CN104264229B - A kind of online doper of single crystal growing furnace - Google Patents
A kind of online doper of single crystal growing furnace Download PDFInfo
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- CN104264229B CN104264229B CN201410526990.2A CN201410526990A CN104264229B CN 104264229 B CN104264229 B CN 104264229B CN 201410526990 A CN201410526990 A CN 201410526990A CN 104264229 B CN104264229 B CN 104264229B
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Abstract
The present invention relates to crystal growth is added dopant material field, be specifically related to a kind of online doper of single crystal growing furnace.Prior art produces poor effect of adulterating present in monocrystal silicon process, doping poor process control and the problem that cannot realize doping in real time in drawing process in vertical pulling method, the present invention propose a kind of based on machine, the online doper of single crystal growing furnace of electric-mechanic control system, add the time of contact of doped chemical and molten silicon, during achieving doping, and doping in real time, important technological parameters is controlled.The present invention designs concision and compact, it is easy to implementing, energy consumption cost is relatively low, it is adaptable to multiple crystal doping process field, has wide application and promotion prospect.
Description
Technical field
The present invention relates to crystal growth is added dopant material field, be specifically related to a kind of online doper of single crystal growing furnace.
Background technology
The doping method that vertical pulling method produces used by volatile doped chemical monocrystal silicon mainly includes eutectic method and throw-in play.Eutectic method is that dopant is placed on together with polysilicon fusing in silica crucible.Throw-in play be polysilicon is completely melt in silica crucible after, dopant is fused in silicon by special device, with reach doping purpose.According to the property difference of doped chemical in reality is adulterated, doping is divided into gas phase doping and liquid phase doping.Such as, during the element such as arsenic doped, phosphorus, owing to the element gasification such as arsenic, phosphorus point is low, readily volatilized, generally use the mode of gas phase doping to carry out.The doper that gas phase doping is used at present is mainly bell-jar structure, at one container being loaded with doped chemical of bell jar hangs inside, doping clock mask declines and close to molten silicon, relies on the radiant heat of molten silicon doped chemical to be gasified, and the doped chemical after gasification contacts with molten silicon face in bell jar.When using apparatus above to carry out gas phase doping, owing to not contacting with molten silicon bottom bell jar, most of doped chemical steam after gasification will be taken away by vacuum pump by gap with fusion silicon liquid level bottom bell jar, has had a strong impact on doping effect and product quality, and the controllability of doping process is relatively low.For avoiding the loss of doped chemical, the bottom of doper is designed in dropper pattern the molten silicon of insertion be doped by prior art, but after terminating due to doping, dropper sky cavity pressure strongly reduces, molten silicon is entered in dropper and doper by suck-back, easily occurs molten silicon solidification to be split up the situation of doper.Additionally, bell-jar hangs doper and can only be doped before pulling monocrystal, pulling process cannot be carried out doping, the high temperature subnormal ambient caused along with the stretching of single crystal growing furnace endogenous cause of ill constantly strengthens, the gas phase doping material being dissolved in molten silicon is easy to volatilization, and dopant constantly reduces causes doping cannot be carried out.
In sum, prior art produces poor effect of adulterating present in monocrystal silicon process, doping poor process control in vertical pulling method and cannot realize the problems such as real-time doping in drawing process.
Summary of the invention
For poor effect of adulterating in prior art, doping poor process control and the deficiency that cannot adulterate the most in real time, the invention provides a kind of online doper of easy and simple to handle, safe and reliable single crystal growing furnace, add the time of contact of doped chemical and molten silicon, achieve doping in real time, it is applicable to vertical pulling method tensile, monocrystaline silicon, provides reliable technical support for the manufacturing technology and service behaviour improving solar-energy photo-voltaic cell.
For solving above technical problem, the technical scheme is that
A kind of online doper of single crystal growing furnace, including feed bin mechanism, conveying mechanism and controlling organization.Feed bin mechanism is connected with conveying mechanism, and controlling organization is connected with feed bin mechanism and conveying mechanism and controls the work of feed bin mechanism and conveying mechanism.Conveying mechanism is arranged on single crystal growing furnace bell and connects by the installation bore on single crystal growing furnace and single crystal growing furnace are internal.
Concrete, feed bin mechanism includes the feed bin shell of hollow, feed bin door, feed bin sealing mechanism, feed bin, U-shaped discharge nozzle, material-collecting funnel, feed bin motor and blanking deceleration tube.Feed bin enclosure is provided with freely rotatable feed bin and the U-shaped discharge nozzle connected with feed bin, and the bottom of feed bin shell is provided with material-collecting funnel, and material-collecting funnel bottom is connected with blanking deceleration tube.Feed bin door is connected with feed bin shell and can free-open-close.Being provided with feed bin sealing mechanism on feed bin shell, feed bin sealing mechanism is suitable with feed bin door.Feed bin motor is arranged on feed bin shell and drives feed bin to rotate.
Concrete, conveying mechanism includes conveying mechanism shell, is provided with the quartzy conveying pipeline of venthole, check-valves, hoist engine and conveying reductor.The top of conveying mechanism shell is provided with hoist engine and the conveying reductor being connected with hoist engine and motor, and the sidewall of conveying mechanism shell is provided with the opening for installing blanking deceleration tube.The rustless steel rope of hoist engine is connected with quartz conveying pipeline, and quartz conveying pipeline is provided with check-valves.Conveying reductor is arranged on conveying mechanism shell and drives hoist engine to rotate.
Concrete, controlling organization includes display screen, signal input apparatus, switching device and control module.Electric energy is loaded on control module, display screen and signal input apparatus by switching device, and signal input apparatus and control module are connected with display screen respectively；Input signal is by signal input apparatus transmission to control module, and control module response input signal also sends control signal, and feed bin motor and conveying reductor receive and perform control signal.
Concrete, the venthole of quartz conveying pipeline is arranged on the sidewall of its underpart.
Concrete, conveying mechanism also includes conveying track and the slide block matched with conveying track.Conveying track is arranged on the inside of conveying mechanism shell and is connected with conveying mechanism shell.Slide block is connected between quartz conveying pipeline and hoist engine.
Concrete, conveying mechanism is provided with terminal/zero point spacing on conveying track.
Concrete, feed bin mechanism is provided with argon inflation inlet, and argon inflation inlet is arranged on feed bin shell or feed bin door.
Concrete, feed bin mechanism is provided with observation window, and observation window is arranged on feed bin shell or feed bin door.
Beneficial effects of the present invention: 1, the online doper of single crystal growing furnace disclosed by the invention does not interfere with each other with the work of single crystal growing furnace independent of single crystal growing furnace, its work, it is possible to add dopant while single crystal growing furnace works in real time in stove；2, the dopant in the rotation of feed bin driven by motor feed bin makes feed bin enters quartz conveying pipeline by U-shaped discharge nozzle and material-collecting funnel, it is doped in the molten silicon of single crystal growing furnace by the venthole on quartz conveying pipeline, i.e. achieve the control to dopant interpolation frequency by controlling feed bin motor, improve the management and control to doping process；3, conveying reductor drives and rotates with the quartz hoist engine that is connected of conveying pipeline, achieves by controlling conveying reductor dopant joins the degree of depth that single crystal growing furnace melts in silicon and dopant and the control of molten silicon time of contact, improve the management and control to the process of doping；4, quartz conveying pipeline can carry dopant to any distance above single crystal growing furnace fusion silicon liquid level, it is possible to ensures being fully contacted and time of contact of dopant and molten silicon, and then improves doping work quality, it is thus achieved that effect of preferably adulterating；5, the online doper of this single crystal growing furnace is closed structure, non-impurity-doped material damage, is conducive to improving doping effect；6, check-valves avoids high temperature melting silicon suck-back and enters in doper, and suppresses the precipitation of doped chemical in molten silicon, beneficially protection equipment and improve doping effect；7, the argon inflation inlet in feed bin mechanism ensure that being smoothed out of single crystal growing furnace evacuation and applying argon gas technique, and single crystal growing furnace evacuation and applying argon gas are protection dopant and the important process means of the equipment of production；8, conveying track and slide block are the elevating movement offer support of quartz conveying pipeline, make the motion more steady and smooth of quartz conveying pipeline, beneficially protection device and improve effect of adulterating；9, the venthole on quartz conveying pipeline lower sides enters the passage of molten silicon after being dopant gasification, it is to avoid dopant falls directly in single crystal growing furnace, advantageously ensures that doping quality；10, observation window allows the operator to observe doping progress at any time, and beneficially operator take measures in time for abnormal conditions.The present invention propose a kind of based on machine, the online doper of single crystal growing furnace of electric-mechanic control system, this special equipment solves vertical pulling method in solar-energy photo-voltaic cell manufacturing process and produces manufacturing technology and the raising of product quality of the doping problem of monocrystal silicon, beneficially solar-energy photo-voltaic cell industry.The present invention designs concision and compact, it is easy to implement, and builds, safeguards and energy consumption cost is relatively low, and whole-course automation is run, it is adaptable to multiple crystal doping process field, has wide application and promotion prospect.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of feed bin mechanism of the present invention.
Wherein, 1 feed bin shell, 2 feed bin doors, 3 feed bin sealing mechanisms, 4 feed bins, 5 feed bin motors, 6 U-shaped discharge nozzles, 7 material-collecting funnels, 8 argon inflation inlets, 9 quartz conveying pipelines, 10 check-valves, 11 conveying tracks, 12 slide blocks, 13 blanking deceleration tubes, 14 conveying mechanism shells, 15 terminals/zero point is spacing, 16 conveying reductors, 17 hoist engines, 18 observation windows, 19 single crystal growing furnace bells, 20 single crystal growing furnaces.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings.
With reference to Fig. 1 ~ 2, the composition of embodiment includes that interconnective feed bin mechanism, conveying mechanism and controlling organization, feed bin mechanism and conveying mechanism perform doping operation according to the instruction of controlling organization.
Wherein, feed bin mechanism includes feed bin shell 1, feed bin door 2, feed bin sealing mechanism 3, feed bin 4, feed bin motor 5, U-shaped discharge nozzle 6, material-collecting funnel 7, argon inflation inlet 8, blanking deceleration tube 13 and observation window 18.Feed bin shell 1 is internally provided with feed bin 4 and the U-shaped discharge nozzle 6 that connects with feed bin 4 that can be freely rotatable, and the bottom of feed bin shell 1 is provided with material-collecting funnel 7, and material-collecting funnel 7 bottom is connected with blanking deceleration tube 13.Feed bin door 2 be connected with feed bin shell 1 and can free-open-close, feed bin sealing mechanism 3 is seal silo shell 1 and feed bin door 2 when feed bin door 2 closes, and wherein storehouse sealing mechanism 3 is sealing strip.Feed bin motor 5 is arranged on feed bin shell 1 and drives feed bin 4 to rotate.Argon inflation inlet 8 is arranged on the top of feed bin shell 1.Observation window 18 is arranged on feed bin door 2.
Conveying mechanism includes conveying mechanism shell 14, quartz conveying pipeline 9, check-valves 10, hoist engine 17, conveying reductor 16, conveying track 11, slide block 12 and terminal/zero point spacing 15.The top of conveying mechanism shell 1 is provided with hoist engine 17, conveying mechanism shell 1 be internally provided with conveying track 11 and with conveying track 11 with the use of slide block 12, the sidewall of conveying mechanism shell 1 is provided with the opening for installing blanking deceleration tube 13.Terminal/zero point spacing 15 it is provided with on conveying track 11.The rustless steel rope of hoist engine 17 is connected with quartz conveying pipeline 9 by slide block 12.The top of quartz conveying pipeline 9 is provided with check-valves 10, and the sidewall of quartz conveying pipeline 9 bottom is provided with venthole.Conveying reductor 16 is arranged on conveying mechanism shell 1 and drives hoist engine 17 to rotate.
Controlling organization includes display screen, signal input apparatus, the switching device being provided with emergency stop switch and control module.Electric energy is loaded on control module, display screen and signal input apparatus by switching device, and signal input apparatus and control module are connected with display screen respectively；Input signal is by signal input apparatus transmission to control module, and control module response input signal also sends control signal, and feed bin motor 5 and conveying reductor 16 receive and perform control signal.Wherein, signal input apparatus is keyboard, and control module is PCL or single-chip microcomputer.It addition, the Function Integration Mechanism of display screen Yu signal input apparatus i.e. can be used touch screen to realize display and signal inputs function when being embodied as.
The doping process of the present embodiment is:
1, dopant is joined in feed bin 4, close feed bin door 2, start feed bin sealing mechanism 3；
2, activate switch device, connects working power for display screen, signal input apparatus, control module, feed bin motor 5 with conveying reductor 16, sets doping process parameter by signal input apparatus, including charging frequency and the feeding degree of depth；
3, conveying reductor 16 starts and drives the feeding degree of depth that winding plant 17 sets according to step 2 quartz conveying pipeline 9 is delivered to appointment position, carries reductor 16 and closes；
4, feed bin motor 5 starts and drives feed bin 4 to throw in dopant to quartz conveying pipeline 9 according to the charging frequency that step 2 sets；
5, the dopant in quartz conveying pipeline 9 is doped after being gasified by single crystal growing furnace heat radiation in the venthole of quartz conveying pipeline 9 enters single crystal growing furnace；
6, monocrystal silicon stretching after feed bin motor 5 close, conveying reductor 16 start and rotate backward, by drive winding plant 17 quartz conveying pipeline 9 is gone up to terminal/zero point spacing 15 at, power cut-off.
Put into the granule that the dopant in feed bin 4 is diameter 2 ~ 5mm, and the dopant inventory every time adulterated is it suffices that the needs of a monocrystal silicon stretching.In the present embodiment, the capacity of feed bin 4 is more than or equal to the volume of the dopant needed for a monocrystal silicon stretching.In the present embodiment, feed bin 4 often rotates one week, and dopant is by being positioned at feed bin 4 and connecting the U-shaped discharge nozzle 6 of feed bin 4 and feed bin shell 1 and burst out.Feed bin 4 is driven rotation by feed bin motor 5, i.e. achieves the management and control to charging frequency by controlling feed bin motor 5.The i.e. feeding degree of depth of the degree of depth that quartz conveying pipeline extends in single crystal growing furnace 20 for 9 times.Charging frequency and the feeding degree of depth all can set before doping, improve the management and control ability for doping process, are conducive to improving doping effect.In the present embodiment, doper and single crystal growing furnace constitute totally enclosed structure, constantly in doper and single crystal growing furnace, it is filled with argon by argon inflation inlet 8 during doping, due to check-valves 10 and the effect of argon, the dopant of gasification can only be entered in single crystal growing furnace by the venthole of quartz conveying pipeline 9.Operator monitor doping process by observation window 18, and such as fault, the emergency stop switch starting controlling organization breaker in middle device carries out emergency shutdown, equipment can be protected to run safety, it is to avoid produce waste.
In sum, the molten silicon in single crystal growing furnace can be implemented doping by the present embodiment incessantly, it is achieved that the online doping in real time of monocrystal silicon stretching, improves doping quality, and the main technologic parameters adulterated is controlled, enhance the management and control to doping process.
The above embodiment is only the preferred embodiments of the present invention, and and the feasible enforcement of non-invention exhaustive.For persons skilled in the art, any obvious change done to it on the premise of without departing substantially from the principle of the invention and spirit, within all should being contemplated as falling with the claims of the present invention.
Claims (6)
1. the online doper of single crystal growing furnace, it is characterised in that it includes feed bin mechanism, conveying mechanism and controlling organization；Described feed bin mechanism is connected with conveying mechanism, and described controlling organization is connected with feed bin mechanism and conveying mechanism and controls the work of feed bin mechanism and conveying mechanism；Described conveying mechanism is arranged on single crystal growing furnace bell (19) and above and connects by the installation bore on single crystal growing furnace bell (19) and single crystal growing furnace (20) are internal；
Described feed bin mechanism includes the feed bin shell (1) of hollow, feed bin door (2), feed bin sealing mechanism (3), feed bin (4), U-shaped discharge nozzle (6), material-collecting funnel (7), feed bin motor (5) and blanking deceleration tube (13)；Described feed bin shell (1) is internally provided with feed bin (4) and the U-shaped discharge nozzle (6) that connects with feed bin (4) that can be freely rotatable, and the bottom of described feed bin shell (1) is provided with the material-collecting funnel (7) being connected with blanking deceleration tube (13)；Described feed bin door (2) is connected with feed bin shell (1) and can free-open-close；Being provided with feed bin sealing mechanism (3) on described feed bin shell (1), described feed bin sealing mechanism (3) is suitable with feed bin door (2)；Described feed bin motor (5) is arranged on feed bin shell (1) and above and drives feed bin (4) to rotate；
Described conveying mechanism includes conveying mechanism shell (14), the quartzy conveying pipeline (9) being provided with venthole, the check-valves (10), hoist engine (17) and the conveying reductor (16) being connected with hoist engine (17) that are arranged on quartz conveying pipeline (9) and motor；The top of described conveying mechanism shell (14) is provided with hoist engine (17), and the sidewall of described conveying mechanism shell (14) is provided with the opening for installing blanking deceleration tube (13)；Described hoist engine (17) is connected with quartz conveying pipeline (9)；Described conveying reductor (16) is arranged on conveying mechanism shell (14) and above and drives hoist engine (17) to rotate；
Described controlling organization includes display screen, signal input apparatus, switching device and control module, electric energy is loaded on control module, display screen and signal input apparatus by described switching device, described signal input apparatus and control module are connected with display screen respectively, input signal is by signal input apparatus transmission to control module, described control module response input signal also sends control signal, and described feed bin motor and conveying reductor receive and perform control signal.
A kind of online doper of single crystal growing furnace the most according to claim 1, it is characterised in that the venthole of described quartz conveying pipeline (9) is arranged on the sidewall of its underpart.
A kind of online doper of single crystal growing furnace the most according to claim 2, it is characterized in that described conveying mechanism also includes conveying track (11) and the slide block (12) matched with conveying track (11), described conveying track (11) is arranged on the inside of conveying mechanism shell (14) and is connected with conveying mechanism shell (14), and described slide block (12) is connected between quartz conveying pipeline (9) and hoist engine (17).
A kind of online doper of single crystal growing furnace the most according to claim 3, it is characterised in that described conveying mechanism also includes that terminal/zero point spacing (15), described terminal/zero point spacing (15) are positioned on conveying track (11).
A kind of online doper of single crystal growing furnace the most according to claim 4, it is characterised in that described feed bin mechanism is provided with argon inflation inlet (8), and described argon inflation inlet (8) is arranged on feed bin shell (1).
A kind of online doper of single crystal growing furnace the most according to claim 5, it is characterised in that described feed bin mechanism is provided with observation window (18), and described observation window (18) is arranged on feed bin door (2).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105951172A (en) * | 2016-05-30 | 2016-09-21 | 上海超硅半导体有限公司 | Manufacturing method of N type/P type monocrystalline silicon crystal ingot |
| CN109306515B (en) * | 2017-07-27 | 2021-06-08 | 隆基绿能科技股份有限公司 | Material feeding device and crystal growth system |
| CN109183140B (en) * | 2018-11-16 | 2023-11-03 | 江苏协鑫硅材料科技发展有限公司 | Single crystal furnace and continuous feeding device thereof |
| CN116949554B (en) * | 2023-09-05 | 2023-11-21 | 鄂尔多斯市中成榆能源有限公司 | Production method and production system of Czochralski silicon |
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| DE3737051A1 (en) * | 1987-10-31 | 1989-05-11 | Leybold Ag | DEVICE FOR THE CONTINUOUS FEED OF MELT |
| JPH03252386A (en) * | 1990-03-02 | 1991-11-11 | Nkk Corp | Device for producing single crystal |
| DE4106589C2 (en) * | 1991-03-01 | 1997-04-24 | Wacker Siltronic Halbleitermat | Continuous recharge with liquid silicon during crucible pulling according to Czochralski |
| JPH06100394A (en) * | 1992-09-17 | 1994-04-12 | Nkk Corp | Method for feeding raw material for producing single crystal and apparatus therefor |
| CN1153230A (en) * | 1995-10-31 | 1997-07-02 | Memc电子材料有限公司 | Solid material delivery system for furnace |
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| JPH09255470A (en) * | 1996-03-22 | 1997-09-30 | Sumitomo Sitix Corp | Supply of raw material for single crystal |
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| JP2003002779A (en) * | 2001-06-20 | 2003-01-08 | Komatsu Electronic Metals Co Ltd | Raw material feeding device for single crystal pulling vessel and method for feeding raw material |
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| CN202297856U (en) * | 2011-09-19 | 2012-07-04 | 浙江思博恩新材料科技有限公司 | Single crystal furnace and charging device thereof |
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
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