CN102539117A - Measurement device and measurement method for Polaroid extinction ratio and Brewster angles - Google Patents
Measurement device and measurement method for Polaroid extinction ratio and Brewster angles Download PDFInfo
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- CN102539117A CN102539117A CN2011102205623A CN201110220562A CN102539117A CN 102539117 A CN102539117 A CN 102539117A CN 2011102205623 A CN2011102205623 A CN 2011102205623A CN 201110220562 A CN201110220562 A CN 201110220562A CN 102539117 A CN102539117 A CN 102539117A
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Abstract
A measurement device for the Polaroid extinction ratio and Brewster angles comprises a lambda/4 wave plate, a rotary glan prism system, a rotary Polaroid stage system and a power meter, wherein the optical axis of the lambda/4 wave plate forms an 45-degree angle with the transmission direction of Polaroid light, the rotary Polaroid stage system can rotate at a preset rotation angle range and change the polarization direction of the Polaroid light through the lambda/4 wave plate, the rotary lambda/4 wave plate bears a Polaroid to be measured and change the inclination angle of the Polaroid to be measured relative to the Polaroid light, and the power meter is used for measuring light intensity of the Polaroid light passing through the Polaroid. The measurement device for the Polaroid extinction ratio and Brewster angles can simply and accurately measure the extinction ratio and Brewster angles. The invention also provides a measurement method applied to the measurement device for the Polaroid extinction ratio and Brewster angles.
Description
Technical field
The present invention relates to the polaroid measurement mechanism, particularly a kind of polaroid extinction ratio and Brewster angle measuring device and measuring method.
Background technology
The film polaroid has significant impact to the design and the performance of laser system.For obtaining high as far as possible efficient and optical quality, require polaroid that high as far as possible p light transmission rate and alap s light transmission rate are arranged.Use the high-quality polarization sheet can make laser instrument produce higher threshold value, thereby produce high-quality laser, so polaroid has great influence to the properties of product of laser instrument.The important parameter that wherein characterizes a polaroid quality quality is exactly an extinction ratio.
The operating angle of polaroid is a Brewster angle; Usually it is a fixing angle, but in the production run of reality, because the technology controlling and process problem; Different polaroids possibly have the different working angle, only on its operating angle separately, just can make its performance reach optimum.
So, can strictness control the quality of polaroid, thereby improve the product quality of laser instrument to the measurement of polaroid extinction ratio.The measurement of Brewster angle can have been produced directive significance for the quantification of laser instrument simultaneously.
Yet; Do not have in the prior art a kind of system, measure the extinction ratio of polaroid and the device of Brewster angle fast; In the production of laser instrument,, need manual extinction ratio and the Brewster angle of measuring polaroid one by one usually in order to improve the quality of laser instrument; Not only measuring speed is slow but also measuring accuracy is low, has wasted lot of manpower and material resources.
Summary of the invention
The technical matters that the present invention solves provides a kind of polaroid extinction ratio and Brewster angle measuring device and measuring method.
A kind of polaroid extinction ratio and Brewster angle measuring device are provided; Comprise λ/4 wave plates of setting gradually along the polarized light direction of propagation, rotatable Glan prism system, rotating polaroid stage system and power meter; Said λ/the optical axis of 4 wave plates and the direction of propagation of polarized light are miter angle; The rotation and change polarization direction in predetermined rotation angle range of said rotatable Glan prism system through the polarized light of said λ/4 wave plates; Rotating polaroid stage system is carried polaroid to be measured and is changed the angle of inclination of the relative polarized light of polaroid to be measured, and said power meter is used to measure the light intensity through the polarized light of said polaroid.
The preferred embodiment one of according to the present invention, said rotatable Glan prism system comprises universal stage and is arranged on the Glan prism on the said universal stage that said universal stage drives said Glan prism rotation, and changes the polarization direction through the polarized light of Glan prism.
The preferred embodiment one of according to the present invention; Said universal stage is automatically controlled universal stage; Its rotation angle range is for satisfying the rotation angle range that a largest light intensity value and a minimum intensity of light value can occur; The reaction time interval greater than power meter of its rotation, and the angle of its rotation is dynamic change.
The preferred embodiment one of according to the present invention; Said rotating polaroid stage system comprises the angular displacement platform and is arranged on the polaroid objective table on the said angular displacement platform; Said polaroid objective table is used to carry said polaroid to be measured, and under the rotation of said angular displacement platform, changes the angle of inclination of the said relatively polarized light of said polaroid to be measured.
The preferred embodiment one of according to the present invention further comprises beam-expanding system, and said beam-expanding system is arranged between said rotatable Glan prism system and the rotating polaroid stage system, and is used to enlarge the logical light area of said polarized light.
The preferred embodiment one of according to the present invention; Further comprise controlling computer; Said controlling computer is controlled the rotation of said rotatable Glan prism system, controls the rotation of said rotating polaroid stage system, and controls the measurement of said power meter to the polarized light light intensity.
The preferred embodiment one of according to the present invention; Rotate rotatable Glan prism system and said rotating polaroid stage system; The light intensity of the polarized light when power meter is measured rotating polaroid stage system and do not carried polaroid to be measured; As first correlation data; And the light intensity of polarized light when measuring rotating polaroid stage system and carrying polaroid to be measured, detecting data as first, said controlling computer detects the Brewster angle of the said polaroid to be measured of data computation according to said first correlation data and said first.
The preferred embodiment one of according to the present invention; Set the angle of said polaroid to be measured at its Brewster angle; Rotate rotatable Glan prism system; The light intensity of the polarized light when power meter is measured rotating polaroid stage system and do not carried polaroid to be measured, as second correlation data, and the light intensity of polarized light when measuring rotating polaroid stage system and carrying polaroid to be measured; As the second detection data, said controlling computer detects the extinction ratio of the said polaroid to be measured of data computation according to said second correlation data and said second.
A kind of polaroid extinction ratio and Brewster angle measuring method also are provided, comprise:
Step S1 provides to measure and uses polarized light, the background intensity when the measurement polarized light does not pass through polaroid;
Step S2 measures the intensity of polarized light to be measured through polaroid, thereby measures the Brewster angle of polaroid;
Step S3, the setting polaroid is a Brewster angle, thereby measures the extinction ratio of polaroid to be measured.
The preferred embodiment one of according to the present invention further comprises among the step S1: the light intensity of the polarized light that changes the polarization direction of polarized light and measure corresponding different polarization direction during without polaroid to be measured be light intensity as a setting.
The preferred embodiment one of according to the present invention further comprises among the step S2: progressively change the angle that is provided with of polaroid to be measured, and the light intensity of polarized light when measuring polarized light through polaroid to be measured; Form and detect data; Go out P light orientation angles and S light orientation angles according to detecting data and background light intensity data computation, and form new image data, then polaroid to be measured is arranged on the position angle of P light; And the light intensity of gathering corresponding polarized light in real time; Set polaroid to be measured pitch tilt in certain angle, and the residing angle of polaroid when gathering largest light intensity wherein, thereby draw the Brewster angle of polaroid to be measured.
The preferred embodiment one of according to the present invention further comprises among the step S3: set the angle of said polaroid to be measured at its Brewster angle, change the polarization direction of polarized light; Measure the light intensity of the polarized light when not passing through polaroid to be measured; As second correlation data, change the polarization direction of polarized light, the light intensity of the polarized light when measuring through polaroid to be measured; As the second detection data, detect the extinction ratio of the said polaroid to be measured of data computation according to said second correlation data and said second.
Compared to prior art; Said polaroid extinction ratio and Brewster angle measuring device and measuring method can be measured the extinction ratio and the Brewster angle of polaroid simply, accurately; Thereby can improve the quality of the high laser instrument of using polaroid, and important reference data is provided the quantification production of laser instrument.
Description of drawings
Fig. 1 is the structural representation of a specific embodiment of polaroid extinction ratio provided by the invention and Brewster angle measuring device.
The process flow diagram of Fig. 2 polaroid extinction ratio provided by the invention and Brewster angle measuring method.
Embodiment
See also Fig. 1, Fig. 1 is the structural representation of a specific embodiment of polaroid extinction ratio of the present invention and Brewster angle measuring device.Polaroid extinction ratio and Brewster angle measuring device comprise the λ that sets gradually by the polarized light direction of propagation from left to right shown in Figure 1/4 wave plate 1, universal stage 2, be arranged on Glan prism 3, beam-expanding system 4, angular displacement platform 6 on the universal stage 2, be arranged on the polaroid objective table 5 on the angular displacement platform 6, the beam system 7 that contracts, power meter 8 and controlling computer 9.The direction of propagation that direction that is polarized light are set of said elements.
Wherein, polarized light is through λ/4 wave plates, 1 input polarization sheet extinction ratio and Brewster angle measuring device, and the λ/optical axis of 4 wave plates 1 and the direction of propagation of polarized light are miter angle, thereby after making polarized light pass through λ/4 wave plates 1, become elliptically polarized light or circularly polarized light.In the present embodiment, elliptically polarized light or circularly polarized light do not have influence to measurement result.
In the present embodiment, polarized light is the continuous polarized light that continuous wave laser (figure do not show) emission produces, and its energy has advantages of higher stability, and stability in 1%, is convenient to improve the accuracy of measurement at least.
The effect of beam-expanding system 4 is to make incident polarized light 20 expand as the certain proportion of the effectively logical light area of polaroid to be measured, as about 80%, can make test result more accurate like this.
Polaroid objective table 5 is used to carry polaroid 50 to be measured, and it can be the polaroid clamping tooling, and can be through regulating clamping tooling to be used to measure the polaroid of different size.
The beam system 7 that contracts is corresponding with beam-expanding system 4, makes the logical light area of incident polarized light 20 be reduced into predetermined size, and with incident polarized light 20 whole guiding power meters 8.
Controlling computer 9 is used for the anglec of rotation of programming Control universal stage 2, angular displacement platform 6, and while elastic calibration device 8 measures the power of institute's detecting polarization light in real time.
See also Fig. 2, Fig. 2 is the process flow diagram of polaroid extinction ratio and Brewster angle measuring method.Below specifically introducing the principle of work of polaroid extinction ratio and Brewster angle measuring device, in the present embodiment, is 1053nm to measure optical wavelength, and specification is that 50 * 35 * 5 polaroid is that example is specifically introduced, and its principle of work comprises:
Step S1 provides to measure and uses polarized light, the background intensity when the measurement polarized light does not pass through polaroid;
In this step, at first regulate the continuous wave laser that wavelength the is 1053nm incident polarized light 20 of (figure does not show), make outgoing polarized light 20 centers with certain height, like 130mm, glancing incidence is to polaroid extinction ratio and Brewster angle measuring device.The polarized light 20 of laser emitting is linearly polarized light (level or vertical), and it at first through λ/4 wave plates 1, becomes elliptically polarized light through λ/4 wave plates, 1 rear polarizer light 20, through controlling computer 9 programmings, and like the Labview program, the rotation of control Glan prism 3.Open power meter 8 simultaneously, write down the light intensity value of Glan prism 3 under the different rotary angle, and store measurement result into 9 li of controlling computer, light intensity as a setting.The rotation of Glan prism 3 angles realizes through 2 rotations of programmed control universal stage.
At length, owing to need to measure the extinction ratio of polaroid to be measured, so main data acquisition is distributed in the horizontal direction and the vertical direction of linearly polarized light when program design, and middle excessive angle does not have influence to measurement result, not image data.At first regulate the polarization direction of Glan prism 3 emergent lights, make its polarization direction roughly in level or vertical direction, at this moment can two data acquisition centers of initial setting, be respectively 0 ° and 90 °.Regulating light path then, the direction of propagation of incident polarized light is in the vertical plane of polaroid to be measured, is the S light direction with respect to polaroid horizontal direction to be measured like this, and vertical direction is the P light direction.Like this in data acquisition, can set with 90 ° of vertical directions is that the center is done the data acquisition of Gaussian distribution and is the data acquisition that Gaussian distribution is done at the center with 0 ° of level, and each part can be gathered a certain amount of data, like about 500 data.The test specification of vertical direction is within ± 5 °, and the test specification of horizontal direction is within ± 3 °, and other angle does not have influence to measurement result, can measure.
Polarized light enters into beam-expanding system 4 through behind the Glan prism 3, because the hot spot of the incident light of laser instrument is generally less; Diameter is about 3mm; Select 8 power beam expansion lens as beam-expanding system 4 this moment, and the light beam after the amplification is again through the bundle that contracts behind the beam system 7 that contracts, thus the probe of ingoing power meter 8.Here the same reduction multiple that uses is 8 times the beam-shrinked mirror beam system 7 that is used to contract.Power meter 8 for example can use a power meter that can use the Labview programming of THORLABS, can link together with controlling computer 9 simultaneously.Through the design of program software, be under no polaroid situation to be measured, background light intensity of empty survey stores the calculating that is used for the back in the software then into.
Step S2 measures the intensity of polarized light to be measured through polaroid, thereby measures the Brewster angle of polaroid;
In this step, at first polaroid 50 to be measured is placed on the polaroid objective table 5, because polaroid objective table 5 is the polaroid clamping tooling, it has clamp springs up and down, so can be clamped to the polaroid to be measured of different size.Angular displacement platform 6 initial angles are 34 °; Can guarantee that like this incident polarized light is 56 ° with respect to the angle of polaroid 50 to be measured; The angular accuracy of angular displacement platform 6 is high more good more; Can reduce efficiency of measurement for fear of too high angular accuracy, the angular accuracy of the stepper motor that angular displacement platform 6 is selected for use for can 0.1 degree, can take into account measuring accuracy and efficiency of measurement like this.Through the control of program, let universal stage 2 be rotated according to the setting of program once more then, gather corresponding test result with power meter 8 simultaneously.Result when the result of this measurement and step S1 sky are surveyed is divided by; Ratio maximum corresponding to P light orientation angles; The orientation angles corresponding to S light that ratio is minimum so just can roughly be confirmed the angle in universal stage 2 with respect to the P light and the S light of polaroid to be measured.These two angle values store into respectively in the middle of the program, use 0 ° and 90 ° data in initial data acquisition center among these two data replacement step S1 then, form two new data acquisition centers.Programmed control universal stage 2 rotates to the orientation angles of P light, gathers corresponding performance number simultaneously in real time.Program drives angular displacement platform 6 again and is allowed to condition at pitch tilt in the certain angle; Pitch tilt angular range that for example can set angle displacement platform 6 is between ± 3 °; Performance number when being captured in the angle variation simultaneously; When measuring the performance number maximum, Automatic Program is noted the respective angles of angular displacement platform 6, and this time, resulting angle was exactly the Brewster angle of polaroid to be measured.
Step S3, the setting polaroid is a Brewster angle, thereby measures the extinction ratio of polaroid to be measured.
In this step, at first drive angular displacement platform 6, make it rotate to the angle of the Brewster angle of measuring.Then according to program setting universal stage 2, data acquisition is counted can be consistent with the collection number of bias light among the step S1, i.e. data about 500, behind every rotation one-period Automatic Program with gather result's storage and handling.Bias light data when program will be placed detection data behind the polaroid 50 to be measured with no polaroid 50 to be measured are divided by, thereby obtain the transmitance of corresponding P light and S light, then P light are compared with S light, just can obtain the extinction ratio of polaroid 50 to be measured.
In the foregoing description, universal stage 2, angular displacement platform 6 and power meter 8 are all through controlling computer 9 programming Control, and the main body of program is can be to adopt Labview to write.Simultaneously, take two modes to carry out the processing of data, a kind of is to calculate when the transmitance of P light and S light, to adopt the match mode, promptly simulates corresponding maximal value and minimum value then through discrete data; Another kind is near the sampling number that strengthens value, and still the limit of corresponding sampling number determines that by the precision of universal stage 2 this result has higher reliability.Simultaneously, can in program, provide the measurement result of above-mentioned two modes simultaneously, test to such an extent that net result can be measured to average and obtains through three times, to strengthen the accuracy of measurement result.
Compared to prior art; The polaroid extinction ratio of present embodiment and Brewster angle measuring device can be measured the extinction ratio and the Brewster angle of polaroid simply, accurately; Thereby can improve the product quality of laser instrument, and important reference data is provided the quantification production of laser instrument.
In the above-described embodiments, only the present invention has been carried out exemplary description, but those skilled in the art can carry out various modifications to the present invention after reading present patent application under the situation that does not break away from the spirit and scope of the present invention.
Claims (12)
1. polaroid extinction ratio and Brewster angle measuring device; It is characterized in that; Comprise λ/4 wave plates of setting gradually along the polarized light direction of propagation, rotatable Glan prism system, rotating polaroid stage system and power meter; Said λ/the optical axis of 4 wave plates and the direction of propagation of polarized light are miter angle; The rotation and change polarization direction in predetermined rotation angle range of said rotatable Glan prism system through the polarized light of said λ/4 wave plates; Rotating polaroid stage system is carried polaroid to be measured and is changed the angle of inclination of the relative polarized light of polaroid to be measured, and said power meter is used to measure the light intensity through the polarized light of said polaroid.
2. polaroid extinction ratio as claimed in claim 1 and Brewster angle measuring device; It is characterized in that; Said rotatable Glan prism system comprises universal stage and is arranged on the Glan prism on the said universal stage; Said universal stage drives said Glan prism rotation, and changes the polarization direction through the polarized light of Glan prism.
3. polaroid extinction ratio as claimed in claim 2 and Brewster angle measuring device; It is characterized in that; Said universal stage is automatically controlled universal stage; Its rotation angle range is the satisfied rotation angle range that a largest light intensity value and a minimum intensity of light value can occur, the reaction time interval greater than power meter of its rotation, and the angle of its rotation is dynamic change.
4. polaroid extinction ratio as claimed in claim 1 and Brewster angle measuring device; It is characterized in that; Said rotating polaroid stage system comprises the angular displacement platform and is arranged on the polaroid objective table on the said angular displacement platform; Said polaroid objective table is used to carry said polaroid to be measured, and under the rotation of said angular displacement platform, changes the angle of inclination of the said relatively polarized light of said polaroid to be measured.
5. polaroid extinction ratio as claimed in claim 1 and Brewster angle measuring device; It is characterized in that; Further comprise beam-expanding system and contract beam system; Said beam-expanding system is arranged between said rotatable Glan prism system and the rotating polaroid stage system, and is used to enlarge the logical light area of said polarized light; The said beam system that contracts is arranged between said rotating polaroid stage system and the said power meter, and is used to dwindle the logical light area of said polarized light.
6. polaroid extinction ratio as claimed in claim 1 and Brewster angle measuring device; It is characterized in that; Further comprise controlling computer; Said controlling computer is controlled the rotation of said rotatable Glan prism system, controls the rotation of said rotating polaroid stage system, and controls the measurement of said power meter to the polarized light light intensity.
7. polaroid extinction ratio as claimed in claim 5 and Brewster angle measuring device; It is characterized in that; Rotate rotatable Glan prism system and said rotating polaroid stage system; The light intensity of the polarized light when power meter is measured rotating polaroid stage system and do not carried polaroid to be measured, as first correlation data, and the light intensity of polarized light when measuring rotating polaroid stage system and carrying polaroid to be measured; As the first detection data, said controlling computer detects the Brewster angle of the said polaroid to be measured of data computation according to said first correlation data and said first.
8. polaroid extinction ratio as claimed in claim 6 and Brewster angle measuring device; It is characterized in that; Set the angle of said polaroid to be measured, rotate rotatable Glan prism system, the light intensity of the polarized light when power meter is measured rotating polaroid stage system and do not carried polaroid to be measured at its Brewster angle; As second correlation data; And the light intensity of polarized light when measuring rotating polaroid stage system and carrying polaroid to be measured, detecting data as second, said controlling computer detects the extinction ratio of the said polaroid to be measured of data computation according to said second correlation data and said second.
9. polaroid extinction ratio and Brewster angle measuring method comprise:
Step S1 provides to measure and uses polarized light, the background intensity when the measurement polarized light does not pass through polaroid;
Step S2 measures the intensity of polarized light to be measured through polaroid, thereby measures the Brewster angle of polaroid;
Step S3, the setting polaroid is a Brewster angle, thereby measures the extinction ratio of polaroid to be measured.
10. polaroid extinction ratio as claimed in claim 9 and Brewster angle measuring method; It is characterized in that, further comprise among the step S1: the light intensity of the polarized light that changes the polarization direction of polarized light and measure corresponding different polarization direction during without polaroid to be measured be light intensity as a setting.
11. polaroid extinction ratio as claimed in claim 10 and Brewster angle measuring method; It is characterized in that, further comprise among the step S2: progressively change the angle that is provided with of polaroid to be measured, and the light intensity of polarized light when measuring polarized light through polaroid to be measured; Form and detect data; Go out P light orientation angles and S light orientation angles according to detecting data and background light intensity data computation, and form new image data, then polaroid to be measured is arranged on the position angle of P light; And the light intensity of gathering corresponding polarized light in real time; Set polaroid to be measured pitch tilt in certain angle, and the residing angle of polaroid when gathering largest light intensity wherein, thereby draw the Brewster angle of polaroid to be measured.
12. polaroid extinction ratio as claimed in claim 11 and Brewster angle measuring method; It is characterized in that, further comprise among the step S3: set the angle of said polaroid to be measured, change the polarization direction of polarized light at its Brewster angle; Measure the light intensity of the polarized light when not passing through polaroid to be measured; As second correlation data, change the polarization direction of polarized light, the light intensity of the polarized light when measuring through polaroid to be measured; As the second detection data, detect the extinction ratio of the said polaroid to be measured of data computation according to said second correlation data and said second.
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| CN103697836A (en) * | 2013-12-19 | 2014-04-02 | 合肥京东方光电科技有限公司 | Axial angle measuring device for polaroid |
| CN105785580A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院上海技术物理研究所 | Linearly polarized light generation device with controllable polarization direction and constant light intensity |
| CN109639941A (en) * | 2018-12-14 | 2019-04-16 | 浙江大学 | Using the device and method of polarizing film control brightness of image |
| WO2020001646A1 (en) * | 2018-06-29 | 2020-01-02 | 上海微电子装备（集团）股份有限公司 | Polarization aberration measuring method for projection objective lens |
| CN111947892A (en) * | 2020-07-17 | 2020-11-17 | 中国科学院上海光学精密机械研究所 | Deep ultraviolet depolarizer detection device and detection method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697836A (en) * | 2013-12-19 | 2014-04-02 | 合肥京东方光电科技有限公司 | Axial angle measuring device for polaroid |
| CN105785580A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院上海技术物理研究所 | Linearly polarized light generation device with controllable polarization direction and constant light intensity |
| WO2020001646A1 (en) * | 2018-06-29 | 2020-01-02 | 上海微电子装备（集团）股份有限公司 | Polarization aberration measuring method for projection objective lens |
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| CN110657954B (en) * | 2018-06-29 | 2020-09-22 | 上海微电子装备（集团）股份有限公司 | Projection objective polarization aberration measurement method |
| CN109639941A (en) * | 2018-12-14 | 2019-04-16 | 浙江大学 | Using the device and method of polarizing film control brightness of image |
| CN109639941B (en) * | 2018-12-14 | 2023-12-26 | 浙江大学 | Method for controlling image brightness by using polaroid |
| CN111947892A (en) * | 2020-07-17 | 2020-11-17 | 中国科学院上海光学精密机械研究所 | Deep ultraviolet depolarizer detection device and detection method |
| CN111947892B (en) * | 2020-07-17 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | Deep ultraviolet depolarizer detection device and detection method |
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| CN102539117B (en) | 2015-07-01 |
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