CN110426346A - A kind of device for applying in libs adjust laser beam energy - Google Patents
A kind of device for applying in libs adjust laser beam energy Download PDFInfo
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- 230000010287 polarization Effects 0.000 claims abstract description 76
- 230000003321 amplification Effects 0.000 claims abstract description 10
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 10
- 238000005388 cross polarization Methods 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000005516 engineering process Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 abstract description 5
- 230000002194 synthesizing effect Effects 0.000 abstract description 4
- 239000000523 sample Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 2
- 241001347978 Major minor Species 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000006101 laboratory sample Substances 0.000 description 2
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
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- 230000015556 catabolic process Effects 0.000 description 1
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- 239000000470 constituent Substances 0.000 description 1
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- 230000002708 enhancing effect Effects 0.000 description 1
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- 239000003292 glue Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The present invention discloses a kind of device for applying in libs adjust laser beam energy, and input polarization device is located at laser and generates on the emitting light path of laser, for the polarization direction of the fixed shoot laser from laser, exports the light beam of vertical direction；The half-wave damper is used to rotating the light beam of vertical direction into the angle between twice damper fast axle and plane of polarization；The annular angle meter loads on half-wave damper, for measuring the rotation angle of half-wave plate in half-wave damper；The polarization beam apparatus is used to the light beam that half-wave damper exports being divided into the different polarized electromagnetic beam of two beams, a branch of vertical polarization, a branch of cross-polarization；The spectroscope is located on the output light path of the vertical polarization light beam of two polarization beam apparatus, and amplification microscope group is sent into after two light beams are superimposed, is exported after extracting the Gaussian portion of light beam.Such device can significantly weaken the influence of beam quality decline after Laser synthesizing, accomplish accurately to control laser energy.
Description
Technical field
It is the invention belongs to the field libs, in particular to a kind of for precisely deploying the device of laser beam energy.
Background technique
Laser induced breakdown spectroscopy focuses sample surfaces by ultra-short pulse laser and forms plasma, utilizes spectrum
Instrument plasma emission spectrum is analyzed, and identifies the element constituent in sample with this, and then can carry out material
Identification, classification, qualitative and quantitative analysis.
Since LIBS technology comes out, the method that the quick measurement sample element as a kind of flexible and convenient forms should
Technology is just acknowledged as a kind of new technology having a extensive future, and numerous innovation and applications will be brought for analysis field, can both used
In laboratory, the on-line checking of industry spot also can be applied to.It is mainly characterized in that: quickly directly analysis, hardly needs
Sample preparation；It can detecte nearly all element；Multiple element can be analyzed simultaneously；Matrix form of diverse, can detecte almost
All solid samples.
But since libs develops, problems are still faced.Undoubtedly, libs device now swashs with high-strength
The effect of light has better analysis ability to solid matters such as material, alloy, address, jewelry, dust, still, existing
The energy intensity of laser emitting laser is too high to effectively carry out detection discrimination to subtle substance in libs device, as gas is molten
Glue etc.；Or the too low demand for being unable to satisfy laboratory sample of shoot laser energy.If realizing core --- the laser to Libs
Energy allotment, so that it may substance of all categories is flexibly effectively detected, thus this case generates.
Summary of the invention
The purpose of the present invention is to provide a kind of device for applying in libs adjust laser beam energy, can be substantially
Degree weakens the influence of beam quality decline after Laser synthesizing, accomplishes accurately to control laser energy.
In order to achieve the above objectives, solution of the invention is:
A kind of device for applying in libs adjust laser beam energy, laser, input including the setting of two-way sequence
Polarizer, polarization beam apparatus and a half-wave damper, an annular angle meter, a spectroscope and an amplification
Microscope group；The input polarization device is located at laser and generates on the emitting light path of laser, for the fixed shoot laser from laser
Polarization direction, export the light beam of vertical direction；The half-wave damper is used for the Vertical Square for exporting input polarization device
To light beam rotate the angle between twice damper fast axle and plane of polarization；The annular angle meter loads on half
On wave damper, for measuring the rotation angle of half-wave plate in half-wave damper；The polarization beam apparatus is used for half-wave vibration damping
The light beam of device output is divided into the different polarized electromagnetic beam of two beams, a branch of vertical polarization, a branch of cross-polarization；The spectroscope is located at two
It is sent into amplification microscope group on the output light path of the vertical polarization light beam of a polarization beam apparatus, after two light beams are superimposed, retains light beam
Gaussian portion after export.
Above-mentioned laser uses high power laser Nd:YAG, and output pulse energy is 650m.j/ pulse.
Above-mentioned annular angle meter is made of the runner of two couplings, respectively base wheel and degrees wheel, in half-wave damper
Half-wave plate be built in degrees wheel；It is carved with graduation mark in base wheel, adjusts the graduation mark of base wheel and the optical axis coincidence of input polarization device,
Degrees wheel is synchronous with half-wave plate rotation.
Above-mentioned polarization beam apparatus uses birefringent material, is made of two pieces of triangular prism bondings, realizes the polarization beam splitting of light.
The angle of half-wave plate determines the amount of light in the optical axis and half-wave damper of above-mentioned input polarization device, when half-wave plate optical axis
It is placed at 45 ° of input polarization device, reaches maximum transmitted；When the optical axis of the optical axis of half-wave plate alignment input polarization device, obtain most
Small transmission quantity.
Above-mentioned amplification microscope group includes 3X telescope and adjustable iris, wherein 3X telescope includes one based on " increaseization is existing
It is real " technology coating plano-concave lens and a naked convex lens, the light beam of spectroscope superposition successively passes through coating plano-concave lens and naked convex
After lens, it is then passed through adjustable iris.
After adopting the above scheme, the influence of Laser synthesizing bring beam quality decline, solution can be greatly decreased in the present invention
The problems such as certainly laser energy is not suitable for laboratory sample, energy hole is not accurate, flexibly controls laser energy, may be implemented to each
The experiment of field sample material.
Detailed description of the invention
Fig. 1 is the working principle of the invention figure；
Fig. 2 be in the present invention laser by being emitted to the structural schematic diagram of attenuation module；
Fig. 3 is the structural schematic diagram of annular angular measure device in the present invention；
Fig. 4 is the structural schematic diagram of Gauss module in the present invention.
Specific embodiment
To make the purpose of the present invention, technical solution and effect clearer, clear and definite, below to the present invention further specifically
It is bright.It should be appreciated that specific example described herein is only used to explain the present invention, it is not intended to limit the present invention.
In Libs device, for single laser, due to laser therein physical factor and the limit of structural factor
Such as there is phenomena such as fuel factor, gain saturatiuon, dielectric damages in system, be very difficult to improve single laser output power
, so the present invention improves output power by the way of the synthesis of two high power laser lights.It is, in principle, that Laser synthesizing mainly has
Incoherent beam combining and two kinds of optics coherence tomography.Incoherent beam combining is exactly by a series of beam shapings and transformation, by multi-station laser
The laser in combination of transmitting exports together, and this synthetic technology is a kind of simple superposition on energy, this synthetic technology energy
Total laser output power is improved, but beam quality can decline, causes great unstability.
The present invention will be adjusted some optical modules, improve the universal libs device in market, realize to laser light energy
Accurate adjustment, improve beam quality.
As shown in Figure 1, the present invention provides a kind of device for applying in libs adjust laser beam energy, generally wrap
Containing laser emitting module, four part of polarization module, attenuation module and Gauss module, with conventional laser single passage reflecting mirror
Path fashion it is different, laser of the invention will pass through energy adjustment after being emitted in laser, the laser that laser generates into
The multiple optics of row is adjusted, and light beam Gaussian portion is taken after superposition, makes that pulsed laser energy is cut down or enhancing is to being suitable for being used for sample
On degree, and reinforce the concentration degree and quality of light beam.
Structure of the invention specifically includes major-minor laser, input polarization device, half-wave damper, annular angle meter, partially
Vibration beam splitter, spectroscope and amplification microscope group, are introduced separately below.
The major-minor laser all uses high power laser Nd:YAG, and output pulse energy is 650m.j/ pulse.
Such as energy needed for the libs laser for detection bacterium is 10m/pulse magnitude, which must be decreased to low
In the available energy of laser.
The input polarization device is located at laser and generates on the emitting light path of laser, fixed from laser using polarizing film
The polarization direction of shoot laser, i.e. absorption cross-polarization, only retain the polarization of vertical direction.
The half-wave damper is made of half-wave plate, can produce x/2 phase shift, and half-wave damper can be by linearly polarized light
Polarization rotates to twice of damper fast axle and plane of polarization angle, i.e., is placed in the fast axle of half-wave damper and 45 degree of plane of polarization
Position can be such that polarization direction is rotated by 90 °.Vertical polarization output beam passes through half-wave damper, and light beam has rotated twice
Angle between damper fast axle and plane of polarization.So the polarization process after flexible modulation, by calculating available laser energy
Measure data.
As shown in figure 3, annular angle meter loads on half-wave damper, for measuring the rotation angle of half-wave plate,
Amplification rotation loop diameter can make rotary metering more accurate, and convenient for calculating the reduction of laser energy, realization is precisely controlled laser
Energy.Annular angle meter is made of the runner of two couplings, referred to herein as base wheel and degrees wheel.Half-wave plate is built in therein
Degrees wheel.It is carved with 0,45,180,45 four grooves in the base wheel of circulator, needs to adjust graduation mark and the input of base wheel 0-180
The optical axis coincidence of polarizer.Degrees wheel is synchronous with half-wave plate rotation, 0 groove of degrees wheel and half-wave plate optical axis coincidence.
First 0 groove of dial is aligned with 0 groove of base wheel before metering, at this point, i.e. half-wave plate optical axis and polarizer light
Overlapping of axles, beam Propagation energy are minimum.Angle rotation is carried out afterwards, and degrees wheel number of division is practical twice rotated of half-wave plate, i.e.,
Directly reading is the angle that light beam polarization rotates, and in actually rotation angle 0-45 degree, dial undergoes 0-90 degree reading, minimum
0.5 degree of unit.Degrees wheel can be rotated and be rotated clockwise counterclockwise, as a result constant.Until rotation is to 0 graduation mark of base wheel and carves
Degree 90 graduation marks of wheel are overlapped, and beam Propagation energy is maximum at this time.
The polarization beam apparatus uses birefringent material, and it is different that the light beam for exporting half-wave damper is divided into two beams
Polarized electromagnetic beam, a branch of vertical polarization, a branch of cross-polarization.
Such as Fig. 2, pulse energy can be fallen below the available energy of laser, reached to example by weak optical module
Bacterium in son carries out the energy level of libs detection.Angle between the optical axis and half-wave plate of input polarization device determines light
Amount.Half-wave plate optical axis is placed at 45 ° of polarizer, maximum transmitted is reached；By the light of the optical axis alignment input polarization device of half-wave plate
Axis, available the smallest transmission quantity.Minimum value depends on input polarization device used in device at a distance from zero transmission at this time
With the quality of half-wave plate.
The vertical polarization output beam of input polarization device output passes through half-wave damper, and light beam has rotated twice subtract
Angle between device fast axle of shaking and plane of polarization.Therefore, the half-wave damper of small rotation allows flexibly control pulse energy.Later,
Light beam enters a polarization beam apparatus, and polarization beam apparatus uses birefringent material, is made of two pieces of triangular prism bondings, realizes light
Polarization beam splitting, at this time only by vertical polarization light beam for testing, and horizontal polarization light beam recycles.
As shown in figure 4, spectroscope is set on the output light path of the vertical polarization light beam of polarization beam apparatus, it can be by two partially
The laser beam superposition that the beam splitter that shakes exports, can either retain the energy of two light beams, and can only change vertical incidence simultaneously
In the direction of propagation of the light beam of mirror surface, superimposed light beam enters amplification microscope group, to cut down coincident laser bring beam quality
Decline problem.
The amplification microscope group is made of 3X telescope and adjustable iris, comprising one based on " increaseization reality " technology coating
Plano-concave lens (f=8cm, d=2) and a naked convex lens (f=22cm, d=5), the light beam of spectroscope superposition is successively by applying
Layer plano-concave lens and naked convex lens, so that laser amplifier is expanded the initial diameter of synthetic laser, light beam is passed through adjustable after extension
Iris, diameter needed for making light beam fade to experiment, and only remain the middle section of light beam, i.e., Gaussian portion is to get steady to light beam
The high part of qualitative good convergence property, that realizes laser beam breakdown sample stablizes output.Wherein, iris diameter is adjustable, uses
Family need to control diameter voluntarily to calculate the energy situation of the process laser.
The regulation of energy to laser beam may be implemented in the present invention.Two lasers being arranged respectively project the light of incoherent light
Beam reaches control energy in order to control its polarization direction since laser beam has two polarization directions vertically and laterally
The purpose of amount, light beam need to eliminate cross-polarization via input polarization device and retain vertical polarization, beam energy cuts down one at this time
Half.At this point, user needs to adjust the annular angle meter loaded on half-wave damper, 0 groove is aligned, i.e. half-wave vibration damping
Half-wave plate optical axis and polarizer optical axis coincidence in device, beam Propagation energy are minimum.Angle rotation, degrees wheel number of division are carried out afterwards
For practical twice rotated of half-wave plate, directly reading is the actual angle that light beam polarization rotates.In the practical rotation angle of degrees wheel
It spends in 0-45 degree, dial undergoes 0-90 degree reading.Until rotation is overlapped to 0 graduation mark of base wheel with 90 graduation mark of degrees wheel, this
When beam Propagation energy it is maximum.
User needs to record angle-data, to calculate laser energy.Later, by the light beam of half-wave damper by polarizing
It is the two light beams that vertical polarization one is cross-polarization that beam splitter, which is divided into one, and device takes vertical polarization, because of the light of vertical polarization
Beam energy is more convenient to be calculated.And since the input polarization device at initial stage retains vertical polarization, the beam energy of vertical polarization is big, adjustable
It is big to control range.At this point, the energy after being cut down according to the dial angle calculation beam of laser of record.The process is respectively acting on
After on two beam laser, two beams are regulated and controled and have had the laser of energy datum to be superimposed by spectroscope.Since two-beam is incoherent
Synthesis, beam quality can be greatly reduced after superposition, and the convergence property high light beam of high stability, the synthesis light beam will pass through in order to obtain
Amplification microscope group obtains the Gaussian portion of light beam, and the iris of the process is adjustable, can calculate laser herein according to iris size
Energy after process reduction, that is, the laser energy being ultimately applied on sample.
Via the laser after whole device allotment, energy meets requirement of experiment, and stability is high, and convergence property is strong.
The above examples only illustrate the technical idea of the present invention, and this does not limit the scope of protection of the present invention, all
According to the technical idea provided by the invention, any changes made on the basis of the technical scheme each falls within the scope of the present invention
Within.
Claims (6)
1. a kind of device for applying in libs adjust laser beam energy, it is characterised in that: including swashing for two-way sequence setting
Light device, input polarization device, polarization beam apparatus and a half-wave damper, an annular angle meter, a spectroscope and
One amplification microscope group；
The input polarization device is located at laser and generates on the emitting light path of laser, for the fixed shoot laser from laser
Polarization direction exports the light beam of vertical direction；
It is fast that the light beam for the vertical direction that the half-wave damper is used to export input polarization device rotates twice damper
Angle between axis and plane of polarization；
The annular angle meter loads on half-wave damper, for measuring the rotation angle of half-wave plate in half-wave damper
Degree；
The polarization beam apparatus is used to the light beam that half-wave damper exports being divided into the different polarized electromagnetic beam of two beams, a branch of vertical pole
Change, a branch of cross-polarization；
The spectroscope is located on the output light path of the vertical polarization light beam of two polarization beam apparatus, send after two light beams are superimposed
Enter to amplify microscope group, be exported after retaining the Gaussian portion of light beam.
2. a kind of device for applying in libs adjust laser beam energy as described in claim 1, it is characterised in that: described
Two-way laser is all made of high power laser Nd:YAG, and output pulse energy is 650m.j/ pulse.
3. a kind of device for applying in libs adjust laser beam energy as described in claim 1, it is characterised in that: described
Annular angle meter is made of the runner of two couplings, and respectively base wheel and degrees wheel, the half-wave plate of half-wave damper are built in
Degrees wheel；It is carved with graduation mark in base wheel, adjusts the graduation mark of base wheel and the optical axis coincidence of input polarization device, degrees wheel and half-wave plate
Rotation synchronizes.
4. a kind of device for applying in libs adjust laser beam energy as described in claim 1, it is characterised in that: described
Polarization beam apparatus uses birefringent material, is made of two pieces of triangular prism bondings, realizes the polarization beam splitting of light.
5. a kind of device for applying in libs adjust laser beam energy as described in claim 1, it is characterised in that: described
The angle of half-wave plate determines the amount of light in the optical axis and half-wave damper of input polarization device, when half-wave plate optical axis is placed in input polarization
At 45 ° of device, reach maximum transmitted；When the optical axis of the optical axis of half-wave plate alignment input polarization device, the smallest transmission quantity is obtained.
6. a kind of device for applying in libs adjust laser beam energy as described in claim 1, it is characterised in that: described
Amplifying microscope group includes 3X telescope and adjustable iris, wherein 3X telescope includes one based on " increaseization reality " technology coating
Plano-concave lens and a naked convex lens, the light beam of spectroscope superposition is successively after coating plano-concave lens and naked convex lens, then wears
Cross adjustable iris.
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| CN201910712516.1A CN110426346A (en) | 2019-08-02 | 2019-08-02 | A kind of device for applying in libs adjust laser beam energy |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910712516.1A CN110426346A (en) | 2019-08-02 | 2019-08-02 | A kind of device for applying in libs adjust laser beam energy |
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