CN102109687B - Optical isolator and machining method thereof - Google Patents

Optical isolator and machining method thereof Download PDF

Info

Publication number
CN102109687B
CN102109687B CN2011100533356A CN201110053335A CN102109687B CN 102109687 B CN102109687 B CN 102109687B CN 2011100533356 A CN2011100533356 A CN 2011100533356A CN 201110053335 A CN201110053335 A CN 201110053335A CN 102109687 B CN102109687 B CN 102109687B
Authority
CN
China
Prior art keywords
linbo
district
polarizer
substrate
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011100533356A
Other languages
Chinese (zh)
Other versions
CN102109687A (en
Inventor
延凤平
陶沛琳
李琦
冯亭
彭万敬
梁骁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Jiaotong University
Original Assignee
Beijing Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Jiaotong University filed Critical Beijing Jiaotong University
Priority to CN2011100533356A priority Critical patent/CN102109687B/en
Publication of CN102109687A publication Critical patent/CN102109687A/en
Application granted granted Critical
Publication of CN102109687B publication Critical patent/CN102109687B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Optical Integrated Circuits (AREA)

Abstract

The invention discloses an optical isolator and a machining method thereof. The optical isolator comprises five parts, namely an input optical fiber, a polarizer, a magnetic polarimeter, an analyzer and output optical fiber, wherein, the polarizer, the magnetic polarimeter and the analyzer are integrated on one LiNbO3 substrate; the polarizer and the analyzer are directly generated on the LiNbO3 substrate by utilizing a proton exchange method; the LiNbO3 substrate for manufacturing the analyzer is ground and polished into a plane along the counterclockwise direction, and the plane and the upper surface of the LiNbO3 substrate for manufacturing the polarizer and the magnetic polarimeter form an included angle of 45 degrees; the magnetic polarimeter consists of a YIG (yttrium iron garnet) crystal deposited on the LiNbO3 substrate and a dilute magnetic film covered on the YIG crystal; and by utilizing the magnetic polarimeter, the polarization direction of linear polarized light which passes through the magnetic polarimeter rotates by 45 degrees along the counterclockwise direction. The integrated optical isolator has the characteristics of small volume, low cost, high reliability and the like.

Description

Optoisolator and job operation thereof
Technical field
The present invention relates to the optical device field, relate in particular to a kind of optoisolator and job operation thereof.
Background technology
Optoisolator is a kind of optical passive component, because it can intercept dorsad light to the propagation in source, thereby can eliminate dorsad that therefore light all have broad application prospects in optical fiber communication and sensory field of optic fibre to the influence of source end-apparatus spare (like laser instrument) operating characteristic.In recent years, along with optical fiber sensing technology proposes more and more stricter requirement to laser linewidth, the research of super-narrow line width fiber laser and popularization thereof more and more obtain people's attention.Because small back-scattering light all can cause the variation of super-narrow line width fiber laser job stability, therefore the use of high performance optoisolator will more and more generalize.Meanwhile, along with the development of optical communication and photoelectron technology, also be the big force urges of social demand simultaneously, the photon integrated technology vigorously rises, and becomes the hot research problem of field of photoelectric technology.But in the photon integrating process, each photonic device need be integrated in the light path, and on a chip, wants integrated thousands of optical devices.These optical devices are coordinated each other, form an organic whole jointly, accomplish set function.Therefore, miniaturization, optoisolator that can be integrated also become people's a important subject.
Summary of the invention
The object of the present invention is to provide a kind of optoisolator and job operation thereof,, improve its stability and reliability, reduce the making complexity of device simultaneously and practice thrift cost to reduce the size of optoisolator.
A kind of optoisolator of the present invention comprises the input optical fibre, insulator body and the output optical fibre that are linked in sequence; Wherein, said insulator body comprises: LiNbO 3Crystalline substrates, the polarizer, magnetic polarization apparatus and analyzer; And, said LiNbO 3Section district, interlude district and rear district headed by crystalline substrates is divided; The said polarizer is arranged at said LiNbO 3The first section corresponding surface of district institute of crystalline substrates; Said magnetic polarization apparatus is arranged at said LiNbO 3The corresponding surface of interlude district institute of crystalline substrates; Be included in yig crystal and rare magnetic thin film of surface, this section interlude district sequential aggradation; Said analyzer is arranged at said LiNbO 3The corresponding surface of rear district institute of crystalline substrates; And said LiNbO 3The corresponding surface of institute, first section district and the said LiNbO of crystalline substrates 3The corresponding surface of interlude district institute of crystalline substrates is same surface, this surface and said LiNbO 3The rear district of crystalline substrates corresponding surface be 45 ° angle; And the pairing substrate surface in said rear district forms along the counter clockwise direction grinding and polishing.
On the other hand, the invention also discloses a kind of job operation of above-mentioned optoisolator, comprise the steps:
Step 1, preparation LiNbO 3Crystalline substrates, then, with said LiNbO 3Substrate is divided into a LiNbO of the processing polarizer and magnetic polarization apparatus 3The 2nd LiNbO of substrate and processing analyzer 3Substrate two parts; Step 2 is with the 2nd LiNbO 3Substrate is 45 ° plane along counterclockwise grinding and be polished to the upper surface of a LiNbO3 substrate; Step 3 is with a LiNbO 3Substrate is divided into the two parts that are used to make the polarizer and magnetic polarization apparatus, adopts the proton exchange legal system to do waveguide then, constitutes the polarizer; Step 4, the deposition yig crystal, and on yig crystal, deposit rare magnetic thin film, form magnetic polarization apparatus thus; Step 5 is at LiNbO 3Adopt the proton exchange legal system to do waveguide on the substrate, constitute analyzer; Step 6 is coupled input optical fibre and output optical fibre respectively with the polarizer and analyzer, constitute optoisolator.Characteristics such as optoisolator of the present invention has the precision height, and volume is little, and cost is low are particularly suitable for the photon integration field and use.
Description of drawings
Fig. 1 is the inner structure synoptic diagram of optoisolator embodiment of the present invention;
The contour structures synoptic diagram of Fig. 2 optoisolator embodiment of the present invention;
Among the figure, 1-LiNbO 3Substrate, 2-makes the LiNbO of the polarizer and magnetic polarization apparatus 3Substrate, 3-makes the LiNbO of analyzer 3Substrate, the 4-polarizer, 5-YIG crystal, the rare magnetic thin film of 6-, 7-magnetic polarization apparatus, 8-analyzer, 9-input optical fibre, 10-output optical fibre.
Embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
A kind of optoisolator comprises the input optical fibre 9, insulator body and the output optical fibre 10 that are linked in sequence; Wherein, insulator body comprises: LiNbO 3 Crystalline substrates 1, the polarizer 4, magnetic polarization apparatus 7 and analyzer 8; And, LiNbO 3 Section district 2, interlude district 2 and rear district 3 headed by crystalline substrates is divided; The polarizer 4 is arranged at LiNbO 3The first section corresponding surface of district institute of crystalline substrates 1; Magnetic polarization apparatus 7 is arranged at LiNbO 3The corresponding surface of interlude district institute of crystalline substrates 1; Magnetic polarization apparatus 7 is included in the yig crystal 5 and rare magnetic thin film 6 of surface, this section interlude district sequential aggradation; Analyzer 8 is arranged at LiNbO 3The corresponding surface of rear district institute of crystalline substrates 1; LiNbO 3The corresponding surface of institute, first section district and the LiNbO of crystalline substrates 1 3The corresponding surface of the interlude district of crystalline substrates institute is same surperficial 2, this surface 2 and LiNbO 3The rear district of crystalline substrates corresponding surface 3 be 45 ° angle; And the pairing substrate surface in rear district forms along the counter clockwise direction grinding and polishing.
In this embodiment, the laser of being imported by optical fiber becomes linearly polarized light behind the polarizer 4, and its extinction ratio can reach more than the 40dB.Linearly polarized light is rotated counterclockwise 45 ° through its polarization directions, yig crystal 5 back that are coated with rare magnetic material 6, just in time with 0 ° angle through rotating the analyzer 8 that 45 is placed, and export from optical fiber.The laser of reverse transfer is through behind the polarizer, and its polarization direction has been rotated counterclockwise 45 °, continues to be rotated counterclockwise 45 ° through its polarization direction behind the yig crystal that is coated with rare magnetic material again.When arriving analyzer, the polarization direction of laser is just vertical with the polarization principal axis direction of analyzer, thereby can not pass through analyzer.Play the effect of optoisolator thus.
Be covered the thickness of rare magnetic material by the length of yig crystal and Verdet constant decision thereof.With respect to the linearly polarized light of incident, the angle θ of emerging ray polarized light polarization direction rotation can be expressed as:
θ=VHL (1)
In the formula, H representes that externally-applied magnetic field acts on the magnetic field intensity on the magnetic rotation crystal major axes orientation, and L representes the distance that light is propagated in the magnetic rotation crystal, and V representes Verdet constant, character, temperature and the light frequency relating to parameters such as (wavelength) of it and magnetic rotation crystal.
So, make θ=45 °, i.e. VHL=π/4.So:
H = π 4 VL - - - ( 2 )
This shows that after the characteristic of yig crystal and optical maser wavelength were confirmed, V promptly confirmed.Corresponding to certain L, H is unique to be confirmed.After the constituent of selected rare magnetic material, the thickness that meets rare magnetic material of above-mentioned condition is also confirmed with regard to unique.
On the other hand, optoisolator of the present invention and job operation thereof comprise the steps:
1, preparation LiNbO 3 Substrate 1, then according to the design proportion size with LiNbO 3 Substrate 1 is divided into the LiNbO that makes the polarizer 4 and magnetic polarization apparatus 3Substrate 2 and the LiNbO that makes analyzer 3Substrate 3 two parts.
2, with LiNbO 3 Substrate 3 is along counterclockwise grinding and be polished to and LiNbO 3The upper surface of substrate 2 is 45 ° plane.
3, according to proportional sizes, with LiNbO 3 Substrate 2 is divided into the two parts that are used to make the polarizer and magnetic polarization apparatus, adopts the proton exchange legal system to do waveguide then, constitutes the polarizer 4.
4, deposition yig crystal 5, and on yig crystal 5, deposit rare magnetic thin film 6, form magnetic polarization apparatus 7 thus.
5, at LiNbO 3Adopt the proton exchange legal system to do waveguide on the substrate 3, constitute analyzer 8.
6, input optical fibre 9 and output optical fibre 10 are coupled with the polarizer 4 and analyzer 8 respectively, constitute integrated optical isolator.
More than a kind of optoisolator provided by the present invention and processing method thereof are described in detail; Used specific embodiment herein principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, part in specific embodiments and applications all can change.To sum up, this description should not be construed as limitation of the present invention.

Claims (2)

1. an optoisolator is characterized in that,
Comprise the input optical fibre, insulator body and the output optical fibre that are linked in sequence;
Wherein, said insulator body comprises: LiNbO 3Crystalline substrates, the polarizer, magnetic polarization apparatus and analyzer;
And, said LiNbO 3Section district, interlude district and rear district headed by crystalline substrates is divided; The said polarizer is arranged at said LiNbO 3The first section corresponding surface of district institute of crystalline substrates; Said magnetic polarization apparatus is arranged at said LiNbO 3The corresponding surface of interlude district institute of crystalline substrates; Be included in yig crystal and rare magnetic thin film of surface, this section interlude district sequential aggradation; Said analyzer is arranged at said LiNbO 3The corresponding surface of rear district institute of crystalline substrates; And
Said LiNbO 3The corresponding surface of institute, first section district and the said LiNbO of crystalline substrates 3The corresponding surface of interlude district institute of crystalline substrates is same surface, this surface and said LiNbO 3The rear district of crystalline substrates corresponding surface be 45 ° angle; And the pairing substrate surface in said rear district forms along the counter clockwise direction grinding and polishing.
2. the job operation of the described optoisolator of claim 1 is characterized in that, comprises the steps:
Step 1, preparation LiNbO 3Crystalline substrates, then, with said LiNbO 3Substrate is divided into a LiNbO of the processing polarizer and magnetic polarization apparatus 3The 2nd LiNbO of substrate and processing analyzer 3Substrate two parts;
Step 2 is with the 2nd LiNbO 3Substrate is 45 ° plane along counterclockwise grinding and be polished to the upper surface of a LiNbO3 substrate;
Step 3 is with a LiNbO 3Substrate is divided into the two parts that are used to make the polarizer and magnetic polarization apparatus, adopts the proton exchange legal system to do waveguide then, constitutes the polarizer;
Step 4, the deposition yig crystal, and on yig crystal, deposit rare magnetic thin film, form magnetic polarization apparatus thus;
Step 5 is at LiNbO 3Adopt the proton exchange legal system to do waveguide on the substrate, constitute analyzer;
Step 6 is coupled input optical fibre and output optical fibre respectively with the polarizer and analyzer, constitute optoisolator.
CN2011100533356A 2011-03-04 2011-03-04 Optical isolator and machining method thereof Expired - Fee Related CN102109687B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011100533356A CN102109687B (en) 2011-03-04 2011-03-04 Optical isolator and machining method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011100533356A CN102109687B (en) 2011-03-04 2011-03-04 Optical isolator and machining method thereof

Publications (2)

Publication Number Publication Date
CN102109687A CN102109687A (en) 2011-06-29
CN102109687B true CN102109687B (en) 2012-10-31

Family

ID=44173890

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011100533356A Expired - Fee Related CN102109687B (en) 2011-03-04 2011-03-04 Optical isolator and machining method thereof

Country Status (1)

Country Link
CN (1) CN102109687B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110346869A (en) * 2019-06-11 2019-10-18 北京兆维智能装备有限公司 A kind of production method of the optical waveguide isolator based on femtosecond laser photoetching technique
CN110687696B (en) * 2019-09-16 2021-06-18 中国科学院福建物质结构研究所 Packaging method of integrated optical isolator and integrated optical isolator

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7043100B2 (en) * 2001-01-25 2006-05-09 E. I. Du Pont De Nemours And Company Polarization independent waveguide optical isolator and circulator
KR100571871B1 (en) * 2003-10-23 2006-04-17 한국과학기술연구원 Integrated Optical Isolator
JP4628054B2 (en) * 2004-09-27 2011-02-09 京セラ株式会社 Optical isolator
US7260282B2 (en) * 2005-03-30 2007-08-21 Intel Corporation Integratable optical waveguide isolator

Also Published As

Publication number Publication date
CN102109687A (en) 2011-06-29

Similar Documents

Publication Publication Date Title
Onbasli et al. Optical and magneto-optical behavior of cerium yttrium iron garnet thin films at wavelengths of 200–1770 nm
Huang et al. Electrically driven and thermally tunable integrated optical isolators for silicon photonics
CN104777545B (en) A kind of silicon nano brick array polarizing beam splitter
Shoji et al. Silicon Mach–Zehnder interferometer optical isolator having 8 nm bandwidth for over 20 dB isolation
Ghosh et al. Ce: YIG/Silicon-on-Insulator waveguide optical isolator realized by adhesive bonding
Shoji et al. Optical nonreciprocal devices based on magneto-optical phase shift in silicon photonics
US8693823B2 (en) Photonic crystal three-port circulator with multiple second air columns
CN100557483C (en) A kind of polarization irrelevant magneto-optic waveguide light isolator
Mitsuya et al. Demonstration of a silicon waveguide optical circulator
CN204302526U (en) Polarization beam splitting circulator
CN104280823B (en) A kind of novel optical isolator based on waveguiding structure
CN106707657B (en) A kind of control swap gate optical logic device based on micro-ring resonator
Ghosh et al. Compact Mach–Zehnder interferometer Ce: YIG/SOI optical isolators
CN108693602A (en) A kind of three-dimensionally integrated more microcavity resonator, filter devices of silicon nitride and preparation method thereof
CN105158849B (en) A kind of preparation method and its device of lithium niobate fiber waveguide device
CN102109687B (en) Optical isolator and machining method thereof
CN105093571A (en) Large-incident-angle magnetic photonic crystal broadband photoisolator
CN103018520B (en) A kind of voltage detecting optical sensing head and preparation method thereof
Stadler et al. Sputter-deposited magneto-optical garnet for all-mode (transverse electric/transverse magnetic) Faraday rotators
CN202649637U (en) Free-space polarization dependence type optoisolator
Yanaga et al. Compact magnetooptical isolator with cobalt ferrite on silicon photonic circuits
CN103809238B (en) Sub-wavelength y branch waveguide and preparation method
Hu et al. Monolithic on-chip nonreciprocal photonics based on magneto-optical thin films
WANG et al. Development and thinking of silicon photonics heterogenous integration
CN111948747A (en) High extinction ratio polarizer based on surface plasma

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121031

Termination date: 20130304