CN104656188B - A kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle - Google Patents
A kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle Download PDFInfo
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- CN104656188B CN104656188B CN201510062482.8A CN201510062482A CN104656188B CN 104656188 B CN104656188 B CN 104656188B CN 201510062482 A CN201510062482 A CN 201510062482A CN 104656188 B CN104656188 B CN 104656188B
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- 239000011521 glass Substances 0.000 title claims abstract description 80
- 239000002082 metal nanoparticle Substances 0.000 title claims abstract description 56
- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 238000005342 ion exchange Methods 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 238000009792 diffusion process Methods 0.000 claims abstract description 25
- 150000002500 ions Chemical class 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000005368 silicate glass Substances 0.000 claims description 4
- 239000005385 borate glass Substances 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 239000005365 phosphate glass Substances 0.000 claims description 3
- 229910001419 rubidium ion Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 17
- 239000000835 fiber Substances 0.000 abstract description 14
- 230000010363 phase shift Effects 0.000 abstract description 4
- 150000003839 salts Chemical class 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 229910021645 metal ion Inorganic materials 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000382 optic material Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007832 Na2SO4 Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Inorganic materials [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle.Tabular feeromagnetic metal nano particle doped layer is provided with glass top surface, the ion diffusion region of glass top surface is as strip optical waveguide core, an ion diffusion region part is located in tabular feeromagnetic metal nano particle doped layer, and another part is located at the region undoped with feeromagnetic metal nano particle in glass；The refractive index of ion diffusion region in tabular feeromagnetic metal nano particle doped layer is higher than the refractive index of tabular feeromagnetic metal nano particle doped layer, and the refractive index in the region undoped with feeromagnetic metal nano particle in glass is higher than positioned at refractive index of the glass undoped with the ion diffusion region in feeromagnetic metal nano particle region.The present invention solves the problem of the fiber waveguide based on magneto-optic nonreciprocal phase shift principle；Solve the problem matched between the optical parametric of magneto-optic memory technique and Glass optical parameter, while avoid the problem combined between substrate of magneto-optic memory technique.
Description
Technical field
The present invention relates to integrated optical device, and in particular to a kind of glass base ion exchange containing feeromagnetic metal nano particle
Fiber waveguide.
Background technology
Glass light waveguide device based on ion exchange technique has that cost is cheap, technique is simple, transmission loss is low, PDL
（It is polarization correlated）It is small, make the distinguishing features such as tolerance is big, can be mass, obtained in integrated optical device makes extensively
With.Glass based optical waveguide device is typically made using ion exchange technique.In ion exchange process, the monovalence sun in glass substrate
Ion（Typically Na+）With containing the ion that can improve glass refraction（For example K+, Ag+、Tl+、Cs+、Li+Or Rb+）Fused salt
Ion exchange is carried out, the ion for improving glass refraction in fused salt enters glass substrate and diffusion is formed in glass substrate
Area, the diffusion region have higher refractive index than glass substrate, as the core of waveguide, light wave are collectively formed with glass substrate
Lead.
The demand pull applied by the multiple sensors from magneto optic isolator and based on magnetic field sensing principle,
The integrated of magneto-optic function becomes an emerging study hotspot on integrated optics chip, the integrated-type magnetic-optic devices on glass substrate
Also therefore very big concern is received.It is to build the integrated basis of magneto-optic function that magneto-optic fiber waveguide, which makes, and realizes magneto-optic function
The integrated key problem that must be solved.
The making of glass base magneto-optic waveguide piece magneto-optic waveguide mainly has two approach.First approach is to use laser straight literary style
High-index regions 2 are made on magneto-optic glass substrate 1 with ion-exchange, form waveguide（As shown in Figure 1）.This approach is realized
The making of fiber waveguide can be realized in magneto-optic glass substrate 1, but this fiber waveguide is difficult to realize the magnetic needed for integrated optical device
Light function.The magneto-optic waveguide that mainly this kind of method makes is all based on the principle of TE-TM moulds conversion.This TE- in fiber waveguide
The matching of transmission very high level between effective the conversion requirements fiber waveguide TE moulds and TM moulds of TM moulds, and laser writing technology and
Ion exchange technique realizes that this matching cannot be guaranteed in planar optical waveguide.
Realize that two approach that magneto-optic waveguide makes are to form ion diffusion region on glass substrate 3 first on glass substrate
4, then introduce magneto-optic material layer 5 in the side of ion diffusion region 4（For example yig crystal）, i.e., realized by making composite optical wave guide
Magneto-optic function.The cross-sectional structure of this fiber waveguide is as shown in Figure 2.The magneto-optic waveguide that this approach makes is based on nonreciprocal phase shift
Principle, avoid the problem that transmission between TE moulds and TM moulds matches.However, this approach still faces two challenges：
First, in order to realize nonreciprocal phase shift larger in waveguide, it is desirable to the optical parametric of magneto-optic material layer 5 and the optics of glass substrate 3
Matching between parameter.Secondly, it is necessary to solves the technical problem combined between magneto-optic material layer 5 and glass substrate 3.
The content of the invention
It is an object of the invention to provide a kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle.
The technical solution adopted for the present invention to solve the technical problems is：
Surface is provided with tabular feeromagnetic metal nano particle doped layer, glass substrate upper surface to the present invention on a glass substrate
Ion diffusion region include two parts as strip optical waveguide core, ion diffusion region：A part is located at tabular feeromagnetic metal
In nano particle doped layer, another part is located at the region undoped with feeromagnetic metal nano particle in glass substrate；Positioned at flat board
The refractive index of ion diffusion region in shape feeromagnetic metal nano particle doped layer is adulterated higher than tabular feeromagnetic metal nano particle
The refractive index of layer, is higher than glass positioned at refractive index of the glass substrate undoped with the ion diffusion region in feeromagnetic metal nano particle region
The refractive index in the region undoped with feeromagnetic metal nano particle in glass substrate.
Its material of the glass substrate is silicate glass, borate glass or phosphate glass.
The ion for forming ion diffusion region is K, Ag+、Tl+、Cs+、Li+Or Rb+Ion.
Feeromagnetic metal in the feeromagnetic metal nano particle doped layer is Fe, Co or Ni.
The invention has the advantages that：
Said in principle, feeromagnetic metal nano particle doped layer has very high magneto-optic activity, and therefore, the size of device can be with
Significantly reduce.Moreover, this glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle, which solves, is based on
The technical barrier of the fiber waveguide of magneto-optic nonreciprocal phase shift principle：Tabular feeromagnetic metal nano particle doped layer is in glass substrate
Produce, therefore solve the problem matched between the optical parametric of magneto-optic memory technique and glass substrate optical parametric, avoid simultaneously
The technical barrier that the junction belt between glass substrate of magneto-optic memory technique is come.
The preparation process of this glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle can pass through routine
Technique i.e. can be achieved, there is the advantages of traditional ion-exchange process.
Brief description of the drawings
Fig. 1 is the lightguide cross section structural representation made using ion-exchange in magneto-optic glass substrate 1.
Fig. 2 is shown by the composite optical wave guide cross-sectional structure made on glass substrate 3 by introducing magneto-optic material layer 5
It is intended to.
Fig. 3 is the signal of the glass-based ion exchange optical waveguide cross-sectional structure containing feeromagnetic metal nano particle of the present invention
Figure.
Fig. 4 is the main making step of the glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle of the present invention
Signal
In figure：1st, magneto-optic glass substrate；2nd, high-index regions；3rd, glass substrate；4th, ion diffusion region；5th, magneto-optic memory technique
Layer；6th, tabular feeromagnetic metal nano particle doped layer；7th, mask.
Embodiment
The invention will be further described with reference to the accompanying drawings and examples.
As shown in figure 3, the present invention is provided with tabular feeromagnetic metal nano particle doped layer 6, glass in the upper surface of glass substrate 3
The ion diffusion region 4 of the upper surface of glass substrate 3 is used as strip optical waveguide core, and ion diffusion region 4 includes two parts：A part is located at
In tabular feeromagnetic metal nano particle doped layer 6, another part is located in glass substrate 3 undoped with feeromagnetic metal nano particle
Region；The refractive index of ion diffusion region 4 in tabular feeromagnetic metal nano particle doped layer 6 is ferromagnetic higher than tabular
The refractive index of metal nanoparticle doped layer 6, expand positioned at glass substrate 3 undoped with the ion in feeromagnetic metal nano particle region
The refractive index for dissipating area 4 is higher than the refractive index in the region undoped with feeromagnetic metal nano particle in glass substrate 3.Due to the light of bar shaped
The core of waveguide is in tabular feeromagnetic metal nano particle doped layer 6 and glass substrate 3 undoped with feeromagnetic metal nanometer
The region of grain, this ion exchange optical waveguide have the characteristic of magneto-optic nonreciprocal fiber waveguide.The cross-sectional structure of this fiber waveguide
As shown in Figure 3.
Described its material of glass substrate 3 is silicate glass, borate glass or phosphate glass.
The ion for forming ion diffusion region 4 is K+, Ag+、Tl+、Cs+、Li+Or Rb+Ion.
Feeromagnetic metal in the feeromagnetic metal nano particle doped layer 6 is Fe, Co or Ni.
The making step of the present invention is as follows：
The making of step 1) tabular feeromagnetic metal nano particle doped layer 6.
First spread on glass substrate 3 by fused salt ion exchange technique, ion implantation technique or electric-field-assisted ion
Technology forms tabular feeromagnetic metal ion doped layer in glass substrate surface.By annealing, by feeromagnetic metal ion therein
Reduction, forms ferromagnetic nanoparticles, and tabular feeromagnetic metal ion doped layer becomes the doping of tabular feeromagnetic metal nano particle
Layer 6；
Step 2) makes ion diffusion region 4 by ion exchange technique on the surface of glass substrate 3.
The fused salt for the ion that can improve glass refraction using containing is as ion gun, by the Micrometer-Nanometer Processing Technology of standard
The mask 7 of making makes fiber waveguide on the surface of glass substrate 3, and the core thickness of fiber waveguide is more than tabular feeromagnetic metal nanometer
The thickness of grain doped layer 6, therefore the ion diffusion region 4 of strip optical waveguide core includes two parts：A part is located at tabular iron
In magnetic metal nanoparticle doped layer 6, another part is located at the region undoped with feeromagnetic metal nano particle in glass substrate 3.
Below by taking the glass-based ion exchange optical waveguide of Co metal nanoparticles doping as an example, introduce this fiber waveguide and make
Mode, as shown in Figure 4：
(A) preparation of glass substrate upper flat plate shape Co metal nanoparticle doped layers（Such as Fig. 4 steps A）：
Using silicate glass as glass substrate, using CoSO4And Na2SO4Mixing fused salt as ion gun,
1 hour is incubated at 500-550 DEG C.Mix the Co in fused salt2+Into glass substrate, tabular feeromagnetic metal ion doping is formed
Layer, after cooling, glass substrate is cleaned up.
Glass substrate is annealed in reducing atmosphere glass substrate is annealed, tabular feeromagnetic metal ion doped layer is become
Into tabular feeromagnetic metal nano particle doped layer 6, atmosphere used is H2, 400 DEG C of annealing temperature, annealing time 2 hours.
(B) mask 7 is made on the surface of glass using fine process（Such as Fig. 4 steps B）：
Mask 7, the material of mask 7 are made on tabular feeromagnetic metal nano particle doped layer 6 using evaporation or sputtering technology
Expect for aluminium.The figure of required strip optical waveguide is prepared on mask 7 using the lithography corrosion process of standard.
(C) ion doped region of bar shaped is made using ion-exchange process（Such as Fig. 4 steps C）
Bar shaped is prepared on glass substrate surface feeromagnetic metal nano particle doped layer using fused salt ion-exchange process
Ion doped region.
Using KNO3For fused salt as ion gun, ion-exchange temperature is 350 DEG C, 8 hours swap times.
(D) mask 7 of glass surface is removed using etching process（Such as Fig. 4 steps D）.
Above-mentioned embodiment is used for illustrating the present invention, rather than limits the invention, the present invention's
In spirit and scope of the claims, to any modifications and changes of the invention made, protection model of the invention is both fallen within
Enclose.
Claims (4)
- A kind of 1. glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle, it is characterised in that：In glass substrate (3) Upper surface is provided with tabular feeromagnetic metal nano particle doped layer (6), and the ion diffusion region (4) of glass substrate (3) upper surface is made For strip optical waveguide core, ion diffusion region (4) include two parts：A part is adulterated positioned at tabular feeromagnetic metal nano particle In layer (6), another part is located at the region undoped with feeromagnetic metal nano particle in glass substrate (3)；It is ferromagnetic positioned at tabular The refractive index of ion diffusion region (4) in metal nanoparticle doped layer (6) is adulterated higher than tabular feeromagnetic metal nano particle The refractive index of layer (6), positioned at folding of the glass substrate (3) undoped with the ion diffusion region (4) in feeromagnetic metal nano particle region Penetrate refractive index of the rate higher than the region undoped with feeromagnetic metal nano particle in glass substrate (3).
- 2. a kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle according to claim 1, it is special Sign is：Described its material of glass substrate (3) is silicate glass, borate glass or phosphate glass.
- 3. a kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle according to claim 1, it is special Sign is：The ion for forming ion diffusion region (4) is K, Ag+、Tl+、Cs+、Li+Or Rb+Ion.
- 4. a kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle according to claim 1, it is special Sign is：Feeromagnetic metal in the feeromagnetic metal nano particle doped layer (6) is Fe, Co or Ni.
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Cited By (1)
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| CN111045150A (en) * | 2019-12-30 | 2020-04-21 | 浙江大学 | Method for realizing continuous production of glass-based ion exchange surface optical waveguide chip |
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| CN109491011B (en) * | 2018-12-17 | 2020-11-06 | 武汉邮电科学研究院有限公司 | Waveguide optical active gain implementation method, waveguide and optical device |
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| CN111025472B (en) * | 2019-12-30 | 2020-10-09 | 浙江大学 | Method for continuously producing glass-based ion exchange surface optical waveguide chip |
| CN112596157B (en) * | 2020-12-22 | 2024-06-18 | 浙江大学绍兴微电子研究中心 | Silicon-based magneto-optical nonreciprocal strip-shaped optical waveguide |
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