CN104932203A - 一种光阻汲取装置 - Google Patents

一种光阻汲取装置 Download PDF

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CN104932203A
CN104932203A CN201510405817.1A CN201510405817A CN104932203A CN 104932203 A CN104932203 A CN 104932203A CN 201510405817 A CN201510405817 A CN 201510405817A CN 104932203 A CN104932203 A CN 104932203A
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photoresistance
bottle
photoresist
rotation axis
drawing device
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宋江江
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to CN201510405817.1A priority Critical patent/CN104932203A/zh
Priority to PCT/CN2015/084021 priority patent/WO2017008261A1/zh
Priority to US14/768,403 priority patent/US10293316B2/en
Publication of CN104932203A publication Critical patent/CN104932203A/zh
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    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01F27/21—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by their rotating shafts
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
    • B01F35/32—Driving arrangements
    • B01F35/32005—Type of drive
    • B01F35/3202—Hand driven
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/75—Discharge mechanisms
    • B01F35/753—Discharging at the upper side of the receptacle, e.g. by pressurising the liquid in the receptacle or by centrifugal force
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
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    • B01F35/754—Discharge mechanisms characterised by the means for discharging the components from the mixer
    • B01F35/7543—Discharge mechanisms characterised by the means for discharging the components from the mixer using pneumatic pressure, overpressure or gas pressure in a closed receptacle or circuit system
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
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    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0012—Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials
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    • C—CHEMISTRY; METALLURGY
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Abstract

本发明公开了一种光阻汲取装置，包括光阻瓶、设于所述光阻瓶瓶口的密封盖以及穿过所述密封盖插设于所述光阻瓶内的进气管和光阻汲取管，所述光阻瓶内还设有用于搅拌光阻的搅拌组件。本发明通过设计一种新型的光阻汲取装置，内置搅拌组件，可以有效改善高精细光阻易沉降的状况，提高彩色滤光片产品的稳定性，减少产品缺陷，提高产品的良率。

Description

一种光阻汲取装置
技术领域
本发明涉及高精细光阻供应技术，尤其涉及一种光阻汲取装置。
背景技术
彩色光阻是彩色滤光片的显色来源，主要分为R、G、B 3种。彩色光阻的制备需要首先将颜料分散型彩色光阻涂布于已形成黑矩阵的玻璃基板上，经软烤、曝光对准、显影、光阻剥离、硬烤，重复此流程三次形成R、G、B三色图形。对于高分辨率的显示产品，彩色滤光片侧的黑矩阵需使用高精细的黑矩阵光阻，但高精细的黑矩阵光阻静置易发生颜料沉降的状况，导致光阻桶内光阻不均匀，颜料颗粒变大，如果直接利用现有光阻涂布机的光阻汲取机构取用光阻容易导致彩色滤光片产品特性不稳，缺陷问题偏高，影响产品良率。
发明内容
鉴于现有技术存在的不足，本发明提供了一种产品特性稳定、良率高的光阻汲取装置。
为了实现上述的目的，本发明采用了如下的技术方案：
一种光阻汲取装置，包括光阻瓶、设于所述光阻瓶瓶口的密封盖以及穿过所述密封盖插设于所述光阻瓶内的进气管和光阻汲取管，所述光阻瓶内还设有用于搅拌光阻的搅拌组件。
其中，所述搅拌组件包括转动轴和倾斜连接于所述转动轴的若干叶片，所述搅拌组件转动将所述光阻瓶内的光阻自瓶口朝瓶底推动。
其中，所述转动轴的长度方向上间隔设有多个用于连接所述叶片的连接部，所述连接部可在外力作用下相对于所述转动轴上下翻折。
其中，所述连接部为软胶。
其中，所述转动轴为所述光阻汲取管。
或者，所述转动轴为套设于所述光阻汲取管外的套管，所述套管内壁与所述光阻汲取管外壁之间还设有密封件。
或者，所述转动轴为单独设置的搅动棒。
本发明通过设计一种新型的光阻汲取装置，内置搅拌组件，可以有效改善高精细光阻易沉降的状况，提高彩色滤光片产品的稳定性，减少产品缺陷，提高产品的良率。
附图说明
图1为本发明实施例1的光阻汲取装置结构示意图。
图2为本发明实施例2的光阻汲取装置结构示意图。
图3为本发明实施例3的光阻汲取装置结构示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
实施例1
参阅图1，本发明的光阻汲取装置包括光阻瓶10、设于光阻瓶10瓶口的密封盖11以及穿过密封盖11插设于光阻瓶10内的进气管12和光阻汲取管13，光阻瓶10内还设有用于搅拌光阻的搅拌组件20。
进气管12朝光阻瓶10内注入干净干燥的空气为瓶内提供一定的汲取压力，光阻汲取管13插入到光阻瓶10的瓶底，在瓶内压力的作用下，光阻被由光汲取管13引出至瓶外进行后续涂布操作。
搅拌组件20包括转动轴和倾斜连接于转动轴的若干叶片21，本实施例的转动轴为光阻汲取管13，叶片21相对于光阻汲取管13的倾斜角度相同为宜。光阻汲取管13转动时，叶片21对瓶内的光阻产生由上而下的力，将光阻瓶10内的光阻自瓶口朝瓶底推动，以达到光阻混合的目的。
进一步地，转动轴的长度方向上间隔设有多个用于连接叶片21的连接部22，连接部22采用软塑胶材料制成，可在外力作用下相对于转动轴上下翻折，从密封盖11处安装搅拌组件20时，只需要将叶片21朝上翻折即可将搅拌组件20装入光阻瓶10内。
通过设计一种新型的光阻汲取装置，内置搅拌组件，光阻被被经过充分搅拌混合之后由光阻汲取管自瓶底汲取，保证了光阻汲取管汲取到的都是经过充分搅拌后的光阻，可以有效改善高精细光阻易沉降的状况，提高彩色滤光片产品的稳定性，减少产品缺陷，提高产品的良率。
实施例2
如图2所示，与实施例1不同的是，本实施例的转动轴为套设于光阻汲取管13外的中空的套管23，在套管23内壁与光阻汲取管13外壁之间还设有密封件30，以防止光阻在瓶内压力作用下自套管23底部喷出至瓶外造成浪费和污染。
实施例3
如图3所示，与实施例1不同的是，本实施例的转动轴为单独设置的搅动棒24，搅动棒24自瓶口的密封盖11插入后留有一部分在瓶外，在汲取过程中，使用者可以通过手动或自动等方式搅动搅动棒24实现对瓶内的光组的混合。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (7)

1.一种光阻汲取装置，其特征在于，包括光阻瓶(10)、设于所述光阻瓶(10)瓶口的密封盖(11)以及穿过所述密封盖(11)插设于所述光阻瓶(10)内的进气管(12)和光阻汲取管(13)，所述光阻瓶(10)内还设有用于搅拌光阻的搅拌组件(20)。
2.根据权利要求1所述的光阻汲取装置，其特征在于，所述搅拌组件(20)包括转动轴和倾斜连接于所述转动轴的若干叶片(21)，所述搅拌组件(20)转动将所述光阻瓶(10)内的光阻自瓶口朝瓶底推动。
3.根据权利要求2所述的光阻汲取装置，其特征在于，所述转动轴的长度方向上间隔设有多个用于连接所述叶片(21)的连接部(22)，所述连接部(22)可在外力作用下相对于所述转动轴上下翻折。
4.根据权利要求3所述的光阻汲取装置，其特征在于，所述连接部(22)为软胶。
5.根据权利要求2-4任一所述的光阻汲取装置，其特征在于，所述转动轴为所述光阻汲取管(13)。
6.根据权利要求2-4任一所述的光阻汲取装置，其特征在于，所述转动轴为套设于所述光阻汲取管(13)外的套管(23)，所述套管(23)内壁与所述光阻汲取管(13)外壁之间还设有密封件(30)。
7.根据权利要求2-4任一所述的光阻汲取装置，其特征在于，所述转动轴为单独设置的搅动棒(24)。
CN201510405817.1A 2015-07-10 2015-07-10 一种光阻汲取装置 Pending CN104932203A (zh)

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CN201510405817.1A CN104932203A (zh) 2015-07-10 2015-07-10 一种光阻汲取装置
PCT/CN2015/084021 WO2017008261A1 (zh) 2015-07-10 2015-07-15 一种光阻汲取装置
US14/768,403 US10293316B2 (en) 2015-07-10 2015-07-15 Photo-resistor draw devices

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Cited By (6)

* Cited by examiner, † Cited by third party
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CN106292184A (zh) * 2016-08-17 2017-01-04 武汉华星光电技术有限公司 一种防止光阻凝聚装置
CN107416934A (zh) * 2017-05-28 2017-12-01 韦爱龄 振动式气浮池
CN107416935A (zh) * 2017-05-28 2017-12-01 韦爱龄 旋转式气浮池
CN107456913A (zh) * 2017-08-31 2017-12-12 深圳市华星光电技术有限公司 光阻存放装置
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