CN207958490U - The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method - Google Patents
The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method Download PDFInfo
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- CN207958490U CN207958490U CN201820332172.2U CN201820332172U CN207958490U CN 207958490 U CN207958490 U CN 207958490U CN 201820332172 U CN201820332172 U CN 201820332172U CN 207958490 U CN207958490 U CN 207958490U
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Abstract
The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method, including vacuum covering room, with mounted on the indoor magnetic controlled sputtering target pole of vacuum covering, vacuum covering indoor location has transmission mechanism, the carrier or loading plate for carrying workpiece to be coated are provided on transmission mechanism, the magnetic controlled sputtering target pole is arranged in the top of transmission mechanism.The utility model provides a kind of vacuum magnetic control coating equipment making Nd-Fe-B permanent magnetic for heavy rare earth diffusion method.The target of magnetic controlled sputtering target pole is made of heavy rare earth material, target can at the uniform velocity be rotated around 360 ° of the central axis of pipe, the heavy rare earth material on target is set uniformly to be etched, by select magnetic controlled sputtering target interpolar appropriate away from or the tempo that moves back and forth of transmission mechanism, magnet to be coated can be controlled in target extremely lower coating heated heating-up time and uncoated radiating and cooling time accounting, solve continuously to coat excessively high problem of temperature rise for a long time.
Description
Technical field
The utility model category is related to vacuum magnetic-control sputtering paint-on technique field, is related to a kind of for the making of heavy rare earth diffusion method
The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic.
Background technology
Vacuum magnetic control coating equipment is capital equipment used by industry coating production, by the extremely outer setting weight of magnetic control target
Heavy rare earth material is coated in magnet surface to be coated by the target that rare earth material makes.
Nd-Fe-B permanent magnet in New-energy electric vehicle, wind-force due to the characteristics such as high-coercive force and high energy product, sending out
The many such as electric magneto, permanent magnetism elevator traction machine, energy saving household electrical appliances permanent magnet frequency conversion motor, hollow cup permanent magnetic micro machine, unmanned plane
Field is used for making magneto, realizes the purpose for reducing energy consumption.The traditional manufacturing technique of neodymium iron boron is in order to realize this magnetic energy
The requirement of product and coercivity " double height " must use a large amount of heavy rare earth element such as dysprosium (Dy), terbium (Tb), and dysprosium, terbium price
Costliness, therefore the cost of manufacture of Nd-Fe-B permanent magnet is greatly improved
In recent years, the usage amount for reducing dysprosium or terbium using heavy rare earth grain boundary decision method has been developed, and has improved neodymium iron
The intrinsic coercivity (abbreviation Hcj) of boron permanent magnet.This heavy rare earth grain boundary decision method is coated in neodymium firstly the need of dysprosium or terbium
In iron boron permanent magnet surfaces, later again on surface dysprosium or terbium penetrate into Nd-Fe-B permanent magnetic along the crystal boundary of Nd-Fe-B permanent magnet
In body.It is coated in the method on surface of Nd-Fe-B permanent magnet by dysprosium or terbium, due to vacuum magnetic-control sputtering mode and other paintings
It covers mode (such as dip-coating, roller coating, spraying, brushing, vapor deposition) to compare, uniformity, the binding force of coat are best, Neng Goubao
Hinder the consistency and stability of product, and in comparison production efficiency and production cost also have comprehensive advantage.Existing vacuum
Magnetron sputtering apparatus even has the following disadvantages：
1, such coating thickness in neodymium iron boron surface coating heavy rare earth technological requirement is up to 5~40um, and is splashed using magnetic control
When jet device coats heavy rare earth Dy or Tb to the surface of Nd-Fe-B permanent magnet, under the premise of meeting the various quality requirements of coat,
The deposition rate of single target pole is relatively low, then coating layer thickness will reach technological standards, then need for a long time magnetic control target extremely under
Continuous coating.In order to ensure the production requirement amount of Nd-Fe-B permanent magnetic coating, usually everybody takes configures a plurality of target in coating room
Extremely solve.
It is known in the art that the energy in magnetron sputtering process, is greatly converted to heat, then configuring a plurality of target pole
The temperature in equipment will certainly be made to rise aggravation, equipment spacing on the arrangement of target pole is smaller at present, when needing long along with sputtering
Between carry out, and magnetron sputtering process is to carry out under vacuum, and heat dissipation is again very slow, and it is excessively high that this results in coating Indoor Temperature to rise.
The raising of coating indoor temperature makes the temperature of the magnet-Nd-Fe-B permanent magnet continuously coated increase rapidly therewith, such as existing
There is equipment some after continuous coating for a long time, the temperature of Nd-Fe-B permanent magnet can be increased to 200 DEG C or more, may be increased to
Close to 300 DEG C.Such temperature, which rises result, has two aspects to influence：On the one hand the combination of coat and neodymium iron boron magnetic body matrix can be influenced
Power, the magnetic property of product is unstable after causing heavy rare earth to spread；Another aspect temperature is higher, may more cause neodymium iron boron magnetic body sheet
The domain wall of body changes the risk reduced so as to cause magnetic property.In order to not only can guarantee output, but also problem of temperature rise can be solved,
The means that usual existing equipment is taken are the process times of gradation coating procedure, and special cooling is provided in the configuration of equipment
Room.Such as coating layer thickness will reach 10um and need continuous sputtering about 40 minutes or more originally, then sputtering about after twenty minutes
The cooling chamber that inert gas shielding is just gone to from vacuum covering room is cooled down, and is then reentered from cooling chamber and is expected vacuum covering
Room continues to coat, and completes technological standards, this results in coating procedure that cannot be carried out continuously always, must be added in coating procedure
Cool link, reduces equipment capacity, increases production complexity, also increases production cost.
2, such target pole material (abbreviation target) used in the technique of neodymium iron boron surface coating heavy rare earth belongs to price
Expensive heavy rare earth Dy or Tb, the target utilization of existing equipment is relatively low (between 20~40%), although remaining target can
To carry out remelting recycling after dismounting, but remelting newly can generate processing charges and form about 2~5% loss, lead to target
Material consume is more, cost increases；Simultaneously as the target utilization of existing equipment is relatively low, stops production and change the frequency increase of target, often
The secondary target that changes is required for dismounting target pole, new clothes target pole, vacuumizes again, reaches eligible state (row to the progress surface removal of impurities of new target pole
Flow in industry referred to as " burning target "), this flow the whole series, which operates, needs the long period, then the effective time of equipment is just
Can reduce (such as the equipment that existing day coated weight is 500 kilograms of neodymium iron boron magnetic bodies, monthly changing within 30 days target leads to the time to stop production extremely
It is 4 days few).
3, each target pole needs one power supply of corresponding configuration to work, and existing equipment is in order to ensure that yield is realized, configuration
Target it is extremely more, then power configuration general power increase, equipment Wen Sheng is also with regard to bigger, in order to solve equipment problem of temperature rise, no
The cooling chamber configured with the continuous productive process that is connected with coating room is merely had to, technological process is complicated, and the vacuum for obtaining vacuum
Unit is also more with regard to corresponding configuration, this is resulted in, and power consumption when production increases, the production cost increases.
Utility model content
The purpose of this utility model is that in the prior art, equipment temperature increases problem, coats asking for low production efficiency
Topic, provides a kind of follow-on vacuum coating installation, which changes painting in the prior art by the way of back and forth coating
Mode is covered, production cost can be reduced with the Wen Sheng of control device.
In order to achieve the goal above, the following technology contents of the utility model offer are：
The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic, including vacuum covering room, and peace are made for heavy rare earth diffusion method
Mounted in the indoor magnetic controlled sputtering target pole of vacuum covering, the vacuum covering indoor location has transmission mechanism, is arranged on transmission mechanism
It is useful for carrying the carrier or loading plate of magnet to be coated, the magnetic controlled sputtering target pole is arranged in the top of transmission mechanism.
As preferred：The quantity of carrier or loading plate is consistent with vacuum covering indoor location magnetic controlled sputtering target number of poles.
As preferred：Spacing between the adjacent magnetic controlled sputtering target pole of any two is equal and is more than carrier to be coated
Or loading plate length.
As preferred：The transmission mechanism is reciprocating transmission mechanism, including live-roller, control live-roller forward and reverse rotation
Clockwise and anticlockwise motor and indoor for detecting the limit switches of coated magnet positions mounted on vacuum covering.
As preferred：Vacuum covering room side is provided with vacuum valve, for carrying the carrier of magnet to be coated or holding
Support plate passes in and out.
As preferred：Vacuum coating installation further comprises that motor, the target of the magnetic controlled sputtering target pole use tubulose knot
Structure, and connect with motor, to control the target rotation of magnetic controlled sputtering target pole.
The beneficial effects of the utility model are：
(1) the utility model provide it is a kind of for heavy rare earth diffusion method make Nd-Fe-B permanent magnetic vacuum magnetic control painting cover
It is standby.Magnetic controlled sputtering target pole is made using heavy rare earth material, for target using tubular structure and rotatable, the utilization rate of target is reachable
70% or more, to reduce residual target ratio, reduces recycling residual target remelting ratio and remelting processing charges, realize
Extension target usage time, has reached increase whole equipment effective time purpose, and then can increase the production of equipment
Efficiency and production capacity.
(2) by configuring the spacing of adjacent magnetic controlled sputtering target pole, multiple magnetic controlled sputtering target poles can be effectively ensured not
Intermittent execution coating work, by select magnetic controlled sputtering target interpolar appropriate away from or the beat speed that moves back and forth of transmission mechanism
Degree can control magnet to be coated and extremely coat be heated heating-up time and uncoated radiating and cooling time accounting down in target, so as to
Control the Wen Sheng of magnet to be coated.It solves continuously to coat excessively high problem of temperature rise for a long time.
(3) by designing reciprocating transmission mechanism, the mode back and forth coated is realized, vacuum covering room is designed as unilateral disengaging
Mode, this reciprocal coating, unilateral disengaging mode be conducive to reduce the volume of vacuum coating installation entirety, improve target
Coating efficiency.Meanwhile the mode of single-ended disengaging is compared with the mode that both-end passes in and out, it is possible to reduce the height needed for the vacuum chamber of both ends
The quantity of power consumption oil-sealed rotary pump reduces electricity consumption and production cost.
Description of the drawings
Fig. 1 is the utility model vacuum magnetic control coating apparatus structure schematic diagram；
Fig. 2 is the utility model vacuum magnetic control coating apparatus structure schematic diagram.
Wherein：1- vacuum coverings room, 101- vacuum valves, 2- magnetic controlled sputtering targets pole, 3- live-rollers, the limit of 4- bilaterals are opened
It closes, 5- carriers, 6- magnets to be coated, 7- vacuum pumps, 8- molecular pumps, 9- pneumatic stopping valves, 10- filters.
Specific implementation mode
The specific implementation mode of the present invention is clearly fully described by below with reference to attached drawing.Obviously, it is embodied
Mode described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based in the present invention
Embodiment, the every other embodiment that those of ordinary skill in the art are obtained without making creative work,
Belong to protection scope of the present invention.
The utility model provides a kind of vacuum magnetic control coating equipment making Nd-Fe-B permanent magnetic for heavy rare earth diffusion method,
The equipment can be used for heavy rare earth diffusion method making sintered NdFeB permanent magnet and be used, and existing vacuum coating installation can be overcome to send out
Hot disadvantage high, target pole utilization rate is low, improves coating quality.
The present embodiment is for elements such as Nd-Fe-B permanent magnet coating dysprosium (Dy), terbiums (Tb), to illustrate that vacuum magnetic control applies
The structure and coating principle of coating equipment.
The vacuum magnetic control coating equipment that Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method, with reference to figure 1, including vacuum covering
Room 1, vacuum covering room 1 are connected with vacuum pump 7, molecular pump 8 etc., for carrying out vacuumize process to vacuum chamber.Vacuum covering room 1
It is also associated with pneumatic stopping valve 9 and filter 10, for being filtered to vacuum indoor exhaust.1 side of vacuum covering room has very
Empty valve 101, for carrying carrier or the loading plate disengaging of magnet to be coated, other several side walls are closed structure.
With reference to figure 2, magnetic controlled sputtering target pole 2 is installed in vacuum chamber 1, is provided in vacuum covering room 1 reciprocating
Transmission mechanism, in the present embodiment, transmission mechanism uses live-roller 3, and entire transmission mechanism is by more 3 structures of spaced live-roller
At in order to allow live-roller 3 to move back and forth, live-roller 3 connects clockwise and anticlockwise motor, when clockwise and anticlockwise motor rotates forward, live-roller 3
It is rotated towards direction one, when clockwise and anticlockwise motor inverts, live-roller 3 is rotated towards the direction opposite with direction one.It is arranged on live-roller 3
It is useful for carrying the carrier or loading plate of magnet to be coated, in the present embodiment, using carrier 5, carrier 5 is placed in live-roller
On 3, magnet to be coated is placed on carrier 5, in this way, magnet to be coated can be moved back and forth with live-roller 3 is forward and reverse.
Further, it is equipped with to detect the bilateral limit switch 4 of 5 position of carrier in vacuum covering room 1.Its
In, the effect of limit switch 4 is limiting stroke of the carrier 5 in vacuum covering room 1.It is opened when carrier 5 moves to limit
When closing 4 position, live-roller 3 will change the direction of rotation.
Magnetic controlled sputtering target pole 2 is located at the top of live-roller 3.
Based on the above structure, magnet to be coated may be implemented and moved back and forth in vacuum covering room 1, each magnet to be coated
When by magnetic controlled sputtering target pole 2, so that it may to complete primary coating work.Vacuum magnetic control coating equipment is compared more in the prior art,
It no longer needs that revolution conveyer system is arranged in vacuum covering outdoor, is conducive to the overall volume for reducing coating equipment and simplification is set
Standby structure.
Further, in order to improve the utilization rate of coating material, vacuum coating installation further comprises motor, the magnetic
The target for controlling sputtering target pole uses tubular structure, and is connect with motor, to control the target rotation of magnetic controlled sputtering target pole.Magnetic control splashes
The magnetic system shot at the target inside pole 2 is static, and target can at the uniform velocity be rotated around 360 ° of the central axis of pipe, make the heavy rare earth on target
Dy or Tb materials are uniformly etched.After tested, the utilization rate of rotary target pole can reach 70% or more, reduce residual target
Ratio, and then the expense of recycling residual target remelting processing can be reduced.
In order to further increase efficiency, the painting of multigroup carrier or loading plate can be carried out at the same time in vacuum covering room 1
It covers, it is thus only necessary to which interval is equipped with multiple magnetic controlled sputtering target poles 2 in vacuum covering room 1, carrier or loading plate to be coated
Quantity is consistent with vacuum covering indoor location magnetic controlled sputtering target number of poles, between the adjacent magnetic controlled sputtering target pole 2 of any two
Spacing is more than carrier or loading plate length.In general, 2 to 6 magnetic controlled sputtering target poles may be used, multiple magnetic controlled sputtering target poles are adopted
With equidistant placement, by select magnetic controlled sputtering target interpolar appropriate away from or the tempo that moves back and forth of transmission mechanism, can be with
Magnet to be coated is controlled in target extremely lower coating heated heating-up time and uncoated radiating and cooling time accounting, to controllable to be coated
Cover the Wen Sheng of magnet.
Vacuum coating installation mechanism provided by the invention is compact, and floor space is small, compared with the prior art, can greatly carry
High coating efficiency.
Claims (6)
1. making the vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic, including vacuum covering room for heavy rare earth diffusion method, and installation
In the indoor magnetic controlled sputtering target pole of vacuum covering, it is characterised in that：The vacuum covering indoor location has transmission mechanism, driver
The carrier or loading plate for carrying workpiece to be coated are provided on structure, the magnetic controlled sputtering target pole is arranged in transmission mechanism
Top.
2. the vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method as described in claim 1, it is special
Sign is：The quantity of carrier or loading plate to be coated is consistent with vacuum covering indoor location magnetic controlled sputtering target number of poles.
3. the vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method as claimed in claim 2, it is special
Sign is：Spacing between the adjacent magnetic controlled sputtering target pole of any two is equal and is more than carrier or loading plate to be coated
Length.
4. the vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method as described in claim 1, it is special
Sign is：The transmission mechanism is reciprocating transmission mechanism, including live-roller, the clockwise and anticlockwise motor for controlling the forward and reverse rotation of live-roller
And mounted on the indoor limit switch for detecting the coated location of workpiece of vacuum covering.
5. the vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method as claimed in claim 4, it is special
Sign is：Vacuum covering room side is provided with vacuum valve, so that workpiece to be coated passes in and out.
6. the vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method as described in claim 1, it is special
Sign is：Vacuum magnetic control coating equipment further comprises motor, and the target of the magnetic controlled sputtering target pole uses tubular structure, and with
Motor connects, to control the target rotation of magnetic controlled sputtering target pole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820332172.2U CN207958490U (en) | 2018-03-09 | 2018-03-09 | The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820332172.2U CN207958490U (en) | 2018-03-09 | 2018-03-09 | The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method |
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|---|---|
| CN207958490U true CN207958490U (en) | 2018-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820332172.2U Expired - Fee Related CN207958490U (en) | 2018-03-09 | 2018-03-09 | The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method |
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| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020133343A1 (en) * | 2018-12-29 | 2020-07-02 | 三环瓦克华（北京）磁性器件有限公司 | Coating device and coating method |
-
2018
- 2018-03-09 CN CN201820332172.2U patent/CN207958490U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020133343A1 (en) * | 2018-12-29 | 2020-07-02 | 三环瓦克华（北京）磁性器件有限公司 | Coating device and coating method |
| US11920236B2 (en) | 2018-12-29 | 2024-03-05 | Sanvac (Beijing) Magnetics Co., Ltd. | Coating machine and coating method |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181012 Termination date: 20190309 |