CN103386823A

CN103386823A - Pattern forming apparatus

Info

Publication number: CN103386823A
Application number: CN2013101203403A
Authority: CN
Inventors: 中嶋美佳; 增市干雄; 川越理史; 上野博之
Original assignee: Dainippon Screen Manufacturing Co Ltd
Current assignee: Dainippon Screen Manufacturing Co Ltd
Priority date: 2012-05-10
Filing date: 2013-04-09
Publication date: 2013-11-13
Anticipated expiration: 2033-04-09
Also published as: KR20130126461A; CN103386823B; JP2013233756A; TW201400318A; TWI507304B; KR101489055B1; JP5878821B2

Abstract

The invention provides a pattern forming apparatus which performs pattern formation by abutting a pattern forming area (A1) on a load bearer (BL) with a plate-shaped piece (PP) and adsorbing the plate-shaped piece (PP) to the outer side of an area (A2) opposite to the pattern forming area (A1) in the formation of the pattern. In particular, a groove-shaped opening (351) supplied with negative pressure is formed at the outer side of an area (A3) in an adsorption plate (34), wherein the area (A3) is opposite to the area (A2) of the plate-shaped piece (PP) in the formation of the pattern, and further, the outer side of the opening (351) is provided with local adsorption parts (352) for locally adsorbing the plate-shaped piece (PP).

Description

Patterning device

Technical field

The present invention relates to support body and the tabular object cause object that connects and form pattern or by supporting body, form the device of pattern to object to supporting body by making.

Background technology

As above-mentioned such device, known example invention as described in Patent Document 1 in the past.In this invention,, blanket (supporting body) and version (object) are connected after forming patterned layer on blanket, make at formed patterned layer and substrate (object) on blanket and connect patterned layer is transferred on substrate.

The prior art document

Patent documentation 1: TOHKEMY 2010-158799 communique

In this art, although need to object remained under the state of position of regulation make object and support body and connect, in patent documentation 1 about how to keep object there is no concrete record., at this,, as the method that keeps object, can utilize for example adsorption technology.This is to supply with negative pressure by the absorbing unit to such as absorption layer etc. to adsorb to form decompression state the technology that keeps object.Yet, keep object by absorption, likely produce following such problem.That is, when the tabular object to version, substrate etc. carried out part absorption maintenance, the part that these are adsorbed can be recessed, likely can not carry out good pattern in this part and form.In addition, form in relative zone, zone in the situation that absorption tabular object in a plurality of position make the flatness deterioration of object because of the difference of adsorption strength, thereby it is bad to cause that likely pattern forms at the pattern with supporting body.

Summary of the invention

The present invention proposes in view of the above problems, and its purpose is, provides a kind of and can carry out well the patterning device that pattern forms.

To achieve these goals, patterning device of the present invention makes the pattern that supports on body form zone and offsets to fetch with tabular object and form pattern, and it is characterized in that having: the negative pressure feeding unit is used for supplying with negative pressure; Absorbing unit, utilize the negative pressure of being supplied with by the negative pressure feeding unit to adsorb the maintenance object, and absorbing unit adsorbs the outside that forms regional zone in opposite directions with pattern when forming pattern on object.

According to the present invention, being adsorbed with the outside that supports pattern on body and form zone (hereinafter referred to as " effective coverage ") in opposite directions, zone when forming pattern in tabular object.That is, because the effective coverage of object is not adsorbed, so can prevent from occurring the depression of the part that is caused by absorption and the decline of flatness in effective coverage.Its result, can carry out well pattern and form.

At this, in patterning device of the present invention, preferred absorbing unit has: adsorption plate, this adsorption plate be used for form the outside in zone in opposite directions, zone with pattern on adsorption plane that absorption keeps object, be provided with the opening of being supplied with negative pressure by the negative pressure feeding unit; A plurality of local adsorption sections, the ratio pattern on object form zone more in the outer part, zone, and a plurality of local adsorption sections difference is absorbent bodies partly.

Like this, by form the outside formation opening in zone in opposite directions, zone with pattern when forming pattern in the adsorption plane of adsorption plate, thereby this opening adsorbs the outside of the effective coverage of object.In addition, a plurality of local adsorption sections adsorption patterns forms the outside in zone, thereby makes the outside of the effective coverage of a plurality of local adsorption sections absorbent bodies.And then,, as absorbing unit, comprise the adsorption plate with opening and can adsorb a plurality of local adsorption section that keeps regional area, thereby can suitably separately use the mode of absorption maintenance according to each operation, form thereby can the most suitably carry out pattern.

In addition, the local adsorption section of at least a portion in preferred a plurality of local adsorption sections is that the absorption layer of strain can occur on specific direction, and this specific direction refers to, after making object and supporting body and connect, makes object and the direction that supports body and separate.Make object and supporting after body connects when making object and supporting peeling off that body separates, tabular object is likely stretched and is out of shape to supporting side, causes object damaged.Yet, keep at least a portion of a plurality of local adsorption sections of object that the absorption layer of strain can occur on detaching direction if make absorption when peeling off, when peeling off object by when supporting side and stretch by making absorption layer generation strain, can suppress the distortion of object.Its result, can be suppressed at object tabular while peeling off and occur damaged.

In addition, preferred opening forms the adsorption tank in regional zone in opposite directions for surrounding on adsorption plane with pattern when forming pattern.Like this,, if the opening that will form is made adsorption tank, can reduce aperture area on adsorption plate.Its result, owing to can being reduced to that absorption keeps object and the negative pressure amount that should supply with to the opening of adsorption plate, so can adsorb fast maintenance.In addition, this adsorption tank by surround in adsorption plate when pattern forms and pattern form regional zone in opposite directions, can stably keep by adsorption plate the effective coverage of object.

In addition, preferred a plurality of local adsorption section on adsorption plate than adsorption tank more in the outer part.In the situation that utilize a plurality of local adsorption section absorption to keep tabular object, object likely bends between each local adsorption section.Yet,, if a plurality of local adsorption sections are configured in the outside of adsorption tank, can suppress crooked impact and involve the effective coverage of the object of the inboard that is positioned at adsorption tank.Therefore, can carry out more well pattern forms.

According to the present invention, being adsorbed with the outside that supports pattern on body and form effective coverage in opposite directions, zone when pattern forms in tabular object, effective coverage can not be adsorbed.Therefore, can prevent the depression of part of the effective coverage that is caused by absorption and the decline of flatness, thereby can carry out well pattern, form.

Description of drawings

Fig. 1 means the stereogram of the printing equipment that is equipped with patterning device of the present invention.

Fig. 2 is the figure that schematically shows the section of printing equipment shown in Figure 1.

Fig. 3 shows the block diagram of electrical structure of the device of Fig. 1.

Fig. 4 shows the flow chart of molar behavior of the printing equipment of Fig. 1.

Fig. 5 means the stereogram of the configuration of absorbing unit.

Fig. 6 A and Fig. 6 B are the figure of the adsorption method of explanation version.

The explanation of Reference numeral

34 adsorption plates

64 valve control parts (negative pressure feeding unit)

351 adsorption tanks (opening)

352 absorption layers (local adsorption section)

BL blanket (supporting body)

PP version (object)

SB substrate (object)

V31, V32 valve (negative pressure feeding unit)

The specific embodiment

Fig. 1 means the approximate three-dimensional map of the printing equipment that is equipped with patterning device of the present invention, in order the structure of device inside clearly to be shown, to illustrate the state that unloads after crust of the device.In addition, Fig. 2 is the figure that schematically shows the section of printing equipment shown in Figure 1.And Fig. 3 shows the block diagram of electrical structure of the device of Fig. 1.With regard to printing equipment 100, make the upper surface of moving into the blanket of device inside from the face side of device, cling to after the left surface side of device is moved into the lower surface of version PP of auto levelizer inside and peel off again, utilize thus the pattern on the lower surface be formed on edition PP to portray pattern with formation patterned layer (pattern is portrayed processing) on the coating layer of blanket.In addition, with regard to printing equipment 100, make and carried out pattern and portray the upper surface of the blanket of processing, cling to after the right flank side of device is moved into the lower surface of substrate SB of auto levelizer inside and peel off again, will be formed on thus on the lower surface that patterned layer on this blanket is transferred to substrate SB (transfer process).In addition, in Fig. 1 and each figure of illustrating later,, in order clearly to install the configuration relation of each one, with the conveyance direction setting of version PP and substrate SB, be " directions X ", to be called "+directions X " from the horizontal direction of right side towards left side of Fig. 1, rightabout will be called " directions X ".In addition, the face side of the device in will the horizontal direction vertical with directions X is called "+Y-direction ", and the rear side that will install is called " Y-direction ".And upper direction and the lower direction on vertical is called "+Z direction " and reaches " Z direction ".

In this printing equipment 100, be provided with each one of device (conveying unit 2, upper objective table section 3, location division 4, lower objective table section 5, press section 7, pre-determined bit section 8, except electric section 9) on stone platform 1,6 pairs of each ones of device control by control part.

Conveying unit 2 is the devices of conveyance version PP and substrate SB on directions X, and following formation.In this conveying unit 2, from vertical 2 supports (omitting diagram) that are provided with in right back bight and left back bight of the upper surface of stone platform 1.And ball screw mechanism 21 is to extend and arrange on directions X in the interconnective mode in the upper end with these two supports at left and right directions.In this ball screw mechanism 21, ball screw (omitting diagram) extends on directions X, and an end of ball screw is connected with the rotating shaft (omitting diagram) of motor M21 with reciprocal carrier horizontal drive.In addition, ball screw support (omit diagram) is screwed on the central portion of ball screw, and the ball screw support (+Y) side is equipped with and extends the reciprocal carrier holding plate 22 that arranges on directions X.

This reciprocal carrier holding plate 22 (+X) side end is provided with version with reciprocal carrier 23L in mode that can lifting on vertical Z, on the other hand, (X) side end is provided with substrate with reciprocal carrier 23R in mode that can lifting on vertical Z.Because these

reciprocal carrier

23L and 23R have identical structure except the rotating mechanism of hand, thereby in the structure of this explanation version with reciprocal carrier 23L, substrate is marked identical Reference numeral or suitable Reference numeral and the elliptical structure explanation with reciprocal carrier 23R.

Back and forth carrier 23L has: lifter plate 231, and this lifter plate 231 extends on directions X, and has and the width dimensions of width dimensions (directions X size) same degree of version PP or the width dimensions more longer than the width dimensions (directions X size) of version PP; Two versions are with hands 232,232, from lifter plate 231 (+X) side end and (X) side end towards front side be respectively (+Y) side is extended and is arranged.Lifter plate 231 via ball screw mechanism (omit diagram) can be arranged on up and down reciprocal carrier holding plate 22 (+X) on side end.That is, back and forth carrier holding plate 22 (+X) on side end, extend and be provided with ball screw mechanism on vertical Z., in the lower end of this ball screw mechanism, be connected with version with reciprocal carrier lift motor M22L(Fig. 3) rotating shaft (omit and illustrate).In addition, be screwed with ball screw support (omit diagram) on ball screw mechanism, and this ball screw support (+Y) side is equipped with lifter plate 231.Therefore, version is carried out work with reciprocal carrier lift motor M22L according to the action command of the motor control section 63 from control part 6, drives thus lifter plate 231 lifting on vertical Z.

Each hand 232,232 front and back size (Y-direction size) are longer than the length dimension (Y-direction size) of version PP, can enough each hands 232,232 front (+Y side) keeps a version PP.

In addition,, in order to detect such situation of version PP that kept with hand 232,232 with version, from the central portion of lifter plate 231, towards (ten Y) side, via sensor stand, the sensor (omitting diagram) that version detects use is installed.Therefore, placed version during PP on two hands 232, sensor detects the i.e. (Y) side end, and export detection signal to control part 6 of rearward end of publishing PP.

And then each edition is arranged on lifter plate 231 via bearing (omitting diagram) with hand 232,232, and can rotate freely take the rotating shaft in the upper extension of fore-and-aft direction (Y-direction) as pivot.In addition, on the directions X two ends of lifter plate 231, rotary actuator RA2, RA2(Fig. 3 are installed).These rotary actuators RA2, RA2 move take forced air as drive source, are arranged on the valve (omitting diagram) on the feed path of forced air by switching and can be rotated take 180 ° as unit.Therefore, utilize the valve control part 64 of control part 6 to control the switching of above-mentioned valve, thus can version with hand 232, an interarea of 232 towards above and the hand posture of version PP before being suitable for portraying pattern (below, be referred to as " not using posture ") and the hand posture of the version PP of another interarea after being suitable for pattern Processing towards top and portraying (below, be referred to as " having used posture ") between, switching hand posture.Like this, to have hand posture switching mechanism this point be version with reciprocal carrier 23L and substrate with the unique difference of reciprocal carrier 23R.

Secondly, illustrate on reciprocal carrier holding plate 22 edition with reciprocal carrier 23L and the substrate installation site with reciprocal carrier 23R.In the present embodiment, as shown in Figure 2, version separates than the width dimensions of version PP or substrate SB (in addition with reciprocal carrier 23R with reciprocal carrier 23L and substrate on directions X, in embodiment, PP is identical with the width dimensions of substrate SB for version) longer interval and being arranged on reciprocal carrier holding plate 22.And when the axial rotary prescribed direction rotation that makes reciprocal carrier horizontal drive motor M21, two

reciprocal carrier

23L, 23R move on directions X under the state that keeps above-mentioned partition distance.For example in Fig. 2, Reference numeral XP23 represent objective table section 3 under position, back and forth

carrier

23L, 23R are positioned at from position XP23 respectively to (+X) direction and (X) direction is left position XP22, the XP24 of equidistant (this distance being called " interval Moving Unit ").In addition, in the present embodiment, state shown in Figure 2 is called " centre position state ".

In addition, the axial rotary prescribed direction that makes reciprocal carrier horizontal drive motor M21 rotate to make reciprocal carrier holding plate 22 from this centre position state to (+when X) direction moves the interval Moving Unit, substrate with reciprocal carrier 23R to (+X) direction move and running fix to position XP23 under upper objective table section 3.At this moment, version with reciprocal carrier 23L also with the one mode to (+X) direction moves, thereby be positioned at and (+X) the close position XP21 of the version cleaning device (omit and illustrate) of direction side configuration at printing equipment 100.

In contrast, the axial rotary direction rotation opposite with prescribed direction by making reciprocal carrier horizontal drive motor M21 make reciprocal carrier holding plate 22 to (when X) direction moves the interval Moving Unit, version with reciprocal carrier 23L from middle location status to (X) direction moves also running fix to position XP23 under upper objective table section 3.At this moment, substrate with reciprocal carrier 23R also in the one mode to (X) direction moves, thereby navigates to and (X) the close position XP25 of the base plate cleaning device of direction side configuration (omitting diagram) at printing equipment 100.Like this, in this manual,, as the reciprocal carrier position on directions X, 5 position XP21～XP25 have been stipulated.That is, the position of the most close edition cleaning device in version delivery position XP21 3 position XP21～XP23 that to be version be positioned with reciprocal carrier 23L, refer to and the version cleaning device between carry out the directions X position that moving into of edition PP taken out of.The position of close base plate cleaning device in substrate transfer position XP25 3 position XP23～XP25 that to be substrate be positioned with reciprocal carrier 23R, refer to and base plate cleaning device between carry out the directions X position that moving into of substrate SB taken out of.In addition, position XP23 refers to adsorption plate 34 mobile directions X position that keeps version PP or substrate SB of adsorbing on vertical Z of objective table section 3.In this manual, when version is positioned at directions X position XP23 with reciprocal carrier 23L, this position XP23 is called " version absorption position XP23 ", and when substrate is positioned at directions X position XP23 with reciprocal carrier 23R, this position XP23 is called " substrate adsorption position XP23 ".In addition, with utilize so

reciprocal carrier

23L, 23R come on the vertical Z of conveyance version PP or substrate SB position, be that height and position is called " conveyance position ".

In addition, in the present embodiment, the substrate SB when the version PP while in order to control exactly, portraying pattern and the gap value between blanket and transfer printing and the gap value between blanket, need the thickness of instrumentation version PP and substrate SB.Therefore, be provided with edition thickness measurement sensor SN22 and substrate thickness measurement sensor SN23.In addition, in the present embodiment, utilize the reflection type optical sensor two sensors with light-projecting portion and light accepting part as SN22, SN23, but also can utilize the sensor except this optical pickocff.

Facing position XP23 disposes objective table section 3.In objective table section 3, be fixed with and extend the ball screw mechanism 31 that arranges on vertical Z on this, the upper end of this ball screw mechanism 31 is connected with the rotating shaft (omitting diagram) of the 1st lifting of object loading table motor M31.And, be screwed with ball screw support (omitting diagram) on ball screw mechanism 31.Be fixed with carriage 32 on this ball screw support, with the ball screw support integratedly in vertical Z lifting.And then, in the frame face upper support of this carriage 32, other ball screw mechanism (omitting diagram) is arranged.Be provided with the less ball screw of pitch of the ball screw of the above-mentioned ball screw mechanism 31 of pitch ratio on this ball screw mechanism, its upper end and the 2nd lifting of object loading table motor M32(Fig. 3) rotating shaft (omit diagram) be connected, and at central portion, be screwed with the ball screw support.

On this ball screw support, loading stand 33 is installed.In addition, the lower surface at loading stand 33 is equipped with the adsorption plate 34 of making such as metals such as aluminium alloys.Thus, lifting of object loading table motor M31, M32 carry out work according to the action command of the motor control section 63 from control part 6, thus adsorption plate 34 lifting moving on vertical Z.In addition, in the present embodiment, the ball screw mechanism that combination has different pitch, thus, carry out work and with wider pitch, make adsorption plate 34 liftings by making the 1st lifting of object loading table motor M31, namely can make adsorption plate 34 high-speed mobile.In addition, by making the 2nd lifting of object loading table motor M32 carry out work, with smaller pitch, make adsorption plate 34 liftings, namely can critically position adsorption plate 34.

At the lower surface of this adsorption plate 34, namely be provided with adsorbing mechanism on the adsorption plane of absorption maintenance version PP or substrate SB, this adsorbing mechanism is connected with the negative pressure feeding source via the negative pressure feeding path.And, absorption valve V31, V32(Fig. 3 of coming open and close controlling to be connected with adsorbing mechanism according to the switching instruction of the valve control part 64 from control part 6), can make thus adsorbing mechanism absorption version PP or substrate SB.In addition, in the present embodiment, above-mentioned adsorbing mechanism and as described later absorption keep equipment that the adsorbing mechanism of blanket utilizes factory as the negative pressure feeding source, but also can adopt negative pressure feeding sections such as being equipped with vavuum pump on device 100 and supply with the structure of negative pressure from this negative pressure feeding section to adsorbing mechanism.

In the upper objective table section 3 that forms like this, the version of utilizing conveying unit 2 with reciprocal carrier 23L with version from the left side of Fig. 1 via after the version absorption position XP23 of conveyance space conveyance under upper objective table section 3, the adsorption plate 34 of upper objective table section 3 descends to adsorbing and keeps an edition PP.In contrast, be positioned at reciprocal carrier 23L in version objective table section 3 under under the state of position, when the adsorption plate 34 that has adsorbed version PP was removed absorption, a version PP was transferred and is placed on conveying unit 2.Like this, carry out the handing-over of version between conveying unit 2 and upper objective table section 3.

In addition, substrate SB also similarly remains in upper objective table section 3 with version PP.That is, the substrate that utilizes conveying unit 2 with reciprocal carrier 23R with substrate SB from the right side of Fig. 1 under the supreme objective table of conveyance space conveyance section 3 after position, the adsorption plate 34 of upper objective table section 3 descends to adsorbing and keeps substrate SB.In contrast, be positioned at reciprocal carrier 23R at substrate objective table section 3 under under the state of position, when the absorption of adsorption plate 34 of having adsorbed the upper objective table section 3 of substrate SB was removed, substrate SB was transferred and is placed into conveying unit 2.Like this, carry out the handing-over of substrate SB between conveying unit 2 and upper objective table section 3.

Below the vertical of upper objective table section 3 (below, be referred to as " vertical below " or " (Z) direction "), in the upper surface configuration location division 4 of stone platform 1.As shown in Figure 1, in this location division 4, gripper shoe 41 is configured to flat-hand position in the mode of the recess that strides across stone platform 1, and is fixed on the upper surface of stone platform 1.In addition, be fixed with location objective table 42 on the upper surface of this gripper shoe 41.And, objective table section 5 under placing on the location of location division 4 objective table 42, the adsorption plate 34 of the upper surface of lower objective table section 5 and upper objective table section 3 is in opposite directions.The upper surface of this time objective table section 5 can adsorb and keep blanket BL, control part 6 to locate objective table 42 by control and can locate accurately blanket BL in lower objective table section 5.

The objective table top 422 that location objective table 42 has the stage base 421 that is fixed on gripper shoe 41, the vertical top that is configured in stage base 421 and supports lower objective table section 5.These stage base 421 and objective table top 422 all have the architrave shape at the central portion opening.In addition, between these stage base 421 and objective table top 422, dispose near each bight at objective table top 422 such as supporting constructions 423 such as crossed roller bearings (cross roller bearing), wherein, above-mentioned supporting mechanism 423 has 3 frees degree on direction of rotation, directions X and Y-direction take the rotating shaft extending on vertical Z as pivot.In addition, be provided with ball screw mechanism (omitting diagram) on each supporting construction 423, and objective table CD-ROM drive motor M41(Fig. 3 is installed on each ball screw mechanism).And each objective table CD-ROM drive motor M41 carries out work according to the action command of the motor control section 63 from control part 6, on one side in the larger space of central portion formation of location objective table 42, objective table top 422 is moved in horizontal plane on one side thus.In addition, can be rotated take vertical axis as pivot, the adsorption plate 51 of lower objective table section 5 is positioned.In addition, having utilized in the present embodiment one of reason of the location objective table 42 with hollow space, is to take for the upper formed telltale mark of substrate SB that utilizes 43 pairs of shoot parts to remain on the blanket BL on the upper surface of lower objective table section 5 and to remain on the lower surface of upper objective table section 3.

Lower objective table section 5 has adsorption plate 51, post member 52, stage base 53 and lifter pin section 54.On stage base 53, be arranged side by side the opening of 3 long hole shape of extending on fore-and-aft direction Y on left and right directions X.And, with from above make the overlapping mode of central opening of these slotted hole openings and location objective table 42 while overlooking, stage base 53 is fixed on the objective table 42 of location.In addition, loosely be inserted with the part of shoot part 43 in above-mentioned slotted hole opening.In addition, from the upper surface bight of stage base 53 at (+Z) vertical post member 52 and each top braces adsorption plate 51 of being provided with.

This adsorption plate 51 forms such as the metallic plate by aluminium alloy etc.Upper surface at adsorption plate 51 is provided with adsorbing mechanism (omitting diagram).Adsorbing mechanism is connected with an end of malleation supplying tubing (omitting diagram), and the other end of malleation supplying tubing is connected with manifold with pressurization.And then, at the pars intermedia of each malleation supplying tubing, pressurizing valve V51(Fig. 3 is installed).Always supply with the forced air that adjuster is supplied with the equipment from factory and carry out pressure regulation and the air of the constant pressure that obtains with manifold to this pressurization.Therefore, when the action command according to from the valve control part 64 of control part 6 is optionally opened desirable pressurizing valve V51, to the adsorbing mechanism that is connected with selected pressurizing valve V51, supply with forced air after pressure regulation.

In addition, to the part of adsorbing mechanism, forced air not only can be selected to supply with, negative pressure can also be selected to supply with.That is, specifically each adsorbing mechanism is connected with an end of negative pressure feeding pipe arrangement (omitting diagram), and the other end is connected with manifold with negative pressure.And then, absorption valve V52(Fig. 3 is installed between the pars intermedia of each negative pressure feeding pipe arrangement).This negative pressure is connected via adjuster with the negative pressure feeding source with manifold, thereby always supplies with the negative pressure of setting.Therefore, when the action command according to from the valve control part 64 of control part 6 is optionally opened desirable absorption valve V52, to the adsorbing mechanism that is connected with selected absorption valve V52, supply with negative pressure after pressure regulation.

Like this, in the present embodiment, make blanket BL local or be adsorbed on all sidedly on adsorption plate 51 by the open and close controlling to valve V51, V52, perhaps can by between adsorption plate 51 and blanket BL partly air supply blanket BL is expanded partly and this blanket BL is pressed on the version PP or substrate SB that remains in upper objective table section 3.

In lifter pin section 54, lifter plate 541 is set to can free lifting between adsorption plate 51 and stage base 53.Be formed with notch part in many places on this lifter plate 541, prevent from thus interfering with shoot part 43.In addition, stand and be provided with a plurality of lifter pins 542 above vertical from the upper surface of lifter plate 541.On the other hand, the lower surface of lifter plate 541 and pin lift cylinder CL51(Fig. 3) be connected.And the switching of the valve that valve control part 64 switchings of control part 6 are connected with pin lift cylinder CL51, make thus pin lift cylinder CL51 carry out work and make lifter plate 541 liftings.Its result, all lifter pins 542 are adsorption plane and advance and retreat mobile with respect to the upper surface of adsorption plate 51.For example, by lifter pin 542 from the upper surface of adsorption plate 51 to (+Z) direction is outstanding, can utilize not shown blanket carrying manipulator blanket BL to be placed into the top of lifter pin 542.And, after placing blanket BL, then by make lifter pin 542 retreat to the upper surface of adsorption plate 51 (a Z) side of direction shifts blanket BL to be placed on the upper surface of adsorption plate 51., as described later be in due course, utilize near the blanket thickness measurement sensor SN51(Fig. 3 be configured in adsorption plate 51 thereafter) carry out the thickness of this blanket of instrumentation BL.

As mentioned above, in the present embodiment, upper

objective table section

3 and 5 configurations opposite to each other mutually on vertical Z of lower objective table section.And, between upper objective table section 3 and lower objective table section 5, configure respectively the pre-determined bit section 8 of pressing the press section 7 that is placed on the blanket BL in lower objective table section 5 from top and version PP, substrate SB and blanket BL being carried out pre-determined bit.

Pressing member 71 on vertical Z the lifting of press section 7 by utilizing switching mechanism (omit diagram) that the vertical upper side at adsorption plate 51 is arranged, can switch thus between 2 states.That is, when switching mechanism descends pressing member 71, be in blanket BL on adsorption plate 51 state (blanket pressed state) that section 7 presses that is pressed.On the other hand, when switching mechanism rises pressing member 71, be in press section 7 and separate and removed the state of pressing (blanket is pressed disarm state) to blanket BL from blanket BL.

In pre-determined bit section 8, configuration is folded layer by layer with 2 in pre-determined bit top 81 and pre-determined bit bottom 82 on vertical Z.Pre-determined bit top 81 in them is configured in the vertical upper side of pre-determined bit bottom 82, thereby with being close to of blanket BL before, on the XP23 of position to utilizing edition PP that version keeps with reciprocal carrier 23L and utilizing substrate to position with the substrate SB that reciprocal carrier 23R keeps.On the other hand, pre-determined bit bottom 82 before with version PP or substrate SB, being close to, positions the blanket BL on the adsorption plate 51 that is placed on lower objective table section 5.In addition, pre-determined bit top 81 and pre-determined bit bottom 82 have same structure basically.Therefore, below, the structure on pre-determined bit top 81 is described, and pre-determined bit bottom 82 is marked identical or suitable Reference numerals and the elliptical structure explanation.

In pre-determined bit top 81, be provided with 4 upward guide pieces 812 in mobile mode freely on the mount structure body 811 of architrave shape.That is, mount structure body 811 is to be combined on left and right directions X be separated from each other and extending 2 horizontal pane that arrange on fore-and-aft direction Y and in 2 horizontal pane that are separated from each other on fore-and-aft direction Y and extension arranges on left and right directions X, forming.And, as shown in Figure 2, extend on fore-and-aft direction Y on the left side level board in 2 level boards that arrange, section is provided with upward guide piece 812 in the central, and this upward guide piece 812 can utilize the illustrated ball screw mechanism of omission to move freely on left and right directions X.And, the CD-ROM drive motor M81(Fig. 3 that is connected with this ball screw mechanism) carry out work according to the action command of the motor control section 63 from control part 6, upward guide piece 812 moves on left and right directions X thus.In addition,, also with similarly above-mentioned, utilize CD-ROM drive motor M81 that upward guide piece 812 is moved at the right side level board on left and right directions X.And then each level board in 2 level boards that extension arranges on left and right directions X, also with similarly above-mentioned, utilizes CD-ROM drive motor M81 that upward guide piece 812 is moved on fore-and-aft direction Y.Like this, 4 upward guide pieces 812 surround version PP or substrate SB on the vertical lower position of position XP23, and each upward guide piece 812 can be independently approaches or separates with version PP etc.Thus, can make by the amount of movement of controlling each upward guide piece 812 edition PP and substrate SB move horizontally or rotate on the hand of reciprocal carrier positions.

In addition, in the present embodiment, as illustrating in the back, after being transferred to the patterned layer on blanket BL on substrate SB, blanket BL being peeled off from substrate SB, but at this stripping bench, produce static.In addition, the coating layer of utilization version PP on blanket BL when blanket BL is peeled off from version PP, also produces static after portraying pattern.Therefore, in the present embodiment,, in order to remove static, be provided with except electric section 9.Should except electric section 9 have from (+X) side direction is by the ion generator 91 of the space illumination ion of upper

objective table section

3 and 5 clampings of lower objective table section.

Control part 6 has CPU(Central Processing Unit) 61, memory 62, motor control section 63, valve control part 64, image processing part 65 and demonstration/operating portion 66, CPU61 comes each one of control device based on pre-stored program in memory 62, and goes out as shown in Figure 4 such pattern of carrying out and portray and process and transfer process.

Fig. 4 shows the flow chart of molar behavior of the printing equipment of Fig. 1.Under the original state of this printing equipment 100, version is positioned at respectively on centre position XP22, XP24 with reciprocal carrier 23R with reciprocal carrier 23L and substrate.Then, synchronously carry out with the conveyance action of version carrying manipulator (omit diagram) the conveyance version PP of version cleaning device the input operation (step S1) that drops into version PP, and with the conveyance action of substrate transfer robot (omitting diagram) the conveyance substrate SB of base plate cleaning device, synchronously carry out the input operation (step S2) that drops into substrate SB.In addition, owing to having adopted version to move such conveyance structure in the one mode with reciprocal carrier 23R with reciprocal carrier 23L and substrate on left and right directions X, thereby moving into an edition PP(step S1) afterwards, move into substrate SB(step S2), but also can change both orders.

Like this, in the present embodiment, before the execution pattern is portrayed processing, not only prepare a version PP, go back prepared substrate SB, thereby as describing in detail in the back, carry out continuously pattern and portray processing and transfer process.Thus, can shorten until will be transferred to time interval on substrate SB at the coating layer of having portrayed pattern on blanket BL, thereby can carry out stable processing.

In following step S3, back and forth carrier horizontal drive motor M21 is rotated rotating shaft, thereby makes reciprocal carrier holding plate 22 to (X) direction moves.Thus, version moves and navigates to an edition absorption position XP23 with reciprocal carrier 23L.Then, version is rotated rotating shaft with reciprocal carrier lift motor M22L, thereby makes lifter plate 231 downward directions (Z) mobile.Thus, version PP moves and navigates to the predetermined bit positions lower than conveyance position under with the state on reciprocal carrier 23L being supported on version.

Then, upward guide piece CD-ROM drive motor M81 carries out work moves upward guide piece 812, and each upward guide piece 812 connects with the end face of the version PP on reciprocal carrier 23L with being supported on version, thus version PP is navigated on predefined horizontal level.After this, each upward guide piece CD-ROM drive motor M81 carries out work in the opposite direction, thereby each upward guide piece 812 separates with version PP.Like this, when the pre-determined bit processing of version PP finished, lifting of object loading table motor M31 made the rotation of axial rotary prescribed direction, thereby made adsorption plate 34 downward directions (Z) descend and with the upper surface of version PP, connect.Then, utilize the adsorbing mechanism that upper objective table is used that version PP is adsorbed onto on adsorption plate 34 by open valve V31, V32.

When like this absorption of version PP being finished, lifting of object loading table motor M31 rotates in the opposite direction, thereby adsorption plate 34 has kept in absorption under the state of version PP rising above vertical, version PP is moved to the vertical top position of edition absorption position XP23.Then, version is rotated rotating shaft with reciprocal carrier lift motor M22L and lifter plate 231 is moved to the vertical top, thus version is moved and navigate to the conveyance position with reciprocal carrier 23L from predetermined bit positions, namely on version absorption position XP23.After this, back and forth carrier horizontal drive motor M21 by make rotating shaft rotate to make reciprocal carrier holding plate 22 to (+X) direction moves, thereby will become empty edition, with reciprocal carrier 23L, navigates to centre position XP22.

In following step S4, objective table CD-ROM drive motor M41 carries out work makes location objective table 42 move to initial position.Thus, each starting point is in identical position.Then, pin lift cylinder CL51 moves to make lifter plate 541 to rise, thereby makes lifter pin 542 outstanding to the vertical top from the upper surface of adsorption plate 51.Like this, when the input to blanket BL is prepared to finish, after omitting illustrated blanket carrying manipulator access (access) device 100 and blanket BL being placed into the top of lifter pin 542, from installing 100, keep out of the way.Then, pin lift cylinder CL51 moves to make lifter plate 541 to descend.Thus, lifter pin 542 descends blanket BL is placed on adsorption plate 51 under the state that has supported blanket BL.So upward guide piece CD-ROM drive motor M82 carries out work moves upward guide piece 822, each upward guide piece 822 connects with the end face that is supported on the blanket BL on adsorption plate 51, and blanket BL is positioned at predetermined horizontal level.

When like this pre-determined bit processing of blanket BL being finished, open absorption valve V52, the negative pressure supplied with after pressure regulation of the adsorbing mechanism used of objective table is adsorbed onto blanket BL on adsorption plate 51 downwards thus.And then each upward guide piece CD-ROM drive motor M82 makes the opposite direction rotation of axial rotary, thereby each upward guide piece 822 is separated with blanket BL.Thus, pattern is portrayed the preparation end of processing.

In following step S5, sensor horizontal drive cylinder CL52(Fig. 3) move to make blanket thickness measurement sensor SN51 be positioned at blanket BL right part directly over position.Then, the information output that blanket thickness measurement sensor SN51 will be relevant to the thickness of blanket BL is to control part 6, thus the thickness of instrumentation blanket BL.After this, the sensor horizontal drive cylinder CL52 moves to make blanket thickness measurement sensor SN51 to keep out of the way from adsorption plate 51 in the opposite direction.

Then, the 1st lifting of object loading table motor M31 makes axial rotary prescribed direction rotation, thus make adsorption plate 34 downward directions (Z) descend make edition PP move to blanket BL near.And then the 2nd lifting of object loading table motor M32 makes rotating shaft rotation, thereby makes adsorption plate 34 be adjusted at exactly version PP and the interval between blanket BL, i.e. gap value on vertical Z with little pitch lifting.In addition, this gap value is to be decided by the thickness instrumentation result of control part 6 based on version PP and blanket BL.

Then, make pressing member 71 declines of press section 7 utilize pressing member 71 to press the whole circumference of blanket BL.Then, valve V51, V52 move and come to air supply partly between adsorption plate 51 and blanket BL, thereby blanket BL is expanded partly.This floats part and is pressed to the version PP that remains on objective table section 3.Its result, the central portion of blanket BL is close to version PP, thus the pattern (omitting diagram) that is pre-formed at the lower surface of version PP connects with the coating layer that is coated in advance the upper surface of blanket BL, portrays pattern thus on this coating layer and forms patterned layer.

In following step S6, the 2nd lifting of object loading table motor M32 makes rotating shaft rotate to make adsorption plate 34 to rise, thereby version PP is peeled off from blanket BL.In addition, in order to carry out lift-off processing, with the processing that makes edition PP increase concurrently, the open and-shut mode of transfer valve V51, V52 applies negative pressure to blanket BL in good time, makes thus attraction blanket BL close to adsorption plate 51 sides.Thereafter, the 1st lifting of object loading table motor M31 makes rotating shaft rotate to make adsorption plate 34 to rise, thus with version PP be positioned at ion generator 91 almost sustained height except electric position.In addition, make pressing member 71 risings of press section 7 remove pressing blanket BL.Then, ion generator 91 carries out work remove the static that produces when carrying out above-mentioned version lift-off processing.When this finished except electric treatment, the 1st lifting of object loading table motor M31 made the rotating shaft rotation, thereby till making absorption keep the adsorption plate 34 of the state of version PP to rise to initial position (than the version high position of absorption position XP23).

In following step S7, rotary actuator RA2, RA2 move to make version with hand 232,232 selections 180 ° and from origin position, navigate to backward position.Thus, the hand posture is never used posture to be switched to and is used posture, thereby receives the reception preparation end of the version PP that has used.Then, back and forth carrier horizontal drive motor M21 makes the rotating shaft rotation, makes thus reciprocal carrier holding plate 22 to (X) direction moves.Thus, version moves and navigates to an edition absorption position XP23 with reciprocal carrier 23L.

On the other hand, the 1st lifting of object loading table motor M31 makes the rotating shaft rotation, make thus absorption keep the adsorption plate 34 of the state of version PP to make with hand 232,232 declines of reciprocal carrier 23L towards version after an edition PP is positioned on hand 232,232, shut off valve V31, V32, remove thus the absorption of the adsorbing mechanism of adsorption plate 34 to version PP, thereby in the handing-over of the locational version of conveyance PP, finish.Then, the 1st lifting of object loading table motor M31 makes the rotating shaft counter-rotating, till making thus adsorption plate 34 rise to initial position.Thereafter, back and forth carrier horizontal drive motor M21 makes the rotating shaft rotation, make thus reciprocal carrier holding plate 22 to (+X) direction moves.Thus, version moves and navigates to centre position XP22 with reciprocal carrier 23L having kept using under the state of edition PP.

In following step S8, back and forth carrier horizontal drive motor M21 makes the rotating shaft rotation, make thus reciprocal carrier holding plate 22 to (+X) direction moves.Thus, keep the substrate of processing front substrate SB to move and navigate to substrate adsorption position XP23 with reciprocal carrier 23R.Then, process with pre-determined bit to version PP and the adsorption treatment of 34 couples of version PP of adsorption plate similarly, carry out the pre-determined bit of substrate SB processed and to the adsorption treatment of substrate SB.Thereafter, detecting while having adsorbed substrate SB, lifting of object loading table motor M31 makes the rotating shaft rotation, makes thus absorption keep the adsorption plate 34 of the state of substrate SB to rise substrate SB is moved to than the high position of XP23, substrate adsorption position to the vertical top.Then, substrate makes the rotating shaft rotation with reciprocal carrier lift motor M22R, makes thus substrate move and navigate to the conveyance position with reciprocal carrier 23R from predetermined bit positions.Thereafter, back and forth carrier horizontal drive motor M21 makes rotating shaft rotate to make reciprocal carrier holding plate 22 to (X) direction moves, and will become thus empty substrate and navigate to centre position XP24 with reciprocal carrier 23R.

In following step S9, in the instrumentation blanket thickness, and after carrying out precision positioning, carry out transfer process.That is, with portray at pattern in processing the thickness instrumentation similarly, the thickness of instrumentation blanket BL.In addition, the thickness of instrumentation blanket BL before so firm desirable pattern is portrayed not only, also will be before just wanting transfer printing the thickness of instrumentation blanket BL, its main reason is, a part of swelling of blanket BL and the thickness of blanket BL is changed in time,, by instrumentation blanket thickness before just wanting transfer printing, can carry out high-precision transfer process.

Then, the 1st lifting of object loading table motor M31 makes axial rotary prescribed direction rotation, make thus adsorption plate 34 downward directions (Z) descend with substrate SB move to blanket BL near.And then the 2nd lifting of object loading table motor M32 makes rotating shaft rotation, makes thus adsorption plate 34 be adjusted at exactly substrate SB and the interval between blanket BL, i.e. gap value on vertical Z with little pitch lifting.This gap value is to be decided by the thickness instrumentation result of control part 6 based on substrate SB and blanket BL.Then, and portray pattern (step S5) similarly, utilize pressing member 71 to press the circumference of blanket BL.

Like this, substrate SB and blanket BL be scheduled position all, and separates the interval that is suitable for transfer process and be positioned, but, for the patterned layer that will be formed on blanket BL is transferred on substrate SB exactly, need to critically to both, carry out contraposition.Therefore, in the present embodiment, 43 pairs of shoot parts are portrayed pattern on blanket BL and the telltale mark that forms and the telltale mark that is formed on substrate SB are taken, and these images are exported to the image processing part 65 of control part 6.Then, control part 6 is obtained be used to making blanket BL carry out the controlled quentity controlled variable of contraposition with respect to substrate SB based on these images, and makes the action command for the objective table CD-ROM drive motor M41 of location division 4.And, objective table CD-ROM drive motor M41 carries out work according to above-mentioned control instruction, adsorption plate 51 is moved in the horizontal direction and is centered around the imaginary rotating shaft that vertical Z extends to be rotated, thus with blanket BL critically with the accurate contraposition (localization process) of substrate SB.

Then, valve V51, V52 move and come to air supply partly between adsorption plate 51 and blanket BL, thereby blanket BL is expanded partly.This floats part and compresses on the substrate SB that remains in objective table section 3.Its result, blanket BL and substrate SB are close to.Thus, the critically contraposition of pattern of the patterned layer of blanket BL side and the lower surface of substrate SB, and be transferred on substrate SB.

In following step S10, peel off (step S6) similarly with version, carry out from blanket BL peel off substrate SB, with substrate SB navigate to except on electric position, remove the pressing of 71 couples of blanket BL of pressing member, except electricity.Thereafter, the 1st lifting of object loading table motor M31 makes the rotating shaft rotation, till making thus absorption keep the adsorption plate 34 of the state of substrate SB to rise to initial position (than high position, conveyance position).

In following step S11, back and forth carrier horizontal drive motor M21 makes the rotating shaft rotation, make thus reciprocal carrier holding plate 22 to (+X) direction moves.Thus, substrate moves and navigates to substrate adsorption position XP23 with reciprocal carrier 23R.On the other hand, the 1st lifting of object loading table motor M31 makes the rotating shaft rotation, makes thus absorption keep the adsorption plate 34 of the state of substrate SB to descend with the hand 232,232 of reciprocal carrier 23R to substrate.Thereafter, shut off valve V31, V32, remove the absorption of adsorbing mechanism to substrate SB thus.Then, the 1st lifting of object loading table motor M31 makes the rotating shaft counter-rotating, makes thus adsorption plate 34 rise to initial position.Thereafter, back and forth carrier horizontal drive motor M21 makes the rotating shaft rotation, makes thus reciprocal carrier holding plate 22 to (X) direction moves to make the substrate of the state that has kept this substrate SB to move and navigate to centre position XP24 with reciprocal carrier 23R.

In following step S12, valve V51, V52 move to remove the absorption of 51 couples of blanket BL of adsorption plate.Then, pin lift cylinder CL51 moves to make lifter plate 541 to rise, and thus the blanket BL that has used is lifted top from adsorption plate 51 to vertical.Then, blanket carrying manipulator access means 100 accepts from the top of lifter pin 542 the blanket BL that has used, and from installing 100, keeps out of the way.Then, pin lift cylinder CL51 move to make lifter plate 541 declines, makes thus lower direction that lifter pin 542 drops to adsorption plate 51 (Z).

In following step S13, back and forth carrier horizontal drive motor M21 make the rotating shaft rotation, back and forth carrier holding plate 22 to (+X) direction moves.Thus, make version move and navigate to an edition delivery position XP21 with reciprocal carrier 23L.Then, the version carrying manipulator of version cleaning device takes out the version PP that has used from printing equipment 100.When taking out of of version PP finished, back and forth carrier horizontal drive motor M21 made rotating shaft rotate to make reciprocal carrier holding plate 22 to (X) direction moves, and thus version is navigated to centre position XP22 with reciprocal carrier 23L like this.

In following step S14, back and forth carrier horizontal drive motor M21 makes the rotating shaft rotation, makes thus reciprocal carrier holding plate 22 to (X) direction moves.Thus, substrate moves and navigates to substrate transfer position XP25 with reciprocal carrier 23R.Then, the substrate transfer robot of base plate cleaning device takes out from printing equipment 100 the substrate SB that is subject to transfer process.When taking out of of such substrate SB finished, back and forth carrier horizontal drive motor M21 make rotating shaft rotate to make reciprocal carrier holding plate 22 to (+X) direction moves, and thus substrate is navigated to centre position XP23 with reciprocal carrier 23R.Thus, printing equipment 100 returns to original state.

In the printing equipment 100 of present embodiment described above, based on Fig. 5, Fig. 6 A and Fig. 6 B, to absorption, keep the adsorbing mechanism of version PP and substrate SB to describe.Fig. 5 shows the stereogram of the configuration of absorbing unit, and Fig. 6 A and Fig. 6 B are the figure of the adsorption method of explanation version.In addition, Fig. 6 A observes that absorption keeps the adsorption plate 34 of version PP and the figure that obtains from the adsorption plane side, and Fig. 6 B is that mode that the adsorption plane with adsorption plate 34 is in downside is observed the A-A section of Fig. 6 A and the figure that obtains.

In the present embodiment,, as the absorbing unit that forms adsorbing mechanism, be provided with at the adsorption plate 34 that is formed with adsorption tank 351 on adsorption plane and be provided in a plurality of absorption layers 352 on adsorption plate 34.As shown in Figure 6B, adsorption tank 351 is connected with pre-assembled negative pressure feeding source in factory being provided with printing equipment 100 via valve V31, in addition, each absorption layer 352 is connected with pre-assembled negative pressure feeding source in factory being provided with printing equipment 100 via valve V32.And, when valve V31 opens according to the switching instruction of the valve control part 64 from control part 6, supply with negative pressure to adsorption tank 351 and adsorb a maintenance version PP.In addition, when valve V32 opens according to the switching instruction of the valve control part 64 from control part 6, supply with negative pressure to each absorption layer 352 and adsorb a maintenance version PP.

Next, the configuration for adsorption tank 351 and absorption layer 352, be elaborated with reference to Fig. 5.Fig. 5 has schematically shown blanket BL and has adsorbed the upper surface that remains on adsorption plate 51, and a version PP is positioned at edition state of absorption position XP23.In addition, omitted the diagram of version with hand.In Fig. 5, the zone that version PP forms patterned layer passed through in blanket BL is formed regional Al as pattern and illustrates, in addition, with forming regional Al zone in opposite directions with pattern and illustrate as effective coverage A2 in version PP.And then, illustrate as regional in opposite directions A3 with effective coverage A2 version PP zone in opposite directions in the adsorption plane of adsorption plate 34.That is, pattern form regional Al, effective coverage A2 and regional in opposite directions A3 overlook lower overlapped.

Adsorption tank 351 and each absorption layer 352 are configured in the outside of the regional A3 in opposite directions in the adsorption plane of adsorption plate 34.In the present embodiment, adsorption tank 351 form encirclement in opposite directions regional A3 around shape, each absorption layer 352 is configured in than adsorption tank 351 zone more in the outer part.Absorption layer 352 respectively arranges 5 along each limit of the adsorption plate 34 of rectangle, and the absorption layer 352 that configures in bight is that each limit is common, altogether is provided with 16.As shown in Figure 6A, when valve V31, V32 open according to the switching instruction of the valve control part 64 from control part 6, be configured in adsorption tank 351 and the absorption layer 352 in the outside of regional A3 in opposite directions and adsorb version PP in the zone in the outside of effective coverage A2.And, make edition PP and blanket BL pressurization butt carry out pattern under this state and portray.

As previously discussed, adsorb in the outside to the effective coverage A2 of version PP when pattern is portrayed, and the effective coverage A2 of version PP can directly not adsorbed by adsorption tank 351 and absorption layer 352 thus.Therefore, can prevent under the localized indentation that produces following absorption on the A2 of the effective coverage of version PP or the decline of flatness, thereby can carry out well pattern, portray.

In addition,, as absorbing unit, use a plurality of absorption layers 352, edition PP is peeled off near the regional area by absorption layer 352 absorption with respect to blanket BL.This be because, the absorption of 352 couples of version PP of absorption layer is local absorption, thereby is difficult to occur vacuum breaking, and, by in the absorption of a plurality of positions, cause the risk of the failure that version keeps to suppress lowly vacuum breaking, and can promote to separate from blanket BL.That is, from blanket BL, peeling off edition PP easily carries out near each regional area by a plurality of absorption layer 352 absorption.In addition, except absorption layer 352, by arranging, can version PP absorption more firmly on a large scale can be kept at the adsorption tank 351 of absorption maintenance on a large scale, thereby can stably carry out pattern, portray.In addition, when version PP was peeled off from blanket BL, if in the part of adsorption tank 351, produce vacuum breaking, this impact likely involved adsorption tank 351 integral body, made absorption affinity produce large change, thereby can't carry out stable peeling off.For fear of such problem, the absorption that also can not carry out adsorption tank 351 when peeling off keeps.

In addition, used in the present embodiment absorption layer 352, but preferably be arranged on the part that strain can occur when edition PP is peeled off from blanket BL separation on absorption layer 352.If use such absorption layer 352, make the part generation strain of absorption layer 352 by to blanket BL side stretching the time at version PP when peeling off, can suppress thus the distortion of edition PP.Its result, can be suppressed at version PP while peeling off and occur damaged.

In addition, as the set opening of the adsorption plane at adsorption plate 34, be formed with adsorption tank 351, can reduce aperture area thus.Its result, can be reduced to and adsorb the negative pressure amount that keeps version PP and should supply with, thereby can adsorb fast maintenance.

In addition, as above-mentioned embodiment, by the outside that in advance a plurality of absorption layers 352 is configured in adsorption tank 351, there is following such advantage.Keep version PP in the situation that utilize a plurality of absorption layers 352 to adsorb, version PP likely occurs crooked between each absorption layer 352.Yet,, according to above-mentioned configuration, make adsorption tank 351 between the effective coverage A2 of a plurality of absorption layers 352 and version PP, can suppress crooked impact and involve the effective coverage A2 of edition PP, portray thereby can carry out more well pattern.

Above, keep the situation of version PP to be illustrated to absorption when pattern is portrayed, but the absorption to substrate SB when the pattern transferring layer keep carrying out similarly.Namely, due to the effective coverage that forms regional A1 substrate SB in opposite directions with the pattern of blanket BL when the transfer printing to overlook lower effective coverage A2 with edition PP consistent, so by using adsorption tank 351 and the absorption layer 352 of configuration as mentioned above, at the outside of effective coverage absorption substrate SB.In addition, utilize the adsorbing mechanism in above-mentioned embodiment explanation in keeping by the absorption to substrate SB, thereby also play above-mentioned various effects when transfer printing.

In above present embodiment, the participation pattern in printing equipment 100 portray and the part of the operation of transfer printing as patterning device performance function of the present invention, pattern is portrayed and transfer printing is equivalent to respectively " formation pattern " of the present invention.In addition, version PP and substrate SB are equivalent to " object " of the present invention, adsorption tank 351 is equivalent to " opening " of the present invention, and absorption layer 352 is equivalent to " local adsorption section " of the present invention, and valve control part 64 and valve V31, V32 cooperation are as " negative pressure feeding unit " of the present invention performance function.

In addition, the present invention is not limited to above-mentioned embodiment, can apply various changes to foregoing in the scope that does not break away from its aim.For example, in the above-described embodiment, patterning device is carried out pattern and is portrayed and this two side of transfer printing, but also can only carry out either party.

In addition, as absorbing unit, be provided with adsorption tank 351 and a plurality of absorption layer 352, but it is not necessary important document that two kinds of absorbing units are set like this, absorbing unit also can be only a kind, and the absorbing unit more than 3 kinds also can be set.In addition,, in the situation that multiple absorbing unit is set, which absorbing unit to be to come discretionary according to each condition with in which operation.And then, may not form adsorption tank 351 around shape as opening, also can form the mode except groove, its configuration and quantity also can suitably change.In addition, also can adopt mode except absorption layer as local adsorption section.For example,, as local adsorption section, also can adopt at adsorption plate 34 and form adsorption holes and supply with the mode of negative pressure to this adsorption hole.

In addition, in the above-described embodiment, with identical absorbing unit, adsorb and keep edition PP and substrate SB, but as long as maintenance also can be adsorbed with mutual different absorbing unit in the outside of the effective coverage of absorption version PP and substrate SB.

Utilizability on industry

The present invention can be applicable to support body and the tabular object cause object that connects and form pattern or by supporting body, form all devices of pattern to object to supporting body by making.

Claims

1. patterning device, make the pattern that supports on body form zone and offset and fetch the formation pattern with tabular object, it is characterized in that having:

The negative pressure feeding unit, be used for supplying with negative pressure,

Absorbing unit, utilize the negative pressure of being supplied with by described negative pressure feeding unit to adsorb the described object of maintenance,

Described absorbing unit adsorbs the outside that forms regional zone in opposite directions with described pattern when forming described pattern on described object.

2. patterning device as claimed in claim 1, is characterized in that,

Described absorbing unit has:

Adsorption plate, this adsorption plate be used for form the outside in zone in opposite directions, zone with described pattern on adsorption plane that absorption keeps described object, be provided with the opening of being supplied with negative pressure by described negative pressure feeding unit;

A plurality of local adsorption sections, the described pattern of ratio on described object form zone more in the outer part, zone, and described a plurality of local adsorption sections are adsorbed respectively described object partly.

3. patterning device as claimed in claim 2, is characterized in that,

The described local adsorption section of at least a portion in a plurality of described local adsorption sections is that the absorption layer of strain can occur on specific direction, this specific direction refers to, make described object and described support body and connect after, make described object support with described the direction that body separates.

4. patterning device as claimed in claim 2 or claim 3, is characterized in that,

Described opening forms the adsorption tank in regional zone in opposite directions for surrounding on described adsorption plane with described pattern when forming described pattern.

5. patterning device as claimed in claim 4, is characterized in that,

A plurality of described local adsorption sections on described adsorption plate than described adsorption tank more in the outer part.