CN101251621A - Optical waveguide containing Cu ion - Google Patents
Optical waveguide containing Cu ion Download PDFInfo
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- CN101251621A CN101251621A CNA2008100598749A CN200810059874A CN101251621A CN 101251621 A CN101251621 A CN 101251621A CN A2008100598749 A CNA2008100598749 A CN A2008100598749A CN 200810059874 A CN200810059874 A CN 200810059874A CN 101251621 A CN101251621 A CN 101251621A
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- ion
- optical waveguide
- diffusion region
- exchange
- ion diffusion
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Abstract
The invention discloses an optical waveguide with Cu ions. An upper surface of a glass substrate is provided with a flat shape Cu ion diffusion zone which is provided with a strip shape high polarizability ion diffusion zone which is used as a core layer of the optical waveguide and has a refractive index higher than that of the glass substrate and also higher than that of the flat shape Cu ion diffusion zone. Because the strip shape high polarizability ion diffusion zone is formed based on the flat shape Cu ion diffusion zone, an ion-exchange optical waveguide has a characteristic of blue-green luminescence of the Cu ions. Meanwhile, the optical waveguide avoids a process that an ion exchange of Cu and salt forms the ion exchange of strip shape optical waveguide under a high temperature condition in the manufacturing process, has a low requirement to a mask, thereby having a lower cost.
Description
Technical field
The present invention relates to the integrated optical device technology, particularly relate to a kind of optical waveguide of the Cu of containing ion.
Background technology
Integrated optical circuit is meant on the surface of same substrate, with the slightly high material optical waveguide of refractive index, and makes various optical device such as light source, grating based on this again.By this integrated, can realize the purpose of miniaturization, lightweight, stabilization and the high performance of optical system.Along with the development of modern Fibre Optical Communication Technology and optical fiber sensing technology, integrated optical device more and more is subject to people's attention.
The material that is used for the integrated optical device making mainly contains III-V family semiconductor materials such as Si, silicon dioxide, gallium arsenide phosphatization indium, polymkeric substance, glass etc.Glass light waveguide device based on ion exchange technique has distinguishing features such as cost is low, technology is simple, loss is low, PDL (polarization correlated) is little, the making tolerance is big, can produce in batches.
The glass-based fiber waveguide device generally adopts ion exchange process to make.In the ion exchange process, (the Na normally of the monovalent cation in the glass substrate
+) with ion (such as the Ag of extraneous high polarization rate
+, Cu
+, Cs
+Or Tl
+) carrying out ion-exchange, the high polarization ion forms ion-exchange area on glass substrate, and this ion-exchange area has higher refractive index, forms the core of waveguide.
In recent years, adopt the making of the fiber waveguide device of Cu ion-exchange making to become the focus that Recent study person pay close attention to.The optical waveguide that Cu ion-exchange forms has the bluish-green characteristics of luminescence, thereby Cu ion-exchange slab guide can be used for the making of non-linear optical waveguide device, perhaps realizes bluish-green band laser and amplifier.
The method for making of common Cu ion exchange optical waveguide as shown in Figure 1.Be included on the glass substrate 1 and make mask 2, will have mask 2 glass substrates and put into and contain Cu
+Perhaps Cu
2+Carry out ion-exchange in the fused salt of ion, the Cu in the fused salt
+Perhaps Cu
2+Ion enters glass substrate, and forms bar shaped Cu ion diffusion region 3 in glass substrate.Bar shaped Cu ion diffusion region 3 has the refractive index higher than glass substrate 1, as the sandwich layer of optical waveguide.The shortcoming of this optical waveguide is: have high melt point owing to contain the salt of Cu ion, the rate of propagation of Cu ion in glass is very slow on the other hand, the exchange temperature of Cu ion-exchange is very high, usually more than 530 ℃, the high temperature resistant and corrosion resistance characteristic of mask 2 has been proposed higher requirement.
Summary of the invention
The object of the present invention is to provide a kind of optical waveguide of the Cu of containing ion.
The technical solution adopted for the present invention to solve the technical problems is:
Be provided with tabular Cu ion diffusion region at the glass substrate upper surface, in tabular Cu ion diffusion region, be provided with bar shaped high polarization ion diffusion region, the high polarization ion diffusion region is as the sandwich layer of optical waveguide, the refractive index of bar shaped high polarization ion diffusion region is higher than the refractive index of glass substrate, also is higher than the refractive index of tabular Cu ion diffusion region.
The beneficial effect that the present invention has is:
This Cu ion exchange optical waveguide ion exchange process first time forms tabular Cu ion diffusion region 4 on glass substrate 1 do not need mask.Avoided common Cu ion-exchange to form pyroprocess in the process of strip optical waveguide to the influence of mask corrosion resistance and heat-resisting quantity.
This Cu ion exchange optical waveguide forms bar shaped high polarization ion diffusion region 5 by ion-exchange for the second time, as the sandwich layer of optical waveguide.The process temperature that ion-exchange for the second time forms the optical waveguide sandwich layer is lower, for example adopts Ag ion-exchange, and ion-exchange temperature reduces significantly to the requirement of the high temperature resistant and decay resistance of ions diffusion mask about 300 ℃.
The forming process of this Cu ion exchange optical waveguide has adopted ion-exchange process twice, the temperature of ion-exchange process exchange for the second time is far below the ion-exchange process first time, the Cu ionic diffusion coefficient is little in second time ion-exchange process, therefore can keep that the Cu ion concentration distribution remains unchanged in the tabular Cu ion diffusion region 4 that ion-exchange for the first time forms, be convenient to the design of ion-exchange process.
The preparation process of this Cu ion exchange optical waveguide has the advantage of traditional ion-exchange process, adopts conventional technology to realize.
Owing on the basis of bar shaped high polarization ion diffusion region 5 tabular Cu ion diffusion regions 4, form, contain the Cu ion in the bar shaped high polarization ion diffusion region 5, therefore, common Cu ion exchange optical waveguide is identical with adopting, and this Cu ion exchange optical waveguide has the bluish-green characteristics of luminescence.
Description of drawings
Fig. 1 is the cross-sectional structure synoptic diagram of conventional ion exchange optical waveguide.
Fig. 2 is a Cu ion exchange optical waveguide cross-sectional structure synoptic diagram involved in the present invention.
Fig. 3 is the cross-sectional structure synoptic diagram after the Cu ion exchange optical waveguide involved in the present invention ion-exchange for the first time.
Fig. 4 is the cross-sectional structure synoptic diagram (bar shaped high polarization ion diffusion region is more shallow than tabular Cu ion diffusion region) after the Cu ion exchange optical waveguide involved in the present invention ion-exchange for the second time.
Fig. 5 is the cross-sectional structure synoptic diagram (bar shaped high polarization ion diffusion region is darker than tabular Cu ion diffusion region) after the Cu ion exchange optical waveguide involved in the present invention ion-exchange for the second time.
Among the figure: 1, glass substrate, 2, mask, 3, bar shaped Cu ion diffusion region, 4, tabular Cu ion diffusion region, 5, bar shaped high polarization ion diffusion region.
Embodiment
As Fig. 2, shown in Figure 4, the present invention is provided with tabular Cu ion diffusion region 4 at glass substrate 1 upper surface, in tabular Cu ion diffusion region 4, be provided with bar shaped high polarization ion diffusion region 5, sandwich layer as optical waveguide, the refractive index of bar shaped high polarization ion diffusion region 5 is higher than the refractive index of glass substrate 1, also is higher than the refractive index of tabular Cu ion diffusion region 4.
Described glass substrate 1 its material is silicate glass, borate glass or phosphate glass.
Described high polarization ion is Ag
+, Tl
+, Cs
+, Li
+Or Rb
+Ion.
Described optical waveguide is monomode optical waveguide or multimode lightguide.
The thickness of described bar shaped high polarization ion diffusion region 5 is less than the thickness of tabular Cu ion diffusion region 4, or greater than the thickness of tabular Cu ion diffusion region 4.
Making the technical scheme that this Cu ion exchange optical waveguide adopted is: at first form tabular Cu ion diffusion region 4 by the fused salt ion-exchange process on glass substrate 1, current ion-exchange process carries out under the condition of no mask; Again by the ion-exchange process second time, employing contains the fused salt of high polarization ion as ion gun, make bar shaped high polarization ion diffusion region 5 in tabular Cu ion diffusion region 4, in order to obtain the optical waveguide of bar shaped, current ion-exchange is carried out under mask 2 auxiliary.The refractive index of the bar shaped high polarization ion diffusion region 5 of ion exchange process formation for the second time is higher than the refractive index of glass substrate 1 and tabular Cu ion diffusion region 4, becomes the core of strip optical waveguide.
Cu ion exchange optical waveguide involved in the present invention is implemented in the following way:
(1) preparation of glass substrate upper flat plate shape Cu ion diffusion region:
Adopt silicate glass, borate glass or phosphate glass material as glass substrate, adopt the fused salt ion-exchange process on glass substrate, to make tabular Cu ion diffusion region.As shown in Figure 3.
The fused salt that is adopted is the fused salt of copper ions, as copper sulphate, cupric chloride or copper nitrate, with the potpourri ion-exchange temperature of other fused salt be 500-600 ℃, swap time be 5 minutes to a few hours.
(2) adopt fine process to make mask on the surface of glass:
Adopt evaporation or sputtering technology to make mask on tabular Cu ion diffusion region, mask material is an aluminium, chromium-Jin or titanium.The lithography corrosion process of employing standard prepares the figure of required strip optical waveguide on mask.
(3) adopt ion-exchange process to make bar shaped high polarization ion diffusion region:
Adopt the fused salt ion-exchange process on glass substrate surface tabular Cu ion diffusion region, to prepare bar shaped high polarization ion diffusion region.
Employing contains high polarization ion (Ag
+, Tl
+, Cs
+, Li
+Or Rb
+) the fused salt mixt of inorganic salts (nitrate, sulfate or carbonate) as ion gun, ion-exchange temperature is 200-450 ℃, swap time be several minutes to a few hours, decide according to concrete requirement.The thickness of bar shaped high polarization ion diffusion region can be less than the thickness of tabular Cu ion diffusion region, as shown in Figure 4; Also can be greater than the thickness of tabular Cu ion diffusion region, as shown in Figure 5.
(4) adopt etching process that the mask of glass surface is removed.
Claims (5)
1. optical waveguide that contains the Cu ion, it is characterized in that: be provided with tabular Cu ion diffusion region (4) at glass substrate (1) upper surface, in tabular Cu ion diffusion region (4), be provided with bar shaped high polarization ion diffusion region (5), sandwich layer as optical waveguide, the refractive index of bar shaped high polarization ion diffusion region (5) is higher than the refractive index of glass substrate (1), also is higher than the refractive index of tabular Cu ion diffusion region (4).
2. a kind of optical waveguide that contains the Cu ion according to claim 1 is characterized in that: its material of described glass substrate (1) is silicate glass, borate glass or phosphate glass.
3. a kind of optical waveguide that contains the Cu ion according to claim 1 is characterized in that: described high polarization ion is Ag
+, Tl
+, Cs
+, Li
+Or Rb
+Ion.
4. a kind of optical waveguide that contains the Cu ion according to claim 1 is characterized in that: described optical waveguide is monomode optical waveguide or multimode lightguide.
5. a kind of optical waveguide that contains the Cu ion according to claim 1, it is characterized in that: the thickness of described bar shaped high polarization ion diffusion region (5) is less than the thickness of tabular Cu ion diffusion region (4), or greater than the thickness of tabular Cu ion diffusion region (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008100598749A CN100570419C (en) | 2008-02-26 | 2008-02-26 | A kind of optical waveguide that contains the Cu ion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2008100598749A CN100570419C (en) | 2008-02-26 | 2008-02-26 | A kind of optical waveguide that contains the Cu ion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101251621A true CN101251621A (en) | 2008-08-27 |
| CN100570419C CN100570419C (en) | 2009-12-16 |
Family
ID=39955104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2008100598749A Expired - Fee Related CN100570419C (en) | 2008-02-26 | 2008-02-26 | A kind of optical waveguide that contains the Cu ion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100570419C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656188A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide containing ferromagnetic metal nanoparticles |
| CN104656187A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide chip integrated with magneto-optical function |
| CN105700075A (en) * | 2016-04-15 | 2016-06-22 | 上海光芯集成光学股份有限公司 | PLC multi-mode optical waveguide suitable for multi-fiber system and manufacturing method |
| CN113185145A (en) * | 2021-04-28 | 2021-07-30 | 中国建筑材料科学研究总院有限公司 | Laser neodymium glass for inhibiting amplified spontaneous radiation and parasitic oscillation and preparation method and application thereof |
| CN114014558A (en) * | 2021-12-15 | 2022-02-08 | 天津光电通信技术有限公司 | BK7 glass composite waveguide |
-
2008
- 2008-02-26 CN CNB2008100598749A patent/CN100570419C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104656188A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide containing ferromagnetic metal nanoparticles |
| CN104656187A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide chip integrated with magneto-optical function |
| CN104656188B (en) * | 2015-02-06 | 2018-02-16 | 浙江大学 | A kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle |
| CN105700075A (en) * | 2016-04-15 | 2016-06-22 | 上海光芯集成光学股份有限公司 | PLC multi-mode optical waveguide suitable for multi-fiber system and manufacturing method |
| CN105700075B (en) * | 2016-04-15 | 2019-09-27 | 苏州光幔集成光学有限公司 | PLC multimode lightguide and production method suitable for multi fiber system |
| CN113185145A (en) * | 2021-04-28 | 2021-07-30 | 中国建筑材料科学研究总院有限公司 | Laser neodymium glass for inhibiting amplified spontaneous radiation and parasitic oscillation and preparation method and application thereof |
| CN113185145B (en) * | 2021-04-28 | 2022-05-17 | 中国建筑材料科学研究总院有限公司 | Laser neodymium glass for inhibiting amplified spontaneous radiation and parasitic oscillation and preparation method and application thereof |
| CN114014558A (en) * | 2021-12-15 | 2022-02-08 | 天津光电通信技术有限公司 | BK7 glass composite waveguide |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100570419C (en) | 2009-12-16 |
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