CN104954958B - 压电元件、压电器件、探头、电子设备及超声波图像装置 - Google Patents

压电元件、压电器件、探头、电子设备及超声波图像装置 Download PDF

Info

Publication number
CN104954958B
CN104954958B CN201510130669.7A CN201510130669A CN104954958B CN 104954958 B CN104954958 B CN 104954958B CN 201510130669 A CN201510130669 A CN 201510130669A CN 104954958 B CN104954958 B CN 104954958B
Authority
CN
China
Prior art keywords
piezoelectric
electrode
piezoelectric element
diaphragm
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510130669.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN104954958A (zh
Inventor
鹤野次郎
舩坂司
中村友亮
宫泽弘
伊藤浩
山田昌佳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN104954958A publication Critical patent/CN104954958A/zh
Application granted granted Critical
Publication of CN104954958B publication Critical patent/CN104954958B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4488—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/13—Tomography
    • A61B8/14—Echotomography
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/46—Ultrasonic, sonic or infrasonic diagnostic devices with special arrangements for interfacing with the operator or the patient
    • A61B8/461—Displaying means of special interest
    • A61B8/462—Displaying means of special interest characterised by constructional features of the display

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Veterinary Medicine (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Physics & Mathematics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
CN201510130669.7A 2014-03-27 2015-03-24 压电元件、压电器件、探头、电子设备及超声波图像装置 Active CN104954958B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014-065114 2014-03-27
JP2014065114 2014-03-27
JP2015021194A JP6519212B2 (ja) 2014-03-27 2015-02-05 圧電素子、圧電デバイスおよびプローブ並びに電子機器および超音波画像装置
JP2015-021194 2015-02-05

Publications (2)

Publication Number Publication Date
CN104954958A CN104954958A (zh) 2015-09-30
CN104954958B true CN104954958B (zh) 2019-07-09

Family

ID=54169238

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510130669.7A Active CN104954958B (zh) 2014-03-27 2015-03-24 压电元件、压电器件、探头、电子设备及超声波图像装置

Country Status (3)

Country Link
US (1) US10086405B2 (enExample)
JP (1) JP6519212B2 (enExample)
CN (1) CN104954958B (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6613628B2 (ja) 2015-05-28 2019-12-04 セイコーエプソン株式会社 圧電デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6617504B2 (ja) * 2015-10-02 2019-12-11 セイコーエプソン株式会社 圧電素子、プローブ及び超音波測定装置
JP6728630B2 (ja) * 2015-10-29 2020-07-22 セイコーエプソン株式会社 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法
JP6593104B2 (ja) * 2015-10-29 2019-10-23 セイコーエプソン株式会社 圧電素子、圧電モジュール及び電子機器
JP6610883B2 (ja) * 2015-12-17 2019-11-27 セイコーエプソン株式会社 超音波センサー用の圧電デバイス
JP2017163330A (ja) * 2016-03-09 2017-09-14 セイコーエプソン株式会社 超音波デバイス、超音波モジュール、及び超音波測定装置
JP6724502B2 (ja) * 2016-04-06 2020-07-15 セイコーエプソン株式会社 超音波装置
JP6707974B2 (ja) * 2016-04-27 2020-06-10 セイコーエプソン株式会社 Ｍｅｍｓデバイス、液体噴射ヘッド、及び、液体噴射装置
JP6805630B2 (ja) 2016-08-24 2020-12-23 セイコーエプソン株式会社 超音波デバイス、超音波モジュール、及び超音波測定装置
JP6606034B2 (ja) * 2016-08-24 2019-11-13 株式会社日立製作所 容量検出型超音波トランスデューサおよびそれを備えた超音波撮像装置
JP6828389B2 (ja) * 2016-11-16 2021-02-10 セイコーエプソン株式会社 超音波トランスデューサーデバイス、超音波プローブおよび超音波装置
JP6753293B2 (ja) * 2016-12-09 2020-09-09 セイコーエプソン株式会社 超音波デバイス及び超音波装置
CN110383517B (zh) * 2017-03-06 2023-06-20 柯尼卡美能达株式会社 压电部件及其制造方法、超声波振荡元件、超声波探头、超声波诊断装置
JP6939414B2 (ja) * 2017-10-26 2021-09-22 セイコーエプソン株式会社 超音波デバイス、及び超音波測定装置
US11517938B2 (en) * 2018-08-21 2022-12-06 Invensense, Inc. Reflection minimization for sensor
CN112978671B (zh) * 2019-12-13 2024-08-30 奥矽半导体技术有限公司 力测量和触摸感测集成电路器件
CN111136001B (zh) * 2020-01-16 2024-12-03 重庆大学 机械槽增强型差分式压电超声换能器及其工作方法
CN117915838A (zh) * 2021-09-21 2024-04-19 富士胶片株式会社 超声波内窥镜系统及超声波内窥镜系统的工作方法
CN120961411B (zh) * 2025-10-20 2026-01-16 广东阿达半导体设备股份有限公司 一种带x向运动的超声波换能器组件及其x向运动方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1262530A (zh) * 1999-01-29 2000-08-09 精工爱普生股份株式会社 压电传感器和使用压电传感器的电泳油墨显示装置
CN1649678A (zh) * 2002-05-01 2005-08-03 皇家飞利浦电子股份有限公司 超声薄膜换能器
WO2006046471A1 (ja) * 2004-10-27 2006-05-04 Olympus Corporation 静電容量型超音波振動子及びその体腔内超音波診断システム

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58159735A (ja) * 1982-03-18 1983-09-22 横河電機株式会社 超音波探触子
JPS58170199A (ja) * 1982-03-30 1983-10-06 Yokogawa Hokushin Electric Corp 圧電トランスデュ−サ
US6515402B2 (en) 2001-01-24 2003-02-04 Koninklijke Philips Electronics N.V. Array of ultrasound transducers
JP4622574B2 (ja) * 2005-02-21 2011-02-02 株式会社デンソー 超音波素子
JP5594986B2 (ja) * 2008-06-24 2014-09-24 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法
JP5293557B2 (ja) 2008-12-17 2013-09-18 セイコーエプソン株式会社 超音波トランスデューサー、超音波トランスデューサーアレイ及び超音波デバイス
JP5310119B2 (ja) 2009-03-06 2013-10-09 セイコーエプソン株式会社 超音波センサーユニット
JP5436013B2 (ja) * 2009-04-10 2014-03-05 キヤノン株式会社 機械電気変化素子
JP5738671B2 (ja) * 2011-05-18 2015-06-24 株式会社東芝 超音波トランスデューサ、超音波プローブおよび超音波トランスデューサの製造方法
JP5824892B2 (ja) * 2011-06-15 2015-12-02 セイコーエプソン株式会社 圧電センサー装置、超音波センサー、および圧電センサー装置における圧電体の分極方法
JP6069848B2 (ja) * 2012-02-24 2017-02-01 セイコーエプソン株式会社 プローブヘッド、超音波プローブ、電子機器及び診断装置
EP2838127B1 (en) * 2012-03-08 2018-08-01 Konica Minolta, Inc. Piezoelectric device, ultrasound probe, droplet discharge device, and piezoelectric device fabrication method
JP6102075B2 (ja) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6089499B2 (ja) * 2012-08-28 2017-03-08 セイコーエプソン株式会社 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置
JP6145288B2 (ja) * 2013-03-15 2017-06-07 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1262530A (zh) * 1999-01-29 2000-08-09 精工爱普生股份株式会社 压电传感器和使用压电传感器的电泳油墨显示装置
CN1649678A (zh) * 2002-05-01 2005-08-03 皇家飞利浦电子股份有限公司 超声薄膜换能器
WO2006046471A1 (ja) * 2004-10-27 2006-05-04 Olympus Corporation 静電容量型超音波振動子及びその体腔内超音波診断システム

Also Published As

Publication number Publication date
JP6519212B2 (ja) 2019-05-29
CN104954958A (zh) 2015-09-30
US10086405B2 (en) 2018-10-02
JP2015195351A (ja) 2015-11-05
US20150273526A1 (en) 2015-10-01

Similar Documents

Publication Publication Date Title
JP6519212B2 (ja) 圧電素子、圧電デバイスおよびプローブ並びに電子機器および超音波画像装置
US9818929B2 (en) Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device
CN103654848B (zh) 超声波换能器装置、探测器、电子设备及超声波诊断装置
TWI599237B (zh) 超音波轉換器元件晶片及探針及電子機器及超音波診斷裝置
JP5990929B2 (ja) 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置
CN105310718B (zh) 超声波器件、探测器以及电子设备
US9976992B2 (en) Ultrasonic device, method for manufacturing the same, probe, and electronic apparatus
JP6314777B2 (ja) 超音波センサー並びにプローブおよび電子機器
KR102106653B1 (ko) 초음파 트랜스듀서 장치 및 프로브, 및 전자 기기 및 초음파 화상 장치
JP6613628B2 (ja) 圧電デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6221582B2 (ja) 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6252279B2 (ja) 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波画像装置
JP6273743B2 (ja) 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
US10363574B2 (en) Piezoelectric element, probe, and ultrasonic measurement apparatus
JP2015160104A (ja) 超音波デバイスユニットおよびプローブ並びに電子機器および超音波画像装置
JP2015100093A (ja) 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP6221679B2 (ja) 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置
JP2017170156A (ja) 超音波トランスデューサー装置及び電子機器
JP2015181681A (ja) 超音波デバイスユニットおよびプローブ並びに電子機器および超音波画像装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant