CN104272194B - 处理靶材的光刻系统和方法 - Google Patents

处理靶材的光刻系统和方法 Download PDF

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Publication number
CN104272194B
CN104272194B CN201380024169.4A CN201380024169A CN104272194B CN 104272194 B CN104272194 B CN 104272194B CN 201380024169 A CN201380024169 A CN 201380024169A CN 104272194 B CN104272194 B CN 104272194B
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China
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chuck
alignment
target
sensor
sensors
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Chinese (zh)
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CN104272194A (zh
Inventor
N.弗奇尔
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ASML Netherlands BV
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Mapper Lithopraphy IP BV
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30433—System calibration
    • H01J2237/30438—Registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Multimedia (AREA)
  • Analytical Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electron Beam Exposure (AREA)
CN201380024169.4A 2012-03-08 2013-03-08 处理靶材的光刻系统和方法 Active CN104272194B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261608524P 2012-03-08 2012-03-08
US61/608,524 2012-03-08
PCT/EP2013/054782 WO2013132081A2 (en) 2012-03-08 2013-03-08 Lithography system and method for processing a target, such as a wafer

Publications (2)

Publication Number Publication Date
CN104272194A CN104272194A (zh) 2015-01-07
CN104272194B true CN104272194B (zh) 2017-08-25

Family

ID=47846015

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380024169.4A Active CN104272194B (zh) 2012-03-08 2013-03-08 处理靶材的光刻系统和方法

Country Status (7)

Country Link
US (2) US9760028B2 (enExample)
EP (1) EP2823361B1 (enExample)
JP (1) JP6219320B2 (enExample)
CN (1) CN104272194B (enExample)
NL (1) NL2010415C2 (enExample)
TW (1) TWI573174B (enExample)
WO (1) WO2013132081A2 (enExample)

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EP2699967B1 (en) 2011-04-22 2023-09-13 ASML Netherlands B.V. Position determination in a lithography system using a substrate having a partially reflective position mark
TW201248336A (en) * 2011-04-22 2012-12-01 Mapper Lithography Ip Bv Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
US9383662B2 (en) * 2011-05-13 2016-07-05 Mapper Lithography Ip B.V. Lithography system for processing at least a part of a target
US9484188B2 (en) * 2015-03-11 2016-11-01 Mapper Lithography Ip B.V. Individual beam pattern placement verification in multiple beam lithography
KR101993670B1 (ko) * 2016-03-17 2019-06-27 주식회사 이오테크닉스 촬영 방법 및 촬영 방법을 이용한 대상물 정렬 방법
US9892885B2 (en) * 2016-03-24 2018-02-13 Kla-Tencor Corporation System and method for drift compensation on an electron beam based characterization tool
JP6754002B2 (ja) * 2016-10-04 2020-09-09 エーエスエムエル ネザーランズ ビー．ブイ． アライメントシステムの断熱化
CN109390268B (zh) * 2017-08-10 2023-02-24 台湾积体电路制造股份有限公司 具有微粒凹口的夹盘的晶圆台、处理工具与使用晶圆台的方法
US10585360B2 (en) * 2017-08-25 2020-03-10 Applied Materials, Inc. Exposure system alignment and calibration method
US11740564B2 (en) * 2020-06-18 2023-08-29 Taiwan Semiconductor Manufacturing Company, Ltd. Lithography apparatus and method using the same
CN112606209B (zh) * 2020-09-07 2022-04-22 厦门天润锦龙建材有限公司 对准防泄漏系统
JP7502836B2 (ja) 2021-01-29 2024-06-19 ピンク ゲーエムベーハー テルモジステーメ 電子アセンブリを接続するシステムおよび方法
WO2022233523A1 (en) * 2021-05-04 2022-11-10 Asml Netherlands B.V. Metrology apparatus and lithographic apparatus
US20230010284A1 (en) * 2021-07-07 2023-01-12 Changxin Memory Technologies, Inc. Measurement apparatus, measurement compensation system, measurement method and measurement compensation method
CN115597510A (zh) * 2021-07-07 2023-01-13 长鑫存储技术有限公司（Cn） 量测装置、量测补偿系统、量测方法及量测补偿方法
EP4310885A1 (en) * 2022-07-21 2024-01-24 ASML Netherlands B.V. Electron-optical apparatus and method of obtaining topographical information about a sample surface
CN116466551A (zh) * 2023-04-17 2023-07-21 合肥芯碁微电子装备股份有限公司 背面对准装置及其方法和曝光设备

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Also Published As

Publication number Publication date
WO2013132081A4 (en) 2014-02-20
USRE49241E1 (en) 2022-10-11
US20150109598A1 (en) 2015-04-23
JP2015513219A (ja) 2015-04-30
NL2010415C2 (en) 2013-12-31
US9760028B2 (en) 2017-09-12
TW201346984A (zh) 2013-11-16
WO2013132081A3 (en) 2013-12-19
EP2823361B1 (en) 2022-03-02
NL2010415A (en) 2013-09-10
WO2013132081A2 (en) 2013-09-12
TWI573174B (zh) 2017-03-01
EP2823361A2 (en) 2015-01-14
JP6219320B2 (ja) 2017-10-25
CN104272194A (zh) 2015-01-07

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Effective date of registration: 20190505

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Patentee before: Mapper Lithography IP B. V.