CN104977360B - 机电变换器和光声装置 - Google Patents
机电变换器和光声装置 Download PDFInfo
- Publication number
- CN104977360B CN104977360B CN201510245395.6A CN201510245395A CN104977360B CN 104977360 B CN104977360 B CN 104977360B CN 201510245395 A CN201510245395 A CN 201510245395A CN 104977360 B CN104977360 B CN 104977360B
- Authority
- CN
- China
- Prior art keywords
- layer
- electromechanical transducer
- electrode
- stress relaxation
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012528 membrane Substances 0.000 claims abstract description 36
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 10
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- -1 polydimethylsiloxane Polymers 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 3
- 230000002542 deteriorative effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 42
- 239000000758 substrate Substances 0.000 description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 11
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000004417 polycarbonate Substances 0.000 description 5
- 229920000515 polycarbonate Polymers 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- RGYAVZGBAJFMIZ-UHFFFAOYSA-N 2,3-dimethylhex-2-ene Chemical compound CCCC(C)=C(C)C RGYAVZGBAJFMIZ-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000306 polymethylpentene Polymers 0.000 description 1
- 239000011116 polymethylpentene Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-090123 | 2011-04-14 | ||
| JP2011090123A JP5787586B2 (ja) | 2011-04-14 | 2011-04-14 | 電気機械変換装置 |
| CN201210102975.6A CN102738383B (zh) | 2011-04-14 | 2012-04-10 | 机电变换器和光声装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210102975.6A Division CN102738383B (zh) | 2011-04-14 | 2012-04-10 | 机电变换器和光声装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104977360A CN104977360A (zh) | 2015-10-14 |
| CN104977360B true CN104977360B (zh) | 2018-09-28 |
Family
ID=46084747
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510245395.6A Expired - Fee Related CN104977360B (zh) | 2011-04-14 | 2012-04-10 | 机电变换器和光声装置 |
| CN201210102975.6A Active CN102738383B (zh) | 2011-04-14 | 2012-04-10 | 机电变换器和光声装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210102975.6A Active CN102738383B (zh) | 2011-04-14 | 2012-04-10 | 机电变换器和光声装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8767278B2 (https=) |
| EP (1) | EP2511702A3 (https=) |
| JP (1) | JP5787586B2 (https=) |
| CN (2) | CN104977360B (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5511260B2 (ja) * | 2009-08-19 | 2014-06-04 | キヤノン株式会社 | 容量型電気機械変換装置、及びその感度調整方法 |
| JP5812660B2 (ja) * | 2011-04-19 | 2015-11-17 | キヤノン株式会社 | 電気機械変換装置及びその製造方法 |
| JP5943677B2 (ja) * | 2012-03-31 | 2016-07-05 | キヤノン株式会社 | 探触子、及びそれを用いた被検体情報取得装置 |
| JP5986441B2 (ja) | 2012-07-06 | 2016-09-06 | キヤノン株式会社 | 静電容量型トランスデューサ |
| JP6029413B2 (ja) * | 2012-10-12 | 2016-11-24 | キヤノン株式会社 | プローブ及び被検体情報取得装置 |
| JP6359280B2 (ja) * | 2013-02-28 | 2018-07-18 | キヤノンメディカルシステムズ株式会社 | 医用音響カプラ |
| US9502023B2 (en) | 2013-03-15 | 2016-11-22 | Fujifilm Sonosite, Inc. | Acoustic lens for micromachined ultrasound transducers |
| JP6234073B2 (ja) * | 2013-06-07 | 2017-11-22 | キヤノン株式会社 | 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置 |
| JP6381195B2 (ja) | 2013-10-22 | 2018-08-29 | キヤノン株式会社 | 静電容量型トランスデューサ及びその作製方法 |
| JP2015100472A (ja) | 2013-11-22 | 2015-06-04 | キヤノン株式会社 | 静電容量型トランスデューサの駆動方法および駆動装置 |
| JP2015112326A (ja) * | 2013-12-12 | 2015-06-22 | キヤノン株式会社 | プローブ、被検体情報取得装置 |
| JP6278770B2 (ja) * | 2014-03-19 | 2018-02-14 | キヤノン株式会社 | 被検体情報取得装置 |
| JP6399803B2 (ja) * | 2014-05-14 | 2018-10-03 | キヤノン株式会社 | 力覚センサおよび把持装置 |
| CN103976743A (zh) * | 2014-05-27 | 2014-08-13 | 江西科技师范大学 | 基于cMUT环形阵列的微型光声传感器 |
| JP2016122759A (ja) * | 2014-12-25 | 2016-07-07 | キヤノン株式会社 | 貫通配線を有する電子デバイスの作製方法 |
| JP6429711B2 (ja) | 2015-03-31 | 2018-11-28 | キヤノン株式会社 | 探触子、及びそれを用いた被検体情報取得装置 |
| CN109171660A (zh) * | 2018-10-09 | 2019-01-11 | 深圳先进技术研究院 | 光声成像探头及应用 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010272956A (ja) * | 2009-05-19 | 2010-12-02 | Canon Inc | 容量型機械電気変換素子の製造方法 |
| CN101969856A (zh) * | 2007-09-17 | 2011-02-09 | 皇家飞利浦电子股份有限公司 | 预塌陷的电容微机械超声传感器的制造及其应用 |
| CN102015127A (zh) * | 2008-05-02 | 2011-04-13 | 佳能株式会社 | 电容型机电变换器的制造方法和电容型机电变换器 |
| US8004148B2 (en) * | 2008-08-13 | 2011-08-23 | Seiko Epson Corporation | Surface acoustic wave element |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69127379T2 (de) | 1990-01-11 | 1998-03-19 | Canon K.K., Tokio/Tokyo | Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet |
| JP2884447B2 (ja) | 1991-04-22 | 1999-04-19 | キヤノン株式会社 | カンチレバー型プローブ、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
| JP2923813B2 (ja) | 1991-06-11 | 1999-07-26 | キヤノン株式会社 | カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
| JPH05282717A (ja) | 1992-03-31 | 1993-10-29 | Canon Inc | 記録媒体の製造方法、及び記録媒体、及び情報処理装置 |
| ATE165187T1 (de) | 1993-11-09 | 1998-05-15 | Canon Kk | Bildanzeigegerät |
| US20070127164A1 (en) * | 2005-11-21 | 2007-06-07 | Physical Logic Ag | Nanoscale Sensor |
| JP5049340B2 (ja) | 2007-03-20 | 2012-10-17 | 株式会社日立メディコ | 超音波探触子及び超音波診断装置 |
| US20090252977A1 (en) * | 2008-04-07 | 2009-10-08 | Canon Kabushiki Kaisha | Multilayer film reflector |
| JP4900979B2 (ja) | 2008-08-27 | 2012-03-21 | キヤノン株式会社 | 光音響装置および光音響波を受信するための探触子 |
| JP5409251B2 (ja) * | 2008-11-19 | 2014-02-05 | キヤノン株式会社 | 電気機械変換装置およびその製造方法 |
| JP2011004790A (ja) | 2009-06-23 | 2011-01-13 | Canon Inc | 光音響計測装置 |
| JP5709368B2 (ja) | 2009-11-04 | 2015-04-30 | キヤノン株式会社 | 生体情報取得装置 |
-
2011
- 2011-04-14 JP JP2011090123A patent/JP5787586B2/ja active Active
-
2012
- 2012-03-15 US US13/421,791 patent/US8767278B2/en active Active
- 2012-03-26 EP EP12161161.0A patent/EP2511702A3/en not_active Withdrawn
- 2012-04-10 CN CN201510245395.6A patent/CN104977360B/zh not_active Expired - Fee Related
- 2012-04-10 CN CN201210102975.6A patent/CN102738383B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101969856A (zh) * | 2007-09-17 | 2011-02-09 | 皇家飞利浦电子股份有限公司 | 预塌陷的电容微机械超声传感器的制造及其应用 |
| CN102015127A (zh) * | 2008-05-02 | 2011-04-13 | 佳能株式会社 | 电容型机电变换器的制造方法和电容型机电变换器 |
| US8004148B2 (en) * | 2008-08-13 | 2011-08-23 | Seiko Epson Corporation | Surface acoustic wave element |
| JP2010272956A (ja) * | 2009-05-19 | 2010-12-02 | Canon Inc | 容量型機械電気変換素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2511702A2 (en) | 2012-10-17 |
| US8767278B2 (en) | 2014-07-01 |
| EP2511702A3 (en) | 2016-03-23 |
| JP5787586B2 (ja) | 2015-09-30 |
| JP2012222785A (ja) | 2012-11-12 |
| CN102738383A (zh) | 2012-10-17 |
| CN104977360A (zh) | 2015-10-14 |
| CN102738383B (zh) | 2015-06-03 |
| US20120262770A1 (en) | 2012-10-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104977360B (zh) | 机电变换器和光声装置 | |
| JP5943677B2 (ja) | 探触子、及びそれを用いた被検体情報取得装置 | |
| JP6029413B2 (ja) | プローブ及び被検体情報取得装置 | |
| WO2012093662A1 (ja) | 超音波探触子 | |
| US20130255388A1 (en) | Probe and object information acquisition apparatus using the same | |
| JP5406374B2 (ja) | 超音波探触子およびそれを用いた超音波診断装置 | |
| US20130261425A1 (en) | Probe and object information acquisition apparatus using the same | |
| US20130263669A1 (en) | Probe and manufacturing method thereof, and object information acquisition apparatus using the same | |
| US20150168354A1 (en) | Probe and sample information acquisition device | |
| JP6438544B2 (ja) | 電気機械変換装置 | |
| JP6186055B2 (ja) | 電気機械変換装置 | |
| JP5980388B2 (ja) | 電気機械変換装置 | |
| JP6598944B2 (ja) | プローブ、被検体情報取得装置 | |
| JP6429711B2 (ja) | 探触子、及びそれを用いた被検体情報取得装置 | |
| JP2017216728A5 (https=) | ||
| JP2013214846A (ja) | 探触子、及びそれを用いた被検体情報取得装置 | |
| JP2017005636A (ja) | トランスデューサ、及び被検体情報取得装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180928 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |