CN104802498A - Detaching device and detaching method - Google Patents
Detaching device and detaching method Download PDFInfo
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- CN104802498A CN104802498A CN201510042355.1A CN201510042355A CN104802498A CN 104802498 A CN104802498 A CN 104802498A CN 201510042355 A CN201510042355 A CN 201510042355A CN 104802498 A CN104802498 A CN 104802498A
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- 238000000034 method Methods 0.000 title claims abstract description 39
- 238000010521 absorption reaction Methods 0.000 claims abstract description 292
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 62
- 238000012544 monitoring process Methods 0.000 claims abstract description 14
- 238000001179 sorption measurement Methods 0.000 claims description 171
- 238000006073 displacement reaction Methods 0.000 claims description 17
- 230000000694 effects Effects 0.000 claims description 16
- 230000033001 locomotion Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 246
- 239000000758 substrate Substances 0.000 description 166
- 230000007423 decrease Effects 0.000 description 22
- 238000012423 maintenance Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 10
- 238000012790 confirmation Methods 0.000 description 9
- 230000003028 elevating effect Effects 0.000 description 8
- 238000012546 transfer Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000010023 transfer printing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- 239000012044 organic layer Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H41/00—Machines for separating superposed webs
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Abstract
The invention provides a detaching device and detaching method, wherein the device and method can enable two closely attached plate-shaped bodies to be detached well and stably. The method comprises the following steps: detaching an absorbed part of the second plate-shaped body from the first plate-shaped body through an upstream side absorption part, and detaching the second plate-shaped body towards the detaching advance direction; enabling a downstream side absorption part to move towards a reverse attaching surface of a detached part, detached by an upstream side detaching device, of the second plate-shaped body; monitoring the relative position of the downstream side absorption part and the reverse attaching surface of the second plate-shaped body in a process of moving towards the reverse attaching surface of the detached part; adjusting the time when the downstream side absorption part starts to absorb the second plate-shaped body based position information related to the relative position; and enabling the downstream side absorption part to be separated from a maintaining device so as to detach the second plate-shaped body towards the detaching advance direction when or after the downstream side absorption part starts to absorb the second plate-shaped body and the downstream side absorption part maintains the state of the reverse attaching surface of the detached part.
Description
Technical area
The present invention relates to a kind of stripping off device and stripping means, the two panels plate body be mutually close to is peeled off to make it be separated.
Background technology
As forming the pattern of regulation or the technology of film on the plate body of glass substrate or semiconductor substrate etc., the pattern that other plate body supports or film (hereinafter referred to as " pattern etc. ") are transferred on substrate.In the art, after pattern etc. being transferred to another plate body from a plate body after two panels plate body is close to, need when pattern etc. is injury-free, two panels plate body to be peeled off.
In order to achieve the above object, as available technology, such as TOHKEMY 2008-287949 publication discloses a kind of device, and this device is peeled off for making the element formation substrate be mutually close to across organic layer and substrate for transfering.In this technology, by board holder, two plate bases of laminating are remained flat-hand position, make under the state of vacuum suction upper and lower base plate respectively, upper and lower base plate to be moved respectively to detaching direction.Upper and lower base plate adsorbs maintenance respectively by the multiple absorption layers be distributed.
The device that this TOHKEMY 2008-287949 publication is recorded, arranged with the interval of regulation by the length direction of adsorption head along substrate, multiple absorption layers of this adsorption head are arranged to column-shaped.In addition, whole adsorption heads is moved towards the upper surface of substrate, under the state that whole absorption layers contacts with the upper surface of substrate, vacuum attraction is carried out to each absorption layer, carry out the substrate by multiple absorption layer absorption upside.Afterwards, the adsorption head of side, most upstream and the board holder of peeling off progress direction are separated, and peel off a part for substrate, and the 2nd that makes side, most upstream rise further, the 3rd, the 4th and the 5th adsorption head are separated with board holder successively, peel off substrate.Therefore, not only when the strippable substrate started most, namely by the adsorption head of side, most upstream move peel off substrate time, when adsorption head is afterwards separated with board holder and peels off substrate, sometimes can not peel off when appropriate managerial, such as, can not peel off between the substrate that adsorption site makes local.Particularly, the absorption layer of the 2nd, the 3rd, the 4th adsorption head, abuts in the region being formed with pattern etc. mostly, worries that in this set of regions, act on large peeling force can cause damage to pattern etc.
Summary of the invention
The present invention proposes in view of the above problems, and its object is to provide can by the technology of the two panels plate body be mutually close to well and stably peel separation.
A mode of the present invention is a kind of stripping off device, for peeling off the 1st plate body and the 2nd plate body be mutually close to, it is characterized in that, have: holding device, keep described 1st plate body, upstream side stripping off device, have and carry out adsorbing the upstream side adsorption section kept to the anti-part being close to face of described 2nd plate body, this is counter is close to the face that face is the opposition side in the face be close to mutually with described 1st plate body in the surface of described 2nd plate body, while by described 2nd plate body of described upstream side adsorption section absorption while make described upstream side adsorption section and described holding device be separated, make being peeled off from described 1st plate body by the adsorbed portion position of described upstream side adsorption section absorption of described 2nd plate body, come to peel off described 2nd plate body to stripping progress direction, downstream stripping off device, downstream and the described counter of described 2nd plate body with the described adsorbed portion position on described stripping progress direction are close to the adsorption section, downstream arranged face to face, make adsorption section, described downstream move to the stripping position of being peeled off by described upstream side stripping off device in described 2nd plate body to adsorb described stripping position described counter be close to face after, adsorption section, described downstream is separated with described holding device with the state of adsorbing described 2nd plate body, come to peel off described 2nd plate body to described stripping progress direction, supervising device, monitor the described anti-relative position be close between face of adsorption section, described downstream and described 2nd plate body, control device, based on the positional information relevant to the described relative position obtained by described supervising device, control adsorption section, described downstream to start to adsorb described 2nd plate body.
Another mode of the present invention is a kind of stripping means, a kind of stripping means, peel off for the 1st plate body that will mutually be close to and the 2nd plate body, it is characterized in that, comprise: keep step, described 1st plate body is kept by holding device, 1st strip step, while adsorbed the anti-part being close to face of described 2nd plate body by Xi Ce adsorption section, upstream, while make described upstream side adsorption section be separated with described holding device, make being peeled off from described 1st plate body by the adsorbed portion position of described upstream side adsorption section absorption of described 2nd plate body, and peel off described 2nd plate body to stripping progress direction, wherein, this is counter is close to the face that face is the opposition side in the face be close to mutually with described 1st plate body in the surface of described 2nd plate body, mobile step, adsorption section, downstream is moved towards the described anti-face of being close at the stripping position in described 2nd plate body, this stripping position refers to, in the downstream of described described adsorbed portion position of peeling off on progress direction, described upstream side adsorption section is separated with described holding device thus the position that is stripped of described 2nd plate body, monitoring step, be close in the process of face movement in adsorption section, described downstream to the described counter of described stripping position, monitor the described anti-relative position be close between face of adsorption section, described downstream and described 2nd plate body, set-up procedure, based on the positional information relevant to described relative position, adjustment starts the opportunity of adsorbing described 2nd plate body by adsorption section, described downstream, 2nd strip step, while started to adsorb described 2nd plate body by adsorption section, described downstream, or after started to adsorb described 2nd plate body by adsorption section, described downstream, adsorption section, described downstream is separated with described holding device with the described anti-state being close to face of adsorbing described stripping position, come to peel off described 2nd plate body to described stripping progress direction.
In the invention formed like this, a part (adsorbed portion position) for the 2nd plate body is peeled off from the 1st plate body, come to peel off the 2nd plate body to stripping progress direction.Here, be separated with holding device along with the upstream side adsorption section of adsorbing described adsorbed portion position, peel off the 2nd plate body, but, be separated with holding device along with upstream side adsorption section, the movement of upstream side stripping off device is difficult to be reflected in the progress of stripping.Here, in the present invention, peeling off the downstream in progress direction, behind the adsorption stripping position, adsorption section, downstream of downstream stripping off device, this adsorption section, downstream is separated make stripping to continue to be in progress direction to be in progress to peeling off with holding device.In addition, keep can not suppressing to peel off the bending of position by means of only upstream side stripping off device, but, keep peeling off position by the adsorption section, downstream of downstream stripping off device, the posture of the 2nd plate body can be controlled.Thus, according to the present invention, the 1st plate body be mutually close to and the 2nd plate body can be made to peel off well, good stripping performance can be played.
In addition, it is not certain for peeling off the curved shape at position, different and change according to factors such as the rigidity of the clinging force between the 1st plate body and the 2nd plate body and/or the 2nd plate body.That is, even if upstream side adsorption section is identical with the separating distance of maintaining part, such as, when clinging force is larger, peel off and be in progress few, bend and diminish.Therefore, adsorption section, downstream needs mobile long distance to abutting with stripping position.To this, when clinging force is smaller, contrary with above-mentioned situation, shorten to the displacement of the adsorption section, downstream of peeling off position abuts.Thus, when adopting the structure of being adsorbed by the stripping position of adsorption section, downstream to the 2nd plate body peeled off from the 1st plate body according to the movement of sidesway adsorption section, upstream, controlling to be close to the absorption of adsorbing in face by adsorption section, downstream to the 2nd plate body counter, to start opportunity extremely important.For this point, in the present invention, the anti-relative position being close to face of monitoring adsorption section, downstream and the 2nd plate body, based on the positional information relevant to this relative position, controls the opportunity starting to adsorb the 2nd plate body by downstream absorption.Therefore, regardless of the difference of the rigidity of the clinging force between the 1st plate body and the 2nd plate body and the 2nd plate body, always can make adsorption section, downstream that the 2nd plate body absorption is stably carried out lift-off processing on suitable opportunity.
According to the present invention, after adsorption section, downstream is always in due course and adsorbs the stripping position of the 2nd plate body peeled off by upstream side stripping off device, 2nd plate body is separated with holding device and peels off the 2nd plate body, thus can stably and peel off well.
Accompanying drawing explanation
Fig. 1 is the stereogram of the 1st embodiment representing stripping off device of the present invention.
Fig. 2 is the stereogram of the primary structure representing stripping off device.
Fig. 3 represents the initial side view peeling off the structure of unit and the position relationship at each position.
Fig. 4 is the block diagram of the electric structure representing stripping off device.
Fig. 5 A ~ Fig. 5 C is the figure of the structure schematically showing absorbing unit.
Fig. 6 is the figure of the negative pressure feeding state in the position relationship of each stage each several part be shown schematically in process and negative pressure feeding portion.
Fig. 7 is the figure of the negative pressure feeding state in the position relationship of each stage each several part be shown schematically in process and negative pressure feeding portion.
Fig. 8 is the figure of the negative pressure feeding state in the position relationship of each stage each several part be shown schematically in process and negative pressure feeding portion.
Fig. 9 is the figure of the negative pressure feeding state in the position relationship of each stage each several part be shown schematically in process and negative pressure feeding portion.
Figure 10 is the figure of the negative pressure feeding state in the position relationship of each stage each several part be shown schematically in process and negative pressure feeding portion.
Figure 11 A ~ Figure 11 C is the figure of the position relationship of each stage each several part be only shown schematically in process.
Figure 12 A ~ Figure 12 D is the figure of the 2nd embodiment representing stripping off device of the present invention.
Figure 13 A ~ Figure 13 D is the figure of the 3rd embodiment representing stripping off device of the present invention.
Figure 14 is the figure of the negative pressure feeding state in the position relationship of each stage each several part be shown schematically in the process in the 3rd embodiment and negative pressure feeding portion.
Figure 15 is the figure of the negative pressure feeding state be shown schematically in the position relationship of each several part in each stage in the process in the 3rd embodiment and negative pressure feeding portion.
Description of reference numerals:
1 stripping off device
30 mounting tables (holding device)
51 absorbing units (upstream side stripping off device)
52,53 absorbing units (upstream side stripping off device, downstream stripping off device)
54 absorbing units (downstream stripping off device)
70 control units (control device)
517,527,537,547 absorption layers
518,528,538,548 negative pressure feeding portions
527,527a ~ 527y, 527z1,527z2,537,537z1,537z2,547,547z1,547z2 absorption layer
5286 pressure gauges (supervising device, pressure measxurement portion)
530 laser displacement gauges
701 CPU (control device)
BL blanket
PR peels off position
SB substrate
SR adsorbed portion position
V51 control valve (upstream side switching part)
V52 control valve (downstream switching part)
V521 control valve (the 1st switching part)
V522 control valve (the 2nd switching part)
Y peels off progress direction
Detailed description of the invention
A. the 1st embodiment
Fig. 1 is the stereogram of the 1st embodiment representing stripping off device of the present invention.In order to the direction of unified each figure, set the XYZ rectangular axes as shown in Fig. 1 lower right.Here XY plane is horizontal plane, and Z axis is expressed as vertical axis.In more detail ,+Z-direction is expressed as vertical direction upwards.
This stripping off device 1 is the device that the two panels plate body moved into the state be mutually close to interarea is peeled off.Such as, the substrate surface of glass substrate or semiconductor substrate etc. is formed in a part for the patterning process of predetermined pattern and use.More specifically, in this patterning process, pass through coating step, pattern-forming step, transfer step, carrying out pattern is the most at last transferred to substrate from blanket, wherein, in coating step, pattern forming material is being applied equably as in the blanket surface of carrying body, this carrying body will to the pattern as transfer printing on the substrate of transfer printing body for temporarily supporting, in pattern-forming step, the version of Surface Machining will have been carried out by the coat be pressed on blanket according to pattern form, thus pattern-forming is carried out to coat, in transfer step, make to form figuratum blanket like this and substrate is close to.
At this moment, in order to reach being separated between version and blanket of making to be close in pattern-forming step, or making the object that is separated between the substrate be close in transfer step and blanket, can this device be applied.Certainly, can be applied in two above-mentioned steps by this device, also can use in purposes in addition to these.Such as, can be applied to the stripping process when film transfer that is supported in carrying body is to substrate.
This stripping off device 1 has following structure, that is, the main support 11 framework installed is fixed with respectively mounting table module 3 and top adsorption module 5.In order to represent internal structure in Fig. 1, because omitted herein the diagram of framework.In addition, beyond these each modules, this stripping off device 1 has control unit 70 (Fig. 4) described later.
Mounting table module 3 has mounting table 30, and described mounting table 30 is close to body (hereinafter referred to as " workpiece ") for what load that version or substrate and blanket be close to and formed.Mounting table 30 has: horizontal mounting table portion 31, and upper surface is approximate horizontal plane; Inclination mounting table 32, upper surface is for being inclined relative to horizontal the plane of several years (such as 2 degree of degree).In inclination mounting table 32 side of mounting table 30, be i.e. be provided with near the end of-Y side and initially peel off unit 33.In addition, the mode of spanning horizontal mounting table 31 is provided with roller unit 34.
In addition, top adsorption module 5 has: bracing frame 50, erects setting from main support 11, and, cover the top of mounting table module 3; Be arranged on the 1st absorbing unit 51 on support frame as described above 50, the 2nd absorbing unit 52, the 3rd absorbing unit 53 and the 4th absorbing unit 54.These absorbing units 51 ~ 54 are arranged in order to+Y-direction.
Fig. 2 is the stereogram of the primary structure representing this stripping off device.More specifically, Fig. 2 represents the structure of mounting table 30, roller unit 34 and the 2nd absorbing unit 52 in each structure of stripping off device 1.Mounting table 30 has: horizontal mounting table portion 31, and upper surface 310 is generally horizontal plane; Inclination mounting table 32, upper surface 320 is inclined plane.The upper surface 310 in horizontal mounting table portion 31 has the planar dimension larger than the planar dimension of the workpiece that will load.
The end of-Y the side in the horizontal mounting table portion 31 of the person of being close to of inclination mounting table portion 32 is arranged, the part contacted with horizontal mounting table 31 of smooth upper surface 320 is positioned at the height (Z-direction position) identical with the upper surface 310 of horizontal mounting table 31, on the other hand, more decline downwards to-Y-direction from horizontal mounting table 31, namely more retreat to-Z-direction.Therefore, mounting table 30 is overall, the inclined plane of the horizontal plane of the upper surface 310 of horizontal mounting table 31 and the upper surface 320 in inclination mounting table portion 32 is continuous, and the ridge line section E that the horizontal plane of upper surface 310 is connected with the upper surface 320 in inclination mounting table portion 32 is formed as the linearity extended in X direction.
In addition, on the upper surface 310 of horizontal mounting table 31, quarter is provided with cancellate groove.More specifically, the central portion of the upper surface 310 of horizontal mounting table 31 is provided with cancellate groove 311, and, to surround the region forming this groove 311, and be formed as the mode of roughly " コ " font on the limit by side, inclination mounting table portion 32 removed in rectangle, the periphery of the upper surface 310 in horizontal mounting table portion 31 is provided with groove 312.These grooves 311,312 are connected to negative pressure generating part 704 (with reference to Fig. 4) described later via control valve, by supply negative pressure, play the function that absorption remains on the adsorption tank of workpiece placed in mounting table 30.Two kinds of grooves 311,312 do not connect in mounting table, in addition, are connected to negative pressure generating part 704 via control valve independent of each other, therefore, except using except two kinds of grooves adsorb, can also only use a kind of groove to adsorb.In the present embodiment, mounting table 30 plays a role as " holding device " of the present invention.
To arrange roller unit 34 across the mode of the mounting table 30 formed as above.Particularly, along the X-direction both ends of horizontal mounting table 31, be provided with pair of guide rails 351,352 along the Y direction, these guide rails 351,352 are fixed on main support 11.In addition, guide rail 351,352 is slidably provided with roller unit 34.
Roller unit 34 has the slide block 341,342 that can slidably engage with guide rail 351,352 respectively.The mode of connection sliding block 341,342 is provided with lower angle 343, and lower angle 343 across mounting table 30 top ground extend along the X direction.The elevating mechanism 344 be applicable to via a pair in the both sides of lower angle 343 is elevated and is freely provided with upper corners 345.Further, upper corners 345 rotatably can be provided with the columned stripper roll 345 extended along the X direction.
When upper corners 345 by elevating mechanism 344 downwards, when namely-Z-direction declines, the upper surface of the workpiece placed by the lower surface of stripper roll 340 and mounting table 30 abuts against.In addition, above upper corners 345 is positioned in by elevating mechanism 344, under the state of the position of namely+Z-direction, stripper roll 340 become upward with the state be separated above of workpiece.Upper corners 345 is provided with for suppressing the backing roll 346 that stripper roll 340 is bending in the mode that can rotate freely, and is suitably provided with the rib for preventing upper corners 345 themselves bend.Stripper roll 340 and backing roll 346 do not have drive source, and these rollers rotate freely.
Roller unit 34 can be moved along the Y direction by the motor 353 be arranged on main support 11.Particularly, lower angle 343 is connected with the ball screw mechanism 354 as the mapping device rotary motion of motor 353 being transformed to rectilinear motion.When motor 353 rotates, lower angle 343 moves in the Y direction along guide rail 351,352, and therefore, roller unit 34 moves along the Y direction.Stripper roll 340 along with the movable range of the movement of roller unit 34 is, from the position near the-Y side end in the horizontal mounting table portion 31 of arrival in the-y direction, to the position arriving the outside of+Y side end in horizontal mounting table portion 31 in+Y-direction namely further by the scope of the position of+Y-direction.
Below, the structure of the 2nd absorbing unit 52 is described.In addition, the 1st to the 4th absorbing unit 51 ~ 54 is all identical structure, and the structure of the 2nd absorbing unit 52 is here described typically.2nd absorbing unit 52 has beam portion 521, and described beam portion 521 is extended in X direction, is fixed on bracing frame 50.The position different from each other of the X-direction in this beam portion 521 is provided with below vertical, the coupled columns portion 522,523 that namely-Z-direction extends.In post portion 522,523 via figure in hide lifting rail plate portion 524 is freely installed.Plate portion 524 is driven by the elevating mechanism 52 formed by motor and mapping device (as ball screw mechanism) and is elevated.
Be provided with the bar-shaped advance expenditure support part 526 extended in X direction in the bottom in plate portion 524, the lower surface in this advance expenditure support part 526 is equally spaced arranged with multiple absorption layer 527 in X direction.Represent in Fig. 2 that the 2nd absorbing unit 52 moves to the state of the top of physical location, but, when plate portion 524 is moved downwards by elevating mechanism 525, the position of the absorption layer 527 closely upper surface 310 in horizontal mounting table portion 31 can be dropped to, under the state that mounting table 30 is placed with workpiece, abut with the upper surface of this workpiece.Negative pressure from negative pressure generating part 704 is supplied to each absorption layer 527 via negative pressure feeding portion 528 (Fig. 5 A, 5C) described later, thus the upper surface of absorption holding workpiece.
Fig. 3 represents the initial side view peeling off the structure of unit and the position relationship of each several part.First, with reference to figure 1 and Fig. 3, the initial structure peeling off unit 33 is described.Initial stripping unit 33 has the bar-shaped press section 331 extended in X direction above inclination mounting table portion 32, and press section 331 is supported by supporting arm 332.Supporting arm 332 is mounted freely in post portion 334 via guide rail 333 lifting extended along vertical, and by the action of elevating mechanism 335, supporting arm 332 phase coupled columns portion 334 moves up and down.Post portion 334 is supported by the base portion 336 be arranged on main support 11, but can be adjusted the Y-direction position in the post portion 334 on base portion 336 within the limits prescribed by position adjusting mechanism 337.
The mounting table 30 be made up of horizontal mounting table 31 and inclination mounting table 32 is placed with the workpiece WK as peeling off object.To be version and blanket be close to across the film of pattern forming material workpiece in described pattern-forming step is close to body.In addition, to be substrate and blanket be close to across the pattern of pattern-forming the workpiece in transfer step is close to body.In following content, be described as the strip operation of the stripping off device 1 of the situation of workpiece WK for using the body of being close to of the substrate SB in transfer step and blanket BL, but, version and blanket be close to the situation of body as workpiece, also can peel off in the same way.
In workpiece WK, suppose that the planar dimension of blanket BL is larger than substrate SB.Substrate SB is close to the substantially central portion of blanket BL.Workpiece WK is positioned at below with blanket BL and the mode that substrate SB is positioned at top is positioned in mounting table 30.At this moment, as shown in Figure 3, with the ridge line section E of the boundary of-Y side end of the substrate SB in workpiece WK between horizontal mounting table portion 31 and inclination mounting table portion 32 roughly above, be more specifically the mode of the position of-Y side of being slightly partial to ridge line section E, workpiece WK is positioned in mounting table 30.Therefore, in the-y direction, the blanket BL in the outside of substrate SB is projected in inclination mounting table portion 32, produces gap between the lower surface of blanket BL and the upper surface 320 of inclination mounting table 32.The angle θ formed between the lower surface of blanket BL and the upper surface 320 in inclination mounting table portion 32 is the number of degrees (in this embodiment be 2 degree) identical with the angle of inclination in inclination mounting table portion 32.
Horizontal mounting table portion 31 is provided with adsorption tank 311,312, and absorption keeps the lower surface of blanket BL.Wherein, adsorption tank 311 absorption is positioned at the lower surface of the blanket BL of the bottom of substrate SB, in addition, and the lower surface of the blanket BL in the outside of adsorption tank 312 sorbing substrate SB.Adsorption tank 311,312 can carry out adsorbing or not adsorbing independently of each other, and two kinds of adsorption tanks 311,312 can be used together to adsorb blanket BL securely.In addition, the adsorption tank 312 in outside only can be used to adsorb, do not adsorb the central portion of the blanket BL being effectively formed with pattern, thus the Pattern damage that causes because absorption causes blanket BL to bend can be prevented.Like this, by controlling the negative pressure feeding of the adsorption tank 312 to the adsorption tank 311 of central portion and periphery independently, the absorption hold mode of blanket BL can be switched according to object.
The stripper roll 340 of the 1st to the 4th absorbing unit 51 ~ 54 and roller unit 34 is configured with above the workpiece WK being adsorbed maintenance like this by mounting table 30.As mentioned above, in the bottom of the 2nd absorbing unit 52, be disposed with multiple absorption layer 527 in X direction.In more detail, absorption layer 527 has and such as has by rubber or silicones etc. the adsorption site 527A and bellows position 527B that flexibility and flexible material be integrally formed, the lower surface of described adsorption site 527A and the upper surface of workpiece WK are (more specifically, the upper surface of substrate SB) abut the upper surface adsorbing workpiece WK, described bellows position 527B has the retractility on above-below direction (Z-direction).On other absorbing unit 51,53 and 54 arrange absorption layer be also identical structure, but, in following content, by these each absorbing units 51,53 and 54 arrange absorption layer respectively label be 517,537 and 547, distinguish.
1st absorbing unit 51 is arranged on the top of-Y side end of horizontal mounting table 31, the upper surface of-Y side end of sorbing substrate SB during decline.In addition, the 4th absorbing unit 54 is arranged on the top of+Y side end of the substrate SB of mounting in mounting table 30, the upper surface of+Y side end of sorbing substrate SB during decline.2nd absorbing unit 52 and the 3rd absorbing unit 53 are suitably distributed between the 1st absorbing unit 51 and the 4th absorbing unit 54, such as, make absorption layer 517 ~ 547 roughly equal compartment of terrain configuration in the Y direction.Between these absorbing units 51 ~ 54, can carry out independently of each other and vertically move and carry out to adsorb or do not adsorb.In addition, about the structure for controlling the negative pressure feeding in each absorbing unit 51 ~ 54 and operation, will tell about below.
Stripper roll 340 moves along above-below direction and to be close with substrate SB or to be separated, and by moving along Y-direction, moves horizontally along substrate SB.Under the state that stripper roll 340 declines, abut with the upper surface of substrate SB, and rotate and move horizontally.Moving to the position of the stripper roll 340 when leaning on-Y side position most, is the position be close with+Y the side of the absorption layer 517 of the 1st absorbing unit 51.In order to such approximated position can be configured in, about the 1st absorbing unit 51, identical with the structure of the 2nd absorbing unit 52 that Fig. 2 represents, but as shown in Figure 1, towards the opposite towards being arranged on bracing frame 50 with other the 2nd to the 4th absorbing unit 52 ~ 54.
The initial Y-direction position of peeling off unit 33 of adjustment, makes press section 331 be positioned to be projected into the top of the blanket BL of the top in inclination mounting table portion 32.Further, declined by supporting arm 332, the lower end of press section 331 is declined thus the upper surface of pressing blanket BL.The top of press section 311 is formed by elastomeric element, causes damage to avoid 331 pairs, press section blanket BL.
Fig. 4 is the block diagram of the electric structure representing stripping off device.Device each several part is controlled by the control unit 70 of the example being equivalent to " control device " of the present invention.Control unit 70 has: the CPU (Central Processing Unit: central processing unit) 701 of the action of management devices entirety; Control the motor control part 702 of the Motor be arranged in each portion; Control the valve control part 703 of the valve class be arranged in each portion; Produce the negative pressure generating part 704 of the negative pressure supplied to each portion; The operation received from user inputs, or the state of device is informed user interface (UI) portion 705 of user.In addition, when the negative pressure that factory's negative pressure source etc. can be utilized to supply from outside, control unit 70 can not have negative pressure generating part.
Motor 353 set in motor control part 702 drived control mounting table module 3, elevating mechanism 335,344, the groups of motors of elevating mechanism 525 that each absorbing unit 51 ~ 54 of top adsorption module 5 is arranged respectively etc.Valve control part 703 control valve group V3 and valve group V51, V521, V522 etc.Described valve group V3 is arranged on and is connected on the pipe arrangement path of adsorption tank 311,312 set horizontal mounting table portion 31 from negative pressure generating part 704, supplies the negative pressure of regulation to adsorption tank 311,312 individually.Described valve group V51, V521, V522 are arranged on the negative pressure feeding portion being connected to each absorption layer 517 ~ 547 from negative pressure generating part 704, supply the negative pressure of regulation to each absorption layer 517 ~ 547.
Fig. 5 A ~ Fig. 5 C is the figure of the structure schematically showing absorbing unit.In the present embodiment, absorbing unit 51 ~ 54 all has 25 absorption layers.In addition, absorbing unit 51 ~ 54 is respectively arranged with negative pressure feeding portion 518,528,538,548, can stopping switching between negative pressure to absorption layer supply negative pressure and supply.In the present embodiment, absorbing unit 51 peels off such as described later the direction be in progress, namely peel off on progress direction+Y and be positioned at side, most upstream, adsorbing the upstream-side-end of version or substrate makes the upstream-side-end of version or substrate start the mechanism of peeling off from blanket BL most, and other absorbing unit 52 ~ 54 is the mechanism that the stripping position of peeling off the upstream side absorbing unit by this absorbing unit is adsorbed and then peeled off respectively.Like this, the function of absorbing unit is different, thus, in the present embodiment, the structure in negative pressure feeding portion just can be made different by absorbing unit 51 and absorbing unit 52 ~ 54.
In absorbing unit 51,25 absorption layers 517 arrange in X direction, as shown in Figure 5 B, from-X-direction side direction+X-direction side is divided into 8,9,8 these 3 absorption layer groups, is connected to negative pressure generating part 704 via negative pressure feeding portion 518.This negative pressure feeding portion 518 has 3 manifolds 5181 ~ 5183.Manifold 5181 is connected with 8 absorption layers 517 of the absorption layer group forming-X side, and manifold 5182 is connected with 9 absorption layers 517 of the absorption layer group forming central authorities, and further, manifold 5183 is connected with 8 absorption layers 517 of the absorption layer group forming+X side.In addition, the number of absorption layer 517, the dividing mode etc. of group are arbitrary.
Each manifold 5181 ~ 5183 is connected with negative pressure generating part 704 via control valve V51.Therefore, when control valve V51 opens according to the OPEN of the valve control part 703 from control unit 70, negative pressure is supplied via manifold 5181 ~ 5183 to absorption layer 517.On the contrary, when control valve V51 closes according to the out code from valve control part 703, stop supplying negative pressure to absorption layer 517.Thus, in the present embodiment, control valve V51 plays a role as supplying negative pressure to absorption layer 517 and stop carrying out the switching part that switches between supply negative pressure, is equivalent to an example of " upstream side switching part " of the present invention.In addition, can control valve V51 be passed through, supply negative pressure to whole absorption layers 517 simultaneously, in addition, stop supply negative pressure simultaneously.In addition, the Reference numeral 5184 in Fig. 5 B is the pressure gauges of the pressure measured in each absorption layer 517.
Absorbing unit 52 ~ 54 is also same with absorbing unit 51, has 25 absorption layers arranged in X direction, respectively by negative pressure feeding portion 528,538,548, is switching independently between absorption layer supply negative pressure and individual character supply negative pressure.These negative pressure feeding portions 528,538,548 have identical structure.Therefore, the following describes the structure in negative pressure feeding portion 528, enclose corresponding Reference numeral about remaining negative pressure feeding portion 538,548, its structure illustrates and just omits.
In absorbing unit 52,25 absorption layers 527 arrange in X direction.In addition, by 25 absorption layers 527 mutually difference be described, be referred to as absorption layer 527a ~ 527y from the absorption layer 527 that-X side arranges to+X side in this manual, be called in other situations " absorption layer 527 ".
These absorption layers 527 are divided into 1,7,4,1,4,7,1 these 7 absorption layer groups from-X-direction side direction+X side, and N number of (N=1,2,3,4,5,6,7) absorption layer group of-X side is following respectively to be formed.That is, divide in such a way.
1st absorption layer group: absorption layer 527a
2nd absorption layer group: absorption layer 527b ~ 527h
3rd absorption layer group: absorption layer 527i ~ 527l
4th absorption layer group: absorption layer 527m
5th absorption layer group: absorption layer 527n ~ 527q
6th absorption layer group: absorption layer 527r ~ 527x
7th absorption layer group: absorption layer 527y
Wherein, the 2nd, the 3rd, the 5th and the 6th absorption layer group are made up of multiple absorption layer 527 as mentioned above.Therefore, correspondingly, negative pressure feeding portion 528 has 4 manifolds 5281 ~ 5284.Wherein, manifold 5281 is connected with the absorption layer 527b ~ 527h forming the 2nd absorption layer group, manifold 5282 is connected with the absorption layer 527i ~ 527l forming the 3rd absorption layer group, manifold 5283 is connected with the absorption layer 527n ~ 527q forming the 5th absorption layer group, and manifold 5284 is connected with the absorption layer 527r ~ 527x forming the 6th absorption layer group.
Each manifold 5181 ~ 5184 is connected with negative pressure generating part 704 via control valve V521.Therefore, when control valve V521 opens according to the OPEN of the valve control part 703 from control unit 70, negative pressure is supplied via manifold 5281 ~ 5284 to absorption layer 527b ~ 527h, 527i ~ 527l, 527n ~ 527q, 527r ~ 527x.On the contrary, when control valve V521 closes according to the out code from valve control part 703, stop supplying negative pressure to absorption layer 527b ~ 527h, 527i ~ 527l, 527n ~ 527q, 527r ~ 527x.Therefore, in the present embodiment, control valve V521 is as supplying the state of negative pressure to absorption layer 527b ~ 527h, 527i ~ 527l, 527n ~ 527q, 527r ~ 527x and stopping the switching part switching between the state of supply negative pressure to play a role, negative pressure can be supplied to absorption layer 527b ~ 527h, 527i ~ 527l, 527n ~ 527q, 527r ~ 527x simultaneously, in addition, stop supply negative pressure simultaneously.In addition, Reference numeral 5285 is in figure 5b the pressure gauges of pressure measuring absorption layer 527b ~ 527h, 527i ~ 527l, 527n ~ 527q, 527r ~ 527x.
In addition, be all be made up of single absorption layer 527a, 527m, 527y in remaining absorption layer group, thus do not arrange manifold, absorption layer 527a, 527m, 527y are connected with negative pressure generating part 704 via control valve V522.Therefore, when control valve V522 opens according to the OPEN of the valve control part 703 from control unit 70, supply negative pressure to absorption layer 527a, 527m, 527y.On the contrary, when control valve V522 closes according to the out code from valve control part 703, stop supplying negative pressure to absorption layer 527a, 527m, 527y.Therefore, in the present embodiment, control valve V521, as supplying the state of negative pressure to absorption layer 527a, 527m, 527y and stopping the switching part switching between the state of supply negative pressure to play a role, can supply negative pressure to absorption layer 527a, 527m, 527y simultaneously, stops supply negative pressure in addition simultaneously.In addition, the middle Reference numeral 5286 of Fig. 5 B is the pressure gauge of the pressure measuring absorption layer 527a, 527m, 527y, is equivalent to an example of " supervising device " of the present invention and " pressure measxurement portion ".
In addition, be described with reference to Fig. 6 to Figure 11 A, Figure 11 B and the action of Figure 11 C to stripping off device as constructed as above.Fig. 6 to Figure 10 is the figure being shown schematically in the position relationship of each stage each several part in process and the negative pressure feeding state in negative pressure feeding portion.In addition, Figure 11 A ~ Figure 11 C is the figure of the position relationship of each stage each several part be only shown schematically in process.Perform by CPU701 the handling procedure prestored and control each several part, carry out this lift-off processing.In addition, here, the body of being close to of above-mentioned substrate SB and blanket BL is described as the peeling action of the stripping off device 1 during workpiece WK.
First, by the transfer robot of operator or outside etc., workpiece WK is loaded into the above-mentioned position of mounting table 30, that is, when perform keep step time, device is initialised, thus each several part of device is set as the original state that specifies.In an initial condition, workpiece WK is kept by a kind of groove in adsorption tank 311,312 or two kinds of groove absorption, the absorption layer 517 ~ 547 of the press section 331 of initial stripping unit 33, the stripper roll 340 of roller unit 34, the 1st to the 4th absorbing unit 51 ~ 54 is all separated with workpiece WK, does not supply negative pressure to arbitrary absorption layer 517 ~ 547.In addition, stripper roll 340 is positioned at the position leaning on-Y side most in its movable range.
As shown in Figure 6, from this state, the 1st absorbing unit 51 and stripper roll 340 are declined.In this moves, control valve V51 maintains the state stopping supply negative pressure.Then, when the 1st absorbing unit 51 and stripper roll 340 decline the distance moving and preset according to the thickness of workpiece WK, as shown in Figure 7, the absorption layer 517 of the 1st absorbing unit 51 abuts with the upper surface of workpiece WK respectively.Thus, by the instruction unpack control valve V51 from valve control part 703, supply negative pressure via manifold 5181 ~ 5183 to the absorption layer 517 of the 1st absorbing unit 51 from negative pressure generating part 704.Thus, above substrate SB, the counter-Y side end being close to face of the opposition side in the face be namely close to blanket BL is adsorbed maintenance by absorption layer 517.An example of " adsorbed portion position " of the present invention is equivalent to like this by the position that absorption layer 517 adsorbs.In addition, stripper roll 340 abuts with the upper surface of substrate SB in the adjacent position ,+Y side of adsorbed portion position.In addition, hacures in hurdle (a) in Fig. 7 represent that absorption layer accepts negative pressure feeding, in hurdle (b) in Fig. 7, the downward arrow near press section 331 represents that press section 331 is moved from illustrated state to this direction of arrow in the next step.About this point, with also identical in figure afterwards.
Here, the abutting region that stripper roll 340 abuts is, transfer printing forms pattern using the outside of the effective coverage played a role as device effectively, that is, from the position by-Y side of effective coverage.Therefore, the inside of effective coverage is not subject to the absorption of the 1st absorbing unit 51, and does not receive the pressing of stripper roll 340.
Then, make initially to peel off unit 33 and carry out action, press section 331 is declined and presses the end of blanket BL.The end of blanket BL is projected into the top in inclination mounting table portion 32, has gap between the lower surface of the end of blanket BL and the upper surface 320 in inclination mounting table portion 32.Therefore, pressed the end of blanket BL downwards by press section 331, the end of blanket BL is bent downwards along the inclined plane in inclination mounting table portion 32.Its result, is adsorbed by the 1st absorbing unit 51 between the end of the substrate SB of maintenance with blanket BL and separates, and starts to peel off.It is bar-shaped that press section 331 is formed as extending in X direction, and the length setting in its X-direction is longer than blanket BL.Therefore, the abutting region that press section 331 abuts with blanket BL linearly extends to+X side end from the-X side end of blanket BL.Thereby, it is possible to blanket BL is bent to cylinder shape, the boundary line (hereinafter referred to as " stripping borderline line ") between the stripping area peeled off substrate SB and blanket BL and also unstripped unstripped region becomes linearity.
From this state, make the 1st absorbing unit 51 start to rise, and action synchronously make stripper roll 340 move to+Y-direction therewith.Particularly, when arriving immediately below stripper roll 340 to the stripping borderline line of+Y-direction movement when being risen by the 1st absorbing unit 51, start stripper roll 340 is moved.Therefore, abut region to move to+Y-direction.Afterwards, namely the 1st absorbing unit 51 moves to+Z-direction with constant speed upward, in addition stripper roll 340 to+Y-direction with constant hasten mobile.
In addition, as shown in Figure 8, risen by the 1st absorbing unit 51 of the end keeping substrate SB, the adsorbed portion position SR of the substrate SB adsorbed by absorption layer 517 is lifted, to+Y-direction stripping substrate SB and blanket BL, but because stripper roll 340 abuts, the abutting region that therefore can not exceed stripper roll 340 is peeled off.Make stripper roll 340 while abut with substrate SB, move to+Y-direction with constant speed, thus the tempo peeled off can be remained constant.That is, stripping borderline line is the straight line along roller bearing of trend and X-direction, and makes stripping with constant speed to+Y-direction progress.Therefore, it is possible to the pattern damage reliably preventing the variation because peeling off tempo from causing stress to be concentrated and cause.
Then, wait for that stripper roll 340 is through the 2nd absorption position.2nd absorption position be substrate SB upper surface on the 2nd absorbing unit 52 immediately below position, be receive the 2nd absorbing unit 52 adsorb position.Then, when stripper roll 340 is through the 2nd absorption position, as shown in Figure 9, the 2nd absorbing unit 52 starts to decline.Namely, absorption layer 527 moves (mobile step) to stripping position PR, this stripping position PR refers to, risen by the 1st absorbing unit 51 being positioned at the upstream side of the 2nd absorbing unit 52 on the stripping progress direction+Y peeling off progress, and from the position (part between the 1st absorbing unit 51 and stripper roll 340 of substrate SB) that blanket BL peels off.
In addition, the 2nd absorbing unit 52 declines, and according to the instruction from valve control part 703, only opens control valve V522, supplies negative pressure from negative pressure generating part 704 to 3 absorption layers 527a, 527m, 527y.In addition, the state of not absorption layer 527b ~ 527l, 527n ~ 527x supply negative pressure to 22 beyond these is kept.That is, while attracted by-X the side in the X-direction of the 2nd absorbing unit 52, central authorities and+X side, the 2nd absorbing unit 52 declines.When the lower surface of the absorption layer 527 be made up of the elastic component with retractility abuts with the stripping position PR of substrate SB, catch sorbing substrate SB, and by the force value that pressure gauge 5286 is measured, large change occurs.Therefore, monitor the force value exported from pressure gauge 5286, namely perform monitoring step, thus can detect exactly the 2nd absorbing unit 52 drop to absorption layer 527 can the position of adsorption stripping position PR.
Here, by means of only the stripping position PR of absorption layer 527 sorbing substrate SB, then supply negative pressure to whole absorption layers 527 in the process that can decline at the 2nd absorbing unit 52.But, before abutting with substrate SB, absorption layer 527 aspirates air, can produce large load to negative pressure generating part 704, and the value of the negative pressure supplied to the 1st absorbing unit 51 from negative pressure generating part 704 can change, therefore likely there is the situation that absorption layer 517 does not keep substrate SB.To this, because detect absorption layer 527 to abut with stripping position PR, so be limited in the number supplying the absorption layer 527 of negative pressure in the 2nd absorbing unit 52 decline process significantly, therefore, the generation of the problems referred to above can be reduced significantly, and above-mentioned abutting detection can be carried out exactly.Consider this point, in the present embodiment, as mentioned above, 3 absorption layers 527a, 527m, 527y not only have the function of independent sorbing substrate SB, also with confirming the function that substrate SB abuts with stripping position PR, namely play the function that so-called abutting confirms dual-purpose adsorption section.On the other hand, other absorption layer 527b ~ 527l, 527n ~ 527x play the effect that the special adsorption section of maintenance of position PR is peeled off in specific adsorption maintenance.In addition, in the present embodiment, use 3 absorption layers 527a, 527m, 527y abutting and confirm, but be not limited thereto as the number or equipping position abutting the absorption layer confirming the use of dual-purpose adsorption section, can be in any way, but the viewpoint of the variation from suppression negative pressure value, is preferably set at least than keeping the number that special adsorption section is few.
When by detected pressures value, when detecting that absorption layer 527 abuts with the stripping position PR of substrate SB, as shown in Figure 10, according to the instruction from valve control part 703, open control valve 521, supply negative pressure from negative pressure generating part 704 to remaining 22 absorption layer 527b ~ 527l, 527n ~ 527x.Therefore, the stripping position PR keeping substrate SB is adsorbed by whole 25 absorption layers 527.In addition, following mode can be adopted, that is, after making whole absorption layers 527 drop to assigned position, be relatively in holding state by the substrate SB lifted.In any-mode, by making absorption layer 527 have flexibility, can prevent from adsorbing unsuccessfully.About this point, embodiment afterwards too.
After beginning sorbing substrate SB, the 2nd absorbing unit 52 starts to rise.Therefore, stripping tempo is still stripped roller 340 and controls, and, for what peel off, the main body that substrate SB lifts is become the 2nd absorbing unit 52 from the 1st absorbing unit 51.In addition, the substrate SB after stripping, from only being switched to the state kept by the 1st absorbing unit and the 2nd absorbing unit by the state that the 1st absorbing unit 51 keeps, thus increases holding position.In addition, when each absorbing unit 51 ~ 54 rises, as shown in Figure 11 A, to make the posture of the substrate SB after stripping be the relative position that the mode of general plane maintains the Z-direction between each absorbing unit 51 ~ 54.
Then, when 3rd absorption position of stripper roll 340 immediately below the 3rd absorbing unit 53, the 3rd absorbing unit 53 starts to decline, and for what peel off, the main body that substrate SB lifts is become the 3rd absorbing unit 53 from the 2nd absorbing unit 52.The decline of the 3rd absorbing unit 53, absorption keep and the action of lift substrate identical with the action of the 2nd absorbing unit.Further, in stripper roll 340 after the 4th absorption position, the 4th absorbing unit 54 declines, and is lifted by substrate SB.At this moment, perform with the decline of the 2nd absorbing unit 52, adsorb the same action of the action that keeps and lift substrate.
Like this, lift substrate SB by the 4th absorbing unit 54, thus as shown in Figure 11 B, whole substrate SB is separated with blanket BL.Here, after making the 4th absorbing unit 54 increase ,+Y the rear flank making stripper roll 340 move to mounting table 30 stops mobile.Then, as shown in Figure 11 C, stop after making each absorbing unit 51 ~ 54 all rise to phase co-altitude.In addition, the press section 331 of initially peeling off unit 33 is separated with blanket BL, moves to the top of the upper surface of blanket BL and the retreating position of-Y side of-Y side end of blanket BL.Afterwards, remove adsorption tank and the absorption of blanket BL is kept, the substrate SB after separation and blanket BL is taken out of to outside device, thus completes lift-off processing.
The height of each absorbing unit 51 ~ 54 is set to identical be because, by making the substrate SB after stripping and blanket BL keeping parallelism, thus make the access of the taking-up hand inserted by external robots or operator and become easy with the operation that taking-up hand join blanket BL and SB substantially.
As mentioned above, according to the present embodiment, peel off substrate SB along with to stripping progress direction (in the present embodiment+Y-direction), kept the stripping position PR of substrate SB by downstream absorption layer, stripping is in progress further.Such as,-Y the side end of substrate SB is kept while during making stripping be in progress at the absorption layer 517 by the 1st absorbing unit 51, by being positioned at the absorption layer 527 of the 2nd absorbing unit 52 in the downstream of absorption layer 517 after the stripping position PR keeping substrate SB, stripping is in progress further.At such stripping bench, 1st absorbing unit 51 and absorption layer 517 play the function of " upstream side stripping off device " of the present invention and " upstream side adsorption section " respectively, and the 2nd absorbing unit 52 and absorption layer 527 play the function of " downstream stripping off device " of the present invention and " adsorption section, downstream " respectively.
In addition, then above-mentioned stripping, the adsorbed portion position SR (with reference to figure 11A) of substrate SB is kept while during making stripping be in progress at the absorption layer 527 by the 2nd absorbing unit 52, kept the stripping position PR of basic SB by the absorption layer 537 of the 3rd absorbing unit 53 being positioned at the downstream of absorption layer 527 after, stripping is in progress further.At such stripping bench, 2nd absorbing unit 52 and absorption layer 527 play the function of " upstream side stripping off device " of the present invention and " upstream side adsorption section " respectively, and the 3rd absorbing unit 53 and absorption layer 537 play the function of " downstream stripping off device " of the present invention and " adsorption section, downstream " respectively.
In addition, then above-mentioned stripping, the adsorbed portion position SR (with reference to figure 11B) of substrate SB is kept while during making stripping be in progress at the absorption layer 537 by the 3rd absorbing unit 53, kept the stripping position PR of basic SB by the absorption layer 547 of the 4th absorbing unit 54 being positioned at the downstream of absorption layer 537 after, stripping is in progress further.At such stripping bench, 3rd absorbing unit 53 and absorption layer 537 play the function of " upstream side stripping off device " of the present invention and " upstream side adsorption section " respectively, and the 4th absorbing unit 54 and absorption layer 547 play the function of " downstream stripping off device " of the present invention and " adsorption section, downstream " respectively.
By like this along with the progress peeled off, the holding position of substrate SB is changed successively, thus reliably keep substrate SB, and easily can maintain the posture of the substrate SB after stripping.In addition, so stable peeling force can be given, while make stripping be in progress, therefore can also prevent the damage of pattern.In addition, by the dimensional configurations absorbing unit according to substrate SB, can the maximization of flexible counterpart substrate SB.
In addition, stripping position PR as above is the region after peeling off from blanket BL, abut with stripping position PR at the 2nd to the 4th absorbing unit 52 ~ 54 peeling off new sorbing substrate SB in progress, therefore by absorption at this moment, the pattern being transferred to substrate SB can not produce damage.
In addition, make along be in progress the stripper roll 340 that Y orthogonal X-direction in direction extends and be connected to substrate SB with peeling off, make stripper roll 340 be in progress direction with constant speed move, while lift substrate SB to peeling off.Therefore, it is possible to tempo will be peeled off keep constant, make to peel off well between substrate SB and blanket BL.
Further, in the 2nd to the 4th absorbing unit 52 ~ 54, the pressure in the absorption layer abutting the function confirming dual-purpose adsorption section is played by pressure gauge monitoring, to represent that the signal of force value exports control unit 70 to as positional information, this positional information represents the counter information of being close to the relative position in face of absorption layer relative to substrate SB.In addition, control unit 70, when the change based on the force value in absorbing unit decline process detects that this absorption layer abuts with substrate SB, starts to supply negative pressure to as the absorption layer keeping special adsorption section to play a role.Therefore, following action effect is obtained.
As mentioned above, under the state keeping a part (adsorbed portion position SB) of substrate SB at the absorption layer by playing a role as upstream side adsorption section, when making this absorption layer move from horizontal mounting table 31 make stripping carry out to+Z-direction, can not avoid that substrate SB's is bending.Further, amount of bow is different and different according to the rigidity of the clinging force between substrate SB and blanket BL and substrate SB etc.Therefore, the absorption layer position abutted with the stripping position PR of substrate SB in z-direction played a role as adsorption section, downstream is non-constant, and the condition according to clinging force etc. carries out displacement., monitoring absorbing unit force value in decline process, namely perform monitoring step, based on the change of force value, exactly detects absorption layer and peel off the abutting of position PR here, in the present embodiment as mentioned above.In addition, this abutting is detected as triggering beginning to special absorption layer supply negative pressure (set-up procedure) of maintenance.Its result, always can be in due course, and makes the stripping position of the absorption layer sorbing substrate SB being equivalent to adsorption section, downstream, thus stably can carry out lift-off processing.Further, the absorption layer being used for pressure monitor is defined in minority (being 3 in 25 in the present embodiment), therefore, it is possible to prevent the pressure in the absorption layer of sorbing substrate SB from declining to a great extent, thus stably can carries out lift-off processing.
B. the 2nd embodiment
Figure 12 A to Figure 12 D is the figure of the 2nd embodiment representing stripping off device of the present invention.The maximum distinctive points of the 2nd embodiment and the 1st embodiment is, confirm that the absorption layer that plays a role of dual-purpose adsorption section is arranged on the downstream as the absorption layer keeping special adsorption section to play a role as abutting, other structures are substantially identical with the 1st embodiment.Therefore, in following content, be described mainly for this distinctive points, be mark same reference numerals about identical structure division, omit the description.
In each absorbing unit 52 ~ 54 of 2nd embodiment, arranging 25 absorption layers along the X direction as keeping special adsorption section not only equally with absorbing unit 51, also two absorption layers being confirmed dual-purpose adsorption section as abutting.In addition, absorbing unit 52 ~ 54 can switch between the state of absorption layer supply negative pressure and the state of stopping supply negative pressure independently respectively by negative pressure feeding portion 528,538,548.These negative pressure feeding portions 528,538,548 have identical structure.Therefore, in following content, the structure about negative pressure feeding portion 528 is described, marks corresponding Reference numeral about remaining negative pressure feeding portion 538,548, its structure illustrates to be omitted.
Absorbing unit 52 has: 25 that arrange along the X direction keep special absorption layer 527; In the downstream that above-mentioned absorption layer arranges, two abuttings being configured in-X side and+X side confirm dual-purpose absorption layer 527z1,527z2.25 the special absorption layers 527 of maintenance being positioned at upstream side in these absorption layers are identical with the absorption layer 517 of absorbing unit 51, from-X-direction side direction+X-direction side is divided into 8,9,8 these 3 absorption layer groups.In addition, negative pressure feeding portion 528 has 3 manifolds 5281 ~ 5283, manifold 5281 is connected with 8 absorption layers 527 of the absorption layer group forming+X side, manifold 5282 is connected with 9 absorption layers 527 of the absorption layer group forming central authorities, and further manifold 5283 is connected with 8 absorption layers 527 of the absorption layer group forming-X side.
Each manifold 5281 ~ 5283 is connected with negative pressure generating part 704 via control valve V521.Therefore, when according to the OPEN from the valve control part 703 of control unit 70, when control valve V521 opens, negative pressure is supplied via manifold 5281 ~ 5283 to the special absorption layer 527 of maintenance.On the contrary, when according to the out code from valve control part 703, when control valve V521 closes, stop supplying negative pressure to the special absorption layer 527 of maintenance.As mentioned above, in the present embodiment, control valve V521 is as supplying the state of negative pressure to absorption layer 527 and stop the 1st switching part switched between the state of supply negative pressure to play a role, negative pressure can be supplied to the special absorption layer 527 of maintenance simultaneously, stop supply negative pressure in addition simultaneously.
In addition, abut confirmation absorption layer 527z1,527z2 and keep with+X side special absorption layer 527 and-X side to keep special absorption layer 527 to be connected respectively by connecting portion 529, can move freely along the Z direction integratedly with absorption layer 527.In addition, in the 2nd embodiment, be provided with two in downstream and abut confirmation absorption layer 527z1,527z2, but the number abutting confirmation absorption layer is not limited to " 2 ", it can be Arbitrary Digit, but from suppressing the viewpoint of negative pressure variation, be preferably set to than keeping the number that the number of special absorption layer is few.
In addition, negative pressure feeding portion 528, except above-mentioned control valve V521, also has control valve V522, abuts confirmation absorption layer 527z1,527z2 and is connected with negative pressure generating part 704 via control valve V522.Therefore, when control valve V522 opens according to the OPEN of the valve control part 703 from control unit 70, supply negative pressure to abutting confirmation absorption layer 527z1,527z2.On the contrary, when control valve V522 closes according to the out code from valve control part 703, stop supplying negative pressure to abutting confirmation absorption layer 527z1,527z2.As mentioned above, in the present embodiment, control valve V522 is as supplying the state of negative pressure to absorption layer 527z1,527z2 and stop the 2nd switching part switched between the state of supply negative pressure to play a role, negative pressure can be supplied to maintenance special absorption layer 527z1,527z2 simultaneously, stop supply negative pressure in addition simultaneously.
In the 2nd embodiment formed as described above, identically with the 1st embodiment, the upper surface keeping substrate SB is adsorbed by absorption layer 517, and stripper roll 340 is abutted with the upper surface of substrate SB in the adjacent position ,+Y side of absorption layer 517, after making press section 331 decline press the end of blanket BL further, make the 1st absorbing unit 51 start to rise, and action synchronously make stripper roll 340 move to+Y-direction therewith.Thus, risen by the 1st absorbing unit 51 kept the-Y side end (adsorbed portion SR) of substrate SB ,-Y the side end of substrate SB is lifted, to+Y-direction stripping substrate SB and blanket BL.
Then, when stripper roll 340 is through the 2nd absorption position, the 2nd absorbing unit 52 declines, and only opens control valve V522 according to the instruction from valve control part 703, supplies negative pressure from negative pressure generating part 704 to abutting confirmation absorption layer 527z1,527z2.In addition, keep stopping the state to keeping special absorption layer 527 to supply negative pressure.
Then, by monitoring the force value (monitoring step) in abutting confirmation absorption layer 527z1, the 527z2 measured by pressure gauge 5286 in the 2nd absorbing unit 52 decline process, when detecting that the stripping position of absorption layer 527z1,527z2 and substrate SB abuts against, according to the instruction unpack control valve V521 from valve control part 703, supply negative pressure (set-up procedure) from negative pressure generating part 704 to the special absorption layer 527 of maintenance.Thus, the stripping position of substrate SB is kept by whole absorption layers 527,527z1,527z2 absorption.
Begin through after keeping special absorption layer 527 sorbing substrate SB, the 2nd absorbing unit 52 starts to rise.Thus, peel off tempo and still controlled by stripper roll 340, and for what peel off, the main body that substrate SB lifts is become the 2nd absorbing unit 52 from the 1st absorbing unit 51.In addition, the substrate SB after stripping is from only being switched to the state kept by the 1st absorbing unit 51 and the 2nd son's wife's unit 52 by the state that the 1st absorbing unit 51 keeps, and holding position increases.In addition, when each absorbing unit 51 ~ 54 rises, the relative position in the Z-direction between each absorbing unit 51 ~ 54 is maintained, to make the posture of the substrate SB after stripping be general plane.
Then, at 3rd absorption position of stripper roll 340 immediately below the 3rd absorbing unit 53, the 3rd absorbing unit 53 starts to decline, and for what peel off, the main body that substrate SB lifts is become the 3rd absorbing unit 53 from the 2nd absorbing unit 52.The decline of the 3rd absorbing unit 53, absorption keep and the action of lift substrate identical with the action of the 2nd absorbing unit.Further, in stripper roll 340 after the 4th absorption position, the 4th absorbing unit 54 declines, and is lifted by substrate SB.At this moment, also perform with the decline of the 2nd absorbing unit 52, adsorb the identical action of the action that keeps and lift substrate.
Like this, lift substrate SB by the 4th absorbing unit 54, thus the entirety of substrate SB is separated with blanket BL.Afterwards, identically with the 1st embodiment, the substrate SB of separation and blanket BL is taken out of to outside device, terminate lift-off processing.
As above, in 2nd embodiment, such as, while keep substrate SB by absorption layer 517 while make between stripping progressive stage, utilize and be arranged on the absorption layer 527 that abuts confirmation absorption layer 527z1,527z2 comprising on the 2nd absorbing unit 52 behind the stripping position keeping substrate SB, stripping is in progress further.At this stripping bench, absorption layer 517,527 plays the effect of " upstream side adsorption section " of the present invention and " adsorption section, downstream " respectively.In addition, then above-mentioned stripping, keep substrate SB by absorption layer 527 and meanwhile make stripping be in progress during, after the absorption layer 537 (comprising absorption layer 537z1,537z2) in the downstream by being positioned at absorption layer 527 keeps the stripping position of substrate SB, stripping is in progress further.At this stripping bench, absorption layer 527 plays the effect of " upstream side adsorption section " of the present invention, and absorption layer 537 plays the effect of " adsorption section, downstream " of the present invention.And, then above-mentioned stripping, keep substrate SB by absorption layer 537 and meanwhile make stripping be in progress during, after the absorption layer 547 (comprising absorption layer 547z1,547z2) in the downstream by being positioned at absorption layer 537 keeps the stripping position of substrate SB, stripping is in progress further.At this stripping bench, absorption layer 537 plays the effect of " upstream side adsorption section " of the present invention, and absorption layer 547 plays the effect of " adsorption section, downstream " of the present invention.Therefore, the 2nd embodiment has played the action effect identical with embodiment 1.
C. the 3rd embodiment
Figure 13 A to Figure 13 D is the figure of the 3rd embodiment representing stripping off device of the present invention.Maximum distinctive points between 3rd embodiment and the 1st embodiment, the 2nd embodiment is, the obtain manner of positional information, this positional information is the anti-information being close to the relative position at stripping position PR (Figure 14, Figure 15) in face representing absorption layer and substrate SB.Namely, in above-mentioned 1st embodiment and the 2nd embodiment, monitoring confirms the pressure in the absorption layer that dual-purpose adsorption section plays a role as abutting, will represent that the signal of force value is as representing that the anti-positional information being close to the relative position in face of absorption layer and substrate SB exports to control unit 70.Be directed to this, in the stripping off device of the 3rd embodiment, by the distance between laser displacement gauge monitoring absorption layer and the stripping position PR of substrate SB, the signal of the distance measured by expression exported to control unit 70 as above-mentioned positional information.Below, with reference to Figure 13 A ~ 13C, be described the feature structure of the stripping off device of embodiment 3, about the structure identical with the 1st embodiment represents with identical Reference numeral, it illustrates omission.
In the 3rd embodiment, absorbing unit 51 is identical with the 1st embodiment and the 2nd embodiment.In addition, in each absorbing unit 52 ~ 54, be not only arranged with 25 absorption layers along the X direction identically with absorbing unit 51, and be provided with a laser displacement gauge 530.In addition, absorbing unit 52 ~ 54 can switch between the state of absorption layer supply negative pressure and the state of stopping supply negative pressure independently respectively by negative pressure feeding portion 528,538,548.These negative pressure feeding portions 528,538,548 have identical structure.Therefore, in following explanation, be described for negative pressure feeding portion 528, remaining negative pressure feeding portion 538,548 marked with corresponding Reference numeral, omission is described.
Absorbing unit 52 has 25 the special absorption layers 527 of maintenance arranged along the X direction; Be configured in the laser displacement gauge 530 in the downstream of above-mentioned absorption layer row.25 absorption layers 527 play the effect of the special adsorption section of above-mentioned absorption, identical with the absorption layer 517 of absorbing unit 51, from-X-direction side direction+X-direction side is divided into 8,9,8 these 3 absorption layer groups.In addition, negative pressure feeding portion 528 has 3 manifolds 5281 ~ 5283, manifold 5281 is connected with 8 absorption layers 527 of the absorption layer group forming-X side, manifold 5182 is connected with 9 absorption layers 527 of the absorption layer group forming central authorities, further, manifold 5283 is connected with 8 absorption layers 527 of the absorption layer group forming+X side.
Each manifold 5281 ~ 5283 is connected with negative pressure generating part 704 via control valve V52.Therefore, when control valve V52 opens according to the OPEN of the valve control part 703 from control unit 70, negative pressure is supplied via manifold 5281 ~ 5283 to whole absorption layers 527.On the contrary, when according to out code closed control valve V52 from valve control part 703, stop supplying negative pressure to whole absorption layers 527.Thus, in the present embodiment, control valve V52 as supplying the state of negative pressure to absorption layer 527 and stopping the switching part switching between the state of supply negative pressure to play a role, can supply negative pressure to absorption layer 527 simultaneously, can stop in addition supplying negative pressure simultaneously.
Laser displacement gauge 530 is connected with the absorption layer 527 being positioned at central portion in the X direction in 25 absorption layers by connecting portion 529, can move along the Z direction integratedly with absorption layer 527.Therefore, laser displacement gauge 530 measures the distance between the stripping position PR of absorption layer 527 and substrate SB, the signal associated is exported as positional information to control unit 70 with this distance.Like this, laser displacement gauge 530 is equivalent to an example of " supervising device " of the present invention and " distance measuring portion ", but the number of laser displacement gauge 530 and setting position are not limited thereto, and can be arbitrary.As long as the device of above-mentioned distance can be measured, the distance measuring portion beyond laser displacement gauge can be used, such as, can take absorption layer 527 and substrate SB from the+X side of mounting table 30 or-X side in the lump and try to achieve above-mentioned distance according to image.
Secondly, with reference to Figure 14 and Figure 15, the action of the stripping off device of the 3rd embodiment formed as above is described.Figure 14 level Figure 15 is the figure being shown schematically in the position relationship of each stage each several part in the process of the 3rd embodiment and the negative pressure feeding state in negative pressure feeding portion.In the 3rd embodiment formed like this, identical with the 1st embodiment,-Y the side end of substrate SB is adsorbed maintenance as adsorbed portion position SR by absorption layer 517, and stripper roll 340 is abutted against in the adjacent position ,+Y side of absorption layer 517 and the upper surface of substrate SB, and then make press section 331 decline press the end of blanket BL after, time the 1st absorbing unit 51 start to rise, and action synchronously makes stripper roll 340 move to+Y-direction therewith.Thus, the 1st absorbing unit 51 kept by-Y the side end (adsorbed portion position SR) to substrate SB is risen, and substrate SB is lifted, and peels off towards+Y-direction substrate SB and blanket BL.
In addition, as shown in figure 14, in stripper roll 340 through the 2nd absorption position, the 2nd absorbing unit 52 declines, and starts to monitor the distance (distance between the stripping position PR of absorption layer 527 and substrate SB) measured by laser displacement gauge 530.In addition, in this stage, keep the state stopping supplying negative pressure to whole absorption layers 527.
Then, when detect in the 2nd absorbing unit 52 decline process above-mentioned distance reach the following absorption layer 527 of threshold value abut with the stripping position PR of substrate SB time, as shown in figure 15, control valve V52, according to the instruction unpack from valve control part 703, supplies negative pressure from negative pressure generating part 704 to the special absorption layer 527 of maintenance.Therefore, the stripping position PR of substrate SB is kept by the absorption of whole absorption layers 527.
After beginning through absorption layer 527 sorbing substrate SB, the 2nd absorbing unit 52 starts to rise.Then, identical with the 1st embodiment, when 3rd absorption position of stripper roll 340 immediately below the 3rd absorbing unit 53, the 3rd absorbing unit 53 starts to decline.For what peel off, the main body that substrate SB lifts is become the 3rd absorbing unit 53 from the 2nd absorbing unit 52.The decline of the 3rd absorbing unit 53, absorption keep and the action of lift substrate identical with the action of the 2nd absorbing unit.Further, in stripper roll 340 after the 4th absorption position, the 4th absorbing unit 54 declines, lift substrate SB.At this moment, also perform with the decline of the 2nd absorbing unit 52, adsorb the identical action of the action that keeps and lift substrate.
Lift substrate SB by the 4th absorbing unit 54, the entirety of substrate SB is separated with blanket BL.Afterwards, identical with the 1st embodiment, the substrate SB of separation and blanket BL is taken out of to outside device, thus terminates lift-off processing.
As mentioned above, in the 3rd embodiment, such as, during kept substrate SB to make stripping be in progress by absorption layer 517, behind the stripping position being kept substrate SB by the absorption layer 527 be arranged on the 2nd absorbing unit 52, stripping is in progress further.This stripping bench, absorption layer 517,527 plays the effect of " upstream side adsorption section " of the present invention and " adsorption section, downstream " respectively.In addition, then above-mentioned stripping, during kept substrate SB to make stripping be in progress by absorption layer 527, after keeping the stripping position of substrate SB, makes stripping be in progress further at the absorption layer 537 in the downstream by being positioned at absorption layer 527.This stripping bench, absorption layer 527 plays the effect of " upstream side adsorption section " of the present invention, and absorption layer 537 plays the effect of " adsorption section, downstream " of the present invention.Further, then above-mentioned stripping, during kept substrate SB to make stripping be in progress by absorption layer 537, after keeping the stripping position of substrate SB, makes stripping be in progress further at the absorption layer 547 in the downstream by being positioned at absorption layer 537.This stripping bench, absorption layer 537 plays the effect of " upstream side adsorption section " of the present invention, and absorption layer 547 plays the effect of " adsorption section, downstream " of the present invention.Therefore, the 3rd embodiment plays the action effect identical with the 1st embodiment.
In addition, in the 3rd embodiment, based on the distance measured by laser displacement gauge 530, adjust the beginning opportunity (set-up procedure) supplying negative pressure to absorption layer 527,537,547.Therefore, avoid supplying negative pressure under absorption layer is not close to the state that face abuts with substrate SB counter, effectively can suppress the negative pressure value change supplied from negative pressure generating part 704 to each absorbing unit.
Further, in above-mentioned 1st embodiment in the 3rd embodiment, blanket BL and substrate SB is equivalent to an example of " the 1st plate body " of the present invention and " the 2nd plate body " respectively.
D. other
The present invention is not limited to above-described embodiment, only otherwise exceed its aim, except above-described embodiment, can also carry out various change.Such as, in the above-described embodiments, mounting table 30 is provided with cancellate adsorption tank 311,312 and adsorbs maintenance blanket BL, but the shape of adsorption tank is not limited thereto.Such as, the adsorption tank of ring-type can be set, in addition, the adsorption hole of supply negative pressure also suitably can be set to adsorb blanket.
In addition, in the above-described embodiments, keep substrate and blanket by vacuum suction, but hold mode is not limited thereto.Such as, also can keep by electrostatic or magnetic adsorbability absorption.Especially keep the 1st stripping off device outside the effective coverage of substrate, by absorption, and can not mechanically keep substrate periphery portion, keep.
In addition, in the above-described embodiments, with the rising making the posture of the substrate SB after the stripping mode be maintained close to the state of plane control each absorbing unit 51 ~ 54, be that the stress acting on substrate SB reduces, but the mode of lift substrate SB is not limited thereto.Such as, to make the approximate horizontal mode of the substrate after stripping make each absorbing unit stop at constant altitude, or substrate holding has the posture that certain curvature is bending.By controlling the rising manner of each absorbing unit, freely can set.
In addition, in above-described embodiment, 4 absorbing units are arranged on the top of substrate SB, successively sorbing substrate SB, but the number of absorbing unit being not limited thereto, can be arbitrary.If substrate is large substrate, then multiple absorbing unit can be set, if small-sized, then less absorbing unit can be set.
In addition, in the above-described embodiments, making blanket BL give prominence to remains in inclination mounting table 32, by press section 331, blanket BL is bent, manufacture the opportunity of stripping, but these can not be necessary conditions, such as, the pull lift action by means of only the 1st absorbing unit just can start to peel off.At this moment, do not need to arrange rake in mounting table.
The present invention makes two panels plate body be close to come except the stripping process of pattern formation processing of pattern transferring etc. except being applied to, be not limited to the device with pattern transfer printing as above, go in various objects that the two panels plate body be mutually close to is peeled off well.
Claims (12)
1. a stripping off device, for peeling off the 1st plate body and the 2nd plate body be mutually close to, is characterized in that having:
Holding device, keeps described 1st plate body,
Upstream side stripping off device, have and carry out adsorbing the upstream side adsorption section kept to the anti-part being close to face of described 2nd plate body, this is counter is close to the face that face is the opposition side in the face be close to mutually with described 1st plate body in the surface of described 2nd plate body, while by described 2nd plate body of described upstream side adsorption section absorption while make described upstream side adsorption section and described holding device be separated, make being peeled off from described 1st plate body by the adsorbed portion position of described upstream side adsorption section absorption of described 2nd plate body, come to peel off described 2nd plate body to stripping progress direction
Downstream stripping off device, downstream and the described counter of described 2nd plate body with the described adsorbed portion position on described stripping progress direction are close to the adsorption section, downstream arranged face to face, make adsorption section, described downstream move to the stripping position of being peeled off by described upstream side stripping off device in described 2nd plate body to adsorb described stripping position described counter be close to face after, adsorption section, described downstream is separated with described holding device with the state of adsorbing described 2nd plate body, come to peel off described 2nd plate body to described stripping progress direction
Supervising device, monitors the described anti-relative position be close between face of adsorption section, described downstream and described 2nd plate body,
Control device, based on the positional information relevant to the described relative position obtained by described supervising device, controls adsorption section, described downstream and starts to adsorb described 2nd plate body.
2. stripping off device according to claim 1, is characterized in that,
Described downstream stripping off device has:
Play the 1st adsorption section and the 2nd adsorption section of the effect of adsorption section, described downstream,
1st switching part, is switching between the state and the state stopping supplying negative pressure of described 1st adsorption section supply negative pressure,
2nd switching part, is switching between the state and the state stopping supplying negative pressure of described 2nd adsorption section supply negative pressure;
During described 1st adsorption section and described 2nd adsorption section are integratedly close to described stripping position, stop to described 1st adsorption section supply negative pressure by described 1st switching part, on the other hand, by described 2nd switching part to described 2nd adsorption section supply negative pressure,
Described supervising device has the pressure measxurement portion of the pressure measuring described 2nd adsorption section, the force value measured is exported as described positional information by described pressure measxurement portion,
Described control device, according to the change of the described force value in the process moved to described stripping portion displacement in described 1st adsorption section and described 2nd adsorption section, controls described 1st switching part and starts to described 1st adsorption section supply negative pressure.
3. stripping off device according to claim 2, is characterized in that, described 1st adsorption section and described 2nd adsorption section being in progress the vertical width in direction arranging with described stripping along described 2nd plate body.
4. stripping off device according to claim 3, it is characterized in that, the two ends being positioned at described width in adsorption section, multiple described downstream and the adsorption section, described downstream of central portion are described 2nd adsorption sections, and remaining adsorption section, described downstream is described 1st adsorption section.
5. stripping off device according to claim 2, is characterized in that, described 2nd adsorption section is arranged on the downstream of described described 1st adsorption section of peeling off on progress direction.
6. stripping off device according to claim 5, is characterized in that,
The adsorption section, described downstream of described downstream stripping off device has:
Be in progress with described stripping multiple described 1st adsorption section that the vertical width in direction arranges along described 2nd plate body,
Described 2nd adsorption section that number is fewer than described 1st adsorption section.
7. stripping off device according to claim 1, is characterized in that,
Described downstream stripping off device has downstream switching part, this downstream switching part supplies between the state of negative pressure in the state from negative pressure to adsorption section, described downstream and stopping that supplying and switches, during adsorption section, described downstream is close to described stripping position, stop to adsorption section, described downstream supply negative pressure
Described supervising device has distance measuring portion, the described anti-distance be close between face and adsorption section, described downstream of described 2nd plate body in the process that described distance measuring portion moves to described stripping portion displacement adsorption section, described downstream is carried out measurement and is used as described positional information
Described control device controls described downstream switching part, and the moment that to make in described distance be below threshold value starts to adsorption section, described downstream supply negative pressure.
8. stripping off device according to claim 7, is characterized in that, described distance measuring portion is mobile while measure the displacement meter of described distance with adsorption section, described downstream one.
9. stripping off device according to any one of claim 1 to 8, is characterized in that,
Described adsorbed portion position is the upstream end thereof of described anti-described described 2nd plate body peeled off on progress direction be close in face of described 2nd plate body,
State from negative pressure to described upstream side adsorption section and stopping that described upstream side stripping off device has supplying supply the upstream side switching part switched between the state of negative pressure,
Described upstream side switching part in described upstream side adsorption section to during described adsorbed portion movement, stop to described upstream side adsorption section supply negative pressure, when described upstream side adsorption section abuts with described adsorbed portion position, start to described upstream side adsorption section supply negative pressure.
10. a stripping means, peel off for the 1st plate body that will mutually be close to and the 2nd plate body, it is characterized in that, comprising:
Keep step, keep described 1st plate body by holding device,
1st strip step, while adsorbed the anti-part being close to face of described 2nd plate body by Xi Ce adsorption section, upstream, while make described upstream side adsorption section be separated with described holding device, make being peeled off from described 1st plate body by the adsorbed portion position of described upstream side adsorption section absorption of described 2nd plate body, and peel off described 2nd plate body to stripping progress direction, wherein, this is instead close to the face that face is the opposition side in the face be close to mutually with described 1st plate body in the surface of described 2nd plate body
Mobile step, adsorption section, downstream is moved towards the described anti-face of being close at the stripping position in described 2nd plate body, this stripping position refers to, in the downstream of described described adsorbed portion position of peeling off on progress direction, described upstream side adsorption section is separated with described holding device thus the position that is stripped of described 2nd plate body
Monitoring step, is close in the process of face movement to the described counter of described stripping position in adsorption section, described downstream, monitors the described anti-relative position be close between face of adsorption section, described downstream and described 2nd plate body,
Set-up procedure, based on the positional information relevant to described relative position, adjusts the opportunity starting to adsorb described 2nd plate body by adsorption section, described downstream,
2nd strip step, while started to adsorb described 2nd plate body by adsorption section, described downstream, or after started to adsorb described 2nd plate body by adsorption section, described downstream, adsorption section, described downstream is separated with described holding device with the described anti-state being close to face of adsorbing described stripping position, comes to peel off described 2nd plate body to described stripping progress direction.
11. stripping means according to claim 10, is characterized in that,
Be provided with the 1st adsorption section as adsorption section, described downstream and the 2nd adsorption section,
In described mobile step, stop to described 1st adsorption section supply negative pressure, on the other hand to described 2nd adsorption section supply negative pressure,
In described monitoring step, measure the pressure of described 2nd adsorption section, force value exported as described positional information,
In described set-up procedure, according to the change of the described force value in the process moved to described stripping portion displacement in described 1st adsorption section and described 2nd adsorption section, start to described 1st adsorption section supply negative pressure.
12. stripping means according to claim 10, is characterized in that,
In described mobile step, stop to adsorption section, described downstream supply negative pressure,
In described monitoring step, the described anti-distance be close between face and adsorption section, described downstream measuring described 2nd plate body is used as described positional information,
In described set-up procedure, when described distance is below threshold value, start to adsorption section, described downstream supply negative pressure.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-013652 | 2014-01-28 | ||
| JP2014013652A JP6246605B2 (en) | 2014-01-28 | 2014-01-28 | Peeling apparatus and peeling method |
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| CN104802498A true CN104802498A (en) | 2015-07-29 |
| CN104802498B CN104802498B (en) | 2017-01-11 |
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| Country | Link |
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| JP (1) | JP6246605B2 (en) |
| KR (1) | KR101588979B1 (en) |
| CN (1) | CN104802498B (en) |
| TW (1) | TWI528105B (en) |
Cited By (3)
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| CN107195577A (en) * | 2017-05-08 | 2017-09-22 | 深圳市华星光电技术有限公司 | Substrate turnover device and its method for departing from substrate |
| CN107813594A (en) * | 2016-09-13 | 2018-03-20 | 株式会社斯库林集团 | Stripping off device and stripping means |
| CN116162905A (en) * | 2021-11-25 | 2023-05-26 | 佳能特机株式会社 | Substrate carrier, substrate peeling device, film forming device, and substrate peeling method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7465197B2 (en) * | 2019-12-17 | 2024-04-10 | 芝浦メカトロニクス株式会社 | Element mounting equipment |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN104802498B (en) | 2017-01-11 |
| JP6246605B2 (en) | 2017-12-13 |
| JP2015141992A (en) | 2015-08-03 |
| TWI528105B (en) | 2016-04-01 |
| KR101588979B1 (en) | 2016-01-26 |
| TW201535043A (en) | 2015-09-16 |
| KR20150089916A (en) | 2015-08-05 |
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