CN1818727A - Light waveguide with composite structure for integrating optical sensor - Google Patents
Light waveguide with composite structure for integrating optical sensor Download PDFInfo
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- CN1818727A CN1818727A CN 200610049849 CN200610049849A CN1818727A CN 1818727 A CN1818727 A CN 1818727A CN 200610049849 CN200610049849 CN 200610049849 CN 200610049849 A CN200610049849 A CN 200610049849A CN 1818727 A CN1818727 A CN 1818727A
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Abstract
An optical wave guide with composite structure used in integrated optical sense consists of bottom covering and core layer of bar optical wave guide formed in advance, sensing film above core layer and media containing substance to be tested and being set above sensing film .It is featured as setting the sensing film refractivity to be equal or greater than refractivity of said core layer, setting refractivity of media containing substance to be tested to be less than refractivity of sensing film and setting said bottom covering refractivity to be less than refractivity of said core layer .
Description
Technical field
The present invention relates to a kind of method for making of glass optical waveguide, belong to light sensing, integrated optics field.
Background technology
Based on the sensor of optical principle, comprise Fibre Optical Sensor and integrated optical sensor, become one of focus of many researchers' concerns in recent years, reason is that this class sensing has following special advantages:
Anti-electromagnetic interference (EMI);
Resistance to chemical attack;
Electrical insulating property is good;
Low noise, high sensitivity;
Be convenient to multiplexingly, be convenient to into net, help forming the remote measurement sensing network with existing optical communication technique;
Can realize simultaneously analysis to multiple different material;
Be suitable for the sensing under the inflammable and explosive environment;
Cost is low, is suitable for large-scale production and application.
The research of optical sensor has had the history of decades, but up to the phase at the beginning of the nineties in last century, has only the minority Fibre Optical Sensor to occur on market.Its reason mainly is that technology is immature, and reliability is not high.In addition, because early stage Fibre Optical Sensor is small serial production, product price is higher relatively.The nineties in last century, the more optical fiber sensor is in commercialization constantly, such as pressure stresses sensor, liquid flow sensor, current/voltage sensor, chemical sensor, humidity sensor etc.Existing in the world at present 500 many enterprises produce all kinds of Fibre Optical Sensors.
Compare with Fibre Optical Sensor based on same principle, integrated optical sensor has higher sensitivity, easier realization miniaturization and array, be easier to mass production and therefore have lower cost of manufacture, and, in some aspects, integrated optical sensor has the incomparable advantage of Fibre Optical Sensor, such as the making based on the sensor of principle of interference.
Sensor based on the evanescent wave sensing principle is the important integrated optical sensor of a class.The optical waveguide structure of this sensor as shown in Figure 1, its principle of work is to utilize on the under-clad layer 1 of the optical waveguide of making in advance and sandwich layer 2 to make one deck sensing membrane 3, the refractive index of sensing membrane is lower than the refractive index of optical waveguide sandwich layer, as the top covering of optical waveguide.Sensing membrane contacts with the medium 4 that contains test substance, the fluorescent effects of utilizing variations in refractive index that the test substance in sensing membrane 3 adsorbing mediums 4 produces, the absorption and the evanescent wave of evanescent wave being excited test substance etc. are carried out qualitative and quantitative test to test substance.Refractive index distribution curve 5 has been represented the optical waveguide structure feature of this evanescent wave sensor, because the refractive index of sensing membrane 3 is lower than the refractive index of optical waveguide sandwich layer 2, the energy major part of optical guided wave is distributed in the sandwich layer 2 of optical waveguide, as shown in Figure 1,6 are isophotes of optical guided wave basic mode mould field distribution among the figure.In other words be exactly a little less than the interaction of optical guided wave and sensing membrane 3, make the sensitivity of sensor very low.On the other hand, the sensitivity of sensor is subjected to the influence of sensing membrane 3 refractive indexes very big, makes the process allowance of sensor production very little.
Summary of the invention
The object of the present invention is to provide a kind of light waveguide with composite structure that is used for integrating optical sensor, this structure has strengthened the interaction of optical guided wave and test substance, has improved the sensitivity of sensor.
The technical solution adopted in the present invention is: optical waveguide is a four-layer structure, comprises the under-clad layer and the sandwich layer of preformed strip optical waveguide, is positioned at the sensing membrane of sandwich layer top, and the medium that contains test substance that is positioned at the sensing membrane top.The refractive index of sensing membrane is equal to or higher than the refractive index of preformed bar shaped sandwich layer, and the refractive index of the medium that contains test substance that is positioned at sensing membrane top is less than the refractive index of sensing membrane; The refractive index of the under-clad layer of preformed strip optical waveguide is less than the refractive index of sandwich layer; Constitute the composite optical wave guide of " inverse ridge shape ".
The beneficial effect that the present invention has is: be different from common evanescent wave sensing arrangement, the refractive index of sensing membrane is equal to or higher than the refractive index of preformed optical waveguide sandwich layer in the integrating optical sensor structure of the present invention, the optical guided wave energy major part of propagating in this light waveguide with composite structure is distributed in the sensing membrane, strengthen the interaction of optical guided wave and test substance, improved the sensitivity of sensor; On the other hand, use the sensitivity of the sensor of this optical waveguide to be subjected to the influence of sensing membrane refractive index less, have bigger process allowance.
Description of drawings
Fig. 1 is based on the integrated optical waveguide structure synoptic diagram of evanescent wave sensing principle.
Fig. 2 is the optical waveguide structure synoptic diagram that is used for integrated sensing proposed by the invention.
Fig. 3 is the optical waveguide structure synoptic diagram of the integrated sensing of plate sensing membrane.
Fig. 4 is the sensing membrane structural representation that has tapered region along the optical propagation direction termination.
Fig. 5 is the sensing membrane structural representation that has tapered zone along the optical propagation direction termination.
Among the figure: 1, be the under-clad layer of preformed optical waveguide, 2, be the sandwich layer of preformed optical waveguide, 3, be sensing membrane, 4, the medium that contains test substance, 5 fiber waveguide refractive index distribution curves based on the evanescent wave sensing principle, 6, based on the isophote of the optical waveguide basic mode mould field distribution of evanescent wave sensing principle, 7, the composite optical wave guide refractive index distribution curve that the present invention relates to, the isophote of the composite optical wave guide basic mode mould field distribution that 8, the present invention relates to, 9, tapered region, 10, tapered zone.
Embodiment
As shown in Figure 2, optical waveguide of the present invention is a four-layer structure, comprises the under-clad layer 1 and the sandwich layer 2 of preformed strip optical waveguide, is positioned at the sensing membrane 3 of sandwich layer 2 tops, and the medium that contains test substance 4 that is positioned at sensing membrane 3 tops; The refractive index of sensing membrane 3 is equal to or higher than the refractive index of preformed bar shaped sandwich layer 2, and the refractive index of the medium that contains test substance 4 that is positioned at sensing membrane 3 tops is less than the refractive index of sensing membrane 3; The refractive index of the under-clad layer 1 of preformed strip optical waveguide is less than the refractive index of sandwich layer 2; Constitute the composite optical wave guide of " inverse ridge shape ".
Because the structure of composite optical wave guide has above-mentioned characteristic, as refractive index distribution curve among Fig. 27, sensing membrane 3 refractive indexes are greater than or equal to preformed optical waveguide sandwich layer 2 refractive indexes, and sensing membrane 3 and preformed optical waveguide sandwich layer 2 constitute the sandwich layer of " inverse ridge shape " composite optical wave guides in the composite optical wave guide.The energy major part of the optical guided wave that transmits in this optical waveguide is distributed in the sensing membrane, shown in the isophote 8 of composite optical wave guide basic mode mould field distribution among Fig. 2.This distribution characteristics has strengthened the interaction of test substance in optical guided wave and the sensing membrane, and the sensitivity of sensor is improved greatly.Simultaneously, the variation of sensitive membrane refractive index among a small circle can not bring significant change to the sensitivity of composite optical wave guide, makes the making of sensor have bigger process allowance.
As shown in Figure 3, described sensing membrane 3 be shaped as plate shaped; As shown in Figure 4, described sensing membrane 3 has tapered region 9 along optical propagation direction; As shown in Figure 5, described sensing membrane has 10 along optical propagation direction 3.
The material of the under-clad layer 1 of described optical waveguide and the sandwich layer 2 of optical waveguide is silicon dioxide, glass, polymkeric substance or lithium niobate.
Described sensing membrane 3 is organic thin film, inorganics film or organic and inorganic composite film.
Described preformed strip optical waveguide is monomode optical waveguide or multimode lightguide.
Described composite optical wave guide is monomode optical waveguide or multimode lightguide.
Described sensing membrane 3 thickness are between 10 nanometers to 1 millimeter.
Glass optical waveguide method for making of the present invention can be implemented in several ways, below the composite structure of a chemcor glass base and polymkeric substance be the example explanation.
The main making step of light waveguide with composite structure:
(1) preparation of ion exchange optical waveguide on the glass substrate
Adopt fine process on glass substrate, to make the mask of strip optical waveguide;
Adopt the fused salt ion-exchange process to make strip optical waveguide;
Annealing in process to optical waveguide
(2) preparation of sensing membrane on the glass substrate
Employing has the polymkeric substance of photosensitivity and makes sensing membrane, adopts fine process to obtain required shape and size.
Claims (7)
1. light waveguide with composite structure that is used for integrating optical sensor, it is characterized in that: optical waveguide is a four-layer structure, the under-clad layer (1) and the sandwich layer (2) that comprise preformed strip optical waveguide, be positioned at the sensing membrane (3) of sandwich layer (2) top, and the medium that contains test substance (4) that is positioned at sensing membrane (3) top; The refractive index of sensing membrane (3) is equal to or higher than the refractive index of preformed bar shaped sandwich layer (2), and the refractive index of the medium that contains test substance (4) that is positioned at sensing membrane (3) top is less than the refractive index of sensing membrane (3); The refractive index of the under-clad layer of preformed strip optical waveguide (1) is less than the refractive index of sandwich layer (2); Constitute the composite optical wave guide of " inverse ridge shape ".
2. the light waveguide with composite structure that is used for integrating optical sensor according to claim 1 is characterized in that: being shaped as of described sensing membrane (3) be plate shaped, have tapered region (9) or have tapered zone (10) along the optical propagation direction two ends along the optical propagation direction two ends.
3. the light waveguide with composite structure that is used for integrating optical sensor according to claim 1 is characterized in that: the material of the sandwich layer (2) of under-clad layer of described optical waveguide (1) and optical waveguide is silicon dioxide, glass, polymkeric substance or lithium niobate.
4. the light waveguide with composite structure that is used for integrating optical sensor according to claim 1 is characterized in that: described sensing membrane (3) is organic thin film, inorganics film or organic and inorganic composite film.
5. the light waveguide with composite structure that is used for integrating optical sensor according to claim 1 is characterized in that: described preformed strip optical waveguide is monomode optical waveguide or multimode lightguide.
6. the light waveguide with composite structure that is used for integrating optical sensor according to claim 1 is characterized in that: described composite optical wave guide is monomode optical waveguide or multimode lightguide.
7. the light waveguide with composite structure that is used for integrating optical sensor according to claim 1 is characterized in that: described sensing membrane (3) thickness is between 10 nanometers to 1 millimeter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610049849 CN1818727A (en) | 2006-03-15 | 2006-03-15 | Light waveguide with composite structure for integrating optical sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200610049849 CN1818727A (en) | 2006-03-15 | 2006-03-15 | Light waveguide with composite structure for integrating optical sensor |
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| CN1818727A true CN1818727A (en) | 2006-08-16 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101975880A (en) * | 2010-09-08 | 2011-02-16 | 中国科学院电工研究所 | Optical current transformer sensing head and sensing method |
| CN104656188A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide containing ferromagnetic metal nanoparticles |
| CN112033931A (en) * | 2020-09-07 | 2020-12-04 | 科竟达生物科技有限公司 | Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system |
| WO2021031416A1 (en) * | 2019-08-22 | 2021-02-25 | 苏州易锐光电科技有限公司 | Lithium niobate optical waveguide chip |
-
2006
- 2006-03-15 CN CN 200610049849 patent/CN1818727A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101975880A (en) * | 2010-09-08 | 2011-02-16 | 中国科学院电工研究所 | Optical current transformer sensing head and sensing method |
| CN101975880B (en) * | 2010-09-08 | 2013-08-07 | 中国科学院电工研究所 | Optical current transformer sensing head and sensing method |
| CN104656188A (en) * | 2015-02-06 | 2015-05-27 | 浙江大学 | Glass-based ion exchange optical waveguide containing ferromagnetic metal nanoparticles |
| CN104656188B (en) * | 2015-02-06 | 2018-02-16 | 浙江大学 | A kind of glass-based ion exchange optical waveguide containing feeromagnetic metal nano particle |
| WO2021031416A1 (en) * | 2019-08-22 | 2021-02-25 | 苏州易锐光电科技有限公司 | Lithium niobate optical waveguide chip |
| CN112033931A (en) * | 2020-09-07 | 2020-12-04 | 科竟达生物科技有限公司 | Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system |
| CN112033931B (en) * | 2020-09-07 | 2024-04-12 | 科竟达生物科技有限公司 | Optical waveguide, manufacturing method thereof, biosensing system comprising optical waveguide and application of biosensing system |
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