WO2017008261A1 - 一种光阻汲取装置 - Google Patents

一种光阻汲取装置 Download PDF

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Publication number
WO2017008261A1
WO2017008261A1 PCT/CN2015/084021 CN2015084021W WO2017008261A1 WO 2017008261 A1 WO2017008261 A1 WO 2017008261A1 CN 2015084021 W CN2015084021 W CN 2015084021W WO 2017008261 A1 WO2017008261 A1 WO 2017008261A1
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photoresist
tube
bottle
rotating shaft
extraction device
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PCT/CN2015/084021
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English (en)
French (fr)
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宋江江
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深圳市华星光电技术有限公司
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Priority to US14/768,403 priority Critical patent/US10293316B2/en
Publication of WO2017008261A1 publication Critical patent/WO2017008261A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/75—Discharge mechanisms
    • B01F35/754—Discharge mechanisms characterised by the means for discharging the components from the mixer
    • B01F35/75465—Discharge mechanisms characterised by the means for discharging the components from the mixer using suction, vacuum, e.g. with a pipette
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/051—Stirrers characterised by their elements, materials or mechanical properties
    • B01F27/053—Stirrers characterised by their elements, materials or mechanical properties characterised by their materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/051—Stirrers characterised by their elements, materials or mechanical properties
    • B01F27/054—Deformable stirrers, e.g. deformed by a centrifugal force applied during operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/07—Stirrers characterised by their mounting on the shaft
    • B01F27/072—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis
    • B01F27/0724—Stirrers characterised by their mounting on the shaft characterised by the disposition of the stirrers with respect to the rotating axis directly mounted on the rotating axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/11—Stirrers characterised by the configuration of the stirrers
    • B01F27/112—Stirrers characterised by the configuration of the stirrers with arms, paddles, vanes or blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/11—Stirrers characterised by the configuration of the stirrers
    • B01F27/19—Stirrers with two or more mixing elements mounted in sequence on the same axis
    • B01F27/191—Stirrers with two or more mixing elements mounted in sequence on the same axis with similar elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/21—Mixers with rotary stirring devices in fixed receptacles; Kneaders characterised by their rotating shafts
    • B01F27/2122—Hollow shafts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
    • B01F27/90—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with paddles or arms 
    • B01F27/906—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with paddles or arms  with fixed axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
    • B01F27/91—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis with propellers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
    • B01F35/32—Driving arrangements
    • B01F35/32005—Type of drive
    • B01F35/3202—Hand driven
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/75—Discharge mechanisms
    • B01F35/753—Discharging at the upper side of the receptacle, e.g. by pressurising the liquid in the receptacle or by centrifugal force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/75—Discharge mechanisms
    • B01F35/754—Discharge mechanisms characterised by the means for discharging the components from the mixer
    • B01F35/7543—Discharge mechanisms characterised by the means for discharging the components from the mixer using pneumatic pressure, overpressure or gas pressure in a closed receptacle or circuit system
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0012—Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
    • B01F2035/35—Use of other general mechanical engineering elements in mixing devices
    • B01F2035/351—Sealings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/56—Mixing photosensitive chemicals or photographic base materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
    • B01F27/05—Stirrers
    • B01F27/051—Stirrers characterised by their elements, materials or mechanical properties
    • B01F27/054—Deformable stirrers, e.g. deformed by a centrifugal force applied during operation
    • B01F27/0541—Deformable stirrers, e.g. deformed by a centrifugal force applied during operation with mechanical means to alter the position of the stirring elements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings

Definitions

  • the present invention relates to high-definition photoresist supply technology, and more particularly to a photoresist extraction device.
  • Color resist is the color source of color filters, which are mainly divided into R, G and B.
  • the preparation of the color photoresist needs to first apply the pigment dispersion type color photoresist on the glass substrate on which the black matrix has been formed, and after soft baking, exposure alignment, development, photoresist peeling, and hard baking, the process is repeated three times to form R, G, B three-color graphics.
  • the black matrix on the color filter side needs to use high-definition black matrix photoresist, but the high-definition black matrix photoresist is prone to pigment deposition, resulting in photoresist in the photoresist barrel. If the pigment particles become uneven, if the photoresist is directly used by the photoresist pick-up mechanism of the conventional photoresist coater, the color filter product characteristics are unstable, and the defect problem is high, which affects the product yield.
  • the present invention provides a photoresist extraction device with stable product characteristics and high yield.
  • a photoresist extraction device includes a photoresist bottle, a sealing cover disposed at the mouth of the photoresist bottle, and an intake pipe and a photoresist dip tube inserted through the sealing cover into the photoresist bottle, A stirring assembly for agitating the photoresist is also provided in the photoresist bottle.
  • the agitating assembly comprises a rotating shaft and a plurality of blades obliquely connected to the rotating shaft, and the stirring assembly rotates to push the photoresist in the photoresist bottle from the bottle mouth toward the bottom of the bottle.
  • a plurality of connecting portions for connecting the blades are arranged at intervals in the longitudinal direction of the rotating shaft, and the connecting portion can be folded up and down with respect to the rotating shaft by an external force.
  • the connecting portion is a soft rubber.
  • the rotating shaft is the photoresist dip tube.
  • the rotating shaft is a sleeve sleeved outside the photoresist tube, and a sealing member is further disposed between the inner wall of the sleeve and the outer wall of the photoresist tube.
  • the rotating shaft is a separately provided agitating rod.
  • the invention designs a novel photoresist extraction device and has a built-in stirring component, which can effectively improve the condition of high-precision photoresist and easy to settle, improve the stability of the color filter product, reduce product defects, and improve product yield.
  • FIG. 1 is a schematic structural view of a photoresist capture device according to Embodiment 1 of the present invention.
  • FIG. 2 is a schematic structural view of a photoresist extraction device according to Embodiment 2 of the present invention.
  • FIG. 3 is a schematic structural view of a photoresist extraction device according to Embodiment 3 of the present invention.
  • the photoresist extraction device of the present invention comprises a photoresist bottle 10, a sealing cover 11 disposed at the mouth of the photoresist bottle 10, and an intake pipe 12 inserted through the sealing cover 11 in the photoresist bottle 10 and a photoresist capture device.
  • a stirring assembly 20 for agitating the photoresist is also provided in the photoresist bottle 10.
  • the air inlet pipe 12 injects clean and dry air into the photoresist bottle 10 to provide a certain pumping pressure in the bottle, and the photoresist dip tube 13 is inserted into the bottom of the bottle of the photoresist bottle 10. Under the pressure of the bottle, the photoresist is The light extraction tube 13 is taken out of the bottle for subsequent coating operation.
  • the agitating assembly 20 includes a rotating shaft and a plurality of blades 21 obliquely connected to the rotating shaft.
  • the rotating shaft of the embodiment is a photoresist dip tube 13, and the inclination angle of the vane 21 with respect to the resistive dip tube 13 is preferably the same.
  • the blade 21 When the photoresist tube 13 is rotated, the blade 21 generates a top-down force on the photoresist in the bottle, and the light resistance in the photoresist bottle 10 is pushed from the bottle mouth toward the bottom of the bottle to achieve the purpose of photoresist mixing.
  • a plurality of connecting portions 22 for connecting the blades 21 are disposed at intervals in the longitudinal direction of the rotating shaft, and the connecting portion 22 is made of a soft plastic material, and can be folded up and down with respect to the rotating shaft under an external force, from the sealing cover When the stirring assembly 20 is installed at 11 places, it is only necessary to fold the blade 21 upwards to move the stirring assembly 20 It is loaded into the photoresist bottle 10.
  • the built-in stirring assembly By designing a new type of photoresist extraction device, the built-in stirring assembly, the photoresist is fully stirred and mixed, and then the photoresist is taken from the bottom of the bottle by the photoresist tube to ensure that the photoresist tube is fully stirred.
  • the photoresist can effectively improve the condition of high-precision photoresist and easy to settle, improve the stability of color filter products, reduce product defects, and improve product yield.
  • the rotating shaft of the embodiment is a hollow sleeve 23 sleeved outside the photoresist tube 13 and is located on the inner wall of the sleeve 23 and the outer wall of the photoresist tube 13
  • a sealing member 30 is also provided to prevent the light from being ejected from the bottom of the casing 23 to the outside of the bottle under the pressure of the bottle to cause waste and pollution.
  • the rotating shaft of the present embodiment is a separately provided stirring rod 24, and the stirring rod 24 is inserted from the sealing lid 11 of the bottle mouth to leave a part outside the bottle during the drawing process.
  • the user can agitate the agitation bar 24 by manual or automatic means to achieve mixing of the light groups in the bottle.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optical Filters (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)

Abstract

一种光阻汲取装置，包括光阻瓶(10)、设于所述光阻瓶(10)瓶口的密封盖(11)以及穿过所述密封盖(11)插设于所述光阻瓶(10)内的进气管(12)和光阻汲取管(13)，所述光阻瓶(10)内还设有用于搅拌光阻的搅拌组件(20)。所述光阻汲取装置内置搅拌组件，可以有效改善高精细光阻易沉降的状况，提高彩色滤光片产品的稳定性，减少产品缺陷，提高产品的良率。

Description

一种光阻汲取装置 技术领域
本发明涉及高精细光阻供应技术，尤其涉及一种光阻汲取装置。
背景技术
彩色光阻是彩色滤光片的显色来源，主要分为R、G、B3种。彩色光阻的制备需要首先将颜料分散型彩色光阻涂布于已形成黑矩阵的玻璃基板上，经软烤、曝光对准、显影、光阻剥离、硬烤，重复此流程三次形成R、G、B三色图形。对于高分辨率的显示产品，彩色滤光片侧的黑矩阵需使用高精细的黑矩阵光阻，但高精细的黑矩阵光阻静置易发生颜料沉降的状况，导致光阻桶内光阻不均匀，颜料颗粒变大，如果直接利用现有光阻涂布机的光阻汲取机构取用光阻容易导致彩色滤光片产品特性不稳，缺陷问题偏高，影响产品良率。
发明内容
鉴于现有技术存在的不足，本发明提供了一种产品特性稳定、良率高的光阻汲取装置。
为了实现上述的目的，本发明采用了如下的技术方案：
一种光阻汲取装置，包括光阻瓶、设于所述光阻瓶瓶口的密封盖以及穿过所述密封盖插设于所述光阻瓶内的进气管和光阻汲取管，所述光阻瓶内还设有用于搅拌光阻的搅拌组件。
其中，所述搅拌组件包括转动轴和倾斜连接于所述转动轴的若干叶片，所述搅拌组件转动将所述光阻瓶内的光阻自瓶口朝瓶底推动。
其中，所述转动轴的长度方向上间隔设有多个用于连接所述叶片的连接部，所述连接部可在外力作用下相对于所述转动轴上下翻折。
其中，所述连接部为软胶。
其中，所述转动轴为所述光阻汲取管。
或者，所述转动轴为套设于所述光阻汲取管外的套管，所述套管内壁与所述光阻汲取管外壁之间还设有密封件。
或者，所述转动轴为单独设置的搅动棒。
本发明通过设计一种新型的光阻汲取装置，内置搅拌组件，可以有效改善高精细光阻易沉降的状况，提高彩色滤光片产品的稳定性，减少产品缺陷，提高产品的良率。
附图说明
图1为本发明实施例1的光阻汲取装置结构示意图。
图2为本发明实施例2的光阻汲取装置结构示意图。
图3为本发明实施例3的光阻汲取装置结构示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
实施例1
参阅图1，本发明的光阻汲取装置包括光阻瓶10、设于光阻瓶10瓶口的密封盖11以及穿过密封盖11插设于光阻瓶10内的进气管12和光阻汲取管13，光阻瓶10内还设有用于搅拌光阻的搅拌组件20。
进气管12朝光阻瓶10内注入干净干燥的空气为瓶内提供一定的汲取压力，光阻汲取管13插入到光阻瓶10的瓶底，在瓶内压力的作用下，光阻被由光汲取管13引出至瓶外进行后续涂布操作。
搅拌组件20包括转动轴和倾斜连接于转动轴的若干叶片21，本实施例的转动轴为光阻汲取管13，叶片21相对于光阻汲取管13的倾斜角度相同为宜。光阻汲取管13转动时，叶片21对瓶内的光阻产生由上而下的力，将光阻瓶10内的光阻自瓶口朝瓶底推动，以达到光阻混合的目的。
进一步地，转动轴的长度方向上间隔设有多个用于连接叶片21的连接部22，连接部22采用软塑胶材料制成，可在外力作用下相对于转动轴上下翻折，从密封盖11处安装搅拌组件20时，只需要将叶片21朝上翻折即可将搅拌组件20 装入光阻瓶10内。
通过设计一种新型的光阻汲取装置，内置搅拌组件，光阻被被经过充分搅拌混合之后由光阻汲取管自瓶底汲取，保证了光阻汲取管汲取到的都是经过充分搅拌后的光阻，可以有效改善高精细光阻易沉降的状况，提高彩色滤光片产品的稳定性，减少产品缺陷，提高产品的良率。
实施例2
如图2所示，与实施例1不同的是，本实施例的转动轴为套设于光阻汲取管13外的中空的套管23，在套管23内壁与光阻汲取管13外壁之间还设有密封件30，以防止光阻在瓶内压力作用下自套管23底部喷出至瓶外造成浪费和污染。
实施例3
如图3所示，与实施例1不同的是，本实施例的转动轴为单独设置的搅动棒24，搅动棒24自瓶口的密封盖11插入后留有一部分在瓶外，在汲取过程中，使用者可以通过手动或自动等方式搅动搅动棒24实现对瓶内的光组的混合。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (13)

  1. 一种光阻汲取装置，其中，包括光阻瓶、设于所述光阻瓶瓶口的密封盖以及穿过所述密封盖插设于所述光阻瓶内的进气管和光阻汲取管，所述光阻瓶内还设有用于搅拌光阻的搅拌组件。
  2. 根据权利要求1所述的光阻汲取装置，其中，所述搅拌组件包括转动轴和倾斜连接于所述转动轴的若干叶片，所述搅拌组件转动将所述光阻瓶内的光阻自瓶口朝瓶底推动。
  3. 根据权利要求2所述的光阻汲取装置，其中，所述转动轴的长度方向上间隔设有多个用于连接所述叶片的连接部，所述连接部可在外力作用下相对于所述转动轴上下翻折。
  4. 根据权利要求3所述的光阻汲取装置，其中，所述连接部为软胶。
  5. 根据权利要求2所述的光阻汲取装置，其中，所述转动轴为所述光阻汲取管。
  6. 根据权利要求2所述的光阻汲取装置，其中，所述转动轴为套设于所述光阻汲取管外的套管，所述套管内壁与所述光阻汲取管外壁之间还设有密封件。
  7. 根据权利要求2所述的光阻汲取装置，其中，所述转动轴为单独设置的搅动棒。
  8. 根据权利要求3所述的光阻汲取装置，其中，所述转动轴为所述光阻汲取管。
  9. 根据权利要求3所述的光阻汲取装置，其中，所述转动轴为套设于所述光阻汲取管外的套管，所述套管内壁与所述光阻汲取管外壁之间还设有密封件。
  10. 根据权利要求3所述的光阻汲取装置，其中，所述转动轴为单独设置的搅动棒。
  11. 根据权利要求4所述的光阻汲取装置，其中，所述转动轴为所述光阻汲取管。
  12. 根据权利要求4所述的光阻汲取装置，其中，所述转动轴为套设于所述光阻汲取管外的套管，所述套管内壁与所述光阻汲取管外壁之间还设有密封件。
  13. 根据权利要求4所述的光阻汲取装置，其中，所述转动轴为单独设置的搅动棒。
PCT/CN2015/084021 2015-07-10 2015-07-15 一种光阻汲取装置 WO2017008261A1 (zh)

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