CN104058278A - Transmission method of plate-like conveyed object, transmission device, and pattern forming device - Google Patents

Abstract

The invention provides a transmission method of a plate-like conveyed object, a transmission device, and a pattern forming device. The transmission method of the plate-like conveyed object is as follows: the plate-like conveyed object whose periphery of the lower surface is supported and retained by a first retaining device is well conveyed to a second retaining device, and the second retaining device absorbs the upper surface of the plate-like conveyed object above the first retaining device. The transmission method comprises as follows: a first absorbing component descends at a first through hole of the second retaining device and absorbs and retains the upper surface of the plate-like conveyed object, a second absorbing component descends at a second through hole whose position is different from the position of first through hole, a different position at the upper surface of the plate-like conveyed object is absorbed and retained, the first and the second absorbing components are lifted and move backwards into the first and the second through holes, and the plate-like conveyed object is moved to the second retaining device from the first retaining device.

Description

Tabular by the transfer approach of transport object, conveyer and patterning device

Technical field

The present invention relates to a kind of by tabular be sent to the second retainer member by transport object tabular by the transfer approach of transport object and conveyer and be equipped with the patterning device of this conveyer being kept by the first retainer member.

Background technology

As manufacturing the invention of electronic component, in the past known have an invention of recording in Japanese Patent Laid-Open 2010-158799 communique for example.The invention of recording in this Japanese Patent Laid-Open 2010-158799 communique is the upper surface that dull and stereotyped blanket (blanket) is fixed on to bottom microscope carrier, on the other hand, make to form figuratum facing to below state, under face down state, utilize the fixing relief printing plate of top microscope carrier absorption, near the peristome center that is arranged on bottom microscope carrier sprays pressure gas, extrudes dull and stereotyped blanket.Make in this way blanket pressurization be contacted with relief printing plate, by extremely dull and stereotyped blanket of the pattern transfer of relief printing plate.

Summary of the invention

[problem that invention will solve]

In order to make in this way relief printing plate remain on top microscope carrier, conveying machine people wait conveyance device must be by relief printing plate with the conveyance of face down state to after under the microscope carrier of top, be sent to top microscope carrier.Therefore, conveying machine people's manipulator must avoid being formed on pattern on relief printing plate and support relief printing plate, thereby, supporting lower surface circumference, for example neighboring 10[mm of relief printing plate] keep relief printing plate with interior peripheral edge margin.Its result, the central portion that becomes relief printing plate bends to cone shape state.When relief printing plate size relatively hour, the amount of bow of relief printing plate is little, can not cause large obstacle to the transmission of top microscope carrier to the manipulator from conveying machine people, but along with relief printing plate size increases, amount of bow also becomes greatly, thereby is difficult to well relief printing plate is sent to top microscope carrier from conveying machine people.This problem is not only propping up relief printing plate dull and stereotyped blanket, the pattern transfer of relief printing plate can be produced to the situation of dull and stereotyped blanket, and also can produce in following situation,, replace the fixing relief printing plate of absorption by top microscope carrier absorption fixing base, dull and stereotyped blanket is propped up to substrate, by the pattern transfer on dull and stereotyped blanket to substrate.That is, maximized by transport object along with relief printing plate or substrate etc. are tabular, when by tabular by transport object in the time that first retainer members such as conveying machine people are sent to second retainer members such as top microscope carrier, be difficult to carry out well described transmission because of tabular by transport object is bending.

The present invention completes in view of described problem, its object is to provide a kind of technology, this technology can will be sent to the second retainer member with the tabular of state maintenance of supporting lower surface circumference by transport object well by the first retainer member, and this second retainer member is adsorbed and kept tabular by the upper surface of transport object above the first retainer member.

[solving the means of problem]

The tabular transfer approach by transport object of the present invention is to be sent to the second retainer member with the tabular of state maintenance of supporting lower surface circumference by transport object by the first retainer member, this second retainer member is adsorbed and is kept tabular by the upper surface of transport object above the first retainer member, this tabular transfer approach by transport object is characterised in that and comprises: the first adsorption step, the first through hole that makes the first adsorption element penetratingly be arranged on the second retainer member from above-below direction declines, it is tabular by the first absorption position of the upper surface of transport object that absorption maintenance is kept by the first retainer member, the second adsorption step, the second through hole that makes the second adsorption element penetratingly be arranged on the second retainer member from the position above-below direction different from the first through hole declines, and it is tabular by the second absorption positions different from the first absorption position in the upper surface of transport object that absorption keeps, and mobile step, make keeping tabular and risen by the first adsorption element of transport object and the second adsorption element, retreat respectively to the first through hole and in the second through hole, make tabularly to be moved to the second retainer member by transport object from the first retainer member.

And, the tabular conveyer by transport object of the present invention is to be sent to the second retainer member with the tabular of state maintenance of supporting lower surface circumference by transport object by the first retainer member, this second retainer member is adsorbed and is kept tabular by the upper surface of transport object above the first retainer member, and this tabular conveyer by transport object is characterised in that and comprises: the first adsorption element and the second adsorption element, and it is tabular by the upper surface of transport object that absorption keeps; And lifting mechanism, make the first adsorption element along the first mobile route lifting, this first mobile route is penetratingly arranged on the first through hole of the second retainer member by above-below direction, and make the second adsorption element along the second mobile route lifting, this second mobile route is penetratingly arranged on the second through hole of the second retainer member by the position above-below direction different from the first through hole; And, lifting mechanism is that the first adsorption element and the second adsorption element are declined, utilize respectively the first adsorption element and the second adsorption element to adsorb tabular by after the first absorption position and the second absorption position mutual different in the upper surface of transport object that maintenance is kept by the first retainer member, the first adsorption element and the second adsorption element are then retreated in the first through hole and in the second through hole by rising, make tabularly to be moved to the second retainer member by transport object from the first retainer member.

The invention (tabular by the transfer approach of transport object and conveyer) forming is in this way under the tabular state being supported at its lower surface circumference by transport object, to be kept by the first retainer member.Therefore, tabular by transport object bending, tabular by the each several part of transport object in, the displacement difference that bending causes.The first adsorption element and the second adsorption element are difference liftables, and the first adsorption element absorption maintenance is tabular by the first absorption position of the upper surface of transport object, and the second adsorption element absorption keeps tabular by the second absorption position of the upper surface of transport object.Therefore, the identical situation of the tabular displacement being caused in the bending at the first absorption position and the second absorption position place by transport object needn't be spoken more naturally, even if this displacement is mutually different, also can utilize the first adsorption element and the absorption of the second adsorption element to keep tabular by transport object.And tabular is directly to move to the second retainer member from the first retainer member under the state by the first adsorption element and the absorption of the second adsorption element by transport object, and is kept by the second retainer member absorption.Carry out in this way the tabular transmission towards the second retainer member from the first retainer member by transport object.

Here, in order to utilize respectively the first adsorption element and the absorption of the second adsorption element to keep tabular by the first absorption position of transport object and the second absorption position, be desirably and be configured to the first adsorption element distance corresponding to displacement causing with the bending at the first absorption position place that decline, and, the second adsorption element distance corresponding to displacement causing with the bending at the second absorption position place that decline, and for example, also can form as follows and make the first adsorption element and the second adsorption element lifting to driver train portion.

Driver train portion also can be configured to and comprise: lifting mechanism, is used for making the first adsorption element and the second adsorption element lifting; Mobile member, utilizes lifting mechanism and lifting along the vertical direction above the first adsorption element and the second adsorption element; The first coupling member, mobile member and the first adsorption element are linked mutually, make the first adsorption element and mobile member one lifting, and there is position regulating function,, the first adsorption element and tabular by the upper surface butt of transport object after mobile member while further declining, make the relative position displacement of the first adsorption element for mobile member, maintain the height and position of the first adsorption element; And second coupling member, mobile member and the second adsorption element are linked mutually, make the second adsorption element and mobile member one lifting, and there is position regulating function,, the second adsorption element and tabular by the upper surface butt of transport object after mobile member while further declining, make the relative position displacement of the second adsorption element for mobile member, maintain the height and position of the second adsorption element.

In addition, the conveyer forming in this way can be applicable to patterning device, this patterning device be by remain on lower microscope carrier upper surface blanket, mutually compress with the plate-shaped body that is adsorbed maintenance at the lower surface that is configured in the upper microscope carrier above lower microscope carrier and form pattern.That is, patterning device also can be configured to and comprise: conveyance device, under the state of the lower surface circumference of the plate-shaped body before supporting pattern and forming, between supreme plate-shaped body conveyance microscope carrier and lower microscope carrier; And carrying device, plate-shaped body is sent to upper microscope carrier from conveyance device; And carrying device comprises: the first adsorption element and the second adsorption element, and absorption keeps the upper surface of plate-shaped body; And lifting mechanism, make the first adsorption element along the first mobile route lifting, this first mobile route is penetratingly arranged on the first through hole of upper microscope carrier by above-below direction, and make the second adsorption element along the second mobile route lifting, this second mobile route by the position above-below direction different from the first through hole be penetratingly arranged on microscope carrier the second through hole; Lifting mechanism declines the first adsorption element and the second adsorption element, utilize respectively after the absorption of the first adsorption element and the second adsorption element keeps in the upper surface of the plate-shaped body being kept by conveyance device mutually different the first absorption position and the second absorption position, the first adsorption element and the second adsorption element are then retreated in the first through hole and in the second through hole by rising, make plate-shaped body move to upper microscope carrier from conveyance device.By this, even if the plate-shaped body bending before the pattern being kept by conveyance device forms also can be sent to upper microscope carrier from this conveyance device by plate-shaped body, adsorbed well the plate-shaped body keeping before pattern forms by upper microscope carrier, form thereby implement well pattern.

[effect of invention]

As mentioned above, according to the present invention, utilize respectively the first adsorption element and the absorption of the second adsorption element tabular by behind the mutual different position of the upper surface of transport object, make the first adsorption element and the second adsorption element increase, be sent to the second retainer member by tabular by transport object, so, no matter tabular whether bending by transport object, all can be sent to second retainer member by transport object from the first retainer member by tabular well.

Brief description of the drawings

Fig. 1 is the block diagram that represents an embodiment of patterning device of the present invention.

Fig. 2 is the block diagram that represents the control system of this patterning device.

Fig. 3 is the block diagram that represents the structure of lower microscope carrier piece.

Fig. 4 is the figure that represents the structure of lifting machinery hand unit.

Fig. 5 is the figure that represents the structure of transfer printing roller unit.

Fig. 6 is the figure that represents the structure of microscope carrier assembly.

Fig. 7 is the figure that represents the lower surface of microscope carrier.

Fig. 8 (a), Fig. 8 (b) are the formation of coupling member and the figure of action that represents absorption layer to be linked to bracing frame.

Fig. 9 is the diagram of circuit that represents pattern formation processing.

Figure 10 (a)～Figure 10 (d) is the first figure that schematically shows the position relationship of the device each several part in each stage of processing.

Figure 11 (a)～Figure 11 (c) is the second figure that schematically shows the position relationship of the device each several part in each stage of processing.

Figure 12 (a), Figure 12 (b) are the 3rd figure that schematically shows the position relationship of the device each several part in each stage of processing.

Figure 13 (a)～Figure 13 (c) is the 4th figure that schematically shows the position relationship of the device each several part in each stage of processing.

Figure 14 (a)～Figure 14 (c) is the 5th figure that schematically shows the position relationship of the device each several part in each stage of processing.

Figure 15 (a)～Figure 15 (c) is the 6th figure that schematically shows the position relationship of the device each several part in each stage of processing.

Figure 16 is the figure that represents the position relationship of forme or substrate and blanket (blanket).

Figure 17 (a)～Figure 17 (c) is the 7th figure that schematically shows the position relationship of the device each several part in each stage of processing.

The explanation of symbol:

1: patterning device

2: body frame

4: upper microscope carrier piece

6: lower microscope carrier piece

8: control unit

21: underframe

22,23: upper microscope carrier bracing frame

27: accurately to mutatis mutandis alignment cameras

40: microscope carrier assembly

41: upper microscope carrier (the second retainer member)

41a: keep plane

41b: adsorption tank

41c, 625b: adsorption hole

41d: through hole

42: strengthening frame

43: beam texture body

44: top absorbing unit (conveyer)

45,46: pillar stiffener

47,447,624,628,644: lifting mechanism

61: lower microscope carrier

61a: the upper surface of lower microscope carrier

62,63: lifting machinery hand unit

64: rotating drum unit

241,242,243: substrate prealignment camera

244,245,246: blanket prealignment camera

421,422: reinforcing rib

440: driver train portion

441: bracing frame (mobile member)

441a: hold-down arm

441b: pillar

441c: stay bearing plate

442: coupling member

442a: cover cap

442b: quill shaft

442c: stop part

442d: pipe arrangement

442e: Compress Spring

442f: engagement plate

443: absorption layer

444: saddle

445,451,461,626,646,6211,6221: guide rail

446: base plate

481: base plate

482: upper microscope carrier piece supporting mechanism

601: tabular aligning microscope carrier

602,621,622: pillar

603: microscope carrier stay bearing plate

605: aim at microscope carrier supporting mechanism

611: openning

612: groove

613: block member

623: sliding bottom

625: manipulator

625a: the upper surface of manipulator

627: saddle

641: transfer printing roller

642: bracing frame

643: supporting roller tube

644a: base portion

644b: leg

645: lower frame

647: travel mechanism

801：CPU

802: motor control part

803: valve control part

804: negative pressure feeding portion

805: image processing part

806: gas supply part

AR: service area

BL: blanket

G: interval

H: distance

HB: blanket manipulator

HP: manipulator for forme (the first retainer member)

HS: manipulator for substrate (the first retainer member)

PP: forme (tabular by transport object, plate-shaped body)

PT: coating layer

R1, R2: region

SB: substrate (tabular by transport object, plate-shaped body)

SP: process space

Detailed description of the invention

Fig. 1 is the block diagram that represents an embodiment of patterning device of the present invention.And Fig. 2 is the block diagram that represents the control system of this patterning device.In addition, in Fig. 1, for the inside of indication device forms, and represent the state after removal outer cover.For the direction in the each figure of unified representation, and as shown in the lower right of Fig. 1, set XYZ orthogonal axis.Here, XY plane represents horizontal surface, and Z axis represents vertical axis.In more detail, (+Z) direction indication vertical direction upward.From device observe time frontal be (Y) direction, and article be along Y direction from outside device is carried out to access, this access comprises moving into takes out of.

This patterning device 1 has the structure that upper microscope carrier piece 4 and lower microscope carrier piece 6 are installed on body frame (mainframe) 2.In Fig. 1, in order clearly to represent the difference of each, and upper microscope carrier piece 4 is marked to the point of thick spacing, separately lower microscope carrier piece 6 is marked the point of thin space.Patterning device 1, except comprising described member, also comprises control unit 8 (Fig. 2), and this control unit 8 is according to pre-stored handler, the action that control setup each several part makes it to put rules into practice.Below will the detailed formation of upper microscope carrier piece 4 and lower microscope carrier piece 6 be described, first, illustrate that the entirety of device 1 forms.

Patterning device 1 be as the blanket BL of lower device by making to be kept by lower microscope carrier piece 6, with the forme PP or the mutual butt of substrate SB that are kept by upper microscope carrier piece 4, and carry out pattern formation.It is more particularly as described below that the pattern of this device 1 forms processing procedure.First, be connected to the blanket BL that is coated with equably pattern forming material by the forme PP that makes to make corresponding to the pattern that should form, and by the coating layer patterning (patterning) (patterned process) by blanket BL load.Then, by making blanket BL and the substrate SB butt of patterning in this way, and by the pattern transfer by blanket BL load to substrate SB (transfer process).Thus, on substrate SB, form required pattern.

So, this patterning device 1 can be used for the pattern of substrate SB formation predetermined pattern to form patterned process and these the two kinds of processing of transfer process in processing procedure, but also can be to bear the embodiment use of the only a kind of processing that carry out in these processing.

The lower microscope carrier piece 6 of patterning device 1 is supported by the underframe (base frame) 21 of body frame 2.On the other hand, upper microscope carrier piece 4 is to erect and to arrange from underframe 21 every the mode of lower microscope carrier piece 6 from directions X folder, and is arranged on a pair of upper microscope carrier bracing frame 22,23 extending along Y-direction.

And, be installed with for moving into the prealignment camera (prealignment camera) of the substrate SB of device and the position probing of blanket BL at body frame 2.Specifically, 3 stylobate plates are arranged on respectively from upper microscope carrier bracing frame 22,23 and erect the suspension rod (boom) arranging with prealignment camera 241,242,243, and this is prealignment camera the 241,242, the 243rd for 3 stylobate plate, is used for moving into the edge of the substrate SB of device along Y direction 3 different location detection.Similarly, 3 blankets are arranged on respectively from upper microscope carrier bracing frame 22,23 and erect the suspension rod arranging with prealignment camera 244,245,246, and this is prealignment camera the 244,245, the 246th for 3 blankets, is used for moving into the edge of the blanket BL of device along Y direction 3 different location detection.In addition, in Fig. 1, do not present 1 blanket prealignment camera 246 that is positioned at the behind of uploading platform piece 4.And, in Fig. 2, be " substrate PA camera " by substrate with prealignment camera brief note respectively, be " blanket PA camera " by blanket with prealignment camera brief note.

Fig. 3 is the block diagram that represents the structure of lower microscope carrier piece.Lower microscope carrier piece 6 is four jiaos at the tabular aligning microscope carrier 601 of central portion opening, erects pillar 602 is being set respectively, and utilize these pillar 602 supporting platform stay bearing plates 603 along vertical (Z direction).Though the diagram of omission, but in the bottom of aiming at microscope carrier 601, the hand of rotation having taking the S. A. along vertical Z extension as centre of gration is being set (following, be called " θ direction "), the such as crossed roller bearing (Cross Roller Bearing) of 3 degree of freedom of directions X and Y-direction etc. aims at microscope carrier supporting mechanism 605 (Fig. 2), and aligning microscope carrier 601 is arranged on to underframe 21 across this aligning microscope carrier supporting mechanism 605.Therefore, aim at microscope carrier 601 and can move by aiming at microscope carrier supporting mechanism 605, and move within the limits prescribed along directions X, Y-direction and θ direction for underframe 21.

On the top of microscope carrier stay bearing plate 603, configuring the lower microscope carrier 61 of ring-type rectangle, this lower microscope carrier 61 is that upper surface becomes roughly consistent with horizontal surface plane, and is forming openning 611 at central portion.Blanket BL is positioned in to the upper surface of lower microscope carrier 61, thereby lower microscope carrier 61 keeps this blanket BL.

The opening size of openning 611 must be greater than and in the surf zone of blanket BL, forms region as pattern and effectively bring into play the planar dimension of the service area (not shown) of the central portion of function.That is, in the time that blanket BL is positioned in lower microscope carrier 61, must be the region integral face corresponding with service area in blanket BL lower surface to openning 611, and make the wide-open state in below of service area.And the coating layer of pattern forming material forms in the mode that is at least coated with effect region entirety.

At the upper surface 61a of lower microscope carrier 61, in the mode along the each limit of periphery of openning 611 respectively, many grooves 612 are being set, and each groove 612 is connected in the negative pressure feeding portion 804 of control unit 8 via not shown control cock.Each groove 612 is to be configured in the region of the planar dimension less than the planar dimension of blanket BL.And as shown in single-point line in Fig. 3, blanket BL is that the mode so that these grooves 612 are all covered is positioned in lower microscope carrier 61.And, for blanket BL can all be covered these grooves 612, and the block member 613 that the position limitation that suitably configures blanket BL at lower microscope carrier upper surface 61a is used.

By each groove 612 is supplied with to negative pressure, and make each groove 612 as vacuum suction groove performance function, by this way, four limit absorption of the circumference of blanket BL are remained on to the upper surface 61a of lower microscope carrier 61.Form vacuum suction groove by separate many grooves 612, therefore even if because certain reason causes producing vacuum breaking in a part of groove, also can maintain the absorption of other grooves to blanket BL, therefore, can positively keep blanket BL.And, can utilize adsorption affinity absorption blanket BL strong when independent groove is set.

Below the openning 611 of lower microscope carrier 61, arranging be used for making lifting machinery hand unit 62,63 that blanket BL moves up and down in Z-direction and from below be connected to blanket BL and make it the rotating drum unit 64 rising.

Fig. 4 is the figure that represents the structure of lifting machinery hand unit.The structure of two lifting machinery hand unit 62,63 is identical, so here the structure of a lifting machinery hand unit 62 is wherein described.Lifting machinery hand unit 62 comprises erects two pillars 621,622 that arrange along Z direction from underframe 21, and for these pillars 621,622, tabular sliding bottom (slide base) 623 can be installed up or down.More particularly, the guide rail 6211,6221 extending along vertical (Z direction) is installed respectively at two pillars 621,622, and by being arranged on the back side of sliding bottom 623, the not shown saddle (slider) of (+Y) side interarea is arranged on guide rail 6211,6221 sliding freely.And, comprise that the lifting mechanism 624 of the suitable driver train such as such as electrical motor (motor) and ball screw mechanism, according to the control command from control unit 8, moves up and down sliding bottom 623.

At sliding bottom 623, move up and down multiple (in this example being 4) manipulator 625 is installed freely.The structure of each manipulator 625 is except the shape of base portion is corresponding to equipping position and difference, basic identical.Each manipulator 625 is to be fixed on saddle 627, and this saddle 627 is to be fastened on sliding freely along vertical (Z direction) to be arranged on the front of sliding bottom 623, the i.e. guide rail 626 of (Y) side interarea.Saddle 627 is linked to lifting mechanism 628, this lifting mechanism 628 is mounted in the back side of sliding bottom 623, and comprise the suitable driver trains such as such as Rodless cylinder (rodless cylinder), and this saddle 627 move by this lifting mechanism 628 and for sliding bottom 623 above-below directions mobile.At each manipulator 625, independently lifting mechanism 628 is being set respectively, thereby can making each manipulator 625 move up and down individually.

That is, in lifting machinery hand unit 62, can sliding bottom 623 be moved up and down by lifting mechanism 624, and make the lifting integratedly of each manipulator 625, and can move independently by each lifting mechanism 628, and make the lifting individually of each manipulator 625.

The upper surface 625a of manipulator 625 is finish-machined to elongated plane taking Y-direction as length direction, thereby can make this upper surface 625a be connected to the lower surface of blanket BL, supports blanket BL.And, at upper surface 625a, arranging via not shown pipe arrangement and control cock and the adsorption hole 625b being communicated with the negative pressure feeding portion 804 that is arranged on control unit 8.Thus, to adsorption hole 625b, can optionally think highly of oneself and press supply unit 804 to supply with negative pressure, blanket BL absorption be remained on to the upper surface 625a of manipulator 625.Skidding therefore, can prevent from utilizing manipulator 625 to support blanket BL time.

And, to adsorption hole 625b, optionally supply with suitable gas, such as dry air or unreactable gas etc. from the gas supply part 806 of control unit 8 via not shown pipe arrangement and control cock.That is, the switching of each control cock of controlling by controlled unit 8, and adsorption hole 625b is optionally supplied with from the negative pressure of negative pressure feeding portion 804 and from the gas of gas supply part 806.

When being supplied to adsorption hole 625b from the gas of gas supply part 806, spray a small amount of gas from adsorption hole 625b.Thus, between the lower surface of blanket BL and manipulator upper surface 625a, form small gap, thereby manipulator 625 becomes the state that one side is separated by from supported underneath blanket BL one side and blanket BL lower surface.Therefore, can utilize each manipulator 625 to support blanket BL on one side, one side makes blanket BL frictionally not move along horizontal direction with respect to each manipulator 625.In addition, also can dividually gas squit hole be arranged on to manipulator upper surface 625a with adsorption hole 625b.

Return to Fig. 3, in lower microscope carrier piece 6, have formation as above lifting machinery hand unit 62,63 so that manipulator 625 inwardly and in the configuration of the relative mode subtend of Y-direction.Under state after each manipulator 625 at utmost declines, manipulator upper surface 625a compares lower microscope carrier upper surface 61a and is positioned at below, is located at the position that (Z) direction retreats significantly.On the other hand, under the state at utmost rising at each manipulator 625, the front end of each manipulator 625 becomes the state of giving prominence to upward from the openning 611 of lower microscope carrier 61, and manipulator upper surface 625a compare lower microscope carrier upper surface 61a arrive top, arrive position that (+Z) side projects upwards till.

And, while observation from top, at the front end of the manipulator 625 of the mutual subtend of two lifting machinery hand unit 62,63, fixed interval are being set each other, thereby the front end of manipulator 625 can not contact each other.And as described below, transfer printing roller unit 64 utilizes this gap to move on directions X.

Fig. 5 is the figure that represents the structure of transfer printing roller unit.Transfer printing roller unit 64 comprises: as the transfer printing roller 641 of cylindric roller member, extend along Y-direction; Bracing frame 642, extends in the Y direction along the below of this transfer printing roller 641, and is rotated and supported freely transfer printing roller 641 by both ends; And lifting mechanism 644, there is suitable driver train, bracing frame 642 is moved up and down in Z direction.Transfer printing roller 641 is not connected and rotates freely with rotary drive mechanism.And, at bracing frame 642, the surface that is connected to transfer printing roller 641 from below is being set, prevent the supporting roller tube (backup roll) 643 of transfer printing roller 641 bendings.

Length along the limit of Y-direction in four limits of the openning 611 of microscope carrier 61 under being shorter in length than of the transfer printing roller 641 in Y-direction, i.e. opening size in the Y-direction of openning 611, and be longer than forme PP while remaining on following upper microscope carrier or the length along Y-direction of substrate SB.In blanket BL, be below the length of forme PP or substrate SB certainly as the length of pattern formation actv. service area, region, so in the Y direction, transfer printing roller 641 is longer than service area.

Lifting mechanism 644 comprises: base portion 644a; And leg (support leg) 644b, this base portion 644a extends to top certainly, and is linked near the central authorities in the Y-direction of bracing frame 642.Leg 644b can utilize the suitable driver train such as electrical motor or cylinder (cylinder) and move up and down with respect to base portion 644a.Base portion 644a installs sliding freely for extending along directions X the guide rail 646 arranging, and then is linked to the travel mechanism 647 that comprises suitable driver train such as such as electrical motor and ball screw mechanism etc.And, extend the upper surface that arranges and be fixed on the lower frame 645 of underframe 21 along directions X, guide rail 646 is installed.Move by travel mechanism 647, and transfer printing roller 641, bracing frame 642 and lifting mechanism 644 are divided a word with a hyphen at the end of a line along directions X integratedly.

Detailed content description, this patterning device 1 is the blanket BL that remains on lower microscope carrier 61 by transfer printing roller 641 is connected to, blanket BL is risen partly, and blanket BL is connected to remain on microscope carrier and with forme PP or the substrate SB of blanket BL near subtend configuration.

Lifting mechanism 644 is to divide a word with a hyphen at the end of a line in the gap forming by the manipulator 625 of the mutual subtend of lifting machinery hand unit 62,63.And the lower surface that the upper surface 625a that each manipulator 625 can make it compares the bracing frame 642 of transfer printing roller unit 64 along (Z) direction retreats to till below.Therefore, divide a word with a hyphen at the end of a line under this state by lifting mechanism 644, the bracing frame 642 of transfer printing roller unit 64 passes through the top of the upper surface 625a of each manipulator 625, thereby avoids the simple unit 64 of transfer roll to collide with manipulator 625.

Then, the structure of upper microscope carrier piece 4 is described.As shown in Figure 1, upper microscope carrier piece 4 comprises: as the microscope carrier assembly 40 of structure, extend along directions X; A pair of pillar stiffener 45,46, erects and arranges from upper microscope carrier bracing frame 22,23 respectively, and support respectively the directions X both ends of upper microscope carrier assembly 40; And lifting mechanism 47, comprise the driver train that such as electrical motor and ball screw mechanism etc. are suitable, and make microscope carrier assembly 40 entirety along Z direction lifting moving.

Fig. 6 is the figure that represents the structure of microscope carrier assembly.Fig. 7 is the figure that represents the lower surface of microscope carrier.Upper microscope carrier assembly 40 comprises: upper microscope carrier 41, remains on lower surface by forme PP or substrate SB; Strengthening frame (Reinforcement frame) 42, is arranged on the top of microscope carrier 41; Beam texture body 43, is incorporated into strengthening frame 42 and extends along directions X on even keel; And top absorbing unit 44, be arranged on microscope carrier 41.As shown in Figure 6, upper microscope carrier assembly 40 has respectively with respect to the XZ plane at profile Shang center and the roughly symmetrical shape of YZ plane that comprise it.

Upper microscope carrier 41 is the smaller tabular components of planar dimension than the forme PP that should keep or substrate SB, and the lower surface 41a that remains the upper microscope carrier 41 of flat-hand position becomes butt and keep the maintenance plane of forme PP or substrate SB.Owing to keeping plane to require high planeness, so as the material that keeps plane, be preferably quartz glass or stainless steel sheet.And, keeping plane 41a, as shown in Figure 7, arranging: adsorption tank 41b, is used for adsorbing the upper surface circumference that keeps forme PP or substrate SB; Adsorption hole 41c, is used for adsorbing the upper face center portion that keeps forme PP or substrate SB; And through hole 41d, the mobile route of the absorption layer that is used for guaranteeing following top absorbing unit 44.And adsorption tank 41b and adsorption hole 41c are connected in the negative pressure feeding portion 804 of control unit 8 via not shown control cock.Thus, to adsorption tank 41b and adsorption hole 41c, can optionally supply with the negative pressure from negative pressure feeding portion 804, keep plane 41a absorption to keep forme PP or substrate SB thereby utilize.

Strengthening frame 42 comprises the combination of extending the reinforcing rib (stiffening rib) of the upper surface that is arranged on upper microscope carrier 41 along Z direction, and as shown in Figure 6, for preventing that upper microscope carrier 41 bendings are to maintain the planeness of lower surface (maintenance plane) 41a of upper microscope carrier 41, and appropriately combined multiple and the parallel plane reinforcing rib 421 of YZ and and the parallel plane reinforcing rib 422 of XZ respectively.Reinforcing rib 421,422 for example can comprise metal sheet.

And beam texture body 43 is the multiple metal sheets of combination and the structure taking directions X as length direction that forms, and its both ends are supported ground by pillar stiffener 45,46 and can be moved up and down.Specifically, at pillar stiffener 45,46, the guide rail 451,461 extending is being set respectively, on the other hand along Z direction, with (+Y) side interarea of the beam texture body 43 of guide rail 451,461 subtends, not shown saddle is being installed, and these saddles are being engaged sliding freely.And as shown in Figure 1, beam texture body 43 is linked by lifting mechanism 47 with pillar stiffener 46, and moves by lifting mechanism 47, and it is mobile along vertical (Z direction) to make beam texture body 43 maintain flat-hand position.Because upper microscope carrier 41 is combined with beam texture body 43 integratedly via strengthening frame 42, thus move by lifting mechanism 47, and make microscope carrier 41 on even keels keep maintenance plane 41a to move up and down.

In addition, the structure of strengthening frame 42 and beam texture body 43 is not limited to graphic structure.Here be to combine and to obtain required intensity with the parallel plane tabular component of YZ and with the parallel plane tabular component of XZ, but also sheet metal component or angle iron component etc. can be appropriately combined into shape in addition.The object of making this structure is to make microscope carrier assembly 40 light weights and forms.In order to reduce the bending of each several part, also can consider to increase the thickness of upper microscope carrier 41 or make beam texture body 43 for solid, but so, the quality that causes upper microscope carrier assembly 40 entirety be become to large.

The weight that is configured in the works on device top becomes greatly and will cause for supporting this works or making it mobile larger intensity and the durability of mechanism's needs, thereby also greatly change is heavy for device entirety.Combination by sheet material etc. obtains required intensity, and the lightweight of implementation structure thing entirety is more real simultaneously.

And, on the top of the upper microscope carrier 41 being surrounded by strengthening frame 42, a pair of top absorbing unit 44 is installed.State after Fig. 6 top represents the top absorbing unit 44 wherein to take out upward.The performance as described below of this top absorbing unit 44 transmits the transmitting function of forme PP or substrate SB between outside manipulator and upper microscope carrier 41, and is equivalent to an example of " tabular by the conveyer of transport object " of the present invention and " carrying device ".Top absorbing unit 44 is that multiple absorption layers 443 are arranged on to bracing frame 441 across coupling member 442 respectively.In more detail, form as follows.

In bracing frame 441, as shown in Figure 6, two hold-down arm 441a that extend are separated to predetermined distance mutually on directions X arrange along Y-direction.And, hang pillar 441b is being set to (Z) direction from (+Y) side end and (Y) side end of each hold-down arm 441a, and totally 4 pillar 441b extend to below.And, utilize two pillar 441b of the (+Y) side in these pillars 441b by stay bearing plate 441c horizontal support, and utilize two pillar 441b of (Y) side by another stay bearing plate 441c horizontal support.Each stay bearing plate 441c extends along directions X, and to configure towards the mode of 3 through hole 41d that arrange along directions X from top.The bracing frame 441 forming in this way becomes not the shape of disturbing with the rib 421,422 that forms strengthening frame 42.

In each stay bearing plate 441c, with through hole 41d mode one to one, across coupling member 442, absorption layer 443 is installed.Therefore,, if utilize following lifting mechanism 447 to make bracing frame 441 liftings, be linked to the also lifting uniformly along with bracing frame 441 liftings of 6 absorption layers 443 of the stay bearing plate 441c of bracing frame 441.For example, in the case of one side is sent to microscope carrier 41 by forme PP or the substrate SB of position under the outside supreme microscope carrier 41 of robot support one side conveyance, multiple absorption layers 443, along with bracing frame 441 declines and declines uniformly, are adsorbed in the upper surface of forme PP or substrate SB butt.Problem is now the bending that is supported on forme PP or the substrate SB of manipulator.That is to say, due to must by these formes PP or substrate SB under face down state the supreme microscope carrier 41 of conveyance under, so manipulator can only support the lower surface circumference of forme PP or substrate SB, cause forme PP or substrate SB to produce bending.Therefore the opportunity that, has absorption layer 443 and a upper surface butt of forme PP or substrate SB different situation for each absorption layer 443.Therefore, present embodiment is linked to bracing frame 441 by each absorption layer 443 via coupling member 442.

Fig. 8 (a), Fig. 8 (b) are the formation of coupling member and the figure of action that represents absorption layer to be linked to bracing frame.Coupling member 442 all has identical formation.Coupling member 442 comprises cover cap (cap) 442a of drum, and this cover cap 442a is so that opening state is downward arranged on the stay bearing plate 441c of bracing frame 441, and this cover cap 442a plays a role as the body of coupling member 442.Through hole (omit diagram) is being set, and to run through the mode of inside of this through hole and cover cap 442a in the upper surface of this cover cap 442a, Z extends quill shaft 442b is being set along the vertical direction.At the upper end of quill shaft 442b peripheral part, be fixed wtih and there is the external diameter larger than the internal diameter of through hole the stop part 442c of (being the diameter identical with the external diameter of cover cap 442a in present embodiment), in case quill shaft 442b comes off from cover cap 442a.And hollow bulb is connecting pipe arrangement 442d in the upper end of quill shaft 442b, and this pipe arrangement 442d is further via not shown control cock, is connected in the negative pressure feeding portion 804 (Fig. 2) of control unit 8.

And, from the lower end side of quill shaft 442b, Compress Spring 442e in embedding outside (Z) side end, and this Compress Spring 442e is accommodated in to the inside of cover cap 442a.And, being accommodated in the bottom of the Compress Spring 442e in cover cap 442a from the mode of (Z) side engagement, engagement plate 442f is fixed on to the side of quill shaft 442b, and as shown in Figure 6, when absorption layer 443 becomes free state, or as shown in Fig. 8 (a), the time point of absorption layer 443 and forme PP or substrate SB butt, Compress Spring 442e becomes without external force state.This without external force state under, be arranged on the absorption layer 443 of quill shaft 442b bottom and the distance of stay bearing plate 441c maintains specified value.On the other hand, after absorption layer 443 and forme PP or substrate SB butt, as shown in Fig. 8 (b), even if stay bearing plate 441c further downwards, i.e. (Z) direction miles of relative movement H, Compress Spring 442e also will be along with this moves and contracted length H, thereby absorption layer 443 is maintained to the position of butt time point.; in present embodiment, when after the upper surface butt of absorption layer 443 and forme PP or substrate SB, when bracing frame 441 further declines; make the relative position displacement of absorption layer 443 for the stay bearing plate 441c of bracing frame 441, thereby maintain the height and position of absorption layer 443.Bring into play in this way position regulating function.

In the present embodiment, in order to make in this way bracing frame 441 liftings, and the driver train portion 440 with following formation is being set.This driver train portion 440, the pair of guide rails 445 that makes as illustrated in fig. 6 bracing frame 441 engage across a pair of saddle 444 and with a pair of saddle 444, moves and is supported on freely base plate (base plate) 446 along vertical.And, the combination by comprising the lifting mechanism 447 of suitable mechanism such as such as electrical motor and ball screw mechanism etc. of base plate 446 and bracing frame 441.Move by lifting mechanism 447, and make relative base plate 446 liftings of bracing frame 441, thus coupling member 442 and absorption layer 443 and bracing frame 441 lifting integratedly.

By base plate 446 being fixed on to the side of beam texture body 43, and make top absorbing unit 44 and upper microscope carrier 41 integrated.Under this state, the lower end of each coupling member 442 and absorption layer 443 are inserted to the not shown through hole being arranged in upper microscope carrier 41.Then, move by lifting mechanism 447, and lower surface (maintenance plane) 41a that makes absorption layer 443 compare microscope carrier 41 at its lower surface project to below absorption position, and lower surface retreat to lifting moving between the retreating position of through hole inside (top) of upper microscope carrier 41.And in the time the lower surface of absorption layer 443 being positioned to the height roughly the same with the maintenance plane 41a of upper microscope carrier 41, upper microscope carrier 41 and absorption layer 443 can be synergistically remain on forme PP or substrate SB to keep plane 41a.

Return to Fig. 1, the upper microscope carrier assembly 40 forming is in this way arranged on base plate 481.In more detail, pillar stiffener the 45, the 46th, erects respectively and is arranged on base plate 481, and upper microscope carrier assembly 40 is liftably arranged on this pillar stiffener 45,46.Base plate 481 is mounted in microscope carrier bracing frame 22,23, and is supported by the upper microscope carrier piece supporting mechanism 482 that comprises the suitable movable agency such as such as crossed roller bearing.

Therefore, upper microscope carrier assembly 40 entirety body frame 2 parallel motions relatively.Specifically, base plate 481 moves at horizontal surface, i.e. parallel motion in XY plane because of upper microscope carrier piece supporting mechanism 482.The a pair of base plate 481 that corresponds respectively to pillar stiffener 45,46 settings can move independently of each other, and upper microscope carrier assembly 40 can move and move within the limits prescribed along directions X, Y-direction and θ direction relative to body frame 2 along with this pair of base plate 481.

The each several part of the patterning device 1 forming is in this way controlled by control unit 8.As shown in Figure 2, control unit 8 comprises: central process unit (Central Processing Unit, CPU) 801, the action of operating control entirety; Motor control part 802, controls the electrical motor that is arranged on each several part; Valve control part 803, controls the control cock class that is arranged on each several part; And negative pressure feeding portion 804, produce the negative pressure that is supplied to each several part.In addition, in the case of can utilizing the negative pressure of outside supply certainly, control unit 8 also can not comprise negative pressure feeding portion.

Motor control part 802 is arranged on the motor unit of each function block by control, and the location of operating control each several part or movement.And, valve control part 803 is arranged on from negative pressure supply unit 804 and is connected on the negative pressure pipe path of each function block and is connected to the valve group on the pipe arrangement path of manipulator 625 from gas supply part 806 by control, and handles the execution of vacuum suction under negative pressure feeding and the releasing of vacuum suction and the gas ejection from manipulator upper surface 625a.

And this control unit 8 comprises the image processing part 805 of the image real-time image processing to utilizing camera shooting.The image processing that image processing part 805 specifies by utilization being arranged on to the substrate prealignment camera 241～243 of body frame 2 and the image of blanket prealignment camera 244～246 shootings, and the approximate location of detection substrate SB and blanket BL.And, by the image processing that utilizes the following image of accurately mutatis mutandis alignment cameras 27 being taken to specify, and detect more accurately the position relationship of substrate SB and blanket BL.CPU801 is according to these position probing results, microscope carrier piece supporting mechanism 482 and aim at microscope carrier supporting mechanism 605 in control, remains on the forme PP of microscope carrier 41 or substrate SB and the position alignment (prealignment process and accurately registration process) of blanket BL that remains on lower microscope carrier 61.

Then, the pattern formation processing in the patterning device 1 forming is in this way described.In this pattern formation processing, by remaining on the forme PP of upper microscope carrier 41 or substrate SB, with the blanket BL that remains on lower microscope carrier 61 spaced a slight clearance near subtend configuration.And transfer printing roller 641 one sides are connected to the lower surface of blanket BL, make blanket BL rise to partly top, one side moves along blanket BL lower surface.Raised blanket BL first with forme PP or substrate SB butt partly, thereby abutment portion along with roller moves and expands gradually, the overall butt of final and forme PP or substrate SB.Thus, from forme PP, blanket BL is carried out to patterning, or from blanket BL, substrate SB is carried out to pattern transfer.

Fig. 9 is the diagram of circuit that represents pattern formation processing.And Figure 10 (a)～10 (d) is the figure that schematically shows the position relationship of the device each several part in each stage of processing to Figure 17 (a)～17 (c).The action of the each several part in pattern formation processing is described to Figure 17 (a)～17 (c) with reference to Figure 10 (a)～10 (d) below.In addition, in order easily to understand the relation of the each several part in the each stage that represents to process, and exist the formation not directly related with the processing in this stage or tackle the diagram abridged situation of the symbol of this formation mark.And when on remaining on, the handling object thing of microscope carrier 41 is forme PP and when while being substrate SB, action is all identical except a part, so, sharing accompanying drawing, suitable replacement is called forme PP and substrate SB.

In this pattern formation processing, first, the forme PP corresponding with the pattern that should form moved into through initialized patterning device 1, and be arranged on microscope carrier 41 (step S101), then, the blanket BL of the even coating layer that is formed with pattern forming material is moved into, be arranged on lower microscope carrier 61 (step S102).Forme PP makes effectively face-down move into corresponding with pattern, and blanket BL moves into coating layer upward.

Figure 10 (a)～Figure 10 (d) represents forme PP or substrate SB to move into the process to device and till being arranged on upper microscope carrier 41.As shown in Figure 10 (a), under initial condition, upper microscope carrier 41 retreats to top, thereby becomes large with the interval of lower microscope carrier 61, forms wide processing space S P between two microscope carriers.And bracing frame 441 is risen to top by a pair of top absorbing unit 44, make each absorption layer 443 compare microscope carrier 41 and be positioned at top.And the upper surface that each manipulator 625 is compared lower microscope carrier 61 is kept out of the way below.Transfer printing roller 641 is arranged in the position of openning 611 of the microscope carrier 61 that faces down by the position of (X) direction, and is located at vertical (Z direction) and compares the position that the upper surface of lower microscope carrier 61 is kept out of the way below.The each control cock that is connected in negative pressure feeding portion 804 is closed.

Under this state, certainly the face side of device, (Y) direction is moved into the forme PP that is positioned in outside forme manipulator HP towards (+Y) direction ground to processing space S P after the thickness of measuring in advance it.Forme can be both the chucking operation being operated by operating personal mechanical, hand-driven with manipulator HP, also can be outside conveying machine people's manipulator.But, owing to forme PP must being moved under state downward of the pattern that should form, so-called face down state, so forme supports with manipulator HP the lower surface outer peripheral edges that ground keeps forme PP.Therefore, as shown in Figure 10 (a), forme PP bending, the forme PP of for example so-called G4 size (680 × 880[mm]) exists amount of bow to reach the situation of number [mm].Therefore, if by by forme with manipulator HP keep forme PP move into supreme microscope carrier 41 under position, the distance of the lower surface of the upper surface of forme PP and upper microscope carrier 41 is relatively short near outer peripheral edges, on the other hand, becomes relatively long near central portion.

In the time utilizing forme manipulator HP to move into forme PP, because manipulator 625 and transfer printing roller 641 retreat to below, become easy and can make to move into operation.In the time that forme PP is positioned to the position of regulation, as shown by arrows, upper microscope carrier 41 declines.

If upper microscope carrier 41 drops to the assigned position near forme PP, utilize lifting mechanism 447 that bracing frame 441 is declined, thus, each absorption layer 443 declines along the mobile route extending by through hole 41d and at above-below direction Z, compare the lower surface of upper microscope carrier 41 via through hole 41d, keep plane 41a to be projected into below, thereby be connected to the upper surface of forme PP.But, in forme PP, produce bending, and because the bending displacement that is displaced to below (being equivalent to " displacement causing because of bending " of the present invention) is in the each several part difference of forme PP.Therefore, as mentioned above, exist in the each several part of forme PP from the lower surface 41a of upper microscope carrier 41 distance apart in all different situations of each absorption layer 443.Thus, become the result that multiple adsorption steps produce.For example, produce forme PP bending as shown in Figure 10 (a) in the situation that, be connected near the absorption layer 443 of the position of the outer peripheral edges of forme PP with the Zao butt on opportunity of absorption layer 443 than being connected near the position of the central portion of forme PP.The example that this situation is equivalent to " the first adsorption step " of the present invention.Then,, because bracing frame 441 further declines, remaining absorption layer 443 is also connected to the upper surface of forme PP.The example that this situation is equivalent to " the second adsorption step " of the present invention.Now, be linked in the coupling member 442 of absorption layer 443 of first butt, as shown in Fig. 8 (b), Compress Spring 442e shrinks, and makes the relative position displacement of absorption layer 443 for stay bearing plate 441c, thereby maintains the height and position of absorption layer 443.Can utilize this position regulating function, make bracing frame 441 mobile fixing slippage downwards, thus, make all absorption layers 443 be connected to the upper surface of forme PP.Therefore, be desirably the amount of bow of measuring in advance forme PP, and consider this amount of bow and set the slippage of bracing frame 441.

Then, as shown in Figure 10 (b), in the time that all absorption layers 443 are connected to the upper surface of forme PP, the control cock being connected with each absorption layer 443 is opened, utilized absorption layer 443 to adsorb the upper surface of forme PP, keep forme PP.Then, continuing under the state of absorption, lifting mechanism 447 moves, and makes bracing frame 441 increase.In this rising starting stage, the Compress Spring 442e that absorption layer 443 shrinks while decline, along with stay bearing plate 441c rises and extends, finally reverts to original initial condition.During this period, absorption layer 443 is always static.On the other hand, revert to the earliest absorption layer 443 that the coupling member 442 of initial condition links along with stay bearing plate 441c rises and one side absorption keeps forme PP one side to rise with Compress Spring 442e.Then, in the time that all Compress Spring 442e revert to initial condition, as shown in Figure 10 (c), the bending of forme PP is eliminated, forme PP is supported under horizontality.

Further continue to rise by bracing frame 441, and the forme PP that absorption remains on absorption layer 443 is being maintained to horizontality, rise with manipulator HP from forme.Point at this moment, forme moves outside device with manipulator HP.

Finally, as shown in Figure 10 (d), till absorption layer 443 rises to the top position of upper microscope carrier 41 via through hole 41d.In this rising midway, carrying out absorption switches.; if arriving, the lower surface of absorption layer 443 keeps plane 41a (lower surface of upper microscope carrier 41); and the upper surface of forme PP connects airtight in keeping plane 41a; the control cock being connected with adsorption tank 41b and adsorption hole 41c (omitting diagram) is opened; utilize the upper surface of adsorption tank 41b and adsorption hole 41c absorption forme PP, thereby finish upper microscope carrier 41 to transmit forme PP.And, after confirming that transmission finishes, stopping the negative pressure feeding to each absorption layer 443, each absorption layer 443 moves to the top of upper microscope carrier 41 by through hole 41d.Certainly, also can be configured to the time point finishing in described transmission processing, make each absorption layer 443 be positioned at through hole 41d.So, the maintenance of forme PP finishes, but can utilize identical order, moves into substrate SB by substrate with manipulator HS.The example that this situation is equivalent to " mobile step " of the present invention.

Figure 11 (a)～Figure 11 (c) and Figure 12 (a), Figure 12 (b) represent to move into after forme PP to the process of blanket BL being moved into and being remained on till lower microscope carrier 61.If upper microscope carrier 41 finishes the maintenance of forme PP,, as shown in Figure 11 (a), make microscope carrier 41 increase, again form wide processing space S P, and the upper surface 61a that makes each manipulator 625 compare lower microscope carrier 61 rises to top.Now, the upper surface 625a of each manipulator 625 all becomes sustained height.

Under this state, accept following processing: as shown in Figure 11 (b), the blanket BL of the coating layer PT that is forming pattern forming material at upper surface is positioned in to outside blanket manipulator HB, and moves into processing space S P.Before moving into, first measure the thickness of blanket BL.Being desirably blanket manipulator HB is forked type (fork type) manipulator that comprises the finger (finger) extending along Y-direction, not disturb just and can enter by their gap with manipulator 625.

Because blanket enters rear decline with manipulator HB or manipulator 625 rises, the upper surface 625a of manipulator 625 is connected to the lower surface of blanket BL, and as shown in Figure 11 (c), after this blanket BL is supported by manipulator 625.Can supply with negative pressure by the adsorption hole 625b (Fig. 4) to being arranged on manipulator 625, and more positively support.So, blanket BL can be sent to manipulator 625 from blanket with manipulator HB, and blanket is expelled to outside device with manipulator HB.

After this, as shown in Figure 12 (a), keeping the height of the upper surface 625a of each manipulator 625 as one man to make manipulator 625 decline, final, make manipulator upper surface 625a become the height identical with the upper surface 61a of lower microscope carrier 61.Thus, the circumference on blanket BL tetra-limits is connected to the upper surface 61a of lower microscope carrier 61.

Now, as shown in Figure 12 (b), the vacuum suction groove 612 that is arranged on lower microscope carrier upper surface 61a is supplied with to negative pressure, thereby absorption keeps blanket BL.Thereupon, remove the absorption of manipulator 625.Thus, the circumference that blanket BL becomes its four limits adsorbs the state of maintenance by lower microscope carrier 61.In Figure 12 (b), in order clearly to represent that the absorption of having removed manipulator 625 keeps, and blanket BL and manipulator 625 are separated by, but actual be the state that the lower surface that maintains blanket BL is connected to manipulator upper surface 625a.

Can imagine if suppose to make manipulator 625 and blanket BL to be separated by under this state, blanket BL causes central portion bending downwards because of deadweight so, thereby becomes on the whole protruding shape downwards.Can be by manipulator 625 being maintained to the height identical with lower microscope carrier upper surface 61a, and suppress this bending, thus blanket BL is maintained to flat state.So, the circumference that blanket BL becomes on the one hand it adsorbs maintenance by lower microscope carrier 61, on the one hand central portion by manipulator 625 complementary the state that supports, thereby the maintenance of blanket BL finishes.

Forme PP sequentially also can be with described contrary with moving into of blanket BL.But, moving into move into forme PP after blanket BL in the situation that, having following worry: while moving into forme PP, foreign body falling is upper and pollute the coating layer PT of pattern forming material or produce defect to blanket BL.Can, by forme PP being arranged on after upper microscope carrier 41 as described, blanket BL be arranged on to lower microscope carrier 61, and this problem is prevented trouble before it happens.

Return to Fig. 9, if respectively forme PP and blanket BL are arranged on to upper and lower microscope carrier in this way, then carry out the prealignment processing (step S103) of forme PP and blanket BL.And then the mode that separates predefined subtend with gap with forme PP and blanket BL is carried out gap adjustment (step S104).

Figure 13 (a)～Figure 13 (c) is the figure that represents the process of gap adjustment processing and registration process.Wherein, the accurate registration process shown in Figure 13 (c) is only required processing in following transfer process, so accurate registration process is described in the explanation of transfer process below.As mentioned above, forme PP, substrate SB or blanket BL are moved into from outside, but in the time transmitting, may cause position skew.Prealignment processing is following processing: be used for the forme PP or the substrate SB that remain on upper microscope carrier 41, be roughly positioned at respectively with the blanket BL that remains on lower microscope carrier 61 position that is applicable to subsequent treatment.

Figure 13 (a) is the lateral plan that schematically shows the configuration of the formation for carrying out prealignment.As mentioned above, present embodiment is, on device top, 6 prealignment cameras 241～246 are being set altogether.3 cameras 241～243rd wherein, are used for substrate prealignment camera that the outer rim of the forme PP that remains on upper microscope carrier 41 (or substrate SB) is detected.And, another 3 cameras 244～246th, the blanket that is used for that the outer rim of blanket BL is detected prealignment camera.In addition, here for simplicity, and prealignment camera 241～243 is called to " substrate prealignment camera ", but these prealignment cameras 241～243 can be used for the arbitrary position alignment in the position alignment of forme PP and the position alignment of substrate SB, and their contents processing is also identical.

As shown in Fig. 1 and Figure 13 (a), prealignment camera the 241, the 242nd for substrate, on directions X, position is roughly the same and make in the Y direction position mutually differently arrange, and takes respectively (X) side outer edge of forme PP or substrate SB from top.Upper microscope carrier 41 is formed as the planar dimension more smaller than substrate SB, thus can top from (X) side outer edge of taking the forme PP (or substrate SB) of the end of comparing upper microscope carrier 41 outside extending to.And, Figure 13 (a) though in do not represent, but in the nearby side of Figure 13 (a) paper, another stylobate plate prealignment camera 243 is being set, and this camera 243 is taken (Y) side outer edge of forme PP (or substrate SB) from top.

On the other hand, prealignment camera the 244, the 246th for blanket, on directions X position roughly the same and in the Y direction position mutually differently arrange, and take (+X) side outer edge of blanket BL that is positioned in lower microscope carrier 61 from top respectively.And, in the nearby side of Figure 13 (a) paper, another blanket prealignment camera 245 is being set, and this camera 245 is taken (Y) side outer edge of blanket BL from top.

According to the image pickup result of these prealignment cameras 241～246, grasp the position of forme PP (or substrate SB) and blanket BL respectively.Then, upper microscope carrier piece supporting mechanism 482 and aligning microscope carrier supporting mechanism 605 optionally move, and thus, forme PP (or substrate SB) and blanket BL are positioned at respectively to predefined target location.

In addition, when making blanket BL when parallel motion, preferably, as shown in Figure 13 (a), the upper surface 625a of each manipulator 625 and the lower surface of blanket BL be separated slightly together with lower microscope carrier 61.For reaching this object, can spray the gas of supplying with from gas supply part 806 from the adsorption hole 625b of manipulator 625.This situation is also identical in following accurate registration process.

And, for slim or large-scale and easily produce bending substrate SB, for example, substrate SB is supplied to processing tabular load-carrying element is connected under the state at the back side sometimes, with easy operating.In this case, even if load-carrying element and substrate SB are in a ratio of large-scale component, as long as be for example configured to and form load-carrying element by transparent material, or at load-carrying element, the easily position, outer edge of detection substrate SB such as transparent window or through hole etc. is set partly,, just also can carry out and described identical prealignment processing.

Then, as shown in Figure 13 (b), make to keep the upper microscope carrier 41 of forme PP relatively to keep the lower microscope carrier 61 of blanket BL to decline, make the interval G of forme PP and blanket BL meet the setting value of predetermining.Now, consider the forme PP of measurement in advance and the thickness of blanket BL.That is, to add after the thickness of forme PP and blanket BL, the gap of forme PP and blanket BL becomes the mode of specified value, the interval of microscope carrier 41 and lower microscope carrier 61 in adjustment.The gap width G here for example can be 300 μ m left and right.

About the thickness of forme PP and blanket BL, except there is the individual difference causing because of the dimensional discrepancy on manufacturing, even if be Same Part, also can imagine for example variation in thickness because expanding and causing, therefore, be desirably in the time of each use and all measure.And, clearance G both can the lower surface of forme PP and the upper surface of blanket BL between define, also can between the upper surface of the coating layer PT of the pattern forming material of the lower surface of forme PP and the load of blanket BL institute, define.As long as strictly manage the thickness of coating layer PT in the coating stage, at technical elements, described two definition equivalences.

Return to Fig. 9, if in this way forme PP and blanket BL are separated to the subtend configuration of clearance G ground, divide a word with a hyphen at the end of a line along directions X by the lower surface one side that then makes transfer printing roller 641 one sides be connected to blanket BL, and make forme PP and blanket BL butt.Thus, utilize forme PP by the coating layer PT patterning (patterned process of the pattern forming material on blanket BL; Step S105).

Figure 14 (a)～Figure 14 (c) represents the process of patterned process.Specifically, as shown in Figure 14 (a), make transfer printing roller 641 rise to blanket BL under till position, and on directions X, the position that the line of centers that transfer printing roller 641 is configured in to transfer printing roller 641 and the end of forme PP are roughly the same or the position of slightly departing to (X) direction than this position.Under this state, as shown in Figure 14 (b), make transfer printing roller 641 further increase and be connected to the lower surface of blanket BL, make the blanket BL of the position of this butt rise to partly top.Thus, the blanket BL coating layer PT of the pattern forming material of blanket BL institute load (more strictly speaking for) is pressed into the lower surface of forme PP with the pressing force specifying.Transfer printing roller 641 is longer than forme PP (and service area) in the Y direction, so, the elongated area along Y-direction of the wherein end to end in the lower surface of forme PP in Y-direction and blanket BL butt.

As described, pressing at transfer printing roller 641 by lifting mechanism 644 under the state of blanket BL and dividing a word with a hyphen at the end of a line to (+X) direction, and the raised position of blanket BL is moved to (+X) direction.Now, in order to prevent that manipulator 625 from contacting with transfer printing roller 641, and as shown in Figure 14 (c), make with the directions X of transfer printing roller 641 apart from below retreating to for the manipulator 625 below specified value, until at least the upper surface 625a of this manipulator 625 becomes the position lower than the lower surface of bracing frame 642.

Owing to the absorption of manipulator 625 being removed, so, can blanket BL not declined downwards along with the decline of manipulator 625.And, also can be by starting with the suitably management of dividing a word with a hyphen at the end of a line synchronously of transfer printing roller 641 opportunity declining, dangle downwards because of deadweight and prevent from losing blanket BL that manipulator 625 supports.

Figure 15 (a)～Figure 15 (c) represents the process of dividing a word with a hyphen at the end of a line of transfer printing roller 641.Due to the forme PP of temporary transient butt and blanket BL are maintained to the state connecting airtight across the coating layer PT of pattern forming material, so as shown in Figure 15 (a), forme PP and blanket BL's connects airtight region along with transfer printing roller 641 is divided a word with a hyphen at the end of a line and constantly expands to (+X) direction gradually.Now, as shown in this Figure 15 (a), along with transfer printing roller 641 near and manipulator 625 is declined successively.

So, final as shown in Figure 15 (b), manipulator 625 all declines, and transfer printing roller 641 arrives near (+X) side end of lower microscope carrier 61 belows.At this time point, transfer printing roller 641 arrive forme PP's (+X) side end roughly under or than (+X) side end of forme PP roughly under slightly by the position of (+X) side, thereby the lower surface of forme PP is all connected to the coating layer PT on blanket BL.

During transfer printing roller 641 is maintaining fixing height and divides a word with a hyphen at the end of a line, the area that is transferred the region that roller 641 presses in blanket BL lower surface is fixed.Therefore, give fixing load by one in the face of lifting mechanism 644, transfer printing roller 641 is propped up blanket BL by one side, and forme PP and interlayer of blanket BL to the coating layer PT of pattern forming material, simultaneously mutually presses with the pressing force of fixing.Thus, can carry out patterning from forme PP to blanket BL well.

In addition, carrying out patterning, be desirably the surf zone entirety that can effectively utilize forme PP, but at the circumference of forme PP, the region that inevitably generation cannot effectively utilize such as during because of damage or conveyance, contacting with manipulator.As shown in Figure 15 (b), in the time of service area AR using the middle body of the removal end regions of forme PP as effective performance forme function, be desirably the pressing force of transfer printing roller 641 and the speed of dividing a word with a hyphen at the end of a line at least fixing in the AR of service area.For this reason, the Y-direction length of transfer printing roller 641 must be longer than the length of the service area AR in this Y-direction.And, be desirably on directions X, the end of comparing the service area AR in (X) direction starts transfer printing roller 641 from the position of (X) side divides a word with a hyphen at the end of a line, and before at least arriving the end of the service area AR in (+X) direction, maintains fixed speed.Become the service area of blanket BL side with the surf zone of the blanket BL of the service area AR subtend of forme PP.

Figure 16 represents the position relationship of forme or substrate and blanket.More particularly, this Figure 16 is the planar view of the position relationship gained when observing forme PP or substrate SB from top and being connected to blanket BL.As shown in figure 16, blanket BL has than forme PP or the large planar dimension of substrate SB.Near the region R1 circumference of getting ready in Figure 16 of blanket BL is the region that is connected to lower microscope carrier upper surface 61a while remaining on lower microscope carrier 61.Blanket BL, comparing in the region that region R1 is inner side, makes to remain on lower microscope carrier 61 under the open state of lower surface.

Forme PP and substrate SB are roughly the same size, and these sizes are less than the openning size of lower microscope carrier 61.And the service area AR that is effective to actual pattern formation is less than the size of forme PP or substrate SB.Therefore, in blanket BL, corresponding to the region of service area AR be the state of the openning 611 of lower surface is open and the microscope carrier 61 that faces down.

The region R2 that indicates hachure represents the region (area pressed) that pressed by transfer printing roller 641 in blanket BL lower surface.Area pressed R2 extends setting party to, elongated area that Y-direction is extended along roller, and both ends in its Y-direction extend to respectively than the more lateral, end of forme PP or substrate SB.Therefore,, in the time that transfer printing roller 641 is pressed blanket BL under the state parallel with blanket BL lower surface, a wherein end of this pressing force service area AR is in the Y direction to even in the Y direction between the other end.

One in the face of service area AR gives uniform pressing force in Y-direction in this way, and one side transfer printing roller 641 moves along directions X, and thus, in the entirety in the AR of service area, forme PP or substrate SB and blanket BL are pressed mutually with uniform pressing force.Thus, can prevent that inhomogeneous pressing from causing pattern damage, thereby form colory pattern.

So, if transfer printing roller 641 arrives (+X) side end, stop dividing a word with a hyphen at the end of a line of transfer printing roller 641, and as shown in Figure 15 (c), transfer printing roller 641 is kept out of the way toward below.Thus, transfer printing roller 641 is separated by with blanket BL lower surface, thereby finishes patterned process.

Return to Fig. 9, if patterned process finishes as mentioned above, carry out take out of (the step S106) of forme PP and blanket BL.Figure 17 (a)～Figure 17 (b) represents the process of taking out of of forme and blanket.First, as shown in Figure 17 (a), make the each manipulator 625 declining in the time of patterned process again increase, upper surface 625a is positioned to become with the upper surface 61a of lower microscope carrier 61 to the position of sustained height.Under this state, the adsorption tank 41b of microscope carrier 41 and the absorption of adsorption hole 41c to forme PP in releasing.Thus, the maintenance of microscope carrier 41 to forme PP in releasing, stays forme PP and blanket BL on lower microscope carrier 61 across the laminate of the integrated gained of the coating layer PT of pattern forming material.The central portion of laminate is supported by manipulator 625.

Then, as shown in Figure 17 (b), make microscope carrier 41 increase and form wide processing space S P, remove the absorption of the groove 612 of lower microscope carrier 61, and make manipulator 625 further increase, above comparing with lower microscope carrier 61 and moving to.Now, preferably utilize manipulator 625 absorption to keep laminate.

Thus, can carry out from outside access.Therefore,, as shown in Figure 17 (c), by from the outside blanket manipulator HB that receives, carry out action contrary when moving into, and the blanket BL of the state that forme PP is connected airtight is taken out of to outside.If utilize the suitable device of peeling off that the forme PP connecting airtight is like this peeled off from blanket BL, on blanket BL, form the pattern of regulation.

Then, illustrate using the pattern transfer that is formed on blanket BL to the situation as the substrate SB of ultimate aim thing.This transfer step is substantially identical with the situation of patterned process.That is, as shown in Figure 9, first, substrate SB is arranged on to upper microscope carrier 41 (step S107), then, the blanket BL after pattern forms is arranged on to lower microscope carrier 61 (step S108).Then, carry out substrate SB and blanket BL prealignment process and gap adjustment after (step S109, S110), transfer printing roller 641 is divided a word with a hyphen at the end of a line in blanket BL bottom, thus, by the pattern transfer on blanket BL to substrate SB (transfer process; Step S112).After transfer printing finishes, will take out of through integrated blanket BL and substrate SB, thereby processing finishes (step S113).These a series of actions are also identical to the action shown in Figure 17 (a)～Figure 17 (c) with Figure 10 (a)～Figure 10 (d).In addition, while forme PP being renamed as to substrate SB in these figure, symbol PT refers to the pattern after patterned process.

But, in transfer process, for pattern being accurately transferred to the assigned position of substrate SB, and before making substrate SB and blanket BL butt, carry out both more accurate position alignment (accurately registration process) (step S111).Figure 13 (c) represents the process of accurate registration process.

Though omit and record in Fig. 1, but in this patterning device 1, arranging to be supported on and erectting the accurate alignment cameras 27 on the pillar stiffener arranging from underframe 21 along (+Z) direction.Accurately alignment cameras 27 is the modes of four jiaos of taking respectively substrate SB with the openning 611 by lower microscope carrier 61, makes its optical axis add up to and arrange 4 towards vertical top.

At four jiaos of alignment marks (substrate-side alignment mark) that are being pre-formed as position reference of substrate SB, on the other hand, in the position corresponding with this alignment mark of blanket BL, as utilize forme PP carry out patterning pattern a part and be formed with blanket side alignment mark.By take substrate-side alignment mark and blanket side alignment mark in the same visual field of accurate alignment cameras 27, and detect their position relationship, and obtain the position offset of substrate-side alignment mark and blanket side alignment mark, and obtain the amount of movement of the blanket BL that revises this position offset.Aim at microscope carrier supporting mechanism 605 by utilization, make to aim at microscope carrier 601 and move obtained amount of movement, and lower microscope carrier 61 is moved in horizontal surface, thus the skew of the position of correction substrate SB and blanket BL.

Substrate SB and blanket BL are separated under the state of minim gap G ground subtend, and utilizing same camera to take the alignment mark that is respectively formed at substrate SB and blanket BL, thus, just can carry out substrate SB and aim at the high precision position of blanket BL.In this meaning, can say that described registration process is the accurate registration process that precision is higher compared with taking individually substrate SB and blanket BL and carry out the situation of position adjustment.Present embodiment can be by make substrate SB and blanket BL butt under this state, and the pattern of position alignment is accurately formed on to the assigned position of substrate SB.And, can be by carrying out in advance the prealignment processing of substrate SB and blanket BL, and the alignment mark that is respectively formed at substrate SB and blanket BL is positioned in the visual field of accurate alignment cameras 27.

In addition, when utilizing forme PP to carry out pattern while forming to blanket BL, and nonessentially carry out in this way accurate registration process.This is because by blanket side alignment mark is formed on to forme PP together with pattern, and can between pattern on blanket BL and blanket side alignment mark, not produce position skew being formed on, as long as accurately aim at substrate-side alignment mark with blanket side alignment mark, the skew of position slightly of forme PP and blanket BL just can not form and impact pattern.Due to this reason, so only carry out prealignment processing in patterned process.

As mentioned above, present embodiment is to utilize forme manipulator HP to move into the forme PP of face down state, so used the forme PP bending of manipulator HP maintenance by forme.But, because multiple absorption layers 443 of the top absorbing unit 44 forming in this way adsorb maintenance in the upper surface position of mutually different forme PP, and after forme is with manipulator HP collecting printing plates PP, move to via through hole 41d at each absorption layer 443 microscope carrier 41 above during, forme PP is sent to lower surface (maintenance plane) 41a of upper microscope carrier 41, so, can not affect by bending and make the upper surface entirety of forme PP connect airtight lower surface (maintenance plane) 41a in upper microscope carrier 41, in utilization, the adsorption tank 41b of microscope carrier 41 and adsorption hole 41c adsorb well and keep forme PP.

Here, arrive the time point that keeps plane 41a at the lower surface of absorption layer 443, the upper surface of forme PP connects airtight in keeping plane 41a, even if but this opportunity in slightly deviation of each absorption layer 443, also can carry out forme PP transmission.But, present embodiment is to utilize the position regulating function of coupling member 442, so can make described opportunity roughly consistent.That is, utilizing multiple absorption layer 443 one side absorption to keep forme PP one side that forme PP is sent to upper microscope carrier 41 midway from forme manipulator HP, can eliminate the bending of forme PP as shown in Figure 10 (c), forme PP is modified to flat-hand position.Then, all absorption layers 443 are maintaining flat-hand position rising.Therefore, forme PP can connect airtight the lower surface 41a in upper microscope carrier 41 to be modified to as described above the state of flat-hand position, thereby carries out more well transmission and the absorption maintenance of forme PP.

These action effects are not only proving effective forme PP in the time that forme is sent to microscope carrier 41 with manipulator HP, and substrate SB is also being proved effective in the time that substrate is sent to microscope carrier 41 with manipulator HS.

In addition, described embodiment is, at upper microscope carrier 41, multiple through hole 41d are set, and is positioned at through hole 41d and under the state of upper surface of forme PP or substrate SB, carries out pattern formation (forme PP carries out pattern transfer on pattern transfer, blanket BL to substrate SB to blanket).Therefore, exist through hole 41d to affect alarming situation, but observe the locational pattern formation result of through hole 41d, confirm in the position of through hole 41d and do not find that pattern is bad, spreaded all over and realized by entire surface good pattern formation.

As mentioned above, in present embodiment, forme PP and substrate SB are equivalent to an example of " tabular by transport object " of the present invention and " plate-shaped body ", and forme is equivalent to an example of " the first retainer member " of the present invention and " conveyance device " with manipulator HP and substrate manipulator HS.And upper microscope carrier 41 is equivalent to an example of " the second retainer member " of the present invention.And a pair of top absorbing unit 44 is equivalent to an example of " conveyer " of the present invention and " carrying device ".And bracing frame 441 is equivalent to an example of " mobile member " of the present invention.

In addition, the present invention is not limited to described embodiment, can in the scope that does not depart from spirit of the present invention, append various changes to described content.For example described embodiment is to make to be arranged with along directions X that the pad of 3 absorption layers 443 is capable arranges 4 row along Y-direction, use 12 absorption layers 443 and add up to, as long as the mutual different position that but can utilize multiple absorption layers 443 to adsorb the upper surface of forme PP or substrate SB, number and the arrangement etc. of absorption layer 443 are any.

And, described embodiment is to be tabularly applied to patterning device by the transfer approach of transport object and conveyer by of the present invention, but application of the present invention is not limited thereto, can be applicable to following all devices: will be sent to the second retainer member with the tabular of state maintenance of supporting lower surface circumference by transport object by the first retainer member, this second retainer member is adsorbed and kept described tabular by the upper surface of transport object above described the first retainer member.

The present invention can be applicable to following technology and uses this technology to carry out all patterning devices of pattern formation, and this technology is to be kept tabular by second retainer member of the upper surface of transport object by transport object from keep this tabular first retainer member by transport object to be sent to absorption with bending state by tabular.

Claims (5)

1. One kind tabular by the transfer approach of transport object, to be sent to the second retainer member with the tabular of state maintenance of supporting lower surface circumference by transport object by the first retainer member, this second retainer member is adsorbed and is kept described tabular by the upper surface of transport object above described the first retainer member, and this tabular transfer approach by transport object is characterised in that and comprises:

   The first adsorption step, the first through hole that makes the first adsorption element penetratingly be arranged on described the second retainer member from above-below direction declines, and it is described tabular by the first absorption position of the upper surface of transport object that absorption maintenance is kept by described the first retainer member;

   The second adsorption step, the second through hole that makes the second adsorption element penetratingly be arranged on described the second retainer member from the position above-below direction different from described the first through hole declines, and it is described tabular by the second absorption positions different from described the first absorption position in the upper surface of transport object that absorption keeps; And

   Mobile step, making keeping described is tabularly risen by described first adsorption element of transport object and described the second adsorption element, retreat respectively to described the first through hole and in described the second through hole, make describedly tabularly to be moved to described the second retainer member by transport object from described the first retainer member.
2. 2. according to claim 1 tabular by the transfer approach of transport object, it is characterized in that:

   Described the first adsorption step is following steps: make described the first adsorption element decline distance corresponding with the described tabular displacement being caused in the bending at described the first absorption position place by transport object being kept by described the first retainer member,

   Described the second adsorption step is following steps: make described the second adsorption element decline distance corresponding with the described tabular displacement being caused in the bending at described the second absorption position place by transport object being kept by described the first retainer member.
3. One kind tabular by the conveyer of transport object, to be sent to the second retainer member with the tabular of state maintenance of supporting lower surface circumference by transport object by the first retainer member, this second retainer member is adsorbed and is kept described tabular by the upper surface of transport object above described the first retainer member, and this tabular conveyer by transport object is characterised in that and comprises:

   The first adsorption element and the second adsorption element, it is described tabular by the upper surface of transport object that absorption keeps; And driver train portion, make described the first adsorption element along the first mobile route lifting, this first mobile route is penetratingly arranged on the first through hole of described the second retainer member by above-below direction, and make described the second adsorption element along the second mobile route lifting, this second mobile route is by being penetratingly arranged on the second through hole of described the second retainer member at the position above-below direction different from described the first through hole;

   Described driver train portion declines described the first adsorption element and described the second adsorption element, utilize respectively described the first adsorption element and described the second adsorption element to adsorb described tabular by after the first absorption position and the second absorption position mutual different in the upper surface of transport object that maintenance is kept by described the first retainer member

   Described the first adsorption element and described the second adsorption element are then retreated in described the first through hole and in described the second through hole by rising, make describedly tabularly to be moved to described the second retainer member by transport object from described the first retainer member.
4. 4. according to claim 3 tabular by the conveyer of transport object, it is characterized in that: described driver train portion comprises:

   Lifting mechanism, is used for making described the first adsorption element and described the second adsorption element lifting;

   Mobile member, utilizes described lifting mechanism and lifting along the vertical direction above described the first adsorption element and described the second adsorption element;

   The first coupling member, described mobile member and described the first adsorption element are linked mutually, make described the first adsorption element and one lifting of described mobile member, and there is position regulating function, described the first adsorption element and described tabular by the upper surface butt of transport object after described mobile member while further declining, make the relative position displacement of described the first adsorption element for described mobile member, maintain the height and position of described the first adsorption element; And

   The second coupling member, described mobile member and described the second adsorption element are linked mutually, make described the second adsorption element and one lifting of described mobile member, and there is position regulating function, described the second adsorption element and described tabular by the upper surface butt of transport object after described mobile member while further declining, make the relative position displacement of described the second adsorption element for described mobile member, maintain the height and position of described the second adsorption element.
5. 5. a patterning device, the blanket, the plate-shaped body that remains on the lower surface of the upper microscope carrier that is disposed at described lower microscope carrier top with absorption of the upper surface that remains on lower microscope carrier are mutually compressed and form pattern, and this patterning device is characterised in that and comprises:

   Conveyance device, under the state of the lower surface circumference of the plate-shaped body before supporting pattern and forming, by described plate-shaped body conveyance between described upper microscope carrier and described lower microscope carrier; And

   Carrying device, is sent to described upper microscope carrier by described plate-shaped body from described conveyance device; And

   Described carrying device comprises:

   The first adsorption element and the second adsorption element, absorption keeps the upper surface of described plate-shaped body; And

   Driver train portion, make described the first adsorption element along the first mobile route lifting, this first mobile route is penetratingly arranged on the first through hole of described upper microscope carrier by above-below direction, and make described the second adsorption element along the second mobile route lifting, this second mobile route by be penetratingly arranged at the position above-below direction different from described the first through hole described on the second through hole of microscope carrier;

   Described driver train portion declines described the first adsorption element and described the second adsorption element, after utilizing respectively the first absorption position and the second absorption position mutual different in described the first adsorption element and the upper surface of described the second adsorption element absorption maintenance by the described plate-shaped body of described conveyance device maintenance

   Described the first adsorption element and described the second adsorption element are then retreated in described the first through hole and in described the second through hole by rising, make described plate-shaped body move to described upper microscope carrier from described conveyance device.