CN105247099B - 具有cvd涂层的工具 - Google Patents

具有cvd涂层的工具 Download PDF

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Publication number
CN105247099B
CN105247099B CN201480022401.5A CN201480022401A CN105247099B CN 105247099 B CN105247099 B CN 105247099B CN 201480022401 A CN201480022401 A CN 201480022401A CN 105247099 B CN105247099 B CN 105247099B
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CN
China
Prior art keywords
layer
xalxcynz
tool
cvd
precursor gas
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CN201480022401.5A
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English (en)
Chinese (zh)
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CN105247099A (zh
Inventor
德克·施廷斯
萨卡里·鲁皮
托斯滕·曼斯
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Walter AG
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Walter AG
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C23C16/45508—Radial flow

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
CN201480022401.5A 2013-04-26 2014-04-16 具有cvd涂层的工具 Active CN105247099B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013104254.6A DE102013104254A1 (de) 2013-04-26 2013-04-26 Werkzeug mit CVD-Beschichtung
DE102013104254.6 2013-04-26
PCT/EP2014/057720 WO2014173755A1 (de) 2013-04-26 2014-04-16 Werkzeug mit cvd-beschichtung

Publications (2)

Publication Number Publication Date
CN105247099A CN105247099A (zh) 2016-01-13
CN105247099B true CN105247099B (zh) 2019-01-11

Family

ID=50543043

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480022401.5A Active CN105247099B (zh) 2013-04-26 2014-04-16 具有cvd涂层的工具

Country Status (8)

Country Link
US (1) US9976213B2 (https=)
EP (1) EP2989227B1 (https=)
JP (1) JP6542753B2 (https=)
KR (1) KR102257864B1 (https=)
CN (1) CN105247099B (https=)
DE (1) DE102013104254A1 (https=)
ES (1) ES2684410T3 (https=)
WO (1) WO2014173755A1 (https=)

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DE102014103220A1 (de) * 2014-03-11 2015-09-17 Walter Ag TiAIN-Schichten mit Lamellenstruktur
US10662524B2 (en) * 2015-07-27 2020-05-26 Walter Ag Tool with TiAIN coating
JP2019511378A (ja) * 2016-03-31 2019-04-25 ヴァルター アーゲー ｈ−ＡｌＮ及びＴｉ１−ｘＡｌｘＣｙＮｚ層を有するコーティング切削工具
JP6044861B1 (ja) * 2016-04-08 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP6045010B1 (ja) * 2016-04-14 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP6973699B2 (ja) * 2016-04-14 2021-12-01 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
ES2714791T3 (es) * 2016-07-01 2019-05-30 Walter Ag Herramienta de corte con capa de alúmina texturizada
KR102377388B1 (ko) * 2016-07-07 2022-03-21 가부시키가이샤 몰디노 하드 코팅, 하드 코팅된 공구 및 이들의 제조 방법들
JP6831449B2 (ja) * 2017-02-28 2021-02-17 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
KR102064172B1 (ko) * 2017-09-01 2020-01-09 한국야금 주식회사 내마모성과 인성이 우수한 경질피막
CN109975339B (zh) * 2017-12-28 2023-08-15 厦门钨业股份有限公司 一种TiCN基金属陶瓷性能的评估方法
US12162079B2 (en) 2018-12-27 2024-12-10 Mitsubishi Materials Corporation Surface-coated cutting tool
JP7520286B2 (ja) * 2018-12-27 2024-07-23 三菱マテリアル株式会社 表面被覆切削工具
JP7814093B2 (ja) * 2020-03-23 2026-02-16 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具
EP4292735A4 (en) * 2021-02-12 2025-07-23 Moldino Tool Engineering Ltd COATED TOOL
JP2024543491A (ja) * 2021-11-16 2024-11-21 ヴァルター アーゲー 中温ｃｖｄアルファアルミナコーティング
CN114517283A (zh) * 2022-01-24 2022-05-20 赣州澳克泰工具技术有限公司 沉积在基体表面的多层涂层系统及其制备方法
US12109628B2 (en) 2022-08-10 2024-10-08 Iscar, Ltd. Cutting tool with a TiAlN coating having rake and relief surfaces with different residual stresses
AT528040A1 (de) * 2024-02-28 2025-09-15 Boehlerit Gmbh & Co Kg Beschichtetes Objekt und Verfahren zu dessen Herstellung
EP4610393A1 (de) * 2024-02-28 2025-09-03 BOEHLERIT GmbH & Co.KG. Verfahren zum beschichten eines objektes und damit hergestelltes objekt

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Also Published As

Publication number Publication date
US9976213B2 (en) 2018-05-22
KR102257864B1 (ko) 2021-05-28
EP2989227B1 (de) 2018-06-27
EP2989227A1 (de) 2016-03-02
CN105247099A (zh) 2016-01-13
JP2016522323A (ja) 2016-07-28
DE102013104254A1 (de) 2014-10-30
KR20160002867A (ko) 2016-01-08
US20160053372A1 (en) 2016-02-25
WO2014173755A1 (de) 2014-10-30
JP6542753B2 (ja) 2019-07-10
ES2684410T3 (es) 2018-10-02

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