CN104868355A - Power-stabilizing laser output device - Google Patents
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- CN104868355A CN104868355A CN201510301038.7A CN201510301038A CN104868355A CN 104868355 A CN104868355 A CN 104868355A CN 201510301038 A CN201510301038 A CN 201510301038A CN 104868355 A CN104868355 A CN 104868355A
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Abstract
The invention relates to the technical field of laser, and especially relates to a power-stabilizing laser output device. The device comprises an electric precise rotary platform, a half wave plate, a polarizing prism, a light trap, a beam splitter, a first power meter, and a processing unit. The half wave plate is disposed on the electric precise rotary platform. The polarizing prism is disposed at the rear side of the half wave plate, and the light strap is fixed below the half wave plate. A laser beam passes through the half wave plate and enters into the polarizing prism. The light with a fixed polarization direction in the laser beam passes through the polarizing prism, and the light which does not pass through the polarizing prism is transmitted to the light strap for loss. The beam splitter is disposed at the rear side of the polarizing prism, and the laser beam from the polarizing prism is transmitted to the beam splitter. The processing unit is connected with the power meter and the electric precise rotary platform. The device provided by the invention reduces the power decay of the laser beam outputted by the polarizing prism till that the power of the light outputted by the polarizing prism increases target power, and guarantees the stability of the power of outputted laser.
Description
Technical field
The present invention relates to laser technology field, particularly a kind of power stability laser output device.
Background technology
Optical detection refers to the interaction utilizing light and sample, and to the method that the various parameter of sample detects, it has the advantages such as contactless, harmless, quick, in every field extensive application.In order to strengthen signal light intensity, improve detection sensitivity, superpower laser is widely used in optical detection apparatus.But along with the increase in continuous working period, the light power of laser will decline gradually, cause signal power to decline, and have impact on the stability of instrument.
For the problem of laser stability deficiency, on the one hand, instrument development person tries one's best the good laser of construction of stable performance, but the Specifeca tion speeification of laser comprises many indexs, the optimization of stability, therefore cannot by the complete head it off of laser performance optimization often along with the decline of other index.On the other hand, instrument development person adds aligning step to long-time service condition, according to laser performance used, when lasting use duration is more than a specified time, need to carry out system testing manually or automatically, and the test result after correcting according to it, but, aligning step is general more loaded down with trivial details and consuming time, have impact on the lasting use of instrument.When correcting interval and being less, possibly cannot detect whole process, but when correction interval is larger, partial detection and actual value deviation can be caused comparatively large, affect stability of instrument.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of guarantee Output of laser power stability, and does not need the power stability laser output device of correction.
For solving the problems of the technologies described above, the invention provides a kind of power stability laser output device, comprising: electric precision rotating platform, half-wave plate, devating prism, light shelves, beam splitter, the first power take into account processing unit.Described half-wave plate is arranged on described electric precision rotating platform; Described electric precision rotating platform drives described half-wave plate to rotate when rotating; When described half-wave plate rotates forward, the given polarization state light composition in described half-wave plate emergent light increases; When described half-wave plate rotates backward, the given polarization state light composition in described half-wave plate emergent light reduces.Described devating prism is arranged on the rear side of described half-wave plate, and described light shelves are fixed on the below of described half-wave plate; Laser beam passes described half-wave plate and is incident to described devating prism, fixes the light of polarization direction by described devating prism, be not depleted to light shelves by the optical transport of described devating prism in described laser beam.Described beam splitter is arranged on the rear side of described devating prism, and the laser beam incident penetrated from described devating prism is to described beam splitter; The laser beam being incident to described beam splitter is divided into two-beam by described beam splitter, and light beam incides on described first power meter, and the laser beam of another Shu Zuowei power stability exports.Described processing unit is connected with described first power meter, and described processing unit obtains the first performance number that described first power meter is measured; Described processing unit is also connected with described electric precision rotating platform, and described processing unit controls described electric precision rotating platform and rotates.
Further, also comprise: electronic shutter, the first electronic rotation speculum and the second power meter; Described electronic shutter is arranged on the front side of described half-wave plate, can block described laser beam when described electronic shutter is opened, and prevents described laser beam incident to described half-wave plate.Described first electronic rotation speculum is arranged between described electronic shutter and described half-wave plate, can by the described laser beam reflection on front side of described half-wave plate on described second power meter after described first electronic rotation speculum rotates forward, described first electronic rotation speculum reverse rotation retrodeviates the light path at the described laser beam place on front side of described half-wave plate.Described processing unit is connected with described second power meter, and described processing unit obtains the second performance number that described second power meter is measured.
Further, also comprise: the second electronic rotation speculum; Described second electronic rotation speculum is arranged on the rear side of described beam splitter, and the stable laser beam reflection that described beam splitter exports by described second electronic rotation speculum is on detection sample.
Further, described beam splitter is 90:10 beam splitter; Incident beam is divided into two bundles by described 90:10 beam splitter, and the energy percentage of two-beam is 90%:10%; Wherein, the light beam of 90% energy exports as the laser beam of power stability, and the light beam of 10% energy incides on described first power meter.
Further, described beam splitter is 99:1 beam splitter; Incident beam is divided into two bundles by described 99%:1 beam splitter, and the energy percentage of two-beam is 99%:1%; Wherein, the light beam of 99% energy exports as the laser beam of power stability, and the light beam of 1% energy incides on described first power meter.
Further, described processing unit comprises: acquisition module, for obtaining the first performance number that described first power meter is measured from described first power meter.Analysis module, for reading described first performance number from described acquisition module; Described first performance number is compared with target first performance number of setting, if described first performance number is less than described target first performance number, sends the first index signal and indicate described electric precision rotating platform to rotate forward; If described first performance number equals described target first performance number, send the second index signal and indicate described electric precision rotating platform to stop the rotation; If described first performance number is greater than described target first performance number, sends the 3rd index signal and indicate the reverse rotation of described electric precision rotating platform.First control module, for obtaining described first index signal, the second index signal or described 3rd index signal from described analysis module; When obtaining described first index signal, sending the first control signal and controlling described electric precision rotating platform and rotate forward; When obtaining described second index signal, sending the second control signal and controlling described electric precision rotating platform and stop the rotation; When obtaining described 3rd index signal, sending the 3rd control signal and controlling the reverse rotation of described electric precision rotating platform.
Further, described processing unit also comprises: the second control module, and the instruction for inputting according to outside sends the 4th control signal and controls the first electronic rotation speculum and rotate forward or reverse rotation.3rd control module, the instruction for inputting according to outside sends the described second electronic rotation speculum of the 5th control signal control and rotates forward or reverse rotation.4th control module, the instruction for inputting according to outside sends the 6th control signal and controls the unlatching of described electronic shutter or close.
Power stability laser output device provided by the invention, when the first performance number that processing unit obtains is lower than target the first performance number set, illustrate that the power of the laser beam of now devating prism output is on the low side, control electric precision rotating platform by processing unit to rotate forward, electric precision rotating platform drives half-wave plate to rotate forward, half-wave plate rotates forward and the given polarization state light composition of half-wave plate emergent light is increased, reduce the power attenuation of the laser beam that devating prism exports, until devating prism exports light increase to target power, ensure that the stability of Output of laser power.
Power stability laser output device provided by the invention, structure is simple, easy to use, when applying, directly adding this device in the rear end of Laser output equipment, not affecting other functional part.Power stability laser output device provided by the invention, when the power of the laser beam that devating prism exports is on the low side, automatically can realize the rotation of half-wave plate, reduce the power attenuation of the laser beam that devating prism exports, until devating prism Output of laser increases to target power; Compare with the aligning step of instrument, this process is very quick, improves operating efficiency.Power stability laser output device provided by the invention, realizes power adjustment, the laser power value that the point-device quantification of energy regulates at every turn by rotating electric precision rotating platform, and has very high repeatability, good to the stablizing effect of Output of laser power.Power stability laser output device provided by the invention, the rotation also by half-wave plate accurately controls shoot laser polarization state, ensures the linear polarization characteristic of laser.
Accompanying drawing explanation
The power stability laser output device structural representation that Fig. 1 provides for the embodiment of the present invention;
The processing unit internal software modules schematic diagram that Fig. 2 provides for the embodiment of the present invention;
The another structural representation of power stability laser output device that Fig. 3 provides for the embodiment of the present invention.
Embodiment
Embodiments provide a kind of power stability laser output device, see Fig. 1 and Fig. 3, comprising: electric precision rotating platform 7, half-wave plate 2, devating prism 3, light shelves 4, beam splitter 5, electronic shutter 8, first power meter 6, second power meter 11, first electronic rotation speculum 9, second electronic rotation speculum 10 and processing unit.
See Fig. 1, half-wave plate 2 is arranged on electric precision rotating platform 7, drives half-wave plate 2 to rotate when electric precision rotating platform 7 rotates simultaneously.When half-wave plate 2 rotates forward, the given polarization state light composition in half-wave plate 2 emergent light increases; When half-wave plate 2 rotates backward, the given polarization state light composition in half-wave plate 2 emergent light reduces.
See Fig. 1, devating prism 3 is arranged on the rear side of half-wave plate 2, and light shelves 4 are fixed on the below of half-wave plate 2.The laser beam that laser 1 sends passes half-wave plate 2 and is incident to devating prism 3, and the light (as p light, s light) fixing polarization direction in laser beam, by devating prism 3, is not depleted to light shelves 4 by the optical transport of devating prism 3.
See Fig. 1, beam splitter 5 is arranged on the rear side of devating prism 3, from devating prism 3 penetrate laser beam incident to beam splitter 5; The laser beam being incident to beam splitter 5 is divided into two-beam by beam splitter 5, and light beam incides on the first power meter 6, and the laser beam of another Shu Zuowei power stability exports.In actual applications, beam splitter 5 can select 90:10 beam splitter 5; Incident beam is divided into two bundles by 90:10 beam splitter, and the energy percentage of two-beam is 90%:10%; Wherein, the light beam of 90% energy exports as the laser beam of power stability, and the light beam of 10% energy incides on the first power meter 6, and the power being measured laser beam by the first power meter 6 obtains the first performance number.Beam splitter 5 also can select 99:1 beam splitter; Incident beam is divided into two bundles by 99:1 beam splitter, and the energy percentage of two-beam is 99%:1%; Wherein, the light beam of 99% energy exports as the laser beam of power stability, and the light beam of 1% energy incides on the first power meter 6, and the power being measured laser beam by the first power meter 6 obtains the first performance number.The present embodiment adopts 90:10 beam splitter.
See Fig. 1 and Fig. 3, electronic shutter 8 is arranged on the front side of half-wave plate 2, can block laser beam when electronic shutter 8 is opened, and prevents laser beam incident to half-wave plate 2.First electronic rotation speculum 9 is arranged between electronic shutter 8 and half-wave plate 2, by the laser beam reflection on front side of half-wave plate 2 on the second power meter 11, can be measured the power of incident light by the second power meter 11 after the first electronic rotation speculum 9 rotates forward.First electronic rotation speculum 9 reverse rotation retrodeviates the light path at the laser beam place on front side of half-wave plate 2, and the laser beam on front side of half-wave plate 2 is directly transmitted to half-wave plate 2.Second electronic rotation speculum 10 is arranged on the rear side of beam splitter 5, the stable laser beam reflection that beam splitter 5 exports by the second electronic rotation speculum 10 is on detection sample, second electric reflector mirror can change the direction of outgoing laser beam as required, to facilitate in practical application irradiating and detecting sample from different perspectives.
In the embodiment of the present invention, if the target power size of Output of laser is a (a is greater than 0), then target first performance number is 0.1a.Wherein, the definite value set during target the first performance number, see Fig. 1, the first performance number is the instantaneous value that the first power meter 6 is measured.
See Fig. 1 and Fig. 3, processing unit is connected with the first power meter 6, processing unit obtains the first performance number that the first power meter 6 is measured, the power of the 10% power laser bundle that the first performance number separates for beam splitter 5, processing unit is also connected with electric precision rotating platform 7, and processing unit controls electric precision rotating platform 7 and rotates.Processing unit is also connected with the second power meter 11, and processing unit obtains the second performance number that the second power meter 11 is measured, and the second performance number is the power (if size is 1.1a) of incoming laser beam, is kept in processing unit.Wherein, see Fig. 2, processing unit comprises: acquisition module, analysis module, the first control module, second control the software modules such as mould, the 3rd control module and the 4th control module.See Fig. 1 and Fig. 2, acquisition module is used for obtaining the first performance number from the first power meter 6.Analysis module is used for reading the first performance number from acquisition module; First performance number is compared with target first performance number (i.e. 0.1a) of setting, if the first performance number is less than target first performance number (i.e. 0.1a), sends the first index signal instruction electric precision rotating platform 7 and rotate forward; If the first performance number equals target first performance number (i.e. 0.1a), send the second index signal instruction electric precision rotating platform 7 and stop the rotation; If the first performance number is greater than target first performance number (i.e. 0.1a), send the 3rd index signal instruction electric precision rotating platform 7 reverse rotation.First control module is used for obtaining the first index signal, the second index signal or the 3rd index signal from analysis module; When acquisition the first index signal, send the first control signal control electric precision rotating platform 7 and rotate forward; When acquisition the second index signal, send the second control signal control electric precision rotating platform 7 and stop the rotation; When acquisition the 3rd index signal, send the 3rd control signal and control the reverse rotation of electric precision rotating platform 7.Second control module is used for sending the 4th control signal according to the instruction of outside input and controls the first electronic rotation speculum 9 and rotate forward or reverse rotation, can measure the incident power of laser at any time.3rd control module is used for sending the 5th control signal according to the instruction of outside input and controls the second electronic rotation speculum 10 and rotate forward or reverse rotation, can change the direction of Output of laser as required.4th control module is used for sending the 6th control signal control electronic shutter 8 according to the instruction of outside input and opens or close, person easy to use can not need the incident laser eliminating this device under closedown laser condition, avoid the multiple switching of laser or non-working condition to continue exposure.
In the kind power stability laser output device that the embodiment of the present invention provides, see Fig. 1, the minimum adjustment amount of laser power then depends on electric precision rotating platform 7 minimum rotation angle △ φ and incident laser polarization direction, devating prism 3 Output of laser polarization direction and the triangular angular relationship of half-wave plate 2 optical axis.Using the incident laser angle of polarization as 0 angle position, if half-wave plate 2 optical axis direction is φ
1, devating prism 3 Output of laser polarization direction is φ
2, module Output optical power is I
output=I
inputcos
2(φ
2-2 φ
1).The minimum adjustment amount of laser power that in the present embodiment, the increase/reduction of power stability laser output device power is corresponding is
therefore, the minimum adjustment amount of power output and φ
1-2 φ
2relevant with △ φ, in actual applications, balance point should be found according to demand to carry out φ
1-2 φ
2the setting of value.
The power stability laser output device that the embodiment of the present invention provides, when the first performance number that processing unit obtains is lower than target the first performance number set, illustrate that the power of the laser beam of now devating prism output is on the low side, control electric precision rotating platform by processing unit to rotate forward, electric precision rotating platform drives half-wave plate to rotate forward, half-wave plate rotates forward and the given polarization state light composition of half-wave plate emergent light is increased, reduce the power attenuation of the laser beam that devating prism exports, until devating prism exports light increase to target power, ensure that the stability of Output of laser power.
The power stability laser output device that the embodiment of the present invention provides, structure is simple, easy to use, when applying, directly adding this device in the rear end of Laser output equipment, not affecting other functional part.The power stability laser output device that the embodiment of the present invention provides, when the power of the laser beam that devating prism exports is on the low side, automatically can realize the rotation of half-wave plate, reduce the power attenuation of the laser beam that devating prism exports, until devating prism Output of laser increases to target power; Compare with the aligning step of instrument, this process is very quick, improves operating efficiency.The power stability laser output device that the embodiment of the present invention provides, power adjustment is realized by rotating electric precision rotating platform, the laser power value that the point-device quantification of energy regulates at every turn, and there is very high repeatability, good to the stablizing effect of Output of laser power.The power stability laser output device that the embodiment of the present invention provides, the rotation also by half-wave plate accurately controls shoot laser polarization state, ensures the linear polarization characteristic of laser.
It should be noted last that, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted, although with reference to example to invention has been detailed description, those of ordinary skill in the art is to be understood that, can modify to technical scheme of the present invention or equivalent replacement, and not departing from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (7)
1. a power stability laser output device, is characterized in that, comprising: electric precision rotating platform, half-wave plate, devating prism, light shelves, beam splitter, the first power take into account processing unit;
Described half-wave plate is arranged on described electric precision rotating platform; Described electric precision rotating platform drives described half-wave plate to rotate when rotating; When described half-wave plate rotates forward, the given polarization state light composition in described half-wave plate emergent light increases; When described half-wave plate rotates backward, the given polarization state light composition in described half-wave plate emergent light reduces;
Described devating prism is arranged on the rear side of described half-wave plate, and described light shelves are fixed on the below of described half-wave plate; Laser beam passes described half-wave plate and is incident to described devating prism, fixes the light of polarization direction by described devating prism, be not depleted to described light shelves by the optical transport of described devating prism in laser beam;
Described beam splitter is arranged on the rear side of described devating prism, and the laser beam incident penetrated from described devating prism is to described beam splitter; The laser beam being incident to described beam splitter is divided into two-beam by described beam splitter, and light beam incides on described first power meter, and another light beam exports as the laser beam of power stability;
Described processing unit is connected with described first power meter, and described processing unit obtains the first performance number that described first power meter is measured; Described processing unit is also connected with described electric precision rotating platform, and described processing unit controls described electric precision rotating platform and rotates.
2. power stability laser output device according to claim 1, is characterized in that, also comprise: electronic shutter, the first electronic rotation speculum and the second power meter;
Described electronic shutter is arranged on the front side of described half-wave plate; Described electronic shutter blocks described laser beam when opening, and prevents laser beam incident to described half-wave plate;
Described first electronic rotation speculum is arranged between described electronic shutter and described half-wave plate; After described first electronic rotation speculum rotates forward by the laser beam reflection on front side of described half-wave plate on described second power meter; Described first electronic rotation speculum reverse rotation retrodeviates the light path at the laser beam place on front side of described half-wave plate, and the laser beam incident on front side of described half-wave plate is to described half-wave plate;
Described processing unit is connected with described second power meter, and described processing unit obtains the second performance number that described second power meter is measured.
3. power stability laser output device according to claim 2, is characterized in that, also comprise: the second electronic rotation speculum;
Described second electronic rotation speculum is arranged on the rear side of described beam splitter, and the stable laser beam reflection that described beam splitter exports by described second electronic rotation speculum is on detection sample.
4. the power stability laser output device according to any one of claim 1-3, is characterized in that, described beam splitter is 90:10 beam splitter; Incident beam is divided into two bundles by described 90:10 beam splitter, and the energy percentage of two-beam is 90%:10%; Wherein, the light beam of 90% energy exports as the laser beam of power stability, and the light beam of 10% energy incides on described first power meter.
5. the power stability laser output device according to any one of claim 1-3, is characterized in that, described beam splitter is 99:1 beam splitter; Incident beam is divided into two bundles by described 99:1 beam splitter, and the energy percentage of two-beam is 99%:1%; Wherein, the light beam of 99% energy exports as the laser beam of power stability, and the light beam of 1% energy incides on described first power meter.
6. power stability laser output device according to claim 1, is characterized in that, described processing unit comprises:
Acquisition module, for obtaining the first performance number that described first power meter is measured from described first power meter;
Analysis module, for reading described first performance number from described acquisition module; Described first performance number is compared with target first performance number of setting, if described first performance number is lower than described target first performance number, sends the first index signal and indicate described electric precision rotating platform to rotate forward; If described first performance number equals described target first performance number, send the second index signal and indicate described electric precision rotating platform to stop the rotation; If described first performance number is greater than described target first performance number, sends the 3rd index signal and indicate the reverse rotation of described electric precision rotating platform;
First control module, for obtaining described first index signal, the second index signal or described 3rd index signal from described analysis module; When obtaining described first index signal, sending the first control signal and controlling described electric precision rotating platform and rotate forward; When obtaining described second index signal, sending the second control signal and controlling described electric precision rotating platform and stop the rotation; When obtaining described 3rd index signal, sending the 3rd control signal and controlling the reverse rotation of described electric precision rotating platform.
7. power stability laser output device according to claim 6, is characterized in that, described processing unit also comprises:
Second control module, the instruction for inputting according to outside sends the 4th control signal and controls the first electronic rotation speculum and rotate forward or reverse rotation;
3rd control module, the instruction for inputting according to outside sends the described second electronic rotation speculum of the 5th control signal control and rotates forward or reverse rotation;
4th control module, the instruction for inputting according to outside sends the 6th control signal and controls the unlatching of described electronic shutter or close.
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| CN201510301038.7A CN104868355A (en) | 2015-06-04 | 2015-06-04 | Power-stabilizing laser output device |
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| CN110426346A (en) * | 2019-08-02 | 2019-11-08 | 南京信息工程大学 | A kind of device for applying in libs adjust laser beam energy |
| CN113383469A (en) * | 2019-03-13 | 2021-09-10 | 极光先进雷射株式会社 | Laser device and method for manufacturing electronic device |
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