CN101387749A - High speed response laser shutter - Google Patents

High speed response laser shutter Download PDF

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Publication number
CN101387749A
CN101387749A CNA2007100532111A CN200710053211A CN101387749A CN 101387749 A CN101387749 A CN 101387749A CN A2007100532111 A CNA2007100532111 A CN A2007100532111A CN 200710053211 A CN200710053211 A CN 200710053211A CN 101387749 A CN101387749 A CN 101387749A
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China
Prior art keywords
laser
high speed
reflecting piece
light barrier
optical gate
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Pending
Application number
CNA2007100532111A
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Chinese (zh)
Inventor
张立国
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Individual
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Individual
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Priority to CNA2007100532111A priority Critical patent/CN101387749A/en
Publication of CN101387749A publication Critical patent/CN101387749A/en
Pending legal-status Critical Current

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  • Laser Beam Processing (AREA)

Abstract

The invention relates to a high speed response laser optical gate, belonging to the laser processing technical field, which is characterized in that a laser optical gate light barrier adopts a reflector corresponding to laser and is fixed on a high speed large torque motor rotor, the high speed rotation and the rotation angle can be controlled to drive the light barrier at a special position or angle to pass or baffle laser, thereby realizing high speed, large stroke and large light spot shielding function, thus is more beneficial than the prior mechanical optical switches.

Description

A kind of high speed response laser shutter
Technical field the invention belongs to field of laser processing, particularly high power laser processing and high-peak power pulse laser manufacture field.
Background technology
Along with the progress of laser technology, various high-end laser instruments continue to bring out, and new processing request also emerges in an endless stream.For example, continuous pumping mono-mode ultraviolet acousto-optic Q modulation solid state laser, a lot of companies laser instrument, in case its average output power reaches more than 8 watts, when not bright dipping of laser instrument a period of time, when opening Q-switch again, owing to hot relaxation reason, have even average power when needing recover continuous firing 1 second, this is unallowed for a lot of application, at this time need to use laser optical shutter, its use is such: laser generally is in continue to transfer the Q duty, sends pulse with fixing repetition frequency, and laser optical shutter is lived light trap, avoid laser pulse to beat and do not need the surface that processes at workpiece, when needing laser pulse, optical gate is opened, and the laser of stable operation is just directly beaten on workpiece, optical gate can be closed in needs as requested, and needn't allow laser instrument stop bright dipping.
In the time of general, the response speed of optical gate is less demanding, but some field requires high response speed, silicon chip surface laser drill for example, spacing is very little between the Kong Yukong, and optical gate need turn-off at a high speed and open, and at this time the common mechanical optical gate just can not be competent at.
In fact, Q-switch itself that can high-speed response can place outer light path to use as optical gate, but there are some shortcomings in Q-switch itself: Q-switch is possible itself can to make the zlasing mode variation; For high power laser (for example 1000 watts of solid state lasers) or the big pulse energy laser instrument of high-peak power, Q-switch can not turn-off laser, does not have the effect of optical gate; Q-switch and driving itself are very expensive in addition, have also limited its application.
Summary of the invention
Traditional mechanical formula optical gate major defect is that response speed is not high, and Q-switch that can high-speed response is used as optical gate and is used, have the cost height, and for big pulse energy laser instrument of high-peak power or high power laser, Q-switch closes the laser that is constantly produced probably.
The objective of the invention is to design a kind of high speed response laser shutter, be applied to laser instrument and need be operated in the laser-processing system that continues light state (continuous or accent Q), the harmful effect of avoiding the LASER HEAT relaxation to produce.
The object of the present invention is achieved like this: the optical gate light barrier is by constitute (its benefit is that most of laser energy is reflected rather than absorbs) with the corresponding reflecting piece of laser, light barrier is contained on the rotor of motor (generally being on the main shaft), under external drive signal, electric machine main shaft or rotor rotate according to specific rule, light barrier thereby disengaging or the incision laser optical path, make laser by or be blocked.
The present invention, a kind of high speed response laser shutter owing to adopted above-mentioned technical scheme, makes it compared with prior art, has following advantage and good effect:
1. the present invention is contained in light barrier above the rotor (generally being main shaft), can realize the light barrier fast rotational, makes light barrier block laser fast or allows laser pass through fast;
2. the present invention effectively prevents the light barrier heating owing to use reflex reflector lens as light barrier, enlarges laser power scope and laser pulse peaks power bracket that light barrier bears greatly, prolongs the serviceable life of reflecting piece.
3. the present invention uses stepper motor or other high-speed electric expreess locomotives, is easy to the position or the angle state of High-speed Control light barrier.
4. scheme of the present invention can realize quick, as to go on a long journey journey, the large spot function that is in the light, and this is that present various mechanical optical switch can not be compared.
Description of drawings
To the description of the some embodiment of a kind of high speed response laser shutter of the present invention, can further understand purpose of the present invention, specific structural features and advantage by following in conjunction with its accompanying drawing.Wherein, accompanying drawing is:
Fig. 1 embodiment one is the examples of implementation that the light barrier reflecting surface is parallel to electric machine main shaft; Wherein (a) is the galvanometer synoptic diagram that is in the light; (b) being that laser passes through situation, (c) is the situation that laser is blocked.
Fig. 2 embodiment two is light barrier reflecting surface examples of implementation perpendicular to electric machine main shaft; Wherein (a) is the galvanometer synoptic diagram that is in the light; (b) being that laser passes through situation, (c) is the situation that laser is blocked.
Embodiment
See also shown in Figure 1ly, this is a kind of embodiment of a kind of high speed response laser shutter of the present invention.See Fig. 1 (a), wherein 1 is servomotor, main shaft 2 links to each other with servomotor 1 main shaft, the 3rd, centre wavelength is 355nm deielectric-coating catoptron, be fixed on above the main shaft 2, wavelength is that the ultraviolet incident beam 4 of 355nm blocks and reflect to form folded light beam 5 through catoptron 3, if do not have catoptron to block and reflect, just incident beam 4 direct projections form light beam 6.Further instruction is asked for an interview Fig. 1 (b), and the 7th, the rotating shaft of reflecting optics 3, when reflecting optics 3 and laser beam 4 were parallel, incident beam 4 just direct projection formed light beam 6, beam diameter 2mm wherein, beam center line and catoptron 3 surface distance 1.5mm.Ask for an interview Fig. 1 (c), reflecting optics 3 is 7 rotations, 30 degree angles around the shaft, reflecting optics width 12mm, and its edge approximately is 12mm * 0.5 * sin (30 °)=3mm in the vertical direction displacement, reflecting optics 3 is enough to block and reflection lasering beam 4, forms folded light beam 5.The response speed of present embodiment laser switch can be less than 4ms.
See also shown in Figure 2ly, this is the another kind of embodiment of a kind of high speed response laser shutter of the present invention.See Fig. 2 (a), wherein 1 is servomotor, main shaft 2 links to each other with servomotor 1 main shaft, the 3rd, centre wavelength is 532nm deielectric-coating catoptron, be fixed on above the main shaft 2 and perpendicular to 2, wavelength is that the ultraviolet incident beam 4 of 532nm blocks and reflect to form folded light beam 5 through catoptron 3, if do not have catoptron to block and reflect, just incident beam 4 direct projections form light beam 6.Further instruction is asked for an interview Fig. 2 (b), and the 7th, the rotating shaft of reflecting optics 3,4 are perpendicular to the laser beam of paper, and are parallel to reflecting optics 3, beam diameter 2mm wherein, light beam 4 center lines and catoptron 3 surface distance 1.5mm.Ask for an interview Fig. 2 (c), control servomotor 1 main shaft rotates, and reflecting optics 3 is 7 rotation miter angle degree around the shaft, catoptron length of a film 24mm, and wide 4mm is enough to block and reflection lasering beam 4, forms folded light beam 5.The response speed of present embodiment laser switch can be less than 1ms.
The foregoing description is two concrete application of the present invention.In fact its principle is used and is not limited to top described situation.
In a word, the present invention proposes a kind of high speed response laser shutter, and its important feature is the Electric Machine Control speculum Rotation or deflection, speculum is cut at high speed light path and is blocked laser or break away from a high speed light path and make laser logical Cross, at a high speed, long-life ground turn-offs and open laser, its purposes is very extensive.

Claims (5)

1. a high speed response laser shutter is characterized in that the optical gate light barrier adopts the reflecting piece corresponding with laser, and reflecting piece is fixed on the rotor of high-speed electric expreess locomotive, rotates by the control motor to make the optical gate light barrier be in ad-hoc location or angle.
2. a kind of parts as claimed in claim 1 is characterized in that high-speed electric expreess locomotive is stepper motor or servomotor.
3. a kind of parts as claimed in claim 1 or 2 is characterized in that reflecting piece is the deielectric-coating reflecting piece.
4. a kind of parts as claimed in claim 1 or 2 is characterized in that reflecting piece is the metal film reflecting piece.
5. as claim 3 or 4 described a kind of equipment, along with rotor rotates or deflection, the rotor rotation can be parallel or crossing with the reflective surface position relation of reflecting piece to its feature in reflecting piece.
CNA2007100532111A 2007-09-13 2007-09-13 High speed response laser shutter Pending CN101387749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA2007100532111A CN101387749A (en) 2007-09-13 2007-09-13 High speed response laser shutter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNA2007100532111A CN101387749A (en) 2007-09-13 2007-09-13 High speed response laser shutter

Publications (1)

Publication Number Publication Date
CN101387749A true CN101387749A (en) 2009-03-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007100532111A Pending CN101387749A (en) 2007-09-13 2007-09-13 High speed response laser shutter

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CN (1) CN101387749A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104868355A (en) * 2015-06-04 2015-08-26 中国科学院嘉兴微电子仪器与设备工程中心 Power-stabilizing laser output device
CN110308535A (en) * 2019-07-18 2019-10-08 广东工业大学 A kind of laser radical occlusion device
CN110543009A (en) * 2019-08-20 2019-12-06 中国电子科技集团公司第四十一研究所 Intelligent optical gate and method for detecting on-off of optical path

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104868355A (en) * 2015-06-04 2015-08-26 中国科学院嘉兴微电子仪器与设备工程中心 Power-stabilizing laser output device
CN110308535A (en) * 2019-07-18 2019-10-08 广东工业大学 A kind of laser radical occlusion device
CN110543009A (en) * 2019-08-20 2019-12-06 中国电子科技集团公司第四十一研究所 Intelligent optical gate and method for detecting on-off of optical path

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Open date: 20090318