CN111158084A - Manufacturing method of ion-exchange glass-based surface waveguide spot size converter - Google Patents
Manufacturing method of ion-exchange glass-based surface waveguide spot size converter Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
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Abstract
The invention discloses a method for manufacturing an ion exchange glass-based surface waveguide spot size converter, which comprises two links: manufacturing a strip-shaped ion doping area (4) on the surface of a glass substrate (1) by using an ion exchange method for a first ring section; the second step is that the glass substrate (1) is vertically placed on a horizontal hot plate (5) for ion diffusion with gradient temperature. The glass substrate (1) with the strip-shaped ion doping area (4) on the surface is vertically placed on a horizontal hot plate (5) for gradient temperature ion diffusion, the temperature gradient in the length direction of the strip-shaped ion doping area (4) in the glass substrate (1) is utilized to generate the gradient of the diffusion rate of the doped ions in the length direction of the strip-shaped ion doping area (4) in the glass substrate (1), and the strip-shaped ion doping area (4) is changed into a conical ion doping area (6). The size of the cross section of the conical ion doping area (6) is improved in the two axial directions, so that the matching degree of the shape and the size of the cross section of the mode spot converter and the optical fiber core is improved, and the insertion loss of the device is reduced.
Description
Technical Field
The invention relates to the field of optical devices and integrated optics, in particular to a manufacturing method of an ion-exchange glass-based surface waveguide spot size converter.
Background
In 1969, s.e.miller proposed the concept of integrated optics, which was based on the idea of fabricating optical waveguides on the surface of the same substrate (or chip) and then implementing integrated fabrication of various devices such as light sources, couplers, filters, etc. By such integration, miniaturization, weight reduction, and stabilization of the optical system are achieved, and device performance is improved.
Integrated optical devices fabricated on glass substrates (1) using ion exchange technology have received considerable attention from industry and researchers. Glass-based integrated optical waveguide devices based on ion exchange technology have several excellent properties, including: low transmission loss, easy doping of high-concentration rare earth ions, matching with the optical characteristics of the optical fiber, low coupling loss, good environmental stability, easy integration, low cost and the like. In 1972, the first article on ion exchange fabrication of optical waveguides was published, and the initiation of research on glass-based integrated optical devices was marked. Since then, research institutions in various countries have invested a great deal of manpower and financial resources in developing glass-based integrated optical devices. Up to now, integrated optical devices on several glass substrates (1) have been mass-produced and serialized, successfully used in optical communication, optical interconnection and optical sensing networks, and have shown great competitiveness.
The spot size converter is used for realizing the change of the spot size of the optical waveguide in the integrated optical circuit, is usually used for matching the spot size of the optical waveguide with different core diameters, reduces the insertion loss generated by the mismatch of the core diameters, and has important application value in the integrated optical circuit.
The existing structure for manufacturing a spot size converter on a glass substrate (1) based on an ion exchange technology is shown in fig. 1, wherein a wedge-shaped ion doped region (3) is arranged on the surface of the glass substrate (1), and spot size conversion is realized by using the change of the cross section size of the wedge-shaped ion doped region (3). This is achieved byThe manufacturing process of the spot-size converter is shown in fig. 2, and mainly comprises three steps: the first step is photoetching, a mask (2) used for optical waveguide is deposited on the surface of a glass substrate (1), and part of the mask (2) on the glass substrate (1) is removed through photoetching and corrosion to form a wedge-shaped hollow structure as a wedge-shaped ion exchange window; the second step is ion exchange, the glass substrate (1) with the mask (2) is placed in the high-temperature fused salt containing the doping ions for ion exchange, and the doping ions in the fused salt containing the doping ions pass through an ion exchange window formed by the mask (2) and Na in the glass substrate (1)+And exchanging, and enabling the doped ions to enter the surface of the glass substrate (1) and diffuse to form a wedge-shaped ion doped region (3). As the ion exchange window formed on the surface of the glass substrate (1) by the mask (2) is wedge-shaped, the width of the wedge-shaped ion doping area (3) on the surface of the glass substrate (1) is also in a shape consistent with the ion exchange window, and the wedge-shaped distribution characteristic is shown in the plane of the glass substrate (1): the wedge-shaped ion doping region (3) has a small width at a portion where the ion exchange window has a small width, and the wedge-shaped ion doping region (3) has a large width at a portion where the ion exchange window has a large width. And thirdly, removing the mask (2), and removing the mask (2) on the surface of the glass substrate (1) by adopting a chemical corrosion method to obtain the spot size converter chip.
However, the performance of such spot-size converters is currently inadequate for many important applications. According to the foregoing, the spot size converter manufactured by the conventional method can realize the spot size conversion of the spot size in the plane direction of the glass substrate (1). However, in the case of a glass substrate (1) having ion exchange windows of different widths on the surface thereof, the thickness of the wedge-shaped ion-doped region (3) does not vary much, that is, the size of the spot of the optical waveguide hardly varies in the direction perpendicular to the plane of the glass substrate (1). Therefore, the spot size converter has a limited application in integrated optical devices, such as devices for coupling between single mode and multimode optical fibers, with insertion loss above 7.0dB, due to the large difference in the shape of the waveguide cross-section between the two axes.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a method for manufacturing an ion-exchange glass-based surface waveguide spot size converter, which realizes the manufacture of the spot size converter by vertically placing a glass-based ion-exchange strip optical waveguide on a horizontal hot plate (5) for gradient temperature ion diffusion.
The technical scheme adopted by the invention for solving the technical problem comprises two links: manufacturing a strip-shaped ion doping area (4) on the surface of a glass substrate (1) by using an ion exchange method for a first ring section; the second link is to vertically place the glass substrate (1) on a horizontal hot plate (5) for gradient temperature ion diffusion. This method is characterized in that: the method comprises the steps of vertically placing a glass substrate (1) with a strip-shaped ion doping area (4) on the surface on a horizontal hot plate (5) for gradient temperature ion diffusion, utilizing the temperature gradient in the length direction of the strip-shaped ion doping area (4) in the glass substrate (1), enabling the length direction of the strip-shaped ion doping area (4) in the glass substrate (1) to generate a gradient of the diffusion rate of doped ions, increasing the cross section size of the strip-shaped ion doping area (4) on the surface of the glass substrate (1) at one end close to the hot plate (5), and changing the strip-shaped ion doping area (4) into a conical ion doping area (6).
The first step is to make the strip-shaped ion doping area (4) by ion exchange method, and the process is shown in figure 3. The method comprises the following steps of manufacturing a strip-shaped ion doping area (4) on the surface of a glass substrate (1): firstly, photoetching, namely depositing a mask (2) on the surface of a glass substrate (1), and removing part of the mask (2) on the surface of the glass substrate (1) through photoetching and corrosion processes to form a strip-shaped hollow structure serving as a strip-shaped ion exchange window; the second step is that ion exchange forms a strip-shaped ion doping area (4) on the surface of the glass substrate (1), the glass substrate (1) with an ion exchange window is placed in the high-temperature fused salt containing the doping ions for ion exchange, and the doping ions in the fused salt containing the doping ions pass through the ion exchange window formed by the mask (2) on the surface of the glass substrate (1) and Na in the glass substrate (1)+And exchanging, wherein the doped ions enter the surface of the glass substrate (1) and are diffused on the surface layer of the glass substrate (1) to form a strip-shaped ion doped region (4). The third step is to remove the mask (2) and remove the mask on the surface of the glass substrate (1) by adopting a chemical corrosion method(2)。
The second step is to perform gradient temperature ion diffusion on the glass substrate (1), and the process is shown in FIG. 4. The figure shows that a strip-shaped ion doping area (4) formed on the surface of a glass substrate (1) after ion exchange is made into a conical ion doping area (6) by a gradient temperature ion diffusion method. The hot plate (5) is horizontally arranged, the hot plate (5) is heated to the diffusion temperature and the temperature is kept constant, the glass substrate (1) is vertically arranged on the hot plate (5), and the strip-shaped ion doping area (4) in the glass substrate (1) is perpendicular to the plane direction of the hot plate (5). Because the lower end of the glass substrate (1) is in contact with the hot plate (5), the temperature is higher, and the upper end of the glass substrate (1) is positioned in the air, the temperature is lower, and a temperature gradient is formed along the length direction of the strip-shaped ion doping area (4). As the diffusion speed of the doping ions in the glass increases along with the increase of the temperature, the diffusion coefficient of the doping ions is graded along the length direction of the strip-shaped ion doping area (4): the depth and width of the ion doped region at the lower end of the glass substrate (1) are increased greatly, while the depth and width of the ion doped region at the upper end of the glass substrate (1) are increased slightly, so that a gradient of the cross-sectional dimension of the ion doped region is formed between the upper end and the lower end of the glass substrate (1). After the ion diffusion at the gradient temperature is finished, the strip-shaped ion doping area (4) on the surface of the glass substrate (1) is changed into a conical ion doping area (6), and the structure of the ion doping area is shown in figure 5.
The material of the glass substrate (1) is silicate glass, phosphate glass or borate glass.
The doped ion is K+，Ag+，Cu+，Cs+，Tl+，Li+。
The hot plate (5) is a metal plate which is horizontally arranged and has a flat surface.
Compared with the prior art for manufacturing the ion exchange glass-based surface waveguide spot size converter, the invention has the beneficial effects that: a conical ion doping area (6) is formed in the manufactured spot size converter, the consistency of the cross section size of the ion doping area in two axial directions is obviously improved, so that the matching degree of the shape and the size of the spot size converter and the cross section of the optical fiber core is improved, and the insertion loss of a device is reduced.
Drawings
FIG. 1 is a schematic diagram of a prior art fabricated glass-based surface waveguide speckle converter.
FIG. 2 is a schematic diagram of a prior art process for making a glass-based surface waveguide spot-size converter.
FIG. 3 is a schematic diagram of a process for making a glass-based surface strip optical waveguide.
FIG. 4 is a schematic diagram of a process for fabricating a glass-based surface waveguide spot size converter according to the method of the present invention.
FIG. 5 is a schematic diagram of a glass-based surface waveguide speckle converter made by the method of the present invention.
In the figure: 1. a glass substrate; 2. masking; 3. a wedge-shaped ion doped region; 4. a strip-shaped ion doping region; 5. a hot plate; 6. a tapered ion doped region.
Detailed Description
The invention relates to a method for manufacturing an ion-exchange glass-based surface waveguide spot size converter, which respectively uses Ag+/Na+Ion-exchange glass-based surface waveguide speckle converter, Tl+/Na+Ion-exchange glass-based surface waveguide speckle converter, K+/Na+Ion-exchange glass-based surface waveguide spot size converter, Li+/Na+The ion-exchange glass-based surface waveguide spot size converter is taken as an example, and the specific implementation of the ion-exchange glass-based surface waveguide spot size converter is described.
Example 1: ag+/Na+Ion-exchange glass-based surface waveguide spot size converter
Required equipment and materials: the device comprises a BK7 glass substrate (1) with double-sided polishing function, a cleaning device, a washing liquid, a sputtering coating device, a strip waveguide mask plate (with the line width of 3-5 microns), a photoetching device, a corrosion device, acetone, a beaker, a high-temperature furnace, a chip end face grinding and polishing device, a quartz crucible, a quartz basket, a hot plate (5), and Ag doped ions+The fused salt containing doped ions is Ca (NO)3)2、NaNO3And AgNO3 (the molar ratio of the three is 49:49: 2).
The method mainly comprises the following steps:
(A) manufacturing method of strip-shaped ion doped region (4) on surface of glass substrate (1)
The method mainly comprises the following steps: cleaning a glass substrate (1); sputtering an aluminum film with the thickness of 100-300 nm on the surface of the glass substrate (1) to be used as a mask (2); the strip waveguide pattern on the strip waveguide mask plate is transferred to an aluminum film on the surface of the glass substrate (1) through gluing, curing, photoetching, corrosion and photoresist removing operations, and a strip ion exchange window with the width of 3-5 microns is formed on the aluminum film.
Mixing Ca (NO)3)2、NaNO3And AgNO3Putting the mixed molten salt into a quartz crucible, putting the quartz crucible into a high-temperature furnace with the temperature of 300 ℃, and preserving the heat for 2 hours until the molten salt is completely melted; and (3) placing the glass substrate (1) with the ion exchange window on the surface after photoetching into a quartz basket, immersing the quartz basket into the molten salt in the quartz crucible, preserving the temperature for 10-30 minutes, taking out the glass substrate (1), cooling, and removing the mask (2) by using an acid corrosion method for cleaning.
In the process, Ag in the molten salt is mixed+Ion exchange window formed on the surface of the glass substrate (1) through the mask (2) and Na in the glass substrate (1)+Performing ion exchange to mix Ag in molten salt+Enters the glass substrate (1) and forms a strip-shaped ion doped region (4) in the glass substrate (1), and meanwhile, Na in the glass substrate (1)+And entering molten salt.
(B) Ion diffusion of glass substrate (1) on hot plate (5) at gradient temperature
The hot plate (5) is placed in the air and horizontally, the hot plate (5) is heated to 300 ℃, the temperature is kept constant, and the glass substrate (1) is placed on the hot plate (5) for gradient temperature ion diffusion. The glass substrate (1) is vertically arranged on the hot plate (5), and the strip-shaped ion doping area (4) in the glass substrate (1) is vertical to the plane direction of the hot plate (5). Gradient temperature ion diffusion time is 2-5 hours.
In the process, the temperature of the lower end of the glass substrate (1) is high, and Ag in the strip-shaped ion doping area (4)+Fast diffusion of Ag+The cross section of the doped region is large in size; the upper end of the glass substrate (1) has low temperature, and Ag in the strip-shaped ion doping area (4)+Slow diffusion, Ag+Doped region cross section rulerCun is small; the strip-shaped ion doping area (4) becomes a conical ion doping area (5).
And finally, grinding and polishing the two end faces of the glass substrate (1).
Through optimizing the manufacturing process parameters, when the device is used for realizing the coupling between the single-mode optical fiber and the multimode optical fiber, the insertion loss is less than 3.0 dB.
Example 2: tl+/Na+Ion-exchange glass-based surface waveguide spot size converter
Required equipment and materials: the device comprises a BK7 glass substrate (1) with double-sided polishing function, cleaning equipment, washing liquor, sputtering coating equipment, a strip waveguide mask plate (with the line width of 3-5 microns), photoetching equipment, corrosion equipment, acetone, a beaker, a high-temperature furnace, chip end face grinding and polishing equipment, a quartz crucible, a quartz basket, a hot plate (5), and doped ions of Tl+The molten salt containing doped ions is KNO3、NaNO3And TlNO3 (the molar ratio of the three is 40:40: 20).
The method mainly comprises the following steps:
(A) manufacturing method of strip-shaped ion doped region (4) on surface of glass substrate (1)
The method mainly comprises the following steps: cleaning a glass substrate (1); sputtering an aluminum film with the thickness of 100-300 nm on the surface of the glass substrate (1) to be used as a mask (2); the strip waveguide pattern on the strip waveguide mask plate is transferred to an aluminum film on the surface of the glass substrate (1) through gluing, curing, photoetching, corrosion and photoresist removing operations, and a strip ion exchange window with the width of 3-5 microns is formed on the aluminum film.
Mixing KNO3、NaNO3Putting the mixed molten salt with TlNO3 into a quartz crucible, putting the quartz crucible into a high-temperature furnace with the temperature of 530 ℃ and preserving the heat for 2 hours until the molten salt is completely melted; and (3) placing the glass substrate (1) with the ion exchange window on the surface after photoetching into a quartz basket, immersing the quartz basket into the molten salt in the quartz crucible, keeping the temperature for 100-180 minutes, taking out the glass substrate (1), cooling, and removing the mask (2) by using an acid corrosion method for cleaning.
In the process, Tl in the molten salt is mixed+Ion exchange window formed on the surface of the glass substrate (1) through the mask (2) and the glass substrate (1)Na+Ion exchange is carried out to mix Tl in the molten salt+Enters the glass substrate (1) and forms a strip-shaped ion doped region (4) in the glass substrate (1), and meanwhile, Na in the glass substrate (1)+And entering molten salt.
(B) Ion diffusion of glass substrate (1) on hot plate (5) at gradient temperature
The hot plate (5) is placed in the air and horizontally, the hot plate (5) is heated to 520 ℃ and 530 ℃, the temperature is kept constant, and the glass substrate (1) is placed on the hot plate (5) for gradient temperature ion diffusion. The glass substrate (1) is vertically arranged on the hot plate (5), and the strip-shaped ion doping area (4) in the glass substrate (1) is vertical to the plane direction of the hot plate (5). Gradient temperature ion diffusion time is 5-8 hours.
In the process, the temperature of the lower end of the glass substrate (1) is high, and Tl in the strip-shaped ion doping area (4)+Rapid diffusion, Tl+The cross section of the doped region is large in size; the upper end of the glass substrate (1) has low temperature, and Tl in the strip-shaped ion doping area (4)+Slow diffusion, Tl+The cross section of the doped region is small in size; the strip-shaped ion doping area (4) becomes a conical ion doping area (5).
And finally, grinding and polishing the two end faces of the glass substrate (1).
Through optimizing the manufacturing process parameters, when the device is used for realizing the coupling between the single-mode optical fiber and the multimode optical fiber, the insertion loss is less than 3.0 dB.
Example 3: k+/Na+Ion-exchange glass-based surface waveguide spot size converter
Required equipment and materials: the device comprises a BK7 glass substrate (1) with double-sided polishing function, a cleaning device, a washing liquid, a sputtering coating device, a strip waveguide mask plate (with the line width of 3-5 microns), a photoetching device, a corrosion device, acetone, a beaker, a high-temperature furnace, a chip end face grinding and polishing device, a quartz crucible, a quartz basket, a hot plate (5), and K as a doping ion+The molten salt containing doped ions is pure KNO3And (3) melting salt.
The method mainly comprises the following steps:
(A) manufacturing method of strip-shaped ion doped region (4) on surface of glass substrate (1)
The method mainly comprises the following steps: cleaning a glass substrate (1); sputtering an aluminum film with the thickness of 100-300 nm on the surface of the glass substrate (1) to be used as a mask (2); the strip waveguide pattern on the strip waveguide mask plate is transferred to an aluminum film on the surface of the glass substrate (1) through gluing, curing, photoetching, corrosion and photoresist removing operations, and a strip ion exchange window with the width of 3-5 microns is formed on the aluminum film.
Pure KNO3Putting the fused salt into a quartz crucible, putting the quartz crucible into a high-temperature furnace with the temperature of 370 ℃ and preserving the heat for 3 hours until the fused salt is completely melted; and (3) placing the glass substrate (1) with the ion exchange window on the surface after photoetching into a quartz basket, immersing the quartz basket into the fused salt in the quartz crucible, keeping the temperature for 200-400 minutes, taking out the glass substrate (1), cooling, and removing the mask (2) by using an acid corrosion method for cleaning.
In the process, K in the molten salt is mixed+Ion exchange window formed on the surface of the glass substrate (1) through the mask (2) and Na in the glass substrate (1)+Performing ion exchange to mix K in molten salt+Enters the glass substrate (1) and forms a strip-shaped ion doped region (4) in the glass substrate (1), and meanwhile, Na in the glass substrate (1)+And entering molten salt.
(B) Ion diffusion of glass substrate (1) on hot plate (5) at gradient temperature
The hot plate (5) is placed in the air and horizontally, the hot plate (5) is heated to 370 ℃ and 400 ℃, the temperature is kept constant, and the glass substrate (1) is placed on the hot plate (5) for gradient temperature ion diffusion. The glass substrate (1) is vertically arranged on the hot plate (5), and the strip-shaped ion doping area (4) in the glass substrate (1) is vertical to the plane direction of the hot plate (5). Gradient temperature ion diffusion time is 5-8 hours.
In the process, the temperature of the lower end of the glass substrate (1) is high, and K in the strip-shaped ion doping area (4)+Fast diffusion, K+The cross section of the doped region is large in size; the temperature of the upper end of the glass substrate (1) is low, and K in the strip-shaped ion doping area (4)+Slow diffusion, K+The cross section of the doped region is small in size; the strip-shaped ion doping area (4) becomes a conical ion doping area (5).
And finally, grinding and polishing the two end faces of the glass substrate (1).
Through optimizing the manufacturing process parameters, when the device is used for realizing the coupling between the single-mode optical fiber and the multimode optical fiber, the insertion loss is less than 3.0 dB.
Example 4: li+/Na+Ion-exchange glass-based surface waveguide spot size converter
Required equipment and materials: a soda-lime glass substrate (1) with double-side polishing, a cleaning device, a washing liquid, a sputtering coating device, a strip waveguide mask plate (the line width is 3-5 microns), a photoetching device, an etching device, acetone, a beaker, a high-temperature furnace, a chip end face grinding and polishing device, a quartz crucible, a quartz basket, a hot plate (5), and doped ions of Li+The molten salt containing doped ions is Li2SO4And K2SO4Mixed molten salt (molar ratio of both 45: 55).
The method mainly comprises the following steps:
(A) manufacturing method of strip-shaped ion doped region (4) on surface of glass substrate (1)
The method mainly comprises the following steps: cleaning a glass substrate (1); sputtering an aluminum film with the thickness of 100-300 nm on the surface of the glass substrate (1) to be used as a mask (2); the strip waveguide pattern on the strip waveguide mask plate is transferred to an aluminum film on the surface of the glass substrate (1) through gluing, curing, photoetching, corrosion and photoresist removing operations, and a strip ion exchange window with the width of 3-5 microns is formed on the aluminum film.
Mixing Li2SO4And K2SO4Putting the mixed molten salt into a quartz crucible, putting the quartz crucible into a high-temperature furnace with the temperature of 530 ℃ and preserving the heat for 2 hours until the molten salt is completely melted; and (3) placing the glass substrate (1) with the ion exchange window on the surface after photoetching into a quartz basket, immersing the quartz basket into the molten salt in the quartz crucible, keeping the temperature for 60-90 minutes, taking out the glass substrate (1), cooling, and removing the mask (2) by using an acid corrosion method for cleaning.
In this process, Li in the molten salt is mixed+Ion exchange window formed on the surface of the glass substrate (1) through the mask (2) and Na in the glass substrate (1)+Ion exchange is carried out to mix Li in the molten salt+Enters the glass substrate (1) and forms a strip-shaped ion doped region (4) in the glass substrate (1) as well asIn the glass substrate (1), Na+And entering molten salt.
(B) Ion diffusion of glass substrate (1) on hot plate (5) at gradient temperature
The hot plate (5) is placed in the air and horizontally, the hot plate (5) is heated to 530 ℃, the temperature is kept constant, and the glass substrate (1) is placed on the hot plate (5) for gradient temperature ion diffusion. The glass substrate (1) is vertically arranged on the hot plate (5), and the strip-shaped ion doping area (4) in the glass substrate (1) is vertical to the plane direction of the hot plate (5). Gradient temperature ion diffusion time is 8-10 hours.
In the process, the temperature of the lower end of the glass substrate (1) is high, and Li in the strip-shaped ion doping region (4)+Fast diffusion of Li+The cross section of the doped region is large in size; the upper end of the glass substrate (1) has low temperature, and Li in the strip-shaped ion doping area (4)+Slow diffusion, Li+The cross section of the doped region is small in size; the strip-shaped ion doping area (4) becomes a conical ion doping area (5).
And finally, grinding and polishing the two end faces of the glass substrate (1).
Through optimizing the manufacturing process parameters, when the device is used for realizing the coupling between the single-mode optical fiber and the multimode optical fiber, the insertion loss is less than 3.0 dB.
The foregoing detailed description is intended to illustrate and not limit the invention, which is intended to be within the spirit and scope of the appended claims, and any changes and modifications that fall within the true spirit and scope of the invention are intended to be covered by the following claims.
Claims (4)
1. A method for manufacturing an ion-exchange glass-based surface waveguide spot size converter, the method comprising two steps: manufacturing a strip-shaped ion doping area (4) on the surface of a glass substrate (1) by using an ion exchange method for a first ring section; the second step is that the glass substrate (1) is vertically placed on a horizontal hot plate (5) for ion diffusion with gradient temperature. This method is characterized in that: the method comprises the steps of vertically placing a glass substrate (1) with a strip-shaped ion doping area (4) on the surface on a horizontal hot plate (5) for gradient temperature ion diffusion, utilizing the temperature gradient in the length direction of the strip-shaped ion doping area (4) in the glass substrate (1), enabling the length direction of the strip-shaped ion doping area (4) in the glass substrate (1) to generate a gradient of the diffusion rate of doped ions, increasing the cross section size of the strip-shaped ion doping area (4) on the surface of the glass substrate (1) at one end close to the hot plate (5), and changing the strip-shaped ion doping area (4) into a conical ion doping area (6).
2. The method of claim 1, wherein the method comprises: the glass substrate (1) is made of silicate glass, borosilicate glass, phosphate glass or borate glass.
3. The method of claim 1, wherein the method comprises: the doped ions in the strip-shaped ion doped region (4) are K+，Ag+，Cu+，Cs+，Tl+，Li+。
4. The method of claim 1, wherein the method comprises: the hot plate (5) is a metal plate which is horizontally arranged and has a flat surface.
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| CN115113329A (en) * | 2022-08-29 | 2022-09-27 | 上海羲禾科技有限公司 | Optical waveguide mode spot conversion device and manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP0302043A2 (en) * | 1987-07-28 | 1989-02-01 | Polaroid Corporation | Process of tapering waveguides |
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| CN104656187A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide chip integrated with magneto-optical function |
| CN106291814A (en) * | 2015-05-12 | 2017-01-04 | 中兴通讯股份有限公司 | A kind of fiber waveguide manufacture method and fiber waveguide |
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2020
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| EP0302043A2 (en) * | 1987-07-28 | 1989-02-01 | Polaroid Corporation | Process of tapering waveguides |
| CN102645701A (en) * | 2012-05-04 | 2012-08-22 | 上海光芯集成光学股份有限公司 | Method for producing optical waveguide on surface of glass substrate by utilizing ion exchange method |
| CN104656187A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide chip integrated with magneto-optical function |
| CN106291814A (en) * | 2015-05-12 | 2017-01-04 | 中兴通讯股份有限公司 | A kind of fiber waveguide manufacture method and fiber waveguide |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115113329A (en) * | 2022-08-29 | 2022-09-27 | 上海羲禾科技有限公司 | Optical waveguide mode spot conversion device and manufacturing method thereof |
| CN115113329B (en) * | 2022-08-29 | 2022-11-08 | 上海羲禾科技有限公司 | Optical waveguide mode spot conversion device and manufacturing method thereof |
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