CN103895349B - 喷墨头用的基板以及喷墨头 - Google Patents
喷墨头用的基板以及喷墨头 Download PDFInfo
- Publication number
- CN103895349B CN103895349B CN201310741027.1A CN201310741027A CN103895349B CN 103895349 B CN103895349 B CN 103895349B CN 201310741027 A CN201310741027 A CN 201310741027A CN 103895349 B CN103895349 B CN 103895349B
- Authority
- CN
- China
- Prior art keywords
- protective layer
- ink
- heating resistor
- ink gun
- indivedual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 45
- 239000011241 protective layer Substances 0.000 claims abstract description 302
- 238000010438 heat treatment Methods 0.000 claims abstract description 114
- 238000003487 electrochemical reaction Methods 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims description 71
- 239000011159 matrix material Substances 0.000 claims description 25
- 238000009413 insulation Methods 0.000 claims description 19
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 16
- 229910052741 iridium Inorganic materials 0.000 claims description 16
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 16
- 229910052707 ruthenium Inorganic materials 0.000 claims description 16
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 76
- 239000012528 membrane Substances 0.000 description 71
- 238000000034 method Methods 0.000 description 32
- 230000008569 process Effects 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 25
- 238000007641 inkjet printing Methods 0.000 description 21
- 229910052715 tantalum Inorganic materials 0.000 description 12
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 12
- 230000009471 action Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000001312 dry etching Methods 0.000 description 9
- 238000007639 printing Methods 0.000 description 9
- 239000007921 spray Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 238000012360 testing method Methods 0.000 description 9
- 230000005611 electricity Effects 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000005187 foaming Methods 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 229910004200 TaSiN Inorganic materials 0.000 description 1
- KMWBBMXGHHLDKL-UHFFFAOYSA-N [AlH3].[Si] Chemical compound [AlH3].[Si] KMWBBMXGHHLDKL-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- -1 metallic plate Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0458—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-285440 | 2012-12-27 | ||
| JP2012285440A JP6039411B2 (ja) | 2012-12-27 | 2012-12-27 | インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103895349A CN103895349A (zh) | 2014-07-02 |
| CN103895349B true CN103895349B (zh) | 2016-01-20 |
Family
ID=50987068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310741027.1A Expired - Fee Related CN103895349B (zh) | 2012-12-27 | 2013-12-27 | 喷墨头用的基板以及喷墨头 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9061489B2 (https=) |
| JP (1) | JP6039411B2 (https=) |
| CN (1) | CN103895349B (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6566709B2 (ja) | 2015-05-07 | 2019-08-28 | キヤノン株式会社 | インクジェット記録ヘッド用基板 |
| JP6504938B2 (ja) * | 2015-06-25 | 2019-04-24 | キヤノン株式会社 | 液体吐出ヘッド用基板および液体吐出ヘッド |
| US10272671B2 (en) | 2015-10-08 | 2019-04-30 | Hewlett-Packard Development Company, L.P. | Isolating failed resistors |
| JP2018176697A (ja) * | 2017-04-21 | 2018-11-15 | キヤノン株式会社 | 液体吐出ヘッドのヒューズ部の切断方法、液体吐出装置 |
| JP7071067B2 (ja) * | 2017-06-21 | 2022-05-18 | キヤノン株式会社 | 液体吐出ヘッド用基板、液体吐出ヘッド、および液体吐出ヘッド用基板の製造方法 |
| JP2019069533A (ja) * | 2017-10-06 | 2019-05-09 | キヤノン株式会社 | 液体吐出ヘッド用基板、液体吐出ヘッド、液体吐出ヘッド用基板におけるヒューズ部の切断方法 |
| JP7183049B2 (ja) * | 2018-02-22 | 2022-12-05 | キヤノン株式会社 | 液体吐出ヘッド用基板および液体吐出ヘッド |
| JP7159060B2 (ja) * | 2018-02-22 | 2022-10-24 | キヤノン株式会社 | 液体吐出ヘッド用基板、液体吐出ヘッド、液体吐出ヘッド用基板の製造方法 |
| JP7286349B2 (ja) * | 2018-04-27 | 2023-06-05 | キヤノン株式会社 | 液体吐出ヘッド用基板、液体吐出ヘッド用基板の製造方法、および液体吐出ヘッド |
| JP7134733B2 (ja) | 2018-06-25 | 2022-09-12 | キヤノン株式会社 | 記録素子基板、液体吐出ヘッド、および液体吐出装置 |
| JP7760311B2 (ja) | 2021-09-29 | 2025-10-27 | キヤノン株式会社 | 液体吐出ヘッド用基板、液体吐出ヘッド、及び液体吐出ヘッド用基板の製造方法 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062416B2 (ja) * | 1984-01-30 | 1994-01-12 | キヤノン株式会社 | 液体噴射記録ヘッドの製造方法 |
| EP0636478B1 (en) | 1993-07-29 | 2000-04-19 | Canon Kabushiki Kaisha | Ink jet head, ink jet cartridge, and ink jet recording apparatus |
| JP2984914B2 (ja) * | 1996-09-05 | 1999-11-29 | 釜屋電機株式会社 | チップ型ヒューズ抵抗器とその電極構造 |
| US6512284B2 (en) | 1999-04-27 | 2003-01-28 | Hewlett-Packard Company | Thinfilm fuse/antifuse device and use of same in printhead |
| US6361150B1 (en) | 1999-08-30 | 2002-03-26 | Hewlett-Packard Company | Electrostatic discharge protection of electrically-inactive components in a thermal ink jet printing system |
| JP3576888B2 (ja) | 1999-10-04 | 2004-10-13 | キヤノン株式会社 | インクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置 |
| JP3710364B2 (ja) | 2000-07-31 | 2005-10-26 | キヤノン株式会社 | インクジェットヘッド |
| JP3812485B2 (ja) | 2002-04-10 | 2006-08-23 | ソニー株式会社 | 液体吐出装置及びプリンタ |
| CN100493912C (zh) | 2002-12-27 | 2009-06-03 | 佳能株式会社 | 用于喷墨头的衬底、使用所述衬底的喷墨头及其制造方法 |
| EP1547777B1 (en) | 2003-12-26 | 2011-06-08 | Canon Kabushiki Kaisha | Ink jet head, method of driving the ink jet head, and ink jet recording apparatus |
| JP4208794B2 (ja) | 2004-08-16 | 2009-01-14 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
| JP4208793B2 (ja) | 2004-08-16 | 2009-01-14 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
| JP4646602B2 (ja) | 2004-11-09 | 2011-03-09 | キヤノン株式会社 | インクジェット記録ヘッド用基板の製造方法 |
| JP4926669B2 (ja) | 2005-12-09 | 2012-05-09 | キヤノン株式会社 | インクジェットヘッドのクリーニング方法、インクジェットヘッドおよびインクジェット記録装置 |
| JP4847360B2 (ja) | 2006-02-02 | 2011-12-28 | キヤノン株式会社 | 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法 |
| JP2007230127A (ja) * | 2006-03-02 | 2007-09-13 | Canon Inc | インクジェット記録ヘッド用基体の製造方法 |
| JP2008149687A (ja) | 2006-12-20 | 2008-07-03 | Canon Inc | インクジェット記録ヘッド用基板および該基板を用いるインクジェット記録ヘッド |
| JP5147282B2 (ja) | 2007-05-02 | 2013-02-20 | キヤノン株式会社 | インクジェット記録用基板、該基板を備えた記録ヘッド及び記録装置 |
| JP4963679B2 (ja) | 2007-05-29 | 2012-06-27 | キヤノン株式会社 | 液体吐出ヘッド用基体及びその製造方法、並びに該基体を用いる液体吐出ヘッド |
| US8075102B2 (en) | 2008-06-19 | 2011-12-13 | Canon Kabushiki Kaisha | Substrate for ink jet head and ink jet head |
| JP5393275B2 (ja) * | 2008-06-24 | 2014-01-22 | キヤノン株式会社 | 液体吐出ヘッド |
| JP5328607B2 (ja) | 2008-11-17 | 2013-10-30 | キヤノン株式会社 | 液体吐出ヘッド用基板、該基板を有する液体吐出ヘッド、該ヘッドのクリーニング方法および前記ヘッドを用いる液体吐出装置 |
| JP2011213049A (ja) * | 2010-04-01 | 2011-10-27 | Canon Inc | 液体吐出ヘッド及びこの駆動方法 |
| JP5106601B2 (ja) | 2010-08-26 | 2012-12-26 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法 |
-
2012
- 2012-12-27 JP JP2012285440A patent/JP6039411B2/ja not_active Expired - Fee Related
-
2013
- 2013-12-23 US US14/138,295 patent/US9061489B2/en not_active Expired - Fee Related
- 2013-12-27 CN CN201310741027.1A patent/CN103895349B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20140184700A1 (en) | 2014-07-03 |
| JP2014124921A (ja) | 2014-07-07 |
| JP6039411B2 (ja) | 2016-12-07 |
| CN103895349A (zh) | 2014-07-02 |
| US9061489B2 (en) | 2015-06-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103895349B (zh) | 喷墨头用的基板以及喷墨头 | |
| CN103895350B (zh) | 喷墨打印头及其制造方法、所用的基板和喷墨打印设备 | |
| US8943690B2 (en) | Method for manufacturing substrate for liquid ejection head and method for manufacturing liquid ejection head | |
| US9096059B2 (en) | Substrate for inkjet head, inkjet head, and inkjet printing apparatus | |
| JP6143455B2 (ja) | インクジェットヘッド用基板、インクジェットヘッド及びインクジェット記録装置 | |
| JP2014124920A (ja) | インクジェットヘッド用基板、インクジェットヘッドおよびインクジェット記録装置 | |
| JP6300639B2 (ja) | 液体吐出ヘッド | |
| EP3392044B1 (en) | Method of disconnecting fuse portion of liquid-discharging head and liquid discharge apparatus | |
| JP5677109B2 (ja) | インクジェット記録ヘッド用基板、インクジェット記録ヘッド及び記録装置 | |
| US20190255850A1 (en) | Liquid ejection head | |
| EP2648918B1 (en) | Method for driving liquid discharge head, liquid discharge head, and liquid discharge apparatus | |
| JP2019072999A (ja) | 素子基板、記録ヘッド、記録装置、及び素子基板の製造方法 | |
| US20200086633A1 (en) | Liquid discharge apparatus and control method thereof | |
| JP2015054410A (ja) | 液体吐出ヘッド及び液体吐出装置 | |
| JP7071067B2 (ja) | 液体吐出ヘッド用基板、液体吐出ヘッド、および液体吐出ヘッド用基板の製造方法 | |
| JP7465096B2 (ja) | 素子基板、液体吐出ヘッド、及び記録装置 | |
| JP2020049685A (ja) | 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッドおよび液体吐出装置 | |
| JP7186540B2 (ja) | 液体吐出ヘッド用基板、液体吐出ヘッド、および、液体吐出装置 | |
| JP2022160181A (ja) | 素子基板、液体吐出ヘッドおよびその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160120 |