CN104124252B - Cake3d nand存储器及其形成方法 - Google Patents
Cake3d nand存储器及其形成方法 Download PDFInfo
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Families Citing this family (2)
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CN105575972B (zh) * | 2016-01-05 | 2018-12-07 | 清华大学 | 一种蛋糕结构的3d nor型存储器及其形成方法 |
CN107994030B (zh) * | 2017-11-16 | 2019-02-22 | 长江存储科技有限责任公司 | 一种基于氧化物-石墨烯薄膜堆叠的3d nand闪存制备方法及闪存 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101764096A (zh) * | 2008-12-24 | 2010-06-30 | 海力士半导体有限公司 | 垂直沟道型非易失性存储器件及其制造方法 |
CN102956644A (zh) * | 2011-08-23 | 2013-03-06 | 海力士半导体有限公司 | 具有垂直存储器单元的非易失性存储器件及其制造方法 |
CN103680611A (zh) * | 2012-09-18 | 2014-03-26 | 中芯国际集成电路制造(上海)有限公司 | 3d nand存储器以及制作方法 |
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CN101764096A (zh) * | 2008-12-24 | 2010-06-30 | 海力士半导体有限公司 | 垂直沟道型非易失性存储器件及其制造方法 |
CN102956644A (zh) * | 2011-08-23 | 2013-03-06 | 海力士半导体有限公司 | 具有垂直存储器单元的非易失性存储器件及其制造方法 |
CN103680611A (zh) * | 2012-09-18 | 2014-03-26 | 中芯国际集成电路制造(上海)有限公司 | 3d nand存储器以及制作方法 |
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Inventor after: Deng Ning Inventor after: Wu Huaqiang Inventor after: Feng Wei Inventor after: Qian He Inventor after: Shu Qingming Inventor after: Zhu Yiming Inventor before: Deng Ning Inventor before: Wu Huaqiang Inventor before: Feng Wei Inventor before: Qian He |
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Address after: 100084-82 box 100084, Beijing, Haidian District Patentee after: TSINGHUA University Patentee after: Zhaoyi Innovation Technology Group Co.,Ltd. Address before: 100084-82 box 100084, Beijing, Haidian District Patentee before: TSINGHUA University Patentee before: GIGADEVICE SEMICONDUCTOR(BEIJING) Inc. |