JP6111862B2 - 流量制御弁及びそれを用いたマスフローコントローラ - Google Patents

流量制御弁及びそれを用いたマスフローコントローラ Download PDF

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Publication number
JP6111862B2
JP6111862B2 JP2013109493A JP2013109493A JP6111862B2 JP 6111862 B2 JP6111862 B2 JP 6111862B2 JP 2013109493 A JP2013109493 A JP 2013109493A JP 2013109493 A JP2013109493 A JP 2013109493A JP 6111862 B2 JP6111862 B2 JP 6111862B2
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JP
Japan
Prior art keywords
diaphragm
valve seat
control valve
inclined surface
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2013109493A
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English (en)
Japanese (ja)
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JP2014229159A5 (enExample
JP2014229159A (ja
Inventor
貴博 梅山
貴博 梅山
恵子 渡邉
恵子 渡邉
清水　利彦
利彦 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP2013109493A priority Critical patent/JP6111862B2/ja
Priority to PCT/JP2014/059087 priority patent/WO2014188785A1/ja
Priority to US14/764,262 priority patent/US10018277B2/en
Priority to CN201480006894.3A priority patent/CN104969136B/zh
Priority to KR1020157020487A priority patent/KR101752988B1/ko
Publication of JP2014229159A publication Critical patent/JP2014229159A/ja
Publication of JP2014229159A5 publication Critical patent/JP2014229159A5/ja
Application granted granted Critical
Publication of JP6111862B2 publication Critical patent/JP6111862B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/123—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on the bottom of the fluid line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/01—Control of flow without auxiliary power
    • G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
    • G05D7/0113—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule the sensing element acting as a valve
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Lift Valve (AREA)
  • Flow Control (AREA)
JP2013109493A 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ Active JP6111862B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013109493A JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ
PCT/JP2014/059087 WO2014188785A1 (ja) 2013-05-24 2014-03-28 流量制御弁及びそれを用いたマスフローコントローラ
US14/764,262 US10018277B2 (en) 2013-05-24 2014-03-28 Flow rate control valve and mass flow controller using the same
CN201480006894.3A CN104969136B (zh) 2013-05-24 2014-03-28 流量控制阀及使用该流量控制阀的质量流量控制器
KR1020157020487A KR101752988B1 (ko) 2013-05-24 2014-03-28 유량 제어 밸브 및 그것을 사용한 매스 플로우 컨트롤러

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013109493A JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ

Publications (3)

Publication Number Publication Date
JP2014229159A JP2014229159A (ja) 2014-12-08
JP2014229159A5 JP2014229159A5 (enExample) 2016-01-21
JP6111862B2 true JP6111862B2 (ja) 2017-04-12

Family

ID=51933351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013109493A Active JP6111862B2 (ja) 2013-05-24 2013-05-24 流量制御弁及びそれを用いたマスフローコントローラ

Country Status (5)

Country Link
US (1) US10018277B2 (enExample)
JP (1) JP6111862B2 (enExample)
KR (1) KR101752988B1 (enExample)
CN (1) CN104969136B (enExample)
WO (1) WO2014188785A1 (enExample)

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Publication number Priority date Publication date Assignee Title
US9903497B2 (en) * 2013-09-30 2018-02-27 Hitachi Metals, Ltd. Flow control valve and a mass flow controller using the same
DE202016008955U1 (de) 2015-06-17 2021-02-25 Vistadeltek, Llc Membran mit geringer Hysterese für ein Ventil
MY188606A (en) 2015-07-09 2021-12-22 Vistadeltek Llc Control plate in a valve
JP2017057911A (ja) * 2015-09-16 2017-03-23 タカノ株式会社 ピエゾバルブ
CN109804187B (zh) * 2016-09-29 2020-10-16 日立金属株式会社 流量控制阀和使用该流量控制阀的质量流量控制装置
JP6793026B2 (ja) * 2016-12-13 2020-12-02 株式会社堀場エステック バルブ装置及びバルブ制御装置
DE102017201633B4 (de) 2017-02-01 2026-02-05 Volkswagen Aktiengesellschaft Druckbegrenzungsventil
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
EP3610181B1 (en) 2017-06-05 2024-08-07 Illinois Tool Works Inc. Control plate for a high conductance valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US10774938B2 (en) * 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ
CN107844133A (zh) * 2017-12-20 2018-03-27 北京创昱科技有限公司 一种质量流量控制器
WO2019181397A1 (ja) * 2018-03-19 2019-09-26 日立金属株式会社 ダイアフラム弁及びそれを用いた質量流量制御装置
EP3745009B1 (de) * 2019-05-29 2023-07-05 Georg Fischer Rohrleitungssysteme AG Inbetriebnahme eines membranventils
US11892100B2 (en) * 2019-12-27 2024-02-06 Fujikin Incorporated Diaphragm valve, flow control device, fluid control device, and semiconductor manufacturing device
JP7353197B2 (ja) * 2020-01-31 2023-09-29 川崎重工業株式会社 減圧弁及びバルブユニット
JP7531881B2 (ja) * 2020-03-24 2024-08-13 株式会社フジキン 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil
CN113190050A (zh) * 2021-04-01 2021-07-30 青岛芯笙微纳电子科技有限公司 一种基于压电控制阀的mems质量流量控制器及控制方法
FR3133899B1 (fr) * 2022-03-24 2024-02-16 Hutchinson Dispositif d’amortissement de pression pour un circuit de fluide

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Also Published As

Publication number Publication date
KR20150099861A (ko) 2015-09-01
CN104969136A (zh) 2015-10-07
KR101752988B1 (ko) 2017-07-03
CN104969136B (zh) 2017-09-26
JP2014229159A (ja) 2014-12-08
US10018277B2 (en) 2018-07-10
WO2014188785A1 (ja) 2014-11-27
US20150369378A1 (en) 2015-12-24

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