CN108761640A - A kind of high polarization extinction ratio waveguide polarizer and its manufacturing method of fiber coupling - Google Patents

A kind of high polarization extinction ratio waveguide polarizer and its manufacturing method of fiber coupling Download PDF

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Publication number
CN108761640A
CN108761640A CN201810600212.1A CN201810600212A CN108761640A CN 108761640 A CN108761640 A CN 108761640A CN 201810600212 A CN201810600212 A CN 201810600212A CN 108761640 A CN108761640 A CN 108761640A
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groove
lithium niobate
waveguide
chip
lithium
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Inventor
史云玲
杨旭
魏喜雯
褚洪波
郑毅
张凤环
李萍
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Tianjin Leader Technology Development Co Ltd
Heilongjiang University of Science and Technology
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Tianjin Leader Technology Development Co Ltd
Heilongjiang University of Science and Technology
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/126Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/136Integrated optical circuits characterised by the manufacturing method by etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035Materials
    • G02B2006/12042Potassium niobate (KNbO3)
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12116Polariser; Birefringent
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The present invention is higher for insertion loss existing for the waveguide polarizer based on lithium niobate annealed protonexchanged waveguides, the relatively low problem of optical power threshold, and further promote the polarization extinction ratio of such devices, the present invention proposes a kind of high polarization extinction ratio waveguide polarizer and its manufacturing method of fiber coupling, the promotion of device optical power threshold is realized by using magnesium oxide doped lithium niobate crystal or lithium niobate crysal near stoichiometric ratio, and exchange optical waveguide using antiproton is prepared in magnesium oxide doped lithium niobate crystal or lithium niobate crysal near stoichiometric ratio, realize the reduction of waveguide insertion loss.In addition, the present invention uses the method slotted at the back side of magnesium oxide doped lithium niobate crystal or lithium niobate crysal near stoichiometric ratio and coat light absorption substance, achieve the purpose that further to promote waveguide polarizer polarization extinction ratio.

Description

A kind of high polarization extinction ratio waveguide polarizer and its manufacturing method of fiber coupling
Technical field
Fibre Optical Sensor of the present invention, fiber optic communication, Technique on Quantum Communication field, more particularly to a kind of fiber coupling height partially Extinction ratio of the shaking waveguide polarizer and its manufacturing method.
Background technology
Non-polarized light beam or low polarization polarized light beam can be converted into high polarization extinction ratio light beam by the polarizer, polarized It has a wide range of applications in the fields such as dependent loss measuring system, optical fiber sensing system, optical fiber telecommunications system.Light common at present The fine polarizer has low insertion loss (representative value is in 0.5dB or so), low return loss (representative value is in 50dB or so), bloom work( The advantages such as rate (500mW), but its polarization extinction ratio (representative value 30dB) index there is no the use of the completely certain application fields of method Demand, application scenario especially more demanding to polarization extinction ratio.Although can using more accurate grinding and coating process To process the optical fiber polarizer of higher polarization extinction ratio index, but also increase device manufacture difficulty and cost.
The lithium niobate waveguides chip prepared using annealed proton exchange process has the function of natural being polarized, and (representative value is 40 ~50dB), and slot to the lithium niobate waveguides chip progress back side and side and coat light absorbing material, wafer cross-section plating metal The polarization extinction ratio of lithium niobate annealed protonexchanged waveguides chip can be also further promoted to 80dB or more by the technological means such as film Level.
But the insertion loss of lithium niobate annealed protonexchanged waveguides higher (2dB~3dB) is compared with optical fiber polarizer There is larger gap.This is because there is certain for the waveguide mode and the waveguide mode of optical fiber of annealed protonexchanged waveguides Pattern mismatches, and results in larger coupling loss, and the transmission loss of lithium niobate waveguides is also above the transmission loss of optical fiber.
In addition, compared with optical fiber polarizer, the optical power threshold of lithium niobate annealed protonexchanged waveguides chip is relatively low (in 200mW or so under 1550nm operation wavelengths).This is because when input optical power is excessive, the photorefractive effect of lithium niobate The distortion that optical waveguide mode can be caused to be distributed, causes optical waveguide mode to be significantly increased with what fibre-optic waveguide Mode Coupling was lost, draws Play the rapid deterioration of device insertion loss.Although photorefractive effect can be reduced to a certain extent to niobium to lithium niobate crystal chip heating The influence of sour lithium waveguide insertion loss, but the introducing of temperature control element is also added significantly to the complexity of device, gives system application Cause more trouble.
Invention content
Higher, the luminous power threshold for insertion loss existing for the waveguide polarizer based on lithium niobate annealed protonexchanged waveguides It is worth relatively low problem, and further promotes the polarization extinction ratio of such devices, the present invention proposes a kind of high polarization of fiber coupling The extinction ratio waveguide polarizer and its manufacturing method, it is brilliant by using magnesium oxide doped lithium niobate crystal or near-stoichiometric ratio lithium niobate Body realizes the promotion of device optical power threshold, and using in magnesium oxide doped lithium niobate crystal or lithium niobate crysal near stoichiometric ratio In prepare antiproton exchange optical waveguide, realize waveguide insertion loss reduction.In addition, the present invention, which uses, is mixing magnesia niobic acid The method that the back side of crystalline lithium or lithium niobate crysal near stoichiometric ratio slots and coats light absorption substance reaches further promotion The purpose of waveguide polarizer polarization extinction ratio.
To achieve the purpose of the present invention, the present invention provides a kind of high polarization extinction ratio waveguide polarizer of fiber coupling, Including:Lithium niobate crystal chip, optical waveguide, ferrule, polarization maintaining optical fibre, the lithium niobate crystal chip are that optical grade mixes magnesia niobic acid Crystalline lithium or optical grade lithium niobate crysal near stoichiometric ratio;The back side of the lithium niobate crystal chip is provided with using machine cuts mode Groove;The optical waveguide is that the lithium niobate antiproton of vertical bar structure exchanges waveguide;The ferrule uses lithium niobate V-type Any one of forms such as slot, lithium niobate U-type groove, glass round tube, glass square tube;The polarization maintaining optical fibre is panda protecting polarized light fiber.
Preferably, the thickness of the lithium niobate crystal chip is 1mm to 2mm, and crystal is tangentially that X cuts Y biographies or Z cuts Y biographies.
Preferably, the first groove at the lithium niobate crystal chip back side is located at the 1/2 of lithium niobate waveguides chip total length, examines Consider the mechanical stress and impact resistance of the lithium niobate crystal chip after grooving, the depth of the first groove is 0.3mm to 0.5mm, And the width of the first groove is 0.1mm to 0.5mm.
Preferably, the second groove at the lithium niobate crystal chip back side and third groove are located at lithium niobate waveguides chip total length 1/4 at and 3/4 at, first groove small 0.1mm, i.e. 0.2mm described in the depth ratio of the second groove and the third groove To 0.4mm, the width of the second groove and the third groove is 0.1mm to 0.5mm.
Preferably, it is coated with light absorption in the first groove, second groove at the lithium niobate crystal chip back side and third groove Substance, such as black silica gel, black ink, black pigment.
Preferably, the optical waveguide is that the lithium niobate antiproton of vertical bar structure exchanges waveguide, and duct width is at 1 μm to 10 μm;
Preferably, ferrule is glass round tube, and using silica glass material, pipe outer diameter is 1.0mm to 1.8mm, circle Bore is 0.127mm ± 0.002mm.
Preferably, the TM polarization modes direction of the slow-axis direction of the polarization maintaining optical fibre and optical waveguide is aligned.
Correspondingly, the present invention also provides a kind of manufacturing method of the high polarization extinction ratio waveguide polarizer of fiber coupling, Include the following steps:
Step 1:On lithium niobate crystal chip surface, using photoetching, plated film, the processing technology of stripping or plated film, photoetching, etching with The processing technology of corrosion, produces the earth silicon mask or metal mask of vertical bar waveguide pattern, and chromium film can be used in metal mask Or titanium film, the thickness of earth silicon mask or metal mask is in 100nm to 500nm;
Step 2:The lithium niobate crystal chip for making vertical bar waveguide mask pattern is immersed in and fills benzoic acid solution or benzene first Quartzy tank is put into high-temperature electric resistance furnace, with the high purity quartz tank of lithium benzoate mixed solution in 150 DEG C to 250 DEG C of temperature by acid Under the conditions of degree, stablize 1 hour to 20 hours, completes the making of proton exchange optical waveguide;
Step 3:The lithium niobate crystal chip for having finished proton-exchanged waveguide technique is put into quartz boat, push-in tubular type diffusion Stove is stablized 2 hours to 5 hours under 300 DEG C to 400 DEG C of temperature condition, completes the annealing of proton-exchanged waveguide;
Step 4:The proton-exchanged waveguide chip for doing annealing is immersed in and fills lithium nitrate, sodium nitrate, potassium nitrate Mixed solution (ratio of molar percentage be 37.5:44.5:18.0) in high purity quartz tank, in 320 DEG C to 340 DEG C of temperature Under the conditions of degree, stablize 9 hours to 12 hours, completes the making that antiproton exchanges optical waveguide;
Step 5:Photoresist or quartzy wax are coated to protect lithium niobate crystal chip surface, by niobic acid in lithium niobate crystal chip upper surface Lithium chip be inverted, using wire cutting machine or scribing machine at 1/4,1/2, the 3/4 of the lithium niobate crystal chip back side grooving, respectively second Groove, first groove, third groove, the depth of first groove is in 0.3mm to 0.5mm, the depth of second groove and third groove It is smaller 0.1mm than first groove, first groove, second groove, third groove width be 0.1mm to 0.5mm;
Step 6:In the first groove at the lithium niobate crystal chip back side, second groove, third groove, black light absorbent is coated Matter, such as black silica gel, black ink, black pigment;
Step 7:The quartz glass pipe for being installed with panda protecting polarized light fiber is placed on 6 dimension fiber adjusting mounts, light is being regulated After learning the relative position between waveguide and optical fiber, the ultra-violet curing glue on the input and output side millet cake of optical waveguide chip, Quartz glass pipe is cemented, using ultra violet lamp, the fiber coupling for completing waveguide polarizer chip is bonded work.
Compared with prior art, beneficial effects of the present invention are:
(1) with compared with component lithium columbate crystal, magnesium oxide doped lithium niobate crystal or lithium niobate crysal near stoichiometric ratio There is higher light injury threshold, therefore light is prepared in magnesium oxide doped lithium niobate crystal or lithium niobate crysal near stoichiometric ratio Learn the optical power threshold that waveguide is conducive to be promoted the lithium niobate waveguides polarizer;
(2) compared with annealed proton exchanges optical waveguide, antiproton exchanges optical waveguide mode distribution and the optical fiber of waveguide The overlapping degree higher of optical waveguide mode distribution, coupling loss is lower, therefore exchanges waveguide prepared by waveguide using antiproton and rise Inclined device advantageously reduces the insertion loss of device;
(3) it slots at the lithium niobate crystal chip back side and coats black light absorbing material, can be prevented by groove and pass through light Absorbing material absorbs the TE pattern light waves in lithium niobate crystal chip internal transmission, and output end optical fiber is arrived to reduce TE pattern light waves Probability is conducive to the polarization extinction ratio for promoting the waveguide polarizer.
Description of the drawings
Fig. 1 is being illustrated based on lithium niobate annealed protonexchanged waveguides, fiber coupling polarizer solid for the prior art Figure;
Fig. 2 is the optical waveguide mode profile figure of the lithium niobate annealed protonexchanged waveguides of the prior art;
Fig. 3 is the optical waveguide mode profile figure of the polarization maintaining optical fibre of the prior art;
Fig. 4 is the optical waveguide mode profile figure that antiproton exchanges waveguide described in the embodiment of the present invention;
Fig. 5 be the embodiment of the present invention described in the lithium niobate crystal chip back side open it is fluted, based on lithium niobate antiproton exchange wave Polarizer stereoscopic schematic diagram lead, fiber coupling.
In figure, the title corresponding to each label is respectively:1. with component lithium niobate crystal chip;2. annealed proton exchanges optics Waveguide;2-1. annealed protons exchange the waveguide mode distribution of optical waveguide;3. quartz glass pipe;4. polarization maintaining optical fibre;4-1. protecting The waveguide mode of polarisation fibre is distributed;5. mixing magnesia lithium niobate crystal chip;6. antiproton exchanges optical waveguide;6-1. antiprotons exchange The waveguide mode of optical waveguide is distributed;7-1. first groove;7-2. second groove;7-3. third grooves.
Specific implementation mode
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It should be appreciated that described herein Specific embodiment be only used to explain the present invention, be not intended to limit the present invention.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.
As Figure 1-Figure 5, a kind of high polarization extinction ratio waveguide polarizer of fiber coupling is present embodiments provided, is wrapped It includes:Lithium niobate crystal chip 5, optical waveguide 6, ferrule 3, polarization maintaining optical fibre 4.Lithium niobate crystal chip 5 is that optical grade mixes magnesia niobic acid Crystalline lithium 5, crystal are tangentially that X cuts Y biographies or Z cuts Y biographies.For the coupling for ensureing enough between lithium niobate crystal chip 5 and ferrule 3-1 Intensity, 5 thickness of lithium niobate crystal chip are selected as 1mm.
Wherein, the back side of lithium niobate crystal chip 5 uses machine cuts mode, such as scribing machine or wire cutting machine, is provided with three Groove is located at grooving at 1/4,1/2, the 3/4 of 5 back side of lithium niobate crystal chip, respectively second groove 7-2, first groove 7- 1, third groove 7-3.In view of the mechanical stress and impact resistance of the lithium niobate crystal chip after grooving, the depth of first groove 7-1 In 0.3mm to 0.5mm, the depth of second groove 7-2 and third groove 7-3 are smaller 0.1mm than first groove 7-1, i.e. 0.2mm is extremely 0.4mm.First groove 7-1, second groove 7-2, third groove 7-3 width be 0.1mm to 0.5mm.Lithium niobate crystal chip 5 is carried on the back The first groove 7-1 in face, second groove 7-2, black light absorbing material is coated in third groove 7-3, such as black silica gel, black ink Water, black pigment etc..
Optical waveguide 6 is that the lithium niobate antiproton of vertical bar structure exchanges waveguide, and duct width is at 1 μm to 10 μm.
Ferrule 3 use glass round tube, pipe outer diameter be 1.0mm to 1.8mm, round tube inside diameter be 0.127mm ± The material of 0.002mm, glass round tube are quartz glass.
Polarization maintaining optical fibre 4 is panda protecting polarized light fiber, the slow-axis direction of polarization maintaining optical fibre 4 and the polarization mode sides TM of optical waveguide 6 To alignment.
Correspondingly, a kind of preparation of the high polarization extinction ratio waveguide polarizer of above-mentioned fiber coupling is present embodiments provided Method, this method comprises the following steps:
Step 1:On 5 surface of lithium niobate crystal chip, using photoetching, plated film, the processing technology of stripping or plated film, photoetching, etching With the processing technology of corrosion, the earth silicon mask or metal mask of vertical bar waveguide pattern are produced, chromium can be used in metal mask The thickness of film or titanium film, earth silicon mask or metal mask is in 100nm to 500nm;
Step 2:The lithium niobate crystal chip 5 for making vertical bar waveguide mask pattern is immersed in and fills benzoic acid solution or benzene first Quartzy tank is put into high-temperature electric resistance furnace, with the high purity quartz tank of lithium benzoate mixed solution in 150 DEG C to 250 DEG C of temperature by acid Under the conditions of degree, stablize 1 hour to 20 hours, completes the making of proton exchange optical waveguide;
Step 3:The lithium niobate crystal chip 5 for having finished proton-exchanged waveguide technique is put into quartz boat, push-in tubular type diffusion Stove is stablized 2 hours to 5 hours under 300 DEG C to 400 DEG C of temperature condition, completes the annealing of proton-exchanged waveguide;
Step 4:The lithium niobate crystal chip 5 for doing annealing is immersed in the mixing for filling lithium nitrate, sodium nitrate, potassium nitrate (ratio of molar percentage is 37.5 to solution:44.5:18.0) in high purity quartz tank, in 320 DEG C to 340 DEG C of temperature condition Under, stablize 9 hours to 12 hours, completes the making that antiproton exchanges optical waveguide 6;
Step 5:Photoresist or quartzy wax are coated in the upper surface of lithium niobate crystal chip 5 to protect the surface of lithium niobate crystal chip 5, Lithium niobate crystal chip 5 is inverted, using wire cutting machine or scribing machine at 1/4,1/2, the 3/4 of 5 back side of lithium niobate crystal chip grooving, point Not Wei second groove 7-2, first groove 7-1, third groove 7-3, first groove 7-1 depth in 0.3mm to 0.5mm, second Depth ratio first groove small 0.1mm, first groove 7-1, second groove 7-2, the third groove of groove 7-2 and third groove 7-3 The width of 7-3 is 0.1mm to 0.5mm;
Step 6:In the first groove 7-1 at 5 back side of lithium niobate crystal chip, second groove 7-2, third groove 7-3, coat black Coloured light absorbing material, such as black silica gel, black ink, black pigment.
Step 7:The quartz glass pipe 3 for being installed with panda protecting polarized light fiber 4 is placed on 6 dimension fiber adjusting mounts, is being regulated After relative position between optical waveguide 6 and optical fiber 4, the ultra-violet curing glue on the input and output side millet cake of optical waveguide 6, Quartz glass pipe 3 is cemented, using ultra violet lamp, the fiber coupling for completing waveguide polarizer chip is bonded work.
The above is only a preferred embodiment of the present invention, it is noted that for the common skill of the art For art personnel, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications Also it should be regarded as protection scope of the present invention.

Claims (10)

1. a kind of high polarization extinction ratio waveguide polarizer of fiber coupling, which is characterized in that including:Lithium niobate crystal chip (5), optics Waveguide (6) and ferrule (3), polarization maintaining optical fibre (4), the lithium niobate crystal chip (5) are that optical grade mixes magnesia lithium niobate crystal Body or optical grade lithium niobate crysal near stoichiometric ratio;The back side of the lithium niobate crystal chip (5) is provided with using machine cuts mode Groove;The optical waveguide (6) is that the lithium niobate antiproton of vertical bar structure exchanges waveguide;The ferrule (3) uses niobic acid Any one of lithium V-groove, lithium niobate U-type groove, glass round tube or glass square tube;The polarization maintaining optical fibre (4) is panda polarization-maintaining light It is fine.
2. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that the niobic acid The thickness of lithium chip (5) is 1mm to 2mm, and crystal is tangentially that X cuts Y biographies or Z cuts Y biographies.
3. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that the niobic acid The first groove (7-1) at lithium chip (5) back side is located at the 1/2 of lithium niobate waveguides chip total length, the depth of the first groove Degree is 0.3mm to 0.5mm, and the width of the first groove is 0.1mm to 0.5mm.
4. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that the niobic acid The second groove (7-2) and third groove (7-3) at lithium chip (5) back side be located at the 1/4 of lithium niobate waveguides chip total length and At 3/4, the depth of the second groove (7-2) and the third groove (7-3) is smaller 0.1mm than the first groove (7-1), i.e., The width of 0.2mm to 0.4mm, the second groove (7-2) and the third groove (7-3) is 0.1mm to 0.5mm.
5. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that the niobic acid First groove (7-1), second groove (7-2) and the third groove (7-3) at lithium chip (5) back side are interior to be coated with light absorption substance.
6. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that the optics The duct width of waveguide (6) is at 1 μm to 10 μm.
7. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that ferrule (3) be glass round tube, using silica glass material, pipe outer diameter is 1.0mm to 1.8mm, round tube inside diameter be 0.127mm ± 0.002mm。
8. the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 1, which is characterized in that the polarization-maintaining The slow-axis direction of optical fiber (4) and the TM polarization modes direction alignment of optical waveguide (6).
9. a kind of manufacturing method of the high polarization extinction ratio waveguide polarizer of fiber coupling, which is characterized in that include the following steps:
Step 1:On lithium niobate crystal chip (5) surface, using photoetching, plated film, the processing technology of stripping or plated film, photoetching, etching with The processing technology of corrosion produces the earth silicon mask or metal mask of vertical bar waveguide pattern, earth silicon mask or metal The thickness of mask is in 100nm to 500nm;
Step 2:The lithium niobate crystal chip (5) for making vertical bar waveguide mask pattern is immersed in and fills benzoic acid solution or benzoic acid With the high purity quartz tank of lithium benzoate mixed solution, quartzy tank is put into high-temperature electric resistance furnace, in 150 DEG C to 250 DEG C of temperature Under the conditions of, stablize 1 hour to 20 hours, completes the making of proton exchange optical waveguide;
Step 3:The lithium niobate crystal chip (5) for having finished proton-exchanged waveguide technique is put into quartz boat, tubular diffusion furnace is pushed into, Under 300 DEG C to 400 DEG C of temperature condition, stablizes 2 hours to 5 hours, complete the annealing of proton-exchanged waveguide;
Step 4:The proton-exchanged waveguide chip for doing annealing is immersed in fill lithium nitrate, sodium nitrate, potassium nitrate it is mixed In the high purity quartz tank for closing solution, under 320 DEG C to 340 DEG C of temperature condition, stablize 9 hours to 12 hours, completes antiproton Exchange the making of optical waveguide;
Step 5:Photoresist or quartzy wax are coated to protect lithium niobate crystal chip (5) surface, by niobium in lithium niobate crystal chip (5) upper surface Sour lithium chip (5) is inverted, using wire cutting machine or scribing machine at 1/4,1/2, the 3/4 of lithium niobate crystal chip (5) back side grooving, point Not Wei second groove (7-2), first groove (7-1), third groove (7-3), the depth of first groove (7-1) 0.3mm extremely The depth of 0.5mm, second groove (7-2) and third groove (7-3) is smaller 0.1mm than first groove (7-1), first groove (7-1), Second groove (7-2), third groove (7-3) width be 0.1mm to 0.5mm;
Step 6:In the first groove (7-1), second groove (7-2), third groove (7-3) at lithium niobate crystal chip (5) back side, apply Upper black light absorbing material;
Step 7:The quartz glass pipe for being installed with panda protecting polarized light fiber is placed on 6 dimension fiber adjusting mounts, optics wave is being regulated After leading the relative position between optical fiber, the ultra-violet curing glue on the input and output side millet cake of optical waveguide chip, by stone English glass round tube cements, and using ultra violet lamp, the fiber coupling for completing waveguide polarizer chip is bonded work.
10. the manufacturing method of the high polarization extinction ratio waveguide polarizer of fiber coupling according to claim 9, feature exist In, the lithium nitrate, sodium nitrate, potassium nitrate mixed solution in, the ratio of the molar percentage of three is 37.5:44.5: 18.0。
CN201810600212.1A 2018-06-12 2018-06-12 A kind of high polarization extinction ratio waveguide polarizer and its manufacturing method of fiber coupling Pending CN108761640A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109613648A (en) * 2019-02-14 2019-04-12 聊城大学 A kind of preparation method of full crystal waveguide coupler

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