CN110370472A - Scribe wheel and its manufacturing method and rose method - Google Patents
Scribe wheel and its manufacturing method and rose method Download PDFInfo
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- CN110370472A CN110370472A CN201910599299.XA CN201910599299A CN110370472A CN 110370472 A CN110370472 A CN 110370472A CN 201910599299 A CN201910599299 A CN 201910599299A CN 110370472 A CN110370472 A CN 110370472A
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- China
- Prior art keywords
- scribe wheel
- sword
- leading edge
- diamond
- angle
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/10—Glass-cutting tools, e.g. scoring tools
- C03B33/105—Details of cutting or scoring means, e.g. tips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools
- B24B3/60—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of tools not covered by the preceding subgroups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/027—Scoring tool holders; Driving mechanisms therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mining & Mineral Resources (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of scribe wheel and its manufacturing method and rose method, the invention relates to a kind of scribe wheel and its manufacturing method and rose method, keep tool unit, scoring device, it provides a kind of in the scribe wheel being only made of diamond using sword, when carrying out the disjunction compared with the ceramic substrate of glass substrate hard etc., the scribe wheel of longer life expectancy keeps tool unit, scoring device, the manufacturing method of scribe wheel and rose method.The present invention is only made of diamond by sword (42), sword leading edge (43) apply 0.8~5 micron of radius the angle R processing scribe wheel (40) use, compared with the scribe wheel processed without the angle R, the formation of sword leading edge notch can be greatly decreased, extend the service life of scribe wheel.
Description
Technical field
The present invention relates to one kind to be suitble in the more general amorphous glass base such as ceramic substrate, sapphire substrate, silicon substrate
Holding tool unit, the delineation dress that the brittle material substrate surface of plate more hard forms the scribe wheel of score line, has this scribe wheel
It sets, the manufacturing method of scribe wheel and rose method.
Background technique
The use of scribe wheel has closely bound up with inseparable relationship for people.To for liquid crystal display panel
When equal amorphous glass substrate carries out disjunction, it is however generally that, it is using such as patent document " Japanese Unexamined Patent Publication 55-106635 public affairs
Report " the revealed scribe wheel being made of superhard alloy or by polycrystalline diamond (diamond) sintered body compared with superhard alloy hard
The scribe wheel of composition.Such polycrystalline diamond sintered body is will to be mixed with diamond particles (75~90vol% of amount) and combine material
The object of (cobalt etc.), is sintered at high temperature under high pressure.
However, when carrying out the disjunction of the ceramic substrate such as compared with the aluminium oxide of glass substrate hard, patent document " Japan
Open clear 55-106635 bulletin in fact " it the revealed scribe wheel being made of superhard alloy and is made of polycrystalline diamond sintered body
Scribe wheel, sword leading edge can generate notch or abrasion at once, and only tens of meters of degree can not form slight crack.Therefore, using by surpassing
The scribe wheel or the ceramics compared with glass substrate more hard are carried out by scribe wheel that polycrystalline diamond sintered body is constituted that hard alloy is constituted
The disjunction of substrate etc., it is actually infeasible.
Therefore, when carrying out the disjunction of the hard substrates such as ceramic substrate, using by compared with superhard alloy and polycrystalline diamond sintering
Scribe wheel that the polycrystalline diamond and monocrystalline diamond of body more hard are constituted carries out a thing, is all inquired into all the time.
In view of defect existing for above-mentioned existing scribe wheel, the present inventor is based on being engaged in such product design manufacture for many years
Practical experience and professional knowledge abundant, and cooperate the utilization of scientific principle, it is subject to research and innovation, actively to found a kind of novel knot
The scribe wheel of structure keeps tool unit, scoring device, and a kind of manufacturing method and rose method of new scribe wheel can improve one
As existing scribe wheel, make it with more practicability.By constantly studying, designing, and by studying sample and improvement repeatedly
Afterwards, the present invention having practical value is created finally.
Summary of the invention
It is an object of the present invention to overcome defect existing for existing scribe wheel, and provide a kind of new structural delineation
Wheel keeps tool unit, scoring device, a kind of manufacturing method and rose method of new scribe wheel, technical problem to be solved
When being to provide a kind of scribe wheel that is only made of diamond using sword and carrying out the disjunction compared with the ceramic substrate of glass substrate hard etc., tool
There is the scribe wheel of more long-life, keep tool unit, scoring device, the manufacturing method of scribe wheel and rose method, thus more suitable
In practical.
To reach above-mentioned purpose, the sword leading edge of the scribe wheel that sword of the invention is only made of diamond, sword has applied radius 0.8
~5 μm of the angle R processing.
Scribe wheel according to the present invention has applied the angle R due to sword leading edge and has been process circular arc, even being used for ceramic base
The disjunction of plate etc. can be greatly decreased sword leading edge and form notch, make the longevity of scribe wheel compared with the scribe wheel for not applying the processing of the angle R
It orders longer.
Also, aforementioned diamond is monocrystalline diamond in scribe wheel of the invention.
Scribe wheel according to the present invention, can while the crystal orientation through monocrystalline diamond reduces influence to intensity,
The formation for inhibiting sword leading edge notch, extends the service life of scribe wheel.
Also, scribe wheel of the invention, is at least one of the group for constituting selected from ceramics, sapphire and silicon brittleness material
Expect the disjunction of substrate.
Scribe wheel according to the present invention, to relatively for harder brittleness materials of general amorphous glass substrate such as liquid crystal display panels
Expect substrate, it can the good cutting for carrying out long range.
Also, holding of the invention has unit, there is the scribe wheel of any of the above-described and aforementioned scribe wheel is kept into rotation
Holding tool freely.
Holding according to the present invention has unit, and the formation of scribe wheel sword leading edge notch can be greatly decreased, extend scribe wheel
Service life has unit to be appropriate for the holding of disjunction of ceramic substrate etc..
Also, scoring device of the invention, has above-mentioned holding tool unit.
The formation of scribe wheel sword leading edge notch can be greatly decreased in scoring device according to the present invention, extend the longevity of scribe wheel
Life, for be appropriate for ceramic substrate etc. disjunction scoring device.
Also, the manufacturing method of scribe wheel of the invention, forms the step of sword included in the disk-shaped component being only made of diamond
Suddenly, the step of angle R processing is carried out with the sword leading edge to aforementioned sword.
The manufacturing method of scribe wheel according to the present invention, due to after forming sword, carrying out the up-front angle the R processing of sword, therefore
Carrying out adequately grinding by counter blade surface reduces the surface roughness of sword, and can prevent sword surface from forming notch, further prolongs
The service life of long scribe wheel.In addition, carrying out the up-front angle the R processing of sword, therefore be easier to be reached as target after forming sword
The processing of sword leading-edge radius.
Also, rose method of the invention, is that the scribe wheel being only made of diamond with sword is being selected from by ceramics, sapphire and silicon
Score line is formed at least one of group of composition brittle material substrate, is to have applied radius using the sword leading edge of the aforementioned sword
The aforementioned scribe wheel of 0.8~5 μm of the angle R processing.
Rose method according to the present invention, by the scribe wheel that sword is only made of diamond, to relatively for liquid crystal display panel etc. one
As the harder brittle material substrate of amorphous glass substrate, the score line of longer distance can be formed.
In conclusion the invention relates to a kind of scribe wheel and its manufacturing method and rose method, keeping tool unit, quarter
Device is drawn, provides a kind of in the scribe wheel being only made of diamond using sword, is carried out compared with the ceramic substrate of glass substrate hard etc.
When decomposition, the scribe wheel of longer life expectancy keeps tool unit, scoring device, the manufacturing method of scribe wheel and rose method, by sword
42 are only made of diamond, sword leading edge 43 apply 0.8~5 μm of radius the angle R processing scribe wheel 40 use, add with without the angle R
The scribe wheel of work is compared, and the formation of sword leading edge notch can be greatly decreased, and extends the service life of scribe wheel.The present invention technically has aobvious
The progress of work, and there is apparent good effect, it is really a new and innovative, progressive, practical new design.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And it can be implemented in accordance with the contents of the specification, and in order to allow above and other objects, features and advantages of the invention can
It is clearer and more comprehensible, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.
Detailed description of the invention
Fig. 1 is the skeleton diagram of the scoring device of implementation form.
Fig. 2 is the main view of the holding tool connector of implementation form.
Fig. 3 is the perspective view of the holding tool unit of implementation form.
Fig. 4 (A) is the left view of the scribe wheel of implementation form.
Fig. 4 (B) is the main view of scribe wheel.
Fig. 5 (A) is the main view before the up-front angle the R processing of sword of implementation form.
Fig. 5 (B) is the main view after the up-front angle the R processing of sword.
Fig. 6 (A) is the concept map for showing a method of the angle R processing.
Fig. 6 (B) is the concept map for showing the another method of the angle R processing.
Fig. 7 (A) is the explanatory diagram for showing the shooting point of scribe wheel of implementation form.
Fig. 7 (B) is the up-front photo of sword of the scribe wheel of implementation form.
Fig. 8 is the up-front photo of sword of the scribe wheel to compare.
Fig. 9 (A) is the chart of the scribe wheel about implementation form.
Fig. 9 (B) is the chart about the scribe wheel to compare.
Description of symbols:
10: scoring device 11: mobile station
12a, 12b: guide rail 13: ball screw
14,15: motor 16: tables
17: glass substrate 18:CCD video camera
19: gantry 20a, 20b: pillar
21: engraving head 22: guiding element
23: keeping tool connector 23a: rotation axle portion
23b: connector portions 24a, 24b: bearing
24c: spacer 25: circular open
26: inner space 27: magnetite
28: parallel pin 30: keeping tool unit
31: keeping tool 32: mounting portion
32a: rake 32b: flat part
33: retention groove 34a, 34b: supporting part
35: support holes 40,140: scribe wheel
41: break bar body part 42,52: sword
43: sword leading edge 43a: ridgeline
44: through hole 51: pin
52a, 53a: rotary shaft 52b, 53b: the plane of whetslate
53: whetslate.
Specific embodiment
Hereinafter, illustrating implementation form of the invention using drawing.But, implementation form as shown below only makes of the invention
An example that technical idea embodies, has no any intention by the present invention specific to this implementation form.The present invention is certainly applicable
Other implementation forms contained in claim.
Fig. 1 is the skeleton diagram of the scoring device 10 of implementation form of the present invention.Scoring device 10 has mobile station 11.Mobile station
11 screw togather with ball screw 13, rotate this ball screw 13 by the driving of motor 14, move accordingly along a pair of guide rails 12a, 12b
It moves in y-axis direction.
The upper surface of mobile station 11 is provided with motor 15.Motor 15 makes superposed tables 16 rotate and incite somebody to action in x/y plane
It is positioned at first retainer.Hardened glass substrate 17 as disjunction (scribe) object is loaded on tables 16, with not
Vacuum attraction means of diagram etc. are kept.
This brittle material substrate 17 be the ceramic substrate being made of low-temperature sintering ceramic and hard-fired ware, silicon substrate,
Sapphire substrate etc., selected from least one of the group being made of ceramics, sapphire and silicon brittle material substrate, compared with liquid crystal surface
The brittle material substrate of amorphous glass substrate more hard used in substrate of plate etc. is general.
Scoring device 10, above the hardened glass substrate 17 for being loaded in tables 16, equipped with being formed herein to shoot
Two CCD cameras 18 of the alignment mark on 17 surface of hardened glass substrate.Gantry 19 is with across mobile station 11 and upper part
The mode of tables 16 is set up in pillar 20a, 20b along the x-axis direction.
Guiding element 22 is installed in gantry 19, engraving head 21 is arranged to be guided by this guiding element 22 and past x-axis direction is mobile.?
Engraving head 21, by keeping tool connector 23 to be equipped with holding tool unit 30.
Fig. 2 is the main view for being equipped with the holding tool connector 23 for keeping tool unit 30.Also, Fig. 3 is to maintain tool unit 30
Perspective view.
It keeps tool connector 23 in slightly cylindric, has rotation axle portion 23a and connector portions 23b.Tool connector 23 is being kept to install
In the state of engraving head 21, axle portion 23a is rotated by columnar spacer 24c and is installed on two bearings 24a, 24b, this guarantor
It holds tool connector 23 and is retained turn freely.
In cylindrical connector portions 23b, the inner space 26 equipped with lower end side tool circular open 25.This inner space 26
Top is embedded with magnetite 27.And having unit 30 by the detachable holding of magnetite 27, insertion is installed in this inner space 26.
Tool unit 30 is kept to be to maintain tool 31, scribe wheel 40 and pin (pin, not shown) in one person.Keep 31 tool of tool
There is slightly cylinder shown in Fig. 3, is formed with magnetic substance metal.Positioning mounting portion 32 is equipped on the top for keeping tool 31.This peace
Dress portion 32 is formed keeping the top of tool 31 to cut, and has rake 32a and flat part 32b.
32 side of mounting portion of tool 31 will be kept to pass through 25 insertion inner space 26 of opening.At this point, keeping the upper end side of tool 31
Attracted by magnetite 27, the rake 32a of mounting portion 32 is contacted with by the parallel pin 28 of inner space 26, carries out holding tool accordingly
30 pairs of unit keep the positioning and fixation that have connector 23.Also, when from keeping tool connector 23 to remove holding tool unit 30, as long as will
Keeping tool 31 to draw toward lower section can remove easily.
Since scribe wheel 40 is consumables, need to periodically be replaced.In this implementation form, tool is kept in order to be easy to carry out
The assembly and disassembly of unit 30 are that tool unit 30 itself is kept by replacement, to carry out being constituted the scribe wheel 40 for keeping tool unit 30 more
It changes, can promptly replace scribe wheel 40.
It is keeping having 31 lower parts, is keeping having 31 retention grooves 33 formed equipped with cutting.It is cut for this retention groove 33 is arranged
The lower part for the holding tool 31 opened, clipping retention groove 33 has supporting part 34a, 34b.In this retention groove 33, scribe wheel 40 is to rotate certainly
Mode such as configures.Also, being respectively formed with the pin insertion of the holding scribe wheel 40 to rotate freely in supporting part 34a, 34b
Support holes 35.
Secondly, details of the explanation to the scribe wheel 40 of disjunction brittle material substrate 17.Fig. 4 (A) is mounted in holding tool
Left view, Fig. 4 (B) of the scribe wheel 40 of 31 front ends are the main views of scribe wheel 40.
Referring to Fig. 4, scribe wheel 40 in disk-shaped, have break bar body part 41, sword 42, with sword leading edge 43.
In the immediate vicinity of break bar body part 41, it is formed with the perforation that this break bar body part 41 is run through to rotary axis direction
Hole 44.It is inserted into and sells by through hole 44, scribe wheel 40 can be rotatably freely held in holding tool 31 by this pin.
Sword 42 is formed as circular in the periphery of break bar body part 41.Sword 42 is in omit V shape under forward sight, relative to rotation
The thickness of the sword 52 of rotor shaft direction becomes smaller gradually with towards sword front end 43.
Sword leading edge 43, different from the sword leading edge of general scribe wheel, the aftermentioned angle R processing has been applied in the front end of sword 42, along most
Peripheral part is in arc-shaped.
Then, the manufacturing method of scribe wheel 40 is illustrated using drawing.Fig. 5 is with 42 front end of sword shown in the circle A of Fig. 4 (B)
Enlarged drawing, Fig. 5 (A) be processing before sword leading edge 43 main view, Fig. 5 (B) be processing after sword leading edge 43 main view.
Scribe wheel 40 is such as polycrystalline diamond and monocrystalline diamond, not comprising only being formed in conjunction with material with diamond.This implementation shape
In state, scribe wheel 40 is formed with monocrystalline diamond.
The scribe wheel 40 being made of monocrystalline diamond, firstly, being to form the disk-shaped component being made of monocrystalline diamond.It is specific and
Speech, monocrystalline diamond is artificial synthesized object, is manufactured with high temperature and high pressure synthesis or chemical vapour deposition technique.Then, by this monocrystalline
Diamond cuts out the plectane be intended to radius in a manner of laser etc..
Secondly, disk-shaped monocrystalline diamond, two surface sides of the circumferential part of plectane are cut by edge respectively, are had to be formed as schemed
The sword 42 of the sword leading edge 43 of the pointed shape in front end shown in 5 (A).Also, the ridgeline of sword leading edge 43 at this time is indicated with symbol 43a.
This state is general scribe wheel.At this point, monocrystalline diamond can make surface roughness smaller compared with known PCD and superhard alloy,
As a result, sword leading edge ridgeline is more sharp keen.
Secondly, the sword leading edge 43 of counter blade 42 carries out the processing of the angle R, ground from ridgeline 43a, shown in Fig. 5 (B) most
Peripheral part makes the front end of sword leading edge 43 at circle under forward sight.
Herein, it for the specific direction for processing the front end of sword leading edge 43 at the angle R of circular arc, is illustrated using drawing.
For example, please referring to Fig. 6 (A) as a method, it is inserted into the pin 51 of bearing in the through hole 44 of scribe wheel 40, makes to carve on one side
The rotation of scoring wheel 40, on one side before the vertical abutting sword of the plane 52b of the disk-shaped whetslate 52 rotated centered on rotary shaft 52a
Edge 43, and make the swing of the direction shown in arrow of pin 51 interaction.Accordingly, the front end of sword leading edge 43 can be made at circle.
Also, another method, then please refer to Fig. 6 (B), it is inserted into the pin 51 of bearing in the through hole 44 of scribe wheel 40, on one side
Make the rotation of scribe wheel 40, on one side relative to the plane 53b of the soft whetslate 53 of the tool flexibility rotated centered on rotary shaft 53a
Vertical abutting sword leading edge 43.At this point, the plane 53b of whetslate 53 can be fallen into, the front end of sword leading edge 43 can be made at circle.
By above method, the rounded scribe wheel 40 of the sword leading edge 43 of sword 42 can be manufactured.Also, being asked in this implementation form
Refering to Fig. 5 (A), be make the front end of sword leading edge 43 at circle before, first respectively along two surface side of circumferential part of plectane is cut, to be formed
The inclined surface of front end point.Therefore, can by the inclined surface of sword 42 carefully be ground to mirror-like, make the surface roughness of sword 42 most
It is small, and further extend the service life of sword 42.Also, due to being the inclined surface for first completing sword 42, carrying out the angle R of sword leading edge 43 again and add
Work, therefore be easier to be machined to the R radius as target.
Secondly, illustrating the size of scribe wheel 40.The outer diameter of scribe wheel 40 is 1.0~10.0mm, preferably 1.0~5.0mm
Range, especially with 1.0~3.0mm more preferably.When the outer diameter of scribe wheel 40 is less than 1.0mm, the operability of scribe wheel 40 will be reduced.Separately
On the one hand, when the outer diameter of scribe wheel 40 is greater than 10.0mm, it is likely that generate vertical slight crack relative brittleness material when delineation
Substrate 17 is unable to fully go deep into the situation of formation.
The range with a thickness of 0.4~1.2mm, preferably 0.4~1.1mm of scribe wheel 40.The thickness of scribe wheel 40 is small
When 0.4mm, it is possible to processability and operability can be made to reduce.On the other hand, when the thickness of scribe wheel 40 is greater than 1.2mm,
The material and manufacturing cost of scribe wheel 40 are got higher.In addition, the aperture of through hole 44, for example, 0.8mm.
The sword toe angle of sword 42 is usually the range at 90~160 ° of obtuse angle, preferably 100~150 °.
Also, the circular blade leading edge 43 about front end, if the R radius of the angle R processing is less than 0.8 μm, loading be can be concentrated in
The up-front front end of sword causes local pressure and is easy to generate the up-front notch of sword or abrasion.On the other hand, R radius is excessive
Words, loading when scribing line will be significantly increased the section quality for making disjunction metacoxal plate and reduce.Therefore, the range of R radius is with 0.8~5 μ
M, especially preferable with 3 μm or less.R radius can moderately disperse loading if 0.8~5 μm of range, because contact area is big, can press down
The pressure of system part prevents the up-front notch of sword and abrasion.
Also, in general, aluminum oxide substrate etc. in brittle material substrate 17, because of the partial size of sintered aluminium oxide particles
Surface can be made thicker, for example, the aftermentioned surface roughness Ra through measuring aluminum oxide substrate, surface roughness Ra are 0.296 μm.Cause
This, the R radius of sword leading edge 43 is sufficiently big by taking after considering the surface roughness of brittle material substrate 17 of disjunction object
Value, prevent because notch etc. effect is very big caused by substrate is concave-convex.
Then, it illustrates and is process circular scribe wheel 40 and sword leading edge 43 through the angle R using actually sword leading edge 43
Scribe wheel 140 without the processing of the angle R carries out the result of 17 disjunction of brittle material substrate.Disjunction condition is as follows.
The scribe wheel 40 being made of monocrystalline diamond, outer diameter 2mm, sword toe angle are 120 °.Also, being processed through the angle R, sword leading edge
43 R radius is 1.0 μm.On the other hand, the difference of scribe wheel 140 and scribe wheel 40 only whether there is or not the processing of the angle R, is bored by monocrystalline
The outer diameter 2mm of stone composition, 120 ° of sword toe angle of scribe wheel.Also, the front end R radius of the scribe wheel 40 without the processing of the angle R is through surveying
It is fixed, it is 0.17 μm.
Aluminum oxide substrate (the Kyoto Ceramic Co., Ltd's system, material that disjunction branch brittle material substrate 17 is plate thickness 0.635mm are carried out
Item number: A476T).
Cut-off velocity, which is 100mm/sec, take 120 μm of infiltration capacity of slight crack as target adjustment scribing line loading etc. is cut
It is disconnected.
For the up-front state of sword with above-mentioned disjunction condition after 17 surface of brittle material substrate forms score line, use
Captured photo etc. is illustrated as rear.Fig. 7 is the disjunction about scribe wheel 40 as a result, Fig. 7 (A) is to show captured point
Explanatory diagram, Fig. 7 (B) be shoot sword leading edge 43 photo and slight crack infiltration capacity.Fig. 8 is the sword leading edge for shooting scribe wheel 140
Photo and slight crack infiltration capacity.Fig. 9 is the chart for showing the occurrence quantity of sword leading edge notch of opposite travel distance, and Fig. 9 (A) is
Chart, Fig. 9 (B) about scribe wheel 40 are then the charts about scribe wheel 140.
It please refers to Fig. 7 (A), the shooting of sword leading edge 43, is to determine an arbitrary point P1 in scribe wheel 40, using the point P1 as base
Standard determines P2, P3, P4, P5 with about 45 ° of scales, P1~P5 each point from the shooting made above of scribe wheel 40.Also, closing
In the sword leading edge of the scribe wheel 140 of Fig. 8, also to be shot with the identical point of scribe wheel 40.
Also, in Fig. 9, by the size (width) of the notch formed in sword leading edge, using 10~50 μm of persons as quantity a, 50~100
μm bar graph that person is quantity b, 100 μm~person is quantity c is shown.Also, the infiltration of Fig. 7 (B) and slight crack shown in fig. 8
Amount (μm) is shown with the bending line diagram of d.
As shown in Figure 9, sword leading edge 43 is circular scribe wheel 40 compared with sword leading edge is not at circular scribe wheel 140, tool
There is the infiltration capacity of not a halfpenny the worse slight crack.Therefore, even if counter blade leading edge 43 carries out the processing of the angle R, the drop of infiltration capacity will not be generated
It is low.
It on the other hand, is more than the ground of 500m in the up-front travel distance of sword in scribe wheel 140 about the up-front notch of sword
Side has started, and the up-front notch of sword rapidly increases, and especially produces 100 μm or more of big notch.However, in scribe wheel 40,
It is 1000m degree in the up-front travel distance of sword, sword leading edge 43 hardly generates variation, do not generate to 1500m
100 μm or more of big notch.
As previously discussed, the processing of the angle R is carried out by counter blade leading edge 43 such as scribe wheel 40, makes sword leading edge 43 at circle, it can
Sword leading edge 43 is greatly decreased and generates notch, extends the service life of scribe wheel 40.Especially the situation of monocrystalline diamond when, Fig. 5's (A)
Since the front end of sword leading edge 43 is very sharp keen shape under state, when the disjunction for aluminum oxide substrate, sword leading edge
43 are also easy to produce notch very much.However, by sword leading edge 43 is made into circle, even the scribe wheel 40 being made of monocrystalline diamond,
The notch of sword leading edge 43 can be greatly decreased.
When the up-front photo of sword for observing the scribe wheel 140 that sword leading edge shown in Fig. 8 is processed without the angle R, it is possible to find clapping
It takes the photograph point P4, P5 and produces big notch, on the other hand, P1, P2 almost do not generate notch then.
This is since scribe wheel 140 is made of monocrystalline diamond, and monocrystalline diamond is due to crystal orientation, and due to this crystallization
Orientation makes hardness have the event of big difference.Therefore, if if the scribe wheel being made of polycrystalline diamond, will not have very much because of sword leading edge
The difference of position and generate notch not to different situations, and same can generate notch sword leading edge is all.On the other hand, it is
When the situation for the scribe wheel being made of monocrystalline diamond, referring to Fig. 8, generally can be because of the crystal orientation of monocrystalline diamond, so that because of sword
The situation of up-front position difference and the situation much different of jagged generation.
However, as this implementation form the scribe wheel 40 being made of monocrystalline diamond, by sword leading edge 43 the angle R process into
Sword leading edge 43 is exercised into circle, is please referred to Fig. 7 (B), no matter which point of sword leading edge 43 can all inhibit the generation of big notch, because
This can reduce influence of the crystal orientation because of monocrystalline diamond to intensity.Further, since the crystal orientation of monocrystalline diamond influences, will scheme
The shape of the sword leading edge 43 of front end point shown in 5 (A) is extremely difficult in all uniformly processed of the circumference of scribe wheel 40
's.However, for carry out the sword leading edge 43 such as Fig. 5 (B) shown in the angle R processing, it is not required that as Fig. 5 (A) sword leading edge 43 add
As work, to circumference integrally uniform progress.
As previously discussed, sword 42 be only made of diamond, sword leading edge 43 be process through 0.8~5 μm of radius of the angle R it is circular
Scribe wheel 40, even for selected from point for being made of at least one of group brittle material substrate 17 ceramics, sapphire and silicon
It is disconnected, compared with the scribe wheel processed without the angle R, sword leading edge 43 can be greatly decreased and form notch, extend the service life of scribe wheel 40.
Also, though illustrating, scribe wheel 40 is whole by monocrystalline diamond constitutor, and the present invention can be also applicable in this implementation form
In for example only sword 42 is made of monocrystalline diamond, and break bar body part 41 is constituted with superhard alloy, by break bar body part 41 and sword 42
In the inclined surface being subject on the circumference of fixed scribe wheel 40 or scribe wheel 40 with stick, only at least connect with brittle material substrate
The scribe wheel that 42 part of sword of touching is formed with monocrystalline diamond.If if the scribe wheel of such composition, can be reduced expensive monocrystalline and bore
The use of stone provides cheap scribe wheel.
Also, though as scribe wheel 40 being described using monocrystalline diamond, can also be sword 42 by more in this implementation form
The scribe wheel 40 that brilliant diamond is constituted.In polycrystalline diamond, have with fine crystal grain tissue or amorphous graphite mould carbonaceous material
Matter is as starting material, the direct sintering person that is converted into diamond or with the synthesis of chemical vapor deposition (CVD) method under high pressure high temperature
Diamond.Polycrystalline diamond, though without the nonhomogeneous hardness caused by above-mentioned sword leading edge circumference is because of crystal orientation, it is likely that because being formed
The up-front diamond particles of sword fall off and are formed the situation of notch.Notch of the present invention in the scribe wheel 40 using such polycrystalline diamond
It prevents from being also effective.
Also, these monocrystalline diamonds and polycrystalline diamond are substantially the object being only made of diamond, though do not include as in conjunction with material
Ferrious material, but be also contained in diamond crystallization in deliberately add the trace impurities person such as boron or phosphorus.By the addition of such impurity,
Electric conductivity can be assigned to diamond, improve heat resistance.
Also, the scoring device 10 of this implementation form, when the holding tool 31 of scribe wheel 40 will be kept to be installed on engraving head 21,
It is by keeping the tool installation of connector 23 to constitute.However, scoring device 10 is also possible to be mounted directly holding tool 31 in engraving head 21
Composition.
Also, the scoring device 10 of this implementation form, though instantiate be equipped with guiding element 22 to keep engraving head 21 mobile and
Gantry 19 has the mobile station 11 that the tables 16 for making to load brittle material substrate 17 rotate, and but not limited thereto plants scoring device
10.Also it can be suitably used for, for example, allow a user to hold the engraving head 21 for being equipped with and keeping tool 31, by the part shape of engraving head 21
Shape is made the shape of handle, and user holds this handle and moved to carry out the so-called hand of the disjunction of brittle material substrate 17
Scoring device.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, though
The right present invention has been disclosed in the preferred embodiments as above, and however, it is not intended to limit the invention, any technology people for being familiar with this profession
Member, without departing from the scope of the present invention, when the technology contents using the disclosure above make a little change or modification
For the equivalent embodiment of equivalent variations, but anything that does not depart from the technical scheme of the invention content, according to the technical essence of the invention
Any simple modification, equivalent change and modification to the above embodiments, all of which are still within the scope of the technical scheme of the invention.
Claims (3)
1. a kind of scribe wheel is used for selected from least one of the group being made of ceramics, sapphire and silicon brittle material substrate
Disjunction, it is characterised in that:
The scribe wheel, which has, is formed as circular sword, and the sword leading edge set on the front end of sword in periphery,
The sword leading edge is formed and carrying out mirror finish to diamond,
The sword leading edge is processed in the angle R that circumference entirety applies 0.8~3 micron of radius.
2. a kind of manufacturing method of scribe wheel characterized by comprising
By the periphery for the disk-shaped component being made of diamond, the step of forming sword leading edge and being ground to becomes mirror-like；With
And
In the step of angle R that the up-front circumference entirety of the sword applies 0.8~3 micron of radius processes.
3. a kind of rose method, by scribe wheel selected from least one of the group being made of ceramics, sapphire and silicon brittleness
Score line is formed on material substrate, it is characterised in that:
Sword leading edge using the scribe wheel is to be formed and carrying out mirror finish to diamond, and further applied radius 0.8~3
The scribe wheel of the angle the R processing of micron.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013196593A JP6357746B2 (en) | 2013-09-24 | 2013-09-24 | Scribing wheel, holder unit, scribing device, scribing wheel manufacturing method and scribing method |
| JP2013-196593 | 2013-09-24 | ||
| CN201410418893.1A CN104441275A (en) | 2013-09-24 | 2014-08-22 | Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410418893.1A Division CN104441275A (en) | 2013-09-24 | 2014-08-22 | Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method |
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| CN110370472A true CN110370472A (en) | 2019-10-25 |
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| CN201410418893.1A Pending CN104441275A (en) | 2013-09-24 | 2014-08-22 | Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method |
| CN201810456573.3A Pending CN108608588A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method |
| CN201910599299.XA Pending CN110370472A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method and rose method |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410418893.1A Pending CN104441275A (en) | 2013-09-24 | 2014-08-22 | Scribing wheel, holder unit, scribing apparatus, method for manufacturing scribing wheel, and scribing method |
| CN201810456573.3A Pending CN108608588A (en) | 2013-09-24 | 2014-08-22 | Scribe wheel and its manufacturing method |
Country Status (4)
| Country | Link |
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| JP (1) | JP6357746B2 (en) |
| KR (1) | KR102235408B1 (en) |
| CN (3) | CN104441275A (en) |
| TW (2) | TWI703102B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2016210169A (en) * | 2015-04-30 | 2016-12-15 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
| JP6736151B2 (en) * | 2015-06-30 | 2020-08-05 | 三星ダイヤモンド工業株式会社 | Cutter wheel and manufacturing method thereof |
| KR102509143B1 (en) * | 2015-06-30 | 2023-03-13 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | Cutter wheel and manufacturing method the same |
| JP6572660B2 (en) * | 2015-07-31 | 2019-09-11 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
| JP6682907B2 (en) * | 2016-02-26 | 2020-04-15 | 三星ダイヤモンド工業株式会社 | Brittle substrate cutting method |
| JP6746128B2 (en) * | 2016-05-24 | 2020-08-26 | 三星ダイヤモンド工業株式会社 | Cutter wheel |
| CN107662292A (en) * | 2016-07-29 | 2018-02-06 | 三星钻石工业株式会社 | Scribe wheel |
| JP6460267B2 (en) * | 2018-01-29 | 2019-01-30 | 三星ダイヤモンド工業株式会社 | Break device |
| JP2019147225A (en) * | 2018-02-27 | 2019-09-05 | 三星ダイヤモンド工業株式会社 | Cutter wheel and cutting method |
| CN109605584B (en) * | 2018-12-28 | 2024-05-24 | 嘉善佳腾自润滑材料厂 | Graphite column cutting system |
| JP2021006374A (en) * | 2019-06-28 | 2021-01-21 | 三星ダイヤモンド工業株式会社 | Scribing wheel |
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- 2014-06-23 TW TW103121514A patent/TWI657060B/en active
- 2014-07-18 KR KR1020140090734A patent/KR102235408B1/en active IP Right Grant
- 2014-08-22 CN CN201410418893.1A patent/CN104441275A/en active Pending
- 2014-08-22 CN CN201810456573.3A patent/CN108608588A/en active Pending
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| US20100154614A1 (en) * | 2008-12-18 | 2010-06-24 | Yunn-Shiuan Liao | Method and device for vibration Assisted scribing process on a substrate |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR102235408B1 (en) | 2021-04-01 |
| KR20150033523A (en) | 2015-04-01 |
| JP6357746B2 (en) | 2018-07-18 |
| CN108608588A (en) | 2018-10-02 |
| JP2015063010A (en) | 2015-04-09 |
| CN104441275A (en) | 2015-03-25 |
| TWI657060B (en) | 2019-04-21 |
| TW201840492A (en) | 2018-11-16 |
| TWI703102B (en) | 2020-09-01 |
| TW201512119A (en) | 2015-04-01 |
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