CN104459503A - Electrical characteristic determining device for electronic component - Google Patents
Electrical characteristic determining device for electronic component Download PDFInfo
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- CN104459503A CN104459503A CN201410427803.5A CN201410427803A CN104459503A CN 104459503 A CN104459503 A CN 104459503A CN 201410427803 A CN201410427803 A CN 201410427803A CN 104459503 A CN104459503 A CN 104459503A
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Abstract
The invention relates to an electrical characteristic determining device for electronic components. The electrical characteristic determining device comprises: a first determining terminal 16 which is electrically connected with one outer electrode of an electronic component, and is connected with the M phase of a measuring device; a second determining terminal 40 which is abutted against the other outer electrode of the electronic component, and is connected with the M phase of the measuring device; a holding unit 50 which holds the electronic component and is electrically connected with the first determining terminal 16; a carrying unit which carries the holding unit 50 to a position facing the second determining terminal 40; a moving unit which enables the holding unit 50 to move relatively towards the second determining terminal 40, so as to enable the other outer electrode of the electronic component to be abutted against the second determining terminal 40; and a relay member 86 which enables the first determining terminal 16 to be electrically connected with the holding unit 50, and moves together with the holding unit 50 in the moving direction of the holding unit 50.
Description
Technical field
The present invention relates to the electrical specification determinator of electronic devices and components, the electrode such as relating to the patch-type electronic devices and components by making mensuration terminal and resistance, thermistor, capacitor, coil etc. offsets the electrical specification determinator fetching and measure electrical specification.
Background technology
An example of the existing electrical specification determinator of certified products is sub-elected as the electrical specification measuring SMD components, the such as existing electrical specification determinator with the SMD components of following feature: possess the multiple downsides probe contacted with the backplate of semi-conductor chip from mensuration platform, and the moving up and down multiple upsides probe to contact with the surface electrode of SMD components, downside probe and upside probe are connected with analyzer, sandwiched SMD components between downside probe and upside probe is also energized, thus measure the electrical specification (such as with reference to patent documentation 1) of SMD components.In this electrical specification determinator, there is to carry out measuring the elevating mechanism that can drive upside probe in the vertical direction, and to the carrying mechanism that the SMD components measured on platform exchanges.
In this electrical specification determinator, first utilize carrying mechanism SMD components to be placed on the assigned position measured on platform, this mensuration platform is provided with multiple aperture and is made up of insulant.Now, backplate becomes following shape: by from be arranged at measure the aperture of platform given prominence to the front end of 4 downside probes of specified altitude support.Then, elevating mechanism portion is utilized to make upside probe decline and contact with surface electrode with the pressure of regulation.Now, by pressing, the front end of downside probe and backplate are contacted.Thus, under the state of being clamped by upside probe and downside probe, the electrical specification of SMD components is measured.If complete mensuration, then utilize elevating mechanism portion to make upside probe increase to make it be separated with surface electrode, and utilize carrying mechanism that the SMD components completing mensuration is accommodated in collecting pallet, next SMD components is placed on and measures on platform.Then, this action is repeated successively.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2003-185701 publication (Fig. 1, Fig. 2)
Summary of the invention
Invent technical matters to be solved
But, in this existing electrical specification determinator, SMD components be configured at the mechanism's (, being only called " carrying mechanism ") and the electrical specification in order to measure this SMD components that measure platform herein and upside probe declined respectively be configured to independent mechanism to abut against with the surface electrode of SMD components with the elevating mechanism be separated with rising.Therefore, after SMD components being configured on mensuration platform with carrying mechanism, need to make upside probe lifting.That is, due to the lifting of the carrying mechanism and upside probe of implementing SMD components respectively, the elongated such problem of the time needed for electrical specification measuring SMD components can be caused.
In addition, in this existing electrical specification determinator, due to surface electrode and the backplate that upside probe and downside probe must be made directly to contact electronic devices and components respectively, otherwise cannot measure, if therefore produce the scale error of SMD components, the electrode separation of outer electrode and the deviation of electrode width, then when with Handling device SMD components is configured at measure platform, and when exchanging the SMD components measured on platform successively, position skew may be there is, thus cause more difficultly guaranteeing upside probe and the contact precision between downside probe and the electrode of SMD components fully.Therefore, upside probe and SMD components, can come in contact bad between downside probe and SMD components, the reliability of estimating precision may be caused to reduce.
Thus, fundamental purpose of the present invention is the electrical specification determinator providing a kind of electronic devices and components, can try hard to shorten the time needed for measuring, and can improve the reliability of estimating precision.
The technical scheme that technical solution problem adopts
The electrical specification of electrical specification determinator to the electronic devices and components of patch-type of the electronic devices and components of the present invention involved by the first invention measures, side's outer electrode and the opposing party's outer electrode is formed respectively in a mutually relative interarea side of the electronic devices and components of this patch-type and going up at least partially of another interarea side, the feature of the electrical specification determinator of these electronic devices and components is, comprises:
1st measures terminal, and the 1st measures terminal is electrically connected with side's outer electrode, and is connected with the analyzer measuring electrical specification;
2nd measures terminal, and the 2nd measures terminal can abut against with the opposing party's outer electrode, and is connected with analyzer;
Holding unit, this holding unit keeps described electronic devices and components, and can measure terminal and be electrically connected with the 1st;
Handling unit, holding unit is transported to the electronic devices and components and the 2nd making to be kept by holding unit and measures the relative position of terminal by this handling unit;
Mobile unit, this mobile unit makes holding unit relatively move towards the 2nd mensuration terminal, measures terminal abut against with the opposing party's outer electrode and the 2nd that make electronic devices and components; And
Relaying component, this relaying component can move in linkage with the holding unit being carried out movement by mobile unit on the moving direction of holding unit, and makes the 1st to measure terminal and holding unit electrical connection.
In the present invention involved by the first invention, owing to having said structure, be configured to the mechanism of the electrical specification doubled as measuring these electronic devices and components for electronic devices and components being configured at the mechanism measuring platform.In the present invention, comprise for electronic devices and components being configured at the mechanism measuring platform: the electronic devices and components kept by holding unit are transported to the handling unit measuring the relative position of terminal with the 2nd; And terminal is relatively mobile measures with the opposing party's outer electrode and the 2nd that make electronic devices and components the mobile unit that terminal abuts against to make holding unit measure towards the 2nd.That is, measure platform and holding unit can on make the opposing party's outer electrode of electronic devices and components and the 2nd measure direction that terminal abuts against relatively back and forth movement.In the case, if utilize mobile unit to make holding unit measure terminal movable towards the 2nd, then with its in linkage, relaying component moves on the moving direction of holding unit, and via relaying component and holding unit, the 1st side's outer electrode measuring terminal and electronic devices and components is electrically connected, measure the electrical specification of electronic devices and components thus.
That is, the top utilizing handling unit that the holding unit of maintenance electronic devices and components is configured to measure with the measure platform 14 the 2nd terminal 40 is relative, and utilize mobile unit to make these electronic devices and components measure terminal movable towards the 2nd, measure terminal by the opposing party's outer electrode and the 2nd making these electronic devices and components to abut against, the 1st side's outer electrode measuring terminal and electronic devices and components is made to be electrically connected thus, and the 2nd the opposing party's outer electrode measuring terminal and electronic devices and components is electrically connected, and measures the electrical specification of electronic devices and components thus.Therefore, in the present invention, compared to the such as prior art shown in patent documentation 1, owing to not needing the elevating mechanism of the lifting making the 1st mensuration terminal, therefore, it is possible to shorten the time measured needed for electrical specification.
In addition, in the present invention, by handling unit electronic devices and components are transported to measure the relative position of terminal with the 2nd time, with mobile unit electronic devices and components and the 2nd are measured terminal offset the electrical specification fetching and measure electronic devices and components time, after the electrical specification determining electronic devices and components, when these electronic devices and components are transported to next operation again, can, respectively to utilize holding unit to keep the state of electronic devices and components to maintain, can prevent the position of electronic devices and components from offseting.Therefore, it is possible to prevent the bad connection caused because of the position skew of electronic devices and components, and the reliability of estimating precision can be improved.Thus, what offset without the need to the position arranged in addition for revising electronic devices and components relocates mechanism etc.
And, in the present invention, by making the 1st mensuration terminal and relaying component abut against, the 1st measures terminal and is kept side's outer electrode electrical connection of the electronic devices and components that unit keeps, and can guarantee that relaying component and the 1st measures the scope of the abutting portion of terminal thus fully.Therefore, the reduction of the mensuration reliability caused because of connection error can be prevented, even if under such as there is scale error, the electrode separation of outer electrode or electrode width tool situation devious on electronic devices and components, compared with the such as prior art shown in patent documentation 1, the abutting precision between the 1st mensuration terminal and side's outer electrode of electronic devices and components and between the 2nd mensuration terminal and the opposing party's outer electrode of electronic devices and components can be improved, and the electrical connection precision between them, thus the reliability of estimating precision can be improved.
In addition, in the present invention, 1st mensuration terminal and the 2nd measures terminal can be configured at mensuration platform side, therefore, it is possible to make the wirings such as the lead-in wire be connected with the analyzer of the electrical specification measuring electronic devices and components concentrate on this mensuration platform side, can shorten the length of this wiring.In the case, be configured at the handling unit of holding unit side and the wiring of mobile unit owing to simplifying, therefore, it is possible to prevent the deterioration because causing the wiring of this handling unit and mobile unit to keeping the carrying of holding unit of electronic devices and components and movement.
The present invention involved by second invention is subordinated to the invention involved by the first invention, relate to the electrical specification determinator of electronic devices and components, it is characterized in that, holding unit also comprises the buffer gear that the moving direction to mobile unit exerts a force, and the 1st measures terminal also comprises other buffer gear exerted a force to the direction contrary with the moving direction of holding unit.
In the present invention involved by second invention, owing to having said structure, buffer gear can be utilized absorb and reduce electronic devices and components and the 2nd and measure the impulsive force acting on electronic devices and components when terminal abuts against, therefore, it is possible to prevent to cause damage (apparent damage and internal fissure etc.) to electronic devices and components.In the case, the 1st measures other buffer gear of terminal by adjusting the cushion effect of this buffer gear, can be corresponding with the thickness being configured at the electronic devices and components measuring platform.
The present invention involved by 3rd invention is subordinated to the first invention or the invention involved by the second invention, relate to the electrical specification determinator of electronic devices and components, it is characterized in that, holding unit comprises absorption showerhead, this absorption showerhead can adsorb and keep an interarea of electronic devices and components, 1st determination unit comprises multiple probe, by handling unit, absorption showerhead is transported to and measures the relative position of terminal with the 2nd, make electronic devices and components move to make the opposing party's outer electrode of electronic devices and components and the 2nd to measure terminal with mobile unit to abut against, multiple probe and relaying component abut against, in this condition, measure the electrical specification of electronic devices and components.
In the present invention involved by the 3rd invention, utilize absorption showerhead to attract an interarea of electronic devices and components, electronic devices and components are held in absorption showerhead.The absorption showerhead being adsorbed with electronic devices and components is handled upside down unit and is transported to mensuration platform, and is moved to and measures the relative position of terminal with the 2nd.The absorption showerhead utilizing mobile unit to make to be adsorbed with electronic devices and components measures terminal movable towards the 2nd, and the opposing party's outer electrode of electronic devices and components and the 2nd mensuration terminal are abutted against.Now, utilize mobile unit make absorption showerhead towards the 2nd measure terminal movable, relaying component and its move on the moving direction adsorbing showerhead in linkage, therefore relaying component becomes the state abutted against with multiple probe.That is, side's outer electrode of multiple probe and electronic devices and components is electrically connected via relaying component and absorption showerhead, and abuts against by making the opposing party's outer electrode of electronic devices and components and the 2nd measure terminal, measures the electrical specification of electronic devices and components thus.In invention involved by 3rd invention, owing to having said structure, therefore play the effect identical with the invention involved by the first invention.
The present invention that 4th invention relates to is subordinated to the invention according to any one of the first invention to the 3rd invention, relate to the electrical specification determinator of electronic devices and components, it is characterized in that, be provided with the anisotropic conductive rubber of film-form on the 2nd surface measuring terminal.
In the present invention involved by 4th invention, owing to having said structure, if apply pressure to the anisotropic conductive rubber of film-form, then only become conducting state executing on stressed direction.Therefore, apply pressure by measuring terminal from interarea side direction electronic devices and components and the 2nd of electronic devices and components, measure between terminal at electronic devices and components and the 2nd thus, the anisotropic conductive rubber of film-form becomes conducting state.Thus, the opposing party's outer electrode and the 2nd being formed at another interarea of electronic devices and components measures terminal electrical connection.
In the present invention, utilize the miniaturization of electronic devices and components to reduce the distance between side's outer electrode and the opposing party's outer electrode, even if when there is deviation in the shape of this outer electrode, utilize the elasticity of the anisotropic conductive rubber of film-form, the form variations slightly on the thickness direction of the anisotropic conductive rubber of this film-form can be offset.In addition, even if electronic devices and components such as measure terminal with the 2nd in an inclined manner partly and abut against, or the 2nd measures terminal tilts slightly, also the elasticity of the anisotropic conductive rubber of this film-form can be utilized, offset the inclination that electronic devices and components and the 2nd measure terminal, the reduction measuring reliability can be prevented.
Thus, in the present invention, the bad connection between the outer electrode of electronic devices and components and the 2nd mensuration terminal can be prevented, and the electrical specification of electronic devices and components can be measured exactly.And, measure terminal owing to being made the outer electrode of electronic devices and components and the 2nd by the anisotropic conductive rubber of film-form to abut against, the elastic reaction of anisotropic conductive rubber is also used as buffer action, compared to the prior art such as described in patent documentation 1, electronic devices and components are made to become more difficult damage.
The present invention involved by 5th invention is subordinated to the invention according to any one of the first invention to the 4th invention, relates to the electrical specification determinator of electronic devices and components, it is characterized in that, is configured to utilize 4 terminals measurement methods to measure the electrical specification of electronic devices and components.
In the present invention involved by 5th invention, owing to having said structure, therefore, it is possible to by utilizing 4 terminals measurement methods to get rid of the harmful effect caused because of contact resistance, can high-precision mensuration be carried out.That is, by making 4 terminals and electronic devices and components abut against, the resistive component and the 2nd can getting rid of the position of the maintenance electronic devices and components of holding unit measures the resistive component of terminal, can measure resistance value accurately to electronic devices and components.
Invention effect
According to the present invention, a kind of electrical specification determinator of electronic devices and components can be obtained, can try hard to shorten the time needed for measuring, and the reliability of estimating precision can be improved.
Above-mentioned purpose of the present invention, other object, feature and the advantage following explanation for invention embodiment by carrying out with reference to accompanying drawing, obtain clear and definite further.
Accompanying drawing explanation
Fig. 1 is the diagrammatic elevation of an embodiment of the electrical specification determinator representing electronic devices and components involved in the present invention.
Fig. 2 is the key diagram of the major part representing Fig. 1, and Fig. 2 (A) is the major part vertical view representing the example measuring platform, and Fig. 2 (B) is its front elevation.
Fig. 3 is the partial sectional view of the example representing the 1st mensuration terminal.
Fig. 4 is the major part stereographic map of the example representing holding unit.
Fig. 5 is the major part stereographic map of another example representing holding unit.
Fig. 6 is the major part stereographic map of the Still another example representing holding unit.
Fig. 7 is the amplification stereogram of the major part representing Fig. 6.
Fig. 8 is the key diagram of the example representing nozzle body, Fig. 8 (A) is its partial sectional view, Fig. 8 (B) is the amplification end view of the X-X line of Fig. 8 (A), and Fig. 8 (C) represents the major part cut-open view making electronic devices and components be adsorbed in an example of the state of the adsorption section of nozzle body.
Fig. 9 is the key diagram of another example representing nozzle body, Fig. 9 (A) is its major part cut-open view, Fig. 9 (B) is the amplification end view of the X-X line of Fig. 9 (A), and Fig. 9 (C) is the major part amplification end view of an example of the variation representing the nozzle body shown in Fig. 9 (B).
Figure 10 is the major part cut-open view of another example representing the mensuration platform that can be applied in the electrical specification determinator of electronic devices and components involved in the present invention.
Figure 11 is the major part cut-open view of the Still another example representing the mensuration platform that can be applied in the electrical specification determinator of electronic devices and components involved in the present invention.
Figure 12 is the key diagram of another example of the electrical specification determinator representing electronic devices and components involved in the present invention, and Figure 12 (A) is the vertical view of its major part, and Figure 12 (B) is the front elevation of Figure 12 (A).
Figure 13 is the major part front elevation of the yet another embodiment of the electrical specification determinator representing electronic devices and components involved in the present invention.
Embodiment
Fig. 1 is the diagrammatic elevation of an embodiment of the electrical specification determinator representing electronic devices and components involved in the present invention.Fig. 2 is the key diagram of the major part representing Fig. 1, and Fig. 2 (A) is the major part vertical view representing the example measuring platform, and Fig. 2 (B) is its front elevation.
The electrical specification determinator 10 (being only called below " determinator 10 ") of these electronic devices and components is the electrical specification determinators to the electronic devices and components that the electrical specification of the such as patch-type electronic devices and components of resistance, thermistor, capacitor, coil etc. measures, and these patch-type electronic devices and components going up at least partially among a mutually relative interarea side and another interarea side is formed with side's outer electrode and the opposing party's outer electrode respectively.In this embodiment, such as, electronic devices and components are formed as the quadrilateral tabular that one bar limit is below 50mm, or to be formed as its diameter be the discoideus of below 50mm.The shape of electronic devices and components is not limited in rectangular plate-like and discoideus, as long as going up at least partially among relative to each other interarea side and another interarea side is formed with side's outer electrode and the opposing party's outer electrode respectively, just can using the electronic devices and components of various shape as measuring object.
Determinator 10 has the base portion (not shown) being arranged on floor, as shown in Figure 1, base portion is provided with and measures platform 12.Be provided with at the upper surface measuring platform 12 and measure platform 14, this mensuration platform 14 is supplied and configures electronic devices and components (not shown in Fig. 1, Fig. 2) to measure the electrical specification of these electronic devices and components.Measure platform 14 as shown in Figure 2, the platform be such as made up of the insulating material for rectangular plate-like when overlooking is formed.Mensuration platform 14 is configured with the 1st and measures terminal 16.1st measures terminal 16 is such as made up of 2 contact probes 18.This contact probe 18 as shown in Figure 3, such as, is the contact probe of the inner spring type being built-in with Compress Spring 28.
Contact probe 18 comprises probe body 22, probe body 22 is by plunger portion 26 and have the end and columnar sleeve part 32 is formed, this plunger portion 26 has the contact site 24 contacted with determined object position (pattern electrode 90a, 90b of relaying component 86 described later) in its side, this sleeve part 32 is received by the stopper portions (not shown) that is formed at the opposite side of this plunger portion 26, the mode that can not depart from plunger portion 26 and kept this plunger portion 26.By as follows for the formation of contact site 24: its front end is formed as such as spherical, and abut against with the mode of point cantact and determined object position.
The stopper portions of the opposite side being arranged at plunger portion 26 to be received and the sleeve part 32 kept utilizes the built-in Compress Spring 28 with electric conductivity, along the direction of extruding, force is pressed to plunger portion 26, and stopper portions is fastened with the depressed part 30 of the side face being formed at sleeve part 32, makes to depart from.Therefore, plunger portion 26 maintains the snap-fit relationship of stopper portions and depressed part 30, and continues to exert a force along the direction outstanding from sleeve part 32 to plunger portion 26.In at least side at plunger portion 26 and sleeve part 32 surfaces opposite to each other position, insulation course (not shown) is set, forms probe body 22 thus.
Compress Spring 28 end winding support is in the longitudinal direction in stopper portions (not shown), and its another end winding support at length direction is in the inner bottom part 34 of sleeve part 32.Via the Compress Spring 28 in sleeve part 32, probe body 22 forms electric loop between plunger portion 26 and sleeve part 32.Compress Spring 28 itself utilizes the lower metal wire of the resistivity such as electric conductivity alloy material to be formed, and as required, also can use the Compress Spring implemented gold (Au) plating etc. further on its surface and resistance value suppressed to be formed after for minimum degree.
When making the contact jaw 24 of plunger portion 26 contact with determined object position with this contact probe 18, stopper portions due to plunger portion 26 can apply power because of the pressing resisting Compress Spring 28 and retreat in sleeve part 32, therefore can produce in the side, an end of Compress Spring 28 and buckle.The internal face side of this stopper portions side pressing sleeve part 32 making plunger portion 26 of buckling, causes plunger portion 26 to contact with sleeve part 32 side.In the case, because at least one face on the opposite site between plunger portion 26 and sleeve part 32 is formed with insulation course, even if therefore plunger portion 26 and sleeve part 32 temporarily contact, between them, also electric loop can not be formed.
Therefore, probe body 22 only defines a path, the electric loop in this path is the stopper portions → Compress Spring 28 → sleeve part 32 of the contact site 24 → plunger portion 26 of plunger portion 26.Therefore, it is possible to make the resistance value in the electric loop from determined object position to socket 20 of probe body 22 be generally definite value and have nothing to do with the stroke amount of plunger portion 26, thus when utilizing contact probe to measure, good repeatability can be guaranteed.
On the other hand, the inner bottom part of sleeve part 32 is connected with one end of lead-in wire 36, the other end of lead-in wire 36 is connected to the analyzer of the electrical specification for measuring electronic devices and components, such as resistance measurer M (with reference to Fig. 1).
2 contact probes 18 with said structure separate certain intervals to be configured on the length direction measuring platform 14.2 contact probes 18 are installed on the socket 20 be configured on the mensuration platform 12 of this analyzer 10 respectively in the mode of freely loading and unloading.2 socket 20 insert the patchhole 38 being arranged at and measuring on platform 14 respectively, thus are configured at mensuration platform 12.2 socket 20 are configured at respectively and measure platform 12, separate predetermined distance to be positioned at the upside on this mensuration platform 14 respectively to make the side of these 2 socket 20 with the upper surface measuring platform 14.2 contact probes 18 continue force towards the direction outstanding from sleeve part 32 respectively, to make the contact site 24 of this plunger portion 26 from the side outstanding outstanding length specified upward of socket 20.
In addition, as depicted in figs. 1 and 2, mensuration platform 14 is configured with the 2nd and measures terminal 40.2nd measures terminal 40 is configured at the recess 42 such as overlooked as rectangle, and this recess 42 is arranged at the pars intermedia measuring platform 14 Width.Especially, as shown in Fig. 2 (B), it is the form of inverted T-shape that recess 42 has when observing cross section.2nd measures terminal 40 as shown in Fig. 2 (A), comprises mensuration electrode 44 that be formed at the bottom surface side of recess 42, that when such as overlooking be rectangle.Both end sides in the end side measured on electrode 44 length direction and on the Width of this end side, is formed from this end towards the extraction electrode 46 that an end of the Width measuring platform 14 extends.2 extraction electrodes 46 are connected with lead-in wire 48 at the position measuring the end on platform 14 Width respectively, and this lead-in wire 48 is connected to analyzer, the such as resistance measurer M (with reference to Fig. 1) of the electrical specification for measuring electronic devices and components.In addition, measure electrode 44 to be formed by wimet, copper, silver and the conductive material such as golden.
And be configured with holding unit 50 above mensuration platform 14, the electronic devices and components of this holding unit 50 to the measuring object as this analyzer 10 keep.Holding unit 50 is installed and is supported in securement head (not shown).Holding unit 50 is supported in the mode that can be elevated on Z-Z axle (upper lower shaft) direction shown in Fig. 1.That is, securement head (not shown) has following structure: the mode that can be elevated in the vertical direction via bearing (not shown) supports the steady arm R towards Z-Z axle (upper lower shaft) direction configuration.The upper surface of steady arm R is configured with drive division (not shown) to be used as making this steady arm R with the mobile unit of the mode movement be freely elevated on Z-Z direction of principal axis (upper and lower direction of principal axis), the driving mechanism that this drive division obtains after comprising such as combination servomotor and ball screw.As drive division, being not limited only to above-mentioned structure, can also be the drive division be made up of the driving mechanism and other driving mechanism such as with driving cam.
And, by handling unit (not shown) in the mode such as moved freely on X-X axle (left and right directions) direction shown in Fig. 1 to support this securement head, or support this securement head by other handling unit (not shown) in the mode moved freely on Y-axis (antero posterior axis) direction.The lower end side of this steady arm R is provided with holding unit 50 described later.
Holding unit 50 comprises absorption showerhead 52, and absorption showerhead 52 as shown in Figure 1, comprises support portion 54 and nozzle body 56.Support portion 54 is fixed with supportive body 60, this supportive body 60 to insert in urceolus 58 from below.Supportive body 60 has along the extension of its direction of principal axis and thereunder forms the patchhole 60a of opening, and nozzle body 56 inserts shower nozzle patchhole 60a in the mode that can be free to slide in axial direction.Nozzle body 56 is provided with lid 62, in shower nozzle patchhole 60a, cylinder 64 is installed.Lid 62 and the inner peripheral surface of cylinder 64 are to separate minimum spacing and slidably mode connects.Lid 62 and cylinder 64 are formed by the such as anti-abrasive material such as metal, mar proof plastics respectively.
By making the gib screw 66 be tightened from the outside of support portion 54 clamp with steady arm R, fix this support portion 54.Support portion 54 is taken off by turning on this gib screw 66.
In addition, on the top of supportive body 60, be formed dividually along axial attraction recess 60b with shower nozzle patchhole 60a.Be inserted with the bottom of steady arm R in this attraction recess 60b, this holding unit 50 that makes of this steady arm R is elevated on Z-Z axle (upper lower shaft) direction shown in Fig. 1.In the configuration of the axle center of this steady arm R and the suction hole (not shown) attracting recess 60b to be connected, vacuum absorption device (not shown) is connected to this suction hole via absorption flexible pipe (not shown).
On the other hand, the columniform stop pin 68 that the diametric(al) of nozzle body 56 extends is given prominence to laterally, and this nozzle body 56 of break-through.Two teats 68a, 68b of this stop pin 68 insert and are formed in the stop hole 60c of supportive body 60.Thus, only allow nozzle body 56 distance that mobile and stop pin 66 and stop hole 60c diameter difference is suitable in the vertical direction, thus stop this nozzle body 56 come off or rotate in the axial direction downwards.Stop pin 68 inserts from the through hole 59 of the urceolus 58 running through support portion 54, to run through nozzle body 56.
Recess 60b is attracted to attract path 70,72,74,76 to be communicated with the adsorption hole 56a in the axle center being formed at nozzle body 56 via the 1st, the 2nd, the 3rd, the 4th.Attract path 70 by arranging columnar gap to be formed the 1st between the inner peripheral surface and the outer peripheral face of supportive body 60 of urceolus 58, and utilize sealing ring 78 to seal.On the top of supportive body 60, form the 2nd in the mode being formed four crossway in diametric(al) and attract path 72.2nd attracts the external port and the 1st of path 72 to attract the upper end of path 70 to be connected, and its inner port is connected with attraction recess 60b.
In addition, in the bottom of supportive body 60, form the 3rd in the mode being formed four crossway in diametric(al) and attract path 74.3rd attracts the external port and the 1st of path 74 to attract the bottom of path 70 to be connected, and its inner port forms opening towards shower nozzle patchhole 60a.And, in the upper end of supportive body 56, form the 4th in the mode being formed four crossway in diametric(al) and attract path 76.4th attracts the external port of path 76 via lid 62, hole 62a, 64a of being formed at cylinder 64, and attract path 74 to be connected with the 3rd, its inner port is connected with adsorption hole 56a.
Thus, the negative pressure produced by vacuum suction device (not shown) arrives the 2nd from the suction hole (not shown) of steady arm R and the attraction recess 60b of supportive body 60 and attracts path 72, attracts path 72 to attract path 70 also to attract path 74,76 to arrive adsorption hole 56a by the 4th via the 1st from the 2nd.
Nozzle body 56 is formed with such as columnar oil nozzle 80 in the front end of nozzle body 56, it is circular adsorption orifice 56b that this oil nozzle 80 has such as cross section.Between nozzle body 56 and oil nozzle 80, be provided with the connecting portion 82 for connecting nozzle body 56 and oil nozzle 80 communicatively.This connecting portion 82 is formed as such as diameter and is greater than oil nozzle 80 and the cylindrical shape being less than nozzle body 56.Nozzle body 56, oil nozzle 80 and connecting portion 82 utilize wimet, copper, silver and the conductive material such as golden to form as one.The adsorption orifice 56b of oil nozzle 80 is connected with adsorption hole 56a via the inner space 82a of connecting portion 82.Oil nozzle 80 is configured to give prominence to downwards from the lower surface of support portion 60.Nozzle body 56 is provided with lid 62 and stop pin 68, and is provided with the 4th attraction path 76.
And, between the inner bottom surface 60d of shower nozzle patchhole 60a and the upper surface 62b of the lid 62 of nozzle body 56 of supportive body 60, be configured with as the buffer gear exerted a force to nozzle body 56 downwards, such as wind spring 84.
In addition, holding unit 50 as shown in Figure 1, comprises the relaying component 86 that the 1st mensuration terminal 16 and holding unit 50 are electrically connected.Relaying component 86 links with the holding unit carrying out movement with the mobile unit comprising steady arm R, and is configured at holding unit 50, thus can move on the moving direction of this holding unit 50.
That is, relaying component 86 as shown in Figure 1 and Figure 4, comprises the interposer 88 being formed as such as circular plate type by insulating material.Interposer 88 is configured in the outside of support portion 54 in the mode of chimeric installation, and this support portion 54 is positioned near the nozzle body 56 of absorption showerhead 52.Interposer 88 is formed with such as 2 semicircular pattern electrode 90a and 90b on an one interarea.2 pattern electrode 90a and 90b are formed the central authorities of interposer 86 are spaced apart.2 pattern electrode 90a and 90b are formed by copper, silver and the conductive material such as golden respectively.2 pattern electrode 90a and 90b are formed on the bearing surface that abuts against with the contact site 24 of 2 contact probes 18.As long as be formed at this bearing surface, the shape of 2 pattern electrode 90a and 90b can be the shape beyond semicircle.
And 2 pattern electrode 90a and 90b of interposer 86 are electrically connected with the nozzle body 56 of absorption showerhead 52 respectively.In the case, 2 pattern electrode 90a and 90b utilize wire 92a and 92b such as lead-in wire to be connected to the outer peripheral face of the connecting portion 82 of nozzle body 56.Utilize fixed cell 94 such as welding grade one end of wire 92a and 92b to be individually fixed in a part of pattern electrode 90a and 90b of interposer 86, and the fixed cell 96 such as utilize stop collar to fix is fixed on the outer peripheral face of the connecting portion 82 of nozzle body 56.In addition, as the fixed cell of wire 92a and 92b for being electrically connected nozzle body 56 and interposer 86, except welding and the fixing method of stop collar, other fixed cell such as can also to be screwed and to be fixed.
In the above-described embodiment, graphics processing unit (not shown) and control module (not shown) can also be comprised, this graphics processing unit is when adsorbing with absorption showerhead 52 and keep electronic devices and components, further when by handling unit (not shown) the absorption showerhead 52 maintaining electronic devices and components being transported to the regulation measuring platform 14 and locating, when there being requirement to positional precision, such as the image units such as CCD camera are utilized to maintain electronic devices and components to absorption and the leading section of the nozzle body 56 moved it and the reference mark that is set in advance in this leading section are taken from measuring the below of shower nozzle 14, detect the absorption position of electronic devices and components thus, and according to detecting the absorption position of electronic devices and components of relative position of leading section of reference mark and nozzle body 56, calculate its position offset, the position of this control module to absorption showerhead 52 adjusts thus corrects this position offset, so that absorption showerhead 52 is configured to locating of regulation.
In the case, as shown in Figure 4, on the oil nozzle 80 of nozzle body 56, preferably add the aid 98 arranged for supporting and assist above-mentioned shooting unit.This aid 98 comprises subring 98A.Subring 98A is formed by such as having flexible white plastic or silicon rubber etc.By subring A being formed as white, when carrying out scale-of-two or multi-system process with graphics processing unit to the image read in by shooting unit, be easy to realize mensuration region and measure extra-regional identification.
Then, to the example using said determination device 10 to measure the assay method of the electrical specification of electronic devices and components, be described below with reference to Fig. 1 ~ Fig. 4 and Figure 10 etc.In assay method below, the electronic devices and components as measuring object are the patch-type electronic devices and components (such as with reference to the electronic devices and components W of Figure 10) being formed with side's outer electrode and the opposing party's outer electrode on a mutually relative interarea whole with another interarea respectively.
In this assay method, such as, components and parts feed unit (not shown) is first utilized electronic devices and components W to be supplied to the upper surface of components and parts supply platform.
If electronic devices and components W to be supplied to components and parts supply platform, then the absorption showerhead 52 being installed on the holding unit 50 of securement head (not shown) is utilized to adsorb and keep these electronic devices and components W.In the case, the adsorption orifice 56b of the oil nozzle 80 of showerhead 56 is utilized to adsorb electronic devices and components W interarea and keep.
Then, X-X axle (Y-axis) direction utilizing handling unit (not shown) and other handling unit (not shown) to make securement head (not shown) shown in Fig. 1 and Y-Y axle (antero posterior axis) side move up, the absorption showerhead 52 being installed on the holding unit 50 of this securement head as shown in Figure 1, is carried to the top that locates measuring platform 14.Now, absorption showerhead 52 is configured at the 2nd and measures the top of terminal 40, relative to make the outer electrode Wb of another interarea of electronic devices and components W and the 2nd measure the mensuration electrode 44 of terminal 40.
Thus, securement head utilizes mobile unit that the absorption showerhead 52 of holding unit 50 is moved towards the mensuration electrode 44 that the 2nd measures terminal 40, measures the mensuration electrode 44 of terminal to abutting to make the outer electrode Wb of another interarea of electronic devices and components W and the 2nd.In the case, absorption showerhead 52 utilizes mobile unit to move towards the mensuration electrode 44 that the 2nd measures terminal 40, therewith in linkage, the interposer 88 of relaying component 86 moves together with absorption showerhead 52 on this moving direction, thus measures terminal 16 abut against with the 1st.
Therefore, pattern electrode 90a and 90b of interposer 88 abuts against with the contact site 24 of 2 contact probes 18 respectively.That is, the 1st outer electrode Wa measuring an interarea of terminal 16 and electronic devices and components W is electrically connected via relaying component 86 and the nozzle body 56 of adsorbing showerhead 52, measures the electrical specification of electronic devices and components W thus.In the case, pattern electrode 90a and 90b of interposer 88 has the function as relay connection electrode respectively, this relay connection electrode make the 1st to measure via the oil nozzle 80 of nozzle body 56 mensuration electrode 44 that terminal and the 2nd measures terminal 40 is electrically connected.
Thus, after the electrical specification measuring electronic devices and components W, measuring platform 14 to be transported to by next electronic devices and components W, making the securement head being provided with absorption showerhead 52 be back to components and parts supply platform, again repeating action same as described above.
In the assay method of the electrical specification of the electronic devices and components of the determinator 10 of this embodiment of use, comprise for electronic devices and components W being configured at the mechanism measuring platform 14: the electronic devices and components W that the absorption showerhead 52 being kept unit 50 keeps is transported to the handling unit measuring the relative position of terminal 40 with the 2nd; And make this absorption showerhead 52 measure terminal 40 towards the 2nd to move thus the mobile unit that abuts against of the mensuration electrode 44 making the outer electrode Wb of another interarea of electronic devices and components W and the 2nd measure terminal 40.In the case, if absorption showerhead 52 utilizes mobile unit to measure terminal 40 towards the 2nd and moves, then with its in linkage, the interposer 88 of relaying component 86 moves on the moving direction of absorption showerhead 52, and via the nozzle body 56 of this interposer 88 and absorption showerhead 52, the 1st outer electrode Wb measuring an interarea of terminal 16 and electronic devices and components W is electrically connected.That is, in determinator 10 preferably, for electronic devices and components W being configured at the mechanism that the mechanism measuring platform 14 is configured to double as being used for the electrical specification measuring these electronic devices and components W.
Therefore, in this embodiment, such as, compared to the prior art shown in patent documentation 1, owing to not needing the elevating mechanism making the 1st mensuration terminal 16 self lifting, therefore, it is possible to shorten the time measured needed for electrical specification.
In addition, in determinator 10 preferably, for by handling unit, electronic devices and components W being transported to the situation measuring the relative position of terminal 40 with the 2nd, electronic devices and components W and the 2nd is made to measure the situation that terminal 40 abuts against the electrical specification measuring electronic devices and components W with mobile unit, these electronic devices and components W is transported to again the situation of next operation after the electrical specification measuring electronic devices and components W, in each situation above-mentioned, owing to can maintain in the state utilizing absorption showerhead 52 to adsorb maintenance electronic devices and components W respectively, therefore, it is possible to prevent the position of electronic devices and components W from offseting.Therefore, it is possible to prevent the bad connection caused because of the position skew of electronic devices and components W, and the reliability of estimating precision can be improved.Thus, what offset without the need to the position arranged in addition for revising electronic devices and components W relocates mechanism etc.
And, in this embodiment, abut against by making the 1st mensuration contact probe 18 of terminal 16 and the interposer 88 of relaying component 86, make the 1st to measure terminal 16 to be electrically connected with the outer electrode Wa of the interarea being held in the electronic devices and components W adsorbing showerhead 52, therefore, it is possible to guarantee that pattern electrode 90a, 90b and the 1st of interposer 88 measure the scope of the abutting portion of terminal 16 fully.Therefore, the reduction of the mensuration reliability caused because of connection error can be prevented, even if such as there is scale error at electronic devices and components W, in the electrode separation of outer electrode or electrode width tool situation devious, compared with the such as prior art shown in patent documentation 1, can improve the 1st measures between the outer electrode Wa of an interarea of terminal 16 and electronic devices and components W, and the 2nd measures abutting precision between the mensuration electrode 44 of terminal 40 and the outer electrode Wb of another interarea of electronic devices and components W, and the electrical connection precision between them, thus the reliability of estimating precision can be improved.
In addition, in this embodiment, platform 14 side is measured because the mensuration electrode 44 that can measure terminal 16 and the 2nd mensuration terminal 40 by the 1st is configured at, therefore, it is possible to the lead-in wire 36,48 etc. be connected with the resistance measurer M of the electrical specification measuring electronic devices and components W is connected up concentrate on this mensuration platform 14 side, and its length of arrangement wire can be shortened.In the case, the absorption handling unit of showerhead 52 side and the wiring of mobile unit is configured at, therefore, it is possible to prevent the wiring of the handling unit of carrying the absorption showerhead 52 maintaining electronic devices and components W and the mobile unit that makes this absorption showerhead 52 movement from deterioration occurring owing to simplifying.
And, in this embodiment, absorption showerhead 52 comprise exert a force as buffer gear from the moving direction to mobile unit, be such as wind spring 84,1st structure of contact probe 18 measuring terminal 16 is comprise such as enclosing Compress Spring 28 as other buffer structure exerted a force towards the direction contrary with the moving direction of absorption showerhead 52, therefore, it is possible to absorb with this buffer gear and reduce to act on when the mensuration electrode 44 that electronic devices and components W and the 2nd measures terminal 40 abuts against the impulsive force of electronic devices and components W.Thus, can prevent from causing damage (apparent wound and inner crack etc.) to electronic devices and components W.In the case, the 1st measures the buffer gear of terminal 16 by adjusting the cushion effect of this buffer gear, can be corresponding with the thickness being configured at the electronic devices and components W measured on platform 14.
In the above-described embodiment, as shown in Figure 1, be provided with for connecting the absorption nozzle body 56 of showerhead 52 and the such as columnar connecting portion 82 of oil nozzle 80, but forming the part of the leading section of adsorbing showerhead 52, this connecting portion 82 is not only defined in cylindrical shape, as shown in Figure 5, also can be formed with the connecting portion 100 of rectangular block shape.Connecting portion 100 is formed as block-shaped and has planar portions, therefore compared to columnar connecting portion 82, is easier to mechanically wait wire 92a, 92b to be connected to the leading section of nozzle body 56 in lead-in wire.In the case, in the embodiment shown in Fig. 5, utilize fixed cell 94 such as welding grade one end of wire 92a and 92b to be fixed on a part of pattern electrode 90a and 90b of interposer 86, profit such as to be screwed at the planar portions that its other end is fixed on the connecting portion 100 of nozzle body 56 by fixed cell 102.
As connecting portion, the form above-mentioned connecting portion 100 being divided into such as 2 also can be adopted.That is, the connecting portion 106 shown in Fig. 6 and Fig. 7 comprises the 1st brace 100A and the 2nd brace 100B.1st brace 100A and the 2nd brace 100B is formed as rectangular block shape respectively.
In the case, the oil nozzle 80 being connected to connecting portion 106 has the form being divided into 2 similarly.Oil nozzle 80 comprises the 1st oil nozzle cutting plate 80A and the 2nd oil nozzle cutting plate 80B.1st brace 100A and the 1st oil nozzle cutting plate 80A is formed as one, forms the 1st shower nozzle front-end block portion 102A.Similarly, the 2nd brace 100B and the 2nd oil nozzle cutting plate 80B is formed as one, forms the 2nd shower nozzle front-end block portion 102A.
The composition surface 104a of the 1st shower nozzle front-end block portion 102A and the composition surface 104b such as cross section had respectively for forming shower nozzle adsorption hole 56a of the 2nd shower nozzle front-end block portion 102B are semicircular concave part (not shown).At the jointing end face of the 1st shower nozzle front-end block portion 102A and the 2nd shower nozzle front-end block portion 102B, be coated with such as insulativity adhesives.And, by the 1st shower nozzle front-end block portion 102A and the 2nd shower nozzle front-end block portion 102B is bonding in the mode of docking, form the shower nozzle leading section 108 possessing shower nozzle adsorption hole 56a thus in the central portion.In the case, aid 98 is embedded with in the oil nozzle 80 of the 1st oil nozzle cutting plate 80A and the 2nd oil nozzle cutting plate 80B formation.
When using above-mentioned shower nozzle leading section 108, such as shown in Fig. 8 (C) and Figure 11, the electronic devices and components W shown as measuring object have stride across whole of a mutually relative side with a part for an interarea and side's outer electrode Wa of being formed and the situation (such as with reference to the electronic devices and components W of Fig. 8 (C) and Figure 11) of the opposing party's outer electrode Wb that strides across whole of another mutually relative side and a part for another interarea and formed.That is, as the shower nozzle leading section of absorption showerhead 52, as shown in Figure 6 and Figure 7, according to the forming position of the outer electrode of electronic devices and components W, application has the shower nozzle leading section 108 of the structure being divided into 2, measure terminal 40 as the 2nd, as shown in figure 11, application is divided into mensuration electrode 44a, 44b of 2.
In the case, 1st measures a contact probe 18 of terminal 16 and the interarea side of another contact probe 18 from electronic devices and components W, via pattern electrode 90a, 90b of the 1st oil nozzle cutting plate 80A of shower nozzle leading section 108 and the 2nd oil nozzle cutting plate 80B, wire 92a, 92b, interposer 88, be electrically connected to side's outer electrode Wa and the opposing party's outer electrode Wb of these electronic devices and components W.And the 2nd measures mensuration electrode 44a, 44b of terminal 40 from another interarea side of electronic devices and components W, is electrically connected to side's outer electrode Wa and the opposing party's outer electrode Wb of these electronic devices and components W.That is, following structure is become: utilize the 4 terminal resistance determination methods of carrying out 2 termination contact from the above-below direction of electronic devices and components W, measure the structure of the electrical specification of electronic devices and components W.
Therefore, by utilizing 4 terminal resistance determination methods, the harmful effect caused because of contact resistance can be got rid of, can high-precision mensuration be carried out.That is, abut against by making 4 terminals and electronic devices and components W, can get rid of and adsorb and keep the resistive component of the shower nozzle leading section 108 of the absorption showerhead 52 of these electronic devices and components W and the 2nd to measure the resistive component of terminal 40, resistance value can be measured to electronic devices and components W accurately.
As the shower nozzle of the shower nozzle leading section used in above-mentioned 4 terminal resistance determination methods, as shown in Figure 6 and Figure 7, the adsorption hole 56a of shower nozzle leading section 108 such as has circular form, and form with single adsorption hole 56a, but the shape of adsorption hole, quantity and configuration are not limited in said structure, as shown in Figure 8, also can be configure 3 this modes using the axle center of nozzle body 56 as center respectively symmetrically with left and right to carry out the structure that configuration obtains as cross-section 6 adsorption holes 110 that are circle.In the case, be configured with the wall part 112 be made up of insulating material at the axle center part of nozzle body 56, and the 1st shower nozzle front-end block portion 102A carried out being separated with the 2nd shower nozzle front-end block portion 102B they can not be conducted.
In addition, adsorption hole is as shown in Fig. 9 (B), can be symmetrically to configure the adsorption hole 114 that 1 such as cross-section is rectangle and the structure obtained respectively using the axle center of nozzle body 56 as center, and this adsorption hole is such as shown in Fig. 9 (C), also can be cross-section be semicircular adsorption hole 116.
In each embodiment shown in Fig. 1 ~ Fig. 4, Fig. 5 and Fig. 6 ~ Fig. 7, such as shown in Figure 10 and Figure 11, the surface of the 2nd mensuration electrode 44 or mensuration electrode 44a, 44b measuring terminal 40 also can arrange the anisotropic conductive rubber 118 of film-form.In the case, if apply pressure to the anisotropic conductive rubber 118 of film-form, then only become conducting state executing on stressed direction.Therefore, by measuring the mensuration electrode 44 of terminal 40 from an interarea side direction electronic devices and components W and the 2nd of electronic devices and components W or measuring the surface applying pressure of electrode 44a, 44b, at the outer electrode Wb of electronic devices and components W and this mensuration electrode 44 or measure between electrode 44a, 44b, the anisotropic conductive rubber 118 of film-form becomes conducting state.Thus, mensuration electrode 44 or mensuration electrode 44a, 44b of being formed at the opposing party's outer electrode Wb and the 2nd mensuration terminal of another interarea of electronic devices and components W are electrically connected.
In the embodiment shown in Figure 10 and Figure 11, such as shorten the distance between side's outer electrode Wa and the opposing party's outer electrode Wb by the miniaturization of electronic devices and components W, even if or the shape of this outer electrode electrode Wa, Wb has deviation, utilize the elasticity of the anisotropic conductive rubber 118 of film-form can offset form variations slightly on the thickness direction of the anisotropic conductive rubber 118 of this film-form.Even if the mensuration electrode 44 that electronic devices and components W measures terminal 40 in the mode and the 2nd of such as local or the surface measuring electrode 44a, 44b abut against obliquely, or the surface of this mensuration electrode 44 or mensuration electrode 44a, 44b tilts a little, also the elasticity of the anisotropic conductive rubber 118 of this film-form can be utilized to offset the inclination that electronic devices and components W and the 2nd measures the mensuration electrode 44 of terminal 40 or the surface of mensuration electrode 44a, 44b, therefore, it is possible to prevent the reduction measuring reliability.
Thus, the bad connection between outer electrode Wa, Wb of electronic devices and components W and the 2nd mensuration terminal 40 can be prevented, and the electrical specification of electronic devices and components W can be measured exactly.And, measure terminal 40 owing to being made outer electrode Wa, Wb of electronic devices and components W and the 2nd by the anisotropic conductive rubber 118 of film-form to abut against, the elastic reaction of anisotropic conductive rubber is also used as buffer action, such as compared to the prior art described in patent documentation 1, make electronic devices and components W not easily damaged.
In the determinator 10 shown in Fig. 1, handling unit (not shown) is utilized to support the securement head (not shown in FIG) being provided with absorption showerhead 52 of holding unit 50, freely move on X-X axle (Y-axis) direction such as shown in Fig. 1 to make it, and utilize other handling unit (not shown) to support the securement head being provided with absorption showerhead 52 of this support holding unit 50, freely move on Y-axis (antero posterior axis) direction to make it, but such as shown in Figure 12 and Figure 13, also securement head 120 and 122 can be made to be configured to respectively freely to rotate along rotating shaft 120a and 122a.
And, in the determinator 10 shown in Fig. 1, there is the elevating function making the movement from top to bottom on Z-Z axle (upper lower shaft) direction shown in Fig. 1 of this absorption showerhead 52, but as shown in figure 12, also can have the mobile unit making this absorption showerhead 52 movement from bottom to up, or make the mobile unit of this mensuration platform 14 movement from top to bottom.That is, can also have make absorption showerhead 52 and measure platform 14 can on Z-Z axle (upper lower shaft) direction the mobile unit of relatively back and forth movement.In addition, such as shown in figure 13, can also have that make absorption showerhead 52 and measure platform 14 can the mobile unit of relatively back and forth movement on (X-X axle (Y-axis) direction shown in Fig. 1) in the horizontal direction.
The present invention is not limited in the respective embodiments described above, can carry out various distortion in the scope of its purport.
Label declaration
The electrical specification determinator of 10 electronic devices and components
12 measure platform
14 measure platform
16 the 1st measure terminal
18 contact probes
20 socket
22 probe bodies
24 contact sites
26 plunger portion
28 Compress Springs (other buffer gear)
30 depressed parts
32 sleeve parts
34 inner bottom parts
36,48 lead-in wires
38 patchholes
40 the 2nd measure terminal
42 recesses
44 measure electrode
46 extraction electrodes
50 holding units
52 absorption showerheads
54 support portions
56 nozzle body
56a adsorption hole
56b adsorption orifice
58 urceolus
59 reach through holes
60 supportive bodies
60a shower nozzle patchhole
60b attracts recess
60c stop hole
60d inner bottom surface
62 lids
64 cylinders
66 gib screws
68 stop pin
70 the 1st attract path
72 the 2nd attract path
74 the 3rd attract path
76 the 4th attract path
78 sealing rings
80 oil nozzles
82,100,106 connecting portions
The inner space of 82a connecting portion
84 wind springs (buffer gear)
86 relaying components
88 interposers
90a, 90b pattern electrode (connecting electrode)
92a, 92b wire
94,96 fixed cells
98 aids
98A subring
100A the 1st brace
100B the 2nd brace
102A the 1st shower nozzle front-end block portion
102B the 2nd shower nozzle front-end block portion
104a, 104b slot segmentation portion
108 shower nozzle leading sections
110,114,116 adsorption holes
112 wall parts
The anisotropic conductive rubber of 118 film-forms
120,122 securement heads
120a, 122a rotating shaft
M resistance measurer
W electronic devices and components
Wa mono-side outer electrode
Wb the opposing party outer electrode
Claims (5)
1. an electrical specification determinator for electronic devices and components,
The electrical specification of electrical specification determinator to the electronic devices and components of patch-type of these electronic devices and components measures, side's outer electrode and the opposing party's outer electrode is formed respectively in a mutually relative interarea side of the electronic devices and components of this patch-type and going up at least partially of another interarea side, the feature of the electrical specification determinator of these electronic devices and components is, comprises:
1st measures terminal, and the 1st measures terminal is electrically connected with one outer electrode, and is connected with the analyzer measuring described electrical specification;
2nd measures terminal, and the 2nd measures terminal can abut against with described the opposing party's outer electrode, and is connected with described analyzer;
Holding unit, this holding unit keeps described electronic devices and components, and can measure terminal and be electrically connected with the described 1st;
Handling unit, described holding unit is transported to the described electronic devices and components making to be kept by described holding unit and measures the relative position of terminal with the described 2nd by this handling unit;
Mobile unit, this mobile unit makes described holding unit relatively move towards described 2nd mensuration terminal, measures terminal abut against with the described the opposing party's outer electrode and the described 2nd that make described electronic devices and components; And
Relaying component, this relaying component can move in linkage with the holding unit being carried out movement by described mobile unit on the moving direction of described holding unit, and makes the described 1st to measure terminal and the electrical connection of described holding unit.
2. the electrical specification determinator of electronic devices and components as claimed in claim 1, is characterized in that,
Described holding unit also comprises the buffer gear that the moving direction to described mobile unit exerts a force,
Described 1st measures terminal also comprises other buffer gear exerted a force to the direction contrary with the moving direction of described holding unit.
3. the electrical specification determinator of electronic devices and components as claimed in claim 1 or 2, is characterized in that,
Described holding unit comprises absorption showerhead, and this absorption showerhead can adsorb and keep an interarea of described electronic devices and components, and described 1st determination unit comprises multiple probe,
By described handling unit described absorption showerhead is transported to and measures the relative position of terminal with the described 2nd, make described electronic devices and components move to make described the opposing party's outer electrode of described electronic devices and components and the described 2nd to measure terminal with described mobile unit to abut against, multiple described probe and described relaying component abut against, in this condition, the electrical specification of described electronic devices and components is measured.
4. the electrical specification determinator of electronic devices and components as claimed any one in claims 1 to 3, is characterized in that,
The anisotropic conductive rubber of film-form is provided with on the described 2nd surface measuring terminal.
5. the electrical specification determinator of the electronic devices and components according to any one of Claims 1-4, is characterized in that,
Be configured to utilize 4 terminals measurement methods to measure the electrical specification of described electronic devices and components.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013189741A JP2015055575A (en) | 2013-09-12 | 2013-09-12 | Electric characteristic measurement device of electronic component |
| JP2013-189741 | 2013-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104459503A true CN104459503A (en) | 2015-03-25 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410427803.5A Pending CN104459503A (en) | 2013-09-12 | 2014-08-27 | Electrical characteristic determining device for electronic component |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2015055575A (en) |
| CN (1) | CN104459503A (en) |
| TW (1) | TW201514514A (en) |
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| CN106959409A (en) * | 2015-10-30 | 2017-07-18 | 精工爱普生株式会社 | Electronic component conveying device and electronic component inspection device |
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| CN108169618B (en) * | 2018-01-08 | 2021-02-09 | 四川九洲电器集团有限责任公司 | Testing device and testing method |
| CN108717157A (en) * | 2018-04-20 | 2018-10-30 | 四川旭茂微科技有限公司 | A kind of diode production test device and its test method |
| CN108717157B (en) * | 2018-04-20 | 2020-11-03 | 四川旭茂微科技有限公司 | Testing device and testing method for diode production |
| CN109638505A (en) * | 2018-12-28 | 2019-04-16 | 黄江涛 | Wire and cable pressure test special joint |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2015055575A (en) | 2015-03-23 |
| TW201514514A (en) | 2015-04-16 |
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