DE102013104254A1 - Werkzeug mit CVD-Beschichtung - Google Patents

Werkzeug mit CVD-Beschichtung Download PDF

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Publication number
DE102013104254A1
DE102013104254A1 DE102013104254.6A DE102013104254A DE102013104254A1 DE 102013104254 A1 DE102013104254 A1 DE 102013104254A1 DE 102013104254 A DE102013104254 A DE 102013104254A DE 102013104254 A1 DE102013104254 A1 DE 102013104254A1
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DE
Germany
Prior art keywords
layer
cvd
range
precursor gas
vol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102013104254.6A
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German (de)
English (en)
Inventor
Dirk Stiens
Sakari Ruppi
Thorsten Manns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Walter AG
Original Assignee
Walter AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=50543043&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE102013104254(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Walter AG filed Critical Walter AG
Priority to DE102013104254.6A priority Critical patent/DE102013104254A1/de
Priority to PCT/EP2014/057720 priority patent/WO2014173755A1/de
Priority to EP14718568.0A priority patent/EP2989227B1/de
Priority to KR1020157031256A priority patent/KR102257864B1/ko
Priority to CN201480022401.5A priority patent/CN105247099B/zh
Priority to JP2016509387A priority patent/JP6542753B2/ja
Priority to US14/781,622 priority patent/US9976213B2/en
Priority to ES14718568.0T priority patent/ES2684410T3/es
Publication of DE102013104254A1 publication Critical patent/DE102013104254A1/de
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C23C16/45508—Radial flow

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
DE102013104254.6A 2013-04-26 2013-04-26 Werkzeug mit CVD-Beschichtung Withdrawn DE102013104254A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102013104254.6A DE102013104254A1 (de) 2013-04-26 2013-04-26 Werkzeug mit CVD-Beschichtung
PCT/EP2014/057720 WO2014173755A1 (de) 2013-04-26 2014-04-16 Werkzeug mit cvd-beschichtung
EP14718568.0A EP2989227B1 (de) 2013-04-26 2014-04-16 Werkzeug mit cvd-beschichtung
KR1020157031256A KR102257864B1 (ko) 2013-04-26 2014-04-16 Cvd 코팅을 갖는 공구
CN201480022401.5A CN105247099B (zh) 2013-04-26 2014-04-16 具有cvd涂层的工具
JP2016509387A JP6542753B2 (ja) 2013-04-26 2014-04-16 Ｃｖｄ被膜を有する工具
US14/781,622 US9976213B2 (en) 2013-04-26 2014-04-16 Tool having CVD coating
ES14718568.0T ES2684410T3 (es) 2013-04-26 2014-04-16 Herramienta con recubrimiento CVD

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013104254.6A DE102013104254A1 (de) 2013-04-26 2013-04-26 Werkzeug mit CVD-Beschichtung

Publications (1)

Publication Number Publication Date
DE102013104254A1 true DE102013104254A1 (de) 2014-10-30

Family

ID=50543043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013104254.6A Withdrawn DE102013104254A1 (de) 2013-04-26 2013-04-26 Werkzeug mit CVD-Beschichtung

Country Status (8)

Country Link
US (1) US9976213B2 (https=)
EP (1) EP2989227B1 (https=)
JP (1) JP6542753B2 (https=)
KR (1) KR102257864B1 (https=)
CN (1) CN105247099B (https=)
DE (1) DE102013104254A1 (https=)
ES (1) ES2684410T3 (https=)
WO (1) WO2014173755A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4610393A1 (de) * 2024-02-28 2025-09-03 BOEHLERIT GmbH & Co.KG. Verfahren zum beschichten eines objektes und damit hergestelltes objekt
EP4610395A3 (de) * 2024-02-28 2025-10-22 Boehlerit GmbH Beschichtetes objekt und verfahren zu dessen herstellung

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014103220A1 (de) * 2014-03-11 2015-09-17 Walter Ag TiAIN-Schichten mit Lamellenstruktur
US10662524B2 (en) * 2015-07-27 2020-05-26 Walter Ag Tool with TiAIN coating
JP2019511378A (ja) * 2016-03-31 2019-04-25 ヴァルター アーゲー ｈ−ＡｌＮ及びＴｉ１−ｘＡｌｘＣｙＮｚ層を有するコーティング切削工具
JP6044861B1 (ja) * 2016-04-08 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP6045010B1 (ja) * 2016-04-14 2016-12-14 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
JP6973699B2 (ja) * 2016-04-14 2021-12-01 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
ES2714791T3 (es) * 2016-07-01 2019-05-30 Walter Ag Herramienta de corte con capa de alúmina texturizada
KR102377388B1 (ko) * 2016-07-07 2022-03-21 가부시키가이샤 몰디노 하드 코팅, 하드 코팅된 공구 및 이들의 제조 방법들
JP6831449B2 (ja) * 2017-02-28 2021-02-17 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
KR102064172B1 (ko) * 2017-09-01 2020-01-09 한국야금 주식회사 내마모성과 인성이 우수한 경질피막
CN109975339B (zh) * 2017-12-28 2023-08-15 厦门钨业股份有限公司 一种TiCN基金属陶瓷性能的评估方法
US12162079B2 (en) 2018-12-27 2024-12-10 Mitsubishi Materials Corporation Surface-coated cutting tool
JP7520286B2 (ja) * 2018-12-27 2024-07-23 三菱マテリアル株式会社 表面被覆切削工具
JP7814093B2 (ja) * 2020-03-23 2026-02-16 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具
EP4292735A4 (en) * 2021-02-12 2025-07-23 Moldino Tool Engineering Ltd COATED TOOL
JP2024543491A (ja) * 2021-11-16 2024-11-21 ヴァルター アーゲー 中温ｃｖｄアルファアルミナコーティング
CN114517283A (zh) * 2022-01-24 2022-05-20 赣州澳克泰工具技术有限公司 沉积在基体表面的多层涂层系统及其制备方法
US12109628B2 (en) 2022-08-10 2024-10-08 Iscar, Ltd. Cutting tool with a TiAlN coating having rake and relief surfaces with different residual stresses

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Publication number Priority date Publication date Assignee Title
EP1122334A1 (en) 2000-02-04 2001-08-08 Seco Tools Ab Deposition of gamma-AL2O3 by means of CVD
EP1017870B1 (en) * 1997-09-12 2002-10-23 Unaxis Balzers Aktiengesellschaft Tool having a protective layer system
EP1464727A2 (en) 2003-04-01 2004-10-06 Sandvik AB Oxide coated cutting tool
DE69920093T2 (de) * 1998-03-16 2005-06-16 Hitachi Tool Engineering Ltd. Bauteile mit mehrlagiger Beschichtung
DE102005032860A1 (de) 2005-07-04 2007-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
DE60124061T2 (de) * 2000-12-28 2007-04-12 Kabushiki Kaisha Kobe Seiko Sho, Kobe Hartstoffschicht für Schneidwerkzeuge
DE102007000512B3 (de) 2007-10-16 2009-01-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
US20090074521A1 (en) 2007-09-13 2009-03-19 Andreas Larsson Insert for Milling of Cast Iron
WO2009112117A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter körper
WO2009112115A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter körper
WO2009112116A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter körper
WO2009127344A1 (de) 2008-04-17 2009-10-22 Kennametal Inc. Beschichtungsverfahren, werkstück oder werkzeug und dessen verwendung
US20090274899A1 (en) 2007-08-24 2009-11-05 Erik Sundstrom Coated Cutting Tool for General Turning in Heat Resistant Super Alloys (HRSA)
DE102009046667A1 (de) * 2009-11-12 2011-05-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper

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US5879823A (en) * 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
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CN100413998C (zh) * 2002-08-08 2008-08-27 株式会社神户制钢所 α型晶体结构为主体的氧化铝被膜相关技术
SE529223C2 (sv) * 2005-05-06 2007-06-05 Seco Tools Ab Belagt skärverktyg innefattande hexagonal h-(Mel,Me2)Xfas
EP1911538B1 (en) * 2005-07-29 2017-08-30 Sumitomo Electric Hardmetal Corp. Edge replacing cutting tip and method for producing the same
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US8080312B2 (en) * 2006-06-22 2011-12-20 Kennametal Inc. CVD coating scheme including alumina and/or titanium-containing materials and method of making the same
SE530756C2 (sv) 2006-09-15 2008-09-02 Sandvik Intellectual Property Sätt att tillverka ett belagt skärverktyg av hårdmetall, ett belagt skär och ett belagt roterande skärverktyg
BR112013012688A2 (pt) * 2010-11-23 2016-09-06 Seco Tools Ab pastilha de ferramenta de corte revestida
AT510963B1 (de) 2011-03-18 2012-08-15 Boehlerit Gmbh & Co Kg Beschichteter körper und verfahren zu dessen herstellung
US8440328B2 (en) 2011-03-18 2013-05-14 Kennametal Inc. Coating for improved wear resistance
EP2570511B2 (en) * 2011-09-16 2025-08-06 Walter AG Grain boundary engineered alpha-alumina coated cutting tool

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1017870B1 (en) * 1997-09-12 2002-10-23 Unaxis Balzers Aktiengesellschaft Tool having a protective layer system
DE69920093T2 (de) * 1998-03-16 2005-06-16 Hitachi Tool Engineering Ltd. Bauteile mit mehrlagiger Beschichtung
EP1122334A1 (en) 2000-02-04 2001-08-08 Seco Tools Ab Deposition of gamma-AL2O3 by means of CVD
DE60124061T2 (de) * 2000-12-28 2007-04-12 Kabushiki Kaisha Kobe Seiko Sho, Kobe Hartstoffschicht für Schneidwerkzeuge
EP1464727A2 (en) 2003-04-01 2004-10-06 Sandvik AB Oxide coated cutting tool
DE102005032860A1 (de) 2005-07-04 2007-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
US20090274899A1 (en) 2007-08-24 2009-11-05 Erik Sundstrom Coated Cutting Tool for General Turning in Heat Resistant Super Alloys (HRSA)
US20090074521A1 (en) 2007-09-13 2009-03-19 Andreas Larsson Insert for Milling of Cast Iron
DE102007000512B3 (de) 2007-10-16 2009-01-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung
WO2009112115A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter körper
WO2009112116A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter körper
WO2009112117A1 (de) 2008-03-12 2009-09-17 Kennametal Inc. Hartstoffbeschichteter körper
WO2009127344A1 (de) 2008-04-17 2009-10-22 Kennametal Inc. Beschichtungsverfahren, werkstück oder werkzeug und dessen verwendung
DE102009046667A1 (de) * 2009-11-12 2011-05-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper

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DIN EN ISO 14577-1
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4610393A1 (de) * 2024-02-28 2025-09-03 BOEHLERIT GmbH & Co.KG. Verfahren zum beschichten eines objektes und damit hergestelltes objekt
EP4610394A1 (de) * 2024-02-28 2025-09-03 Boehlerit GmbH & Co. KG. Verfahren zum beschichten eines objektes und damit hergestelltes objekt
EP4610395A3 (de) * 2024-02-28 2025-10-22 Boehlerit GmbH Beschichtetes objekt und verfahren zu dessen herstellung

Also Published As

Publication number Publication date
US9976213B2 (en) 2018-05-22
KR102257864B1 (ko) 2021-05-28
EP2989227B1 (de) 2018-06-27
EP2989227A1 (de) 2016-03-02
CN105247099A (zh) 2016-01-13
JP2016522323A (ja) 2016-07-28
CN105247099B (zh) 2019-01-11
KR20160002867A (ko) 2016-01-08
US20160053372A1 (en) 2016-02-25
WO2014173755A1 (de) 2014-10-30
JP6542753B2 (ja) 2019-07-10
ES2684410T3 (es) 2018-10-02

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