the duplexer comprising substrate 2B, resin bed 4B and stiffener 3B is called the 2nd duplexer 1B.
Be formed with the thin film transistor (TFT) (TFT) as functional layer 7 at the surperficial 2Aa of the substrate 2A of the 1st duplexer 1A, be formed with the colour filter (CF) as functional layer 7 at the surperficial 2Ba of the substrate 2B of the 2nd duplexer 1B.
1st duplexer 1A and the 2nd duplexer 1B by making the surperficial 2Aa of substrate 2A, the surperficial 2Ba of substrate 2B overlaps mutually and integrated.Thus, the 1st duplexer 1A and the 2nd duplexer 1B is manufactured to clip the duplexer 6 of the structure of the mode balanced configuration of functional layer 7.
In the stripping start portion production process of separation circuit, utilize the edge of a knife of cutter (hoe scaler) after the interface of duplexer 6 forms stripping start portion, stiffener 3A, 3B is peeled off successively in the stripping process of separation circuit, afterwards, polarizer, backlight etc. are installed, thus create the LCD of product.
peel off start portion producing device 10
(E) of (A) ~ Fig. 3 of Fig. 3 represents peeling off the main portions structure of the stripping start portion producing device 10 used in the production process of start portion and utilizing the key diagram peeling off the stripping start portion preparation method that start portion producing device 10 carries out, (A) of Fig. 3 is the key diagram of the position relationship represented between duplexer 6 and cutter (hoe scaler) N, (B) of Fig. 3 utilizes cutter N to make the key diagram peeling off start portion 26 at interface 24, (C) of Fig. 3 represents the key diagram being about to make the state peeling off start portion 30 at interface 28, (D) of Fig. 3 utilizes cutter N to make the key diagram peeling off start portion 30 at interface 28, (E) of Fig. 3 has made stripping start portion 26, the key diagram of the duplexer 6 of 30.
In addition, Fig. 4 is the top view being manufactured with the duplexer 6 peeling off start portion 26,30.
In addition, Fig. 5 represents the integrally-built side view peeling off start portion producing device 10, and Fig. 6 is the top view of the stripping start portion producing device 10 shown in Fig. 5.
Each bight of duplexer 6 has corner cut portion 6A, 6B, 6C, 6D respectively in the diagram.Corner cut portion 6A ~ 6D utilizes grinding stone by part tapered for the grinding of each bight, and represent the model of duplexer 6, the amount of pruning, the angle of pruning of the corner cut portion 6A ~ 6D of the duplexer 6 of each model are different.The duplexer 6 of Fig. 4 has corner cut portion 6A ~ 6D in whole bights, but also there is the duplexer that at least one bight selected has corner cut portion.In addition, in Fig. 4, Fig. 6, corner cut portion 6A ~ 6D is illustrated by the mode exaggerated relative to the size of duplexer 6, is actually very little size.In addition, Fig. 2 shows the state that duplexer 1A and duplexer 1B is pasted together, but the shape in corner cut portion of duplexer 1A in figure had both existed identical situation with the shape in the corner cut portion of duplexer 1B, also there is different situations.
Turn back to Fig. 3, when making stripping start portion 26,30, as shown in (A) of Fig. 3, the mode that duplexer 6 is held in workbench 12 with the back side 3Bb of stiffener 3B absorption is supported in horizontal direction (in figure X-direction).
Cutter N is supported in the horizontal direction in the mode that edge of a knife Na is relative with the bight 6Aa of the corner cut portion 6A of duplexer 6 by keeper 14.In addition, height adjuster 16 is utilized to adjust the position of cutter N in short transverse (in accompanying drawing Z-direction).In addition, the conveying devices such as ball-screw apparatus (portion of travel mechanism) 18 are utilized to make (in figure X-direction) the upper relative movement in the horizontal direction of cutter N and duplexer 6.Conveying device 18 makes at least one in cutter N and workbench 12 mobile in the horizontal direction, in embodiments, cutter N is moved.In addition, above cutter N, be configured with the fluid Supplying apparatus 22 of the upper surface feed fluid 20 of the edge of a knife Na for the cutter N before insertion or in inserting.
peel off start portion preparation method
In the stripping start portion preparation method utilizing stripping start portion producing device 10 to carry out, the insertion position of cutter N is set in the position overlapping on the thickness direction of duplexer 6 in the bight 6Aa of duplexer 6, and the insertion of cutter N is set as according to each interface 24,28 different.
The making step of this stripping start portion is described.
When original state, the edge of a knife Na of cutter N is in the position that offset by short transverse (Z-direction) relative to the 1st insertion position, interface 24 namely between substrate 2B and resin bed 4B.Therefore, first, as shown in (A) of Fig. 3, cutter N is moved in the height direction, the height of the edge of a knife Na of cutter N is set as the height at interface 24.
Then, as shown in (B) of Fig. 3, make cutter N towards bight 6Aa (the arrow A direction in Fig. 6) movement in the horizontal direction of duplexer 6, the edge of a knife Na of cutter N is inserted scheduled volume to interface 24.In addition, when inserting cutter N or before inserting cutter N, from fluid Supplying apparatus 22 to the upper surface feed fluid 20 of edge of a knife Na.Thus, the substrate 2B of bight 6Aa peels off from resin bed 4B, therefore, as shown in Figure 4, produces the stripping start portion 26 overlooking shape triangular in shape at interface 24.In addition, not necessarily necessary feed fluid 20, if but use liquid 20, even if liquid 20 also can remain in stripping start portion 26 after being extracted by cutter N, therefore, it is possible to make the stripping start portion 26 that cannot again adhere to.
Then, by cutter N from bight 6Aa in the horizontal direction (the arrow B direction in Fig. 6) extract, as shown in (C) of Fig. 3, the edge of a knife Na of cutter N is set as the height at the 2nd insertion position, interface 28 namely between substrate 2A and resin bed 4A.
Then, as shown in (D) of Fig. 3, make cutter N towards duplexer 6 (the arrow A direction in Fig. 6) movement in the horizontal direction, the edge of a knife Na of cutter N is inserted scheduled volume to interface 28.Similarly, from fluid Supplying apparatus 22 to the upper surface feed fluid 20 of edge of a knife Na.Thus, as shown in (E) of Fig. 3, produce at interface 28 and peel off start portion 30.At this, cutter N is set to relative to the insertion at interface 28 and is less than the insertion of cutter N relative to interface 24.More than for peeling off start portion preparation method.In addition, also cutter N can be set to relative to the insertion at interface 24 and be less than the insertion of cutter N relative to interface 28.
Taking off having made the duplexer 6 peeling off start portion 26,30 from stripping start portion producing device 10, being delivered to stripping process.In stripping process, stripping off device described later is utilized to peel off duplexer 6 at interface 24,28 successively.
See below in the detailed content of the stripping means at interface 24,28 place, as shown in the arrow C of Fig. 4, the duplexer 6 bight 6A that autotomys is bent towards the corner cut portion 6C relative with corner cut portion 6A, thus, peel off to peel off start portion 26 for starting point peeling off the larger interface 24 of the area of start portion 26 at first.Thus, stiffener 3B is peeled off.Then, the duplexer 6 bight 6A that autotomys is bent again towards corner cut portion 6C, peel off to peel off start portion 30 for starting point at the less interface 28 of the area peeling off start portion 30 thus.Thus, stiffener 3A is peeled off.The insertion of cutter N is preferably set to more than 7mm according to the size of duplexer 6, is more preferably set in about 15mm ~ 20mm.
In addition, the feature of stripping off device of the present invention and stripping means is the stripping start portion preparation method utilizing cutter N to carry out, and for this point, sees below.
stripping off device 40
Fig. 7 is the longitudinal section of the structure of the stripping off device (peeling member) 40 representing embodiment, and Fig. 8 schematically shows the top view of multiple movable body 44 relative to the stripping unit 42 of the allocation position of the stripping unit 42 of stripping off device 40.In addition, Fig. 7 is equivalent to the sectional view of the D-D line along Fig. 8, in addition, represents duplexer 6 in fig. 8 with solid line.
The mode that stripping off device 40 shown in Fig. 7 comprises clamping duplexer 6 is configured at a pair movable device 46,46 above and below duplexer 6.Movable device 46,46 structure is identical, therefore, at this, movable device 46 being configured in the downside of Fig. 7 is described, the movable device 46 being configured in upside is marked to identical Reference numeral and omits the description.
Movable device 46 comprises multiple movable body 44, makes multiple drive units (drive division) 48 of movable body 44 lifting moving according to each movable body 44 and carrys out the controller 50 (drive division) etc. of accessory drive 48 according to each drive unit 48.
In order to make stiffener 3B flexible deformation, peel off unit 42 and stiffener 3B vacuum suction is kept.In addition, replace vacuum suction, Electrostatic Absorption or magnetic suck can also be used.
peel off unit 42
(A) of Fig. 9 is the top view peeling off unit 42, (B) of Fig. 9 along Fig. 9 (A) E-E line, the amplification longitudinal section of peeling off unit 42.In addition, (C) of Fig. 9 represents the amplification longitudinal section flex plate 52 of the tabular of the rectangle being formed stripping unit 42 is located in the adsorption section 54 forming and peel off unit 42 in handling mode freely by double-sided adhesive tape 56, that peel off unit 42.
Peel off unit 42 to be configured to as described, adsorption section 54 is installed on flex plate 52 by double-sided adhesive tape 56 in handling mode freely.
Adsorption section 54 has the thin flex plate of Thickness Ratio flex plate 52 58.The lower surface of this flex plate 58 is installed on the upper surface of flex plate 52 in handling mode freely by double-sided adhesive tape 56.
In addition, adsorption section 54 has the aeration sheet material 60 of the rectangle of the inner surface for adsorbing the stiffener 3B keeping duplexer 6.In order to result from the tensile stress of stiffener 3B when being reduced in stripping, the thickness of aeration sheet material 60 is below 2mm, is preferably below 1mm, uses the aeration sheet material 60 that thickness is 0.5mm in embodiments.
In addition, adsorption section 54 also has encirclement aeration sheet material 60 and the sealing frame component 62 abutted with the outer peripheral face of stiffener 3B.Sealing frame component 62 and aeration sheet material 60 are adhered to the upper surface of flex plate 58 by double-sided adhesive sheet material 64.In addition, sealing frame component 62 is that Shore E hardness is more than 20 degree and the cavernous body of the closed pore of less than 50 degree, and the thickness of sealing frame component 62 is configured to 0.3mm ~ 0.5mm thicker in the thickness of aeration sheet material 60.
There is the groove 66 of frame-shaped between aeration sheet material 60 and sealing frame component 62.In addition, have multiple through hole 68 at flex plate 52 opening, one end of these through holes 68 is communicated with groove 66, and the other end is connected with source of suction (such as vavuum pump) via not shown suction pipeline.
Thus, when driving described source of suction, air in described suction pipeline, through hole 68 and groove 66 is attracted, thus the inner surface of the stiffener 3B of duplexer 6 is held in aeration sheet material 60 by vacuum suction, and, the outer peripheral face of stiffener 3B is pushed and is connected to sealing frame component 62, and the seal of the adsorption space therefore surrounded by sealing frame component 62 improves.
Compare with sealing frame component 62 with flex plate 58, aeration sheet material 60, the flexural rigidity of flex plate 52 is higher, and the flexural rigidity of flex plate 52 determines the flexural rigidity peeling off unit 42.The flexural rigidity of the per unit width (1mm) of preferred stripping unit 42 is 1000Nmm
2/ mm ~ 40000Nmm
2/ mm.Such as, be the part of 100mm at the width of stripping unit 42, flexural rigidity is 100000Nmm
2~ 4000000Nmm
2.By the flexural rigidity peeling off unit 42 is set to 1000Nmm
2/ more than mm, can prevent from adsorbing the stiffener 3B being held in stripping unit 42 and bend.Further, by the flexural rigidity peeling off unit 42 is set to 40000Nmm
2/ below mm, can make absorption be held in the stiffener 3B suitably flexible deformation peeling off unit 42.
The resinous member of flex plate 52,58 to be Young's modulus be below 10GPa is such as the resinous member of polycarbonate resin, polyvinyl chloride (PVC) resin, acrylic resin, polyacetals (POM) resin etc.
movable device 46
The discoid multiple movable bodys 44 shown in Fig. 7 are fixed with in chessboard trellis as shown in Figure 8 at the lower surface of flex plate 52.These movable bodys 44 utilize the clamp structures such as bolt to be fixed on flex plate 52, also can replace bolt and be bonded and fixed to flex plate 52.These movable bodys 44 utilize drive unit 48 lifting moving independently being controlled driving by controller 50.
That is, controller 50 accessory drive 48 movement thus the movable body 44 making oneself be arranged in the position of the 6C side, the corner cut portion that is positioned at of the stripping direct of travel shown in movable body 44 to arrow C of the position of the 6A side, corner cut portion of the duplexer 6 of Fig. 8 declines successively.According to this action, as shown in the longitudinal section of Figure 10, peel off to peel off start portion 26 (with reference to Fig. 4) for starting point at the interface 24 of duplexer 6.In addition, the duplexer 6 shown in Fig. 7, Figure 10 peels off the duplexer 6 of start portion 26,30 for having utilized stripping start portion illustrated in fig. 3 preparation method to make.
Drive unit 48 such as comprises revolving servo motor and ball screw framework etc.The rotary motion of servo motor is converted to rectilinear motion in ball screw framework, is passed to the bar 70 of ball screw framework.Movable body 44 is provided with across spherojoint 72 in the top ends of bar 70.Thereby, it is possible to make movable body 44 follow the flexible deformation of stripping unit 42 as shown in Figure 10 and fascinate.Thus, not applying excessive power to stripping unit 42 just can make stripping unit 42 autotomy bight 6A towards corner cut portion 6C flexible deformation.In addition, as drive unit 48, being not limited to revolving servo motor and ball screw framework, can also be servo motor or the fluid-pressure cylinder (such as pneumatic cylinder) of orthoscopic.
Multiple drive unit 48 is preferably installed on liftable framework 74 across buffer component 76.Buffer component 76 is to follow the mode elastic deformation of the flexible deformation peeling off unit 42.Thus, bar 70 fascinates relative to framework 74.
When being taken off from stripping unit 42 by the stiffener 3B of stripping, not shown drive division is utilized to make framework 74 carry out decline mobile.
Controller 50 is configured to the computer comprising recording medium, the CPU etc. such as ROM and RAM.Controller 50 makes CPU perform record program on the recording medium, thus, controls multiple drive unit 48 according to each drive unit 48, thus controls the lifting moving of multiple movable body 44.
stripping off device 40 is utilized to peel off the stripping means of stiffener 3A, 3B
(C) of (C) of (A) ~ Figure 11 of Figure 11 and (A) ~ Figure 12 of Figure 12 represent utilize stripping start portion illustrated in fig. 3 preparation method bight 6Aa be manufactured with peel off start portion 26,30, the stripping means of duplexer 6.That is, in (C) of (C) of (A) ~ Figure 11 of Figure 11 and (A) ~ Figure 12 of Figure 12, the stripping means that duplexer 6 stiffener 3A, 3B are peeled off is shown in chronological order.
In addition, the input operation inputting duplexer 6 to stripping off device 40, the output operation exporting stiffener 3A, 3B and the panel P peeled off from stripping off device 40 are undertaken by the conveying device 80 with sucker 78 shown in (A) of Figure 11.Wherein, at Figure 11, Tu12Zhong, multifarious in order to avoid accompanying drawing, eliminates the diagram of movable device 46.In addition, panel P refers to and is pasted with the substrate 2A of removing stiffener 3A, 3B and the products panel of substrate 2B across functional layer 7.
(A) of Figure 11 is side view that by the action shown in arrow F, G of conveying device 80, duplexer 6 is placed in the stripping unit 42 of downside, stripping off device 40.In this case, in order to insert conveying device 80 between the stripping unit and the stripping unit 42 of upside of downside, and the stripping unit 42 of downside is made to relatively move to the position of fully keeping out of the way in advance with the stripping unit 42 of upside.Afterwards, when duplexer 6 being placed in the stripping unit 42 of downside, by downside stripping unit 42 vacuum suction and keep the stiffener 3B of duplexer 6.That is, (A) of Figure 11 shows stiffener 3B is adsorbed maintenance absorption process by the stripping unit 42 of downside.
(B) of Figure 11 makes the stripping unit 42 of downside make the stiffener 3A of duplexer 6 by stripping unit 42 vacuum suction of upside and the side view of the stripping off device 40 of the state kept with the stripping unit 42 of upside to moving relative to close direction.That is, (B) of Figure 11 shows stiffener 3A is adsorbed maintenance absorption process by the stripping unit 42 of upside.
In addition, when utilizing stripping off device 40 to make the substrate 2 of the duplexer 1 shown in Fig. 1 peel off from stiffener 3, the substrate 2 as the 1st substrate is supported by the stripping unit 42 of upside, and the stiffener 3 as the 2nd substrate adsorbs maintenance by the stripping unit 42 of downside.In this case, the support of supporting substrates 2 is not limited to peel off unit 42, as long as can load and unload the parts of mode supporting substrates 2 freely with substrate 2.But, be used as support by unit 42 will be peeled off, substrate 2 and stiffener 3 can be made simultaneously bending and peel off, therefore compared with the form only making substrate 2 or stiffener 3 bend, there is the advantage that can reduce peeling force.
Turn back to Figure 11, (C) of Figure 11 be represent from the corner cut portion 6A of duplexer 6 towards corner cut portion 6C make the stripping unit 42 of downside downwards flexible deformation on one side at the interface 24 of duplexer 6 to peel off the side view that start portion 26 (reference Fig. 4) is the state of starting point stripping.That is, make to decline successively movement from movable body 44 to the movable body 44 being positioned at 6C side, corner cut portion of 6A side, corner cut portion being positioned at duplexer 6 in multiple movable bodys 44 of the stripping unit 42 of the downside shown in Figure 10, thus peel off stiffener 3B at interface 24.In addition, also can make in linkage to rise successively movement from movable body 44 to the movable body 44 being positioned at 6C side, corner cut portion of 6A side, corner cut portion being positioned at duplexer 6 in multiple movable bodys 44 of the stripping unit 42 of upside with this action, thus peel off at interface 24.Thus, compared with the form bending with only making stiffener 3B, peeling force can be reduced.
(A) of Figure 12 be the state peeled off completely at interface 24 of stiffener 3B, the side view of stripping off device 40.According to (A) of Figure 12, peel off lower stiffener 3B vacuum suction and be held in the stripping unit 42 of downside, duplexer 6 (comprising the duplexer of stiffener 3A and the panel P) vacuum suction of removing stiffener 3B stripping unit 42 on the upside of being held in.
In addition, in order between upper and lower stripping unit 42, insert Figure 11 (A) shown in conveying device 80, and make the stripping unit 42 of downside relatively move to the position of fully keeping out of the way with the stripping unit 42 of upside.
Afterwards, first, the vacuum suction of the stripping unit 42 of downside is removed.Then, the sucker 78 of conveying device 80 is utilized to adsorb maintenance stiffener 3B across resin bed 4B.Then, by the action of the conveying device 80 shown in arrow H, the I of (A) of Figure 12, stiffener 3B is exported from stripping off device 40.
(B) of Figure 12 is the side view that the duplexer 6 removing stiffener 3B is also kept by the stripping unit 42 of downside and stripping unit 42 vacuum suction of upside.That is, make downside stripping unit 42 move to relative to close direction with the stripping unit 42 of upside, and by downside stripping unit 42 vacuum suction and keep substrate 2B.
(C) of Figure 12 be represent while from the corner cut portion 6A of duplexer 6 towards corner cut portion 6C make the stripping unit 42 of upside upward flexible deformation on one side at the interface 28 of duplexer 6 to peel off the side view that start portion 30 (reference Fig. 4) is the state of starting point stripping.That is, make to rise successively movement from movable body 44 to the movable body 44 being positioned at 6C side, corner cut portion of 6A side, corner cut portion being positioned at duplexer 6 in multiple movable bodys 44 of the stripping unit 42 of the upside shown in Figure 10, thus peel off stiffener 3A at interface 28.In addition, also can make in linkage to decline successively movement from movable body 44 to the movable body 44 being positioned at 6C side, corner cut portion of 6A side, corner cut portion being positioned at duplexer 6 in multiple movable bodys 44 of the stripping unit 42 of downside with this action, thus peel off at interface 28.Thus, compared with the form bending with only making stiffener 3A, peeling force can be reduced.
Afterwards, the complete stiffener 3A stripped down from panel P is taken out from the stripping unit 42 of upside, panel P is taken out from the stripping unit 42 of downside.It is more than the stripping means being manufactured with the duplexer 6 peeling off start portion 26,30 at bight 6Aa.
peel off the feature of start portion producing device 10
Figure 13 is the top view representing the state that the bight 6Aa of corner cut portion 6A of duplexer 6 contacts with the local Na-1 of the edge of a knife Na of cutter N.In addition, cutter N is configured to tabular, has the edge of a knife Na of linearity along its edge.
As shown in Figure 5, duplexer 6 and cutter N configure in the horizontal plane.By making cutter N move to the arrow A direction in Figure 13 in the horizontal plane, and the local Na-1 of edge of a knife Na is contacted with bight 6Aa, afterwards, the local Na-1 of edge of a knife Na inserts interface 24 ((B) with reference to Fig. 3).
Turn back to Fig. 5, cutter N utilizes the conveying device 18 comprising feed screw 82 and motor 84 to move back and forth along the arrow A direction in Fig. 6 and arrow B direction.The amount of movement keeping out of the way direction shown in the amount of movement of the direction of insertion shown in arrow A and arrow B is controlled by the control part (control assembly) 86 in the Fig. 5 for controlling motor 84.
On the other hand, the conveying device (portion of travel mechanism) 92 comprising feed screw 88 and motor 90 is utilized to move back and forth along the arrow J direction in Fig. 6 and arrow K direction in the horizontal plane for adsorbing the workbench 12 keeping duplexer 6.As shown in figure 13, arrow J, K direction is set to the direction parallel with the edge of a knife Na of the linearity of cutter N.In addition, workbench 12 is also controlled by the control part 86 for controlling motor 90 along the amount of movement in arrow J, K direction.
Namely, according to stripping start portion producing device 10, by utilizing motor 84 to make cutter N move along arrow A, B direction and utilize motor 90 to make duplexer 6 move along arrow J, K direction, cutter N and duplexer 6 relative position in the plane (insertion position change parts) can be changed.In addition, by making duplexer 6 move along arrow J, K direction, the edge of a knife Na that can change cutter N inserts the insertion position at the interface 24,28 of duplexer 6.
That is, peeling off start portion producing device 10 can utilize conveying device 92 to change duplexer 6 relative to cutter N position in the plane.In addition, by utilizing control part 86 to control the amount of movement of conveying device 92 along arrow J, K direction, the insertion position that the edge of a knife Na of cutter N can be made to insert the interface 24,28 of duplexer 6 changes from the insertion position of last time.That is, be built-in with the storage part for storing the position that edge of a knife Na inserted last time at control part 86, when changing the position of edge of a knife Na, the position according to last time changes.
peel off the effect of start portion producing device 10
(F) of (A) ~ Figure 14 of Figure 14 is the top view representing the example utilizing the stripping start portion preparation method (peeling off start portion production process) peeled off start portion producing device 10 and carry out in chronological order.
As shown in (A) of Figure 14, in the insertion starting position of cutter N, local Na-1 and the bight 6Aa of edge of a knife Na relatively configure.Afterwards, cutter N is made to move to arrow A direction as shown in (B) of Figure 14.Thus, the local Na-1 of edge of a knife Na inserts the interface 24 of duplexer 6, and makes stripping start portion 26 ((C) with reference to Fig. 3) at interface 24.
(C) of Figure 14 makes cutter N move to arrow B direction and makes cutter N return to the top view inserting starting position.In addition, in the key diagram of Figure 14, in order to easy understand feature of the present invention is described, and hypothesis to produce tipping on edge of a knife Na situation because of the insert action once of cutter N is described.
As shown in (C) of Figure 14, the local Na-1 at the insertion interface 24 of the edge of a knife Na of cutter N is because contacting when inserting with cullet (not shown) and produce tipping.
the feature of the tipping shape of the edge of a knife Na of cutter N
(A) of Figure 15 is the top view of the tipping shape for illustration of edge of a knife Na.
Have at duplexer 6 with the bight 6Aa edge 6E and corner cut portion 6A (another edge) that is drift angle.At this, when an edge 6E and edge of a knife Na angulation being set to θ 1, corner cut portion 6A and edge of a knife Na angulation being set to θ 2, with bight 6Aa for benchmark, compared with θ 1 side that angle is larger, the length of the part inserted in θ 2 side that angle is less is longer.Therefore, with intubating length comparatively appearance accordingly, compared with the edge of a knife Na of θ 1 side, edge of a knife Na in θ 2 side produces longer tipping (a < b: (C) with reference to Figure 14).At this, a is the length of the tipping produced in θ 1 side, and b is the length of the tipping produced in θ 2 side.A, b are all the length on the length direction of edge of a knife Na.
Therefore, in order to the local Na-1 not using the generation of edge of a knife Na to have tipping when next time inserts, and make duplexer 6 to Figure 14 (D) shown in arrow J direction move scheduled volume.That is, the mode not having the normal edge of a knife Na-2 of tipping to be used for inserting next time of θ 1 side larger for angle to be changed the insertion position of edge of a knife Na.Thus, when inserting to interface 28 (next time), the normal local Na-2 not having tipping of edge of a knife Na can be used, peeling off start portion 30 therefore, it is possible to reliably make.
In addition, as shown in (E) of Figure 14, preferably the amount of change c that duplexer 6 changes to arrow J direction is set as a < c < b.Thus, compared with changing the position of edge of a knife Na with θ 2 side less towards angle, the side-play amount of edge of a knife Na can be reduced, therefore, it is possible to effectively utilize the total length of edge of a knife Na.
Described stripping start portion preparation method often makes a stripping start portion facility control part 86 to control conveying device 92 to change the method for the insertion position of edge of a knife Na, but be not limited to the method.
Such as, when be assumed to be can not produce tipping because of the insert action once of cutter N on the edge of a knife Na, also the local Na-1 of edge of a knife Na can be inserted interface 28, when inserting at the ensuing interface 24,28 to duplexer 6, insert new edge of a knife Na-2.That is, also can just to use the mode of new edge of a knife Na to change the insertion position of edge of a knife Na every repeatedly (such as more than 2 times) insert action.
In addition, as shown in Figure 5, comprise the checkout gear (detection part) 94 of the tipping of the edge of a knife Na for detecting cutter N, when utilizing checkout gear 94 tipping of edge of a knife Na to be detected, as long as utilize control part 86 control conveying device 92 and make duplexer 6 move predetermined side-play amount to the arrow J direction in Figure 14.
In this insertion position change method, be also use the normal edge of a knife Na not having tipping when next time inserts, therefore, it is possible to reliably make ensuing stripping start portion at duplexer 6.In addition, when the tipping of local Na-1 of edge of a knife Na being detected, the normal local Na-2 adjacent with local Na-1 is used for insert next time, therefore, it is possible to extend the service life of cutter N further.In addition, checkout gear 94 can being applied camera head for taking tipping, having the device that the Optical devices etc. of light projection unit to arrange across the mode of the edge of a knife and light receiver can detect tipping.
In addition, as described, when changing insertion position, changing the insertion position of edge of a knife Na towards θ 1 side that angle is larger, compared with therefore changing the position of edge of a knife Na with θ 2 side less towards angle, the side-play amount of edge of a knife Na can be reduced.Therefore, it is possible to effectively utilize the total length of edge of a knife Na further.
(B) of Figure 15 is the key diagram of the special case of the variation representing insertion position.
Sometimes have to utilize same cutter N to tackle the corner cut portion 6F shown in (B) of corner cut portion 6A and Figure 15 in (A) of variform Figure 15.
The θ 3 shown in (B) of Figure 15 is with bight 6Fa be drift angle an edge 6G and edge of a knife Na angulation, and θ 4 is with bight 6Fa be drift angle another edge, i.e. corner cut portion 6F and edge of a knife Na angulation.Usually, under the form of (B) of Figure 15, θ 3 < θ 4, therefore skew (movement) direction of duplexer 6 is arrow K direction, with the arrow J side in Figure 15 (A) in the opposite direction.
But, θ 3 shown in (B) of the θ 2 shown in (A) of Figure 15 and Figure 15 is compared, known θ 2 < θ 3, under the form of (B) of Figure 15, the scope of tipping is narrower, therefore, in this case, as long as the form of (A) of preferential Figure 15, offset direction is set as arrow J direction.
In detail or describe the present invention with reference to specific embodiment, but those skilled in the art it is clear that, various change, correction can be applied under the prerequisite not departing from the spirit and scope of the invention.
The Japanese Patent that the application applied for based on July 11st, 2014 goes out to be willing to 2014-143018, and its content is by referring to being programmed in this description.
description of reference numerals
N, cutter; The local of Na, Na-1, Na-2, the edge of a knife; P, panel; 1, duplexer; 1A, the 1st duplexer; 1B, the 2nd duplexer; 2, substrate; The surface of 2a, substrate; The back side of 2b, substrate; 2A, substrate; The surface of 2Aa, substrate; 2B, substrate; The surface of 2Ba, substrate; The back side of 2Bb, substrate; 3, stiffener; The surface of 3a, stiffener; 3A, stiffener; 3B, stiffener; The back side of 3Bb, stiffener; 4, resin bed; 4A, resin bed; 4B, resin bed; 6, duplexer; 6A ~ 6D, corner cut portion; 6Aa, 6Fa, bight; 7, functional layer; 8, stiffener; 10, start portion producing device is peeled off; 12, workbench; 14, keeper; 16, height adjuster; 18, conveying device; 20, liquid; 22, fluid Supplying apparatus; 24, interface; 26, start portion is peeled off; 28, interface; 30, start portion is peeled off; 40, stripping off device; 42, unit is peeled off; 44, movable body; 46, movable device; 48, drive unit; 50, controller; 52, flex plate; 54, adsorption section; 56, double-sided adhesive tape; 58, flex plate; 60, aeration sheet material; 62, sealing frame component; 64, double-sided adhesive sheet material; 66, groove; 68, through hole; 70, bar; 72, spherojoint; 74, framework; 76, buffer component; 78, sucker; 80, conveying device; 82, feed screw; 84, motor; 86, control part; 88, feed screw; 90, motor; 92, conveying device; 94, checkout gear.
Claims (12)
1. a stripping off device for duplexer, for the duplexer of rectangle pasting the 1st substrate and the 2nd substrate in the mode that can peel off, the interface between described 1st substrate and described 2nd substrate is peeled off, and it is characterized in that,
The stripping off device of this duplexer comprises:
Hoe scaler, it is tabular, is provided with the edge of a knife along its edge, by the described edge of a knife is inserted scheduled volume from the bight of described duplexer to described interface, and peels off start portion at described interface manufacture;
Peeling member, its with described stripping start portion for starting point is peeled off described duplexer at described interface;
Insertion position changes parts, and it is for changing described hoe scaler and described duplexer relative position in the plane; And
Control assembly, it controls described insertion position and changes parts, makes the edge of a knife changing described hoe scaler insert the insertion position at described interface.
2. the stripping off device of duplexer according to claim 1, wherein,
Described control assembly controls described insertion position and changes parts, makes often to make and peels off start portion described at least one and just make the insertion position of the described edge of a knife change from the insertion position of last time.
3. the stripping off device of duplexer according to claim 1, wherein,
The stripping off device of this duplexer also comprises the detection part of the tipping of the edge of a knife for detecting described hoe scaler, when utilizing described detection part the tipping of the edge of a knife to be detected, described control assembly controls described insertion position and changes parts, changes from the insertion position of last time to make the insertion position of the described edge of a knife.
4. the stripping off device of the duplexer according to claim 1,2 or 3, wherein,
For the bight of inserting with the edge of a knife of the described hoe scaler of the confession of described duplexer be drift angle a edge and another edge,
Described control assembly controls described insertion position and changes parts, is altered to next insertion position to make the edge of a knife of the larger side of the angle in a described edge and described edge of a knife angulation and another edge described and described edge of a knife angulation.
5. a stripping means for duplexer, for the duplexer of rectangle pasting the 1st substrate and the 2nd substrate in the mode that can peel off, the interface between described 1st substrate and described 2nd substrate is peeled off, and it is characterized in that,
The stripping means of this duplexer has:
Peel off start portion production process, insert scheduled volume from the bight of described duplexer to described interface by the edge of a knife arranged the edge along flat hoe scaler, and peel off start portion at described interface manufacture; And
Stripping process, with described stripping start portion for starting point is peeled off described duplexer at described interface,
Described stripping start portion production process comprises the insertion position change operation that the edge of a knife changing described hoe scaler inserts the insertion position at described interface.
6. the stripping means of duplexer according to claim 5, wherein,
Change in operation in described insertion position, often make and peel off start portion described at least one and just make the insertion position of the described edge of a knife change from the insertion position of last time.
7. the stripping means of duplexer according to claim 5, wherein,
Changing in operation in described insertion position, when the tipping of the edge of a knife of described hoe scaler being detected, the insertion position of the described edge of a knife being changed from the insertion position of last time.
8. the stripping means of the duplexer according to claim 5,6 or 7, wherein,
For the bight of inserting with the edge of a knife of the described hoe scaler of the confession of described duplexer be drift angle a edge and another edge,
Change in operation in described insertion position, make the edge of a knife of the described edge side larger with the angle in described edge of a knife angulation and another edge described and described edge of a knife angulation be altered to next insertion position.
9. a manufacture method for electronic device, the manufacture method of this electronic device has: functional layer formation process, for the duplexer of rectangle pasting the 1st substrate and the 2nd substrate in the mode that can peel off, forms functional layer in the exposure of described 1st substrate; And separation circuit, self-forming has described 1st substrate of described functional layer to be separated described 2nd substrate, it is characterized in that,
Described separation circuit has:
Peel off start portion production process, insert scheduled volume from the bight of described duplexer to the interface between described 1st substrate and described 2nd substrate by the edge of a knife arranged the edge along flat hoe scaler, and peel off start portion at described interface manufacture; And
Stripping process, with described stripping start portion for starting point is peeled off described duplexer at described interface,
Described stripping start portion production process comprises the insertion position change operation that the edge of a knife changing described hoe scaler inserts the insertion position at described interface.
10. the manufacture method of electronic device according to claim 9, wherein,
Change in operation in described insertion position, often make and peel off start portion described at least one and just make the insertion position of the described edge of a knife change from the insertion position of last time.
The manufacture method of 11. electronic devices according to claim 9, wherein,
Changing in operation in described insertion position, when the tipping of the edge of a knife of described hoe scaler being detected, the insertion position of the described edge of a knife being changed from the insertion position of last time.
The manufacture method of 12. electronic devices according to claim 9,10 or 11, wherein,
For the bight of inserting with the edge of a knife of the described hoe scaler of the confession of described duplexer be drift angle a edge and another edge,
Change in operation in described insertion position, make the edge of a knife of the described edge side larger with the angle in described edge of a knife angulation and another edge described and described edge of a knife angulation be altered to next insertion position.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-143018 | 2014-07-11 | ||
| JP2014143018A JP6354945B2 (en) | 2014-07-11 | 2014-07-11 | Laminate peeling apparatus, peeling method, and electronic device manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105252881A true CN105252881A (en) | 2016-01-20 |
| CN105252881B CN105252881B (en) | 2019-03-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510406253.3A Active CN105252881B (en) | 2014-07-11 | 2015-07-10 | The stripping off device and stripping means of laminated body and the manufacturing method of electronic device |
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| Country | Link |
|---|---|
| JP (1) | JP6354945B2 (en) |
| KR (1) | KR20160007400A (en) |
| CN (1) | CN105252881B (en) |
| TW (1) | TWI659849B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109693847A (en) * | 2019-02-22 | 2019-04-30 | 苏州威兹泰克自动化科技有限公司 | Automated tag mechanism for stripping |
| CN109904532A (en) * | 2017-12-11 | 2019-06-18 | 北京小米移动软件有限公司 | Battery removes mould group and terminal |
| CN112750745A (en) * | 2019-10-29 | 2021-05-04 | 佳能特机株式会社 | Substrate peeling apparatus, substrate processing apparatus, and substrate peeling method |
| CN114051453A (en) * | 2021-04-28 | 2022-02-15 | 奉贤淏 | Vapour stripping device for automobile coloring film |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6900540B1 (en) * | 2020-04-08 | 2021-07-07 | 信越エンジニアリング株式会社 | Work separation device and work separation method |
| JP7166571B2 (en) * | 2020-09-07 | 2022-11-08 | 株式会社丸仲鉄工所 | Method for separating film-like member |
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| EP0334232A1 (en) * | 1988-03-22 | 1989-09-27 | Kabushiki Kaisha Murao and Company | Residual roving clearing apparatus |
| CN103219263A (en) * | 2012-01-19 | 2013-07-24 | 旭硝子株式会社 | Peeling device and method for producing electronic device |
| TW201426895A (en) * | 2012-09-19 | 2014-07-01 | Tokyo Electron Ltd | Separation apparatus, separation system and separation method |
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| KR100543024B1 (en) * | 1998-01-21 | 2006-05-25 | 삼성전자주식회사 | Polarizer Removal Device of Liquid Crystal Display |
| JP4241697B2 (en) * | 2005-09-06 | 2009-03-18 | ユーテック株式会社 | Film peeling device |
| CN201321191Y (en) | 2008-12-11 | 2009-10-07 | 唐颖 | Anti-counterfeiting bottle stopper |
| CN102171745B (en) * | 2009-02-06 | 2014-10-08 | 旭硝子株式会社 | Method for manufacturing electronic device and separation apparatus used therefor |
| CN102202994B (en) | 2009-08-31 | 2014-03-12 | 旭硝子株式会社 | Peeling device |
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2014
- 2014-07-11 JP JP2014143018A patent/JP6354945B2/en active Active
-
2015
- 2015-07-08 KR KR1020150097081A patent/KR20160007400A/en unknown
- 2015-07-09 TW TW104122386A patent/TWI659849B/en active
- 2015-07-10 CN CN201510406253.3A patent/CN105252881B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP0334232A1 (en) * | 1988-03-22 | 1989-09-27 | Kabushiki Kaisha Murao and Company | Residual roving clearing apparatus |
| CN103219263A (en) * | 2012-01-19 | 2013-07-24 | 旭硝子株式会社 | Peeling device and method for producing electronic device |
| TW201426895A (en) * | 2012-09-19 | 2014-07-01 | Tokyo Electron Ltd | Separation apparatus, separation system and separation method |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109904532A (en) * | 2017-12-11 | 2019-06-18 | 北京小米移动软件有限公司 | Battery removes mould group and terminal |
| CN109693847A (en) * | 2019-02-22 | 2019-04-30 | 苏州威兹泰克自动化科技有限公司 | Automated tag mechanism for stripping |
| CN109693847B (en) * | 2019-02-22 | 2024-05-14 | 苏州威兹泰克自动化科技有限公司 | Automatic label peeling mechanism |
| CN112750745A (en) * | 2019-10-29 | 2021-05-04 | 佳能特机株式会社 | Substrate peeling apparatus, substrate processing apparatus, and substrate peeling method |
| CN112750745B (en) * | 2019-10-29 | 2023-07-25 | 佳能特机株式会社 | Substrate peeling apparatus, substrate processing apparatus, and substrate peeling method |
| CN114051453A (en) * | 2021-04-28 | 2022-02-15 | 奉贤淏 | Vapour stripping device for automobile coloring film |
| CN114051453B (en) * | 2021-04-28 | 2023-08-04 | 奉贤淏 | Vapour stripping device for automobile coloring film |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6354945B2 (en) | 2018-07-11 |
| TWI659849B (en) | 2019-05-21 |
| CN105252881B (en) | 2019-03-19 |
| TW201607764A (en) | 2016-03-01 |
| KR20160007400A (en) | 2016-01-20 |
| JP2016016983A (en) | 2016-02-01 |
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