KR20140106532A - 유리판 연마 장치 - Google Patents

유리판 연마 장치 Download PDF

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Publication number
KR20140106532A
KR20140106532A KR1020147014646A KR20147014646A KR20140106532A KR 20140106532 A KR20140106532 A KR 20140106532A KR 1020147014646 A KR1020147014646 A KR 1020147014646A KR 20147014646 A KR20147014646 A KR 20147014646A KR 20140106532 A KR20140106532 A KR 20140106532A
Authority
KR
South Korea
Prior art keywords
polishing
glass plate
polishing pad
hardness
pad
Prior art date
Application number
KR1020147014646A
Other languages
English (en)
Korean (ko)
Inventor
데츠시 요코야마
쇼타로 와타나베
다츠히코 가이
유타카 후쿠하라
Original Assignee
아사히 가라스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아사히 가라스 가부시키가이샤 filed Critical 아사히 가라스 가부시키가이샤
Publication of KR20140106532A publication Critical patent/KR20140106532A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)
KR1020147014646A 2011-12-02 2012-11-22 유리판 연마 장치 KR20140106532A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011264901 2011-12-02
JPJP-P-2011-264901 2011-12-02
PCT/JP2012/080306 WO2013080885A1 (ja) 2011-12-02 2012-11-22 ガラス板の研磨装置

Publications (1)

Publication Number Publication Date
KR20140106532A true KR20140106532A (ko) 2014-09-03

Family

ID=48535344

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147014646A KR20140106532A (ko) 2011-12-02 2012-11-22 유리판 연마 장치

Country Status (5)

Country Link
JP (1) JPWO2013080885A1 (ja)
KR (1) KR20140106532A (ja)
CN (1) CN103958124A (ja)
TW (1) TW201328818A (ja)
WO (1) WO2013080885A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017030976A (ja) * 2013-12-04 2017-02-09 旭硝子株式会社 ガラス基板の仕上げ研磨方法、および、該方法で仕上げ研磨された無アルカリガラス基板

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4462599B2 (ja) * 2001-08-21 2010-05-12 花王株式会社 研磨液組成物
JP4336524B2 (ja) * 2002-05-31 2009-09-30 Ｈｏｙａ株式会社 情報記録媒体用ガラス基材の製造方法
CN1639848A (zh) * 2002-08-30 2005-07-13 东丽株式会社 研磨垫、平台孔盖及研磨装置和研磨方法及半导体器件的制造方法
JP2004253058A (ja) * 2003-02-20 2004-09-09 Kao Corp 研磨液組成物
JP4667848B2 (ja) * 2004-12-13 2011-04-13 花王株式会社 ガラス基板用研磨液組成物
JP2010099771A (ja) * 2008-10-23 2010-05-06 Kanai Hiroaki ガラス用研磨パッド
US20120083187A1 (en) * 2009-06-18 2012-04-05 Jsr Corporation Polyurethane, composition for formation of polishing layers that contains same, pad for chemical mechanical polishing, and chemical mechanical polishing method using same
JP5184448B2 (ja) * 2009-06-23 2013-04-17 富士紡ホールディングス株式会社 研磨パッド、その製造方法および研磨加工方法
JP5544131B2 (ja) * 2009-09-03 2014-07-09 富士紡ホールディングス株式会社 研磨パッド

Also Published As

Publication number Publication date
JPWO2013080885A1 (ja) 2015-04-27
TW201328818A (zh) 2013-07-16
WO2013080885A1 (ja) 2013-06-06
CN103958124A (zh) 2014-07-30

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