CN103197375B - Method for generating line polarization with high degree of polarization at any angle in optical waveguide device - Google Patents
Method for generating line polarization with high degree of polarization at any angle in optical waveguide device Download PDFInfo
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Abstract
The invention relates to a method for generating line polarization with a high degree of polarization at any angle in an optical waveguide device. An end face coupling technique is adopted to couple and bond the output end face of a lithium niobate optical waveguide chip and the input end face of a common optical waveguide chip, and a waveguide structure on the lithium niobate optical waveguide chip and a waveguide structure on the common optical waveguide chip are coaxial; the lithium niobate optical waveguide chip directly carries out polarizing processing on input light as a polarizer, so that the input light with a polarization angle of 80dB above enters the waveguide structure on the common optical waveguide chip; and the lithium niobate optical waveguide chip is made by an annealing proton exchange process. The method has the beneficial technical effect of effectively reducing the dimension of a device while generating the line polarization with a high degree of polarization.
Description
Technical field
The present invention relates to a kind of fiber waveguide device and play inclined to one side technology, relate in particular to a kind of method that produces arbitrarily angled high-polarization line polarisation in fiber waveguide device.
Background technology
Take in the modern electro-optical system that optical fiber, optical waveguide and other photonic device be feature, often need the linearly polarized light that degree of polarization is very high, except the exportable line polarisation of some laser instrument itself, in all the other application scenarios, all need could obtain line polarisation by incident light being decomposed and selecting.
In prior art, generally adopt the line polarisation polarizer to produce line polarisation, the line polarisation polarizer is also polarizer, and different according to principle of work, polarizer can be divided into birefringence mode, reflection-type, absorption-type and scatter-type, introduces several frequently seen polarizer below:
1) polarizing prism is the polarizer that utilizes the birefringent characteristic of crystal to make, comparatively typical in Glan-thomson polarizing prism in this class polarizer, its structure as shown in Figure 1, by two kalzit right-angle prisms, along inclined-plane gummed, formed, its end face is vertical with bottom surface, and optical axis direction is not only parallel to end face but also be parallel to inclined-plane, vertical with drawing, between two prisms, can use the gummeds such as glycerine, resin, also can separate with air.Natural light is during to end face normal incidence, and crystal is respectively n to the refractive index of o light and e light
oand n
e(n
o≤ n
e), there is not deviation in o light and e light now, and their incident angles on inclined-plane equal the angle theta of prism inclined-plane and right angle face.In certain pore size angular region, suitably select θ can make the o angle of light in incident light wave be greater than critical angle, there is total reflection and absorbed by the coating of prism walls; For e light, because its incident angle is less than critical angle, therefore can see through, thereby penetrate a branch of pure line polarisation; Except Glan-thomson prism, the polarizing prism of making based on crystal birefringence characteristic also has Wollaston prism, Nicol prism and Rochon prism, this class polarizer maximum can realize 55dB and play the degree of bias, and there is the deficiency that device size is large, insertion loss large, involve great expense and have the aspects such as aperture angle restriction, be difficult to the integrated of realization and optical fiber, fiber waveguide device.
2) scatter-type polarizing disc is to utilize the scattering of birefringece crystal to realize inclined to one side, its typical structure as shown in Figure 2, two optical glass with specific refractive index clip the sodium nitrate crystal that one deck optical axis parallels with its surface, because sodium nitrate crystal is very large for the birefringence of the light of vertical its optical axis incident, the green-yellow light that the wavelength of take is 550nm is example, the refractive index n of two kinds of coloured light
oand n
ebe respectively 1.5854 and 1.3369, optical glass is 1.5831 to the refractive index of this wavelength light, with n
overy approaching, and and n
ediffer greatly, so when the rough interfaces of light by between glass and crystal, o light will pass through unimpededly, e light is subject to the strong scattering in interface and cannot passes through, thereby realizes rising partially incident light.The highest 50dB of realization of scatter-type polarizing disc plays the degree of bias, and thickness can be as small as 0.2mm, but is still difficult to be integrated in optical fiber, optical waveguide and other photonic device and system.
3) absorption-type polaroid is to utilize Cucumber (tourmaline, iodine sulfate quinine etc.) to make the selection absorption characteristic of two orthogonal oscillating components in transmission light.For example tourmaline absorbs very strongly to the ordinary light vector component of vertical optical axis in transmission light, and uptake is directly proportional to crystal thickness, and extraordinary ray vector component is only absorbed to some wavelength components, so its color slightly.Utilize absorption-type polaroid thin thickness that this specific character of crystal makes to 0.03mm, area is large, angle, effective aperture is almost 180 °, and technique is simple, cost is low, in prior art, employing structure assembly is as shown in Figure 3 in optical fiber, fiber waveguide device conventionally, but it exists, transmitance is low, the defect of polarizing degree low (≤30dB), can not meet device and system that some requires high-polarization line polarisation.
4) single polarization fiber is a kind of novel polarizer, and its ultimate principle is by the loss of one of them in two orthogonal polarization modes in special stressed zone structure design increase transmission light, to have realized partially on the basis of common single-mode polarization maintaining fiber.The method that single polarization fiber can be coupled by welding and end face respectively realizes and being connected with optical waveguide with other optical fiber, but due to its degree of polarization not high (>=30dB), and its output polarization degree and bandwidth of operation are subject to the considerable influence of environment temperature, stress and the Bending Deformation of optical fiber own thereof, therefore limited its application in requiring high-polarization line polarizing device and system and under severe rugged environment.
Progress along with technology, field of engineering technology requires all more and more higher for integrated level requirement and the transmission light wave polarization degree of photoelectric device, how under the condition that not only guarantees transmission light wave polarization degree but also can improve the problem of photoelectric device integrated level simultaneously, not only depend on the theory innovation of photoelectric technology, also will depend on the structure innovation to existing photoelectric device.
Summary of the invention
For the problem in background technology, the present invention proposes a kind of method that produces arbitrarily angled high-polarization line polarisation in fiber waveguide device, adopt end face coupling technique that the input end face coupling of the output end face of lithium niobate fiber waveguide chip and normal optical waveguide chip is bonding, and waveguiding structure on lithium niobate fiber waveguide chip and the waveguiding structure on normal optical waveguide chip are coaxially arranged; Lithium niobate fiber waveguide chip is directly polarized processing to input light as the polarizer, makes to input light and injects in the waveguiding structure of normal optical waveguide chip with the degree of bias that rises more than 80dB; Described lithium niobate fiber waveguide chip adopts annealing proton exchange technique to make.
The ultimate principle of the method is: in prior art, the lithium niobate fiber waveguide chip of producing by annealing proton exchange technique, has the polarization extinction ratio higher than 80dB, is the polarizer part that a kind of bias can be fabulous, although lithium niobate fiber waveguide chip has a so good bias energy, but the thinking set due to technician, in prior art, lithium niobate fiber waveguide chip is not used as the polarizer separately, in the present invention, lithium niobate fiber waveguide chip is directly coupled as " polarizer " and normal optical waveguide chip end face, realization rises partially the raised degree of bias of input light, effectively improved the integrated level of device, make device size obtain dwindling, simultaneously, structure of the present invention also makes lithium niobate fiber waveguide chip be connected in zero spacing mode with normal optical waveguide chip, polarisation of light degree after having made partially is almost entering in normal optical waveguide chip in loss-free situation, assurance enters the polarisation of light degree of normal optical waveguide chip more than 80dB, thereby obtain the line polarisation of the raised degree of bias.The kind of normal optical waveguide chip can preferentially adopt according to actual needs, and concrete optional type has SiO
2based optical waveguide chip, Si based optical waveguide chip, glass-based chip of light waveguide, polymer optical wave guide chip, lithium niobate fiber waveguide chip;
The optical fibre current sensor system of take is example by titanium diffusion lithium niobate phase modulator, existing titanium diffusion lithium niobate phase modulator need to connect a conventional polarizer (play the degree of bias and be less than 40dB) by polarization maintaining optical fibre at its input end, then by polarization maintaining optical fibre, transmit the conventional polarizer is connected with titanium diffusion lithium niobate phase modulator, consider the fevering sodium effect of polarization maintaining optical fibre itself, the actual degree of polarization that enters the linearly polarized light of titanium diffusion lithium niobate phase modulator chip is less than 40dB certainly.And after employing the present invention program, be about to do lithium niobate fiber waveguide chip that the polarizer uses and titanium spread lithium niobate phase modulator chip mutually integrated after, from making the line polarisation of the lithium niobate fiber waveguide chip outgoing of polarizer use, can enter with the degree of polarization direct-coupling higher than 80dB titanium diffusion lithium niobate phase modulator chip, thereby can reduce because of crosstalking that Mode Coupling effect causes, improve the measuring accuracy of fibre optic current sensor, simultaneously, the polarization maintaining optical fibre that has also saved transmission use in device, is reduced device size.
On the basis of aforementioned schemes, the invention allows for following preferred implementation: the structure plane at the waveguiding structure place on lithium niobate fiber waveguide chip forms first wave guide face, the structure plane at the waveguiding structure place on normal optical waveguide chip forms Second Wave guide face, the angle of first wave guide face and Second Wave guide face is selected 0~90 ° of scope, thereby realize within the scope of 0 °~90 ° arbitrarily angled partially, to meet the needs of different application occasion.
The invention allows for a kind of structure that produces arbitrarily angled high-polarization line polarisation in fiber waveguide device, it is comprised of input optical fibre, input optical fibre carrier, lithium niobate fiber waveguide chip, normal optical waveguide chip, output optical fibre carrier and output optical fibre;
On input optical fibre carrier and output optical fibre carrier, be provided with mounting groove; Input optical fibre is arranged in the mounting groove of input optical fibre carrier and forms input optical fibre module; Output optical fibre is arranged in the mounting groove of output optical fibre carrier and forms output optical fibre module;
Lithium niobate fiber waveguide chip one end is connected with input optical fibre module end face, and the lithium niobate fiber waveguide chip other end is connected with one end end face of normal optical waveguide chip, and the normal optical waveguide chip other end is connected with output optical fibre module end face; Waveguiding structure on input optical fibre, lithium niobate fiber waveguide chip, waveguiding structure and the output optical fibre on normal optical waveguide chip coaxially arrange;
Described lithium niobate fiber waveguide chip adopts annealing proton exchange technique to make.
Based on existing principle, in order to suppress the impact of Coupling point back-reflection noise on system, between input, output optical fibre module and chip of light waveguide, can adopt oblique coupled structure;
Similarly, this structure also can adopt following preferred implementation: the structure plane at the waveguiding structure place on described lithium niobate fiber waveguide chip forms first wave guide face, the structure plane at the waveguiding structure place on described normal optical waveguide chip forms Second Wave guide face, and the angle between first wave guide face and Second Wave guide face is selected 0~90 ° of scope.
The invention allows for a kind of method for making that produces the structure of arbitrarily angled high-polarization line polarisation in fiber waveguide device,
1) prepare input optical fibre module, output optical fibre module, lithium niobate fiber waveguide chip, normal optical waveguide chip standby;
When preparing input optical fibre module and output optical fibre module, the end face of its link need, through optical grinding polishing, make it reach optical surface requirement, while preparing lithium niobate fiber waveguide chip, can be undertaken by following technique: at the proton exchange mask of lithium niobate wafer surface deposition silicon dioxide or other type, by photoetching, develop, the techniques such as corrosion are transferred to the waveguide figure of design crystal column surface shape from lithography mask version, then take benzoic acid as proton source, carry out proton exchange with lithium niobate crystal chip and form waveguide, the fiber waveguide refractive index that proton exchange obtains is step change type and distributes, by annealing process, reduce waveguide surface refractive index again, make ducting layer constantly to substrate direction, extend simultaneously, finally on lithium niobate fiber waveguide chip, obtain refractive index and be gradual change gaussian shaped profile, loss is little, polarization extinction ratio is high, the waveguiding structure of stable performance.
2) with accurate sextuple displacement platform, input optical fibre module and lithium niobate fiber waveguide chip are clamped, make the output terminal of input optical fibre module and the input end end face of lithium niobate fiber waveguide chip parallel, make the input optical fibre in input optical fibre module axially relative with the waveguiding structure on lithium niobate fiber waveguide chip simultaneously;
Adopt the luminous power of light power meter monitoring lithium niobate fiber waveguide chip output, simultaneously, regulate the relative position between input optical fibre module and lithium niobate fiber waveguide chip, after optical fiber to be entered and waveguiding structure are aimed at completely, in gap between input optical fibre module and lithium niobate fiber waveguide chip, splash into ultra-violet curing glue, until ultra-violet curing glue, by after the gap uniform filling between input optical fibre module and lithium niobate fiber waveguide chip, with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing;
3) adopt accurate sextuple displacement platform that normal optical waveguide chip and lithium niobate fiber waveguide chip are clamped, make the input end of normal optical waveguide chip and the output terminal end face of lithium niobate fiber waveguide chip parallel, make the waveguiding structure on normal optical waveguide chip axially relative with the waveguiding structure on lithium niobate fiber waveguide chip simultaneously;
Adopt the luminous power of light power meter monitoring normal optical waveguide chip output, simultaneously, regulate the relative position between normal optical waveguide chip and lithium niobate fiber waveguide chip, after the waveguiding structure on normal optical waveguide chip and lithium niobate fiber waveguide chip is aimed at completely, in gap between normal optical waveguide chip and lithium niobate fiber waveguide chip, splash into ultra-violet curing glue, until ultra-violet curing glue by after the gap uniform filling between normal optical waveguide chip and lithium niobate fiber waveguide chip, with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing;
4) with accurate sextuple displacement platform, output optical fibre module and normal optical waveguide chip are clamped, make the input end of output optical fibre module and the output terminal end face of normal optical waveguide chip parallel, make the waveguiding structure on normal optical waveguide chip axially relative with the output optical fibre in output optical fibre module simultaneously;
Adopt the luminous power of light power meter monitoring output optical fibre output, simultaneously, relative position between regulation output optic module and normal optical waveguide chip, after output optical fibre and waveguiding structure are aimed at completely, in gap between output optical fibre module and normal optical waveguide chip, splash into ultra-violet curing glue, until ultra-violet curing glue, by after the gap uniform filling between output optical fibre module and normal optical waveguide chip, with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing.
When making, can adopt following optimal way: the structure plane at the waveguiding structure place on described lithium niobate fiber waveguide chip forms first wave guide face, the structure plane at the waveguiding structure place on described normal optical waveguide chip forms Second Wave guide face; Step 3), in, while regulating the relative position between normal optical waveguide chip and lithium niobate fiber waveguide chip, the angle between first wave guide face and Second Wave guide face is selected 0~90 ° of scope.
Useful technique effect of the present invention is: when producing high-polarization line polarisation, effectively dwindled device size.
Accompanying drawing explanation
Fig. 1, Glan-thomson polarizing prism principle schematic;
Fig. 2, birefringece crystal scattering play inclined to one side principle schematic;
Fig. 3, absorption-type polaroid principle schematic;
(in figure, shown in mark A, structure is the waveguiding structure on lithium niobate fiber waveguide chip for Fig. 4, structural representation of the present invention, shown in mark B, be the waveguiding structure on normal optical waveguide chip, angle a is the angle between first wave guide face and Second Wave guide face).
Embodiment
A kind of method that produces arbitrarily angled high-polarization line polarisation in fiber waveguide device, adopt end face coupling technique that the input end face coupling of the output end face of lithium niobate fiber waveguide chip 3 and normal optical waveguide chip 4 is bonding, and waveguiding structure on lithium niobate fiber waveguide chip 3 and the waveguiding structure on normal optical waveguide chip 4 are coaxially arranged; Lithium niobate fiber waveguide chip 3 is directly polarized processing to input light as the polarizer, makes to input light and injects in the waveguiding structure of normal optical waveguide chip 4 with the degree of bias that rises more than 80dB; Described lithium niobate fiber waveguide chip 3 adopts annealing proton exchange technique to make.
Further, the structure plane at the waveguiding structure place on lithium niobate fiber waveguide chip 3 forms first wave guide face, the structure plane at the waveguiding structure place on normal optical waveguide chip 4 forms Second Wave guide face, and the angle of first wave guide face and Second Wave guide face is selected 0~90 ° of scope.
In fiber waveguide device, produce a structure for arbitrarily angled high-polarization line polarisation, it is comprised of input optical fibre 1, input optical fibre carrier 2, lithium niobate fiber waveguide chip 3, normal optical waveguide chip 4, output optical fibre carrier 5 and output optical fibre 6; On input optical fibre carrier 2 and output optical fibre carrier 5, be provided with mounting groove; Input optical fibre 1 is arranged in the mounting groove of input optical fibre carrier 2 and forms input optical fibre module; Output optical fibre 6 is arranged in the mounting groove of output optical fibre carrier 5 and forms output optical fibre module; Lithium niobate fiber waveguide chip 3 one end are connected with input optical fibre module end face, and lithium niobate fiber waveguide chip 3 other ends are connected with one end end face of normal optical waveguide chip 4, and normal optical waveguide chip 4 other ends are connected with output optical fibre module end face; Waveguiding structure on input optical fibre 1, lithium niobate fiber waveguide chip 3, the waveguiding structure on normal optical waveguide chip 4 and output optical fibre 6 four coaxially arrange; Described lithium niobate fiber waveguide chip 3 adopts annealing proton exchange technique to make.
Further, the structure plane at the waveguiding structure place on described lithium niobate fiber waveguide chip 3 forms first wave guide face, the structure plane at the waveguiding structure place on described normal optical waveguide chip 4 forms Second Wave guide face, and the angle between first wave guide face and Second Wave guide face is selected 0~90 ° of scope.
In fiber waveguide device, produce a method for making for the structure of arbitrarily angled high-polarization line polarisation,
1) prepare input optical fibre module, output optical fibre module, lithium niobate fiber waveguide chip 3, normal optical waveguide chip 4 standby;
2) with accurate sextuple displacement platform, input optical fibre module and lithium niobate fiber waveguide chip 3 are clamped, make the output terminal of input optical fibre module and the input end end face of lithium niobate fiber waveguide chip 3 parallel, make the input optical fibre 1 in input optical fibre module axially relative with the waveguiding structure on lithium niobate fiber waveguide chip 3 simultaneously;
Adopt the luminous power of light power meter monitoring lithium niobate fiber waveguide chip 3 outputs, simultaneously, regulate the relative position between input optical fibre module and lithium niobate fiber waveguide chip 3, after optical fiber 1 to be entered and waveguiding structure are aimed at completely, in gap between input optical fibre module and lithium niobate fiber waveguide chip 3, splash into ultra-violet curing glue, until ultra-violet curing glue by after the gap uniform filling between input optical fibre module and lithium niobate fiber waveguide chip 3, with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing;
3) adopt accurate sextuple displacement platform that normal optical waveguide chip 4 and lithium niobate fiber waveguide chip 3 are clamped, make the input end of normal optical waveguide chip 4 and the output terminal end face of lithium niobate fiber waveguide chip 3 parallel, make the waveguiding structure on normal optical waveguide chip 4 axially relative with the waveguiding structure on lithium niobate fiber waveguide chip 3 simultaneously;
Adopt the luminous power of light power meter monitoring normal optical waveguide chip 4 outputs, simultaneously, regulate the relative position between normal optical waveguide chip 4 and lithium niobate fiber waveguide chip 3, after the waveguiding structure on normal optical waveguide chip 4 and lithium niobate fiber waveguide chip 3 is aimed at completely, in gap between normal optical waveguide chip 4 and lithium niobate fiber waveguide chip 3, splash into ultra-violet curing glue, until ultra-violet curing glue by after the gap uniform filling between normal optical waveguide chip 4 and lithium niobate fiber waveguide chip 3, with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing;
4) with accurate sextuple displacement platform, output optical fibre module and normal optical waveguide chip 4 are clamped, make the input end of output optical fibre module and the output terminal end face of normal optical waveguide chip 4 parallel, make the waveguiding structure on normal optical waveguide chip 4 axially relative with the output optical fibre 6 in output optical fibre module simultaneously;
Adopt the luminous power of light power meter monitoring output optical fibre 6 outputs, simultaneously, relative position between regulation output optic module and normal optical waveguide chip 4, after output optical fibre 6 and waveguiding structure are aimed at completely, in gap between output optical fibre module and normal optical waveguide chip 4, splash into ultra-violet curing glue, until ultra-violet curing glue, by after the gap uniform filling between output optical fibre module and normal optical waveguide chip 4, with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing.
Further, the structure plane at the waveguiding structure place on described lithium niobate fiber waveguide chip 3 forms first wave guide face, and the structure plane at the waveguiding structure place on described normal optical waveguide chip 4 forms Second Wave guide face; Step 3), in, while regulating the relative position between normal optical waveguide chip 4 and lithium niobate fiber waveguide chip 3, the angle between first wave guide face and Second Wave guide face is selected 0~90 ° of scope.
Claims (3)
1. a method that produces arbitrarily angled high-polarization line polarisation in fiber waveguide device, it is characterized in that: adopt end face coupling technique that the input end face coupling of the output end face of lithium niobate fiber waveguide chip (3) and normal optical waveguide chip (4) is bonding, and waveguiding structure on lithium niobate fiber waveguide chip (3) and the waveguiding structure on normal optical waveguide chip (4) are coaxially arranged; Lithium niobate fiber waveguide chip (3) is directly polarized processing to input light as the polarizer, makes to input light and injects in the waveguiding structure of normal optical waveguide chip (4) with the degree of bias that rises more than 80dB; Described lithium niobate fiber waveguide chip (3) adopts annealing proton exchange technique to make;
The structure plane at the waveguiding structure place on lithium niobate fiber waveguide chip (3) forms first wave guide face, the structure plane at the waveguiding structure place on normal optical waveguide chip (4) forms Second Wave guide face, and the angle of first wave guide face and Second Wave guide face is selected 0 ~ 90 ° of scope.
2. a structure that produces arbitrarily angled high-polarization line polarisation in fiber waveguide device, is characterized in that: it is comprised of input optical fibre (1), input optical fibre carrier (2), lithium niobate fiber waveguide chip (3), normal optical waveguide chip (4), output optical fibre carrier (5) and output optical fibre (6);
On input optical fibre carrier (2) and output optical fibre carrier (5), be provided with mounting groove; Input optical fibre (1) is arranged in the mounting groove of input optical fibre carrier (2) and forms input optical fibre module; Output optical fibre (6) is arranged in the mounting groove of output optical fibre carrier (5) and forms output optical fibre module;
Lithium niobate fiber waveguide chip (3) one end is connected with input optical fibre module end face, lithium niobate fiber waveguide chip (3) other end is connected with one end end face of normal optical waveguide chip (4), and normal optical waveguide chip (4) other end is connected with output optical fibre module end face; Waveguiding structure on input optical fibre (1), lithium niobate fiber waveguide chip (3), the waveguiding structure on normal optical waveguide chip (4) and output optical fibre (6) four coaxially arrange;
Described lithium niobate fiber waveguide chip (3) adopts annealing proton exchange technique to make;
The structure plane at the waveguiding structure place on described lithium niobate fiber waveguide chip (3) forms first wave guide face, the structure plane at the waveguiding structure place on described normal optical waveguide chip (4) forms Second Wave guide face, and the angle between first wave guide face and Second Wave guide face is selected 0 ~ 90 ° of scope.
3. a method for making that produces the structure of arbitrarily angled high-polarization line polarisation in fiber waveguide device, is characterized in that:
1) prepare input optical fibre module, output optical fibre module, lithium niobate fiber waveguide chip (3), normal optical waveguide chip (4) standby;
2) with accurate sextuple displacement platform, input optical fibre module and lithium niobate fiber waveguide chip (3) are clamped, make the output terminal of input optical fibre module parallel with the input end end face of lithium niobate fiber waveguide chip (3), make the input optical fibre (1) in input optical fibre module axially relative with the waveguiding structure on lithium niobate fiber waveguide chip (3) simultaneously;
Adopt the luminous power of light power meter monitoring lithium niobate fiber waveguide chip (3) output, simultaneously, regulate the relative position between input optical fibre module and lithium niobate fiber waveguide chip (3), after optical fiber to be entered (1) and waveguiding structure are aimed at completely, in gap between input optical fibre module and lithium niobate fiber waveguide chip (3), splash into ultra-violet curing glue, until ultra-violet curing glue by after the gap uniform filling between input optical fibre module and lithium niobate fiber waveguide chip (3), with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing;
3) adopt accurate sextuple displacement platform that normal optical waveguide chip (4) and lithium niobate fiber waveguide chip (3) are clamped, make the input end of normal optical waveguide chip (4) parallel with the output terminal end face of lithium niobate fiber waveguide chip (3), make the waveguiding structure on normal optical waveguide chip (4) axially relative with the waveguiding structure on lithium niobate fiber waveguide chip (3) simultaneously;
Adopt the luminous power of light power meter monitoring normal optical waveguide chip (4) output, simultaneously, regulate the relative position between normal optical waveguide chip (4) and lithium niobate fiber waveguide chip (3), after the waveguiding structure on normal optical waveguide chip (4) and lithium niobate fiber waveguide chip (3) is aimed at completely, in gap between normal optical waveguide chip (4) and lithium niobate fiber waveguide chip (3), splash into ultra-violet curing glue, until ultra-violet curing glue by after the gap uniform filling between normal optical waveguide chip (4) and lithium niobate fiber waveguide chip (3), with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing,
4) with accurate sextuple displacement platform, output optical fibre module and normal optical waveguide chip (4) are clamped, make the input end of output optical fibre module parallel with the output terminal end face of normal optical waveguide chip (4), make the waveguiding structure on normal optical waveguide chip (4) axially relative with the output optical fibre (6) in output optical fibre module simultaneously;
Adopt the luminous power of light power meter monitoring output optical fibre (6) output, simultaneously, relative position between regulation output optic module and normal optical waveguide chip (4), after output optical fibre (6) and waveguiding structure are aimed at completely, in gap between output optical fibre module and normal optical waveguide chip (4), splash into ultra-violet curing glue, until ultra-violet curing glue by after the gap uniform filling between output optical fibre module and normal optical waveguide chip (4), with LED ultraviolet light, carry out irradiation, make ultra-violet curing glue completely curing;
The structure plane at the waveguiding structure place on described lithium niobate fiber waveguide chip (3) forms first wave guide face, and the structure plane at the waveguiding structure place on described normal optical waveguide chip (4) forms Second Wave guide face;
In step 3), while regulating the relative position between normal optical waveguide chip (4) and lithium niobate fiber waveguide chip (3), the angle between first wave guide face and Second Wave guide face is selected 0 ~ 90 ° of scope.
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CN112525486A (en) * | 2019-12-27 | 2021-03-19 | 北京世维通科技股份有限公司 | Polarizer straight waveguide tail fiber polarization crosstalk test system |
CN112965270B (en) * | 2021-02-05 | 2023-05-16 | 中国电子科技集团公司第四十四研究所 | Lithium niobate thin film double-Y branch optical waveguide modulator adopting curve optical waveguide connection |
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Effective date of registration: 20231207 Address after: No.23 Xiyong Avenue, Shapingba District, Chongqing 401332 Patentee after: CETC Chip Technology (Group) Co.,Ltd. Address before: 400060 Chongqing Nanping Nan'an District No. 14 Huayuan Road 44 Patentee before: CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION NO.44 Research Institute |