TW201512119A - Scribing wheel, holder unit, scribing device, method for manufacturing scribing wheel, and scribing method - Google Patents

Abstract

Provided is a kind of scribing wheel having a blade made solely of diamond to perform the cutting on the ceramic substrate which is harder than glass substrate and having a longer service life, a holder unit, a scribing device, a method for manufacturing the scribing wheel, and a scribing method. The present invention contains a blade 42 made solely of diamond, and a front edge 43 of the blade having an R angle processing of radius 0.8-5 [mu]m used for the scribing wheel 40, which can significantly reduce a gap formation in the front edge as compared to that without R angle processing.

Description

Scoring wheel, holder unit, scoring device, manufacturing method of scoring wheel and scribing method

The present invention relates to a scribing wheel which is formed by scribing a surface of a brittle material substrate which is more rigid on a relatively ordinary amorphous glass substrate such as a ceramic substrate, a sapphire substrate or a tantalum substrate, and a holder unit having the engraved wheel, engraved The drawing device, the manufacturing method of the marking wheel, and the scribing method.

When the amorphous glass substrate used for a liquid crystal panel or the like is divided, generally, a scribing wheel made of a super hard alloy as disclosed in Patent Document 1 or a polycrystalline harder than a super hard alloy is used. A diamond (diamond) sintered body constitutes a marking wheel. Such a polycrystalline diamond sintered body is obtained by mixing diamond particles (containing 75 to 90 vol%) with a binder (such as cobalt) and sintering them under high temperature and high pressure.

However, when the ceramic substrate such as alumina which is harder than the glass substrate is cut, the scribing wheel made of a super hard alloy and the scoring wheel composed of the polycrystalline diamond sintered body disclosed in Patent Document 1 are used. The leading edge will immediately produce a gap or wear, and only a few tens of meters will not form a crack. Therefore, it is practically impossible to perform the division of a ceramic substrate or the like which is harder than a glass substrate by using a scribing wheel made of a super-hard alloy or a scribing wheel composed of a polycrystalline diamond sintered body.

Therefore, when performing the cutting of a hard substrate such as a ceramic substrate, a scribing wheel composed of a polycrystalline diamond and a single crystal diamond which are harder than the super hard alloy and the polycrystalline diamond sintered body is used, and it has been conventionally Discussed.

Advanced technical literature

[Patent Document 1] Unexamined Japanese Patent Publication No. 55-106635

When the ceramic substrate is cut by a scribe wheel composed of only diamonds such as polycrystalline diamonds and single crystal diamonds, it can be formed more than the use of a scribed wheel composed of a superhard alloy or a polycrystalline diamond sintered body. The cracks required for the long break.

However, even in the case of a scribing wheel composed only of diamonds, since the ceramic substrate is extremely hard, formation or wear of the leading edge of the blade cannot be completely prevented. Therefore, it is desirable to have a scribing wheel that can prevent the notch of the leading edge of the blade and the wear of the blade as long as possible.

SUMMARY OF THE INVENTION An object of the present invention is to provide a sculpt, a holder unit, a scoring device, and a scriber having a longer life span when a dicing wheel composed of only a diamond is used to break a ceramic substrate or the like which is harder than a glass substrate. Wheel manufacturing method and scribing method.

In order to achieve the above object, the blade of the present invention is only a scribing wheel composed of diamonds, and the leading edge of the blade edge is processed by an R angle having a radius of 0.8 to 5 μm.

According to the scribing wheel of the present invention, since the leading edge of the blade is processed by the R angle to form an arc, even if it is used for the division of the ceramic substrate or the like, it can be significantly larger than the scribing wheel which is not subjected to the R angle processing. Reduce the gap at the leading edge of the blade to make the life of the scribe wheel longer.

Further, in the scribing of the present invention, the diamond is a single crystal diamond.

According to the engraving of the present invention, the crystal orientation of the single crystal diamond can be reduced. At the same time of the influence of the strength, the formation of the leading edge of the blade is suppressed, and the life of the scoring wheel is prolonged.

Further, the scribing wheel of the present invention is used for the division of at least one brittle material substrate selected from the group consisting of ceramics, sapphire and rhodium.

According to the scribing wheel of the present invention, the brittle material substrate which is harder than a general amorphous glass substrate such as a liquid crystal panel can be cut well over a long distance.

Further, the holder unit of the present invention includes the scribing wheel of any of the above, and a holder for holding the scribing wheel in a rotatable manner.

According to the holder unit of the present invention, the formation of the leading edge notch of the scribing wheel blade can be greatly reduced, and the life of the scoring wheel can be extended, and the holder unit can be used for the separation of the ceramic substrate or the like.

Moreover, the scoring device of the present invention includes the above-described holder unit.

According to the scoring device of the present invention, the formation of the leading edge notch of the scribing wheel blade can be greatly reduced, and the life of the scoring wheel can be prolonged, which is a scribing device suitable for breaking the ceramic substrate or the like.

Moreover, the manufacturing method of the scribe wheel of the present invention includes a step of forming a blade by a disk-shaped member made of only diamond, and a step of performing R-angle processing on the leading edge of the blade edge.

According to the manufacturing method of the scribing wheel of the present invention, since the R-angle processing of the leading edge of the blade is performed after the blade is formed, the surface roughness of the blade is reduced by sufficiently grinding the surface of the blade, thereby preventing the blade surface from forming a gap. To further extend the life of the scoring wheel. Further, after the blade is formed, the R angle processing of the leading edge of the blade is performed, so that it is easier to perform the processing of the target leading edge radius.

Further, the scribing method of the present invention is characterized in that the scribing wheel is composed of only a diamond, and the scribing line is formed on at least one of the brittle material substrates selected from the group consisting of ceramics, sapphire and samarium. The cutting edge of the blade edge is applied with an R angle of 0.8 to 5 μm.

According to the scribing method of the present invention, the scribing wheel composed of only the diamond is used to form a longer-distance line for a brittle material substrate which is harder than a general amorphous glass substrate such as a liquid crystal panel. .

10‧‧‧ scoring device

11‧‧‧Mobile Station

12a, 12b‧‧‧ rails

13‧‧‧Ball screw

14, 15‧‧ ‧ motor

16‧‧‧Table

17‧‧‧ glass substrate

18‧‧‧CCD camera

19‧‧‧ Bridge

20a, 20b‧‧ ‧ pillar

21‧‧‧Scratch

22‧‧‧ Guides

23‧‧‧Holding joints

23a‧‧‧Rotary shaft

23b‧‧‧Connector

24a, 24b‧‧‧ bearing

24c‧‧‧ spacer

25‧‧‧Circular opening

26‧‧‧Internal space

27‧‧‧ Magnet

28‧‧‧ parallel sales

30‧‧‧Holding unit

31‧‧‧Holding

32‧‧‧Installation Department

32a‧‧‧ inclined section

32b‧‧‧flat

33‧‧‧ Keep the slot

34a, 34b‧‧‧ support

35‧‧‧Support hole

40, 140‧‧‧ marking wheel

41‧‧‧Cutter wheel body

42, 52‧‧ ‧ blade

43‧‧‧blade front

43a‧‧‧Ring Department

44‧‧‧through holes

51‧‧ ‧ sales

52a, 53a‧‧‧Rotary axis

52b, 53b‧‧‧ plane of the meteorite

53‧‧‧砥石

Fig. 1 is a schematic view showing a scribing apparatus of an embodiment.

Figure 2 is a front elevational view of the holder joint of the embodiment.

Fig. 3 is a perspective view of the holder unit of the embodiment.

Fig. 4(A) is a side view of the scribing wheel of the embodiment, and Fig. 4(B) is a front view of the scoring wheel.

Fig. 5(A) is a front view of the rake front edge of the embodiment before the R angle machining, and Fig. 5(B) is a front view of the rake front edge after the R angle machining.

Fig. 6(A) is a conceptual diagram showing one of the methods of R angle processing, and Fig. 6(B) is a conceptual diagram showing another method of R angle processing.

Fig. 7(A) is an explanatory view showing a photographing point of the marking wheel of the embodiment, and Fig. 7(B) is a photograph of the leading edge of the marking wheel of the embodiment.

Figure 8 is a photograph of the leading edge of the scribe wheel for comparison.

Fig. 9(A) is a diagram of a scribe wheel of the embodiment, and Fig. 9(B) is a diagram for a scribe wheel for comparison.

Hereinafter, embodiments of the present invention will be described using the drawings. However, the embodiments described below are merely examples of the technical idea of the present invention, and the present invention is not intended to be specific to the embodiments. The invention is of course applicable to other implementations included in the scope of the patent application. form.

Fig. 1 is a schematic view of a scoring apparatus 10 according to an embodiment of the present invention. The scribing device 10 is provided with a mobile station 11. The moving table 11 is screwed to the ball screw 13, and the ball screw 13 is rotated by the driving of the motor 14, thereby moving in the y-axis direction along the pair of guide rails 12a, 12b.

A motor 15 is disposed above the mobile station 11. The motor 15 rotates the upper table 16 in the xy plane and positions it at a predetermined angle. The tempered glass substrate 17 as a scribe object is placed on the table 16 and held by a vacuum suction means (not shown) or the like.

The brittle material substrate 17 is a ceramic substrate made of a low-temperature fired ceramic or a high-temperature fired ceramic, a tantalum substrate, a sapphire substrate, or the like, and is selected from at least one type of brittle material substrate composed of ceramic, sapphire, and tantalum. A substrate such as a substrate, which is generally used as an amorphous glass substrate, is a harder brittle material substrate.

The scribing device 10 is mounted on the tempered glass substrate 17 of the table 16 and equipped with two CCD cameras 18 for taking an alignment mark formed on the surface of the tempered glass substrate 17. The bridge 19 is mounted on the pillars 20a and 20b in the x-axis direction so as to straddle the table 11 of the moving table 11 and the upper portion thereof.

A guide 22 is mounted to the bridge 19, and the scribing head 21 is disposed to be guided by the guide 22 to move in the x-axis direction. At the scribe head 21, the holder unit 30 is attached through the holder joint 23.

2 is a front view of the holder joint 23 to which the holder unit 30 is mounted. 3 is a perspective view of the holder unit 30.

The holder joint 23 has a substantially cylindrical shape and includes a rotating shaft portion 23a and a joint portion. 23b. In a state where the holder joint 23 is attached to the scribing head 21, the rotating shaft portion 23a is attached to the two bearings 24a, 24b through the cylindrical spacer 24c, and the holder joint 23 is held to be rotatable.

The cylindrical joint portion 23b is provided with an inner space 26 having a circular opening 25 at the lower end side. A magnet 27 is embedded in the upper portion of the internal space 26. The holder unit 30 is detachably mounted by the magnet 27, and is inserted into the internal space 26.

The holder unit 30 is a holder 31, a scoring wheel 40, and a pin (pin, not shown). The holder 31 has a substantially cylindrical shape as shown in Fig. 3 and is formed of a magnetic metal. A positioning attachment portion 32 is provided on the upper portion of the holder 31. The mounting portion 32 is formed by cutting the upper portion of the holder 31, and includes an inclined portion 32a and a flat portion 32b.

The mounting portion 32 side of the holder 31 is inserted into the internal space 26 through the opening 25. At this time, the upper end side of the holder 31 is attracted by the magnet 27, and the inclined portion 32a of the mounting portion 32 comes into contact with the parallel pin 28 passing through the internal space 26, whereby the positioning and fixing of the holder unit 30 to the holder joint 23 are performed. Further, when the holder unit 30 is removed from the holder joint 23, the holder 31 can be easily removed by pulling it downward.

Since the scoring wheel 40 is a consumable item, it needs to be replaced periodically. In the present embodiment, in order to easily attach and detach the holder unit 30, the holder unit 30 itself is replaced, and the scribing wheel 40 constituting the holder unit 30 is replaced, so that the scribing wheel 40 can be quickly replaced. .

In the lower portion of the holder 31, a holding groove 33 in which the slit holder 31 is formed is provided. The lower portion of the holder 31 which is cut to provide the holding groove 33 has support portions 34a and 34b sandwiching the holding groove 33. Here, the groove 33 is held, and the scribing wheel 40 is rotatably arranged. Further, a support hole for inserting a pin for holding the scribing wheel 40 rotatably is formed in each of the support portions 34a and 34b. 35.

Next, details of the scribing wheel 40 for breaking the brittle material substrate 17 will be described. 4(A) is a side view of the scribe wheel 40 attached to the front end of the holder 31, and FIG. 4(B) is a front view of the scribe wheel 40.

As shown in FIG. 4, the scoring wheel 40 has a disk shape and includes a cutter wheel body portion 41, a blade 42, and a blade leading edge 43.

A through hole 44 that penetrates the cutter wheel main body portion 41 in the direction of the rotation axis is formed in the vicinity of the center of the cutter wheel main body portion 41. By inserting the pin through the through hole 44, the scribing wheel 40 can be rotatably held by the holder 31 through the pin.

The blade 42 is formed in an annular shape on the outer circumference of the cutter wheel main body portion 41. The blade 42 has a substantially V shape in a front view, and the thickness of the blade 52 with respect to the rotation axis direction gradually decreases toward the tip end 43 of the blade.

The blade leading edge 43 is different from the leading edge of the general scribing wheel, and the front end of the blade 42 is subjected to an R-angle machining to be described later, and has an arc shape along the outermost peripheral portion.

Next, a method of manufacturing the scribing wheel 40 will be described using a drawing. Fig. 5 is an enlarged view of the front end of the blade 42 shown by a circle A of Fig. 4(B), Fig. 5(A) is a front view of the blade leading edge 43 before machining, and Fig. 5(B) is a blade front after machining. Front view of the edge 43.

The scoring wheel 40, like a polycrystalline diamond and a single crystal diamond, does not contain a bonding material but is formed only of diamonds. In the present embodiment, the scoring wheel 40 is formed of a single crystal diamond.

The scribing wheel 40 composed of a single crystal diamond first forms a disc-shaped member made of a single crystal diamond. Specifically, the single crystal diamond is a synthetic product produced by a high temperature high pressure synthesis method or a chemical vapor deposition method. Then, the single crystal diamond is cut out by laser or the like. A circular plate of radius.

Next, a disk-shaped single crystal diamond is formed on both sides of the circumferential portion of the circular plate to form a blade 42 having a blade leading edge 43 having a tip end shape as shown in Fig. 5(A). Further, the ridge line portion of the blade leading edge 43 at this time is indicated by reference numeral 43a. This state is a general scoring wheel. At this time, the single crystal diamond can have a smaller surface roughness than the conventional PCD and the superhard alloy, and as a result, the ridgeline portion of the blade leading edge is sharper.

Next, the blade leading edge 43 of the blade 42 is subjected to R-angle processing, and is polished from the ridge portion 43a to form a circular shape at the front end of the blade leading edge 43 in the front view along the outermost peripheral portion shown in Fig. 5(B).

Here, the specific direction of the R-angle machining in which the front end of the blade leading edge 43 is formed into a circular arc will be described using the drawings. For example, as shown in FIG. 6(A), the support pin 51 is inserted into the through hole 44 of the scribing wheel 40, and the scribing wheel 40 is rotated while rotating around the rotation shaft 52a. The plane 52b of the slab-shaped vermiculite 52 abuts the blade leading edge 43 perpendicularly and causes the pin 51 to alternately oscillate in the direction indicated by the arrow. Accordingly, the front end of the blade leading edge 43 can be made circular.

In addition, as shown in FIG. 6(B), the support pin 51 is inserted into the through hole 44 of the scribing wheel 40, and the scoring wheel 40 is rotated while rotating about the rotation shaft 53a. The flat 53b of the soft, soft vermiculite 53 is perpendicular to the leading edge 43 of the blade. At this time, it will fall into the plane 53b of the vermiculite 53, that is, the front end of the blade leading edge 43 may be rounded.

By the above method, the cutting edge 40 of the blade leading edge 43 of the blade 42 can be made circular. Further, in the present embodiment, as shown in Fig. 5(A), before the front end of the blade leading edge 43 is rounded, the inclined surfaces of the tip end are formed along the both sides of the circumferential portion of the circular plate. Therefore, the inclined surface of the blade 42 can be polished to a mirror shape to minimize the surface roughness of the blade 42. The life of the blade 42 is further extended. Further, since the inclined surface of the blade 42 is completed first and the R angle of the leading edge 43 is processed, it is easy to process to the target R radius.

Next, the size of the scoring wheel 40 will be described. The outer diameter of the scoring wheel 40 is preferably 1.0 to 10.0 mm, preferably 1.0 to 5.0 mm, and more preferably 1.0 to 3.0 mm. When the outer diameter of the scoring wheel 40 is less than 1.0 mm, the operability of the scoring wheel 40 will be lowered. On the other hand, when the outer diameter of the scribing wheel 40 is larger than 10.0 mm, there is a possibility that the vertical crack at the time of scribing cannot be sufficiently formed with respect to the brittle material substrate 17.

The thickness of the scoring wheel 40 is in the range of 0.4 to 1.2 mm, preferably 0.4 to 1.1 mm. When the thickness of the scoring wheel 40 is less than 0.4 mm, workability and workability may be lowered. On the other hand, when the thickness of the scribing wheel 40 is larger than 1.2 mm, the material and manufacturing cost of the scoring wheel 40 become high. Further, the diameter of the through hole 45 is, for example, 0.8 mm.

The leading edge angle of the blade 42 is usually in the range of 90 to 160 degrees, preferably 100 to 150 degrees.

Further, with respect to the rounded blade leading edge 43 of the tip end, if the R radius of the R angle processing is less than 0.8 μm, the load concentrates on the front end of the blade leading edge, causing local pressure and easily causing chipping or wear of the leading edge of the blade. On the other hand, if the R radius is too large, the load at the time of scribing will greatly increase the cross-sectional quality of the substrate after the division. Therefore, the range of the R radius is preferably 0.8 to 5 μm, particularly preferably 3 μm or less. When the R radius is in the range of 0.8 to 5 μm, the load can be appropriately dispersed due to the large contact area, and the local pressure can be suppressed to prevent the chip front edge from being indented and worn.

Further, in general, the alumina substrate or the like in the brittle material substrate 17 has a coarser surface due to the particle diameter of the alumina particles after sintering, for example, the surface roughness Ra of the measured alumina substrate described later, and the surface roughness. Ra was 0.296 μm. Therefore, the R radius of the leading edge 43 of the blade, After considering the surface roughness of the brittle material substrate 17 to be separated, it is very effective to prevent the chipping due to the unevenness of the substrate by taking a sufficiently large value.

Next, a description will be given of the use of the scribing wheel 40 which is processed by the R edge of the blade leading edge 43 and the scribing wheel 140 which is not R-angled with the blade leading edge 43 to perform the breaking of the brittle material substrate 17. result. The breaking conditions are as follows.

The scribe wheel 40 composed of a single crystal diamond has an outer diameter of 2 mm and a blade leading edge angle of 120°. Further, the R radius of the blade leading edge 43 was 1.0 μm. On the other hand, the difference between the scoring wheel 140 and the scoring wheel 40 is only in the presence or absence of the R angle processing, and is formed by a single crystal diamond having an outer diameter of 2 mm and a blade leading edge angle of 120°. Further, the radius of the front end R of the scribe wheel 40 which was not processed by the R angle was measured to be 0.17 μm.

An alumina substrate (manufactured by Kyocera Co., Ltd., material number: A476T) having a thickness of 0.635 mm was obtained.

The cutting speed was 100 mm/sec, and the scribing load was adjusted so that the penetration amount of the crack was 120 μm.

The state in which the leading edge of the blade after the scribe line is formed on the surface of the brittle material substrate 17 by the above-described breaking condition is described using the photographed photograph or the like as follows. Fig. 7 is a view showing the result of the division of the scoring wheel 40, Fig. 7(A) showing an explanatory view of the photographed point, and Fig. 7(B) showing the amount of penetration of the photographing edge 43 and the crack. Figure 8 is a photograph showing the amount of penetration of the photograph of the leading edge of the scoring wheel 140 and the crack. Fig. 9 is a graph showing the amount of occurrence of the leading edge gap of the blade relative to the walking distance. Fig. 9(A) is a graph relating to the scoring wheel 40, and Fig. 9(B) is a graph relating to the scoring wheel 140.

As shown in Fig. 7(A), the edge of the blade edge 43 is determined by the scoring wheel 40 to determine an arbitrary point P1. Based on the point P1, P2, P3, P4, and P5 are determined at a scale of about 45 degrees. to Each point of P1 to P5 was taken from the front side of the scoring wheel 40. Further, with respect to the leading edge of the scribing wheel 140 of Fig. 8, the same position as that of the scoring wheel 40 was also taken.

Further, in Fig. 9, the size (width) of the notch formed at the leading edge of the blade is displayed as a bar graph of the number b and 100 μm to the number c in the case of 10 to 50 μm and the number a and 50 to 100 μm. Further, the amount of penetration (μm) of the crack shown in Fig. 7(B) and Fig. 8 is shown by a curve diagram of d.

As can be seen from Fig. 9, the front edge 43 of the blade has a rounded shape. The scribe wheel 40 has a penetration amount of a crack which is not inferior to the scribe wheel 140 whose front edge is not rounded. Therefore, even if the R edge processing is performed on the leading edge 43 of the blade, the decrease in the amount of penetration does not occur.

On the other hand, regarding the notch of the leading edge of the blade, the notch of the leading edge of the blade starts at a position where the travel distance of the leading edge of the blade exceeds 500 m, and the notch of the leading edge of the blade is sharply increased, and in particular, a large notch of 100 μm or more is generated. However, in the scoring wheel 40, the walking distance of the leading edge of the blade is about 1000 m, and the leading edge 43 of the blade hardly changes, and even if it reaches 1500 m, no large gap of 100 μm or more is generated.

As described above, by performing the R-angle machining of the leading edge 43 of the cutting edge 40, the leading edge 43 of the blade is rounded, which greatly reduces the occurrence of a gap in the leading edge 43 of the blade and extends the life of the marking wheel 40. In particular, in the case of a single crystal diamond, in the state of FIG. 5(A), since the front end of the blade leading edge 43 has a very sharp shape, the blade leading edge 43 is very likely to be generated when used for the division of the alumina substrate. gap. However, by rounding the leading edge 43 of the blade, even if the scribe wheel 40 is made of single crystal diamond, the notch of the leading edge 43 of the blade can be greatly reduced.

When observing the photograph of the leading edge of the scribing wheel 140 of the leading edge of the blade shown in FIG. 8 without the R angle processing, it can be found that P4 and P5 at the photographing point have a large gap, and on the other hand, P1 and P2. There is almost no gap.

This is because the scoring wheel 140 is composed of a single crystal diamond, and the single crystal diamond has a crystal orientation, and the crystal orientation has a large difference in hardness. Therefore, if the scribing wheel is made of polycrystalline diamond, the gap will not be too different due to the difference in the position of the leading edge of the blade, and the same gap will be generated in the entire leading edge of the blade. On the other hand, in the case of a scribing wheel composed of a single crystal diamond, as shown in Fig. 8, generally, due to the crystal orientation of the single crystal diamond, the position of the leading edge of the blade is different, and a gap is generated. Different situation.

However, as in the scribing wheel 40 composed of single crystal diamond of the present embodiment, the blade leading edge 43 is rounded by the R angle processing of the blade leading edge 43, as shown in Fig. 7(B), regardless of At any point on the leading edge 43 of the blade, the occurrence of large notches can be suppressed, so that the influence of the crystal orientation of the single crystal diamond on the strength can be reduced. Further, due to the influence of the crystal orientation of the single crystal diamond, it is extremely difficult to uniformly process the shape of the leading edge leading edge 43 of the tip end shown in Fig. 5(A) on the entire circumference of the scribing wheel 40. However, in order to perform the R-angle machining of the blade leading edge 43 as shown in Fig. 5(B), it is not required to perform the uniformity of the entire circumference as in the processing of the blade leading edge 43 of Fig. 5(A).

As described above, the blade 42 is composed only of diamonds, and the leading edge 43 of the blade is machined into a circular scribed wheel 40 through an R angle of a radius of 0.8 to 5 μm, even if it is selected from the group consisting of ceramics, sapphires and enamels. The breaking of the at least one brittle material substrate 17 can significantly reduce the formation of the notch of the leading edge 43 and prolong the life of the scoring wheel 40 as compared with the scribing wheel which is not processed by the R angle.

Further, in the present embodiment, the scribing wheel 40 is generally composed of a single crystal diamond. However, the present invention is also applicable to, for example, only the blade 42 is made of a single crystal diamond, and the cutter wheel body portion 41 is formed of a super hard alloy. The scribing wheel 40 that fixes the cutter wheel body portion 41 and the blade 42 with an adhesive, or the portion of the inclined surface on the circumference of the scoring wheel 40 that is at least at least in contact with the brittle material substrate A circular wheel formed by a single crystal diamond. In the case of such a scribing wheel, the use of expensive single crystal diamonds can be reduced, and an inexpensive scoring wheel can be provided.

Further, in the present embodiment, although the single-crystal diamond is used as the scribing wheel 40, the scribing wheel 40 in which the blade 42 is made of polycrystalline diamond may be used. Among the polycrystalline diamonds, those having a fine crystal grain structure or an amorphous graphite-type carbon material as a starting material, directly sintered to a diamond at an ultrahigh pressure and high temperature, or by chemical vapor deposition (CVD) Synthetic diamond. Although the polycrystalline diamond does not have a difference in hardness due to the crystal orientation of the leading edge of the blade, there is a possibility that the diamond particles forming the leading edge of the blade fall off to form a notch. The present invention is also effective in the prevention of the gap of the scribe wheel 40 using such a polycrystalline diamond.

Further, these single crystal diamonds and polycrystalline diamonds are substantially composed of only diamonds, and do not contain iron-based metals as bonding materials, but are also included in the diamond crystals in which minute impurities such as boron or phosphorus are intentionally added. By adding such impurities, it is possible to impart conductivity to the diamond and improve heat resistance.

Further, in the scribing device 10 of the present embodiment, when the holder 31 holding the scribing wheel 40 is attached to the scribing head 21, it is configured to be attached to the holder joint 23. However, the scoring device 10 may also be configured to directly mount the holder 31 on the scribing head 21.

In addition, the scribing device 10 of the present embodiment is provided with a guide 22 for moving the scribing head 21 and a bridge 19, and includes a moving table 11 for rotating the table 16 on which the brittle material substrate 17 is mounted. However, it is not limited to such a scoring device 10. It can also be applied, for example, to enable the user to hold the scribe head 21 on which the holder 31 is attached, and to shape the portion of the scribe head 21 into a shape of a shank, and the user holds the shank to move to perform a brittle material substrate. The so-called manual scoring device of 17 is divided.

42‧‧‧blade

43‧‧‧blade front

43a‧‧‧Ring Department

Claims (7)

A scriber wheel composed only of diamonds, characterized in that the leading edge of the blade edge is subjected to an R-angle processing having a radius of 0.8 to 5 μm. For example, the marking wheel of claim 1 of the patent scope, wherein the diamond is a single crystal diamond. The marking wheel of claim 1 or 2 is for the breaking of at least one substrate of brittle material selected from the group consisting of ceramics, sapphires and enamel. A holder unit having a scriber wheel of any one of claims 1 to 3 and a holder for holding the scribe wheel in a rotatable manner. A scoring apparatus having a holder unit as in item 4 of the patent application. A method of manufacturing a scoring wheel, comprising: a step of forming a blade on a disk-shaped member composed only of diamonds; and a step of applying an R-angle to the leading edge of the blade. A scribing method is a scribing wheel formed by a blade consisting only of diamonds, and a scribing line is formed on at least one of the brittle material substrates selected from the group consisting of ceramics, sapphires and rhodium, characterized in that the blade is used. The scriber wheel is machined with an R angle of a radius of 0.8 to 5 μm.