CN104272069B - 分光传感器 - Google Patents

分光传感器 Download PDF

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Publication number
CN104272069B
CN104272069B CN201380023041.6A CN201380023041A CN104272069B CN 104272069 B CN104272069 B CN 104272069B CN 201380023041 A CN201380023041 A CN 201380023041A CN 104272069 B CN104272069 B CN 104272069B
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CN
China
Prior art keywords
filter
spectroscopic sensor
light receiving
receiving surface
filter region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380023041.6A
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English (en)
Chinese (zh)
Other versions
CN104272069A (zh
Inventor
笠原隆
柴山胜己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of CN104272069A publication Critical patent/CN104272069A/zh
Application granted granted Critical
Publication of CN104272069B publication Critical patent/CN104272069B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0213—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using attenuators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1234—Continuously variable IF [CVIF]; Wedge type

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
CN201380023041.6A 2012-05-18 2013-05-08 分光传感器 Active CN104272069B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012114336A JP5875936B2 (ja) 2012-05-18 2012-05-18 分光センサ
JP2012-114336 2012-05-18
PCT/JP2013/062953 WO2013172234A1 (ja) 2012-05-18 2013-05-08 分光センサ

Publications (2)

Publication Number Publication Date
CN104272069A CN104272069A (zh) 2015-01-07
CN104272069B true CN104272069B (zh) 2016-04-06

Family

ID=49583641

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380023041.6A Active CN104272069B (zh) 2012-05-18 2013-05-08 分光传感器

Country Status (5)

Country Link
US (1) US9671286B2 (https=)
JP (1) JP5875936B2 (https=)
CN (1) CN104272069B (https=)
DE (1) DE112013002560B4 (https=)
WO (1) WO2013172234A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013104968B4 (de) * 2013-05-14 2020-12-31 ams Sensors Germany GmbH Sensoranordnung mit einem siliziumbasierten optischen Sensor und einem Substrat für funktionelle Schichtsysteme
JP6290594B2 (ja) 2013-10-31 2018-03-07 浜松ホトニクス株式会社 光検出装置
JP6390117B2 (ja) * 2014-02-26 2018-09-19 セイコーエプソン株式会社 光学モジュール、及び電子機器
JP6671860B2 (ja) * 2015-04-28 2020-03-25 浜松ホトニクス株式会社 光検出装置
EP4467942A3 (en) * 2015-10-02 2025-01-22 Hamamatsu Photonics K.K. Light detection device
JP7039160B2 (ja) 2016-03-09 2022-03-22 浜松ホトニクス株式会社 光検出装置
FR3116899B1 (fr) 2020-11-30 2023-07-21 Silios Tech Imageur multispectral à domaine spectral élargi.
CN119096192A (zh) * 2021-09-03 2024-12-06 国立大学法人东北大学 具有分光功能的摄像元件及其制造方法、以及具备其的产品、像素化滤光器阵列的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1518660A (zh) * 2002-04-23 2004-08-04 ǰ����� 小型封装分光传感器组件
US20050013000A1 (en) * 2003-07-17 2005-01-20 Noboru Uehara Optical element, optical drop module, optical add-drop module, and tunable light source
CN101622517A (zh) * 2007-03-01 2010-01-06 皇家飞利浦电子股份有限公司 光检测器装置

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4054389A (en) * 1976-09-23 1977-10-18 International Business Machines Corporation Spectrophotometer with photodiode array
JPS57151830A (en) 1981-03-13 1982-09-20 Union Giken:Kk Spectrophotometer
JPS58195127A (ja) * 1982-05-10 1983-11-14 Japan Spectroscopic Co マルチチヤネル検知器及びマルチチヤネル分光測定装置
JPS5972861A (ja) 1982-10-19 1984-04-24 Canon Inc 画像読取り装置
JPS62170647U (https=) * 1986-04-17 1987-10-29
JPH0814509B2 (ja) 1986-05-15 1996-02-14 ミノルタ株式会社 分光測定センサ
JPS6435325A (en) 1987-07-31 1989-02-06 Shimadzu Corp Spectral sensor
US4957371A (en) 1987-12-11 1990-09-18 Santa Barbara Research Center Wedge-filter spectrometer
US5144498A (en) 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
JPH076839B2 (ja) 1991-03-29 1995-01-30 株式会社島津製作所 分光光度計
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JP3375147B2 (ja) * 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JPH06120462A (ja) * 1992-10-01 1994-04-28 Matsushita Electron Corp 固体撮像装置
JP2713838B2 (ja) 1992-10-15 1998-02-16 浜松ホトニクス株式会社 分光イメージングセンサ
JPH1078353A (ja) 1996-09-02 1998-03-24 Yokogawa Electric Corp 分光装置および分光装置のダイクロイックミラーアレイの製造方法
US6785002B2 (en) 2001-03-16 2004-08-31 Optical Coating Laboratory, Inc. Variable filter-based optical spectrometer
US7015457B2 (en) 2002-03-18 2006-03-21 Honeywell International Inc. Spectrally tunable detector
WO2006130164A2 (en) 2004-08-19 2006-12-07 University Of Pittsburgh Chip-scale optical spectrum analyzers with enhanced resolution
US7310153B2 (en) 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
JP2006284474A (ja) * 2005-04-04 2006-10-19 Nikon Corp フォトセンサ
CN1888833A (zh) 2005-06-30 2007-01-03 天津麦索特科技发展有限公司 全光谱、双cmos线性成像传感器检测装置及其检测方法
US7386199B2 (en) 2005-12-22 2008-06-10 Palo Alto Research Center Incorporated Providing light to channels or portions
US8437582B2 (en) 2005-12-22 2013-05-07 Palo Alto Research Center Incorporated Transmitting light with lateral variation
US7718948B2 (en) 2006-12-04 2010-05-18 Palo Alto Research Center Incorporated Monitoring light pulses
US7852490B2 (en) 2007-02-05 2010-12-14 Palo Alto Research Center Incorporated Implanting optical cavity structures
JP5230952B2 (ja) * 2007-02-13 2013-07-10 オリンパス株式会社 内視鏡用可変分光素子、分光装置および内視鏡システム
JP2008232843A (ja) 2007-03-20 2008-10-02 Casio Comput Co Ltd 分光強度測定素子
EP2132542A4 (en) 2007-04-03 2014-01-08 Mutoh Ind Ltd Spectrophotometer and corresponding method
JP5074291B2 (ja) 2008-05-15 2012-11-14 浜松ホトニクス株式会社 分光モジュール
JP5207938B2 (ja) 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP2011169943A (ja) 2010-02-16 2011-09-01 Seiko Epson Corp 波長可変干渉フィルター、光センサーおよび分析機器
JP5998426B2 (ja) 2010-03-05 2016-09-28 セイコーエプソン株式会社 光学センサー及び電子機器
JP5609542B2 (ja) 2010-10-28 2014-10-22 セイコーエプソン株式会社 光測定装置
JP5641220B2 (ja) 2010-11-12 2014-12-17 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、及び光分析装置
JP5707107B2 (ja) 2010-11-22 2015-04-22 浜松ホトニクス株式会社 分光センサ
JP5634836B2 (ja) 2010-11-22 2014-12-03 浜松ホトニクス株式会社 分光センサの製造方法
WO2013084746A1 (ja) * 2011-12-06 2013-06-13 コニカミノルタ株式会社 光半導体パッケージ、マイケルソン干渉計、およびフーリエ変換分光分析装置
JP5926610B2 (ja) 2012-05-18 2016-05-25 浜松ホトニクス株式会社 分光センサ
JP6119325B2 (ja) 2013-03-14 2017-04-26 セイコーエプソン株式会社 干渉フィルター、干渉フィルターの製造方法、光学モジュール、電子機器、及び接合基板
JP6390090B2 (ja) 2013-11-19 2018-09-19 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1518660A (zh) * 2002-04-23 2004-08-04 ǰ����� 小型封装分光传感器组件
US20050013000A1 (en) * 2003-07-17 2005-01-20 Noboru Uehara Optical element, optical drop module, optical add-drop module, and tunable light source
CN101622517A (zh) * 2007-03-01 2010-01-06 皇家飞利浦电子股份有限公司 光检测器装置

Also Published As

Publication number Publication date
JP5875936B2 (ja) 2016-03-02
WO2013172234A1 (ja) 2013-11-21
US9671286B2 (en) 2017-06-06
DE112013002560B4 (de) 2023-01-05
US20150138560A1 (en) 2015-05-21
DE112013002560T5 (de) 2015-02-05
CN104272069A (zh) 2015-01-07
JP2013242177A (ja) 2013-12-05

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