CN107415065B

CN107415065B - Knife flywheel

Info

Publication number: CN107415065B
Application number: CN201710332286.7A
Authority: CN
Inventors: 福西利夫; 林弘义; 饭田纯平
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2016-05-24
Filing date: 2017-05-11
Publication date: 2020-12-29
Anticipated expiration: 2037-05-11
Also published as: KR102380301B1; JP2017209816A; CN107415065A; KR20170132665A; JP6746128B2; TWI732864B; TW201808569A

Abstract

The invention provides a cutter wheel which is high in quality, can be used in a state with good sharpness for a long time, and can form a linear and attractive scribing line without shaking during rotation. The cutter wheel is in a disc shape made of single crystal diamond, has a cutting edge part (3) composed of left and right inclined surfaces (3a) on the outer peripheral surface, and is provided with a bearing hole (2) for mounting at the center part, wherein the inner diameter of the bearing hole (2) is 0.3-1.1 mm, the roundness is less than 0.5 mu m, the cylindricity is less than 1 mu m, and the surface roughness is less than 0.01 mu m according to the arithmetic mean roughness.

Description

Knife flywheel

Technical Field

The present invention relates to a cutter wheel (also referred to as a scribing wheel) used for processing a scribe line (a scribe groove) in a brittle material substrate or cutting the brittle material substrate.

The present invention particularly relates to a cutter wheel made of single crystal diamond suitable for scribing or cutting a brittle material substrate, such as a ceramic substrate made of alumina, HTCC, LTCC, or the like, a sapphire substrate, or a silicon substrate, which is stronger than an amorphous glass substrate.

Background

In the process of cutting a brittle material substrate, the following methods are generally known: a method of forming scribe lines on a front surface of a substrate using a cutter wheel and then bending the substrate by applying an external force from a back surface side along the scribe lines to cut the substrate by unit of the substrate is disclosed in patent document 1, for example.

As a cutter wheel for processing a scribe line on a brittle material substrate, a cutter wheel having a V-shaped cutting edge on the circumferential surface and a bearing hole for attachment at the center is used. The diameter of the cutter wheel is very small, for example, about 0.7 to 5.0mm, and the cutter wheel is continuously and repeatedly used in a pressure-bonded state, so that the use environment of the cutter point is severe. Therefore, a material having excellent tool characteristics is required for the cutter wheel as much as possible.

Sintered diamond (PCD) is known as a material having particularly excellent tool characteristics such as wear resistance and abrasive properties. PCD is a material formed by sintering fine diamond particles under high temperature and high pressure using cobalt as a medium, and is used for a cutting tool for a difficult-to-machine material. Patent document 2 discloses a method for manufacturing a cutter wheel made of PCD.

Prior art documents

Patent document

Patent document 1: japanese patent No. 3787489

Patent document 2: japanese patent laid-open publication No. 2011-93189

Disclosure of Invention

Problems to be solved by the invention

However, as described above, since PCD is a material formed by sintering fine diamond particles, when a PCD cutter wheel is used for a long period of time in a severe use environment, cobalt interposed between the diamond particles is abraded or the diamond particles are detached due to a difference in hardness between the diamond particles and cobalt, and thus fine irregularities are generated on the surface of the cutter blade. If the surface of the cutter wheel is uneven, the strength and sharpness are deteriorated, and it is impossible to process a beautiful scribe line, and as a result, the service life of the cutter wheel is shortened.

In contrast, recently, attention has been focused on a cutter wheel made of single crystal diamond, which is harder than PCD and can also be used for scribing a substrate having higher hardness. However, a cutter wheel made of single crystal diamond is strong and has excellent sharpness, but has cleavage properties (properties of breaking in a specific direction), and therefore, it is necessary to make intensive studies on suppression of breakage in use.

In addition, the machining accuracy of the roundness, cylindricity, surface roughness, and right angle (orthogonality) of the wheel side surface with respect to the bearing hole of the cutter wheel is greatly affected by the chattering when the cutter wheel is rotated. When the cutter wheel is shaken, the straightness (straightness) of the scribe line is affected, and the scribe line swings right and left, so that the substrate cannot be cut beautifully. In particular, in chip processing of a semiconductor substrate, since the processing width is in the micrometer unit and the processing width is supposed to be further narrowed by miniaturization of an element, it is necessary to suppress the wobbling of a scribe line to less than several μm.

In view of the above, an object of the present invention is to provide a high-quality wheel made of single crystal diamond, which can be used in a state of good sharpness for a long period of time even for a brittle material substrate having high hardness, and which can form a linear and beautiful scribe line without rattling during rotation.

Means for solving the problems

In order to solve the above problems, the present invention adopts the following technical means. That is, the cutter wheel of the present invention is a disk-shaped cutter wheel formed of a single crystal diamond, the cutter wheel having a cutting edge portion formed of right and left inclined surfaces on an outer peripheral surface thereof, and a bearing hole for mounting in a central portion thereof, the bearing hole having an inner diameter of 0.3 to 1.1mm, a roundness of 0.5 μm or less, a cylindricity of 1 μm or less, and a surface roughness of 0.01 μm or less in terms of an arithmetic average roughness.

Here, a right angle formed between the bearing hole and the side surface of the cutter wheel may be 0.2 ° or less.

The left and right inclined surfaces of the cutting edge portion may have a surface roughness of 0.01 μm or less in terms of arithmetic mean roughness, and the cutting edge angle at which the left and right inclined surfaces intersect may be 90 to 160 °.

Effects of the invention

In the cutter wheel configured as described above, the surface of the bearing hole is mirror-shaped, and rotational fluctuation due to the processing accuracy of the inner diameter of the bearing hole can be minimized, so that a straight and beautiful scribe line can be formed, and breakage due to a slight flaw, which is a weak point of the cutter wheel made of single crystal diamond, can be prevented, thereby providing an effect that the cutter wheel can be used in a state of good sharpness for a long period of time.

Drawings

Fig. 1 is a sectional view and a side view showing a cutter wheel of the present invention.

Fig. 2 is a view showing a manufacturing process of the cutter wheel of the present invention.

Fig. 3 is an explanatory diagram showing a mechanism for measuring the roundness and cylindricity of the bearing hole in the cutter wheel according to the present invention.

Fig. 4 is an explanatory diagram showing a mechanism for measuring the squareness between the bearing hole and the wheel side surface in the cutter wheel according to the present invention.

Fig. 5 is an explanatory diagram showing a mechanism for measuring the surface roughness of the bearing hole in the cutter wheel according to the present invention.

Description of reference numerals:

a, a cutter wheel;

1a main body;

2, bearing holes;

3, a cutter point part;

3a inclined plane.

Detailed Description

Hereinafter, the cutter wheel according to the present invention will be described in detail with reference to the accompanying drawings.

Fig. 1 is a view showing a cutter wheel a of the present invention, fig. 1(a) is a sectional view, and fig. 1(b) is a side view.

The cutter wheel a is made of single crystal diamond as a whole, and has a bearing hole 2 for attachment at the center of a disk-shaped body 1, and a cutting edge portion 3 formed of left and right

inclined surfaces

3a, 3a at the outer peripheral surface. In the present embodiment, the outer diameter D of the cutter wheel A is 2mm, the thickness t is 650 μm, the inner diameter of the bearing hole 2 is 0.8mm, and the cutting edge angle at which the left and right inclined surfaces 3a meet is 110 °. Further, chamfered portions 2a are formed at both end edges of the bearing hole 2.

In manufacturing the cutter wheel a, first, as shown in fig. 2(a), a disc-shaped body a' which is circular in side view, has a flat outer peripheral surface, and has a bearing hole 2 at the center is machined. The thickness t of the disc-shaped body A' is 650 μm, which is the same as that of the finished cutter wheel A.

As shown in fig. 2(b), the bearing hole 2 of the disc-shaped body a 'is inserted into the rotating shaft 4 of the polishing apparatus, and the disc-shaped body a' is mounted, and the polishing stone 5 is pressed against the side edge portion of the outer peripheral surface of the disc-shaped body a 'while the disc-shaped body a' is rotated, thereby cutting one inclined surface 3 of the nose portion 3_aAfter the machining, the disc-shaped body a' is inverted, and the other inclined surface 3a is machined. This forms a cutter wheel a having a cutting edge portion 3 formed of left and right

inclined surfaces

3a, 3a as shown in fig. 1 (a).

When the bearing hole 2 is machined, the machining is performed as follows: the roundness of the portion excluding the chamfered portion 2a is 0.5 μm or less, the cylindricity is 1 μm or less, and the surface roughness is 0.01 μm or less in terms of arithmetic average roughness (Ra). In addition, the right angle formed by the axis of the bearing hole 2 and the side surface of the cutter wheel A is less than 0.2 degrees, preferably less than 0.1 degrees.

The surface of the bevel 3a of the cutting edge portion 3 may be subjected to finish polishing so that the arithmetic average roughness (Ra) is 0.01 μm or less.

As shown in fig. 3, the roundness and cylindricity of the bearing hole 2 are measured by bringing a ball terminal (contact) 6 of a measuring device made of cemented carbide or ruby into contact with the inner peripheral surface of the bearing hole 2 and rotating a cutter wheel a. The measurement range L1 may be three or more positions, preferably five or more positions, over 70% or more of the entire length of the bearing hole 2.

As shown in fig. 4, the right angle formed by the axial center of the bearing hole 2 and the side surface of the cutter wheel a is measured by inserting the bearing hole 2 into the rotary shaft 8 of the jig 7, rotating the cutter wheel a, and bringing the ball terminal 6 of the measuring device into contact with the middle position of the upper side surface of the cutter wheel a. For example, when the outer diameter of the cutter wheel a is 2 to 3mm, the distance L2 between the contact position of the ball terminal 6 and the axial center of the bearing hole 2 may be set to 0.65 mm. The side face inclination angle α in this measurement is a right angle.

In addition, the step at the contact point of the ball terminal 6 is about 4.5 μm when the inclination angle α is 0.2 °, and the step is about 2.3 μm when the inclination angle α is 0.1 °.

As shown in fig. 5, the surface roughness of the bearing hole 2 is measured by bringing the terminal 9 of the measuring device into contact with the inner peripheral surface of the bearing hole 2 and moving the terminal 9 in the axial direction of the bearing hole 2 while rotating the cutter wheel a. In this case, the measurement range L1 may be 70% or more of the bearing hole. The terminal 9 is formed of cemented carbide or ruby.

In the cutter wheel a configured as described above, rotational fluctuation due to the machining accuracy of the inner diameter of the bearing hole 2 can be minimized, and a straight and beautiful scribe line can be formed. Further, by making the surface of the bearing hole 2 mirror-like, it is difficult to generate a minute groove serving as a starting point of the fracture, and the cutter wheel a can be prevented from fracturing, and can be used for a long period of time.

Although the present invention has been described with reference to the typical examples, the present invention is not limited to the above-described embodiments. For example, the present invention can be applied to a cutter wheel having an outer diameter of 0.7 to 5.0mm including the outer diameter of 2mm shown in the above embodiments. The inner diameter of the bearing hole can be selected within a range of 0.3 to 1.1mm, and the cutting edge angle can be set within a range of 90 to 160 °. In addition, the present invention can be modified and changed as appropriate within a range that does not depart from the scope of the claims while achieving the object.

Industrial applicability

The present invention can be used for a cutter wheel used for scribing or cutting a brittle material substrate such as a ceramic substrate including a glass substrate, a sapphire substrate, or a silicon substrate.

Claims

1. A knife flywheel, wherein,

the cutter wheel is a disk-shaped cutter wheel formed by single crystal diamond, the cutter wheel is provided with a cutter point part consisting of a left inclined surface and a right inclined surface on the outer circumferential surface, and a bearing hole for mounting is arranged on the central part,

the bearing hole has an inner diameter of 0.3 to 1.1mm, a roundness of 0.5 μm or less, a cylindricity of 1 μm or less, and a surface roughness of 0.01 μm or less in terms of arithmetic mean roughness.

2. The cutter wheel of claim 1,

the right angle formed by the bearing hole and the side surface of the cutter wheel is less than 0.2 degrees.

3. The cutter wheel of claim 1 or 2,

the surface roughness of the left and right inclined surfaces of the blade tip portion is 0.01 [ mu ] m or less in terms of arithmetic mean roughness, and the blade tip angle at which the left and right inclined surfaces intersect is 80-160 °.