CN103839641A - Mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and manufacturing method thereof - Google Patents
Mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and manufacturing method thereof Download PDFInfo
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- CN103839641A CN103839641A CN201410107545.2A CN201410107545A CN103839641A CN 103839641 A CN103839641 A CN 103839641A CN 201410107545 A CN201410107545 A CN 201410107545A CN 103839641 A CN103839641 A CN 103839641A
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Abstract
The invention discloses mixed film coating equipment for neodymium iron boron rare-earth permanent magnet components and a manufacturing method of the mixed film coating equipment. The film coating equipment comprises a vacuum chamber, cylinder rotating cathode magnetic control targets, plane cathode magnetic control targets, multi-arc ion targets, rotating stands and material baskets. In the working process, the rotating stands perform revolution in the vacuum chamber, and the two ends of each net-shaped material basket are installed on the corresponding rotating stand through rotary shafts and not only perform revolution along with the rotating stand, but also perform rotation. The cylinder rotating cathode magnetic control targets are installed in the rotating stands in the vacuum chamber, the plane magnetic control targets, the multi-arc ion targets, anode layer linear ion sources and a heating device are installed around the rotating stands in the vacuum chamber, and vacuum film coating is performed in a three-layer mode. The first layer is a magnetron sputtering coating layer, the thickness of the coating layer is 0.1 micrometer-5 micrometers, the second layer is a mixed coating layer of magnetron sputtering and multiple arcs, the thickness of the mixed coating layer is 1 micrometer-15 micrometers, the third layer is a magnetron sputtering coating layer, and the thickness of the coating layer is 0.1 micrometer-5 micrometers. Mixed film coating is adopted as the surface treatment process of the rare-earth permanent magnet components, so that the anti-corrosion capacity of the rare-earth permanent magnet components is improved, and meanwhile the magnetic performance of the rare-earth permanent magnet components is improved.
Description
Technical field
The invention belongs to permanent magnet devices field, particularly relate to a kind of the admixture plates the film equipment and manufacture method of Nd-Fe-B rare-earth permanent magnet device.
Background technology
Nd-Fe-B rare earth permanent magnetic material, is more and more applied with its good magnetic property, is widely used in medical Magnetic resonance imaging, computer hard disc driver, sound equipment, mobile phone etc.; Along with energy-conservation and requirement low-carbon economy, Nd-Fe-B rare earth permanent magnetic material starts again at auto parts and components, household electrical appliance, energy-conservation and control motor, hybrid vehicle, field of wind power generation application.
The process of surface treatment of the rare earth permanent magnet device of prior art mainly contains electroplated Ni-Cu-Ni, electroplates the technology such as Zn, electrophoresis, spraying, also has and adopts vacuum aluminum-coated method, as Chinese patent ZL96192129.3, has disclosed the method for Vacuum Deposition Ti and AlN; Another Chinese patent ZL01111757.5 has disclosed and has adopted that vacuum evaporation is zinc-plated, the method for aluminium, tin, magnesium.
Prior art as shown in Figure 1, has two strutting pieces 7 to be arranged side by side in the inner Shang of vacuum chamber 1 district, can the rotating shaft 6 on a horizontal axis of rotation rotate.Six cylinders 5 that formed by stainless steel cloth pack magnetic part 14 into, by rotating shaft 8 in the outer circumference direction of the rotating shaft 6 of strutting piece 7 and be supported for an annular, for 6 rotations around the shaft.Be arranged on a heating boat supporting base 4 rising as multiple heating boats 2 of the evaporation section of the material aluminium wire 9 for evaporating in the support platform 3 of process chamber 1 inferior segment.Aluminium wire 9 is fixed and is wrapped on a feed roller 10 under support platform 3.The front end of aluminium wire 9 is reached on heating boat 2 by thermal resistance protection tube 11 guiding of an inner surface towards heating boat 2; a recess 12 is arranged in a part for protection tube 11; and feed gear wheel 13 is installed corresponding to recess 12; and directly contact with aluminium wire 9; can be consistently aluminium wire be fed in heating boat 2 by feeding aluminium wire 9 like this, heating evaporation deposits to and on the magnetic part 14 in the barrel 5 of rotation, completes its surface and aluminize.
Prior art adopts evaporation coating, and the adhesion of rete and matrix is poor, improves the resistance to corrosion Shortcomings of rare earth permanent magnet device; Also the prior art having has adopted magnetron sputtering plating, because the efficiency of magnetron sputtering is low, is not suitable for low cost and produces in enormous quantities, and what also have does not solve the technology that is installed, and is difficult for being installed, and produces trouble; Also the prior art having adopts multi-arc ion plating film, has bulky grain during due to multi-arc ion plating film, can not reach the corrosion resistance requirement of rare earth permanent magnet device; In order to solve the shortcoming of multi-arc ion coating, also someone has expected employing multi-arc ion coating and magnetron sputtering the admixture plates the film to prior art, but does not all solve high efficiency, production technology low-costly and in high volume, device structure Shortcomings; The particularly electroplating chemical treatment process of the rare earth permanent magnet device of prior art, energy consumption is high pollution, require expensive water treatment facilities, deal with improperly biological environment is had a strong impact on, because production process of the present invention is carried out in a vacuum, do not use environmental pollution material, can not pollute to biological environment, also eliminate " battery " in electroplating technology process simultaneously and act on the impact of the reduction on magnetic property.For this reason, the vacuum the admixture plates the film equipment that the invention provides a kind of novel rare-earth permanent magnet devices has made up the deficiencies in the prior art; Adopt in addition the Nd-Fe-B rare-earth permanent magnet device of device fabrication of the present invention not only to improve the resistance to corrosion of rare earth permanent magnet device, also improve the magnetic property of rare earth permanent magnet device, obviously improve magnetic energy product and the coercive force of rare earth permanent magnet device, save rare rare earth resources, especially saved more rare heavy rare earth consumption.
Summary of the invention
The present invention is to provide a kind of Nd-Fe-B rare-earth permanent magnet device the admixture plates the film equipment and manufacture method, is achieved through the following technical solutions and improves the magnetic property of rare earth permanent magnet device and the resistance to corrosion of raising:
A kind of Nd-Fe-B rare-earth permanent magnet device the admixture plates the film equipment, described the admixture plates the film equipment comprises vacuum film coating chamber, cylinder negative electrode magnetic control target, planar cathode magnetic control target, cathodic multi arc ion plating target, pivoted frame and charging basket; Described vacuum film coating chamber is made up of horizontal vacuum housing, Qianmen and bonnet, Qianmen and vaccum case pass through rubber seal rings for seal, bonnet or be welded on vaccum case or by connector connects, large pivoted frame design is indoor in vacuum coating, by rotating shaft support, on framework, frame installation is on vaccum case; The large axis of pivoted frame and the axis of vaccum case are parallel, on large pivoted frame, 3 little pivoted frames are installed, the axis of little pivoted frame is parallel with the axis of large pivoted frame, multiple netted charging baskets two ends have rotating shaft to be arranged on little pivoted frame, the axis of rotating shaft is parallel with the axis of little pivoted frame, large pivoted frame is around the axis revolution of vaccum case, and little pivoted frame revolves round the sun and rotation around the axis of large pivoted frame, and netted charging basket revolves round the sun also along with little pivoted frame revolves round the sun and rotation with large pivoted frame; Described cylinder negative electrode magnetic control target is arranged on the indoor bonnet of vacuum coating, and cylinder negative electrode magnetic control target is positioned at the inside of pivoted frame, axis and turret shaft line parallel, and described cylinder negative electrode magnetic control target arranges more than one; Described planar cathode magnetic control target is arranged on vaccum case, is distributed in the periphery of pivoted frame.
Cylinder negative electrode magnetic control target is arranged on the indoor bonnet of vacuum coating, and power supply, cooling water and transmission device are introduced by outside, and cylinder negative electrode magnetic control target is positioned at the inside of large pivoted frame, axis and turret shaft line parallel.
Described cylinder negative electrode magnetic control target is set to one.
The magnet ring that multiple axial chargings are housed in described cylinder negative electrode magnetic control target, has magnetic guiding loop between magnet ring, magnet ring moves with respect to cylinder negative electrode magnetic control target axial reciprocating.
In described cylinder negative electrode magnetic control target or the magnetic stripe of many radial magnetizings is housed, magnetic stripe along circle distribution, has interval in cylinder negative electrode magnetic control target between magnetic stripe, and the quantity of magnetic stripe is more than 3 or 3, and magnetic stripe is with respect to cylinder negative electrode magnetic control target coaxial rotation.
Described magnet ring or magnetic stripe are manufactured by Nd-Fe-B rare-earth permanent magnet.
Planar cathode magnetic control target is arranged on vaccum case, is distributed in the periphery of large pivoted frame, is provided with run-track shaped ring-type magnetic stripe in described planar cathode magnetic control target, and magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is one or more.
Cathodic multi arc ion plating target is arranged on vaccum case, is distributed in the periphery of large pivoted frame, and described cathodic multi arc ion plating target is rectangle or circle, and inside is provided with magnet, and magnet is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is more than one.
Anode-layer-linear ion source is arranged on vaccum case, is distributed in the periphery of pivoted frame.
The indoor heater that is provided with of described vacuum coating, heating-up temperature scope is at 100-600 DEG C.
Described plated film target is Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
Described Nd-Fe-B rare-earth permanent magnet device plated film film is more than one in Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe.
Described Nd-Fe-B rare-earth permanent magnet device plated film film is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
Described Nd-Fe-B rare-earth permanent magnet device plated film film is Al.
Described gas charging system or be filled with a kind of gas or be filled with more than one gas.
The gas that described gas charging system is filled with is more than one in argon gas, nitrogen, oxygen, hydrogen.
The gas that described gas charging system is filled with is argon gas.
In described vacuum pump, be more than one in oil-sealed rotary pump, Roots vacuum pump, oily diffusion vacuum pump, molecular pump.
Described magnetron sputtering plating condition is, 30 ~ 600 DEG C of temperature, and deposition pressure is 0.1 ~ 1Pa under argon gas condition, power density is 1 ~ 20w/cm
2; Discharge voltage 100 ~ the 3000V of linear ion source, ion energy 100 ~ 2000eV, operating air pressure 0.01 ~ 1Pa under argon gas condition.In described filming process, adopt magnetron sputtering plating and multi-arc ion plating film, magnetron sputtering plating and multi-arc ion plating film separately, alternately or carry out work simultaneously.
A kind of manufacture method of Nd-Fe-B rare-earth permanent magnet device, first carry out alloy melting, under molten condition by alloy casting to being with cooling formation alloy sheet on water-cooled rotation copper roller, follow involutory gold plaque and carry out hydrogen fragmentation, batch mixing and airflow milling, after airflow milling under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after batch mixer batch mixing, after shaping, in guard box, after encapsulation, wait static pressure, send into afterwards agglomerating plant sintering and timeliness and make Nd-Fe-B rare-earth permanent magnet magnet, carry out afterwards machining and make Nd-Fe-B rare-earth permanent magnet device, afterwards Nd-Fe-B rare-earth permanent magnet device is carried out to plated film, plated film is divided into 3 layers, ground floor is magnetron sputtering coating, thickness of coating is: 0.02-5 μ m, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, thickness of coating is: 1-10 μ m, the 3rd layer is magnetron sputtering coating, thickness of coating is: 0.1-5 μ m.
Described the admixture plates the film operation, plated film is divided into 3 layers, and ground floor is magnetron sputtering coating, and coating is the one in Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, and coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO, the 3rd layer is magnetron sputtering coating, coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
Described the admixture plates the film operation, plated film is divided into 3 layers, and ground floor is magnetron sputtering coating, and coating is the one in Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, and the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, coating is Al, Ni-Cr, Al
2o
3, ZrO
2, more than one in AZO, the 3rd layer is magnetron sputtering coating, coating is Al, Ni-Cr, Al
2o
3, ZrO
2, more than one in AZO.
Described the admixture plates the film operation, plated film is divided into 3 layers, ground floor is magnetron sputtering coating, coating is more than one in Al, Ni-Cr, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, coating is more than one in Al, Ni-Cr, and the 3rd layer is magnetron sputtering coating, and coating is more than one in Al, Ni-Cr.
Rare earth permanent magnet device will carry out sandblast operation before filming process, the material that sandblast adopts be quartz, glass microballoon, aluminium oxide, cerium oxide, lanthana, cerium oxide and lanthana mixture, zirconic more than one.
Before filming process or to have spraying process, sprayed on material be aluminium or containing the one in compound, the electrophoretic paint of aluminium.
In filming process or have the device heats operation of coating process of control, temperature range is at 100-600 DEG C.
After filming process or have a heat treatment step.
The heat treatment temperature of described heat treatment step is at 110-890 DEG C.
The heat treatment of described heat treatment step is carried out under vacuum or protective atmosphere.
Nd-Fe-B rare-earth permanent magnet device the admixture plates the film equipment or be arranged in clean room, the cleanliness factor of factory building is more than 10,000 grades.
Metallographic Analysis demonstration, described a kind of Nd-Fe-B rare-earth permanent magnet device extends internally within the scope of 1mm from device surface, and in main phase grain, the content of heavy rare earth is higher than the content of device main phase grain heavy rare earth, and the heavy rare earth that content is high is distributed in principal phase R
2t
14the periphery of B, forms RH
2t
14b surrounds R
2t
14the new principal phase structure of B, RH
2t
14b phase and R
2t
14b is alternate with Grain-Boundary Phase; Wherein, R representative rare earth in principal phase in Fe-B rare-earth permanent magnet structure, T representative element Fe and Co, RH represents that the content of heavy rare earth in principal phase is higher than the rare earth of mean value.
Beneficial effect of the present invention: the vacuum coating equipment and the manufacture method that have found a kind of Nd-Fe-B rare-earth permanent magnet device to produce in enormous quantities, obviously improve the decay resistance of Nd-Fe-B rare-earth permanent magnet device, make Nd-Fe-B rare-earth permanent magnet device can be used for the field of the high corrosion-resistant such as offshore wind farm, hybrid vehicle requirement, expanded the purposes of Nd-Fe-B rare-earth permanent magnet; Generally; the face coat of Nd-Fe-B rare-earth permanent magnet all can reduce magnetic property; the present invention finds the magnetic property of the Nd-Fe-B rare-earth permanent magnet device that adopts equipment and process production of the present invention; especially magnetic energy product and coercive force are improved significantly; for the magnetic property that improves Nd-Fe-B rare-earth permanent magnet has found new method; to reducing rare earth consumption, protect rare natural resources significant.
Brief description of the drawings
Further illustrate the present invention below by accompanying drawing:
Fig. 1 be prior art vacuum coating schematic diagram
Fig. 2 is vacuum coating schematic diagram of the present invention
In figure: 1, vacuum chamber; 2, heating boat; 3, support platform; 4, heating boat supporting base; 5, charging cylinder; 6, around the shaft; 7, strutting piece; 8, rotating shaft; 9, aluminium wire; 10, roller; 11, thermal resistance protection tube; 12, recess; 13, feed gear wheel; 14, magnetic part; 15, vaccum case; 16, anode-layer-linear ion source; 17, multi sphere ion source; 18, vacuum pump; 19, plane magnetic control target; 20, heater; 21, I level is from moving gear; 22, I level driven gear; 23, II level driving gear; 24, II level driven gear; 25, large pivoted frame; 26, charging basket; 27, permanent magnet devices; 28, cylinder magnetic control target; 29, III level driving gear; 30, III level driven gear; 31, vacuum-pumping pipeline; 32, little pivoted frame; 33, rotating shaft I; 34, rotating shaft II.
As shown in Figure 2, the present invention is the admixture plates the film equipment of magnetron sputtering plating and multi-arc ion plating film work in combination.On the center line of a horizontal vacuum housing 15 that is connected with vacuum pump 18, be provided with a column type magnetic control target 28, on the circumference of large pivoted frame 25, be furnished with multiple (in figure being 3) little pivoted frame 32, on the circumference of each little pivoted frame 32, be furnished with multiple (in figure being 6) stainless (steel) wire finish mix basket 26, permanent magnet devices 27 is housed in charging basket 26.Drive motors (not marking) outside vacuum chamber connects I level driving gear 21 by movable sealing power transmission shaft, drives the I level driven gear 22 being fixed on large pivoted frame 25 to complete large pivoted frame 25 and revolves round the sun around cylinder magnetic control target 28.II level driving gear 23 revolution by large pivoted frame 25 that are fixed on large pivoted frame 25 drive II level driven gear 24 I 33 rotations around the shaft that are fixed on little pivoted frame 32; Be fixed on III level driving gear 29 on little pivoted frame 32 drive III level driven gear 30 around the shaft II 34 rotate, the two ends of charging basket 26 are provided with rotating shaft and connect with rotating shaft II 34 and III level driven gear 30, therefore charging basket 26 can reach sun and planet gear revolution and adds rotation object, make permanent magnet devices 27 in charging basket 26, stir-fry by uniform deposition on target material.Be provided with more than 17, one plane magnetic control target 19 of more than 16,1 the multi sphere ion source of anode-layer-linear ion source in circular vaccum case 15 outsides, connect vacuum-pumping pipeline 31 and the heater 20 of vacuum pump 18.
Chamber, filming process initial vacuum vacuumizes and reaches E-4Pa magnitude, recharges argon gas, operating air pressure 0.01 ~ 1Pa, and charging basket 26 revolution add rotation, starting cathode layer linear ion source, discharge voltage 100 ~ 3000V, Ions Bombardment permanent magnet devices 27, stopped bombarding through 5 ~ 10 minutes.Charging basket 26 insulate, and also can meet negative pressure-50 ~-200V.The object of icon bombardment cleaning in advance, be clean the oxide on permanent magnet devices 27 surfaces, containing hydrocarbons, make its surface coarsening increase surface can and the effect such as ion assisted deposition.Heater 20 is heated to 120 ~ 600 DEG C to charging basket 26 and the interior permanent magnet devices 27 of charging basket 26, plays and removes steam, improves film adhesion effect.Filming process is in the time being heated to 200 DEG C, charging basket 26 revolution adds rotation and after high-pressure ion cleans, vacuum chamber 15 again vacuumizes and reaches E-4Pa magnitude, recharge argon gas, operating air pressure 0.1 ~ 1Pa, start respectively or simultaneously plane magnetic control target 19, column type magnetic controlled sputtering target 28 and multi sphere ion source 17, it is worked independently respectively or alternation or simultaneously work, target material is deposited to the coating that forms simple substance film and deielectric-coating on permanent magnet devices 27.
Embodiment
Further illustrate remarkable result of the present invention below by the contrast of embodiment.
Embodiment 1
Press following technique manufacture:
1, press respectively table one A1, A2, A3, A4 composition is chosen alloy 600Kg melting, under molten condition by alloy casting to being with cooling formation alloy sheet on water-cooled rotation copper roller, then carry out hydrogen fragmentation, after hydrogen fragmentation, carry out batch mixing, the laggard row airflow milling of batch mixing, afterwards under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after batch mixer batch mixing, oxygen content 150ppm in guard box, alignment magnetic field 1.8T, 2 DEG C of mould cavity temperatures, magnetic patch size 62 × 52 × 42mm, direction of orientation is 42 dimensional directions, after shaping, in guard box, encapsulate, then take out and wait static pressure, hydrostatic pressure 200MPa, send into afterwards agglomerating plant sintering and timeliness.
2, after timeliness, carry out machining, be processed into square piece 30 × 20 × 10 mm sizes, workpiece selectivity is carried out to chamfering, sandblast, aluminium-plated, electrophoresis, spraying, carried out vacuum coating afterwards, ground floor adopts magnetron sputtering plating, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, and the 3rd layer is magnetron sputtering coating, and thickness of coating is respectively: 0.02-5 μ m, 0.1-15 μ m, 1-5 μ m; Some experiments also carried out plating the 4th layer, the 4th layer is magnetron sputtering coating, thickness 0.1-5 μ m, the 4th layer do not mark the symbol of element for only having triple-layer coating, the measurement result of each layer of material of selecting, magnetic property and decay resistance is listed table two in.
The composition of the RE permanent magnetic alloy of table one, embodiment and comparative example
| Numbering | Composition |
| A1 | Ｎd 30Dy 1Fe 67.9Ｂ 0.9A l0.2 |
| A2 | Ｎd 30Dy 1Fe 67.5Co 1.2Cu 0.1Ｂ 0.9Al 0.1 |
| A3 | (Ｐr 0.2Ｎd 0.8) 25Dy 5Fe 67.4Co 1.2Cu 0.3Ｂ 0.9Al 0.2 |
| A4 | (Ｐr 0.2Ｎd 0.8) 25Dy 5Tb 1Fe 65Co 2.4Cu 0.3Ｂ 0.9Al 0.2Ga 0.1Zr 0.1 |
The measurement result of table two, coating material of the present invention, magnetic property and decay resistance
Comparative example 1
Press respectively the A1 of table one, A2, A3, A4 composition is chosen alloy 600Kg melting, under molten condition by alloy casting to cooling formation alloy sheet on the chill roll with water-cooled rotation, then use the involutory gold plaque of vacuum hydrogen crushing furnace to carry out coarse crushing, the broken laggard row airflow milling of hydrogen, under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after batch mixer batch mixing, alignment magnetic field 1.8T, magnetic patch size 62 × 52 × 42mm, direction of orientation is 42 dimensional directions, after shaping, in guard box, encapsulate, then take out and wait static pressure, hydrostatic pressure 200MPa, send into afterwards vacuum sintering furnace sintering and timeliness, carry out again machining, be processed into square piece 30 × 20 × 10 mm sizes, workpiece selectivity is carried out to chamfering or sandblast, carry out afterwards electroplated Ni-Cu-Ni, the measurement result of magnetic property and decay resistance is listed table three in.
The magnetic property of table three, comparative example and the measurement result of decay resistance
Embodiment 2
The composition of choosing in embodiment 1 is made Nd-Fe-B rare-earth permanent magnet device, coating is selected ground floor plating Dy-Al alloy, second layer plating Al+ Al, the coating of the 3rd layer of plating Al is made temperature experiment, result is listed table four in, sequence number 1 does not heat the comparative example of yet not heat-treating while being plated film, can find out by table four, heat treatment temperature after coating temperature and plated film has impact to the magnetic property of material, obviously improve the coercive force of magnet, namely improved the serviceability temperature of magnet, under equal serviceability temperature, can reduce the consumption of heavy rare earth, save scarce resource.
The impact on magnetic property and decay resistance of table four, coating temperature and heat treatment temperature
Note: 1, corrosion resistance (PCT test)
Experiment condition: sample 10X10X10mm, 2 standard atmospheric pressures, 120 DEG C, 100% humidity, 48 hours, weightless <5mg/cm
2.
2, salt mist test:
Experiment condition: 5%NaCl solution, within 25 DEG C >=48 hours, to test, surface does not change.
In embodiment, before vacuum coating operation, to there is sandblast operation: because rare earth permanent magnet device is in the course of processing, all can there is a certain amount of grease and dirty on its surface, and these dirts have a great impact the decay resistance of technique for vacuum coating stability and coated product, therefore configuring rational cleaning equipment and technique is the basic guarantee of rare earth permanent magnet component vacuum coating quality performance, only has rational cleaning guarantee coating to have good adhesive force.Sandblast operation adopt material be quartz, glass microballoon, aluminium oxide, cerium oxide, lanthana, cerium oxide and lanthana mixture, zirconic more than one.Before vacuum coating operation or to also have spraying process, sprayed on material be aluminium or containing the one in compound, the electrophoretic paint of aluminium.
In embodiment, in filming process mesohigh Ion Cleaning operation: vacuum chamber vacuumizes the order of magnitude higher than E-4Pa, applying argon gas, operating air pressure 0.01 ~ 1Pa, charging basket revolution adds rotation, starting cathode layer linear ion source, discharge voltage 100 ~ 3000V, Ions Bombardment rare earth permanent magnet device 5 ~ 10 minutes.Charging basket insulate, and also can meet negative pressure-50 ~-200V.
In embodiment, coating process configuration: reasonably Process configuration comprises single, double magnetron cathode configuration (comprising plane, cylinder rotary magnetron cathode arrangement), multi sphere cathode arrangement, anode-layer-linear ion source, heater and vacuum pump etc.Different coating process configurations cause the variation such as throughput rate, ion energy, and coated product performance is had to material impact.Vacuum chamber vacuumizes the order of magnitude higher than E-4Pa, recharges argon gas, operating air pressure 3E-1Pa, and charging basket revolution adds rotation, and magnetron sputtering deposition and arc evaporation deposition work independently respectively or alternation or simultaneously work separately; Magnetron sputtering deposition and arc evaporation deposition work independently with Ions Bombardment respectively or alternation separately.
In embodiment, coating process charging: the structure of charging basket has considerable influence to coated product outward appearance and coating quality, should avoid occurring surface tear and other physical damnifications.Charging basket is cylinder type or the polygon column structure that stainless (steel) wire is made, and centre has dividing plate to form multiple insulating spaces, and one or a few permanent magnet devices is placed in each space.
In embodiment, after vacuum coating operation or have a heat treatment step, heat treatment temperature 100-900 DEG C.
By relatively further illustrating of embodiment and comparative example, adopt technology of the present invention obviously to improve magnetic property and the decay resistance of magnet, be the technology and equipment technology that has very much development.
Claims (15)
1. a admixture plates the film equipment for Nd-Fe-B rare-earth permanent magnet device, is characterized in that: described the admixture plates the film equipment comprises vacuum film coating chamber, cylinder negative electrode magnetic control target, planar cathode magnetic control target, cathodic multi arc ion plating target, anode-layer-linear ion source, pivoted frame and charging basket; Described vacuum film coating chamber is made up of horizontal vacuum housing, Qianmen and bonnet, Qianmen and vaccum case pass through rubber seal rings for seal, bonnet or be welded on vaccum case or by connector connects, large pivoted frame design is indoor in vacuum coating, by rotating shaft support, on framework, frame installation is on vaccum case; The large axis of pivoted frame and the axis of vaccum case are parallel, on large pivoted frame, 3 little pivoted frames are installed, the axis of little pivoted frame is parallel with the axis of large pivoted frame, multiple netted charging baskets two ends have rotating shaft to be arranged on little pivoted frame, the axis of rotating shaft is parallel with the axis of little pivoted frame, large pivoted frame is around the axis revolution of vaccum case, and little pivoted frame revolves round the sun and rotation around the axis of large pivoted frame, and netted charging basket revolves round the sun also along with little pivoted frame revolves round the sun and rotation with large pivoted frame; Described cylinder negative electrode magnetic control target is arranged on the indoor bonnet of vacuum coating, and cylinder negative electrode magnetic control target is positioned at the inside of pivoted frame, axis and turret shaft line parallel, and described cylinder negative electrode magnetic control target arranges more than one; Described planar cathode magnetic control target is arranged on vaccum case, is distributed in the periphery of pivoted frame.
2. the admixture plates the film equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: the magnet ring that multiple axial chargings are housed in described cylinder negative electrode magnetic control target, between magnet ring, there is magnetic guiding loop, magnet ring moves with respect to cylinder negative electrode magnetic control target axial reciprocating, and described magnet ring is manufactured by Nd-Fe-B rare-earth permanent magnet.
3. the admixture plates the film equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: the magnetic stripe that many radial magnetizings are housed in described cylinder negative electrode magnetic control target, magnetic stripe in cylinder negative electrode magnetic control target along circle distribution, between magnetic stripe, there is interval, the quantity of magnetic stripe is more than 3 or 3, magnetic stripe is with respect to cylinder negative electrode magnetic control target sleeve pipe coaxial rotation, and described magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet.
4. the admixture plates the film equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: in described planar cathode magnetic control target, be provided with run-track shaped annular magnetic stripe, magnetic stripe is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is more than one.
5. the admixture plates the film equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, it is characterized in that: described cathodic multi arc ion plating target is arranged on vaccum case, be distributed in the periphery of pivoted frame, described cathodic multi arc ion plating target is rectangle or circle, inside is provided with magnet, magnet is manufactured by Nd-Fe-B rare-earth permanent magnet, and by water quench, quantity is more than one.
6. the admixture plates the film equipment of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 1, is characterized in that: described anode-layer-linear ion source is arranged on vaccum case, is distributed in the periphery of pivoted frame.
7. the admixture plates the film equipment of a kind of horizontal Nd-Fe-B rare-earth permanent magnet device according to claim 1, is characterized in that: the indoor heater that is provided with of described vacuum coating, heating-up temperature scope is at 100-600 DEG C.
8. the manufacture method of a Nd-Fe-B rare-earth permanent magnet device, it is characterized in that: first carry out alloy melting, under molten condition by alloy casting to being with cooling formation alloy sheet on water-cooled rotation copper roller, follow involutory gold plaque and carry out hydrogen fragmentation, batch mixing and airflow milling, after airflow milling under nitrogen protection with delivering to nitrogen protection magnetic field orientating press-molding after batch mixer batch mixing, after shaping, in guard box, after encapsulation, wait static pressure, send into afterwards agglomerating plant sintering and timeliness and make Nd-Fe-B rare-earth permanent magnet magnet, carry out afterwards machining and make Nd-Fe-B rare-earth permanent magnet device, afterwards at the indoor the admixture plates the film that Nd-Fe-B rare-earth permanent magnet device is carried out to magnetron sputtering plating and multi-arc ion coating of vacuum coating, plated film is divided into 3 layers, ground floor is magnetron sputtering coating, thickness of coating is: 0.02-5 μ m, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, thickness of coating is: 1-10 μ m, the 3rd layer is magnetron sputtering coating, thickness of coating is: 0.1-5 μ m.
9. the manufacture method of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 8, it is characterized in that: described the admixture plates the film belongs to physical vapour deposition (PVD), magnetic control film coating material is Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, Ti, Mo, Si, stainless steel, Al
2o
3, one in ZrO, AZO, the mixing coating of described magnetron sputtering and arc evaporation, Coating Materials is Al, Ti, Mo, Si, stainless steel, Al
2o
3, more than one in ZrO, ITO, AZO.
10. the manufacture method of a kind of Nd-Fe-B rare-earth permanent magnet device according to claim 8, it is characterized in that: the indoor anode-layer-linear ion source that is provided with of described vacuum coating, described magnetron sputtering plating condition is, 30 ~ 600 DEG C of temperature, deposition pressure is 0.1 ~ 1Pa under argon gas condition, power density is 1 ~ 20w/cm2, discharge voltage 100 ~ the 3000V of linear ion source, ion energy 100 ~ 2000eV, operating air pressure 0.01 ~ 1Pa under argon gas condition adopts magnetron sputtering plating and multi-arc ion plating film separately, alternately or carry out work simultaneously in described filming process.
The manufacture method of 11. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 8, it is characterized in that: before described filming process, also have sandblast operation, sandblast adopt material be quartz, glass microballoon, aluminium oxide, cerium oxide, lanthana, cerium oxide and lanthana mixture, zirconic more than one, before filming process or to also have spraying process, sprayed on material be aluminium or containing the one in compound, the electrophoretic paint of aluminium.
The manufacture method of 12. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 8, is characterized in that: in described filming process, control in addition the device heats operation of coating process, temperature range is at 100-600 DEG C.
The manufacture method of 13. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 8, is characterized in that: after described filming process, also have heat treatment step, heat treatment temperature 60-900 DEG C.
The manufacture method of 14. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 8, it is characterized in that: described the admixture plates the film operation, plated film is divided into 3 layers, ground floor is magnetron sputtering coating, coating is the one in Al, Dy-Al, Tb-Al, Dy-Fe, Tb-Fe, the second layer is the mixing coating of magnetron sputtering and multi-arc ion coating, and coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO, the 3rd layer is magnetron sputtering coating, coating is Al, Ni-Cr, Ti, Mo, Si, Al
2o
3, ZrO
2, more than one in AZO.
The manufacture method of 15. a kind of Nd-Fe-B rare-earth permanent magnet devices according to claim 8, it is characterized in that: described a kind of Nd-Fe-B rare-earth permanent magnet device extends internally from device surface, and main phase grain, the content of heavy rare earth is higher than the content of heavy rare earth in crystal grain principal phase within the scope of 1mm, and the heavy rare earth that content is high is distributed in principal phase R
2t
14the periphery of B, forms RH
2t
14b surrounds R
2t
14the new principal phase structure of B, RH
2t
14b phase and R
2t
14b is alternate with Grain-Boundary Phase.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3020848A1 (en) * | 2014-11-05 | 2016-05-18 | Yantai Shougang Magnetic Materials Inc. | A vacuum coating device for surface coating of small sized nd-fe-b magnets and a corresponding vacuum coating method |
| CN106198366A (en) * | 2016-06-23 | 2016-12-07 | 宁波国际材料基因工程研究院有限公司 | A kind of screening technique of high flux soft magnetic materials surface anticorrosion layer |
| CN108950503A (en) * | 2018-07-30 | 2018-12-07 | 山西金山磁材有限公司 | A kind of sintered NdFeB plated film and its technique for vacuum coating |
| CN110582590A (en) * | 2017-04-07 | 2019-12-17 | 应用材料公司 | plasma chamber target for reducing defects in workpieces during dielectric sputtering |
| CN112746260A (en) * | 2020-12-30 | 2021-05-04 | 湖南柯盛新材料有限公司 | Process for manufacturing rotary target material by cold spraying and production equipment thereof |
| CN113838660A (en) * | 2021-11-25 | 2021-12-24 | 天津三环乐喜新材料有限公司 | Vacuum coating equipment and method for surface protection of neodymium iron boron rare earth permanent magnet device |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1073036A (en) * | 1991-11-27 | 1993-06-09 | 日立金属株式会社 | Corrosion proof rare earth element/transition metal series permanent magnet and manufacture method thereof have been improved |
| CN2254448Y (en) * | 1996-02-07 | 1997-05-21 | 郑德恩 | Multiarc-magnetic control sputter vacuum ion goldplating equipment |
| JP2000012366A (en) * | 1998-06-23 | 2000-01-14 | Matsushita Electric Ind Co Ltd | Manufacture of soft magnetic film |
| CN101373650A (en) * | 2007-08-23 | 2009-02-25 | 北京中科三环高技术股份有限公司 | Surface pretreating method of dry method spray sand type neodymium iron boron permanent magnetic material |
| CN101619443A (en) * | 2009-07-27 | 2010-01-06 | 浙江工业大学 | High-efficiency film coating machine for solar thermal-collecting tubes |
| CN102041506A (en) * | 2009-10-13 | 2011-05-04 | 北京中科三环高技术股份有限公司 | Surface treatment method of permanent magnet material |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN103820766A (en) * | 2014-03-22 | 2014-05-28 | 沈阳中北真空设备有限公司 | Magnetron coating apparatus for neodymium-iron-boron rare-earth permanent magnet devices, and manufacturing method thereof |
| CN103820765A (en) * | 2014-03-22 | 2014-05-28 | 沈阳中北真空设备有限公司 | Composite coating equipment and manufacturing method for neodymium iron boron rare-earth permanent magnetic device |
| CN103854819A (en) * | 2014-03-22 | 2014-06-11 | 沈阳中北通磁科技股份有限公司 | Hybrid film coating method of neodymium iron boron rare earth permanent magnet device |
-
2014
- 2014-03-22 CN CN201410107545.2A patent/CN103839641B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1073036A (en) * | 1991-11-27 | 1993-06-09 | 日立金属株式会社 | Corrosion proof rare earth element/transition metal series permanent magnet and manufacture method thereof have been improved |
| CN2254448Y (en) * | 1996-02-07 | 1997-05-21 | 郑德恩 | Multiarc-magnetic control sputter vacuum ion goldplating equipment |
| JP2000012366A (en) * | 1998-06-23 | 2000-01-14 | Matsushita Electric Ind Co Ltd | Manufacture of soft magnetic film |
| CN101373650A (en) * | 2007-08-23 | 2009-02-25 | 北京中科三环高技术股份有限公司 | Surface pretreating method of dry method spray sand type neodymium iron boron permanent magnetic material |
| CN101619443A (en) * | 2009-07-27 | 2010-01-06 | 浙江工业大学 | High-efficiency film coating machine for solar thermal-collecting tubes |
| CN102041506A (en) * | 2009-10-13 | 2011-05-04 | 北京中科三环高技术股份有限公司 | Surface treatment method of permanent magnet material |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN103820766A (en) * | 2014-03-22 | 2014-05-28 | 沈阳中北真空设备有限公司 | Magnetron coating apparatus for neodymium-iron-boron rare-earth permanent magnet devices, and manufacturing method thereof |
| CN103820765A (en) * | 2014-03-22 | 2014-05-28 | 沈阳中北真空设备有限公司 | Composite coating equipment and manufacturing method for neodymium iron boron rare-earth permanent magnetic device |
| CN103854819A (en) * | 2014-03-22 | 2014-06-11 | 沈阳中北通磁科技股份有限公司 | Hybrid film coating method of neodymium iron boron rare earth permanent magnet device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3020848A1 (en) * | 2014-11-05 | 2016-05-18 | Yantai Shougang Magnetic Materials Inc. | A vacuum coating device for surface coating of small sized nd-fe-b magnets and a corresponding vacuum coating method |
| US10208376B2 (en) | 2014-11-05 | 2019-02-19 | Yantai Shougang Magnetic Materials Inc. | Apparatus and method for coating of small Nd-Fe-B magnets |
| CN106198366A (en) * | 2016-06-23 | 2016-12-07 | 宁波国际材料基因工程研究院有限公司 | A kind of screening technique of high flux soft magnetic materials surface anticorrosion layer |
| CN110582590A (en) * | 2017-04-07 | 2019-12-17 | 应用材料公司 | plasma chamber target for reducing defects in workpieces during dielectric sputtering |
| CN108950503A (en) * | 2018-07-30 | 2018-12-07 | 山西金山磁材有限公司 | A kind of sintered NdFeB plated film and its technique for vacuum coating |
| CN112746260A (en) * | 2020-12-30 | 2021-05-04 | 湖南柯盛新材料有限公司 | Process for manufacturing rotary target material by cold spraying and production equipment thereof |
| CN112746260B (en) * | 2020-12-30 | 2023-02-28 | 湖南柯盛新材料有限公司 | Process for manufacturing rotary target material by cold spraying and production equipment thereof |
| CN113838660A (en) * | 2021-11-25 | 2021-12-24 | 天津三环乐喜新材料有限公司 | Vacuum coating equipment and method for surface protection of neodymium iron boron rare earth permanent magnet device |
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