CN104808334B - 致动器控制装置、光学模块及电子设备 - Google Patents

致动器控制装置、光学模块及电子设备 Download PDF

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Publication number
CN104808334B
CN104808334B CN201510038485.8A CN201510038485A CN104808334B CN 104808334 B CN104808334 B CN 104808334B CN 201510038485 A CN201510038485 A CN 201510038485A CN 104808334 B CN104808334 B CN 104808334B
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China
Prior art keywords
actuator
value
unit
voltage
driving
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CN201510038485.8A
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English (en)
Chinese (zh)
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CN104808334A (zh
Inventor
久利龙平
西村晃幸
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
CN201510038485.8A 2014-01-27 2015-01-26 致动器控制装置、光学模块及电子设备 Active CN104808334B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014012123A JP2015141209A (ja) 2014-01-27 2014-01-27 アクチュエーター制御装置、光学モジュール、及び電子機器
JP2014-012123 2014-01-27

Publications (2)

Publication Number Publication Date
CN104808334A CN104808334A (zh) 2015-07-29
CN104808334B true CN104808334B (zh) 2018-02-16

Family

ID=53678872

Family Applications (1)

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CN201510038485.8A Active CN104808334B (zh) 2014-01-27 2015-01-26 致动器控制装置、光学模块及电子设备

Country Status (3)

Country Link
US (1) US9547166B2 (enExample)
JP (1) JP2015141209A (enExample)
CN (1) CN104808334B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6283638B2 (ja) * 2015-09-16 2018-02-21 横河電機株式会社 光測定装置
JP6746376B2 (ja) * 2016-05-23 2020-08-26 株式会社ミツトヨ 測定システム及び調整用設定値の切替方法
JP7073620B2 (ja) * 2016-10-31 2022-05-24 ヤマハ株式会社 アクチュエータの駆動制御装置
JP6801400B2 (ja) * 2016-11-28 2020-12-16 セイコーエプソン株式会社 光学モジュール及び電子機器
JP7142419B2 (ja) * 2017-05-01 2022-09-27 浜松ホトニクス株式会社 光計測制御プログラム、光計測システム及び光計測方法
WO2020024237A1 (zh) * 2018-08-03 2020-02-06 宁波舜宇光电信息有限公司 可变光圈装置、摄像模组及其应用
US11553346B2 (en) * 2019-03-01 2023-01-10 Intel Corporation Misbehavior detection in autonomous driving communications
JP7484139B2 (ja) * 2019-11-22 2024-05-16 セイコーエプソン株式会社 分光装置、及び分光装置の駆動方法
JP2021087304A (ja) * 2019-11-28 2021-06-03 セイコーエプソン株式会社 アクチュエーター駆動装置、及びアクチュエーター駆動装置の制御方法
JP7472776B2 (ja) * 2020-12-22 2024-04-23 セイコーエプソン株式会社 波長可変フィルター、波長可変フィルターの制御方法、およびコンピュータープログラム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101933076A (zh) * 2008-02-11 2010-12-29 高通Mems科技公司 调谐干涉式调制器显示器的方法
CN102354221A (zh) * 2010-04-14 2012-02-15 精工爱普生株式会社 促动器

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JPS61150013A (ja) * 1984-12-25 1986-07-08 Toshiba Corp ハンチング検出器
JPS62106516A (ja) * 1985-11-01 1987-05-18 Toshiba Corp 産業用ロボツトのア−ム制御装置
JPH0194312A (ja) 1987-10-06 1989-04-13 Sharp Corp 可変干渉装置
JP2001239380A (ja) * 2000-02-28 2001-09-04 Matsushita Electric Ind Co Ltd レーザ加工装置及びレーザ加工方法
JP2001239390A (ja) * 2000-02-28 2001-09-04 Nippon Hikyumen Lens Kk レーザ加工装置及び方法とこれを用いて加工された光学素子
JP3835525B2 (ja) 2001-03-19 2006-10-18 ホーチキ株式会社 波長可変フィルタ制御装置
JP4698092B2 (ja) * 2001-07-11 2011-06-08 住友重機械工業株式会社 ガルバノスキャナ装置及びその制御方法
JP2004066300A (ja) * 2002-08-07 2004-03-04 Matsushita Electric Ind Co Ltd レーザ加工装置およびレーザ加工方法
KR100855807B1 (ko) 2006-08-30 2008-09-01 삼성전기주식회사 회절형 광변조기의 반사부 위치 리셋 장치
IL201742A0 (en) * 2009-10-25 2010-06-16 Elbit Sys Electro Optics Elop Tunable spectral filter
JP5363394B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5895414B2 (ja) * 2011-09-16 2016-03-30 セイコーエプソン株式会社 分光測定装置、及び分光測定方法
JP5919728B2 (ja) * 2011-10-26 2016-05-18 セイコーエプソン株式会社 分光測定装置
JP5811789B2 (ja) * 2011-11-09 2015-11-11 セイコーエプソン株式会社 分光測定装置
JP2013238755A (ja) * 2012-05-16 2013-11-28 Seiko Epson Corp 光学モジュール、電子機器、食物分析装置、分光カメラ、及び波長可変干渉フィルターの駆動方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101933076A (zh) * 2008-02-11 2010-12-29 高通Mems科技公司 调谐干涉式调制器显示器的方法
CN102354221A (zh) * 2010-04-14 2012-02-15 精工爱普生株式会社 促动器

Also Published As

Publication number Publication date
CN104808334A (zh) 2015-07-29
US9547166B2 (en) 2017-01-17
US20150212314A1 (en) 2015-07-30
JP2015141209A (ja) 2015-08-03

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