CN103958124A - 玻璃板的研磨装置 - Google Patents

玻璃板的研磨装置 Download PDF

Info

Publication number
CN103958124A
CN103958124A CN201280059234.2A CN201280059234A CN103958124A CN 103958124 A CN103958124 A CN 103958124A CN 201280059234 A CN201280059234 A CN 201280059234A CN 103958124 A CN103958124 A CN 103958124A
Authority
CN
China
Prior art keywords
glass plate
grinding
grinding pad
hardness
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201280059234.2A
Other languages
English (en)
Chinese (zh)
Inventor
横山哲史
渡边翔太郎
甲斐辰彦
福原裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN103958124A publication Critical patent/CN103958124A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)
CN201280059234.2A 2011-12-02 2012-11-22 玻璃板的研磨装置 Pending CN103958124A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011264901 2011-12-02
JP2011-264901 2011-12-02
PCT/JP2012/080306 WO2013080885A1 (ja) 2011-12-02 2012-11-22 ガラス板の研磨装置

Publications (1)

Publication Number Publication Date
CN103958124A true CN103958124A (zh) 2014-07-30

Family

ID=48535344

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280059234.2A Pending CN103958124A (zh) 2011-12-02 2012-11-22 玻璃板的研磨装置

Country Status (5)

Country Link
JP (1) JPWO2013080885A1 (ja)
KR (1) KR20140106532A (ja)
CN (1) CN103958124A (ja)
TW (1) TW201328818A (ja)
WO (1) WO2013080885A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017030976A (ja) * 2013-12-04 2017-02-09 旭硝子株式会社 ガラス基板の仕上げ研磨方法、および、該方法で仕上げ研磨された無アルカリガラス基板

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003155471A (ja) * 2001-08-21 2003-05-30 Kao Corp 研磨液組成物
CN1639848A (zh) * 2002-08-30 2005-07-13 东丽株式会社 研磨垫、平台孔盖及研磨装置和研磨方法及半导体器件的制造方法
CN1789366A (zh) * 2004-12-13 2006-06-21 花王株式会社 玻璃基板用研磨液组合物
WO2010146982A1 (ja) * 2009-06-18 2010-12-23 Jsr株式会社 ポリウレタンおよびそれを含有する研磨層形成用組成物、ならびに化学機械研磨用パッドおよびそれを用いた化学機械研磨方法
JP2011005563A (ja) * 2009-06-23 2011-01-13 Fujibo Holdings Inc 研磨パッド、その製造方法および研磨加工方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4336524B2 (ja) * 2002-05-31 2009-09-30 Ｈｏｙａ株式会社 情報記録媒体用ガラス基材の製造方法
JP2004253058A (ja) * 2003-02-20 2004-09-09 Kao Corp 研磨液組成物
JP2010099771A (ja) * 2008-10-23 2010-05-06 Kanai Hiroaki ガラス用研磨パッド
JP5544131B2 (ja) * 2009-09-03 2014-07-09 富士紡ホールディングス株式会社 研磨パッド

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003155471A (ja) * 2001-08-21 2003-05-30 Kao Corp 研磨液組成物
CN1639848A (zh) * 2002-08-30 2005-07-13 东丽株式会社 研磨垫、平台孔盖及研磨装置和研磨方法及半导体器件的制造方法
CN1789366A (zh) * 2004-12-13 2006-06-21 花王株式会社 玻璃基板用研磨液组合物
WO2010146982A1 (ja) * 2009-06-18 2010-12-23 Jsr株式会社 ポリウレタンおよびそれを含有する研磨層形成用組成物、ならびに化学機械研磨用パッドおよびそれを用いた化学機械研磨方法
JP2011005563A (ja) * 2009-06-23 2011-01-13 Fujibo Holdings Inc 研磨パッド、その製造方法および研磨加工方法

Also Published As

Publication number Publication date
JPWO2013080885A1 (ja) 2015-04-27
TW201328818A (zh) 2013-07-16
WO2013080885A1 (ja) 2013-06-06
KR20140106532A (ko) 2014-09-03

Similar Documents

Publication Publication Date Title
CN102007580B (zh) 用于衬底边缘抛光的抛光带的方法和装置
US7371156B2 (en) Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system
JP4234991B2 (ja) 情報記録媒体用ガラス基板の製造方法及びその製造方法によって製造される情報記録媒体用ガラス基板
CN101249623A (zh) 圆盘状基板的研磨方法、研磨装置
CN101642893A (zh) 一种不锈钢衬底的精密抛光方法
JP2014233830A (ja) 研磨パッドドレッサおよびその製造方法、研磨パッドドレッシング装置、ならびに、研磨システム
CN103958124A (zh) 玻璃板的研磨装置
JP2014233797A (ja) ガラス板の製造方法、および、ガラス板の製造装置
KR20120099594A (ko) 유리판의 연마 방법
CN104339258A (zh) 玻璃基板用托板、磁记录介质用玻璃基板的研磨方法及磁记录介质用玻璃基板的制造方法
CN219027131U (zh) 碳化硅衬底片用抛光研磨垫
CN102806517B (zh) 板状体的研磨装置及板状体的研磨方法
JPWO2009157306A1 (ja) 磁気ディスク用ガラス基板の両面研磨装置、研磨方法及び製造方法
US20090023362A1 (en) Retaining ring for chemical mechanical polishing, its operational method and application system
CN201483357U (zh) 镜面研磨盘
JP2007030144A (ja) 被研磨物保持材
US7404757B2 (en) Apparatus and method for breaking in multiple pad conditioning disks for use in a chemical mechanical polishing system
JP6457802B2 (ja) ガラス板の製造方法、および、ガラス板の製造装置
JP2015069674A (ja) 磁気ディスク用ガラス基板の製造方法及び研磨処理用キャリア
JP2004154919A (ja) 研磨布およびそれを用いた片面研磨方法
CN104625939A (zh) 玻璃基板的制造方法
KR20100026620A (ko) 평판 유리용 벨트형 엣지 폴리싱 장치
CN207771567U (zh) 圆点型研磨盘组
WO2023100957A1 (ja) ガラス板の製造方法
WO2017171052A1 (ja) キャリアおよび当該キャリアを用いた基板の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20140730