CN104969136B - 流量控制阀及使用该流量控制阀的质量流量控制器 - Google Patents

流量控制阀及使用该流量控制阀的质量流量控制器 Download PDF

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Publication number
CN104969136B
CN104969136B CN201480006894.3A CN201480006894A CN104969136B CN 104969136 B CN104969136 B CN 104969136B CN 201480006894 A CN201480006894 A CN 201480006894A CN 104969136 B CN104969136 B CN 104969136B
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CN
China
Prior art keywords
diaphragm
valve seat
inclined surface
spacer
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480006894.3A
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English (en)
Chinese (zh)
Other versions
CN104969136A (zh
Inventor
梅山贵博
渡边惠子
清水利彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bomai Licheng Co ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of CN104969136A publication Critical patent/CN104969136A/zh
Application granted granted Critical
Publication of CN104969136B publication Critical patent/CN104969136B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/123—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on the bottom of the fluid line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/01—Control of flow without auxiliary power
    • G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
    • G05D7/0113—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule the sensing element acting as a valve
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Lift Valve (AREA)
  • Flow Control (AREA)
CN201480006894.3A 2013-05-24 2014-03-28 流量控制阀及使用该流量控制阀的质量流量控制器 Active CN104969136B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-109493 2013-05-24
JP2013109493A JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ
PCT/JP2014/059087 WO2014188785A1 (ja) 2013-05-24 2014-03-28 流量制御弁及びそれを用いたマスフローコントローラ

Publications (2)

Publication Number Publication Date
CN104969136A CN104969136A (zh) 2015-10-07
CN104969136B true CN104969136B (zh) 2017-09-26

Family

ID=51933351

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480006894.3A Active CN104969136B (zh) 2013-05-24 2014-03-28 流量控制阀及使用该流量控制阀的质量流量控制器

Country Status (5)

Country Link
US (1) US10018277B2 (enExample)
JP (1) JP6111862B2 (enExample)
KR (1) KR101752988B1 (enExample)
CN (1) CN104969136B (enExample)
WO (1) WO2014188785A1 (enExample)

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US9903497B2 (en) * 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
KR102338166B1 (ko) * 2015-06-17 2021-12-09 비스타델텍, 엘엘씨 밸브를 위한 낮은 히스테리시스의 다이어프램
MY188606A (en) 2015-07-09 2021-12-22 Vistadeltek Llc Control plate in a valve
JP2017057911A (ja) * 2015-09-16 2017-03-23 タカノ株式会社 ピエゾバルブ
WO2018062516A1 (ja) * 2016-09-29 2018-04-05 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
JP6793026B2 (ja) * 2016-12-13 2020-12-02 株式会社堀場エステック バルブ装置及びバルブ制御装置
DE102017201633A1 (de) 2017-02-01 2018-08-02 Volkswagen Aktiengesellschaft Druckbegrenzungsventil
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
WO2018226596A1 (en) 2017-06-05 2018-12-13 Vistadeltek, Llc Control plate for a high conductance valve
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US10774938B2 (en) * 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
CN107844133A (zh) * 2017-12-20 2018-03-27 北京创昱科技有限公司 一种质量流量控制器
WO2019181397A1 (ja) * 2018-03-19 2019-09-26 日立金属株式会社 ダイアフラム弁及びそれを用いた質量流量制御装置
ES2953306T3 (es) * 2019-05-29 2023-11-10 Fischer G Rohrleitungssysteme Ag Puesta en marcha de válvula de diafragma
WO2021131631A1 (ja) * 2019-12-27 2021-07-01 株式会社フジキン ダイヤフラムバルブ、流量制御装置、流体制御装置、及び半導体製造装置
JP7353197B2 (ja) * 2020-01-31 2023-09-29 川崎重工業株式会社 減圧弁及びバルブユニット
JP7531881B2 (ja) * 2020-03-24 2024-08-13 株式会社フジキン 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil
CN113190050A (zh) * 2021-04-01 2021-07-30 青岛芯笙微纳电子科技有限公司 一种基于压电控制阀的mems质量流量控制器及控制方法
FR3133899B1 (fr) * 2022-03-24 2024-02-16 Hutchinson Dispositif d’amortissement de pression pour un circuit de fluide

Citations (5)

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Publication number Priority date Publication date Assignee Title
CN85106997A (zh) * 1985-03-29 1986-09-24 德拉夫特系统公司 流量控制装置
US5413311A (en) * 1994-03-01 1995-05-09 Tescom Corporation Gas valve
CN1246915A (zh) * 1997-02-03 2000-03-08 斯瓦戈洛克公司 膜片阀
US6062246A (en) * 1997-04-08 2000-05-16 Hitachi Metals Ltd. Mass flow controller and operating method thereof
CN1654863A (zh) * 2004-01-06 2005-08-17 东京流量仪器仪表株式会社 流量控制阀和流量控制装置

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JPS5134029U (enExample) * 1974-09-05 1976-03-12
JPS5134029A (ja) 1974-09-17 1976-03-23 Akihiro Fujimura Dendowabuntaipuraitaa
JP2560468Y2 (ja) * 1992-02-18 1998-01-21 株式会社本山製作所 メタルダイヤフラム弁
EP0780611A1 (en) * 1995-12-22 1997-06-25 Applied Materials, Inc. Flow control valve
JP3562692B2 (ja) * 1997-08-11 2004-09-08 日立金属株式会社 マスフローコントローラ
JP2010159790A (ja) 2009-01-07 2010-07-22 Fujikin Inc ダイヤフラム弁用ダイヤフラム押さえおよびこれを備えたダイヤフラム弁

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
CN85106997A (zh) * 1985-03-29 1986-09-24 德拉夫特系统公司 流量控制装置
US5413311A (en) * 1994-03-01 1995-05-09 Tescom Corporation Gas valve
CN1246915A (zh) * 1997-02-03 2000-03-08 斯瓦戈洛克公司 膜片阀
US6062246A (en) * 1997-04-08 2000-05-16 Hitachi Metals Ltd. Mass flow controller and operating method thereof
CN1654863A (zh) * 2004-01-06 2005-08-17 东京流量仪器仪表株式会社 流量控制阀和流量控制装置

Also Published As

Publication number Publication date
KR20150099861A (ko) 2015-09-01
US10018277B2 (en) 2018-07-10
JP6111862B2 (ja) 2017-04-12
KR101752988B1 (ko) 2017-07-03
JP2014229159A (ja) 2014-12-08
CN104969136A (zh) 2015-10-07
US20150369378A1 (en) 2015-12-24
WO2014188785A1 (ja) 2014-11-27

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Address after: 6-36 Toyosu 5-chome, Koto ku, Tokyo, Japan

Patentee after: Bomai Licheng Co.,Ltd.

Country or region after: Japan

Address before: Tokyo, Japan

Patentee before: HITACHI METALS, Ltd.

Country or region before: Japan