CN105700075B - PLC multimode lightguide and production method suitable for multi fiber system - Google Patents
PLC multimode lightguide and production method suitable for multi fiber system Download PDFInfo
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- CN105700075B CN105700075B CN201610235653.7A CN201610235653A CN105700075B CN 105700075 B CN105700075 B CN 105700075B CN 201610235653 A CN201610235653 A CN 201610235653A CN 105700075 B CN105700075 B CN 105700075B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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Abstract
The present invention relates to a kind of PLC multimode lightguides and production method suitable for multi fiber system, the PLC multimode lightguide includes glass substrate and the ion-exchange type multimode lightguide inside glass substrate, the ion-exchange type multimode lightguide be it is each to graded index type optical waveguide, the equivalent refractive index of optical waveguide is between two kinds of multimode fibre equivalent refractive indexs of coupling；Two kinds of multimode fibres are input optical fibre and output optical fibre, and the equivalent refractive index difference of input optical fibre and output optical fibre is no more than 0.1, and input optical fibre and output optical fibre diameter proportion are no more than 1:2.Preparation method the following steps are included: plated film, photoetching, burn into remove photoresist, once exchange, secondary exchange, heat differential diffusion, scribing, grinding and polishing.Compared with prior art, the present invention is capable of the interconnection of simple realization core diameter and the little multimode fibre of refractive index difference, and resulting light loss is small, while having both that PLC type optical waveguide size is small, steady performance.
Description
Technical field
The present invention relates to the integrated optics chips of optical communication field, more particularly to suitable for the PLC multimode of multi fiber system
Optical waveguide and production method.
Background technique
It is applied to different types of multimode light more and more with the fast development of fiber optic communication, in optical fiber telecommunications system
Fibre applies multimode optical fiber systems in large-scale computer room, substation, artificial intelligence, biologic medical field to some extent.These
System is according to the needs of application, it is therefore possible to use different types of multimode fibre.On the other hand, with cloud service and big data era
Arriving, above-mentioned various applications realize that the interconnection of network, shared and long-range control become more and more important.Therefore, inhomogeneity
The problem of compatibility of the multimode optical fiber systems of type and interconnection are next generation network urgent need to resolve.
At present by the interconnection schemes of different fibre systems be usually photoelectricity and electro-optic conversion, i.e., by the letter of fibre system 1
Number it is changed into general electric signal by photoelectric conversion, then electric signal is converted in another light system 2 by electro-optic conversion
It goes.This scheme is limited to the transmission bottleneck of electric signal and the speed of response of photoelectric conversion in transmission rate and bandwidth.And
The scheme that another kind is attempted is that the direct interconnection of two kinds of multimode fibres is realized by the transiens optical waveguide of waveguide diameter gradual change, this
Kind scheme requires height to the production of optical waveguide, and process allowance is small, and the transmission loss of transiens optical waveguide is larger.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide one kind being capable of simple realization
The interconnection of core diameter and the little multimode fibre of refractive index difference, and resulting light loss is small, while having both PLC type
The PLC multimode lightguide and its preparation method suitable for multi fiber system that optical waveguide size is small, performance is stable.
The purpose of the present invention can be achieved through the following technical solutions: a kind of PLC multimode suitable for multi fiber system
Optical waveguide, the PLC multimode lightguide include glass substrate and the ion-exchange type multimode lightguide inside glass substrate,
It is characterized in that, which is each to graded index type optical waveguide, and the equivalent refractive index of optical waveguide is situated between
Between two kinds of multimode fibre equivalent refractive indexs of coupling；Two kinds of multimode fibres are input optical fibre and output optical fibre, input optical fibre
It is no more than 0.1 with the equivalent refractive index difference of output optical fibre, input optical fibre and output optical fibre diameter proportion are no more than 1:2.
The distance from top of the ion-exchange type multimode lightguide 0~50um below glass substrate upper surface.
The ion-exchange type multimode lightguide is ion-exchange type multimode light wave at a distance from glass substrate upper surface
The waveguide edge led is at a distance from glass substrate upper surface, not completely from glass on the upside of the waveguide of ion-exchange type multimode lightguide
When glass upper surface of substrate separates, the ion exchange buried light waveguide is 0 μm at a distance from glass substrate upper surface.
The ion-exchange type multimode lightguide is divided into two regions: center light field in glass substrate on vertical cross-section
Area and edge-light place；Wherein, the equivalent refractive index of center light place is close but slightly below two kinds of multimode fibres in refractive index compared with
High multimode fibre, the two difference are no more than 0.01.
The diameter phase of the diameter of the center light place and the lesser multimode fibre of core diameter in two kinds of multimode fibres
Closely, the two difference is no more than 5 μm；
The maximum of edge-light place is directly close with the diameter of two kinds of biggish multimode fibres of multimode fibre central diameter core diameter,
The two difference is no more than 10 μm；
The refringence at center to the edge of the center light place is 0.005~0.05, and center light place outer is extremely
The radial refractive index difference variable gradient of edge-light place outer is that 0.0002~0.01 is reduced per (Φ 2- Φ 1)/5, and wherein Φ 2 is
The diameter for the multimode fibre being relatively large in diameter, Φ 1 are the diameter of the lesser multimode fibre of diameter.
The ion exchange buried light waveguide is graded refractive index waveguide, is divided into horizontal direction in glass substrate
Three regions: input waveguide area, functional structure area and output waveguide area, the described connection input waveguide area, functional structure area and defeated
Waveguide section out.
The straight wave guide array of the input waveguide Qu Youdan straight wave guide or 2~256 ports is constituted；The functional structure
The structure in area is the topological structure for meeting Passive Optical Components；The output waveguide Qu Weidan straight wave guide or 2~256 ports it is straight
Waveguide array.
The structure in the functional structure area is shunt structure or coupled structure.
A kind of preparation method of the PLC multimode lightguide suitable for multi fiber system, which is characterized in that this method include with
Lower step:
1) plated film: one layer of uniform exposure mask is plated in glass wafer upper surface；
2) photoetching: photolithography plate is selected according to the function that PLC multimode lightguide needs to realize, then by covering on glass wafer
Film etches the figure of photolithography plate；
3) ion exchange: by ion exchange twice in glass wafer surface optical waveguide formed below；Once it is exchanged for heat
Ion exchange first forms thermal ion exchange optical waveguide in glass wafer upper surface, and optical waveguide is still mismatched with fiber size at this time,
Light passing loss is big；It is secondary to be exchanged for field assisted ion-exchange, optical waveguide is buried to glass by the effect of electric field and fused salt
Surface is hereinafter, apart from 0~50 μm of glass wafer upper surface, and deformation occurs under electric field action for the shape of optical waveguide at this time, at this time
Optical waveguide and the approximate match of fiber cross-sections size, preferably can carry out butt coupling with optical fiber, light loss is small.
4) heat differential is spread: since the high-index regions of above-mentioned ion exchange optical waveguide are located at the middle-lower part of optical waveguide, and
And the index distribution approximated step at its lower interface of the optical waveguide in ion exchange after secondary exchange, from different multimode fibres
Timing will appear Coupling point and not be overlapped or the problems such as coupling loss is big.Therefore it needs further to improve optical waveguide, be formed entirely gradually
Modification optical waveguide.Heat differential diffusion technique realizes this transformation.Glass wafer after ion exchange is placed in by heat differential diffusion technique
In heat differential disperser, the heat differential disperser includes that the sealing between warm area 1 and warm area 2 and two warm areas is heat-insulated
The temperature of layer, warm area 1 and warm area 2 guarantees the diffusion rate of optical waveguide intermediate ion at 150~600 DEG C, and temperature is higher, diffusion
Rate is faster.The temperature of warm area 1 is less than the temperature of warm area 2, is to guarantee that the ion diffusion of warm area 2 is faster than warm area 1, and the temperature difference
No more than 40 DEG C, prevents wafer stress excessive and rupture；Upper and lower warm area is isolated by sealing thermal insulation layer for glass wafer, and glass is brilliant
Circle keeps 1~24 hour in heat differential disperser, after the completion slow cooling taking-up, and 2 temperature of high-temperature region first drops in when cooling, to temperature
When the temperature of area 1 and warm area 2 keeps 1 cause, synchronous cooling, rate of temperature fall is controlled in 10~50 DEG C/min.
5) subsequent technique: step (4) products obtained therefrom is suitable for the PLC of multi fiber system after scribing and end face grinding and polishing
Multimode lightguide.
Exposure mask described in step (1) is plated by way of molecular beam epitaxy or magnetron sputtering, exposure mask with a thickness of 50~
1000nm；
Photoetching described in step (2): forming a layer photoresist film by being spin-coated on exposure mask, then uses heated baking side
Formula solidifies photoresist film, then using exposure and imaging technology by the pattern transfer to photoresist film on photolithography plate, finally again
Secondary heated baking completes the resolidification of photoresist film；Then glass wafer with photoresist film is placed in the corrosive liquid of heating
In, it will be on the pattern transfer to exposure mask of photoresist film to the selective corrosion of exposure mask by corrosive liquid；Finally by photoresist film from
It is removed on glass wafer；
Once be exchanged for thermal ion exchange described in step (3) in ion exchange twice, it is secondary be exchanged for electric field-assisted from
Son exchange；Specific steps are as follows: first form thermal ion exchange optical waveguide in glass wafer upper surface, then pass through electric field and fused salt
Effect buries optical waveguide to glass wafer surface hereinafter, apart from 0~50 μm of glass wafer upper surface.
Wherein primary exchange specifically: the glass wafer of the exposure mask with pattern is placed in the fused salt once exchanged,
Ion-exchange surface optical waveguide is formed without mask regions on glass wafer surface by the free thermal diffusion of source ion；
Secondary exchange is specific: the exposure mask on removal glass wafer surface, and the glass with ion-exchange surface optical waveguide is brilliant
Circle is placed in the fused salt of secondary exchange, buries the surface optical waveguide of glass wafer to glass in such a way that electric field-assisted is spread
Below glass wafer upper surface at 0~50um；
The filler of warm area 1 described in step (4) and warm area 2 is air or fused salt.One layer of fused salt is selected, optical waveguide expands
Scattered rate can be accelerated, and prepared optical waveguide gradually changeable is stronger.
Sealing thermal insulation layer described in step (4) guarantees that two warm areas are heat-insulated good, and resistant against high temperatures and fused salt corrosion,
Flexible material or closely sealed with glass wafer with colloid is used simultaneously, prevents wafer expansion from squeezing rupture.
Scribing in subsequent technique described in step (5) specifically: the glass wafer for completing heat differential diffusion is according to optical waveguide
Cut mark on pattern is divided into the consistent chip unit of size；
The end face grinding and polishing specifically: the grinding and polishing that chip unit carries out cutting end face is formed and is suitable for multi fiber
The PLC multimode lightguide of system.
The present invention realizes the PLC multimode light suitable for multi fiber system of graded refractive index using ion exchange technique
Waveguide.It radially realizes different type optical fiber by the variations in refractive index that center is spread around using ion-exchange type optical waveguide
" adaptive ", when optical signal, which is oriented to output optical fibre by the light wave from input optical fibre, to be transmitted, in coupled interface, due to input
Optical fiber and optical waveguide have relatively similar index distribution, and significant ground coupling loss will not be generated when being optically coupled into optical waveguide,
By the transmission process of optical waveguide, the optical field distribution of optical signal tends between two kinds of optical fiber --- and main energy concentrates in optical waveguide
The heart, a small amount of energy is from waveguide core peripheral region slow-decay, therefore, when optical signal from it is optical waveguide coupled to output optical fibre when,
Similar effect when also being coupled with optical waveguide with input optical fibre.
It compared with prior art, the invention has the advantages that being capable of simple realization core diameter and refractive index difference
The interconnection of little multimode fibre, and resulting light loss is small, while having both that PLC type optical waveguide size is small, performance is steady
The advantages that determining.
Detailed description of the invention
Fig. 1 is that the PLC multimode lightguide suitable for multi fiber system of the embodiment of the present invention 1 is connect with two kinds of multimode fibres
Structural schematic diagram；
Fig. 2 is the vertical sectional view of the PLC multimode lightguide suitable for multi fiber system；
Fig. 3 is the vertical cross-section top view of the PLC multimode lightguide suitable for multi fiber system；
Fig. 4 is the process flow chart of production method of the invention；
Fig. 5 is the structural schematic diagram of heat differential disperser；
Fig. 6 is the changes of section figure of PLC multimode lightguide heat differential diffusion front and back: a is the diffusion of PLC multimode lightguide heat differential
Before, b is after PLC multimode lightguide heat differential is spread；
Fig. 7 is that the PLC multimode lightguide suitable for multi fiber system of the embodiment of the present invention 1 is connect with two kinds of multimode fibres
Structural schematic diagram.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As shown in Figure 1, the quartzy multimode fibre 1 that fiber core refractive index is 1.47 is 1cm by length with core diameter 40um
PLC multimode straight wave guide 3 based on glass base ion-exchange type multimode lightguide connect core diameter 80um, fiber core refractive index is
It is illustrated for the top view of 1.46 quartzy multimode fibre 2.
By optical coupled uv-curable glue 4 and contain multimode fibre 1 and multimode respectively in 3 both ends of PLC multimode straight wave guide
The connection of fiber array FA 5 of optical fiber 2.
Above-mentioned PLC multimode straight wave guide is made of the PLC multimode lightguide for being suitable for multi fiber system.As shown in figures 2-3,
PLC multimode lightguide is glass base ion-exchange type multimode lightguide (PLC multimode lightguide cross section profile A is as shown in Figure 3), light
Waveguide distance from top distance H below 31 upper surface of glass substrate is 50um, optical waveguide be it is each to graded index type optical waveguide,
Optical waveguide equivalent refractive index is about 1.464；.Optical waveguide can be approximated to be the area Liang Ge, center light place 32 and edge-light place 33,
The equivalent refractive index of center light place 32 is about 1.467；The diameter of phi 1 of center light place is about 45 μm；Edge-light place is most
Major diameter Φ 2 is about 70um；The refringence at center light place center to edge is about 0.005, center light place outer to side
The radial refractive index difference variable gradient of edge light field area outer is approximately that every 8um reduces 0.0002.Multimode fibre 1 is by length
The additional light loss that the PLC multimode straight wave guide connection multimode fibre 2 based on glass base ion-exchange type multimode lightguide of 2cm generates
Consumption is about 0.3dB.
The fabrication processing of the PLC multimode straight wave guide is as shown in figure 4, specifically includes the following steps: 1) plated film: in glass
The aluminum mask that a layer thickness is 80nm is plated after the cleaning of wafer upper surface；2) photoetching: the wafer completed for plated film passes through first
It is spin-coated in aluminum mask and forms a layer photoresist film, film thickness 50nm is then small using 90 DEG C of the baking oven photoresist films 1 that are heating and curing
When, light intensity 3mW/ is then exposed on the straight wave guide pattern transfer to photoresist film on photolithography plate using exposure and imaging technology
cm2, the time for exposure 15 seconds, the resolidification of photoresist film is finally completed within 30 minutes using 100 DEG C of baking oven bakings；3) corrode: by band
There is the glass wafer of photoresist film to be placed in the phosphoric acid corrosion liquid of 40 DEG C of water-baths, the selective corrosion by corrosive liquid to exposure mask
It will be on the pattern transfer to exposure mask of photoresist film.4) it removes photoresist: using acetone solution photoresist, making photoresist film from glass wafer
Removal；5) primary exchange: will be placed in the glass wafer of the exposure mask of pattern using silver-colored sodium ion exchange once exchange it is molten
In salt, silver-colored sodium ion exchange surface optical waveguide is formed without mask regions on glass wafer surface by the free thermal diffusion of silver ion,
Exchange fused salt is 100% silver nitrate, and 320 DEG C of exchange temperature, swap time is 2 hours；6) secondary exchange: phosphoric acid corrosion liquid is used
Glass wafer with ion-exchange surface optical waveguide is placed in the fused salt of secondary exchange by the exposure mask for removing glass wafer surface
In, the surface optical waveguide of glass wafer is buried to glass wafer upper surface in such a way that electric-field-assisted ion is spread
50um, exchange fused salt are sodium nitrate and calcium nitrate mass ratio 1:1, and 300 DEG C of exchange temperature, voltage 500V, the time is 4 hours；
7) heat differential is spread: the glass wafer that secondary exchange is completed being placed in heat differential disperser (as shown in Figure 5), glass wafer 6
It seals thermal insulation layer 7 by polyether-ether-ketone upper and lower warm area is isolated, warm area 1B is air 8, and warm area 2C injects sodium nitrate fused salt 9.Temperature
Area's 1B temperature is 280 DEG C, and warm area 2C temperature is 320 DEG C.Glass wafer 6 is kept for 1 hour in heat differential disperser, is delayed after the completion
Slow cooling is taken out, and when cooling first reduces by 2 temperature of warm area, when warm area 1B and warm area 2C keep 1 cause when, synchronous cooling, rate of temperature fall
It should control in 50 DEG C/min.The changes of section figure of PLC multimode lightguide heat differential diffusion front and back is as shown in Figure 6, it can be seen that heat differential
The high-index regions of ion exchange optical waveguide are located at the middle-lower part (Fig. 6 a) of optical waveguide before spreading, and secondary in ion exchange
The index distribution approximated step at its lower interface of optical waveguide after exchange, will appear Coupling point when matching from different multimode fibres
It is not overlapped or the problems such as coupling loss is big.Full gradation type optical waveguide (Fig. 6 b) is formed after heat differential diffusion；8) scribing: heat differential is spread
The glass wafer of completion is divided into the consistent chip unit of size according to the cut mark on ion exchange buried light waveguide pattern,
Chip size is 10 × 2.2 × 2.5mm3；9) grinding and polishing: the grinding and polishing formation that chip unit carries out cutting end face is based on
The PLC multimode straight wave guide chip of glass base ion exchange buried light waveguide.10) use optical coupled uv-curable glue by two kinds of bands
There are FA optical fiber encapsulation in alignment with the two sides of PLC multimode straight wave guide chip.
Embodiment 2:
As shown in fig. 7, with core diameter 62.5um, the quartzy multimode fibre 1 that fiber core refractive index is 1.47 is by length
1 × 4 optical splitter 3 ' of PLC multimode based on glass base ion-exchange type multimode lightguide of 1.6cm connects 4 core diameters
50um, fiber core refractive index are illustrated for the top view for 1.57 plastics multimode fibre 2.
1 × 4 optical splitter of PLC multimode, the 3 ' both ends of mould optical waveguide are respectively by optical coupled uv-curable glue and containing more
The fiber array FA 5 of mode fiber 1 and multimode fibre 2 ' connection.
The PLC multimode straight wave guide is made of the PLC multimode lightguide for being suitable for multi fiber system.PLC multimode lightguide is
Glass base ion-exchange type multimode lightguide, optical waveguide distance from top 0um below glass substrate upper surface, optical waveguide be it is each to
Graded index type optical waveguide, optical waveguide equivalent refractive index are about 1.525.Optical waveguide can be approximated to be the area Liang Ge, center light field
Area and edge-light place, the equivalent refractive index of center light place is about 1.56；The diameter of phi 1 of center light place is about 48 μm；Side
The largest diameter 2 in edge light field area is about 65um；The refringence at center light place center to edge is about 0.05, center light field
The radial refractive index difference variable gradient of area outer to edge-light place outer is approximately that every 2.5um reduces 0.01.Multimode fibre 1 is logical
It crosses 1 × 4 optical splitter of PLC multimode based on glass base ion-exchange type multimode lightguide that length is 1.6cm and connects 4 multimodes
Optical fiber 2.Relative to multimode fibre 1, the insertion loss of every root multimode fiber 2 is in 6.4~6.8dB, the uniformity of Output optical power
For 0.4dB.
The fabrication processing of 1 × 4 optical splitter of PLC multimode is as shown in figure 4, specifically includes the following steps: 1) plated film:
The aluminum mask that a layer thickness is 200nm is plated in glass wafer upper surface；2) photoetching: the wafer completed for plated film is logical first
It crosses to be spin-coated in aluminum mask and forms a layer photoresist film, film thickness 100nm then uses 100 DEG C of the baking oven photoresist films 1 that are heating and curing
Hour, light intensity is then exposed on the straight wave guide pattern transfer to photoresist film on photolithography plate using exposure and imaging technology
0.9mW/cm2, the time for exposure 120 seconds, the resolidification of photoresist film is finally completed within 50 minutes using 110 DEG C of baking oven bakings；3) rotten
Erosion: the glass wafer with photoresist film is placed in the phosphoric acid corrosion liquid of 60 DEG C of water-baths, the choosing by corrosive liquid to exposure mask
The corrosion of selecting property will be on the pattern transfer to exposure mask of photoresist film.4) it removes photoresist: using acetone solution photoresist, making photoresist film from glass
It is removed on glass wafer；5) primary exchange: the glass wafer of the exposure mask with pattern is placed in once using silver-colored sodium ion exchange
In the fused salt of exchange, silver-colored sodium ion exchange surface is formed without mask regions on glass wafer surface by the free thermal diffusion of silver ion
Optical waveguide, exchange fused salt are 100% silver nitrate, and 350 DEG C of exchange temperature, swap time is 4 hours；6) secondary exchange: phosphorus is used
Acid corrosion liquid removes the exposure mask on glass wafer surface, and the glass wafer with ion-exchange surface optical waveguide is placed in secondary friendship
In the fused salt changed, the surface optical waveguide of glass wafer is buried to table on glass wafer in such a way that electric-field-assisted ion is spread
0um below face, exchange fused salt are sodium nitrate and calcium nitrate mass ratio 1:1,280 DEG C of exchange temperature, voltage 180V, the time 2
Hour；7) heat differential is spread: the glass wafer that secondary exchange is completed being placed in heat differential disperser, wafer passes through polytetrafluoroethyl-ne
Alkene sealing thermal insulation layer is isolated by upper and lower warm area, and warm area 1 is air, and warm area 2 is also air.1 temperature of warm area is 240 DEG C, 2 temperature of warm area
Degree is 260 DEG C.Glass wafer keeps 3 hours in heat differential disperser, and slow cooling takes out after the completion, and when cooling first reduces temperature
2 temperature of area, when warm area 1 and 2 keeps 1 cause, synchronous cooling, rate of temperature fall should be controlled in 10 DEG C/min.8) scribing: heat differential is expanded
The glass wafer to clear is divided into the consistent chip list of size according to the cut mark on ion exchange buried light waveguide pattern
Member, chip size are 16 × 2.5 × 2.5mm3；9) grinding and polishing: the grinding and polishing that chip unit carries out cutting end face is formed
1 × 4 optical branching-device chip of PLC multimode based on glass base ion exchange buried light waveguide.10) optical coupled ultra-violet curing is used
Two kinds of optical fiber with FA are encapsulated the two sides in alignment with 1 × 4 optical branching-device chip of PLC multimode by glue.
Claims (9)
1. a kind of PLC multimode lightguide suitable for multi fiber system, which includes glass substrate and is located at glass
The ion-exchange type multimode lightguide of glass substrate interior, which is characterized in that the ion-exchange type multimode lightguide is each to gradual change
Refractive index type optical waveguide, the equivalent refractive index of optical waveguide is between two kinds of multimode fibre equivalent refractive indexs of coupling；More than two kinds
Mode fiber is input optical fibre and output optical fibre, and the equivalent refractive index difference of input optical fibre and output optical fibre is no more than 0.1, input optical fibre
It is no more than 1:2 with output optical fibre diameter proportion；
The ion-exchange type multimode lightguide is divided into two regions in glass substrate on vertical cross-section: center light place with
Edge-light place；Wherein, the equivalent refractive index of center light place approaches but refractive index is higher in slightly below two kinds of multimode fibres
Multimode fibre, the two difference are no more than 0.01.
2. a kind of PLC multimode lightguide suitable for multi fiber system according to claim 1, which is characterized in that described
Ion-exchange type multimode lightguide distance from top below glass substrate upper surface 0~50um.
3. a kind of PLC multimode lightguide suitable for multi fiber system according to claim 1, which is characterized in that described
Center light place diameter it is close with the diameter of the lesser multimode fibre of core diameter in two kinds of multimode fibres, the two difference is not
More than 5 μm；
The maximum gauge of edge-light place is close with the diameter of the biggish multimode fibre of core diameter in two kinds of multimode fibres, and two
Person's difference is no more than 10 μm.
4. a kind of PLC multimode lightguide suitable for multi fiber system according to claim 1, which is characterized in that described
The refringence at center to edge of center light place be 0.005~0.05, outside center light place outer to edge-light place
The radial refractive index difference variable gradient on edge be per (Φ 2- Φ 1)/5 reduce 0.0002~0.01, wherein Φ 2 be relatively large in diameter it is more
The diameter of mode fiber, Φ 1 are the diameter of the lesser multimode fibre of diameter.
5. a kind of preparation method suitable for the PLC multimode lightguide of multi fiber system, feature as described in claim 1 exist
In, method includes the following steps:
1) plated film: one layer of uniform exposure mask is plated in glass wafer upper surface；
2) photoetching: photolithography plate is selected according to the function that PLC multimode lightguide needs to realize, then carves the exposure mask on glass wafer
Lose the figure of photolithography plate out；
3) ion exchange: by ion exchange twice in glass wafer surface optical waveguide formed below；
4) heat differential is spread: the glass wafer after ion exchange being placed in heat differential disperser, the heat differential disperser packet
The sealing thermal insulation layer between the first warm area and the second warm area and two warm areas is included, the temperature of the first warm area and the second warm area is equal
At 150~600 DEG C, the temperature of the first warm area is less than the temperature of the second warm area, and the temperature difference is no more than 40 DEG C；Glass wafer is in heat differential
Keeping 1~24 hour in disperser, slow cooling takes out after the completion, first degree of cooling higher second warm area temperature when cooling,
When the temperature of the first warm area and the second warm area is consistent, synchronous cooling, rate of temperature fall is controlled in 10~50 DEG C/min；
5) subsequent technique: step (4) products obtained therefrom is suitable for the PLC multimode of multi fiber system after scribing and end face grinding and polishing
Optical waveguide.
6. a kind of preparation method of PLC multimode lightguide suitable for multi fiber system according to claim 5, feature
It is, exposure mask described in step (1) is plated by way of molecular beam epitaxy or magnetron sputtering.
7. a kind of preparation method of PLC multimode lightguide suitable for multi fiber system according to claim 5, feature
It is, is once exchanged for thermal ion exchange described in step (3) in ion exchange twice, it is secondary to be exchanged for electric-field-assisted ion friendship
It changes；Specific steps are as follows: first form thermal ion exchange optical waveguide in glass wafer upper surface, then pass through the effect of electric field and fused salt
Optical waveguide is buried to glass wafer surface hereinafter, apart from 0~50 μm of glass wafer upper surface.
8. a kind of preparation method of PLC multimode lightguide suitable for multi fiber system according to claim 5, feature
It is, the filler of the first warm area described in step (4) and the second warm area is air or fused salt.
9. a kind of preparation method of PLC multimode lightguide suitable for multi fiber system according to claim 5, feature
It is, sealing thermal insulation layer described in step (4) guarantees that two warm areas are heat-insulated good, and resistant against high temperatures and fused salt corrosion, together
Shi Caiyong flexible material is closely sealed with glass wafer with colloid, prevents wafer expansion from squeezing rupture.
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| US10197732B2 (en) | 2016-08-26 | 2019-02-05 | Corning Optical Communications LLC | Methods for forming ion-exchanged waveguides in glass substrates |
| JP2021511538A (en) * | 2018-01-18 | 2021-05-06 | コーニング インコーポレイテッド | Low-loss waveguide formed in high-transparency glass using Ag-Na ion exchange |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7103252B2 (en) * | 2001-10-25 | 2006-09-05 | Fujitsu Limited | Optical waveguide and fabricating method thereof |
| CN101251621A (en) * | 2008-02-26 | 2008-08-27 | 浙江大学 | Optical waveguide containing Cu ion |
| CN102645701A (en) * | 2012-05-04 | 2012-08-22 | 上海光芯集成光学股份有限公司 | Method for producing optical waveguide on surface of glass substrate by utilizing ion exchange method |
| CN102809779A (en) * | 2012-08-06 | 2012-12-05 | 大连工业大学 | Method for preparing praseodymium-doped ion exchange aluminate and germanate glass waveguide |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3921940B2 (en) * | 2000-12-07 | 2007-05-30 | 住友電気工業株式会社 | Optical transceiver module |
| CN2625917Y (en) * | 2003-05-27 | 2004-07-14 | 浙江大学 | Weak limit NXN multi-mode interference waveguide-type optical power distributor |
| JP2008040500A (en) * | 2006-08-03 | 2008-02-21 | Jds Uniphase Corp | Planar lightwave circuit based wavelength selective switch |
| JP2010044279A (en) * | 2008-08-15 | 2010-02-25 | Fuji Xerox Co Ltd | Optical waveguide and method for manufacturing same |
| CN102103229B (en) * | 2011-02-21 | 2012-04-25 | 中国计量学院 | Array waveguide grating insensitive to temperature and polarization |
| CN105467519A (en) * | 2016-02-04 | 2016-04-06 | 苏州天步光电技术有限公司 | Single-side coupling packaged optical branching device |
| CN206057632U (en) * | 2016-04-15 | 2017-03-29 | 上海光芯集成光学股份有限公司 | Suitable for the PLC multimode lightguides of many fibre systems |
-
2016
- 2016-04-15 CN CN201610235653.7A patent/CN105700075B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7103252B2 (en) * | 2001-10-25 | 2006-09-05 | Fujitsu Limited | Optical waveguide and fabricating method thereof |
| CN101251621A (en) * | 2008-02-26 | 2008-08-27 | 浙江大学 | Optical waveguide containing Cu ion |
| CN102645701A (en) * | 2012-05-04 | 2012-08-22 | 上海光芯集成光学股份有限公司 | Method for producing optical waveguide on surface of glass substrate by utilizing ion exchange method |
| CN102809779A (en) * | 2012-08-06 | 2012-12-05 | 大连工业大学 | Method for preparing praseodymium-doped ion exchange aluminate and germanate glass waveguide |
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