CN111025472B - Method for continuously producing glass-based ion exchange surface optical waveguide chip - Google Patents
Method for continuously producing glass-based ion exchange surface optical waveguide chip Download PDFInfo
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- CN111025472B CN111025472B CN201911400459.XA CN201911400459A CN111025472B CN 111025472 B CN111025472 B CN 111025472B CN 201911400459 A CN201911400459 A CN 201911400459A CN 111025472 B CN111025472 B CN 111025472B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
Abstract
The invention discloses a method for continuously producing a glass-based ion exchange surface optical waveguide chip. Placing a tunnel type high-temperature furnace, wherein furnace mouths are arranged at two ends of the tunnel type high-temperature furnace and are respectively used as an inlet end and an outlet end, and a horizontal conveyor belt is arranged between the inlet end and the outlet end of the tunnel type high-temperature furnace; the crucible is placed on the conveyer belt and is transported along the conveyer belt, and the transfer gear of conveyer belt connects drive structure, and under the drive structure effect of conveyer belt, the conveyer belt is carried the crucible into tunnel type high temperature furnace from the entrance point of tunnel type high temperature furnace, carries to the exit end of tunnel type high temperature furnace after the high temperature ion exchange reaction. The invention improves the consistency of the optical waveguide chip, and the qualification rate is easier to improve; the complexity and the cost of designing and optimizing the production process parameters of the glass-based ion exchange surface optical waveguide chip are reduced; the production efficiency of the optical waveguide chip is improved, and the energy consumption is reduced.
Description
Technical Field
The invention relates to the field of optical devices and integrated optics, in particular to a method for continuously producing a glass-based ion exchange surface optical waveguide chip.
Background
In 1969, s.e.miller proposed the concept of integrated optics, which was based on the idea of fabricating optical waveguides on the surface of the same substrate (or chip) and then implementing integrated fabrication of various devices such as light sources, couplers, filters, etc. By such integration, miniaturization, weight reduction, and stabilization of the optical system are achieved, and device performance is improved.
Integrated optical devices fabricated on glass substrates by ion exchange have received considerable attention from industry and researchers. Glass-based integrated optical waveguide devices based on ion exchange technology have several excellent properties, including: low transmission loss, easy doping of high-concentration rare earth ions, matching with the optical characteristics of the optical fiber, low coupling loss, good environmental stability, easy integration, low cost and the like. In 1972, the first article on ion exchange fabrication of optical waveguides was published, and the initiation of research on glass-based integrated optical devices was marked. Since then, research institutions in various countries have invested a great deal of manpower and financial resources in developing glass-based integrated optical devices. Up to now, integrated optical devices on several glass substrates have been mass-produced and serialized, successfully used for optical communication, optical interconnection and optical sensing networks, and have shown strong competitiveness.
The optical properties of ion-exchange optical waveguides fabricated by existing methods depend on the ion-exchange time and ion-exchange temperature. The existing ion exchange mode, namely, the ion exchange is carried out in a box-type high-temperature furnace, and the mass production of the optical waveguide chip has various problems.
First, the capacity of a general chamber type high temperature furnace is limited, and the number of glass substrates that can be accommodated in the high temperature furnace is affected in consideration of the non-uniformity of the temperature inside the chamber of the chamber type high temperature furnace, which limits the production efficiency and also increases the average energy consumption for chip production.
Secondly, the large-scale production needs a plurality of box-type high-temperature furnaces to work simultaneously, the temperature difference between the high-temperature furnaces, the operation speed of operators and the difference between operation habits increase the inconsistency of the optical properties of the ion exchange optical waveguide, and the improvement of the qualified rate is not facilitated.
Thirdly, a plurality of box-type high-temperature furnaces need more fixed asset investment and occupy more land resources.
Therefore, the existing ion exchange technology based on the box-type high-temperature furnace cannot be suitable for large-scale and mass production of the glass-based optical waveguide chip.
Disclosure of Invention
In order to solve the problems in the background art, the invention aims to provide a method for continuously producing a glass-based ion exchange surface optical waveguide chip.
The technical scheme adopted by the invention for solving the technical problems is as follows:
in the invention, a tunnel-type high-temperature furnace is placed, furnace mouths are arranged at two ends of the tunnel-type high-temperature furnace and are respectively used as an inlet end and an outlet end, and a horizontal conveyor belt is arranged between the inlet end and the outlet end of the tunnel-type high-temperature furnace; the crucible is placed on the conveyer belt and is transported along the conveyer belt, and the transfer gear of conveyer belt connects drive structure, and under the drive structure effect of conveyer belt, the conveyer belt is carried the crucible into tunnel type high temperature furnace from the entrance point of tunnel type high temperature furnace, carries to the exit end of tunnel type high temperature furnace after the high temperature ion exchange reaction.
The crucible is filled with fused salt containing doped ions, the bottom of the crucible is supported by a support and placed with a glass substrate, the upper surface of the glass substrate is manufactured with a mask with a hollow middle part by a micro-processing technology, the support and the glass substrate are completely immersed into the fused salt containing the doped ions, and the method is characterized in that the glass substrate with the mask on the surface is immersed into the fused salt containing the doped ions in the crucible by moving and transporting the crucible through a conveyor belt to carry out ion exchange so as to manufacture the surface optical waveguide chip.
The glass substrate is made of silicate glass, borosilicate glass, phosphate glass or borate glass.
The doped ion-containing molten salt comprises the following doped ions: k+、Tl+、Ag+And Cs+。
A plurality of crucibles are placed on the conveyor belt at intervals and are transported along the conveyor belt.
Compared with the prior art for manufacturing the glass-based optical waveguide chip, the invention has the beneficial effects that:
the invention improves the consistency of the optical waveguide chip, and the qualification rate is easier to improve; the investment of fixed assets is reduced; the production efficiency of the optical waveguide chip is improved, and the energy consumption is reduced.
Drawings
FIG. 1 is a schematic diagram of a glass-based surface optical waveguide manufactured by the technical solution of the present invention.
FIG. 2 is a schematic view of the crucible structure apparatus of the present invention.
In the figure: 2. a molten salt containing dopant ions; 3. a crucible; 4. a glass substrate; 5. masking; 6. a support; 7. an ion-doped region; 8. a tunnel type high temperature furnace; 9. a drive mechanism; 10. and (4) a conveyor belt.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1, a tunnel type high temperature furnace 8 is placed in a concrete implementation, a high temperature heating device is arranged in the tunnel type high temperature furnace 8 to heat the interior of the furnace to reach an ion exchange temperature, furnace mouths are respectively arranged at two linear ends of the tunnel type high temperature furnace 8 to be used as an inlet end and an outlet end, and a horizontal conveyor belt 10 is arranged between the inlet end and the outlet end of the tunnel type high temperature furnace 8, in the concrete implementation, an upper belt of the conveyor belt 10 is positioned in the tunnel type high temperature furnace 8, a lower belt of the conveyor belt 10 is positioned outside the tunnel type high temperature furnace 8, and the conveyor belt 10 winds through the bottoms of the inlet end and the outlet end of the; a plurality of crucibles 3 are uniformly arranged on a conveyor belt 10 at intervals and are transported along the conveyor belt 10, the conveyor belt 10 is connected with a conveying wheel and is connected with a driving structure 9, the driving structure 9 can be specifically a motor, under the action of the driving structure 9 of the conveyor belt 10, the crucibles 3 are conveyed into the tunnel-type high-temperature furnace 8 from the inlet end of the tunnel-type high-temperature furnace 8 by the conveyor belt 10 and are conveyed to the outlet end of the tunnel-type high-temperature furnace 8 after high-temperature ion exchange reaction.
As shown in figure 2, the crucible 3 is filled with fused salt 2 containing doped ions, the bottom of the crucible 3 is supported and placed with a glass substrate 4 through a bracket 6, the upper surface of the glass substrate 4 is provided with a mask 5 with a hollow middle part used for optical waveguide by a micro-machining process, the hollow middle part is used as an ion exchange window, the bracket 6 and the glass substrate 4 are both completely immersed into the fused salt 2 containing doped ions, and the method is characterized in that the glass substrate 4 with the mask 5 on the surface is immersed into the fused salt 2 containing doped ions in the crucible 3 through a conveyor belt 10 to carry out ion exchange to prepare the surface optical waveguide chip.
The middle hollow part of the mask 5 is used as an ion exchange window, and the doped ions in the fused salt 2 containing the doped ions pass through the ion exchange window formed by the mask 5 and Na in the glass substrate 4 in the process that the crucible 3 conveyer belt 10 is conveyed+And exchanging, wherein the doped ions enter the surface layer of the glass substrate 4 and are diffused to form an ion doped region 7, so that the core layer of the surface optical waveguide chip is formed.
The invention relates to a method for continuously producing glass-based ion exchange surface optical waveguide chips, which respectively uses K+/Na+Ion exchange and Ag+/Na+The continuous production of glass-based ion exchange surface optical waveguide chips is described by taking surface single-mode and multi-mode optical waveguides manufactured by ion exchange as examples.
Example 1: by K+/Na+Ion exchange fabrication of single mode optical waveguides
The required preparation work is as follows:
a tunnel type high temperature furnace (8) with the length of 6 meters, a conveyor belt (10) and a driving mechanism (9). Wherein the drive mechanism (9) is capable of continuously variable transmission operation.
Molten salt (2) containing doping ions, here KNO3And (3) melting salt.
A silicate glass substrate (4) with a mask (5) with a hollow structure on the surface.
70 crucibles (3) and 70 supports (6) were prepared.
The method mainly comprises the following steps:
(A) the temperature of the tunnel type high temperature furnace (8) is raised to 350 ℃ and kept. The rotating speed of the driving mechanism (9) is adjusted to ensure that the transmission speed of the conveyor belt (10) is 0.25 mm/s.
(B) Placing the support (6) into the crucible (3), and placing the glass substrate (4) on the support (6) in the crucible (3);
(C) injecting a fused salt (2) containing doping ions into the crucible (3) to submerge the glass substrate (4);
(D) placing the crucible (3) on a conveyor belt (10) at the inlet end of a tunnel type high-temperature furnace (8);
(E) on a conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8), a new glass substrate (4) is placed on a bracket (6) in the crucible (3) every 10min according to the sequence of the (B) - (C) - (D), and a fused salt (2) containing doping ions is injected and placed on the conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8);
(F) after the crucible (3) with the glass substrate (4) therein which is placed for the first time is conveyed to the outlet end of the tunnel type high temperature furnace (8), the glass substrate (4) is taken out from the crucible (3) at intervals of 10min for cleaning, and the fused salt (2) containing the doping ions in the crucible (3) is treated.
Example 2: by K+/Na+Ion exchange fabrication of multimode optical waveguides
The required preparation work is as follows:
a tunnel type high temperature furnace (8) with the length of 6 meters, a conveyor belt (10) and a driving mechanism (9). Wherein the drive mechanism (9) is capable of continuously variable transmission operation.
Molten salt (2) containing doping ions, here KNO3And (3) melting salt.
A silicate glass substrate (4) with a mask (5) with a hollow structure on the surface.
70 crucibles (3) and 70 supports (6) were prepared.
The method mainly comprises the following steps:
(A) the temperature of the tunnel type high temperature furnace (8) is raised to 400 ℃ and kept. The rotating speed of the driving mechanism (9) is adjusted to ensure that the transmission speed of the conveyor belt (10) is 0.20 mm/s.
(B) Placing the support (6) into the crucible (3), and placing the glass substrate (4) on the support (6) in the crucible (3);
(C) injecting a fused salt (2) containing doping ions into the crucible (3) to submerge the glass substrate (4);
(D) placing the crucible (3) on a conveyor belt (10) at the inlet end of a tunnel type high-temperature furnace (8);
(E) on a conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8), a new glass substrate (4) is placed on a support (6) in the crucible (3) every 12.5min according to the sequence from (B) to (C) to (D), and a fused salt (2) containing doped ions is injected and placed on the conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8);
(F) after the crucible (3) with the glass substrate (4) therein which is placed for the first time is conveyed to the outlet end of the tunnel type high temperature furnace (8), the glass substrate (4) is taken out from the crucible (3) and cleaned at intervals of 12.5min, and the fused salt (2) containing the doping ions in the crucible (3) is treated.
Example 3: with Ag+/Na+Ion exchange fabrication of single mode optical waveguides
The required preparation work is as follows:
a tunnel type high temperature furnace (8) with the length of 6 meters, a conveyor belt (10) and a driving mechanism (9). Wherein the drive mechanism (9) can be infinitely variable.
Molten salt (2) containing doping ions, here AgNO3With NaNO3Mixed molten salt of (1), wherein AgNO3Content of (3) is 1 mol%.
A silicate glass substrate (4) with a mask (5) with a hollow structure on the surface.
50 crucibles (3) and 50 holders (6) were prepared.
The method mainly comprises the following steps:
(A) the temperature of the tunnel type high temperature furnace (8) is raised to 330 ℃ and kept. The rotating speed of the driving mechanism (9) is adjusted to ensure that the transmission speed of the conveyor belt (10) is 0.50 mm/s.
(B) Placing the support (6) into the crucible (3), and placing the glass substrate (4) on the support (6) in the crucible (3);
(C) injecting a fused salt (2) containing doping ions into the crucible (3) to submerge the glass substrate (4);
(D) placing the crucible (3) on a conveyor belt (10) at the inlet end of a tunnel type high-temperature furnace (8);
(E) on a conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8), a new glass substrate (4) is placed on a bracket (6) in the crucible (3) every 5min according to the sequence of the (B) - (C) - (D), and a fused salt (2) containing doping ions is injected and placed on the conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8);
(F) after the crucible (3) with the glass substrate (4) therein which is placed for the first time is conveyed to the outlet end of the tunnel type high temperature furnace (8), the glass substrate (4) is taken out from the crucible (3) at intervals of 5min for cleaning, and the fused salt (2) containing the doping ions in the crucible (3) is treated.
Example 4: with Ag+/Na+Ion exchange fabrication of multimode optical waveguides
The required preparation work is as follows:
a tunnel type high temperature furnace (8) with the length of 6 meters, a conveyor belt (10) and a driving mechanism (9). Wherein the drive mechanism (9) can be infinitely variable.
Molten salt (2) containing doping ions, here AgNO3With NaNO3Mixed molten salt of (1), wherein AgNO3Content of (3) is 1 mol%.
A silicate glass substrate (4) with a mask (5) with a hollow structure on the surface.
50 crucibles (3) and 50 holders (6) were prepared.
The method mainly comprises the following steps:
(A) the temperature of the tunnel type high temperature furnace (8) is raised to 350 ℃ and kept. The rotating speed of the driving mechanism (9) is adjusted to ensure that the transmission speed of the conveyor belt (10) is 0.25 mm/s.
(B) Placing the support (6) into the crucible (3), and placing the glass substrate (4) on the support (6) in the crucible (3);
(C) injecting a fused salt (2) containing doping ions into the crucible (3) to submerge the glass substrate (4);
(D) placing the crucible (3) on a conveyor belt (10) at the inlet end of a tunnel type high-temperature furnace (8);
(E) on a conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8), a new glass substrate (4) is placed on a bracket (6) in the crucible (3) every 10min according to the sequence of the (B) - (C) - (D), and a fused salt (2) containing doping ions is injected and placed on the conveyor belt (10) at the inlet end of the tunnel type high-temperature furnace (8);
(F) after the crucible (3) with the glass substrate (4) therein which is placed for the first time is conveyed to the outlet end of the tunnel type high temperature furnace (8), the glass substrate (4) is taken out from the crucible (3) at intervals of 10min for cleaning, and the fused salt (2) containing the doping ions in the crucible (3) is treated.
The foregoing detailed description is intended to illustrate and not limit the invention, which is intended to be within the spirit and scope of the appended claims, and any changes and modifications that fall within the true spirit and scope of the invention are intended to be covered by the following claims.
Claims (5)
1. A method for continuously producing a glass-based ion exchange surface optical waveguide chip is characterized by comprising the following steps: placing a tunnel type high temperature furnace (8), wherein furnace mouths are respectively used as an inlet end and an outlet end at two ends of the tunnel type high temperature furnace (8), and a horizontal conveyor belt (10) is arranged between the inlet end and the outlet end of the tunnel type high temperature furnace (8); the crucible (3) is placed on the conveyor belt (10) and is transported along the conveyor belt (10), the conveying wheel of the conveyor belt (10) is connected with the driving structure (9), and under the action of the driving structure (9) of the conveyor belt (10), the crucible (3) is conveyed into the tunnel-type high-temperature furnace (8) from the inlet end of the tunnel-type high-temperature furnace (8) by the conveyor belt (10) and is conveyed to the outlet end of the tunnel-type high-temperature furnace (8) after high-temperature ion exchange reaction.
2. The method of claim 1, wherein the glass-based ion-exchange surface optical waveguide chip is produced continuously by: the method is characterized in that the crucible (3) is filled with a fused salt (2) containing doped ions, the bottom of the crucible (3) is supported by a support (6) and is provided with a glass substrate (4), the upper surface of the glass substrate (4) is provided with a mask (5) with a hollow structure by a micro-machining process, the support (6) and the glass substrate (4) are completely immersed into the fused salt (2) containing the doped ions, and the method is characterized in that the glass substrate (4) with the mask (5) on the surface is immersed into the fused salt (2) containing the doped ions in the crucible (3) by moving the transport crucible (3) through a conveyor belt (10) to carry out ion exchange to prepare the surface optical waveguide chip.
3. The method of claim 2, wherein the glass-based ion-exchange surface optical waveguide chip is produced continuously by: the glass substrate (4) is made of silicate glass, borosilicate glass, phosphate glass or borate glass.
4. The method of claim 2, wherein the glass-based ion-exchange surface optical waveguide chip is produced continuously by: the doped ion-containing molten salt (2) contains the following doped ions: k +, Tl +, Ag +, and Cs +.
5. The method of claim 1, wherein the glass-based ion-exchange surface optical waveguide chip is produced continuously by: a plurality of crucibles (3) are arranged on the conveyor belt (10) at intervals and are transported along the conveyor belt (10).
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0269996A1 (en) * | 1986-12-01 | 1988-06-08 | Siemens Aktiengesellschaft | Method of producing a buried region with a higher refractive index in a glass body by ion exchange |
| DE10339837B4 (en) * | 2003-08-29 | 2008-10-02 | Schott Ag | Field-assisted ion exchange from continuously applied metal films on glass substrates |
| CN201748791U (en) * | 2010-01-18 | 2011-02-16 | 志圣科技（广州）有限公司 | Tunnel type high-temperature furnace |
| CN203173989U (en) * | 2013-03-29 | 2013-09-04 | 西安同维通讯技术有限责任公司 | Ion exchange furnace |
| CN104656188A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide containing ferromagnetic metal nanoparticles |
| CN109497591A (en) * | 2018-12-26 | 2019-03-22 | 福清老农民农产品贸易有限公司 | A kind of tunnel heat baking formula heating device |
| CN110035982A (en) * | 2016-11-30 | 2019-07-19 | 康宁股份有限公司 | The system and method that ion exchange is carried out to glassware |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102645701B (en) * | 2012-05-04 | 2013-07-31 | 上海光芯集成光学股份有限公司 | Method for producing optical waveguide on surface of glass substrate by utilizing ion exchange method |
| CN204208577U (en) * | 2014-10-29 | 2015-03-18 | 中国石油化工股份有限公司 | Carrier particles continuous impregnating equipment |
-
2019
- 2019-12-30 CN CN201911400459.XA patent/CN111025472B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0269996A1 (en) * | 1986-12-01 | 1988-06-08 | Siemens Aktiengesellschaft | Method of producing a buried region with a higher refractive index in a glass body by ion exchange |
| DE10339837B4 (en) * | 2003-08-29 | 2008-10-02 | Schott Ag | Field-assisted ion exchange from continuously applied metal films on glass substrates |
| CN201748791U (en) * | 2010-01-18 | 2011-02-16 | 志圣科技（广州）有限公司 | Tunnel type high-temperature furnace |
| CN203173989U (en) * | 2013-03-29 | 2013-09-04 | 西安同维通讯技术有限责任公司 | Ion exchange furnace |
| CN104656188A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide containing ferromagnetic metal nanoparticles |
| CN110035982A (en) * | 2016-11-30 | 2019-07-19 | 康宁股份有限公司 | The system and method that ion exchange is carried out to glassware |
| CN109497591A (en) * | 2018-12-26 | 2019-03-22 | 福清老农民农产品贸易有限公司 | A kind of tunnel heat baking formula heating device |
Non-Patent Citations (2)
| Title |
|---|
| 低损耗离子交换玻璃基光波导制备与分析;郝寅雷等;《无机材料学报》;20090915;第24卷(第5期);1041-1044 * |
| 玻璃基离子交换工艺及波导器件的研究;郑伟伟;《中国博士学位论文全文数据库 信息科技辑》;20120715(第7期);I136-1 * |
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