CN105700075A - PLC multi-mode optical waveguide suitable for multi-fiber system and manufacturing method - Google Patents
PLC multi-mode optical waveguide suitable for multi-fiber system and manufacturing method Download PDFInfo
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- CN105700075A CN105700075A CN201610235653.7A CN201610235653A CN105700075A CN 105700075 A CN105700075 A CN 105700075A CN 201610235653 A CN201610235653 A CN 201610235653A CN 105700075 A CN105700075 A CN 105700075A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
Abstract
The invention relates to a PLC multi-mode optical waveguide suitable for a multi-fiber system and a manufacturing method. The PLC multi-mode optical waveguide comprises a glass substrate and an ion exchange type multi-mode optical waveguide in the glass substrate, wherein the ion exchange type multi-mode optical waveguide is an all-direction gradual-change refractive index type optical waveguide, and the equivalent refractive index of the optical waveguide is within the equivalent refractive indexes of two multi-mode fibers including an input fiber and an output fiber. The difference of the equivalent refractive indexes of the input fiber and the output fiber is no greater than 0.1, and the diameter ratio of the input fiber to the output fiber is no greater than 1:2. The manufacturing method includes the steps of film plating, photoetching, corroding, glue removing, first exchanging, second exchanging, heat difference diffusing, scribing, grinding and polishing. Compared with the prior art, the PLC multi-mode optical waveguide realizes interconnection of multi-mode fibers with minor difference in fiber diameter and refractive index. The optical loss is low, and the PLC multi-mode optical waveguide also has the advantages of small size and stable performance as a PLC type optical waveguide does.
Description
Technical field
The present invention relates to the integrated optics chip of optical communication field, particularly relate to the PLC multimode lightguide suitable in many fibre systems and manufacture method。
Background technology
Along with the fast development of fiber optic communication, optical fiber telecommunications system is applied to different types of multimode fibre more and more, applies multimode optical fiber systems all to some extent in large-scale machine room, transformer station, artificial intelligence, biologic medical field。These systems needs according to application, it is therefore possible to use different types of multimode fibre。On the other hand, along with the arriving of cloud service and big data age, above-mentioned various application realize the interconnection of network, share and remotely control to become more and more important。Therefore, the compatibility of different types of multimode optical fiber systems and interconnection are the problems that next generation network needs solution badly。
At present by the interconnection scheme of different fibre systems be usually photoelectricity and electro-optic conversion, be changed into the general signal of telecommunication by the signal of fibre system 1 by opto-electronic conversion, again through electro-optic conversion, the signal of telecommunication be converted in another light system 2。This scheme is limited to the transmission bottleneck of the signal of telecommunication and the speed of response of opto-electronic conversion in transfer rate and bandwidth。And the another kind of scheme attempted is the direct interconnection that the transitional type fiber waveguide by waveguide diameter gradual change realizes two kinds of multimode fibres, the making of fiber waveguide is required height by this scheme, and process allowance is little, and the loss of transitional type fiber waveguide is bigger。
Summary of the invention
Defect that the purpose of the present invention is contemplated to overcome above-mentioned prior art to exist and provide a kind of can the interconnection of the simple realization core diameter multimode fibre little with refractive index difference, and consequent light loss is little, have that PLC type fiber waveguide size is little concurrently, the PLC multimode lightguide being applicable to many fibre systems of stable performance and a method for making thereof simultaneously。
The purpose of the present invention can be achieved through the following technical solutions: a kind of PLC multimode lightguide suitable in many fibre systems, this PLC multimode lightguide includes glass substrate and is positioned at the ion-exchange type multimode lightguide within glass substrate, it is characterized in that, this ion-exchange type multimode lightguide is each to graded index type fiber waveguide, and the equivalent refractive index of fiber waveguide is between two kinds of multimode fibre equivalent refractive indexs of coupling；Two kinds of multimode fibres be the equivalent refraction rate variance of input optical fibre and output optical fibre, input optical fibre and output optical fibre less than 0.1, input optical fibre and output optical fibre diameter proportion are less than 1:2。
The distance from top of described ion-exchange type multimode lightguide 0～50um below glass substrate upper surface。
The waveguide edge that distance is ion-exchange type multimode lightguide of described ion-exchange type multimode lightguide and glass substrate upper surface and the distance of glass substrate upper surface, on the upside of the waveguide of ion-exchange type multimode lightguide completely from glass substrate upper surface separates time, described ion exchange buried light waveguide and the distance of glass substrate upper surface are 0 μm。
Described ion-exchange type multimode lightguide is divided into two regions in glass substrate on vertical cross-section: center light place and edge-light place；Wherein, the multimode fibre that the equivalent refractive index of center light place is close but higher slightly below refractive index in two kinds of multimode fibres, both differences are less than 0.01。
The similar diameters of the multimode fibre that core diameter is less in the diameter of described center light place and two kinds of multimode fibres, both differences are less than 5 μm；
The similar diameters of the multimode fibre that maximum straight and two kinds of multimode fibre central diameter core diameters of edge-light place are bigger, both differences are less than 10 μm；
The refractivity at center to the edge of described center light place is 0.005～0.05, the radial refraction rate variance variable gradient of outer, center light place to outer, edge-light place is that every (Φ 2-Φ 1)/5 reduce 0.0002～0.01, wherein Φ 2 is the diameter of the multimode fibre being relatively large in diameter, and Φ 1 is the diameter of the multimode fibre that diameter is less。
Described ion exchange buried light waveguide is graded refractive index waveguide, is divided into three regions: input waveguide district, functional structure district and output waveguide district in glass substrate in horizontal direction, and described functional structure district connects input waveguide district and output waveguide district。
Described input waveguide district is made up of the straight wave guide array of single straight wave guide or 2～256 ports；The structure in described functional structure district is the topological structure meeting Passive Optical Components；Described output waveguide district is the straight wave guide array of single straight wave guide or 2～256 ports。
The structure in described functional structure district is shunt structure or coupled structure。
The preparation method of a kind of PLC multimode lightguide suitable in many fibre systems, it is characterised in that the method comprises the following steps:
1) plated film: plate the uniform mask of last layer at glass wafer upper surface；
2) photoetching: need the function selecting photolithography plate realized according to PLC multimode lightguide, then the mask etching on glass wafer is gone out the figure of photolithography plate；
3) ion exchange: exchanged in glass wafer surface fiber waveguide formed below by two secondary ions；Once being exchanged for thermal ion exchange, first form thermal ion exchange fiber waveguide at glass wafer upper surface, now fiber waveguide is not still mated with fiber size, and logical light loss is big；Secondary is exchanged for field assisted ion-exchange, by the effect of electric field Yu fused salt, fiber waveguide is buried to glass surface, distance glass wafer upper surface 0～50 μm, now the shape of fiber waveguide deforms upon under electric field action, fiber waveguide now and fiber cross-sections size approximate match, can carrying out butt coupling with optical fiber preferably, light loss is little。
4) heat differential diffusion: owing to the high-index regions of above-mentioned ion exchange optical waveguide is positioned at the lower middle portion of fiber waveguide, and the index distribution approximated step at its lower interface of fiber waveguide after secondary exchange in ion exchange, the problem such as there will be during from different multimode fibre coupling that Coupling point is misaligned or coupling loss is big。It is thus desirable to fiber waveguide improved further, form full gradation type fiber waveguide。Heat differential diffusion technique achieves this transformation。Glass wafer after ion exchange is placed in heat differential disperser by heat differential diffusion technique, described heat differential disperser includes warm area 1 and warm area 2, and the sealing thermal insulation layer between two warm areas, the temperature of warm area 1 and warm area 2 is all at 150～600 DEG C, ensure the diffusion rate of fiber waveguide intermediate ion, temperature is more high, and diffusion rate is more fast。The temperature of warm area 1, less than the temperature of warm area 2, is to ensure that the ion of warm area 2 spreads faster than warm area 1, and the temperature difference is less than 40 DEG C, it is prevented that wafer stress is excessive and breaks；Upper and lower warm area is isolated by glass wafer by sealing thermal insulation layer, glass wafer keeps 1～24 hour in heat differential disperser, after completing, slow cooling takes out, high-temperature region 2 temperature first drops during cooling, when the temperature of warm area 1 with warm area 2 keeps 1 to cause, synchronizing cooling, rate of temperature fall controls at 10～50 DEG C/min。
5) subsequent technique: namely step (4) products obtained therefrom obtains the PLC multimode lightguide suitable in many fibre systems after scribing and end face grinding and polishing。
Mask described in step (1) is plated by the mode of molecular beam epitaxy or magnetron sputtering, and the thickness of mask is 50～1000nm；
Photoetching described in step (2): form a layer photoetching glued membrane by being spin-coated on mask, then heated baking mode is adopted to solidify photoresist film, then adopting exposed and developed technology by the pattern transfer on photolithography plate to photoresist film, finally heated baking completes the resolidification of photoresist film again；Then the glass wafer with photoresist film is positioned in the corrosive liquid of heating, by corrosive liquid to the selective corrosion of mask by the pattern transfer of photoresist film to mask；Finally photoresist film is removed from glass wafer；
Once being exchanged for thermal ion exchange in two secondary ion exchanges described in step (3), secondary is exchanged for field assisted ion-exchange；Concretely comprising the following steps: first form thermal ion exchange fiber waveguide at glass wafer upper surface, fiber waveguide is buried to glass wafer surface by the effect then passing through electric field and fused salt, distance glass wafer upper surface 0～50 μm。
Wherein once exchange, particularly as follows: be positioned in the fused salt once exchanged by the glass wafer of the mask with pattern, forms ion-exchange surface fiber waveguide on glass wafer surface without mask regions by the free thermal diffusion of source ion；
Secondary exchange is concrete: remove the mask on glass wafer surface, being positioned over by glass wafer with ion-exchange surface fiber waveguide in the fused salt of secondary exchange, the surface light waveguide of glass wafer is buried to glass wafer upper surface 0～50um place by the mode spread by electric field-assisted；
Warm area 1 and the implant of warm area 2 described in step (4) are air or fused salt。Selecting one layer of fused salt, fiber waveguide diffusion rate can be accelerated, and makes the fiber waveguide gradually changeable obtained higher。
Sealing thermal insulation layer described in step (4) ensures that two warm areas are heat insulation well, and resistant against high temperatures and fused salt corrosion, adopts flexible material or closely sealed with colloid and glass wafer, it is prevented that wafer expansion extruding is broken simultaneously。
Scribing in subsequent technique described in step (5) is particularly as follows: glass wafer heat differential spread is divided into the chip unit of consistent size according to the cut mark on fiber waveguide pattern；
Described end face grinding and polishing is particularly as follows: the grinding and polishing that chip unit carries out cutting end face forms the PLC multimode lightguide being applicable to many fibre systems。
The present invention adopts ion exchange technique to achieve the PLC multimode lightguide being applicable to many fibre systems of graded refractive index。It utilizes ion-exchange type fiber waveguide radially to be realized " self adaptation " of dissimilar optical fiber to the variations in refractive index that surrounding spreads by center, when optical signal is transmitted from input optical fibre by this light wave guiding output optical fibre, at coupled interface, owing to input optical fibre and fiber waveguide have more close index distribution, coupling loss significantly will not be produced when being optically coupled into fiber waveguide, by the transmitting procedure of fiber waveguide, the optical field distribution of optical signal tends to main energy between two kinds of optical fiber and concentrates on fiber waveguide center, a small amount of energy is from waveguide core outer peripheral areas slow-decay, therefore, when optical signal from optical waveguide coupled to output optical fibre time, also have fiber waveguide couple phase with input optical fibre like effect。
Compared with prior art, the invention have the advantages that can the interconnection of the little multimode fibre of simple realization core diameter and refractive index difference, and consequent light loss is little, has that PLC type fiber waveguide size is little, steady performance concurrently simultaneously。
Accompanying drawing explanation
Fig. 1 be the embodiment of the present invention 1 be applicable to the PLC multimode lightguide of many fibre systems and two kinds of multimode fibre attachment structure schematic diagrams；
Fig. 2 is the vertical sectional view of the PLC multimode lightguide being applicable to many fibre systems；
Fig. 3 is the vertical cross-section top view of the PLC multimode lightguide being applicable to many fibre systems；
Fig. 4 is the process chart of the manufacture method of the present invention；
Fig. 5 is the structural representation of heat differential disperser；
Fig. 6 is changes of section figure: a before and after the diffusion of PLC multimode lightguide heat differential is before the diffusion of PLC multimode lightguide heat differential, and b is after the diffusion of PLC multimode lightguide heat differential；
Fig. 7 be the embodiment of the present invention 1 be applicable to the PLC multimode lightguide of many fibre systems and two kinds of multimode fibre attachment structure schematic diagrams。
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail。
Embodiment 1
As shown in Figure 1, with core diameter 40um, fiber core refractive index be 1.47 quartzy multimode fibre 1 connect core diameter 80um by the PLC multimode straight wave guide 3 based on glass base ion-exchange type multimode lightguide that length is 1cm, fiber core refractive index is the top view of the quartzy multimode fibre 2 of 1.46 is that example illustrates。
PLC multimode straight wave guide 3 two ends are connected with the fiber array FA5 containing multimode fibre 1 and multimode fibre 2 respectively through optical coupled ultra-violet curing glue 4。
Above-mentioned PLC multimode straight wave guide is made up of the PLC multimode lightguide suitable in many fibre systems。As shown in figures 2-3, PLC multimode lightguide is glass base ion-exchange type multimode lightguide (PLC multimode lightguide cross section profile A is as shown in Figure 3), fiber waveguide distance from top distance H below glass substrate 31 upper surface is 50um, fiber waveguide is each to graded index type fiber waveguide, and fiber waveguide equivalent refractive index is about 1.464；。Fiber waveguide can be approximated to be Liang Ge district, center light place 32 and edge-light place 33, and the equivalent refractive index of center light place 32 is about 1.467；The diameter of phi 1 of center light place is about 45 μm；The largest diameter 2 of edge-light place is about 70um；The refractivity at center, center light place to edge is about 0.005, and the radial refraction rate variance variable gradient of outer, center light place to outer, edge-light place is approximately every 8um and reduces 0.0002。The additional optical loss that multimode fibre 1 connects multimode fibre 2 generation by the PLC multimode straight wave guide based on glass base ion-exchange type multimode lightguide that length is 2cm is about 0.3dB。
The fabrication processing of this PLC multimode straight wave guide as shown in Figure 4, specifically includes following steps: 1) plated film: plate, after glass wafer upper surface cleans, the aluminum mask that a layer thickness is 80nm；2) photoetching: the wafer that plated film is completed, first pass through and be spin-coated on aluminum mask and form a layer photoetching glued membrane, thickness 50nm, then 90 DEG C of baking oven is adopted to be heating and curing photoresist film 1 hour, then exposed and developed technology is adopted on the straight wave guide pattern transfer on photolithography plate to photoresist film, light intensity 3mW/cm will to be exposed2, time of exposure 15 seconds, finally adopt the baking of 100 DEG C of baking oven within 30 minutes, to complete the resolidification of photoresist film；3) corrosion: be positioned in the phosphoric acid corrosion liquid of 40 DEG C of water-baths by the glass wafer with photoresist film, by corrosive liquid to the selective corrosion of mask by the pattern transfer of photoresist film to mask。4) remove photoresist: adopt acetone solution photoresist, make photoresist film remove from glass wafer；5) once exchange: adopt silver sodium ion exchange to be positioned in the fused salt once exchanged by the glass wafer of the mask with pattern, silver sodium ion exchange surface light waveguide is formed on glass wafer surface without mask regions by the free thermal diffusion of silver ion, exchange fused salt is 100% silver nitrate, exchange temperature 320 DEG C, swap time is 2 hours；6) secondary exchange: adopt phosphoric acid corrosion liquid to remove the mask on glass wafer surface, glass wafer with ion-exchange surface fiber waveguide is positioned in the fused salt of secondary exchange, the surface light waveguide of glass wafer is buried 50um to glass wafer upper surface by the mode spread by electric-field-assisted ion, exchange fused salt is sodium nitrate and calcium nitrate mass ratio 1:1, exchange temperature 300 DEG C, voltage is 500V, and the time is 4 hours；7) heat differential diffusion: the glass wafer exchanged by secondary is positioned in heat differential disperser (as shown in Figure 5), glass wafer 6 seals thermal insulation layer 7 by polyether-ether-ketone isolates upper and lower warm area, warm area 1B is air 8, and warm area 2C injects sodium nitrate fused salt 9。Warm area 1B temperature is 280 DEG C, and warm area 2C temperature is 320 DEG C。Glass wafer 6 keeps 1 hour in heat differential disperser, and after completing, slow cooling takes out, and first reduces warm area 2 temperature during cooling, when warm area 1B and warm area 2C keeps 1 to cause, synchronizes cooling, and rate of temperature fall should control at 50 DEG C/min。Changes of section figure before and after the diffusion of PLC multimode lightguide heat differential is as shown in Figure 6, before can be seen that heat differential diffusion, the high-index regions of ion exchange optical waveguide is positioned at the lower middle portion (Fig. 6 a) of fiber waveguide, and the index distribution approximated step at its lower interface of fiber waveguide after secondary exchange in ion exchange, the problem such as there will be during from different multimode fibre coupling that Coupling point is misaligned or coupling loss is big。Full gradation type fiber waveguide (Fig. 6 b) is formed after heat differential diffusion；8) scribing: glass wafer heat differential spread exchanges the cut mark on buried light waveguide pattern according to ion and is divided into the chip unit of consistent size, and chip size is 10 × 2.2 × 2.5mm3；9) grinding and polishing: the grinding and polishing that chip unit carries out cutting end face forms the PLC multimode straight wave guide chip exchanging buried light waveguide based on glass base ion。10) adopt optical coupled ultra-violet curing glue by two kinds of fiber package with FA head in alignment with the both sides of PLC multimode straight wave guide chip。
Embodiment 2:
As shown in Figure 7, with core diameter 62.5um, fiber core refractive index be 1.47 quartzy multimode fibre 1 by length be 1.6cm based on glass base ion-exchange type multimode lightguide PLC multimode 1 × 4 optical branching device 3 ' connect 4 core diameter 50um, fiber core refractive index is the top view of the plastics multimode fibre 2 of 1.57 is that example illustrates。
PLC multimode 1 × 4 optical branching device 3 ' two ends of mould fiber waveguide are connected with the fiber array FA5 containing multimode fibre 1 and multimode fibre 2 ' respectively through optical coupled ultra-violet curing glue。
This PLC multimode straight wave guide is made up of the PLC multimode lightguide suitable in many fibre systems。PLC multimode lightguide is glass base ion-exchange type multimode lightguide, and fiber waveguide distance from top is 0um below glass substrate upper surface, and fiber waveguide is each to graded index type fiber waveguide, and fiber waveguide equivalent refractive index is about 1.525。Fiber waveguide can be approximated to be Liang Ge district, center light place and edge-light place, and the equivalent refractive index of center light place is about 1.56；The diameter of phi 1 of center light place is about 48 μm；The largest diameter 2 of edge-light place is about 65um；The refractivity at center, center light place to edge is about 0.05, and the radial refraction rate variance variable gradient of outer, center light place to outer, edge-light place is approximately every 2.5um and reduces 0.01。Multimode fibre 1 connects 4 root multimode fibers 2 by PLC multimode 1 × 4 optical branching device based on glass base ion-exchange type multimode lightguide that length is 1.6cm。Relative to multimode fibre 1, the insertion loss of every root multimode fiber 2 is at 6.4～6.8dB, and the uniformity of Output optical power is 0.4dB。
The fabrication processing of this PLC multimode 1 × 4 optical branching device as shown in Figure 4, specifically includes following steps: 1) plated film: plate, at glass wafer upper surface, the aluminum mask that a layer thickness is 200nm；2) photoetching: the wafer that plated film is completed, first pass through and be spin-coated on aluminum mask and form a layer photoetching glued membrane, thickness 100nm, then 100 DEG C of baking oven is adopted to be heating and curing photoresist film 1 hour, then exposed and developed technology is adopted on the straight wave guide pattern transfer on photolithography plate to photoresist film, light intensity 0.9mW/cm will to be exposed2, time of exposure 120 seconds, finally adopt the baking of 110 DEG C of baking oven within 50 minutes, to complete the resolidification of photoresist film；3) corrosion: be positioned in the phosphoric acid corrosion liquid of 60 DEG C of water-baths by the glass wafer with photoresist film, by corrosive liquid to the selective corrosion of mask by the pattern transfer of photoresist film to mask。4) remove photoresist: adopt acetone solution photoresist, make photoresist film remove from glass wafer；5) once exchange: adopt silver sodium ion exchange to be positioned in the fused salt once exchanged by the glass wafer of the mask with pattern, silver sodium ion exchange surface light waveguide is formed on glass wafer surface without mask regions by the free thermal diffusion of silver ion, exchange fused salt is 100% silver nitrate, exchange temperature 350 DEG C, swap time is 4 hours；6) secondary exchange: adopt phosphoric acid corrosion liquid to remove the mask on glass wafer surface, glass wafer with ion-exchange surface fiber waveguide is positioned in the fused salt of secondary exchange, the surface light waveguide of glass wafer is buried 0um to glass wafer upper surface by the mode spread by electric-field-assisted ion, exchange fused salt is sodium nitrate and calcium nitrate mass ratio 1:1, exchange temperature 280 DEG C, voltage is 180V, and the time is 2 hours；7) heat differential diffusion: the glass wafer exchanged by secondary is positioned in heat differential disperser, and upper and lower warm area is isolated by wafer by teflon seal thermal insulation layer, and warm area 1 is air, and warm area 2 is also air。Warm area 1 temperature is 240 DEG C, and warm area 2 temperature is 260 DEG C。Glass wafer keeps 3 hours in heat differential disperser, and after completing, slow cooling takes out, and first reduces warm area 2 temperature during cooling, when warm area 1 and 2 keeps 1 to cause, synchronizes cooling, and rate of temperature fall should control at 10 DEG C/min。8) scribing: glass wafer heat differential spread exchanges the cut mark on buried light waveguide pattern according to ion and is divided into the chip unit of consistent size, and chip size is 16 × 2.5 × 2.5mm3；9) grinding and polishing: the grinding and polishing that chip unit carries out cutting end face forms PLC multimode 1 × 4 optical branching-device chip exchanging buried light waveguide based on glass base ion。10) adopt optical coupled ultra-violet curing glue by two kinds of fiber package with FA head in alignment with the both sides of PLC multimode 1 × 4 optical branching-device chip。
Claims (10)
1. the PLC multimode lightguide being applicable to many fibre systems, this PLC multimode lightguide includes glass substrate and is positioned at the ion-exchange type multimode lightguide within glass substrate, it is characterized in that, this ion-exchange type multimode lightguide is each to graded index type fiber waveguide, and the equivalent refractive index of fiber waveguide is between two kinds of multimode fibre equivalent refractive indexs of coupling；Two kinds of multimode fibres be the equivalent refraction rate variance of input optical fibre and output optical fibre, input optical fibre and output optical fibre less than 0.1, input optical fibre and output optical fibre diameter proportion are less than 1:2。
2. a kind of PLC multimode lightguide suitable in many fibre systems according to claim 1, it is characterised in that the distance from top of described ion-exchange type multimode lightguide 0～50um below glass substrate upper surface。
3. a kind of PLC multimode lightguide suitable in many fibre systems according to claim 1, it is characterised in that described ion-exchange type multimode lightguide is divided into two regions in glass substrate on vertical cross-section: center light place and edge-light place；Wherein, the multimode fibre that the equivalent refractive index of center light place is close but higher slightly below refractive index in two kinds of multimode fibres, both differences are less than 0.01。
4. a kind of PLC multimode lightguide suitable in many fibre systems according to claim 3, it is characterised in that the similar diameters of the multimode fibre that core diameter is less in the diameter of described center light place and two kinds of multimode fibres, both differences are less than 5 μm；
The similar diameters of the multimode fibre that maximum straight and two kinds of multimode fibre central diameter core diameters of edge-light place are bigger, both differences are less than 10 μm。
5. a kind of PLC multimode lightguide suitable in many fibre systems according to claim 3, it is characterized in that, the refractivity at center to the edge of described center light place is 0.005～0.05, the radial refraction rate variance variable gradient of outer, center light place to outer, edge-light place is that every (Φ 2-Φ 1)/5 reduce 0.0002～0.01, wherein Φ 2 is the diameter of the multimode fibre being relatively large in diameter, and Φ 1 is the diameter of the multimode fibre that diameter is less。
6. the preparation method of the PLC multimode lightguide being applicable to many fibre systems as claimed in claim 1, it is characterised in that the method comprises the following steps:
1) plated film: plate the uniform mask of last layer at glass wafer upper surface；
2) photoetching: need the function selecting photolithography plate realized according to PLC multimode lightguide, then the mask etching on glass wafer is gone out the figure of photolithography plate；
3) ion exchange: exchanged in glass wafer surface fiber waveguide formed below by two secondary ions；
4) heat differential diffusion: the glass wafer after being exchanged by ion is placed in heat differential disperser, described heat differential disperser includes warm area 1 and warm area 2, and the sealing thermal insulation layer between two warm areas, the temperature of warm area 1 and warm area 2 is all at 150～600 DEG C, the temperature of warm area 1 is less than the temperature of warm area 2, and the temperature difference is less than 40 DEG C；Glass wafer keeps 1～24 hour in heat differential disperser, and after completing, slow cooling takes out, and first drops high-temperature region 2 temperature during cooling, when the temperature of warm area 1 with warm area 2 keeps 1 to cause, synchronizes cooling, and rate of temperature fall controls at 10～50 DEG C/min。
5) subsequent technique: namely step (4) products obtained therefrom obtains the PLC multimode lightguide suitable in many fibre systems after scribing and end face grinding and polishing。
7. the preparation method of a kind of PLC multimode lightguide suitable in many fibre systems according to claim 6, it is characterised in that the mask described in step (1) is plated by the mode of molecular beam epitaxy or magnetron sputtering。
8. the preparation method of a kind of PLC multimode lightguide suitable in many fibre systems according to claim 6, it is characterized in that, once being exchanged for thermal ion exchange in two secondary ion exchanges described in step (3), secondary is exchanged for field assisted ion-exchange；Concretely comprising the following steps: first form thermal ion exchange fiber waveguide at glass wafer upper surface, fiber waveguide is buried to glass wafer surface by the effect then passing through electric field and fused salt, distance glass wafer upper surface 0～50 μm。
9. the preparation method of a kind of PLC multimode lightguide suitable in many fibre systems according to claim 6, it is characterised in that warm area 1 and the implant of warm area 2 described in step (4) are air or fused salt。
10. the preparation method of a kind of PLC multimode lightguide suitable in many fibre systems according to claim 9, it is characterized in that, sealing thermal insulation layer described in step (4) ensures that two warm areas are heat insulation well, and resistant against high temperatures and fused salt corrosion, adopt flexible material or closely sealed with colloid and glass wafer, it is prevented that wafer expands extruding and breaks simultaneously。
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| US10197732B2 (en) | 2016-08-26 | 2019-02-05 | Corning Optical Communications LLC | Methods for forming ion-exchanged waveguides in glass substrates |
| CN111699424A (en) * | 2018-01-18 | 2020-09-22 | 康宁公司 | Low loss waveguide formed in high transmission glass using Ag-Na ion exchange |
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| CN111699424A (en) * | 2018-01-18 | 2020-09-22 | 康宁公司 | Low loss waveguide formed in high transmission glass using Ag-Na ion exchange |
Also Published As
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| CN105700075B (en) | 2019-09-27 |
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