CN104441275A - Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method - Google Patents
Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method Download PDFInfo
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- CN104441275A CN104441275A CN201410418893.1A CN201410418893A CN104441275A CN 104441275 A CN104441275 A CN 104441275A CN 201410418893 A CN201410418893 A CN 201410418893A CN 104441275 A CN104441275 A CN 104441275A
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- Prior art keywords
- scribe wheel
- sword
- leading edge
- wheel
- scribing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools
- B24B3/60—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of tools not covered by the preceding subgroups
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/027—Scoring tool holders; Driving mechanisms therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention provides a scribing wheel, a holder unit, a scribing apparatus, a method for manufacturing scribing wheel, and a scribing method. The present invention provides a scoring round, a holder unit, a scribing device manufacturing method of a scoring wheel and a scoring method in use, by a diamond edge scribing wheel constituted only be when compared with a glass substrate hard ceramic substrate breaking, life scribe wheel longer. The present invention is made by the blade (42) consists only of diamond, the blade (43) there is applied a radius of 0.8 to 5 microns processing scribe wheel angle R (40) is used, the angle processing without R scribing wheel compared to significantly reduce the formation of the blade gap, extending the life of scoring wheel.
Description
Technical field
The present invention relates to a kind of brittle substrate surface being adapted at the more general amorphous glass substrate such as ceramic substrate, sapphire substrate, silicon substrate more hard and form the scribe wheel of score line, the holder unit possessing this scribe wheel, scoring device, the manufacture method of scribe wheel and rose method.
Background technology
The use of scribe wheel, for people, has closely bound up with inseparable relation.To when carrying out disjunction for amorphous glass substrates such as liquid crystal panels, generally speaking, be use as patent document " Japanese Unexamined Patent Publication 55-106635 publication " the scribe wheel be made up of superhard alloy that discloses or the scribe wheel be made up of polycrystalline diamond (diamond) sintered body compared with superhard alloy hard.This kind of polycrystalline diamond sintered body to be mixed with diamond particles (amount 75 ~ 90vol%) and the thing in conjunction with material (cobalt etc.), to be sintered at high temperature under high pressure.
But, when carrying out the disjunction such as compared with the ceramic substrate such as aluminium oxide of glass substrate hard, the scribe wheel be made up of superhard alloy that patent document " Japanese Unexamined Patent Publication 55-106635 publication " discloses and the scribe wheel be made up of polycrystalline diamond sintered body, sword leading edge can produce breach or abrasion at once, and only namely tens of meters of degree cannot form slight crack.Therefore, the scribe wheel be made up of superhard alloy or the scribe wheel be made up of polycrystalline diamond sintered body is used to carry out, compared with the disjunction of the glass substrate more ceramic substrate etc. of hard, being actually infeasible.
Therefore, when carrying out the disjunction of the hard substrates such as ceramic substrate, using and carrying out a thing by compared with superhard alloy and the polycrystalline diamond sintered body scribe wheel that more polycrystalline diamond of hard and monocrystalline diamond are formed, inquiring into all to some extent all the time.
Because the defect that above-mentioned existing scribe wheel exists, the present inventor is based on being engaged in the practical experience and professional knowledge that this type of product design manufacture enriches for many years, and coordinate the utilization of scientific principle, actively in addition research and innovation, to founding a kind of scribe wheel, holder unit, scoring device of new structure, the manufacture method of new scribe wheel and a rose method, can improve general existing scribe wheel, make it have more practicality.Through constantly research, design, and through repeatedly studying sample and after improving, finally creating the present invention had practical value.
Summary of the invention
The object of the invention is to, overcome the defect that existing scribe wheel exists, and a kind of scribe wheel, holder unit, scoring device of new structure are provided, a kind of manufacture method of new scribe wheel and rose method, when technical problem to be solved is to provide the disjunction that a kind of scribe wheel using sword to be only made up of diamond carries out compared with the ceramic substrate etc. of glass substrate hard, there is more long-life scribe wheel, holder unit, scoring device, the manufacture method of scribe wheel and rose method, thus be more suitable for practicality.
For reaching above-mentioned purpose, the scribe wheel that sword of the present invention is only made up of diamond, the sword leading edge of its sword executes the R angle processing of radius 0.8 ~ 5 μm.
According to scribe wheel of the present invention, execute R angle due to sword leading edge and processed circular arc, even therefore for the disjunction of ceramic substrate etc., and do not executed compared with scribe wheel that R angle processes, significantly can reduce sword leading edge and form breach, make the life-span of scribe wheel longer.
Again, in scribe wheel of the present invention, aforementioned diamond is monocrystalline diamond.
According to scribe wheel of the present invention, while the impact on intensity being reduced at the crystal orientation through monocrystalline diamond, suppress the formation of sword leading edge notch, extend the life-span of scribe wheel.
Again, scribe wheel of the present invention is the disjunction of at least one brittle substrate in the group for being selected from pottery, sapphire and silicon formation.
According to scribe wheel of the present invention, to comparatively for the brittle substrate that the amorphous glass substrate that liquid crystal panel etc. is general is harder, the cut-out of distance can be grown by good carrying out.
Again, holder unit of the present invention, have the scribe wheel of above-mentioned any one, with aforementioned scribe wheel is held in rotatable holder.
According to holder unit of the present invention, significantly reducing the formation of scribe wheel sword leading edge notch, extending the life-span of scribe wheel, for being applicable to the holder unit of the disjunction carrying out ceramic substrate etc.
Again, scoring device of the present invention, possesses above-mentioned holder unit.
According to scoring device of the present invention, significantly reducing the formation of scribe wheel sword leading edge notch, extending the life-span of scribe wheel, for being applicable to the scoring device of the disjunction carrying out ceramic substrate etc.
Again, the manufacture method of scribe wheel of the present invention, be included in the discoideus component be only made up of diamond formed sword step, with the step of the sword leading edge of aforementioned sword being carried out to the processing of R angle.
According to the manufacture method of scribe wheel of the present invention, due to after formation sword, carry out the R angle processing of sword leading edge, therefore carry out grinding fully by counter blade surface and reduce the surface roughness of sword, and can prevent sword surface from forming breach, extend the life-span of scribe wheel further.In addition, after formation sword, carry out the R angle processing of sword leading edge, therefore more easily carry out the processing of the sword leading-edge radius reached as target.
Again, rose method of the present invention, being the scribe wheel that is only made up of diamond with sword forms score line being selected from least one brittle substrate in the group be made up of pottery, sapphire and silicon, and it is the aforementioned scribe wheel that the R angle using the sword leading edge of this sword aforementioned to execute radius 0.8 ~ 5 μm processes.
According to rose method of the present invention, by the scribe wheel that sword is only made up of diamond, to comparatively for the brittle substrate that the amorphous glass substrate that liquid crystal panel etc. is general is harder, the score line of longer distance can be formed.
In sum, the invention relates to a kind of scribe wheel and manufacture method thereof and rose method, holder unit, scoring device, a kind of scribe wheel using sword to be only made up of diamond is provided, when carrying out the decomposition compared with the ceramic substrate etc. of glass substrate hard, the scribe wheel that life-span is longer, holder unit, scoring device, the manufacture method of scribe wheel and rose method, only be made up of diamond by sword 42, sword leading edge 43 executes the use of the scribe wheel 40 of the R angle processing of radius 0.8 ~ 5 μm, compared with the scribe wheel of processing without R angle, significantly can reduce the formation of sword leading edge notch, extend the life-span of scribe wheel.The present invention has significant progress technically, and has obvious good effect, is really a new and innovative, progressive, practical new design.
Above-mentioned explanation is only the general introduction of technical solution of the present invention, in order to technological means of the present invention can be better understood, and can be implemented according to the content of description, and can become apparent to allow above and other object of the present invention, feature and advantage, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.
Accompanying drawing explanation
Fig. 1 is the skeleton diagram of the scoring device of embodiment.
Fig. 2 is the front view of the holder joint of embodiment.
Fig. 3 is the stereogram of the holder unit of embodiment.
Fig. 4 (A) is the left view of the scribe wheel of embodiment.
Fig. 4 (B) is the front view of scribe wheel.
Fig. 5 (A) is the front view before the R angle processing of the sword leading edge of embodiment.
Fig. 5 (B) is the front view after the R angle processing of sword leading edge.
Fig. 6 (A) is the concept map of a method of display R angle processing.
Fig. 6 (B) is the concept map of the other method of display R angle processing.
Fig. 7 (A) is the key diagram of the shooting point of the scribe wheel of display embodiment.
Fig. 7 (B) is the photo of the sword leading edge of the scribe wheel of embodiment.
Fig. 8 is the photo of the sword leading edge of the scribe wheel compared.
Fig. 9 (A) is the chart of the scribe wheel about embodiment.
Fig. 9 (B) is the chart about the scribe wheel in order to compare.
[symbol description]
10: scoring device 11: travelling carriage
12a, 12b: guide rail 13: ball screw
14,15: motor 16: tables
17: glass substrate 18:CCD video camera
19: crane span structure 20a, 20b: pillar
21: engraving head 22: guiding element
23: holder joint 23a: rotating shaft portion
23b: connector portions 24a, 24b: bearing
24c: distance piece 25: circular open
26: inner space 27: magnetite
28: parallel pin 30: holder unit
31: holder 32: installation portion
32a: rake 32b: par
33: retention groove 34a, 34b: support
35: support holes 40,140: scribe wheel
41: break bar body 42,52: sword
43: sword leading edge 43a: ridge line section
44: through hole 51: pin
52a, 53a: rotating shaft 52b, 53b: the plane of whetslate
53: whetslate
Detailed description of the invention
Below, use drawing that embodiment of the present invention is described.But, embodiment shown below is only the example that technological thought of the present invention is specialized, and there is no any by the intention of the present invention specific to this embodiment.The present invention is applicable to other embodiments contained in claim certainly.
Fig. 1 is the skeleton diagram of the scoring device 10 of the invention process form.Scoring device 10 possesses travelling carriage 11.Travelling carriage 11 and ball screw 13 screw togather, and the driving by motor 14 makes this ball screw 13 rotate, and is displaced into y-axis direction according to this along pair of guide rails 12a, 12b.
Motor 15 is provided with on travelling carriage 11.Motor 15 makes superposed tables 16 at xy Plane Rotation and is located in first retainer.Hardened glass substrate 17 as disjunction (scribe) object is loaded on tables 16, is kept with not shown vacuum attraction means etc.
This brittle substrate 17 is the ceramic substrate, silicon substrate, sapphire substrate etc. that are made up of low-temperature sintering ceramic and hard-fired ware, be selected from least one brittle substrate in the group be made up of pottery, sapphire and silicon, the brittle substrate of the amorphous glass substrate general used compared with the substrate etc. of liquid crystal panel more hard.
Scoring device 10, is being loaded in above the hardened glass substrate 17 of tables 16, is equipped with two CCD cameras 18 being formed in the alignment mark on this hardened glass substrate 17 surface in order to shooting.Crane span structure 19, in the mode of the tables 16 across travelling carriage 11 and its top, is set up in pillar 20a, 20b along the x-axis direction.
Be provided with guiding element 22 at crane span structure 19, engraving head 21 is arranged to be guided by this guiding element 22 and moves toward x-axis direction.At engraving head 21, by holder joint 23, holder unit 30 is installed.
Fig. 2 is the front view of the holder joint 23 being provided with holder unit 30.Again, Fig. 3 is the stereogram of holder unit 30.
Holder joint 23, in slightly cylindric, possesses rotating shaft portion 23a and connector portions 23b.Under the state that holder joint 23 is installed on engraving head 21, rotating shaft portion 23a is installed on two bearings 24a, 24b by columnar distance piece 24c, and this holder joint 23 is retained turn freely.
At columniform connector portions 23b, be provided with the inner space 26 of lower end side tool circular open 25.The top of this inner space 26 is embedded with magnetite 27.And load and unload holder unit 30 freely by magnetite 27, insert and be arranged on this inner space 26.
Holder unit 30 is that holder 31, scribe wheel 40 and pin (pin, not shown) are in one person.It is slightly cylindrical that holder 31 has shown in Fig. 3, formed with magnetic metal.Location installation portion 32 is provided with on the top of holder 31.This installation portion 32 is cut on the top of holder 31 to be formed, and possesses rake 32a and par 32b.
Inner space 26 is inserted by opening 25 in installation portion 32 side of holder 31.Now, the upper end side of holder 31 is attracted by magnetite 27, and the rake 32a of installation portion 32 contacts with the parallel pin 28 by inner space 26, carries out the location of holder unit 30 pairs of holder joints 23 according to this with fixing.Again, when taking off holder unit 30 from holder joint 23, can take off easily as long as holder 31 is drawn toward below.
Because scribe wheel 40 is running stores, need regularly change.In this embodiment, in order to easily carry out the mounting or dismounting of holder unit 30, being by replacing holder unit 30 itself, to carry out the replacing of the scribe wheel 40 being formed holder unit 30, can promptly changing scribe wheel 40.
In holder 31 bottom, be provided with the retention groove 33 of cutting holder 31 and being formed.In the bottom for arranging the holder 31 that this retention groove 33 is cut, clipping retention groove 33 has support 34a, 34b.In this retention groove 33, scribe wheel 40 configures in rotatable mode.Again, be formed with at support 34a, 34b the support holes 35 that the pin in order to rotatable maintenance scribe wheel 40 inserts respectively.
Secondly, the details of the scribe wheel 40 in order to disjunction brittle substrate 17 is described.The front view that Fig. 4 (A) is mounted in the left view of the scribe wheel 40 of holder 31 front end, Fig. 4 (B) is scribe wheel 40.
Refer to Fig. 4, scribe wheel 40 in discoideus, possess break bar body 41, sword 42, with sword leading edge 43.
At the immediate vicinity of break bar body 41, be formed and this break bar body 41 is run through the axial through hole 44 of rotation.Insert pin by through hole 44, namely scribe wheel 40 is rotatably held in holder 31 by this pin.
Sword 42, is formed as circular in the periphery of break bar body 41.Sword 42 in omiting V shape, relative to the thickness rotating axial sword 52, gradually diminishes along with towards sword front end 43 under forward sight.
Sword leading edge 43, different from the sword leading edge of general scribe wheel, R angle described later processing has been executed in the front end of sword 42, is arc-shaped along outermost perimembranous.
Then, use drawing that the manufacture method of scribe wheel 40 is described.Fig. 5 be with the enlarged drawing of sword 42 front end shown in the round A of Fig. 4 (B), Fig. 5 (A) be the front view of sword leading edge 43 before processing, Fig. 5 (B) is the front view of the sword leading edge 43 after processing.
Scribe wheel 40, is as polycrystalline diamond and monocrystalline diamond, does not comprise and only formed with diamond in conjunction with material.In this embodiment, scribe wheel 40 is formed with monocrystalline diamond.
First the scribe wheel 40 be made up of monocrystalline diamond, is form the discoideus component be made up of monocrystalline diamond.Specifically, monocrystalline diamond is the thing of Prof. Du Yucang, with high temperature and high pressure synthesis or chemical vapour deposition technique manufacture.Then, by this monocrystalline diamond with the modes such as laser cut out have the plectane of wish radius.
Secondly, discoideus monocrystalline diamond, by respectively along the side, two sides of circumferential part of cutting plectane, to form the sword 42 of the sword leading edge 43 of the pointed shape in front end had as shown in Fig. 5 (A).Again, the ridge line section of sword leading edge 43 now represents with symbol 43a.This state is general scribe wheel.Now, monocrystalline diamond can make surface roughness less compared with known PCD and superhard alloy, its result, and sword leading edge ridge line section is Sharp profit more.
Secondly, the sword leading edge 43 of counter blade 42 carries out the processing of R angle, grinds from ridge line section 43a, along the outermost perimembranous shown in Fig. 5 (B), under forward sight, makes the front end of sword leading edge 43 circular.
Herein, for the concrete direction making the front end of sword leading edge 43 become the R angle processing of circular arc, drawing is used to be illustrated.Such as, as a method, refer to Fig. 6 (A), the pin 51 of supporting is inserted at the through hole 44 of scribe wheel 40, scribe wheel 40 is rotated while relative to the vertical abutting sword leading edge 43 of the plane 52b of the discoideus whetslate 52 rotated centered by rotating shaft 52a, and make pin 51 swing that direction is mutual shown in arrow.Accordingly, the front end of sword leading edge 43 can be made circular.
Again, other method, then refer to Fig. 6 (B), insert the pin 51 of supporting at the through hole 44 of scribe wheel 40, scribe wheel 40 is rotated relative to the vertical abutting sword leading edge 43 of the plane 53b of the soft whetslate 53 of the tool flexibility rotated centered by rotating shaft 53a.Now, the plane 53b of whetslate 53 can be absorbed in, the front end of sword leading edge 43 can be made circular.
By above method, the scribe wheel 40 that the sword leading edge 43 of sword 42 is rounded can be manufactured.Again, in this embodiment, refer to Fig. 5 (A), be make the front end of sword leading edge 43 circular before, first respectively along cutting the side, circumferential part two sides of plectane, to form the inclined plane of front end point.Therefore, can by the inclined plane of sword 42 carefully be ground to mirror-like, make the surface roughness of sword 42 be minimum, and extend the life-span of sword 42 further.Again, due to be first complete sword 42 inclined plane, carry out again sword leading edge 43 R angle processing, be therefore more easily machined to the R radius as target.
Secondly, the size of scribe wheel 40 is described.The external diameter of scribe wheel 40 is 1.0 ~ 10.0mm, be preferably the scope of 1.0 ~ 5.0mm, especially better with 1.0 ~ 3.0mm.When the external diameter of scribe wheel 40 is less than 1.0mm, the operability of scribe wheel 40 will reduce.On the other hand, when the external diameter of scribe wheel 40 is greater than 10.0mm, then the situation that the vertical slight crack relative brittleness material substrate 17 when likely producing delineation cannot fully deeply be formed.
The thickness of scribe wheel 40 is the scope of 0.4 ~ 1.2mm, preferably 0.4 ~ 1.1mm.When the thickness of scribe wheel 40 is less than 0.4mm, processability and operability likely can be made to reduce.On the other hand, when the thickness of scribe wheel 40 is greater than 1.2mm, material and the manufacturing cost of scribe wheel 40 uprise.In addition, the aperture of through hole 44 is such as 0.8mm.
The sword toe angle of sword 42 is generally 90 ~ 160 °, obtuse angle, is preferably the scope of 100 ~ 150 °.
Again, about the circular blade leading edge 43 of front end, if the R radius of R angle processing is less than 0.8 μm, loading can concentrate on the front end of sword leading edge, causes the pressure of local and is easy to produce breach or the wearing and tearing of sword leading edge.On the other hand, R radius is excessive, and loading during line makes the section quality of disjunction metacoxal plate reduce by significantly increasing.Therefore, R radius scope with 0.8 ~ 5 μm, especially better with less than 3 μm.R radius, the scope of 0.8 ~ 5 μm, appropriateness can disperse loading because contact area is large, the pressure of local can be suppressed to prevent breach and the abrasion of sword leading edge.
Again, generally speaking, the aluminum oxide substrate etc. in brittle substrate 17, the particle diameter because of the aluminium oxide particles after sintering can make surface comparatively thick, and such as, the aftermentioned surface roughness Ra through measuring aluminum oxide substrate, surface roughness Ra is 0.296 μm.Therefore, the R radius of sword leading edge 43, after the surface roughness of brittle substrate 17 considering disjunction object, by getting fully large value, prevents the aspect effects such as the breach caused because substrate is concavo-convex very large.
Then, illustrate the scribe wheel 140 using in fact sword leading edge 43 to process circular scribe wheel 40 through R angle, process without R angle with sword leading edge 43, carry out the result of brittle substrate 17 disjunction.Disjunction condition is as follows.
The scribe wheel 40 be made up of monocrystalline diamond, external diameter is 2mm, sword toe angle is 120 °.Again, through the processing of R angle, the R radius of sword leading edge 43 is 1.0 μm.On the other hand, scribe wheel 140 is only being processed with or without R angle with the difference of scribe wheel 40, be made up of monocrystalline diamond external diameter 2mm, sword toe angle 120 ° scribe wheel.Again, without R angle processing scribe wheel 40 front end R radius after measured, be 0.17 μm.
Carry out the aluminum oxide substrate (Kyoto Ceramic Co., Ltd's system, material number: A476T) that disjunction branch brittle substrate 17 is thickness of slab 0.635mm.
Cut-off velocity is 100mm/sec, with the infiltration capacity 120 μm of slight crack for target adjustment line loading etc. is cut off.
For with the state of the sword leading edge of above-mentioned disjunction condition after brittle substrate 17 surface forms score line, captured photo etc. is used to be illustrated as rear.Fig. 7 is the disjunction result about scribe wheel 40, and Fig. 7 (A) is the key diagram of point captured by display, Fig. 7 (B) is the photo of shooting sword leading edge 43 and the infiltration capacity of slight crack.Fig. 8 is the photo of sword leading edge and the infiltration capacity of slight crack of shooting scribe wheel 140.Fig. 9 is the chart of the generating capacity of the sword leading edge notch showing relative travel distance, and Fig. 9 (A) is then chart about scribe wheel 140 about the chart of scribe wheel 40, Fig. 9 (B).
Referring to Fig. 7 (A), the shooting of sword leading edge 43, is determine that one puts P1 arbitrarily in scribe wheel 40, with this P1 for benchmark, determines P2, P3, P4, P5, take at each point of P1 ~ P5 before scribe wheel 40 with about 45 ° of scales.Again, about the sword leading edge of the scribe wheel 140 of Fig. 8, also take with the point identical with scribe wheel 40.
Again, in Fig. 9, by the size (width) of breach formed in sword leading edge, shown with the bar graph that 10 ~ 50 μm of persons are quantity a, 50 ~ 100 μm of persons are quantity b, 100 μm ~ person is quantity c.Again, Fig. 7 (B) shows with the folding line chart of d with the infiltration capacity (μm) of the slight crack shown in Fig. 8.
As shown in Figure 9, sword leading edge 43 be circular scribe wheel 40 compared with the not conglobate scribe wheel 140 of sword leading edge, there is the infiltration capacity of not a halfpenny the worse slight crack.Therefore, even if counter blade leading edge 43 carries out the processing of R angle, the reduction of infiltration capacity can not also be produced.
On the other hand, about the breach of sword leading edge, in scribe wheel 140, started more than the place of 500m at the travel distance of sword leading edge, the rapid increase of breach of sword leading edge, particularly creates the large breach of more than 100 μm.But in scribe wheel 40, be 1000m degree at the travel distance of sword leading edge, sword leading edge 43 changes hardly, even if do not produce the large breach of more than 100 μm to 1500m yet.
As previously discussed, as scribe wheel 40, carry out the processing of R angle by counter blade leading edge 43, make sword leading edge 43 circular, significantly can reduce sword leading edge 43 and produce breach, extend the life-span of scribe wheel 40.During the situation of particularly monocrystalline diamond, due to the shape that the front end of sword leading edge 43 is very Sharp profits under the state of Fig. 5 (A), therefore when disjunction for aluminum oxide substrate, sword leading edge 43 fairly produces breach.But sword leading edge 43 is circular by making, even the scribe wheel 40 be made up of monocrystalline diamond, the breach of sword leading edge 43 also significantly can be reduced.
When observing the photo of sword leading edge of the scribe wheel 140 that the sword leading edge shown in Fig. 8 is processed without R angle, can find to create large breach at shooting point P4, P5, on the other hand, P1, P2 then almost do not produce breach.
This is because scribe wheel 140 is made up of monocrystalline diamond, monocrystalline diamond owing to having crystal orientation, and due to this crystal orientation make hardness have large difference therefore.Therefore, if the scribe wheel be made up of polycrystalline diamond, can not have very much and produce breach not to different situations because of the difference of sword leading edge locus, and can at all same generation breach of sword leading edge.On the other hand, when being the situation of the scribe wheel be made up of monocrystalline diamond, refer to Fig. 8, generally because of the crystal orientation of monocrystalline diamond, the situation of the situation much different of jagged generation because of the position difference of sword leading edge can be made.
But, as the scribe wheel 40 be made up of monocrystalline diamond of this embodiment, the carrying out of processing by the R angle of sword leading edge 43 makes sword leading edge 43 circular, refer to Fig. 7 (B), which point of sword leading edge 43 no matter all can suppress the generation of large breach, therefore can reduce because the crystal orientation of monocrystalline diamond is on the impact of intensity.In addition, because the crystal orientation of monocrystalline diamond affects, by the shape of the sword leading edge 43 of the front end point shown in Fig. 5 (A), it is very difficult for being processed uniformly in the circumference entirety of scribe wheel 40.But, for carrying out the R angle processing of the sword leading edge 43 as shown in Fig. 5 (B), do not require as the processing of the sword leading edge 43 of Fig. 5 (A), to overall homogeneous the carrying out of circumference.
As previously discussed, sword 42 is only made up of diamond, sword leading edge 43 processes circular scribe wheel 40 through the R angle of radius 0.8 ~ 5 μm, even for being selected from the disjunction being made up of at least one brittle substrate 17 in group pottery, sapphire and silicon, compared with the scribe wheel of processing without R angle, significantly can reduce sword leading edge 43 and form breach, extend the life-span of scribe wheel 40.
Again, in this embodiment, though be illustrate scribe wheel 40 entirety by monocrystalline diamond constitutor, but the present invention also can be applicable to such as only sword 42 to be made up of monocrystalline diamond, and formed break bar body 41 with superhard alloy, by the scribe wheel 40 that break bar body 41 and sword 42 are fixed with stick, or in the inclined plane circumferentially of scribe wheel 40, the scribe wheel that formed with monocrystalline diamond of sword 42 part that only at least contacts with brittle substrate.If the scribe wheel that this kind is formed, the use of expensive monocrystalline diamond can be reduced, cheap scribe wheel is provided.
Again, in this embodiment, though be use monocrystalline diamond to be described as scribe wheel 40, may also be the scribe wheel 40 that sword 42 is made up of polycrystalline diamond.In polycrystalline diamond, there are to have fine crystal grain tissue or amorphous graphite mould carbon material as parent material, the direct sintering person that converts diamond to or with the diamond of chemical vapour deposition (CVD) (CVD) method synthesis under high pressure high temperature.Polycrystalline diamond, though without the nonhomogeneous hardness caused because of crystal orientation at above-mentioned sword leading edge circumference, the diamond particles likely because forming sword leading edge comes off and forms the situation of breach.The present invention prevents from being also effective at the breach of the scribe wheel 40 using this kind of polycrystalline diamond.
Again, these monocrystalline diamonds and polycrystalline diamond are in fact the things be only made up of diamond, though do not comprise as the Ferrious material in conjunction with material, are also contained in diamond crystallization and deliberately add the trace impurity such as boron or phosphorus person.By the interpolation of this kind of impurity, electric conductivity can be given to diamond, improve heat resistance.
Again, the scoring device 10 of this embodiment, by when keeping the holder 31 of scribe wheel 40 to be installed on engraving head 21, is installed by holder joint 23 to form.But scoring device 10 also can be the formation of directly installing holder 31 at engraving head 21.
Again, the scoring device 10 of this embodiment, though the guiding element 22 and the crane span structure 19 that are exemplified with being provided with to make engraving head 21 movement, possessing the travelling carriage 11 that the tables 16 of loading brittle substrate 17 are rotated, being not limited to this kind of scoring device 10.Also can be applicable to, the engraving head 21 of holder 31 is such as installed for making user grip, the partial shape of engraving head 21 is made the shape of handle, user grips the so-called hand scoring device that this handle carries out moving the disjunction carrying out brittle substrate 17.
The above, it is only preferred embodiment of the present invention, not any pro forma restriction is done to the present invention, although the present invention discloses as above with preferred embodiment, but and be not used to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be the content not departing from technical solution of the present invention, according to any simple modification that technical spirit of the present invention is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (7)
1. the scribe wheel that is only made up of diamond of sword, is characterized in that:
The sword leading edge of this sword executes the R angle processing of radius 0.8 ~ 5 micron.
2. scribe wheel according to claim 1, is characterized in that wherein said diamond is monocrystalline diamond.
3. scribe wheel according to claim 1 and 2, is characterized in that it is the disjunction for being selected from least one brittle substrate in the group that is made up of pottery, sapphire and silicon.
4. a holder unit, is characterized in that possessing the scribe wheel any one of claims 1 to 3, is held in rotatable holder with this scribe wheel.
5. a scoring device, is characterized in that the holder unit possessing claim 4.
6. a manufacture method for scribe wheel, is characterized in that comprising:
The step of sword is formed at the discoideus component be only made up of diamond; And
The sword leading edge of this sword is imposed to the step of R angle processing.
7. a rose method is the scribe wheel be only made up of diamond with sword, forms score line being selected from least one brittle substrate in the group be made up of pottery, sapphire and silicon, it is characterized in that:
It is this scribe wheel using the sword leading edge of this sword to execute the R angle processing of radius 0.8 ~ 5 micron.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910599299.XA CN110370472A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method and rose method |
| CN201810456573.3A CN108608588A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2013-196593 | 2013-09-24 | ||
| JP2013196593A JP6357746B2 (en) | 2013-09-24 | 2013-09-24 | Scribing wheel, holder unit, scribing device, scribing wheel manufacturing method and scribing method |
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| CN201910599299.XA Division CN110370472A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method and rose method |
| CN201810456573.3A Division CN108608588A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method |
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| CN104441275A true CN104441275A (en) | 2015-03-25 |
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| CN201910599299.XA Pending CN110370472A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method and rose method |
| CN201810456573.3A Pending CN108608588A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method |
| CN201410418893.1A Pending CN104441275A (en) | 2013-09-24 | 2014-08-22 | Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method |
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| CN201910599299.XA Pending CN110370472A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method and rose method |
| CN201810456573.3A Pending CN108608588A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6357746B2 (en) |
| KR (1) | KR102235408B1 (en) |
| CN (3) | CN110370472A (en) |
| TW (2) | TWI703102B (en) |
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| CN106313346A (en) * | 2015-06-30 | 2017-01-11 | 三星钻石工业株式会社 | Cutter wheel and manufacturing method for the same |
| CN106396359A (en) * | 2015-07-31 | 2017-02-15 | 三星钻石工业株式会社 | Scribing wheel |
| CN107415065A (en) * | 2016-05-24 | 2017-12-01 | 三星钻石工业股份有限公司 | Break bar |
| CN107662292A (en) * | 2016-07-29 | 2018-02-06 | 三星钻石工业株式会社 | Scribe wheel |
| CN109605584A (en) * | 2018-12-28 | 2019-04-12 | 嘉善佳腾自润滑材料厂 | A kind of graphite column diced system |
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| JP6736151B2 (en) * | 2015-06-30 | 2020-08-05 | 三星ダイヤモンド工業株式会社 | Cutter wheel and manufacturing method thereof |
| JP6682907B2 (en) * | 2016-02-26 | 2020-04-15 | 三星ダイヤモンド工業株式会社 | Brittle substrate cutting method |
| JP6460267B2 (en) * | 2018-01-29 | 2019-01-30 | 三星ダイヤモンド工業株式会社 | Break device |
| JP2019147225A (en) * | 2018-02-27 | 2019-09-05 | 三星ダイヤモンド工業株式会社 | Cutter wheel and cutting method |
| JP2021006374A (en) * | 2019-06-28 | 2021-01-21 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108608588A (en) | 2018-10-02 |
| JP6357746B2 (en) | 2018-07-18 |
| KR102235408B1 (en) | 2021-04-01 |
| CN110370472A (en) | 2019-10-25 |
| TWI657060B (en) | 2019-04-21 |
| TW201840492A (en) | 2018-11-16 |
| TW201512119A (en) | 2015-04-01 |
| JP2015063010A (en) | 2015-04-09 |
| KR20150033523A (en) | 2015-04-01 |
| TWI703102B (en) | 2020-09-01 |
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Application publication date: 20150325 |