CN103386823B

CN103386823B - Patterning device

Info

Publication number: CN103386823B
Application number: CN201310120340.3A
Authority: CN
Inventors: 中嶋美佳; 增市干雄; 川越理史; 上野博之
Original assignee: Dainippon Screen Manufacturing Co Ltd
Current assignee: Dainippon Screen Manufacturing Co Ltd
Priority date: 2012-05-10
Filing date: 2013-04-09
Publication date: 2016-06-15
Anticipated expiration: 2033-04-09
Also published as: TWI507304B; JP2013233756A; TW201400318A; JP5878821B2; KR101489055B1; CN103386823A; KR20130126461A

Abstract

The present invention provides a kind of patterning device, the object (PP) making formation region of the pattern in carrying body (BL) (Al) and tabular offsets to fetch and carries out pattern formation, and forms the outside absorbent bodies (PP) in region (A2) in opposite directions, region (Al) when pattern is formed with pattern. Specifically, adsorption plate (34) is formed with the opening (351) of the channel-shaped being supplied to negative pressure when pattern is formed with the outside in region (A3) in opposite directions, the region (A2) of object (PP), and then, in the outside of this opening (351), it is provided with the adsorption section, local (352) of local absorbent bodies (PP) respectively.

Description

Patterning device

Technical field

The present invention relates to and form pattern to carrying body or formed the device of pattern by carrying body to object by making the object of carrying body and tabular abut against cause object.

Background technology

As above-mentioned such device, the invention described in known such as patent documentation 1 in the past. In the invention, after forming patterned layer making blanket (carrying body) and version (object) abut against on blanket, make the patterned layer formed on blanket and substrate (object) abut against and patterned layer is transferred on substrate.

Prior art literature

Patent documentation 1: Japanese Unexamined Patent Publication 2010-158799 publication

In this art, while it is desirable to make object make when being maintained at the position of regulation object and carrying body abut against, but patent documentation 1 does not have concrete record about how maintenance object. At this, as the method keeping object, it is possible to utilize such as adsorption technology. This is by the absorbing unit of such as absorption layer etc. is supplied the technology that negative pressure keeps object to be formed decompression state to adsorb. But, keep object by adsorbing, it is possible to produce following such problem. That is, when the object of the tabular to version, substrate etc. carries out local absorption maintenance, these adsorbed parts can be recessed, it is possible to can not carry out good pattern in this part and be formed. It addition, when forming, with the pattern of carrying body, the object adsorbing tabular in the region that region is relative at multiple positions, make the flatness of object worsen because of the difference of adsorption strength, it is possible to it is bad to cause pattern to be formed.

Summary of the invention

The present invention proposes in view of the above problems, its object is to, it is provided that a kind of patterning device that can carry out pattern formation well.

To achieve these goals, the patterning device of the present invention makes the object that pattern in carrying body forms region and tabular offset to fetch and carry out forming pattern, it is characterised in that has: negative pressure feeding unit, is used for supplying negative pressure; Absorbing unit, utilizes the negative pressure supplied by negative pressure feeding unit to adsorb maintenance object, and the outside forming region in opposite directions, region when forming pattern with pattern on object is adsorbed by absorbing unit.

According to the present invention, the outside forming region (hereinafter referred to as " effective coverage ") in opposite directions, region when forming pattern with the pattern in carrying body in the object of tabular is adsorbed. That is, owing to the effective coverage of object is not adsorbed, it is possible to prevent from occurring in effective coverage by the decline of the depression and flatness adsorbing the local caused.It is as a result, it is possible to carry out pattern formation well.

At this, in the patterning device of the present invention, preferred absorbing unit has: adsorption plate, in the outside with pattern formation region in opposite directions, region on the adsorption plane adsorbing maintenance object of this adsorption plate, is provided with the opening being supplied negative pressure by negative pressure feeding unit; Adsorption section, multiple local, the ratio pattern on object forms the region that region is more outward, adsorption section, multiple local difference absorbent bodies partly.

So, opening is formed by the outside forming region in opposite directions, region when forming pattern with pattern in the adsorption plane of adsorption plate, thus the outside of the effective coverage of object is adsorbed by this opening. It addition, adsorption section, multiple local adsorption patterns forms the outside in region, so that the outside of the effective coverage of adsorption section, multiple local absorbent bodies. And then, as absorbing unit, including there is the adsorption plate of opening and the adsorption section, multiple local keeping regional area can being adsorbed such that it is able to be suitably used separately the mode that absorption keeps according to each operation such that it is able to be properly carried out pattern most and formed.

Additionally, it is preferred that the adsorption section, at least some of local in adsorption section, multiple local is able to occur in particular directions the absorption layer of elastic deformation, this specific direction refers to, after making object and carrying body abut against, makes the direction that object separates with carrying body. When making the stripping that object separates with carrying body with carrying body after making object abut against, the object of tabular is likely deformed to carrying body side stretching, causes that object is damaged. But, if making the absorption when peeling off to keep the absorption layer that elastic deformation can occur at least partially on detaching direction of the adsorption section, multiple local of object, then when peeling off, object is passed through during to carrying body side stretching to make absorption layer generation elastic deformation, it is possible to suppress the deformation of object. It is as a result, it is possible to suppress the object of tabular when peeling off that breakage occurs.

Additionally, it is preferred that opening is surround the adsorption tank forming region in opposite directions, region when formation pattern with pattern on adsorption plane. So, if the opening formed on adsorption plate is made adsorption tank, then aperture area can be reduced. Its result, the negative pressure amount that should supply to the opening of adsorption plate owing to can be reduced to absorption maintenance object, it is possible to quickly adsorb maintenance. It addition, this adsorption tank by surround in adsorption plate when pattern is formed with pattern formation region in opposite directions, region, it is possible to stably kept the effective coverage of object by adsorption plate.

Additionally, it is preferred that adsorption section, multiple local is more more outward than adsorption tank on adsorption plate. When the object utilizing the absorption of adsorption section, multiple local to keep tabular, between adsorption section, each local, object is likely to occur bending. But, if adsorption section, multiple local is arranged in the outside of adsorption tank, then the impact of bending can be suppressed to involve the effective coverage of object of the inner side being positioned at adsorption tank. Therefore, it is possible to carry out pattern formation more well.

According to the present invention, the outside forming effective coverage in opposite directions, region when pattern is formed with the pattern in carrying body in the object of tabular is adsorbed, and effective coverage will not be adsorbed. Therefore, it is possible to prevent the depression by the local adsorbing the effective coverage caused and the decline of flatness such that it is able to carry out pattern formation well.

Accompanying drawing explanation

Fig. 1 indicates that the axonometric chart of the printing equipment of the patterning device equipped with the present invention.

Fig. 2 is the figure of the section schematically showing the printing equipment shown in Fig. 1.

Fig. 3 shows the block diagram of the electrical structure of the device of Fig. 1.

Fig. 4 shows the flow chart of the molar behavior of the printing equipment of Fig. 1.

Fig. 5 indicates that the axonometric chart of the configuration of absorbing unit.

Fig. 6 A and Fig. 6 B is the figure of the adsorption method that version is described.

The explanation of accompanying drawing labelling

34 adsorption plates

64 valve control portions (negative pressure feeding unit)

351 adsorption tanks (opening)

352 absorption layers (adsorption section, local)

BL blanket (carrying body)

PP version (object)

SB substrate (object)

V31, V32 valve (negative pressure feeding unit)

Detailed description of the invention

Fig. 1 indicates that the approximate three-dimensional map of the printing equipment of the patterning device equipped with the present invention, in order to be explicitly illustrated the structure within device, it is illustrated that unload the state after crust of the device. It addition, Fig. 2 is the figure of the section schematically showing the printing equipment shown in Fig. 1. Further, Fig. 3 shows the block diagram of the electrical structure of the device of Fig. 1. For printing equipment 100, the face side from device is made to move into the upper surface of the blanket within device, peel off again after clinging to the lower surface that the left surface side from device is moved to version PP within device, thus utilize the pattern formed on the lower surface of version PP to portray pattern on the coating layer of blanket to form patterned layer (process portrayed by pattern). Additionally, for printing equipment 100, make to have carried out the upper surface of the blanket that process portrayed by pattern, peel off again after clinging to the lower surface that the right flank side from device is moved to substrate SB within device, thus will be formed in the patterned layer on this blanket and be transferred on the lower surface of substrate SB (transfer process). In addition, in Fig. 1 and each figure of being discussed below, for the configuration relation in each portion of clear and definite device, the conveyance direction of version PP and substrate SB is set as " X-direction ", horizontal direction from the right side of Fig. 1 towards left side is called " +X direction ", rightabout is called "-X direction ". It addition, the face side by the device in the horizontal direction vertical with X-direction is called " +Y direction ", and the rear side of device is called "-Y direction ". Further, the upper direction in vertical and lower direction are called " +Z direction " and "-Z direction ".

In this printing equipment 100, stone platform 1 is provided with each portion of device (conveying unit 2, upper object stage portion 3, location division 4, lower object stage portion 5, press section 7, pre-determined bit portion 8, de-power unit 9), by control portion 6, each portion of device is controlled.

Conveying unit 2 is to transport the device of version PP and substrate SB in the X direction, and constitutes as follows. In this conveying unit 2, it is equipped with 2 supports (omitting diagram) from the right back angle of the upper surface of stone platform 1 and left back corner. And, ball screw mechanism 21 is mutually connected on left and right directions and X-direction extended with the upper end by the two support. In this ball screw mechanism 21, ball screw (omits diagram) and extends in the X direction, and one end of ball screw is connected with the rotating shaft (omitting diagram) of reciprocal carrier horizontal drive motor M21. It addition, ball screw support (omitting diagram) is screwed on the central part of ball screw, and reciprocal carrier holding plate 22 extended in the X direction is installed in (+Y) side of ball screw support.

At (+X) side end of this reciprocal carrier holding plate 22 so that the reciprocal carrier 23L of version can be provided with in the way of lifting on vertical Z, on the other hand, at (-X) side end so that the reciprocal carrier 23R of substrate can be provided with in the way of lifting on vertical Z.Owing to these reciprocal carrier 23L and 23R have identical structure except the rotating mechanism of hand, thus illustrate at this with reciprocal carrier 23R, substrate to be marked version structure of reciprocal carrier 23L identical accompanying drawing labelling or suitable accompanying drawing labelling and omits structure explanation.

Reciprocal carrier 23L has: lifter plate 231, and this lifter plate 231 extends in the X direction, and has the width dimensions of width dimensions (X-direction size) same degree with version PP or the width dimensions that width dimensions (X-direction size) than version PP is more longer; Two version hands 232,232, namely (+Y) side is extended to be respectively facing front side from (+X) side end of lifter plate 231 and (-X) side end. Lifter plate 231 can be arranged on (+X) side end of reciprocal carrier holding plate 22 up and down via ball screw mechanism (omitting diagram). That is, on (+X) side end of reciprocal carrier holding plate 22, extended on vertical Z have ball screw mechanism. In the lower end of this ball screw mechanism, be connected to the reciprocal carrier lift motor M22L(Fig. 3 of version) rotating shaft (omit diagram). It addition, ball screw mechanism is screwed with ball screw support (omitting diagram), and in (+Y) side of this ball screw support, lifter plate 231 is installed. Therefore, version is operated according to the action command of the motor control part 63 from control portion 6 with reciprocal carrier lift motor M22L, thus drives lifter plate 231 to lift on vertical Z.

The anteroposterior dimension (Y-direction size) of each hand 232,232 length dimension (Y-direction size) than version PP is longer, it is possible to keep version PP with the front (+Y side) of each hand 232,232.

It addition, in order to detect the situation so maintaining edition PP with version hand 232,232, be provided with the sensor (omitting diagram) of version detection via sensor stand from the central part of lifter plate 231 towards (ten Y) side. Therefore, when placed edition PP on two hands 232, it is (-Y) side end that the rearward end of PP is published in sensor detection, and exports detection signal to control portion 6.

And then, each version hand 232,232 is arranged on lifter plate 231 via bearing (omitting diagram), and can to rotate freely for center of rotation at the upper rotating shaft extended of fore-and-aft direction (Y-direction). It addition, on the X-direction two ends of lifter plate 231, be provided with rotary actuator RA2, RA2(Fig. 3). These rotary actuators RA2, RA2 carry out action with forced air for drive source, are arranged on the valve (omitting diagram) on the feed path of forced air by opening and closing and can rotate in units of 180 °. Therefore, utilize the valve control portion 64 in control portion 6 to control the opening and closing of above-mentioned valve, it is possible to an interarea of version hand 232,232 be suitable to upward the version PP before portraying pattern hand positions (below, be referred to as " not using posture ") and another interarea be suitable to upward the hand positions of the version PP after pattern Processing is portrayed (below, it is referred to as " having used posture ") between, switch hand positions. So, having hand positions switching mechanism this point is the reciprocal carrier 23L of version and the reciprocal unique difference of carrier 23R of substrate.

Secondly, the reciprocal carrier 23L of version on reciprocal carrier holding plate 22 and the installation site of the reciprocal carrier 23R of substrate are described.In the present embodiment, as shown in Figure 2, version separates the width dimensions than version PP or substrate SB (in addition with reciprocal carrier 23L and substrate in the X direction with reciprocal carrier 23R, in embodiments, the width dimensions of version PP and substrate SB is identical) longer interval and be arranged on reciprocal carrier holding plate 22. And, when the axial rotary prescribed direction making reciprocal carrier horizontal drive motor M21 rotates, two reciprocal carrier 23L, 23R when keep above-mentioned separated by a distance move in the X direction. Such as in fig. 2, accompanying drawing labelling XP23 represents that the position directly below in object stage portion 3, reciprocal carrier 23L, 23R are positioned at position XP22, XP24 of leaving equidistant (this distance being called " interval Moving Unit ") from position XP23 respectively to (+X) direction and (-X) direction. Additionally, in the present embodiment, the state shown in Fig. 2 is called " intermediate orientation ".

Additionally, the axial rotary prescribed direction making reciprocal carrier horizontal drive motor M21 rotate make reciprocal carrier holding plate 22 move interval Moving Unit from this intermediate orientation to (+X) direction time, substrate moves also running fix to the position directly below XP23 in upper object stage portion 3 with reciprocal carrier 23R to (+X) direction. Now, version also moves to (+X) direction with integral manner with reciprocal carrier 23L, thus being positioned at the position XP21 close with the version rinser (omitting diagram) configured in the side, (+X) direction of printing equipment 100.

In contrast, when by making the axial rotary of reciprocal carrier horizontal drive motor M21 and prescribed direction opposite direction rotate to make reciprocal carrier holding plate 22 move interval Moving Unit to (-X) direction, version moves also running fix to the position directly below XP23 in upper object stage portion 3 with reciprocal carrier 23L from intermediate orientation to (-X) direction. Now, substrate also moves to (-X) direction with integral manner with reciprocal carrier 23R, thus navigating to the position XP25 close with the base plate cleaning device (omitting diagram) configured in the side, (-X) direction of printing equipment 100. So, in this manual, as reciprocal carrier position in the X direction, it is stipulated that 5 position XP21～XP25. That is, version delivery position XP21 is the position near version rinser in the reciprocal carrier 23L of version 3 the position XP21～XP23 being positioned, and refers to carry out the X-direction position of the carrying-in/carrying-out of edition PP between version rinser. Substrate transfer position XP25 is the position near base plate cleaning device in the reciprocal carrier 23R of substrate 3 the position XP23～XP25 being positioned, and refers to carry out the X-direction position of the carrying-in/carrying-out of substrate SB between base plate cleaning device. It addition, position XP23 refers to that the adsorption plate 34 in upper object stage portion 3 is mobile on vertical Z adsorbs the X-direction position keeping version PP or substrate SB. In this manual, when version is positioned at X-direction position XP23 with reciprocal carrier 23L, this position XP23 is called " version absorption position XP23 ", and when substrate is positioned at X-direction position XP23 with reciprocal carrier 23R, this position XP23 is called " substrate adsorption position XP23 ". It addition, be called " conveyance position " by so utilizing reciprocal carrier 23L, 23R to transport the position on the vertical Z of edition PP or substrate SB, i.e. height and position.

The gap value between substrate SB and blanket it addition, in the present embodiment, when the gap value between version PP and blanket during in order to control to portray pattern exactly and transfer, it is necessary to the thickness of measurement version PP and substrate SB.Therefore, it is provided with edition thickness measurement sensor SN22 and substrate thickness measurement sensor SN23. Additionally, in the present embodiment, utilize the reflection type optical sensor two sensors with light-projecting portion and light accepting part as SN22, SN23 but it also may to utilize the sensor except this optical pickocff.

Facing position XP23 is configured with object stage portion 3. On this in object stage portion 3, the ball screw mechanism 31 that to be fixed with on vertical Z extended, the upper end of this ball screw mechanism 31 is connected with the rotating shaft (omitting diagram) of the 1st lifting of object loading table motor M31. And, ball screw mechanism 31 is screwed with ball screw support (omitting diagram). This ball screw support is fixed with carriage 32, lifts at vertical Z integratedly with ball screw support. And then, the frame face of this carriage 32 supports and has other ball screw mechanism (omitting diagram). This ball screw mechanism is provided with the ball screw that the pitch of the ball screw of the above-mentioned ball screw mechanism of pitch ratio 31 is less, its upper end and the 2nd lifting of object loading table motor M32(Fig. 3) rotating shaft (omit diagram) be connected, and be screwed with ball screw support at central part.

This ball screw support is provided with loading stand 33. It addition, the lower surface at loading stand 33 is provided with the adsorption plate 34 that the metals such as such as aluminium alloy manufacture. Thus, lifting of object loading table motor M31, M32 are operated according to the action command of the motor control part 63 from control portion 6, thus adsorption plate 34 lifting moving on vertical Z. It addition, in the present embodiment, combination has the ball screw mechanism of different pitch, thus, makes adsorption plate 34 lift by making the 1st lifting of object loading table motor M31 be operated with relatively wide pitch, namely can make adsorption plate 34 high-speed mobile. In addition, make adsorption plate 34 lift by making the 2nd lifting of object loading table motor M32 be operable to smaller pitch, namely adsorption plate 34 critically can be positioned.

At the lower surface of this adsorption plate 34, namely keeping in absorption being provided with adsorbing mechanism on the adsorption plane of version PP or substrate SB, this adsorbing mechanism is connected with negative pressure feeding source via negative pressure feeding path. And, carry out, according to the opening and closing instruction in the valve control portion 64 from control portion 6, absorption valve V31, V32(Fig. 3 that open and close controlling is connected with adsorbing mechanism), thus enable that adsorbing mechanism absorption version PP or substrate SB. In addition, in the present embodiment, above-mentioned adsorbing mechanism and as described later absorption keep the adsorbing mechanism of blanket to utilize the equipment of factory as negative pressure feeding source but it also may adopt and be equipped with the negative pressure feeding portions such as vacuum pump on the device 100 and supply the structure of negative pressure from this negative pressure feeding portion to adsorbing mechanism.

In the upper object stage portion 3 so constituted, after utilizing the reciprocal carrier 23L of version of conveying unit 2 that version is transported to via conveyance space the version absorption position XP23 of underface in upper object stage portion 3 from the left side of Fig. 1, the adsorption plate 34 in upper object stage portion 3 declines and adsorbs maintenance version PP. In contrast, when version is positioned at the position directly below in object stage portion 3 with reciprocal carrier 23L, when having adsorbed the adsorption plate 34 releasing absorption of version PP, version PP is transferred and is placed in conveying unit 2. So, between conveying unit 2 and upper object stage portion 3, carry out the handing-over of version.

It addition, substrate SB is also likewise held in version PP in upper object stage portion 3.That is, utilize the reciprocal carrier 23R of substrate of conveying unit 2 by substrate SB from the right side of Fig. 1 after conveyance space transports the position directly below in supreme object stage portion 3, the adsorption plate 34 in upper object stage portion 3 declines and adsorbs maintenance substrate SB. In contrast, when substrate is positioned at the position directly below in object stage portion 3 with reciprocal carrier 23R, when having adsorbed the absorption releasing of adsorption plate 34 in the upper object stage portion 3 of substrate SB, substrate SB is transferred and is placed into conveying unit 2. So, the handing-over of substrate SB is carried out between conveying unit 2 and upper object stage portion 3.

In the lower section (hereinafter, referred to " below vertical " or " (-Z) direction ") of the vertical in upper object stage portion 3, the upper surface at stone platform 1 configures location division 4. As it is shown in figure 1, in this location division 4, gripper shoe 41 is configured to flat-hand position in the way of striding across the recess of stone platform 1, and is fixed on the upper surface of stone platform 1. It addition, be fixed with positionable stage 42 on the upper surface of this gripper shoe 41. And, object stage portion 5 under placing on the positionable stage 42 of location division 4, the adsorption plate 34 in the upper surface in lower object stage portion 5 and upper object stage portion 3 is in opposite directions. The upper surface in this lower object stage portion 5 can adsorb maintenance blanket BL, and control portion 6 can position the blanket BL in lower object stage portion 5 accurately by controlling positionable stage 42.

Above the vertical that positionable stage 42 has the stage base 421 being fixed in gripper shoe 41, be arranged in stage base 421 and support the object stage top 422 in lower object stage portion 5. These stage base 421 and object stage top 422 are respectively provided with the architrave shape at central part opening. Additionally, between these stage base 421 and object stage top 422, each adjacent corner at object stage top 422 is configured with the supporting constructions 423 such as such as crossed roller bearing (crossrollerbearing), wherein, above-mentioned supporting mechanism 423 has 3 degree of freedom in direction of rotation, X-direction and Y-direction that the rotating shaft to extend on vertical Z is center of rotation. It addition, be provided with ball screw mechanism (omitting diagram) in each supporting construction 423, and object stage driving motor M41(Fig. 3 is installed on each ball screw mechanism). And, each object stage drives motor M41 to be operated according to the action command of the motor control part 63 from control portion 6, thus forms relatively larger space at the central part of positionable stage 42 while making object stage top 422 move in horizontal plane. It addition, can rotate with vertical axis for center of rotation, the adsorption plate 51 in lower object stage portion 5 is positioned. In addition, make use of one of reason of positionable stage 42 with hollow space in the present embodiment, be to utilize shoot part 43 to the blanket BL on the upper surface being maintained at lower object stage portion 5 and to be maintained on the substrate SB on the lower surface in upper object stage portion 3 telltale mark formed and shoot.

Lower object stage portion 5 has adsorption plate 51, post component 52, stage base 53 and lifter pin portion 54. In stage base 53, fore-and-aft direction Y is arranged side by side the opening of 3 long hole shape extended on left and right directions X. And, in the way of to make the central opening overlap of these elongated hole openings and positionable stage 42 when overlooking from above, stage base 53 is fixed on positionable stage 42. It addition, be loosely inserted a part for shoot part 43 in above-mentioned elongated hole opening.It addition, be equipped with post component 52 and each top braces adsorption plate 51 (+Z) from the upper surface corner of stage base 53.

This adsorption plate 51 is such as made up of the metallic plate of aluminium alloy etc. Upper surface at adsorption plate 51 is provided with adsorbing mechanism (omitting diagram). Adsorbing mechanism is connected with the one end of malleation supplying tubing (omitting diagram), and the other end of malleation supplying tubing is connected with pressurization manifold. And then, the pars intermedia in each malleation supplying tubing is provided with pressurizing valve V51(Fig. 3). The air of the constant pressure being always supplied with carrying out pressure regulation with the actuator forced air to supplying from the equipment of factory to this pressurization manifold and obtain. Therefore, when selectively turning on desired pressurizing valve V51 according to the action command in the valve control portion 64 from control portion 6, to supplying the forced air after pressure regulation with the selected pressurizing valve V51 adsorbing mechanism being connected.

It addition, supply forced air can not only be selected to a part for adsorbing mechanism, additionally it is possible to select supply negative pressure. That is, specific each adsorbing mechanism is connected with one end of negative pressure feeding pipe arrangement (omitting diagram), and the other end is connected with negative pressure manifold. And then, absorption valve V52(Fig. 3 is installed between the pars intermedia of each negative pressure feeding pipe arrangement). This negative pressure manifold is connected via actuator with negative pressure feeding source, thus being always supplied with the negative pressure of setting. Therefore, the negative pressure when selectively turning on desired absorption valve V52 according to the action command in the valve control portion 64 from control portion 6, after the adsorbing mechanism supply pressure regulation being connected with selected absorption valve V52.

So, in the present embodiment, by the open and close controlling of valve V51, V52 being made blanket BL local or being adsorbed on all sidedly on adsorption plate 51, or can by making blanket BL expand partly and this blanket BL is pressed on the version PP or substrate SB that are maintained in upper object stage portion 3 to supplying air between adsorption plate 51 and blanket BL partly.

In lifter pin portion 54, lifter plate 541 is set to can be freely lifted between adsorption plate 51 and stage base 53. This lifter plate 541 is formed with notch part in many places, is therefore prevented from interfering with shoot part 43. It addition, be equipped with multiple lifter pin 542 above vertical from the upper surface of lifter plate 541. On the other hand, the lower surface of lifter plate 541 and pin lift cylinder CL51(Fig. 3) it is connected. And, the switching of valve control portion 64 and the opening and closing of the pin lift cylinder CL51 valve being connected in control portion 6, thus make pin lift cylinder CL51 be operable to make lifter plate 541 lift. Its result, all of lifter pin 542 carries out relative to upper surface and the adsorption plane of adsorption plate 51 retreating and moves. Such as, prominent from the upper surface of adsorption plate 51 to (+Z) direction by lifter pin 542, it is possible to utilize not shown blanket carrying manipulator that blanket BL is placed into the top of lifter pin 542. And, place after blanket BL, then pass through the side making (-Z) direction that lifter pin 542 retreats the upper surface to adsorption plate 51, blanket BL transfer is placed on the upper surface of adsorption plate 51. Thereafter, it is in due course as described later, utilizes the blanket thickness measurement sensor SN51(Fig. 3 of vicinity being arranged in adsorption plate 51) measure the thickness of this blanket BL.

As it has been described above, in the present embodiment, upper object stage portion 3 and lower object stage portion 5 configure opposite each other on vertical Z.And, between upper object stage portion 3 and lower object stage portion 5, it is respectively configured the press section 7 of the blanket BL being pressurized from above by being placed in lower object stage portion 5 and version PP, substrate SB and blanket BL are carried out the pre-determined bit portion 8 of pre-determined bit.

Press section 7, by utilizing switching mechanism (omitting diagram) to make the pressing member 71 that the vertical upper side at adsorption plate 51 is arranged lift on vertical Z, it is possible to switch between 2 states. That is, when switching mechanism makes pressing member 71 decline, the state (blanket pressed state) of blanket BL pressed portion 7 pressing being on adsorption plate 51. On the other hand, when switching mechanism makes pressing member 71 rise, it is in press section 7 and relieves the state (blanket pressing releasing state) of the pressing to blanket BL from blanket BL separation.

In pre-determined bit portion 8, pre-determined bit top 81 and pre-determined bit bottom 82 configure with 2 layer stackup on vertical Z. Pre-determined bit top 81 in them is arranged in the vertical upper side of pre-determined bit bottom 82, thus with being close to of blanket BL before, to utilizing the version reciprocal carrier 23L version PP kept and utilizing the substrate reciprocal carrier 23R substrate SB kept to position on the XP23 of position. On the other hand, the blanket BL on the adsorption plate 51 being placed on lower object stage portion 5, before being close to version PP or substrate SB, is positioned by pre-determined bit bottom 82. Additionally, pre-determined bit top 81 and pre-determined bit bottom 82 substantially have identical structure. Therefore, below, the structure on pre-determined bit top 81 is described, and pre-determined bit bottom 82 is marked same or equivalent accompanying drawing labelling and omits structure explanation.

In pre-determined bit top 81, the mount structure body 811 of architrave shape is provided with 4 upward guide pieces 812 in the way of moving freely. That is, mount structure body 811 is to be combined on left and right directions X to be separated from each other and 2 horizontal pane extended on fore-and-aft direction Y and being separated from each other on fore-and-aft direction Y and 2 horizontal pane extended on left and right directions X. And, as in figure 2 it is shown, on the left side horizontal plate in 2 horizontal plates extended on fore-and-aft direction Y, be provided with upward guide piece 812 in the central portion, this upward guide piece 812 can utilize the ball screw mechanism omitting diagram to move freely on left and right directions X. And, the driving motor M81(Fig. 3 being connected with this ball screw mechanism) it is operated according to the action command of motor control part 63 from control portion 6, thus upward guide piece 812 moves on left and right directions X. It addition, at right side horizontal plate also as described above, utilize and drive motor M81 to make upward guide piece 812 move on left and right directions X. And then, each horizontal plate in 2 horizontal plates extended on left and right directions X also as described above, utilizes and drives motor M81 to make upward guide piece 812 move on fore-and-aft direction Y. So, 4 upward guide pieces 812 surround version PP or substrate SB on the vertical lower position of position XP23, each upward guide piece 812 can independently with version PP etc. close to or separate. Thereby, it is possible to make edition PP and substrate SB move horizontally on the hand of reciprocal carrier or rotate and position by controlling the amount of movement of each upward guide piece 812.

It addition, in the present embodiment, as explained below, after the patterned layer on blanket BL is transferred on substrate SB, blanket BL is peeled off from substrate SB, but produces electrostatic at this stripping bench.It addition, after utilizing version PP coating layer on blanket BL to portray pattern, by blanket BL from version PP peel off time, also produce electrostatic. Therefore, in the present embodiment, in order to remove electrostatic, it is provided with de-power unit 9. This de-power unit 9 has the ion generator 91 of the space illumination ion laterally clamped from (+X) by upper object stage portion 3 and lower object stage portion 5.

Control portion 6 has CPU(CentralProcessingUnit) 61, memorizer 62, motor control part 63, valve control portion 64, image processing part 65 and display/operating portion 66, CPU61 controls each portion of device based on the program being stored in advance in memorizer 62, and goes out to perform like that pattern as shown in Figure 4 and portray process and transfer process.

Fig. 4 shows the flow chart of the molar behavior of the printing equipment of Fig. 1. Under the original state of this printing equipment 100, version reciprocal carrier 23L and substrate are respectively positioned on centre position XP22, XP24 with reciprocal carrier 23R. Then, synchronously perform to put into the input operation (step S1) of version PP with the transporting operation of the version carrying manipulator of version rinser (omitting diagram) conveyance version PP, and synchronously perform to put into the input operation (step S2) of substrate SB with the transporting operation of substrate transfer robot (omitting diagram) the conveyance substrate SB of base plate cleaning device. In addition, owing to have employed the reciprocal carrier 23R of the reciprocal carrier 23L of version and substrate with integral manner mobile such conveyance structure on left and right directions X, thus moving into an edition PP(step S1) after, move into substrate SB(step S2) but it also may change both orders.

So, in the present embodiment, before process portrayed by execution pattern, not only prepare version PP, be also prepared for substrate SB, thus as described in detail below, being consecutively carried out pattern and portray process and transfer process. Thereby, it is possible to shorten until the coating layer featuring pattern on blanket BL is transferred to the interval on substrate SB such that it is able to perform stable process.

In following step S3, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, so that reciprocal carrier holding plate 22 moves to (-X) direction. Thus, version is moved and positioned into an edition absorption position XP23 with reciprocal carrier 23L. Then, version makes rotating shaft rotate with reciprocal carrier lift motor M22L, so that lifter plate 231 in downward direction (-Z) is mobile. Thus, version PP is when being supported on version with being moved and positioned on reciprocal carrier 23L than the low predetermined bit positions in conveyance position.

Then, upward guide piece drives motor M81 to be operable to make upward guide piece 812 move, and each upward guide piece 812 abuts against with being supported on the version end face of the version PP on reciprocal carrier 23L, is thus navigated on horizontal level set in advance by version PP. Hereafter, each upward guide piece drives motor M81 to be operated in the opposite direction, thus each upward guide piece 812 separates with version PP. So, when the pre-determined bit process of version PP terminates, lifting of object loading table motor M31 makes axial rotary prescribed direction rotate, so that adsorption plate 34 in downward direction (-Z) declines and abuts against with the upper surface of version PP. Then, the adsorbing mechanism of upper object stage is utilized to be adsorbed onto on adsorption plate 34 by version PP by unlatching valve V31, V32.

When so the absorption of version PP being terminated, lifting of object loading table motor M31 rotates in the opposite direction, thus the vertical top position that adsorption plate 34 rises above to vertical when absorption maintains edition PP and moved by version PP to version absorption position XP23.Then, version makes rotating shaft rotation be moved above vertical by lifter plate 231 with reciprocal carrier lift motor M22L, thus from predetermined bit positions, version is moved and positioned into conveyance position with reciprocal carrier 23L, namely on version absorption position XP23. Hereafter, reciprocal carrier horizontal drive motor M21 makes reciprocal carrier holding plate 22 move to (+X) direction by making rotating shaft rotate, thus emptying version is navigated to centre position XP22 with reciprocal carrier 23L.

In following step S4, object stage drives motor M41 to be operable to make positionable stage 42 move to initial position. Thus, each starting point is in identical position. Then, pin lift cylinder CL51 carries out action to make lifter plate 541 rise, so that lifter pin 542 is protruding above to vertical from the upper surface of adsorption plate 51. So, when preparing to terminate to the input of blanket BL, omit the blanket carrying manipulator of diagram access (access) device 100 and blanket BL is placed into lifter pin 542 top after, keep out of the way from device 100. Then, pin lift cylinder CL51 carries out action to make lifter plate 541 decline. Thus, lifter pin 542 declines when supporting blanket BL and is placed on adsorption plate 51 by blanket BL. Then, upward guide piece drives motor M82 to be operable to make upward guide piece 822 move, and the end face of each upward guide piece 822 and the blanket BL being supported on adsorption plate 51 abuts against, and blanket BL is positioned at predetermined horizontal level.

When so the pre-determined bit process of blanket BL being terminated, opening absorption valve V52, thus blanket BL is adsorbed onto on adsorption plate 51 by the negative pressure after the adsorbing mechanism supply pressure regulation of downward object stage. And then, each upward guide piece drives motor M82 to make axial rotary opposite direction rotate, so that each upward guide piece 822 separates with blanket BL. Thus, pattern is portrayed the preparation of process and is terminated.

In following step S5, sensor levels drives cylinder CL52(Fig. 3) carry out action to make blanket thickness measurement sensor SN51 be positioned at the position directly above of right part of blanket BL. Then, the information relevant to the thickness of blanket BL is exported to control portion 6 by blanket thickness measurement sensor SN51, thus measures the thickness of blanket BL. Hereafter, the sensor horizontal drive cylinder CL52 carries out action in the opposite direction to make blanket thickness measurement sensor SN51 keep out of the way from adsorption plate 51.

Then, the 1st lifting of object loading table motor M31 makes axial rotary prescribed direction rotate, and makes an edition PP move near blanket BL so that adsorption plate 34 in downward direction (-Z) declines. And then, the 2nd lifting of object loading table motor M32 makes rotating shaft rotate, so that adsorption plate 34 adjusts the interval between the version PP on vertical Z and blanket BL, i.e. gap value exactly with little pitch lifting. Additionally, this gap value is to be determined based on the thickness measurement result of version PP and blanket BL by control portion 6.

Then, pressing member 71 decline making press section 7 utilizes pressing member 71 to press the whole circumference of blanket BL. Then, valve V51, V52 carry out action to supplying air between adsorption plate 51 and blanket BL partly, so that blanket BL expands partly. This floats portion compresses to the version PP being maintained at upper object stage portion 3. Its result, the central part of blanket BL and version PP are close to, thus the pattern (omitting diagram) being previously formed in the lower surface of edition PP abuts against with the coating layer being pre-coated with at the upper surface of blanket BL, thus portray pattern on this coating layer to form patterned layer.

In following step S6, the 2nd lifting of object loading table motor M32 makes rotating shaft rotation make adsorption plate 34 increase, thus being peeled off from blanket BL by version PP. It addition, in order to carry out lift-off processing, and making edition PP process risen concurrently, the open and-shut mode in good time switching valve V51, V52 to apply negative pressure to blanket BL, thus makes attraction blanket BL close to adsorption plate 51 side. Thereafter, the 1st lifting of object loading table motor M31 makes rotating shaft rotate to make adsorption plate 34 increase, thus version PP is positioned at ion generator 91 almost at sustained height except electric position. It addition, make pressing member 71 rising of press section 7 release the pressing to blanket BL. Then, ion generator 91 is operable to remove the electrostatic produced when carrying out above-mentioned version lift-off processing. When this terminates except electric treatment, the 1st lifting of object loading table motor M31 makes rotating shaft rotate, so that adsorbing till the adsorption plate 34 of state maintaining edition PP rises to initial position (position higher than version absorption position XP23).

In following step S7, rotary actuator RA2, RA2 carry out action to make version hand 232,232 selection 180 ° navigate to backward position from origin position. Thus, hand positions never uses posture to be switched to and uses posture, thus the reception receiving the version PP used prepares to terminate. Then, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, and thus makes reciprocal carrier holding plate 22 move to (-X) direction. Thus, version is moved and positioned into an edition absorption position XP23 with reciprocal carrier 23L.

On the other hand, 1st lifting of object loading table motor M31 makes rotating shaft rotate, thus make absorption maintain edition PP state adsorption plate 34 towards the reciprocal carrier 23L of version hand 232,232 decline make an edition PP be positioned on hand 232,232 after, close valve closing V31, V32, the thus adsorbing mechanism of releasing adsorption plate 34 absorption to version PP, thus the handing-over of the version PP on conveyance position terminates. Then, the 1st lifting of object loading table motor M31 makes rotating shaft reverse, till thus making adsorption plate 34 rise to initial position. Thereafter, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, and thus makes reciprocal carrier holding plate 22 move to (+X) direction. Thus, version is moved and positioned into centre position XP22 with reciprocal carrier 23L when maintaining and using edition PP.

In following step S8, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, and thus makes reciprocal carrier holding plate 22 move to (+X) direction. Thus, the substrate keeping substrate SB before treatment is moved and positioned into substrate adsorption position XP23 with reciprocal carrier 23R. Then, process with to the pre-determined bit of version PP and adsorption plate 34 is in the same manner as the adsorption treatment of version PP, perform the pre-determined bit to substrate SB and process and adsorption treatment to substrate SB. Thereafter, detect adsorbed substrate SB time, lifting of object loading table motor M31 makes rotating shaft rotate, and thus makes the adsorption plate 34 of state that absorption maintains substrate SB rise above to vertical and makes substrate SB move to the position higher than substrate adsorption position XP23. Then, substrate makes rotating shaft rotate with reciprocal carrier lift motor M22R, thus makes the reciprocal carrier 23R of substrate be moved and positioned into conveyance position from predetermined bit positions. Thereafter, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotation make reciprocal carrier holding plate 22 move to (-X) direction, thus with reciprocal carrier 23R, emptying substrate is navigated to centre position XP24.

In following step S9, after measuring blanket thickness, and performing precision positioning, perform transfer process. That is, in the same manner as the thickness measurement portrayed at pattern in process, the thickness of measurement blanket BL. In addition, before so firm desirable pattern is portrayed, not only measure the thickness of blanket BL, also just to measure the thickness of blanket BL before transferring, it mainly reason for this is that, a part of swelling of blanket BL and make the thickness of blanket BL change in time, by to measure blanket thickness before transferring just, it is possible to carry out high-precision transfer process.

Then, the 1st lifting of object loading table motor M31 makes axial rotary prescribed direction rotate, and thus makes adsorption plate 34 in downward direction (-Z) decline and is moved near blanket BL by substrate SB. And then, the 2nd lifting of object loading table motor M32 makes rotating shaft rotate, and thus makes adsorption plate 34 lift the interval adjusting between the substrate SB on vertical Z and blanket BL exactly, i.e. gap value with little pitch. This gap value is to be determined based on the thickness measurement result of substrate SB and blanket BL by control portion 6. Then, in the same manner as portraying pattern (step S5), utilize pressing member 71 to press the circumference of blanket BL.

So, all scheduled position of substrate SB and blanket BL, and separate the interval being suitable to transfer process and be positioned, but it is transferred on substrate SB exactly to will be formed in the patterned layer on blanket BL, it is necessary to critically both are carried out para-position. Therefore, in the present embodiment, telltale mark and formation telltale mark on substrate SB that shoot part 43 is formed portraying pattern on blanket BL shoot, and by the image processing part 65 of these images output to control portion 6. Then, control portion 6 obtains for making blanket BL carry out the controlled quentity controlled variable of para-position relative to substrate SB based on these images, and is made the action command of the object stage driving motor M41 for location division 4. And, object stage drives motor M41 to be operated according to above-mentioned control instruction, thus make adsorption plate 51 move in the horizontal direction and be centered around vertical Z extend imaginary rotating shaft rotate, thus by blanket BL critically with substrate SB precision para-position (localization process).

Then, valve V51, V52 carry out action to supplying air between adsorption plate 51 and blanket BL partly, so that blanket BL expands partly. This floats portion compresses and is maintained on the substrate SB in object stage portion 3. Its result, blanket BL and substrate SB is close to. Thus, the pattern critically para-position of the patterned layer of blanket BL side and the lower surface of substrate SB, and be transferred on substrate SB.

In following step S10, peel off with version in the same manner as (step S6), perform from blanket BL, peel off substrate SB, substrate SB navigated to except in electric position, releasing pressing member 71 to the pressing of blanket BL, except electricity. Thereafter, the 1st lifting of object loading table motor M31 makes rotating shaft rotate, till thus making the adsorption plate 34 of state that absorption maintains substrate SB rise to initial position (position higher than conveyance position).

In following step S11, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, and thus makes reciprocal carrier holding plate 22 move to (+X) direction. Thus, substrate is moved and positioned into substrate adsorption position XP23 with reciprocal carrier 23R. On the other hand, the 1st lifting of object loading table motor M31 makes rotating shaft rotate, and thus makes the adsorption plate 34 of the state that absorption maintains substrate SB decline to the hand 232,232 of the reciprocal carrier 23R of substrate.Thereafter, close valve closing V31, V32, thus release the adsorbing mechanism absorption to substrate SB. Then, the 1st lifting of object loading table motor M31 makes rotating shaft reverse, and thus makes adsorption plate 34 rise to initial position. Thereafter, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, and thus makes reciprocal carrier holding plate 22 move to (-X) direction and makes the substrate maintaining the state of this substrate SB be moved and positioned into centre position XP24 with reciprocal carrier 23R.

In following step S12, valve V51, V52 carry out action to release the adsorption plate 51 absorption to blanket BL. Then, pin lift cylinder CL51 carries out action to make lifter plate 541 rise, and is thus lifted from adsorption plate 51 to vertical by the blanket BL used. Then, blanket carrying manipulator accesses the blanket BL that device 100 accepts to have used from the top of lifter pin 542, and keeps out of the way from device 100. Then, pin lift cylinder CL51 carries out action to make lifter plate 541 decline, and thus makes lifter pin 542 drop to the lower direction (-Z) of adsorption plate 51.

In following step S13, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, reciprocal carrier holding plate 22 moves to (+X) direction. Thus, version is made to be moved and positioned into an edition delivery position XP21 with reciprocal carrier 23L. Then, the version carrying manipulator of version rinser takes out the version PP used from printing equipment 100. So at version PP when taking out of end, reciprocal carrier horizontal drive motor M21 make rotating shaft rotate make reciprocal carrier holding plate 22 move to (-X) direction, thus version is navigated to centre position XP22 with reciprocal carrier 23L.

In following step S14, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotate, and thus makes reciprocal carrier holding plate 22 move to (-X) direction. Thus, substrate is moved and positioned into substrate transfer position XP25 with reciprocal carrier 23R. Then, the substrate transfer robot of base plate cleaning device takes out the substrate SB being subject to transfer process from printing equipment 100. When taking out of end of such substrate SB, reciprocal carrier horizontal drive motor M21 makes rotating shaft rotation make reciprocal carrier holding plate 22 move to (+X) direction, thus with reciprocal carrier 23R, substrate is navigated to centre position XP23. Thus, printing equipment 100 returns original state.

In the printing equipment 100 of present embodiment described above, the adsorbing mechanism of version PP and substrate SB is kept to illustrate absorption based on Fig. 5, Fig. 6 A and Fig. 6 B. Fig. 5 shows the figure that the axonometric chart of the configuration of absorbing unit, Fig. 6 A and Fig. 6 B are the adsorption methods that version is described. Additionally, Fig. 6 A observes from adsorption plane side that absorption keeps the adsorption plate 34 of version PP and figure, Fig. 6 B of obtaining is the figure observing the A-A section of Fig. 6 A in the way of the adsorption plane of adsorption plate 34 is in downside and obtaining.

In the present embodiment, as the absorbing unit constituting adsorbing mechanism, it is provided with the adsorption plate 34 being formed with adsorption tank 351 on adsorption plane and the multiple absorption layers 352 being disposed on adsorption plate 34. As shown in Figure 6B, adsorption tank 351 is connected via valve V31 negative pressure feeding source pre-assembled with in the factory being provided with printing equipment 100, it addition, each absorption layer 352 is connected via valve V32 negative pressure feeding source pre-assembled with in the factory being provided with printing equipment 100. And, when opening in the valve V31 opening and closing instruction according to the valve control portion 64 from control portion 6, supply negative pressure to adsorption tank 351 and adsorb maintenance version PP.It addition, when opening in the valve V32 opening and closing instruction according to the valve control portion 64 from control portion 6, supply negative pressure to each absorption layer 352 and adsorb maintenance version PP.

It follows that for the configuration of adsorption tank 351 and absorption layer 352, be described in detail with reference to Fig. 5. Fig. 5 diagrammatically illustrates blanket BL absorption and is maintained at the upper surface of adsorption plate 51, and version PP is positioned at an edition state of absorption position XP23. Additionally, eliminate the diagram of version hand. In Figure 5, the region by version PP formation patterned layer in blanket BL is formed region Al as pattern and illustrates, it addition, using illustrating as effective coverage A2 with pattern formation region Al region in opposite directions in version PP. And then, using illustrating as region A3 in opposite directions with the effective coverage A2 of version PP region in opposite directions in the adsorption plane of adsorption plate 34. That is, pattern formed region Al, effective coverage A2 and in opposite directions region A3 overlook under overlapped.

The outside of the A3 of region in opposite directions that adsorption tank 351 and each absorption layer 352 are arranged in the adsorption plane of adsorption plate 34. In the present embodiment, adsorption tank 351 be formed as surrounding region A3 in opposite directions around shape, each absorption layer 352 is arranged in the region more more outward than adsorption tank 351. Absorption layer 352 respectively arranges 5 along each limit of the adsorption plate 34 of rectangle, and the absorption layer 352 in corner configuration is that each limit is common, is altogether provided with 16. As shown in Figure 6A, when opening in opening and closing instruction according to the valve control portion 64 from control portion 6 of valve V31, V32, the adsorption tank 351 and the absorption layer 352 that are arranged in the outside of region A3 in opposite directions adsorb version PP in the region in the outside of effective coverage A2. And, make edition PP and blanket BL pressurization abutting portray to carry out pattern in this condition.

As previously discussed, when pattern is portrayed, the outside of the effective coverage A2 of version PP being adsorbed, thus the effective coverage A2 of version PP directly will not be adsorbed by adsorption tank 351 and absorption layer 352. Therefore, it is possible to prevent under the localized indentation occurring to produce with absorption on the effective coverage A2 of version PP or the decline of flatness such that it is able to carry out pattern well and portray.

It addition, as absorbing unit, use multiple absorption layer 352, it is possible to easily make edition PP peel off near the regional area adsorbed by absorption layer 352 relative to blanket BL. This is because, the absorption of version PP is the absorption of local by absorption layer 352, thus is difficult to occur vacuum breaking, and, by adsorbing at multiple positions, vacuum breaking is caused, and the failed risk that version keeps suppresses low, and can promote to separate from blanket BL. That is, peel off version PP from blanket BL easily to carry out near each regional area adsorbed by multiple absorption layers 352. It addition, except absorption layer 352, by arranging the adsorption tank 351 that can adsorb maintenance on a large scale, it is possible to by version PP on a large scale in adsorb maintenance more firmly such that it is able to stably carry out pattern and portray. Additionally, when being peeled off from blanket BL by version PP, if the part at adsorption tank 351 produces vacuum breaking, then this impact likely involves adsorption tank 351 entirety, makes absorption affinity produce big variation, thus cannot be carried out stable stripping. In order to avoid such problem, it is also possible to the absorption not carrying out adsorption tank 351 when peeling off keeps.

It addition, employ absorption layer 352 in the present embodiment, but enable edition PP part that elastic deformation occurs when peeling off from blanket BL separation preferably in absorption layer 352 is arranged on. If using such absorption layer 352, then being made the part generation elastic deformation of absorption layer 352 when peeling off during to blanket BL side stretching at version PP, be it is possible to suppress the deformation of version PP.It is as a result, it is possible to suppress the version PP when peeling off that breakage occurs.

It addition, be formed with adsorption tank 351 as the opening set by the adsorption plane at adsorption plate 34, it is possible to reduce aperture area. It is as a result, it is possible to be reduced to the negative pressure amount adsorbing maintenance version PP and should supply, it is thus possible to quickly adsorb maintenance.

It addition, as embodiment described above, there is following such advantage by advance multiple absorption layers 352 being arranged in the outside of adsorption tank 351. When utilizing multiple absorption layer 352 to adsorb maintenance version PP, it is possible to version PP bending occurs between each absorption layer 352. But, according to above-mentioned configuration, make adsorption tank 351 between multiple absorption layers 352 and the effective coverage A2 of version PP, it is possible to suppress the effective coverage A2 that the impact of bending involves edition PP such that it is able to carry out pattern more well and portray.

Above, keep the situation of version PP to be illustrated the absorption when pattern is portrayed, but the absorption to substrate SB when transfer pattern layer keeps carrying out similarly. Namely, due to transfer time with the pattern of blanket BL formed region A1 substrate SB in opposite directions effective coverage vertical view under consistent with the effective coverage A2 of version PP, so by using adsorption tank 351 arranged as described above and absorption layer 352, at the outside sorbing substrate SB of effective coverage. It addition, by utilizing, in the absorption maintenance to substrate SB, the adsorbing mechanism illustrated at above-mentioned embodiment, thus also functioning to above-mentioned various effects and effect when transfer.

In above present embodiment, the patterning device function partly as the present invention participating in the operation that pattern is portrayed and transferred in printing equipment 100, " the formation pattern " that be respectively equivalent to the present invention is portrayed and transferred to pattern. Additionally, version PP and substrate SB is equivalent to " object " of the present invention, adsorption tank 351 is equivalent to " opening " of the present invention, and absorption layer 352 is equivalent to " adsorption section, local " of the present invention, valve control portion 64 and valve V31, V32 cooperation " negative pressure feeding unit " function as the present invention.

Additionally, the present invention is not limited to above-mentioned embodiment, it is possible in scope without departing from the spirit, foregoing is applied various changes. Such as, in the above-described embodiment, patterning device performs pattern and portrays and transfer this two side, but can also only perform either party.

It addition, be provided with adsorption tank 351 and multiple absorption layer 352 as absorbing unit, but be set as two kinds of absorbing units it is not necessary to important document, absorbing unit can also be only a kind, it is also possible to arranges the absorbing unit of more than 3 kinds. It addition, when arranging multiple absorbing unit, use which absorbing unit to be able to come discretionary according to each condition in which operation. And then, the adsorption tank 351 around shape may not be formed as opening, it is also possible to form mode in addition to the slots, its configuration and quantity also are able to suitable change. It addition, also be able to adopt the mode except absorption layer as adsorption section, local. Such as, as adsorption section, local, it would however also be possible to employ form adsorption hole at adsorption plate 34 and supply the mode of negative pressure to this adsorption hole.

It addition, in the above-described embodiment, use identical absorbing unit to adsorb maintenance version PP and substrate SB, but as long as the outside of the effective coverage of absorption version PP and substrate SB, then also be able to use mutually different absorbing unit to adsorb maintenance.

Industrial applicability

The present invention can be applicable to form pattern to carrying body or formed all devices of pattern by carrying body to object by making the object of carrying body and tabular abut against cause object.

Claims

1. a patterning device, makes the object that the pattern in carrying body forms region and tabular offset and fetches formation pattern, have:

Negative pressure feeding unit, is used for supplying negative pressure,

Absorbing unit, utilizes the negative pressure by the supply of described negative pressure feeding unit to adsorb the described object of maintenance,

The outside forming region in opposite directions, region when forming described pattern with described pattern on described object is adsorbed by described absorbing unit;

Described absorbing unit has adsorption plate, this adsorption plate for adsorb on the adsorption plane keeping described object with described pattern formed region in opposite directions, region outside, be provided with by described negative pressure feeding unit supply negative pressure opening,

Described opening is surround the adsorption tank forming region in opposite directions, region when the described pattern of formation with described pattern on described adsorption plane, it is characterised in that

Described absorbing unit also has adsorption section, multiple local, and pattern described in ratio on the object forms the region that region is more outward, and adsorption section, multiple described local adsorbs described object respectively partly,

Adsorption section, multiple described local is more more outward than described adsorption tank on described adsorption plate.

2. patterning device as claimed in claim 1, it is characterised in that

This patterning device also has the unit that the described object adsorbed in adsorption section, described local and described adsorption tank is peeled off carrying body.

3. patterning device as claimed in claim 1, it is characterised in that

Adsorption section, at least some of described local in adsorption section, multiple described local is able to occur in particular directions the absorption layer of elastic deformation, this specific direction refers to, after making described object and described carrying body abut against, make the direction that described object separates with described carrying body.