CN105063550A - 渗透装置及方法 - Google Patents
渗透装置及方法 Download PDFInfo
- Publication number
- CN105063550A CN105063550A CN201510514589.1A CN201510514589A CN105063550A CN 105063550 A CN105063550 A CN 105063550A CN 201510514589 A CN201510514589 A CN 201510514589A CN 105063550 A CN105063550 A CN 105063550A
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- Prior art keywords
- rotary
- heating chamber
- magazine
- tray
- permeator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 110
- 238000001816 cooling Methods 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims abstract description 15
- 238000009423 ventilation Methods 0.000 claims description 46
- 238000004321 preservation Methods 0.000 claims description 29
- 230000008595 infiltration Effects 0.000 claims description 13
- 238000001764 infiltration Methods 0.000 claims description 13
- 230000005855 radiation Effects 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 10
- 230000003204 osmotic effect Effects 0.000 claims description 10
- 239000012774 insulation material Substances 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 230000002146 bilateral effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 21
- 238000005086 pumping Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 24
- 229910001172 neodymium magnet Inorganic materials 0.000 description 11
- FWQVINSGEXZQHB-UHFFFAOYSA-K trifluorodysprosium Chemical compound F[Dy](F)F FWQVINSGEXZQHB-UHFFFAOYSA-K 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- 229910052692 Dysprosium Inorganic materials 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000010792 warming Methods 0.000 description 4
- 229910052771 Terbium Inorganic materials 0.000 description 3
- 239000011449 brick Substances 0.000 description 3
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052863 mullite Inorganic materials 0.000 description 3
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 230000004438 eyesight Effects 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 230000003134 recirculating effect Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 230000017105 transposition Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/0024—Charging; Discharging; Manipulation of charge of metallic workpieces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Hard Magnetic Materials (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
Description
Claims (10)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510514589.1A CN105063550B (zh) | 2015-08-20 | 2015-08-20 | 渗透装置及方法 |
EP16157097.3A EP3121828B1 (en) | 2015-08-20 | 2016-02-24 | Infiltration device and method |
US15/059,806 US10138540B2 (en) | 2015-08-20 | 2016-03-03 | Infiltration device and method |
JP2016001033U JP3204277U (ja) | 2015-08-20 | 2016-03-07 | 浸透装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510514589.1A CN105063550B (zh) | 2015-08-20 | 2015-08-20 | 渗透装置及方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105063550A true CN105063550A (zh) | 2015-11-18 |
CN105063550B CN105063550B (zh) | 2017-11-28 |
Family
ID=54493048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510514589.1A Active CN105063550B (zh) | 2015-08-20 | 2015-08-20 | 渗透装置及方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10138540B2 (zh) |
EP (1) | EP3121828B1 (zh) |
JP (1) | JP3204277U (zh) |
CN (1) | CN105063550B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107097170A (zh) * | 2017-04-13 | 2017-08-29 | 天津市汇晶丰精密机械有限公司 | 一种压衬套装置 |
CN107971147A (zh) * | 2017-12-25 | 2018-05-01 | 惠州雷通光电器件有限公司 | Led器件离心方法与装置 |
CN108456903A (zh) * | 2018-03-30 | 2018-08-28 | 深圳宝福珠宝有限公司 | 一种升降式加热装置及铂金发黑处理方法 |
CN108504990A (zh) * | 2017-02-24 | 2018-09-07 | 东莞超汇链条有限公司 | 一种新型固体渗金属炉台结构 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019210135A1 (en) * | 2018-04-28 | 2019-10-31 | Applied Materials, Inc. | In-situ wafer rotation for carousel processing chambers |
CN111883750B (zh) * | 2020-07-02 | 2021-06-22 | 安徽南都华铂新材料科技有限公司 | 一种三元前驱体掺杂包覆装置及其使用方法 |
CN112133552B (zh) * | 2020-09-29 | 2022-05-24 | 烟台首钢磁性材料股份有限公司 | 一种晶界可调控的钕铁硼磁体制备方法 |
KR102490874B1 (ko) * | 2021-01-04 | 2023-01-19 | 왕병철 | 치과 보철용 지르코니아 소결로 |
Citations (7)
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JP2009088191A (ja) * | 2007-09-28 | 2009-04-23 | Ulvac Japan Ltd | 焼結体の製造方法及びこの焼結体の製造方法により製造されるネオジウム鉄ボロン系焼結磁石 |
CN201864761U (zh) * | 2010-11-10 | 2011-06-15 | 成都天马铁路轴承有限公司 | 台阶式炉底的环型加热炉 |
CN102154690A (zh) * | 2011-05-23 | 2011-08-17 | 东莞市天域半导体科技有限公司 | 行星式外延生长设备中托盘的构成方法和装置 |
CN102568806A (zh) * | 2011-12-29 | 2012-07-11 | 包头天和磁材技术有限责任公司 | 一种通过渗透法制备稀土永磁体的方法及方法中使用的石墨盒 |
CN202420169U (zh) * | 2011-12-15 | 2012-09-05 | 王洪举 | 行星反应炉 |
JP2013237929A (ja) * | 2008-10-08 | 2013-11-28 | Ulvac Japan Ltd | 蒸発材料の製造方法 |
CN103776263A (zh) * | 2012-10-19 | 2014-05-07 | 湖北中冶窑炉有限公司 | 外环炉墙单侧供热的环形炉 |
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US4501766A (en) * | 1982-02-03 | 1985-02-26 | Tokyo Shibaura Denki Kabushiki Kaisha | Film depositing apparatus and a film depositing method |
JPS63262472A (ja) * | 1987-04-20 | 1988-10-28 | Sanyo Electric Co Ltd | 膜形成方法 |
US5795448A (en) * | 1995-12-08 | 1998-08-18 | Sony Corporation | Magnetic device for rotating a substrate |
DE102008010041A1 (de) * | 2007-09-28 | 2009-04-02 | Osram Opto Semiconductors Gmbh | Schichtabscheidevorrichtung und Verfahren zu deren Betrieb |
JP2010073823A (ja) * | 2008-09-17 | 2010-04-02 | Tokyo Electron Ltd | 成膜装置、成膜方法、及びコンピュータ可読記憶媒体 |
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CN102331194A (zh) | 2011-07-27 | 2012-01-25 | 太仓市华瑞真空炉业有限公司 | 高温真空炉 |
CN202808872U (zh) * | 2012-10-12 | 2013-03-20 | 爱协林天捷热处理系统(唐山)有限公司 | 多环并用的环形加热炉热处理生产线 |
CN103839670B (zh) | 2014-03-18 | 2016-05-11 | 安徽大地熊新材料股份有限公司 | 一种制备高矫顽力的烧结钕铁硼永磁体的方法 |
CN204519011U (zh) * | 2015-02-06 | 2015-08-05 | 林最杰 | 一种旋转烤炉 |
-
2015
- 2015-08-20 CN CN201510514589.1A patent/CN105063550B/zh active Active
-
2016
- 2016-02-24 EP EP16157097.3A patent/EP3121828B1/en active Active
- 2016-03-03 US US15/059,806 patent/US10138540B2/en active Active
- 2016-03-07 JP JP2016001033U patent/JP3204277U/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2009088191A (ja) * | 2007-09-28 | 2009-04-23 | Ulvac Japan Ltd | 焼結体の製造方法及びこの焼結体の製造方法により製造されるネオジウム鉄ボロン系焼結磁石 |
JP2013237929A (ja) * | 2008-10-08 | 2013-11-28 | Ulvac Japan Ltd | 蒸発材料の製造方法 |
CN201864761U (zh) * | 2010-11-10 | 2011-06-15 | 成都天马铁路轴承有限公司 | 台阶式炉底的环型加热炉 |
CN102154690A (zh) * | 2011-05-23 | 2011-08-17 | 东莞市天域半导体科技有限公司 | 行星式外延生长设备中托盘的构成方法和装置 |
CN202420169U (zh) * | 2011-12-15 | 2012-09-05 | 王洪举 | 行星反应炉 |
CN102568806A (zh) * | 2011-12-29 | 2012-07-11 | 包头天和磁材技术有限责任公司 | 一种通过渗透法制备稀土永磁体的方法及方法中使用的石墨盒 |
CN103776263A (zh) * | 2012-10-19 | 2014-05-07 | 湖北中冶窑炉有限公司 | 外环炉墙单侧供热的环形炉 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108504990A (zh) * | 2017-02-24 | 2018-09-07 | 东莞超汇链条有限公司 | 一种新型固体渗金属炉台结构 |
CN107097170A (zh) * | 2017-04-13 | 2017-08-29 | 天津市汇晶丰精密机械有限公司 | 一种压衬套装置 |
CN107971147A (zh) * | 2017-12-25 | 2018-05-01 | 惠州雷通光电器件有限公司 | Led器件离心方法与装置 |
CN107971147B (zh) * | 2017-12-25 | 2024-03-26 | 惠州雷通光电器件有限公司 | Led器件离心方法与装置 |
CN108456903A (zh) * | 2018-03-30 | 2018-08-28 | 深圳宝福珠宝有限公司 | 一种升降式加热装置及铂金发黑处理方法 |
Also Published As
Publication number | Publication date |
---|---|
CN105063550B (zh) | 2017-11-28 |
EP3121828A1 (en) | 2017-01-25 |
US10138540B2 (en) | 2018-11-27 |
JP3204277U (ja) | 2016-05-26 |
US20170051390A1 (en) | 2017-02-23 |
EP3121828B1 (en) | 2019-01-23 |
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Miao Juchang Inventor after: Yuan Yi Inventor after: Chen Ya Inventor after: Yuan Wenjie Inventor after: Zhai Yong Inventor after: Ma Jianxin Inventor after: Gao Enfeng Inventor after: Song Yanling Inventor after: Diao Shulin Inventor after: Dong Yi Inventor after: Yi Haibo Inventor after: Wu Shujie Inventor before: Miao Juchang Inventor before: Wu Shujie Inventor before: Yuan Yi Inventor before: Chen Ya Inventor before: Yuan Wenjie Inventor before: Zhai Yong Inventor before: Ma Jianxin Inventor before: Gao Enfeng Inventor before: Song Yanling Inventor before: Diao Shulin Inventor before: Dong Yi Inventor before: Wu Zhimin Inventor before: Yi Haibo |
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COR | Change of bibliographic data | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20190123 Address after: 014030 No. 8-17 Rare Earth Street, Rare Earth Application Industrial Park, Baotou Rare Earth High-tech Zone, Baotou City, Inner Mongolia Autonomous Region Co-patentee after: Baotou Tianzhihe Magnetic Equipment Manufacturing Co.,Ltd. Patentee after: TIANHE (BAOTOU) ADVANCED TECH MAGNET CO.,LTD. Address before: 014030 No. 8-17 Rare Earth Street, Rare Earth Application Industrial Park, Baotou Rare Earth High-tech Zone, Baotou City, Inner Mongolia Autonomous Region Patentee before: TIANHE (BAOTOU) ADVANCED TECH MAGNET CO.,LTD. |
|
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