CN109186945A - The measuring device and method of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity - Google Patents
The measuring device and method of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity Download PDFInfo
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- CN109186945A CN109186945A CN201811061995.7A CN201811061995A CN109186945A CN 109186945 A CN109186945 A CN 109186945A CN 201811061995 A CN201811061995 A CN 201811061995A CN 109186945 A CN109186945 A CN 109186945A
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Abstract
The present invention devises the measuring device and method of a kind of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity, it include laser light source in the device, diaphragm, polarizing film, beam splitter, with reference to optical detector, two-dimentional scanning mechanism, condenser lens, integrating sphere and test optical detector, diaphragm is set gradually along direction of laser propagation, polarizing film and beam splitter, incident beam is divided into reference beam and test beams by beam splitter, reference beam is radiated at reference on optical detector, test beams are radiated on grating to be measured, after the diffraction grating diffraction, it is incident on condenser lens, integrating sphere is injected after line focus lens focus, the tested optical detector that diffuses receives.Apparatus of the present invention and method can diffraction efficiency spectrum to heavy-caliber optical grating and its uniformity accurately measured, while measurement can be completed in a relatively short time, and the measuring system that the present invention constructs has compact-sized, the low advantage of cost.
Description
Technical field
The invention belongs to diffraction efficiency of grating spectral measurement methods field more particularly to a kind of heavy-caliber optical grating diffraction efficiencies
The measuring device and method of spectrum and its uniformity.
Background technique
Heavy-caliber optical grating (Diagonal Dimension reaches meter level) is put in the high power chirped pulse based on inertial confinement fusion
It is risen in big system, heavy caliber astronomical telescope, accurate displacement measurement, nano-imprint lithography and other many science and technology fields
Vital effect, and the diffraction efficiency spectrum and its uniformity within the scope of heavy caliber are the most important property of heavy-caliber optical grating
One of energy index, the accurate measurement of diffraction efficiency spectrum is for evaluating the performance of heavy-caliber optical grating, improving its processing in heavy caliber
Technique has great significance.For the heavy-caliber optical grating diffraction efficiency measuring device generallyd use in the world at present, being based on should
The method of measuring system, the measurement of heavy-caliber optical grating diffraction efficiency can more accurately complete the survey of heavy-caliber optical grating diffraction efficiency
Amount, but its diffraction efficiency and its uniformity that can only measure at single wavelength location (such as 1053nm) heavy-caliber optical grating, this be by
The reason of direction of propagation of diffraction light can change when incident wavelength variation.
In order to measure heavy-caliber optical grating the diffraction efficiency spectrum of specific band range (such as 900-1100nm) and its uniformly
Property, a kind of intuitive method of comparison be according at present in the world the measuring device of common small-bore diffraction efficiency of grating spectrum and
Measurement method constructs the improvement measuring device of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity.
This device, by rotary turnplate, can rotate test optical detector when the operation wavelength of monochromator changes
To at the diffraction direction of different wave length laser.Mechanical knot but when its main disadvantage in measurement process, inside monochromator
The machine carousel of structure and fixed test optical detector needs the desultory discontinuous intermittent movement of completion, thus test speed
It is relatively slow, the diffraction efficiency spectrum that heavy-caliber optical grating single physical position is in 900-1100nm wavelength band is such as measured, is led to
5-8 minutes time often is needed, if that the heavy-caliber optical grating for 1000 × 500mm is measured size, according to sampled distance
It is calculated for 10mm, altogether 5000 sampled points, measurement needs 20 days or so time in total；Another drawback is measurement system
It unites very huge, cost is very expensive.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of heavy-caliber optical grating diffraction efficiency spectrum and its uniformities
Measuring device and method, the diffraction efficiency spectrum and its uniformity of energy rapid survey heavy-caliber optical grating, and compact-sized, cost
It is at low cost.
The technical solution adopted by the present invention to solve the technical problems is: providing a kind of heavy-caliber optical grating diffraction efficiency first
The measuring device of spectrum and its uniformity, including laser light source, diaphragm, polarizing film, beam splitter, with reference to optical detector, focus it is saturating
Mirror, integrating sphere and test optical detector, set gradually diaphragm, polarizing film and beam splitter along direction of laser propagation, beam splitter will enter
Irradiating light beam is divided into reference beam and test beams, and reference beam is radiated at reference on optical detector, and test beams are radiated to be measured
On grating, after the diffraction grating diffraction, it is incident on condenser lens, integrating sphere, diffusing reflection are injected after line focus lens focus
Light is tested optical detector and receives.Diaphragm is used to filter stray light and adjust the aperture of incoming laser beam, and polarizing film is for generating
The linearly polarized light of polarization state required for measuring is used to measure the light intensity of reference beam, condenser lens and integral with reference to optical detector
Ball is used to measure the intensity of diffracted beam for collecting grating diffration light beam to be measured, test optical detector.
It according to the above technical scheme, further include Fast Electronics component, for remotely controlling filter, with reference to optical detector and survey
Optical detector is tried, realizes data acquisition and data processing.
It according to the above technical scheme, further include two-dimentional scanning mechanism, two-dimentional scanning mechanism is by objective table, the optics of vertical direction
The optical precision displacement platform composition of precision displacement table, horizontal direction, two-dimentional scanning mechanism is for moving heavy-caliber optical grating sample to be measured
Product successively measure the diffraction efficiency spectrum of each position of heavy-caliber optical grating, the optical precision displacement platform and horizontal direction of vertical direction
Optical precision displacement platform be connected respectively through controllor for step-by-step motor with computer.
It according to the above technical scheme, further include filter, the laser light source is super continuous spectrums laser light source, filter setting
Between super continuous spectrums laser light source and diaphragm.Super continuous spectrums laser light source is used to provide secondary color laser light source for measuring system,
Filter is used to secondary color light source is converted to monochromatic incident beam.
According to the above technical scheme, filter is liquid crystal tunable filter or acousto-optic filter.
The present invention also provides a kind of heavy-caliber optical grating diffraction efficiency spectrum and its measurement methods of uniformity.
The following steps are included:
1. dark field intensity value of the measurement with reference to optical detector and test optical detector in the case where laser light source is closed；
2. not placing grating to be measured in the optical path, it is radiated on integrating sphere after so that test beams is directly over condenser lens；
3. the outgoing wavelength of filter is set as λ1, then measurement is with reference to optical detector and the light field for testing optical detector
Intensity value is denoted as respectivelyWith
4. the outgoing wavelength of filter is set gradually as λ2,λ3……λn, respectively repeat steps 3., obtain each wavelength
The lower light field intensity value with reference to optical detector and test optical detector, is denoted as respectivelyWith With……With
5. installing grating to be measured in optical system for testing, then condenser lens, integrating sphere and test optical detector are placed in
At the exit direction of diffracted beam；It is radiated at incident light in the starting point of grating to be measured；
6. the outgoing wavelength of filter is set as λ1, with monochromatic light exposure grating to be measured, then measure reference light and visit
It surveys device and tests the signal strength indication of optical detector, be denoted as respectivelyWith
7. the outgoing wavelength of filter is set gradually as λ2,λ3……λn, respectively repeat steps 6., obtain each wavelength
The lower signal strength indication with reference to optical detector and test optical detector, is denoted as respectivelyWith With……With
8. according to the dark field intensity value of reference optical detector and test optical detector, and the light field under each wavelength is strong
Angle value and signal strength indication, according to following formula, calculating separately wavelength is λ1,λ2,λ3……λnWhen grating to be measured in the measurement position
Set the diffraction efficiency value at place:
9. using the optical precision displacement platform of two-dimentional scanning mechanism vertical direction and the optical precision displacement platform of horizontal direction,
Launching spot is moved to the position of the next measurement point of heavy-caliber optical grating, repeats step 6., 7., 8., calculates heavy-caliber optical grating
Diffraction efficiency of the sample in next measurement point；According to diffraction efficiency λ1,λ2,λ3……λn, grating to be measured is drawn in the diffraction of the point
Efficiency spectra curve.
10. repeating step 9., make the entire working region of scan path covering heavy-caliber optical grating, to complete heavy caliber light
The measurement of grid diffraction efficiency.And the diffraction efficiency curve of spectrum of the grating to be measured at each point is drawn according to the diffraction efficiency measured,
Complete the measurement of diffraction efficiency of grating spectrum.
According to the above technical scheme, the step 5. in, be radiated at incident light in the starting point of grating to be measured, especially by
The optical precision displacement platform of mobile two-dimentional scanning mechanism vertical direction and the optical precision displacement platform of horizontal direction are realized.
The beneficial effect comprise that: (1) apparatus of the present invention and method can to the diffraction efficiency of heavy-caliber optical grating
Spectrum and its uniformity are accurately measured, at the same can be completed in a relatively short time measurement (for having a size of 1000 ×
The heavy-caliber optical grating of 500mm, existing measurement method need 20 days or so time, and this method only needs 3 hours or so
Complete measurement).
(2) compared with the measuring device and measurement method of existing heavy-caliber optical grating diffraction efficiency spectrum and its uniformity, this
The measuring system of invention building has compact-sized, the low advantage of cost.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the measuring device schematic diagram of heavy-caliber optical grating diffraction efficiency spectrum of the embodiment of the present invention and its uniformity；
Fig. 2 is the tomograph of the two-dimentional scanning mechanism in the measuring device of heavy-caliber optical grating diffraction efficiency.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
In one embodiment of the present of invention, as shown in Figure 1, a kind of measuring device of heavy-caliber optical grating diffraction efficiency spectrum,
As shown in Figure 1, including super continuous spectrums laser light source 1, filter 2, diaphragm 3, polarizing film 4, beam splitter 5, reference light high speed detection
Device 6, grating to be measured 9, condenser lens 13, integrating sphere 14, test light high speed detector 7, Fast Electronics component 15 and two-dimensional scanning
Mechanism 8.
Super continuous spectrums laser light source 1 is used to provide secondary color laser light source for measuring system, and acousto-optic filter 2 is used for secondary color
Light source converts the incident beam of monochromatizing, and diaphragm 3 is used to filter stray light and adjusts the aperture of incident beam, and polarizing film 4 is used for
The linearly polarized light of polarization state required for measuring is generated, beam splitter 5 is used to incident beam be divided into a branch of reference light and a branch of test
Light, reference light high speed detector 6 are used to measure the light intensity of reference beam, focus lamp 13 and integrating sphere 14 for collecting grating 9
Diffracted beam, test light high speed detector 7 are used to measure the intensity of diffracted beam.Fast Electronics component remotely controls Acousto-optic filtering
Device 2, reference light high speed detector 6 and test light high speed detector 7 realize data acquisition and data processing.Two-dimentional scanning mechanism 8
It is made of the optical precision displacement platform 12 of objective table 10, the optical precision displacement platform 11 of vertical direction, horizontal direction, vertical direction
Optical precision displacement platform 11 and horizontal direction optical precision displacement platform 12 respectively through controllor for step-by-step motor and computer phase
Even.
In the present embodiment, light source 1 uses Fianium super continuous spectrums laser, and filter 2 uses the AOTF acousto-optic of CTI
Filter, diaphragm 3 install iris diaphgram using Thorlabs company ID20 extension bar, and polarizing film 4 is using Thorlabs company
LPVIS050-MP2 shape linear polarizer, beam splitter 5 are installed thin using the CM1-BP145B2 cage cube of Thorlabs company
Film beam splitter, 12GHz GaAs detector of the reference light high speed detector 6 using Newport, the selection of condenser lens 13
The biconvex lens of Thorlabs, integrating sphere 14 and test light high speed detector 7 are detected using the 819C series InGaAs of Newport
Device, objective table 10, the optical precision displacement platform 11 of vertical direction, horizontal direction optical precision displacement platform 12 and other Machinery Ministries
Part is customized by Shanghai friendship ties optical fiber laser company and is completed.
In embodiment of the present invention method,
The following steps are included:
1. dark field intensity value of the measurement with reference to optical detector and test optical detector in the case where laser light source is closed；
2. not placing grating to be measured in the optical path, it is radiated on integrating sphere after so that test beams is directly over condenser lens；
3. the outgoing wavelength of filter is set as λ1, then measurement is with reference to optical detector and the light field for testing optical detector
Intensity value is denoted as respectivelyWith
4. the outgoing wavelength of filter is set gradually as λ2,λ3……λn, respectively repeat steps 3., obtain each wavelength
The lower light field intensity value with reference to optical detector and test optical detector, is denoted as respectivelyWith With……With
5. installing grating to be measured in optical system for testing, then condenser lens, integrating sphere and test optical detector are placed in
At the exit direction of diffracted beam；It is radiated at incident light in the starting point of grating to be measured；
6. the outgoing wavelength of filter is set as λ1, with monochromatic light exposure grating to be measured, then measure reference light and visit
It surveys device and tests the signal strength indication of optical detector, be denoted as respectivelyWith
7. the outgoing wavelength of filter is set gradually as λ2,λ3……λn, respectively repeat steps 6., obtain each wavelength
The lower signal strength indication with reference to optical detector and test optical detector, is denoted as respectivelyWith With……With
8. according to the dark field intensity value of reference optical detector and test optical detector, and the light field under each wavelength is strong
Angle value and signal strength indication, according to following formula, calculating separately wavelength is λ1,λ2,λ3……λnWhen grating to be measured in the measurement position
Set the diffraction efficiency value at place:
9. using the optical precision displacement platform of two-dimentional scanning mechanism vertical direction and the optical precision displacement platform of horizontal direction,
Launching spot is moved to the position of the next measurement point of heavy-caliber optical grating, repeats step 6., 7., 8., calculates heavy-caliber optical grating
Diffraction efficiency of the sample in next measurement point；According to diffraction efficiency λ1,λ2,λ3……λn, grating to be measured is drawn in the diffraction of the point
Efficiency spectra curve.
10. repeating step 9., make the entire working region of scan path covering heavy-caliber optical grating, to complete heavy caliber light
The measurement of grid diffraction efficiency.And the diffraction efficiency curve of spectrum of the grating to be measured at each point is drawn according to the diffraction efficiency measured,
Complete the measurement of diffraction efficiency of grating spectrum.
It should be understood that for those of ordinary skills, it can be modified or changed according to the above description,
And all these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (7)
1. the measuring device of a kind of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity, which is characterized in that including laser light source,
Diaphragm, polarizing film, beam splitter, with reference to optical detector, condenser lens, integrating sphere and test optical detector, along direction of laser propagation
Diaphragm, polarizing film and beam splitter are set gradually, incident beam is divided into reference beam and test beams by beam splitter, and reference beam shines
It penetrates on reference optical detector, test beams are radiated on grating to be measured, and after the diffraction grating diffraction, it is saturating to be incident on focusing
Mirror injects integrating sphere after line focus lens focus, and the tested optical detector that diffuses receives.
2. the measuring device of heavy-caliber optical grating diffraction efficiency spectrum according to claim 1 and its uniformity, feature exist
In, further include Fast Electronics component, for remotely control filter, with reference to optical detector and test optical detector, realize data
Acquisition and data processing.
3. the measuring device of heavy-caliber optical grating diffraction efficiency spectrum according to claim 1 or 2 and its uniformity, feature
It is, further includes two-dimentional scanning mechanism, two-dimentional scanning mechanism is by objective table, the optical precision displacement platform of vertical direction, level side
To optical precision displacement platform composition, two-dimentional scanning mechanism is for moving heavy-caliber optical grating sample to be measured, the optics of vertical direction
The optical precision displacement platform of precision displacement table and horizontal direction is connected through controllor for step-by-step motor with computer respectively.
4. the measuring device of heavy-caliber optical grating diffraction efficiency spectrum according to claim 1 or 2 and its uniformity, feature
It is, further includes filter, the laser light source is super continuous spectrums laser light source, and filter is arranged in super continuous spectrums laser light source
Between diaphragm.
5. the measuring device of heavy-caliber optical grating diffraction efficiency spectrum according to claim 4 and its uniformity, feature exist
In filter is liquid crystal tunable filter or acousto-optic filter.
6. the measurement method of a kind of heavy-caliber optical grating diffraction efficiency spectrum and its uniformity based on any one of claim 1-5,
It is characterized in that,
The following steps are included:
1. dark field intensity value of the measurement with reference to optical detector and test optical detector in the case where laser light source is closed；
2. not placing grating to be measured in the optical path, it is radiated on integrating sphere after so that test beams is directly over condenser lens；
3. the outgoing wavelength of filter is set as λ1, then measurement is with reference to optical detector and the light field intensity for testing optical detector
Value, is denoted as respectivelyWith
4. the outgoing wavelength of filter is set gradually as λ2,λ3……λn, respectively repeat steps 3., obtain joining under each wavelength
It examines optical detector and tests the light field intensity value of optical detector, be denoted as respectivelyWithWithWith
5. installing grating to be measured in optical system for testing, condenser lens, integrating sphere and test optical detector are then placed in diffraction
At the exit direction of light beam；It is radiated at incident light in the starting point of grating to be measured；
6. the outgoing wavelength of filter is set as λ1, with monochromatic light exposure grating to be measured, then measurement with reference to optical detector and
The signal strength indication for testing optical detector, is denoted as respectivelyWith
7. the outgoing wavelength of filter is set gradually as λ2,λ3……λn, respectively repeat steps 6., obtain joining under each wavelength
It examines optical detector and tests the signal strength indication of optical detector, be denoted as respectivelyWithWithWith
8. according to the dark field intensity value of reference optical detector and test optical detector, and the light field intensity value under each wavelength
And signal strength indication, according to following formula, calculating separately wavelength is λ1,λ2,λ3……λnWhen grating to be measured at the measurement position
Diffraction efficiency value:
9. launching spot to be moved to the position of the next measurement point of heavy-caliber optical grating, repeats step 6., 7., 8., calculate big mouth
Diffraction efficiency of the diameter grating sample in next measurement point；
10. repeating step 9., makes the entire working region of scan path covering heavy-caliber optical grating, spread out to complete heavy-caliber optical grating
Penetrate the measurement of efficiency.
7. the measurement method of heavy-caliber optical grating diffraction efficiency spectrum according to claim 6 and its uniformity, feature exist
In, the step 5. in, be radiated at incident light in the starting point of grating to be measured, it is vertical especially by mobile two-dimentional scanning mechanism
The optical precision displacement platform in direction and the optical precision displacement platform of horizontal direction are realized.
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| CN109827757A (en) * | 2019-03-18 | 2019-05-31 | 北京理工大学 | A kind of measurement method of one-dimensional liquid crystal grating population parameter |
| CN111006854A (en) * | 2019-12-25 | 2020-04-14 | 中国科学院光电技术研究所 | Device and method for testing diffraction efficiency of micro-nano structure lens |
| CN111413070A (en) * | 2020-04-13 | 2020-07-14 | 蔚海光学仪器（上海）有限公司 | Brightness detection device and detection method thereof |
| CN111595555A (en) * | 2020-06-02 | 2020-08-28 | 中国科学院上海光学精密机械研究所 | Device and method for realizing real-time development monitoring of grating mask by utilizing wide spectral ratio |
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| CN113945364A (en) * | 2021-10-25 | 2022-01-18 | 中国科学院光电技术研究所 | Device and method for measuring diffraction efficiency of diffractive optical element |
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| CN109827757A (en) * | 2019-03-18 | 2019-05-31 | 北京理工大学 | A kind of measurement method of one-dimensional liquid crystal grating population parameter |
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| CN111595555B (en) * | 2020-06-02 | 2021-02-02 | 中国科学院上海光学精密机械研究所 | Device and method for realizing real-time development monitoring of grating mask by utilizing wide spectral ratio |
| CN111780721A (en) * | 2020-07-01 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | Laser beam splitter grid line perpendicularity detection device and detection method |
| CN113008529A (en) * | 2021-05-12 | 2021-06-22 | 中国工程物理研究院应用电子学研究所 | Large-caliber optical element measuring system based on ultrafast laser imaging |
| CN113945364A (en) * | 2021-10-25 | 2022-01-18 | 中国科学院光电技术研究所 | Device and method for measuring diffraction efficiency of diffractive optical element |
| CN115376435A (en) * | 2022-04-11 | 2022-11-22 | 江苏锦花电子股份有限公司 | Luminous homogeneity detection device of display |
| CN115376435B (en) * | 2022-04-11 | 2023-07-21 | 江苏锦花电子股份有限公司 | Display luminous uniformity detection device |
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Application publication date: 20190111 |