CN104656187A - Glass-based ion exchange optical waveguide chip integrated with magneto-optical function - Google Patents
Glass-based ion exchange optical waveguide chip integrated with magneto-optical function Download PDFInfo
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- CN104656187A CN104656187A CN201510062105.4A CN201510062105A CN104656187A CN 104656187 A CN104656187 A CN 104656187A CN 201510062105 A CN201510062105 A CN 201510062105A CN 104656187 A CN104656187 A CN 104656187A
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- magneto
- glass
- diffusion region
- ion diffusion
- optical
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12183—Ion-exchange
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- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a glass-based ion exchange optical waveguide chip integrated with a magneto-optical function. On the surface of glass, a region needing the magneto-optical function is provided with a ferromagnetic metal nanoparticle-doped region; by an ion exchange method, a strip-shaped ion diffusion region is formed in the glass, and a strip-shaped ion diffusion region with the magneto-optical function is formed in the ferromagnetic metal nanoparticle-doped region; the refractive index of the strip-shaped ion diffusion region is higher than that of the glass; the refractive index of the strip-shaped ion diffusion region with the magneto-optical function is higher than that of the ferromagnetic metal nanoparticle-doped region; the strip-shaped ion diffusion region and the strip-shaped ion diffusion region with the magneto-optical function together form a core part of a strip-shaped optical waveguide. According to the technical scheme, a magneto-optic waveguide is manufactured in the region of the optical waveguide chip, and the magneto-optical function is integrated on the glass; the manufacturing process is simple; the coupling efficiency is high; a new structure is provided for integration of the magneto-optical function on a glass-based integrated optical chip, so that the design of the glass-based integrated optical chip is more flexible.
Description
Technical field
The present invention relates to integrated optical device, be specifically related to a kind of glass-based ion exchange optical waveguide chip of integrated magneto-optical function.
Background technology
Glass is a kind of high-quality optical material, not only for the structure of traditional optical instrument, is also a kind of important integrated optical substrate material.Glass-based fiber waveguide device has that cost is low, technique is simple, loss is low, polarization correlated little, make tolerance large, the distinguishing feature such as to can be mass.From 1972, since first section of paper publishing about glass-based fiber waveguide device, chemcor glass based optical waveguide technology is subject to the attention of researcher and industrial community always
Glass-based fiber waveguide device generally adopts ion exchange process to make.In ion exchange process, monovalent cation (normally sodion) in glass substrate and Doped ions (such as the silver ion from fused salt or metal film, potassium ion, copper ion, cesium ion, thallium ion) exchange, Doped ions enters glass from fused salt, and forms ion diffusion region on a glass substrate, and this ion diffusion region has higher refractive index, form the core of waveguide, jointly form optical waveguide with glass substrate.
Be subject to from magneto optic isolator and the demand pull of applying based on the multiple sensors of magnetic field sensing principle, on integrated optics chip, magneto-optic function integrated becomes an emerging study hotspot, and therefore the integrated-type magnetic-optic devices on glass substrate also receives very big concern.It is the basis building magneto-optic function i ntegration that magneto-optic optical waveguide makes, and is also to realize the key problem that magneto-optic function i ntegration must solve.
The making of glass-based magneto-optic waveguide sheet magneto-optic waveguide mainly contains two approach.Article 1, approach on magneto-optic glass substrate 1, makes high-index regions 2 by ion exchange process, forms waveguide (as shown in Figure 1).A problem of this approach can only realize magneto-optic function on whole glass substrate 1, and the region be difficult to glass substrate 1 is selected realizes magneto-optic function, and in chip of light waveguide design process, dirigibility is not strong.
Two approach glass substrate realizing magneto-optic waveguide making first on glass substrate 3, form bar shaped ion diffusion region 4, then magneto-optic material layer 5(such as yig crystal is introduced in side, bar shaped ion diffusion region 4), namely realize magneto-optic function by making composite optical wave guide.The structure of this optical waveguide as shown in Figure 2.The magneto-optic waveguide that this approach makes solves the flexibility problem of device layout, but, this approach still faces two challenges: one, in order to realize nonreciprocal phase shift larger in waveguide, requires mating between the optical parametric of magneto-optic material layer 5 with glass substrate 3 optical parametric.Its two, need to solve the technical matters combined between magneto-optic material layer 5 and glass substrate 3.
Summary of the invention
The object of the present invention is to provide a kind of glass-based ion exchange optical waveguide chip of integrated magneto-optical function.
The technical solution adopted for the present invention to solve the technical problems is:
Glass substrate surface of the present invention need the region of magneto-optic function have the nano-particle doped district of feeromagnetic metal; In glass substrate, form bar shaped ion diffusion region by ion-exchange process, in the nano-particle doped district of feeromagnetic metal, form the bar shaped ion diffusion region with magneto-optic function; The refractive index of bar shaped ion diffusion region is higher than the refractive index of glass substrate, have the refractive index of refractive index higher than the nano-particle doped district of feeromagnetic metal of the bar shaped ion diffusion region of magneto-optic function, bar shaped ion diffusion region forms the core of strip optical waveguide jointly with the bar shaped ion diffusion region with magneto-optic function.
Described glass substrate is silicate glass, or borate glass.
Feeromagnetic metal in the nano-particle doped layer of described feeromagnetic metal is Fe, Co or Ni.
The ion of described formation bar shaped ion diffusion region is K
+, Ag
+, Tl
+, Cs
+, Li
+or Rb
+ion.
The beneficial effect that the present invention has is:
The present invention can realize the making of magneto-optic waveguide by the desired zone on chip of light waveguide, realize the integrated of magneto-optic function on glass substrate, and it is simple to have manufacture craft, the distinguishing features such as coupling efficiency is high, providing new structure for realizing the integrated of the magneto-optic function of glass-based integrated optics chip, making the design of glass-based integrated optics chip more flexible.
Accompanying drawing explanation
Fig. 1 is the lightguide cross section structural representation adopting ion exchange process to make in magneto-optic glass substrate 1.
Fig. 2 is the composite optical wave guide cross-sectional structure schematic diagram by passing through to introduce magneto-optic material layer 5 making on glass substrate 3.
Fig. 3 is the glass-based ion exchange optical waveguide chip of integrated magneto-optical function of the present invention.
Fig. 4 is the glass-based ion exchange optical waveguide chip manufacturing process schematic diagram of integrated magneto-optical function of the present invention.
In figure: 1, magneto-optic glass substrate, 2, high-index regions, 3, glass substrate, 4, bar shaped ion diffusion region, 5, magneto-optic material layer, 6, the nano-particle doped district of feeromagnetic metal, 7, there is the bar shaped ion diffusion region of magneto-optic function, 8, Cr-Au mask, 9, Al mask.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
As shown in Figure 3, glass substrate 3 of the present invention needs the region of magneto-optic function to have the nano-particle doped district 6 of feeromagnetic metal on the surface; In glass substrate 3, form bar shaped ion diffusion region 4 by ion-exchange process, in the nano-particle doped district 6 of feeromagnetic metal, form the bar shaped ion diffusion region 7 with magneto-optic function; The refractive index of bar shaped ion diffusion region 4 is higher than the refractive index of glass substrate 3, have the refractive index of refractive index higher than the nano-particle doped district 6 of feeromagnetic metal of the bar shaped ion diffusion region 7 of magneto-optic function, bar shaped ion diffusion region 4 forms the core of strip optical waveguide jointly with the bar shaped ion diffusion region 7 with magneto-optic function.
Described glass substrate 3 is silicate glass, or borate glass.
Feeromagnetic metal in the nano-particle doped layer 6 of described feeromagnetic metal is Fe, Co or Ni.
The ion of described formation bar shaped ion diffusion region 4 is K
+, Ag
+, Tl
+, Cs
+, Li
+or Rb
+ion.
The glass-based ion exchange optical waveguide chip of integrated magneto-optical function involved in the present invention, implement as follows (sequence number that English alphabet sequence number corresponds to each figure in Fig. 4):
1. prepare glass substrate 3, prepare the silicate glass substrate (as Fig. 4 steps A) of twin polishing.
2. make mask, adopt the method for thermal evaporation to make Cr-Au mask 8 at glass substrate; Then photoetching obtains the window (as Fig. 4 step B) that ferromagnetic nanoparticles adulterates used on Cr-Au mask 8.
3. ferromagnetic nanoparticles doping, adopts ion exchange process, the glass sheet with mask is put into CoSO
4and NaCl(CoSO
4with the mol ratio 45:55 of NaCl) high temperature (450 ~ 500 DEG C) fused salt mixt in carry out ion-exchange, 10 ~ 30 minutes swap times.Co ion diffuse under high temperature in fused salt enters glass, forms diffusion layer.After annealing under reducing atmosphere, become the nano-particle doped district of feeromagnetic metal, this doped region has higher magneto-optic coefficient (as Fig. 4 step C).
4. adopt the method for chemical corrosion to remove mask, remove Cr-Au mask 8(as Fig. 4 step D).
5. adopt the method for thermal evaporation to make Al mask 9 at glass substrate; Then photoetching obtains K ion-exchange window used (as Fig. 4 step e) on Al mask 9.
6. ion-exchange, adopts ion exchange process, the glass sheet with mask is put into KNO
3ion-exchange is carried out, 1 ~ 20 hour swap time in fused salt.The bar shaped ion diffusion region 4 that ion-exchange is formed in glass substrate 3, forms the bar shaped ion diffusion region 7 with magneto-optic function simultaneously in the nano-particle doped district 6 of feeromagnetic metal; The refractive index of bar shaped ion diffusion region 4 is higher than the refractive index of glass substrate 3, there is the refractive index of refractive index higher than the nano-particle doped district 6 of feeromagnetic metal of the bar shaped ion diffusion region 7 of magneto-optic function, bar shaped ion diffusion region 4 and the core (as Fig. 4 step F) of bar shaped ion diffusion region 7 as strip optical waveguide with magneto-optic function.
7. adopt the method for chemical corrosion to remove Al mask 9(as Fig. 4 step G).
In this glass-based ion exchange optical waveguide chip, due to feeromagnetic metal, nano-particle doped district 6 has magneto-optic function, the bar shaped ion diffusion region 7 with magneto-optic function formed in the nano-particle doped district 6 of feeromagnetic metal also has magneto-optic function, is also the core of optical waveguide simultaneously.
Above-mentioned embodiment is used for explaining and the present invention is described, instead of limits the invention, and in the protection domain of spirit of the present invention and claim, any amendment make the present invention and change, all fall into protection scope of the present invention.
Claims (4)
1. a glass-based ion exchange optical waveguide chip for integrated magneto-optical function, is characterized in that: glass substrate (3) needs the region of magneto-optic function to have the nano-particle doped district of feeromagnetic metal (6) on the surface; In glass substrate (3), form bar shaped ion diffusion region (4) by ion-exchange process, in the nano-particle doped district of feeromagnetic metal (6), form the bar shaped ion diffusion region (7) with magneto-optic function; The refractive index of bar shaped ion diffusion region (4) is higher than the refractive index of glass substrate (3), have the refractive index of refractive index higher than the nano-particle doped district of feeromagnetic metal (6) of the bar shaped ion diffusion region (7) of magneto-optic function, bar shaped ion diffusion region (4) and the bar shaped ion diffusion region (7) with magneto-optic function jointly form the core of strip optical waveguide.
2. the glass-based ion exchange optical waveguide chip of a kind of integrated magneto-optical function according to claim 1, is characterized in that: described glass substrate (3) is silicate glass, or borate glass.
3. the glass-based ion exchange optical waveguide chip of a kind of integrated magneto-optical function according to claim 1, is characterized in that: the feeromagnetic metal in the nano-particle doped layer of described feeromagnetic metal (6) is Fe, Co or Ni.
4. the glass-based ion exchange optical waveguide chip of a kind of integrated magneto-optical function according to claim 1, is characterized in that: the ion of described formation bar shaped ion diffusion region (4) is K
+, Ag
+, Tl
+, Cs
+, Li
+or Rb
+ion.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510062105.4A CN104656187B (en) | 2015-02-06 | 2015-02-06 | A kind of glass-based ion exchange optical waveguide chip of integrated magneto-optical function |
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| CN201510062105.4A CN104656187B (en) | 2015-02-06 | 2015-02-06 | A kind of glass-based ion exchange optical waveguide chip of integrated magneto-optical function |
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| CN104656187A true CN104656187A (en) | 2015-05-27 |
| CN104656187B CN104656187B (en) | 2018-04-20 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643560A (en) * | 2017-10-20 | 2018-01-30 | 河南工业大学 | A kind of method that magneto-optic glass base ion exchange prepares magneto-optic slab guide |
| CN108919524A (en) * | 2018-08-20 | 2018-11-30 | 河南工业大学 | A method of utilizing magnetic Nano material ion exchange single-chip integration magneto-optic waveguide |
| CN111158084A (en) * | 2020-02-08 | 2020-05-15 | 浙江大学深圳研究院 | Manufacturing method of ion-exchange glass-based surface waveguide spot size converter |
| CN111208608A (en) * | 2020-02-08 | 2020-05-29 | 浙江大学深圳研究院 | Manufacturing method of ion exchange glass-based buried waveguide mode spot converter |
| CN112596158A (en) * | 2020-12-22 | 2021-04-02 | 浙江大学绍兴微电子研究中心 | Silicon-based magneto-optical nonreciprocal ridge optical waveguide |
| CN113189051A (en) * | 2021-05-11 | 2021-07-30 | 河南工业大学 | Method for preparing magneto-optical glass-based periodic nanopore magnetic plasma sensor |
Citations (3)
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| CN1844964A (en) * | 2006-05-08 | 2006-10-11 | 浙江南方通信集团股份有限公司 | Method for preparing glass waveguide by ion mask |
| CN101021594A (en) * | 2007-03-05 | 2007-08-22 | 浙江大学 | Glass-glass composite optical wave guide |
| CN101251621A (en) * | 2008-02-26 | 2008-08-27 | 浙江大学 | Optical waveguide containing Cu ion |
-
2015
- 2015-02-06 CN CN201510062105.4A patent/CN104656187B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1844964A (en) * | 2006-05-08 | 2006-10-11 | 浙江南方通信集团股份有限公司 | Method for preparing glass waveguide by ion mask |
| CN101021594A (en) * | 2007-03-05 | 2007-08-22 | 浙江大学 | Glass-glass composite optical wave guide |
| CN101251621A (en) * | 2008-02-26 | 2008-08-27 | 浙江大学 | Optical waveguide containing Cu ion |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643560A (en) * | 2017-10-20 | 2018-01-30 | 河南工业大学 | A kind of method that magneto-optic glass base ion exchange prepares magneto-optic slab guide |
| CN108919524A (en) * | 2018-08-20 | 2018-11-30 | 河南工业大学 | A method of utilizing magnetic Nano material ion exchange single-chip integration magneto-optic waveguide |
| CN108919524B (en) * | 2018-08-20 | 2021-07-27 | 河南工业大学 | Method for integrating magneto-optical waveguide by utilizing magnetic nano material ion exchange monolithic |
| CN111158084A (en) * | 2020-02-08 | 2020-05-15 | 浙江大学深圳研究院 | Manufacturing method of ion-exchange glass-based surface waveguide spot size converter |
| CN111208608A (en) * | 2020-02-08 | 2020-05-29 | 浙江大学深圳研究院 | Manufacturing method of ion exchange glass-based buried waveguide mode spot converter |
| CN112596158A (en) * | 2020-12-22 | 2021-04-02 | 浙江大学绍兴微电子研究中心 | Silicon-based magneto-optical nonreciprocal ridge optical waveguide |
| CN113189051A (en) * | 2021-05-11 | 2021-07-30 | 河南工业大学 | Method for preparing magneto-optical glass-based periodic nanopore magnetic plasma sensor |
| CN113189051B (en) * | 2021-05-11 | 2022-08-02 | 河南工业大学 | Method for preparing magneto-optical glass-based periodic nanopore magnetic plasma sensor |
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| CN104656187B (en) | 2018-04-20 |
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