CN202387534U - Polysilicon rod crushing device - Google Patents
Polysilicon rod crushing device Download PDFInfo
- Publication number
- CN202387534U CN202387534U CN2011205159158U CN201120515915U CN202387534U CN 202387534 U CN202387534 U CN 202387534U CN 2011205159158 U CN2011205159158 U CN 2011205159158U CN 201120515915 U CN201120515915 U CN 201120515915U CN 202387534 U CN202387534 U CN 202387534U
- Authority
- CN
- China
- Prior art keywords
- polycrystalline silicon
- silicon rod
- cooling chamber
- disintegrating apparatus
- heating clamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Abstract
The utility model discloses a polysilicon rod crushing device, which comprises a heating chamber and a cooling chamber, wherein the heating chamber uses microwave as a heat source and can be used for heating polysilicon rods, and the cooling chamber is connected with the heating chamber and used for quickly cooling the heated polysilicon rods. By the aid of the technical scheme, firstly, the polysilicon rods are heated by the heating chamber using the microwave as the heat source, and secondly, the heated polysilicon rods are conveyed into the cooling chamber and cooled quickly, so that the polysilicon rods acquire an instant intergranular stress and are instantly crushed, and massive fragments and micro-powder are avoided. Therefore, compared with the prior art, the polysilicon rod crushing device solves the problem that an existing mechanical crushing mode causes impurity stain, reduces yield and further pollutes the environment, and potential safety hazards in production are reduced.
Description
Technical field
The utility model relates to the polycrystalline silicon material processing technique field, more particularly, and particularly a kind of polycrystalline silicon rod disintegrating apparatus.
Background technology
Polysilicon is the base stock of photovoltaic industry and half artificial delivery industry, has obtained the high speed development of blowout formula in recent years at home.The polycrystalline silicon rod that production obtains in reduction furnace need be broken into the necessary block raw material of monocrystalline silicon production and pack storage, so the fragmentation of polycrystalline silicon rod is an important step of polysilicon factory post processing.
Present domestic breaking polycrystalline silicon mode generally adopts the Mechanical Crushing method, yet the Mechanical Crushing method is very easily brought metal ion pollution to polycrystalline silicon rod.Very easily produce a large amount of chips and micro mist in the shattering process simultaneously, reduce yield.Further, fine debris and micro mist form dust, contaminated environment.And diameter is at the dust below 150 microns, is distributed in the air inflammable and explosively, and production security reduces.
The utility model content
In view of this, the utility model provides a kind of polycrystalline silicon rod disintegrating apparatus, and the impurity that the existing machinery crumbling method causes is stained, yield reduces to solve, further contaminated environment and reduce the problem of production security.
The utility model provides a kind of polycrystalline silicon rod disintegrating apparatus, comprising:
Adopt microwave as thermal source, the heating clamber that polycrystalline silicon rod is heated;
Link to each other with said heating clamber, be used for the cooling chamber that the polycrystalline silicon rod after the heating is cooled off fast.
Preferably, be provided with inner gate mechanism between said heating clamber and the said cooling chamber.
Preferably, be provided with the coniform breakup pick of processing by quartz bottom the said cooling chamber.
Preferably, also comprise: be used for said polycrystalline silicon rod is placed into said heating clamber, and the polycrystalline silicon rod after will heating is sent to the feed mechanism of said cooling chamber.
Preferably, said feed mechanism is provided with a fork.
Preferably, be provided with the material elevator structure bottom the said heating clamber.
Preferably, be provided with infrared radiation thermometer in the said heating clamber.
Preferably, said heating clamber is provided with and adopts the microwave source of microwave as thermal source, and the inner bag of said heating clamber is processed by quartz, and said inner bag is added with heat-insulation layer outward.
Preferably, be provided with high pressure refrigeration nozzle in the said cooling chamber.
Preferably, said cooling chamber side is provided with door, and said cooling chamber is provided with high-pressure refrigerant inlet and high-pressure refrigerant outlet.
Use technique scheme, at first heating clamber adopts microwave as thermal source, and polycrystalline silicon rod is heated; Secondly; Polycrystalline silicon rod after the heating is delivered to cooling chamber cool off fast, thereby the intergranular stress that makes polycrystalline silicon rod obtain a moment makes self moment fragmentation, avoids producing a large amount of chips and micro mist.Therefore, compared with prior art, the present technique scheme solved that the impurity that the existing machinery crumbling method causes is stained, yield reduces, further contaminated environment and reduce production security hidden danger.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously explain that the accompanying drawing in describing below only is some embodiment that put down in writing in the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
A kind of structural representation of the polycrystalline silicon rod disintegrating apparatus that Fig. 1 provides for the utility model embodiment;
The another kind of structural representation of the polycrystalline silicon rod disintegrating apparatus that Fig. 2 provides for the utility model embodiment;
Another structural representation of the polycrystalline silicon rod disintegrating apparatus that Fig. 3 provides for the utility model embodiment;
Another structural representation of the polycrystalline silicon rod disintegrating apparatus that Fig. 4 provides for the utility model embodiment.
The specific embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the protection domain of the utility model.
See also Fig. 1, a kind of structural representation that it shows the polycrystalline silicon rod disintegrating apparatus that the utility model embodiment provides can comprise: heating clamber 1 and cooling chamber 2.
Wherein, heating clamber 1 adopts microwave as thermal source, and polycrystalline silicon rod is heated in 400 ℃ to the 1100 ℃ scopes.Cooling chamber 2 links to each other with heating clamber 1, and the polycrystalline silicon rod after the heating is sent in the cooling chamber 2, makes the polycrystalline silicon rod cooling fast in cooling chamber 2 after the heating, thereby the intergranular stress that makes polycrystalline silicon rod obtain a moment makes self broken moment.
Be provided with inner gate mechanism 3 between above-mentioned heating clamber 1 and the cooling chamber 2, as shown in Figure 1.Inner gate mechanism 3 separates heating clamber 1 and cooling chamber 2.Cooling chamber 2 bottoms are provided with coniform breakup pick 4, fall down in the process of cooling chamber 2 at the polycrystal silicon ingot rod, and polycrystalline silicon rod is with freely-movable coniform breakup pick 4 of high-speed impact under the gravity of self quickens, thereby polycrystalline silicon rod was smashed by moment.Coniform breakup pick 4 is made by quartz, can avoid polycrystalline silicon rod not to be contaminated with metals.
In the utility model, the polycrystalline silicon rod disintegrating apparatus also comprises: feeding structure 5, and as shown in Figure 2.Fig. 2 is the another kind of structural representation of the polycrystalline silicon rod disintegrating apparatus that provides of the utility model embodiment.Wherein, feed mechanism 5 adopts chain transmission mode, polycrystalline silicon rod is placed into heating clamber 1, and the polycrystalline silicon rod after will heating is sent in the cooling chamber 2.In addition, feed mechanism 5 is provided with a fork 6, and the polycrystalline silicon rod after heating is opened fork 6 and opened when being admitted to cooling chamber 2, thereby polycrystalline silicon rod moment drops in the cooling chamber 2.Simultaneously, feed mechanism 5 is made by quartz, to guarantee that polycrystalline silicon rod is not contaminated with metals.
Be put in the heating clamber 1 for polycrystalline silicon rod is taken off from feeding structure 5, the polycrystalline silicon rod disintegrating apparatus that the utility model embodiment provides also comprises material elevator structure 7, and is as shown in Figure 3.Wherein, Fig. 3 is another structural representation of the polycrystalline silicon rod disintegrating apparatus that provides of the utility model embodiment.Material elevator structure 7 is arranged on the bottom of heating clamber 1; After feed mechanism 5 is sent to polycrystalline silicon rod in the heating clamber 1; Material elevator structure 7 lifts polycrystalline silicon rod, and feed mechanism 5 turns back to cooling chamber 2, and material elevator structure 7 descends and is placed into polycrystalline silicon rod in the heating clamber 1.The inner gate of inner gate mechanism 3 is closed then, makes whole heating clamber 1 be sealing state.After treating that inner gate is closed, heating clamber 1 vacuumized fill high pure nitrogen simultaneously, make the air in the heating clamber 1 obtain displacement, begin polycrystalline silicon rod is carried out Fast Heating.
In heating clamber 1, also be provided with infrared radiation thermometer 8, as shown in Figure 4.Wherein, Fig. 4 is another structural representation of the polycrystalline silicon rod disintegrating apparatus that provides of the utility model embodiment.Infrared radiation thermometer 8 is used to measure the heating-up temperature in the heating clamber 1.
Above-mentioned heating clamber 1 is provided with and adopts the microwave source 9 of microwave as thermal source, and is as shown in Figure 4.9 pairs of polycrystalline silicon rod Fast Heating of microwave source, polycrystalline silicon rod can well absorb microwave, and therefore under microwave action, polycrystalline silicon rod can quickly heat up to very high-temperature.As shown in Figure 4.The inner bag 10 of heating clamber 1 is processed by quartz, can avoid polycrystalline silicon rod to receive metallic pollution, and inner bag 10 is outer is added with heat-insulation layer, and is as shown in Figure 3.
Be provided with high pressure refrigeration nozzle 11 in the cooling chamber 2; As shown in Figure 4, drop in cooling chamber 2 processes at polycrystalline silicon rod, high pressure refrigeration nozzle 11 begins polycrystalline silicon rod inject high pressure water; Make polycrystalline silicon rod obtain the intergranular stress of a moment, thereby can make polycrystalline silicon rod moment fragmentation.Cooling chamber 2 inwalls are lined with one deck quartz, thereby make polycrystalline silicon rod avoid making it to protect polycrystalline silicon rod not contaminated in shattering process with Metal Contact, have guaranteed the purity of polycrystalline silicon rod, have also removed the pickling process after the fragmentation from.
Also be provided with high-pressure refrigerant inlet 12 and high-pressure refrigerant outlet 13 in the above-mentioned cooling chamber 2, as shown in Figure 4.When adopting liquid refrigerant, high-pressure refrigerant inlet 12 feeds in the cooling chamber 2 as liquid refrigerant inlet and high-pressure refrigerant nozzle 11, and high compacting refrigerant outlet 13 is as the liquid refrigerant loop exit; When adopting gaseous refrigerant, this moment, 12 shutoffs of high-pressure refrigerant inlet had only 11 work of high-pressure refrigerant nozzle, and high compacting refrigerant outlet 13 reclaims mouth as liquid refrigeration.
Also be provided with door 14 in cooling chamber 2 sides, as shown in Figure 2.At shattering process door 14 hermetically closing all the time, after the polycrystalline silicon rod fragmentation, earlier cooling chamber 2 inner refrigerants are taken away, open door 14 then the polycrystalline silicon rod after the fragmentation is taken away.
Use technique scheme; At first heating clamber 1 adopts microwave as thermal source; With the polycrystalline silicon rod heating, secondly, the polycrystalline silicon rod after the heating is delivered to cooling chamber 2 cool off fast; Thereby the intergranular stress that makes polycrystalline silicon rod obtain a moment makes self moment fragmentation, avoids producing a large amount of chips and micro mist.Therefore, compared with prior art, the present technique scheme solved that the impurity that the existing machinery crumbling method causes is stained, yield reduces, further contaminated environment and reduce production safety hidden danger.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can be easy to realize or be easy to use utility model in technical key point.Those skilled in the art come any method that various modification realized of being carried out or the equipment of these case study on implementation are all belonged to this patent utility model content.By a little visible, defined General Principle can be achieved in other case study on implementation of this area under the situation of content purport that does not break away from utility model or scope among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, and any meeting with principle disclosed herein and the consistent method and apparatus of features of novelty will all belong to this patent protection domain.
Claims (10)
1. a polycrystalline silicon rod disintegrating apparatus is characterized in that, comprising:
Adopt microwave as thermal source, the heating clamber that polycrystalline silicon rod is heated;
Link to each other with said heating clamber, be used for the cooling chamber that the polycrystalline silicon rod after the heating is cooled off fast.
2. polycrystalline silicon rod disintegrating apparatus according to claim 1 is characterized in that, is provided with inner gate mechanism between said heating clamber and the said cooling chamber.
3. polycrystalline silicon rod disintegrating apparatus according to claim 1 is characterized in that, said cooling chamber bottom is provided with the coniform breakup pick of being processed by quartz.
4. polycrystalline silicon rod disintegrating apparatus according to claim 1 is characterized in that, also comprises: be used for said polycrystalline silicon rod is placed into said heating clamber, and the polycrystalline silicon rod after will heating is sent to the feed mechanism of said cooling chamber.
5. polycrystalline silicon rod disintegrating apparatus according to claim 4 is characterized in that said feed mechanism is provided with a fork.
6. polycrystalline silicon rod disintegrating apparatus according to claim 4 is characterized in that, said heating clamber bottom is provided with the material elevator structure.
7. polycrystalline silicon rod disintegrating apparatus according to claim 1 is characterized in that, is provided with infrared radiation thermometer in the said heating clamber.
8. according to any described polycrystalline silicon rod disintegrating apparatus of claim 1-7, it is characterized in that said heating clamber is provided with and adopts the microwave source of microwave as thermal source, the inner bag of said heating clamber is processed by quartz, and said inner bag is added with heat-insulation layer outward.
9. according to any described polycrystalline silicon rod disintegrating apparatus of claim 1-7, it is characterized in that, be provided with high pressure refrigeration nozzle in the said cooling chamber.
10. polycrystalline silicon rod disintegrating apparatus according to claim 9 is characterized in that, said cooling chamber side is provided with door, and said cooling chamber is provided with high-pressure refrigerant inlet and high-pressure refrigerant outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205159158U CN202387534U (en) | 2011-12-12 | 2011-12-12 | Polysilicon rod crushing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205159158U CN202387534U (en) | 2011-12-12 | 2011-12-12 | Polysilicon rod crushing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202387534U true CN202387534U (en) | 2012-08-22 |
Family
ID=46662486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205159158U Withdrawn - After Issue CN202387534U (en) | 2011-12-12 | 2011-12-12 | Polysilicon rod crushing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202387534U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102489372A (en) * | 2011-12-12 | 2012-06-13 | 湖南顶立科技有限公司 | Method and device for breaking polycrystalline silicon rod |
| CN114345511A (en) * | 2022-02-14 | 2022-04-15 | 江苏鑫华半导体材料科技有限公司 | Thermal crushing method for electronic grade polycrystalline silicon rod |
| CN114534886A (en) * | 2022-02-14 | 2022-05-27 | 江苏鑫华半导体科技股份有限公司 | Electronic grade polycrystalline silicon thermal crushing heating device, heating method and crushing device |
-
2011
- 2011-12-12 CN CN2011205159158U patent/CN202387534U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102489372A (en) * | 2011-12-12 | 2012-06-13 | 湖南顶立科技有限公司 | Method and device for breaking polycrystalline silicon rod |
| CN114345511A (en) * | 2022-02-14 | 2022-04-15 | 江苏鑫华半导体材料科技有限公司 | Thermal crushing method for electronic grade polycrystalline silicon rod |
| CN114534886A (en) * | 2022-02-14 | 2022-05-27 | 江苏鑫华半导体科技股份有限公司 | Electronic grade polycrystalline silicon thermal crushing heating device, heating method and crushing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102489372B (en) | Method and device for breaking polycrystalline silicon rod | |
| CN201729664U (en) | Polysilicon rod crushing equipment | |
| CN202387534U (en) | Polysilicon rod crushing device | |
| CN101508151B (en) | Polysilicon rod thermodynamics breaking technique and device | |
| CN111229421A (en) | Device and method for crushing polycrystalline silicon rod | |
| CN103121685B (en) | Production method and production equipment for small piece of calcium carbide | |
| CN107364870A (en) | A kind of efficient impurity removal crushing process of fritting bottom seed crystal | |
| CN102191342A (en) | Comprehensive treatment system and method of steel slag roller crushing-waste heat press self-dissolving and waste heat recovery | |
| CN201756558U (en) | Steel slag air-cooled roller press fragmentation - waste heat self-relieving in pressure and waste heat recovery system | |
| CN102059170B (en) | Device and method for breaking polycrystalline silicon rod | |
| CN104264229B (en) | A kind of online doper of single crystal growing furnace | |
| CN105330127A (en) | Thickening process of tube-made glass bottle flat bottom | |
| CN105621866A (en) | Production method of high-quality and high-purity melted quartz blocks | |
| CN108823411A (en) | A method of recycling metal and energy gas from waste and old solar panels | |
| KR20110000338A (en) | The crusher to make small size raw material | |
| CN203440090U (en) | Calcium carbide furnace discharge system | |
| CN102328917A (en) | Two-step synthetic method for copper indium gallium selenide thin film solar cell material | |
| CN103638834A (en) | Method for dissolving sodium silicate by virtue of static pressure kettle | |
| CN212418229U (en) | Heating-freezing-sound wave combined silicon block crushing device | |
| Biyikoglu et al. | Production of anhydrous borax from borax pentahydrate | |
| CN204255075U (en) | Wind vanadophosphoric ferric ore deposit being carried out to ferrovanadium separation melts formula smelting furnace | |
| CN211823776U (en) | External heating type rotary kiln for calcining carbonate minerals and waste heat recovery system | |
| CN110055435B (en) | Preparation method of selenium-copper alloy | |
| CN101774589A (en) | Method for preparing low-hydroxyl and high-purity crystal powder | |
| CN206358841U (en) | Robot blanking system for heat treatment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120822 Effective date of abandoning: 20130904 |
|
| RGAV | Abandon patent right to avoid regrant |